Micromechanical component

Abstract

Micromechanical component (1), wherein the micromechanical component (1) comprises a deflection device (5) that can be deflected parallel to a deflection direction (101), wherein the micromechanical component (1) comprises a damping device (7), characterized in that a surface (200) of the deflection device (5) facing the damping device (7) is larger than a cross-sectional surface (300) of the deflection device (5) arranged perpendicular to the deflection direction (101) and in a region (11) of the deflection device (5) facing away from the damping device (7), wherein a further surface (201) of the damping device (7) facing the deflection device (5) is larger than a further cross-sectional surface (301) of the damping device (7) arranged perpendicular to the deflection direction (101) and in a further region (12) of the damping device (7) facing away from the deflection device (5).

Description

State of the art

[0001] The invention is based on a micromechanical component according to the preamble of claim 1.

[0002] Such a micromechanical component is generally known. During operation of the micromechanical component, damping forces act on the deflection device and the damping device, with the damping forces influencing the deflection of the deflection device along the deflection direction.

[0003] Further micromechanical components are known from the documents DE 10 2007 052 ​​367 A1, DE 602 20 746 T2, US 4 778 028 A, DE 10 2013 212 059 A1 and DE 10 2013 222 747 A1. Disclosure of the invention

[0004] It is an object of the present invention to provide a space-saving, durable and resource-saving micromechanical component in a simple and cost-effective manner compared to the prior art.

[0005] The object is achieved in that a surface of the deflection device facing the damping device is larger than a sectional surface of the deflection device arranged perpendicular to the deflection direction and arranged in a region of the deflection device facing away from the damping device.

[0006] This advantageously makes it possible to provide a micromechanical component with a surface facing the damping device and which is larger than the prior art, in particular without significantly altering the deflection device. By increasing the surface, the damping forces acting between the deflection device and the damping device can be specifically adjusted, in particular increased. This advantageously makes it possible to avoid or significantly reduce, for example, mechanical clipping. In other words, the present invention can be used to provide a micromechanical component with increased clipping performance compared to the prior art.Furthermore, because the surface area is larger than the cross-sectional area, it is advantageously possible to provide a large surface area while simultaneously providing a particularly lightweight and material-saving design for the micromechanical component. Furthermore, the micromechanical component according to the invention advantageously makes it possible to provide particularly large damping forces on a comparatively small substrate area. Thus, the present invention provides a space-saving, durable, and resource-conserving micromechanical component in a simple and cost-effective manner compared to the prior art.

[0007] In the context of the present invention, the term "micromechanical component" is to be understood as encompassing both micromechanical components and microelectromechanical components. The micromechanical component according to the invention preferably comprises a rotation rate sensor or a sensor core for measuring a rotation rate applied to the micromechanical component. Alternatively or additionally, the micromechanical component according to the invention preferably comprises an acceleration sensor or a sensor core for measuring an acceleration applied to the micromechanical component.

[0008] Preferably, the deflection device comprises a seismic mass or a Coriolis mass.

[0009] Furthermore, the deflection device is preferably attached to a substrate of the micromechanical component by means of springs and substrate connections, particularly preferably deflectable along the deflection direction. Furthermore, the damping device is preferably attached to the substrate of the micromechanical component by means of further springs and further substrate connections, particularly preferably deflectable along the deflection direction.

[0010] Furthermore, the damping forces preferably result from ambient damping, with ambient damping occurring in particular when the system or the deflection device and / or the damping device oscillate not in a vacuum, but in a medium surrounding the deflection device and the damping device. According to the invention, the medium is preferably in motion and / or the medium is at rest. Particularly preferably, the damping forces result from hydrodynamic damping in a moving medium and / or from hydrostatic friction in a stationary medium. Furthermore, the medium, together with the deflection device and the damping device, is preferably arranged in a cavity of the micromechanical component.

[0011] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings.

[0012] According to a preferred development, an extension of the surface perpendicular to a main extension plane of a substrate of the micromechanical component, said extension plane running parallel to the deflection direction, is greater than an extension of the cut surface perpendicular to the main extension plane. This advantageously enables the enlargement of the surface with the aid of an additional layer. Thus, an enlarged surface compared to the prior art can advantageously be achieved on a substrate area that is essentially the same or smaller than the prior art. This provides a particularly space-saving micromechanical component in a simple manner.

