Inner tube of reaction tube for semiconductor manufacturing equipment

CN310063017SActive Publication Date: 2026-06-30KOKUSAI DENKI KK

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
KOKUSAI DENKI KK
Filing Date
2022-11-28
Publication Date
2026-06-30

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Abstract

1. Name of the product in this design: Inner tube of a reaction tube for a semiconductor manufacturing apparatus. 2. Purpose of this design: This product is an inner tube installed inside the reaction tube used in semiconductor manufacturing equipment. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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