Femtosecond laser direct writing equipment (FemtoXLAB)
CN310018907SActive Publication Date: 2026-06-05WUXI PHOTONIC CHIP JOINT RES CENT
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- WUXI PHOTONIC CHIP JOINT RES CENT
- Filing Date
- 2025-09-30
- Publication Date
- 2026-06-05
Smart Images
Figure 000007_ABST
Abstract
1. The name of the design product: FemtoX LAB. 2. The use of the design product: It is a laser direct writing equipment, mainly used for processing brittle materials, such as the development and production of glass three-dimensional optical waveguide, glass via, silicon via, etc. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view 1.
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