[0013] According to a preferred development, an extension of the surface parallel to a main extension plane of a substrate of the micromechanical component, said extension plane running parallel to the deflection direction, is greater than an extension of the cut surface parallel to the main extension plane. This advantageously makes it possible to realize an enlargement of the surface within a layer. Thus, in an advantageous manner, a surface that is enlarged compared to the prior art can be achieved with a thickness of one or more layers that is comparable to or less than the prior art. This easily provides a particularly space-saving micromechanical component that is in particular flat or has a small extension perpendicular to the main extension plane compared to the prior art.

[0014] According to the invention, a further surface of the damping device facing the deflection device is larger than a further sectional surface of the damping device arranged perpendicular to the deflection direction and arranged in a further region of the damping device facing away from the deflection device. This advantageously makes it possible to provide a micromechanical component with a further surface facing the deflection device and which is larger than in the prior art, in particular without significantly changing the damping device. By enlarging the further surface, the damping forces acting between the deflection device and the damping device can be specifically adjusted, in particular increased. This advantageously makes it possible to avoid or significantly reduce, for example, mechanical clipping.Furthermore, the fact that the additional surface is larger than the additional cut surface advantageously makes it possible to provide a large additional surface while simultaneously achieving a particularly lightweight and material-saving design for the micromechanical component. This advantageously provides a durable, space-saving, and resource-efficient micromechanical component compared to the state of the art in a simple and cost-effective manner.

[0015] According to a preferred development, an extension of the further surface perpendicular to a main extension plane of a substrate of the micromechanical component, said main extension plane running parallel to the deflection direction, is greater than an extension of the further cut surface perpendicular to the main extension plane. This advantageously enables the enlargement of the further surface with the aid of an additional layer. Thus, an additional surface that is enlarged compared to the prior art can advantageously be achieved on a substrate area that is essentially the same or smaller than the prior art. This provides a particularly space-saving micromechanical component in a simple manner.

[0016] According to a preferred development, an extension of the further surface parallel to a main extension plane of a substrate of the micromechanical component, said main extension plane running parallel to the deflection direction, is greater than an extension of the further cut surface parallel to the main extension plane. This advantageously makes it possible to enlarge the further surface within a layer. Thus, an additional surface that is enlarged compared to the prior art can advantageously be made possible with a thickness of one or more layers that is comparable to or less than the prior art. This easily provides a micromechanical component that is particularly space-saving, in particular flat, or has a small extension perpendicular to the main extension plane compared to the prior art.

[0017] According to a preferred development, the damping device is deflectable parallel to the deflection direction, wherein the micromechanical component is designed such that a deflection of the deflection device along the deflection direction causes a deflection of the damping device counter to the deflection direction. This advantageously enables the micromechanical component to be designed such that the deflection device and the damping device can be deflected substantially antiparallel to one another.In particular, this advantageously makes it possible for the distance between the deflection device and the damping device to be changed to a much greater extent compared to the prior art when the deflection device moves parallel to the deflection direction, in particular without significantly changing the deflection device and / or the damping device, in particular without significantly changing the geometry of the deflection device and / or the geometry of the damping device. Because the deflection device and the damping device can be deflected essentially anti-parallel to one another, the damping forces acting between the deflection device and the damping device can be specifically adjusted, in particular increased. This advantageously makes it possible to avoid or further significantly reduce, for example, mechanical clipping.In addition, this makes it advantageous to provide even greater damping forces on even smaller substrate surfaces.

[0018] According to a preferred development, the micromechanical component is designed such that a first projection of the deflection device onto a main extension plane of a substrate of the micromechanical component, which extends parallel to the deflection direction, and a second projection of the damping device onto the main extension plane overlap. This advantageously enables a particularly space-saving, in particular substrate-area-saving, mechanical coupling of different regions of the deflection device to one another and / or different regions of the damping device to one another.

[0019] According to a preferred development, the damping device comprises a third region and a fourth region that is separate from the third region, preferably galvanically isolated. This advantageously enables the micromechanical component to be designed such that the damping device comprises a first damping element, preferably a damping finger, and a second damping element, preferably a first counterelectrode element, wherein the first damping element is coupled to the third region and the second damping element is coupled to the fourth region. This advantageously enables the first damping element and the second damping element to interact with the deflection device independently, in particular electrically insulated from one another.This advantageously provides a micromechanical component, wherein the micromechanical component comprises a damping device, wherein the damping device comprises both electrically neutral damping elements and electrical damping elements, such as electrodes, either alone or in combination. This enables particularly precise adjustment of the damping forces acting on the deflection device and the damping device.

