Inner tube of reaction tube for semiconductor manufacturing equipment
CN310063017SActive Publication Date: 2026-06-30KOKUSAI DENKI KK
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- KOKUSAI DENKI KK
- Filing Date
- 2022-11-28
- Publication Date
- 2026-06-30
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Figure 000007_ABST
Abstract
1. Name of the product in this design: Inner tube of a reaction tube for a semiconductor manufacturing apparatus. 2. Purpose of this design: This product is an inner tube installed inside the reaction tube used in semiconductor manufacturing equipment. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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