[0020] According to a preferred development, the damping device comprises a fifth region that is separate, preferably galvanically isolated, from the third region and / or from the fourth region. This advantageously enables the micromechanical component to be designed such that the damping device comprises a first damping element, preferably a damping finder, a second damping element, preferably a first counterelectrode element, and a third damping element, preferably a second counterelectrode element, wherein the first damping element is coupled to the third region, the second damping element is coupled to the fourth region, and / or the third damping element is coupled to the fifth region.This advantageously enables the first damping element and the second damping element and / or the third damping element to interact with the deflection device independently, in particular electrically isolated from one another. This advantageously provides a micromechanical component, wherein the micromechanical component comprises a damping device, wherein the damping device comprises both electrically neutral damping elements and electrical damping elements, such as electrodes, either alone or in combination. This enables particularly precise adjustment of the damping forces acting on the deflection device and the damping device. Short description of the drawings Fig. 1, Fig. 2 and Fig. 3 show schematic representations of micromechanical components according to exemplary embodiments of the present invention. Fig. 4 shows a schematic representation of a damping force as a function of a distance between two structures of a micromechanical component according to an exemplary embodiment of the present invention. Embodiments of the invention

[0021] In the various figures, identical parts are always provided with the same reference symbols and are therefore usually named or mentioned only once.

[0022] In Fig. 1, Fig. 2 and Fig. 3 shows schematic representations of micromechanical components 1 according to exemplary embodiments of the present invention.

[0023] The micromechanical component 1 comprises a deflection device 5 which can be deflected parallel to a deflection direction 101 and a damping device 7. In this case, a surface 200 of the deflection device 5 facing the damping device 7 is preferably larger than a cutting surface 300 of the deflection device 5 which is arranged perpendicular to the deflection direction 101 and arranged in a region 11 of the deflection device 5 facing away from the damping device 7. A projection of the deflection device 5 onto a projection surface running perpendicular to the main extension plane 100 and a projection of the damping device 7 onto the projection surface preferably overlap.

[0024] The micromechanical component 1 preferably comprises a substrate 3 with a main extension plane 100. The main extension plane 100 is preferably arranged parallel to the deflection direction 101. Alternatively, the main extension plane 100 is preferably arranged perpendicular to the deflection direction 101.

[0025] Furthermore, an extension of the surface 200 perpendicular to the main extension plane 100 is preferably greater than an extension of the cutting surface 300 perpendicular to the main extension plane 100. Alternatively or additionally, it is preferably provided that an extension of the surface 200 parallel to the main extension plane 100 is greater than an extension of the cutting surface 300 parallel to the main extension plane 100.

[0026] According to the invention, the deflection device 5 preferably comprises a plurality of mechanically functional planes or layers such that the extension of the surface 200 perpendicular to the main extension plane 100 is greater than an extension of the cutting surface 300 perpendicular to the main extension plane 100. In other words, by means of a suitable manufacturing process, preferably with a plurality of mechanically functional planes, a height h of the deflection device 5 is realized by means of local layer thickness increases - without significantly changing the deflection device 5. This means that a layer thickness h1 preferably prevails in large regions of the deflection device 5 or the deflection device 5 comprises a layer thickness h1, preferably perpendicular to the main extension plane 100, and a greater layer height h2 prevails orthe deflection device 5 comprises a greater layer thickness h2, preferably perpendicular to the main extension plane 100. Preferably, the greater layer thickness h2 is more than twice, preferably more than three times, and most preferably more than four times, as large as the layer thickness h1.

[0027] Furthermore, a further surface 201 of the damping device 7 facing the deflection device 5 is preferably larger than a further cut surface 301 of the damping device 7 arranged perpendicular to the deflection direction 101 and arranged in a further region 12 of the damping device 7 facing away from the deflection device 5.

[0028] Preferably, an extension of the further surface 201 perpendicular to the main extension plane 100 is greater than an extension of the further cutting surface 301 perpendicular to the main extension plane 100. Alternatively or additionally, an extension of the further surface 201 parallel to the main extension plane 100 is preferably greater than an extension of the further cutting surface 301 parallel to the main extension plane 100.

[0029] Furthermore, the damping device 7 is preferably deflectable parallel to the deflection direction 101. For example, the micromechanical component 1 is designed such that a deflection of the deflection device 5 along the deflection direction 101 causes a deflection of the damping device 7 counter to the deflection direction 101. Thus, a micromechanical component 1 is provided, wherein the micromechanical component 1 comprises damping elements which no longer comprise a movable and a static structure, but rather comprise two movable structures, both of which can be moved toward one another and / or away from one another or which move toward one another and / or away from one another during operation of the micromechanical component 1.

[0030] Furthermore, the Fig. 1, the micromechanical component 1 shown by way of example is preferably designed such that a first projection of the deflection device 5 onto the main extension plane 100 and a second projection of the damping device 7 onto the main extension plane 100 overlap.

[0031] Furthermore, the damping device 7 preferably comprises a third region 13 and a fourth region 14 that is separate from the third region 13, particularly preferably galvanically isolated or electronically insulated. For example, it is also provided that the damping device 7 comprises a fifth region 15 that is separate from the third region 13 and / or from the fourth region 14, preferably galvanically isolated or electronically insulated. Preferably, the fourth region 14 is designed as a carrier element 14 and / or the fifth region 15 as a further carrier element 15, wherein the two carrier elements 14, 15 are designed in particular as plate electrodes 14, 15 extending flatly mainly parallel to the main extension plane 100. Furthermore, the carrier element 14 and / or the further carrier element 15 is formed from a first functional layer with a first functional plane parallel to the main extension plane 100.

[0032] Furthermore, the deflection device 5 preferably comprises a first element 501. The first element 501 is preferably designed as an electrode element 501, particularly preferably as a bar electrode. Alternatively or additionally, the first element 501 is designed as a damping element. Furthermore, the first element 501 preferably extends perpendicular to the deflection direction 101 and parallel to the main extension plane 100. The micromechanical component 1 preferably comprises a further first element 501', wherein the further first element 501' is connected to the first element 501 via a connecting element 504 of the deflection device 5, which connecting element extends essentially parallel to the deflection direction 101, preferably in an electrically conductive and / or motion-resistant or rigid manner. Furthermore, the micromechanical component 1 preferably comprises a further connecting element 504', wherein the further connecting element 504' extends essentially parallel to the deflection direction 101.Furthermore, the first element 501 and the further first element 501' are connected to one another via the further connecting element 504', preferably in an electrically conductive and / or motion-resistant or rigid manner. In this case, the first element 501 and the further first element 501' are preferably arranged overlapping along a projection direction parallel to the deflection direction 101.

[0033] As in the Fig. In the embodiment of the micromechanical component 1 shown in Figure 1, the deflection device 5 preferably comprises one recess 510, particularly preferably three recesses 510. In this case, the recess 510 extends completely through the deflection device 5 along a direction perpendicular to the main extension plane 100. Furthermore, the micromechanical component 1 is preferably designed such that the recess 510 is enclosed by the deflection device 5 in a plane parallel to the main extension plane 100. Preferably, the recess 510 is enclosed by the first element 501, the further first element 501', the connecting element 504, and the further connecting element 504' in the plane parallel to the main extension plane 100.

[0034] The deflection device 5 preferably comprises a second element 502 and a further second element 502', wherein the second element 502 and the further second element 502' are designed and arranged substantially like the first element 501 and the further first element 501'. Furthermore, the deflection device 5 preferably comprises a third element 503, wherein the third element 503 is designed and arranged substantially like the first element 501.

[0035] Furthermore, the Fig. The deflection device 5 illustrated by way of example in FIG. 1 preferably has a second recess 520, particularly preferably two second recesses 520, wherein the second recess 520 is formed and oriented substantially like the recess 510. Preferably, the micromechanical component 1 is designed such that the second recess 520 is enclosed by the deflection device 5 in a plane parallel to the main extension plane 100. Preferably, the second recess 520 is enclosed by the second element 502, the further second element 502', the connecting element 504, and the further connecting element 504' in the plane parallel to the main extension plane 100.

[0036] In addition, the deflection device 5 preferably comprises a third recess 530, particularly preferably six third recesses 530, wherein the third recess 530 is formed and oriented substantially like the recess 510. Preferably, the micromechanical component 1 is formed such that the third recess 530 is enclosed by the deflection device 5 in a plane parallel to the main extension plane 100. Preferably, the third recess 530 is enclosed by the first element 501, the third element 503, the connecting element 504, and the further connecting element 504' in the plane parallel to the main extension plane 100. In addition, the third recess 530 is preferably enclosed by the first element 501, the third element 503, the connecting element 504, and the further connecting element 504' in the plane parallel to the main extension plane 100.

[0037] Preferably, an extension of the third recess 530 parallel to the deflection direction 101 is smaller than an extension of the recess 510 and / or the second recess 520 parallel to the deflection direction 101. Preferably, the extension of the recess 510 and / or the second recess 520 parallel to the deflection direction 101 is more than twice, preferably more than three times, particularly preferably more than four times, as large as the extension of the third recess 530 parallel to the deflection direction 101.

[0038] Furthermore, the damping device 7 preferably comprises a first counterelectrode element 701, particularly preferably three first counterelectrode elements 701, and / or a second counterelectrode element 702, particularly preferably two second counterelectrode elements 702. The damping device 7 is preferably configured such that the first counterelectrode element 701 is rigidly coupled to the fourth region 14 and / or the second counterelectrode element 702 is rigidly coupled to the fifth region 15. Furthermore, the first counterelectrode element 701 is preferably arranged in the recess 510 and / or the second counterelectrode element 702 is preferably arranged in the second recess 520.The micromechanical component 1 is preferably designed such that the first counterelectrode element 701 is electrically conductively coupled to the fourth region 14 via a contact means 705 of the damping device 7 and is in particular electrically insulated from the fifth region 15. Furthermore, the micromechanical component 1 is preferably designed such that the second counterelectrode element 702 is electrically conductively coupled to the fifth region 15 via a further contact means 707 and is in particular electrically insulated from the fourth region 14. The first element 501, the first counterelectrode element 701 and / or the second counterelectrode element 702 are preferably arranged overlapping along a projection direction parallel to the deflection direction 101. Furthermore, the first element 501, the first counterelectrode element 701 and / or the second counterelectrode element 702 are preferably designed as electrode fingers.In particular, the micromechanical component 1 is designed such that an interaction between the first element 501 and the first counter electrode element 701 and / or the second counter electrode element 702 as well as between the further first element 501' and the first counter electrode element 701 and / or the second counter electrode element 702 contributes to the damping forces during a deflection movement of the deflection device 5 and / or the damping device 7.

[0039] The micromechanical component 1 preferably comprises a plate capacitor, wherein the plate capacitor particularly preferably comprises the first element 501 and the first counter electrode element 701. Furthermore, the micromechanical component 1 preferably comprises a further plate capacitor, wherein the further plate capacitor particularly preferably comprises the further first element 501' and the first counter electrode element 701. Furthermore, the deflection device 5 preferably comprises a first electrode, and the damping device 7 comprises a second electrode, wherein the first electrode and the second electrode interact with each other and, for example, provide a force effect for driving the micromechanical component 1 and / or a deflection or force effect detection option.Alternatively, it is preferably provided that the deflection device 5 and the damping device 7, in particular in mutually interacting regions, are at an electrical potential or provide an electrical potential.

[0040] The damping device 7 preferably comprises one damping finger 703, particularly preferably five or six damping fingers 703. The damping finger 703 is preferably arranged in the third recess 530. As in Fig. As shown by way of example in Figure 1, the damping finger 703 is preferably connected to the third region 13 in a materially bonded and movement-resistant manner. In other words, the third region 13 preferably provides a corridor that allows the damping finger 703 to be connected to a center-mass potential and simultaneously utilizes a first counter-electrode element 701 and / or a second counter-electrode element 702.

[0041] In the Fig. 2, the damping device 7 does not comprise a first counter electrode element 701 and a second counter electrode element 702. In other words, in the micromechanical component 1 shown in Fig. 2, for example, the double-sided movable detection is dispensed with and only the deflection device 5 and the damping device 7, in particular the damping finger 703 of the damping device 7, are designed to be movable on both sides. In other words, the Fig. 2, the micromechanical component 1 shown by way of example, preferably comprises comb fingers that are movable toward one another on both sides. Preferably, the deflection device 5 comprises first comb fingers and the damping device 7 comprises second comb fingers, wherein the first comb fingers and the second comb fingers are designed to be movable toward one another, in particular parallel to the deflection direction 101. This advantageously makes it possible to dispense with a separation, in particular an electrical / galvanic separation, into the third region 13 and the fourth region 14 and / or the fifth region 15. Thus, in Fig. 2 shows an example of a micromechanical component 1, wherein the detection is of a conventional design and the part with the active damping is designed to be movable on both sides.

[0042] In Fig. Figure 2 further illustrates, by way of example, that the micromechanical component 1 comprises a first counterelectrode element 701 and a second counterelectrode element 702, each preferably embodied as a fixed electrode. In other words, the first counterelectrode element 701 and the second counterelectrode element 702 are preferably coupled or connected to the substrate 3 in a motion-resistant manner. Thus, detection of the deflection of the deflection device 5 parallel to the deflection direction 101 relative to the substrate 3 is possible.

[0043] For example, the micromechanical component 1 comprises a first coupling device 21 and a second coupling device 22. Preferably, the first coupling device 21 and the second coupling device 22 are each mechanical coupling structures. In other words, the micromechanical component 1 is designed such that the first coupling device 21 and the second coupling device 22 jointly mechanically couple the deflection device 5 and the damping device 7 to one another. Alternatively, the first coupling device 21 and the second coupling device 22 are each electrical coupling structures.In this case, the micromechanical component 1 is preferably designed such that a deflection of the deflection device 5 parallel to the deflection direction 101 can be measured with the first coupling device 21 and / or with the second coupling device 22, and preferably with the first coupling device 21 and / or second coupling device 22, a force can be exerted on the damping device 7 such that the damping device 7 can be deflected parallel to and counter to the deflection direction 101. In other words, the micromechanical component 1 is designed such that the first coupling device 21 and the second coupling device 22 jointly electrically or electrostatically couple the deflection device 5 and / or the damping device 7 to one another.Particularly preferably, the first coupling device 21 and the second coupling device 22 each comprise comb structures or plate structures which interact electrostatically with further comb structures or further plate structures of the deflection device 5 and / or the damping device 7.

[0044] In Fig. 2 shows, by way of example, that the damping finger 703 is mechanically coupled directly to the deflection device 5 via the first coupling device 21 and the second coupling device 22. Preferably, the damping finger 703 and the deflection device 5 are maintained at the same electrical potential. This advantageously provides a purely mechanically acting damping structure in addition to electrically active components, or even without electrically active components, of the damping device 7. Thus, it is advantageously possible to use additional finger structures that serve exclusively to increase the damping effect to enhance the damping effect.

[0045] Furthermore, Fig. 1 shows, by way of example, that the first coupling device 21 comprises a first coupling element 31 with a first leg 41 and a second leg 42, and a second coupling element 32 with a third leg 43 and a fourth leg 44. The first leg 41 is preferably elastically coupled to the deflection device 5, and the second leg 42 is preferably rigidly connected to the first leg 41 at a connection point 51. The first leg 41 and the second leg 42 are preferably arranged perpendicular to one another in a plane parallel to the main extension plane 100. Furthermore, the first leg 41 and the second leg 42 are preferably pivotally connected to the substrate 3 about a first pivot axis 51 running perpendicular to the main extension plane 100 and intersecting the connection point 51.The first coupling element 31 and the second coupling element 32 are essentially identical, in particular mirror-symmetrical, with the second coupling element 32 being designed to be pivotable about a second pivot axis 52 or a second connection point 52. Furthermore, the fourth leg 44 is preferably resiliently connected to the damping device 7. The second leg 42 and the third leg 43 are preferably resiliently coupled to one another via a spring means 35 of the first coupling device 21. Furthermore, the micromechanical component 1, preferably the spring means 35, is designed in particular such that the second leg 42 and the third leg 43 are electrically insulated from one another. This is indicated by a dashed line between the second leg 42 and the third leg 43, wherein the dashed line intersects the spring means 35.Furthermore, the legs 41, 42, 43, 44 preferably each have identical or different leg lengths 310, 320, 330, 340 in order to achieve a specific transmission ratio of the coupling between the deflection device 5 and the damping device 7. In principle, by selecting different leg lengths 310, 320, 330, 340 of the first coupling device 21 or the second coupling device 22, different transmission ratios between the deflections of the deflection device 5 and the damping device 7 can be set.

[0046] The Fig. The second coupling device 22 shown as an example in Figure 1 is designed and arranged essentially in the same way as the first coupling device 21, but mirror-symmetrical to the first coupling device 21 with respect to a mirror plane extending perpendicular to the main extension plane 100 and parallel to the deflection direction 101. The Fig. The micromechanical component 1 shown in Figure 1 comprises a further first coupling device 21' and a further second coupling device 22', wherein the further first coupling device 21' and the further second coupling device 22' are designed and arranged essentially like the first coupling device 21 and the second coupling device 22, but each mirror-symmetrical to the first coupling device 21 and the second coupling device 22, each with respect to a mirror plane running perpendicular to the deflection direction 101. Preferably, the micromechanical component 1 is designed such that the first coupling device 21 and the further first coupling device 21' each couple the deflection device 5 to the fourth region 14, and the second coupling device 22 and the further second coupling device 22' each couple the deflection device 5 to the fifth region 15, in particular mechanically.

[0047] In other words, the micromechanical component 1 comprises a damping structure or a damping device 7, which is mechanically coupled to the deflection device 5, wherein the deflection device 5 activates a deflection mechanism or the first coupling device 21 and / or the second coupling device 22 upon deflection, which results in the damping device 7 being moved towards the deflection device 5.

[0048] Furthermore, the damping structure 7 is preferably configured for the capacitive detection of a deflection of the deflection device 5, preferably parallel to the deflection direction 101, depending on a distance 400, preferably parallel to the deflection direction 101, between the first element 501 and the first counter electrode element 701 and / or depending on a further distance 400', preferably parallel to the deflection direction 101, between the further electrode element 501' and the first counter electrode element 701. Preferably, the first counterelectrode element 701 has a counterelectrode width 710 which is smaller than a recess width 510' of the recess 510. The counterelectrode width 710 and the recess width 510' each extend parallel to the deflection direction 101. Preferably, the micromechanical component 1 is configured such that when the deflection device 5 is deflected by a distance x, the distance 400 orthe further distance 400' or the effective gap between the structures changes by twice the distance (i.e., 2x). In other words, a deflection of the deflection device 5 parallel to the deflection direction 101 by a distance x leads to a change in the distance 400 or the further distance 400' by a distance 2x. Preferably, the distance 400 increases or the further distance 400' decreases by a distance 2x when the deflection device 5 is deflected parallel to and in the direction of the deflection direction 101. Furthermore, the distance 400 decreases or the further distance 400' increases by a distance 2x when the deflection device 5 is deflected parallel to and opposite to the direction of the deflection direction 101.As a result, it is advantageously possible with the micromechanical component 1 according to the invention to significantly increase the damping force upon deflection of the deflection device 5 and the damping device 7 due to the gap decreasing more quickly, in particular compared to conventional topologies.

[0049] By deflecting the deflection device 5 parallel to and in the direction of the deflection direction 101 and by deflecting the damping device 7 parallel to and opposite the deflection direction 101, the distance 400 is significantly increased compared to the further distance 400'. The first coupling device 21 and the second coupling device 22 cause the first counter electrode element 701 to be moved away from the electrode element 501 and toward the further electrode element 501'. In this case, particularly in the simplest case, when the deflection device 5 is deflected by one distance, the distance 400 is increased by twice the distance.

[0050] Fig. 3 shows exemplary damping structures, wherein the damping structures comprise parts of the deflection device 5 and the damping device 7. In particular, the damping structures comprise a locally increased plate height h. Furthermore, the region 11 of the deflection device 5 perpendicular to the main extension plane 100 is preferably less high than a sixth region 16 of the deflection device 5 facing the damping device 7. In addition, the further region 12 of the damping device 7 perpendicular to the main extension plane 100 is preferably less high than a seventh region 17 of the damping device 7 facing the deflection device 5. In other words, the deflection device 5 and / or the damping device 7 each has a height that is less than that of damping plates coupled, preferably materially coupled, to the deflection device 5 and / or the damping device 7.

[0051] Furthermore, the micromechanical component 1 is preferably designed such that the first element 501 and / or the further first element 501' and / or the second element 502 and / or the further second element 502' and / or the third element 503 and / or the connecting element 504 and / or the further connecting element 504' each comprise a surface 200 of the deflection device 5 facing the damping device 7, wherein the respective surface 200 is larger than a respective cutting surface 300 of the deflection device 5 arranged perpendicular to the deflection direction 101 and arranged in a region 11 of the deflection device 5 facing away from the damping device 7.

[0052] Furthermore, the micromechanical component 1 is preferably designed such that the first counter electrode element 701 and / or the second counter electrode element 702 and / or the damping finger 703 each comprise a further surface 201 of the damping device 7 facing the deflection device 5, wherein the respective further surface is larger than a further cutting surface 301 of the damping device 7 arranged perpendicular to the deflection direction 101 and arranged in a further region 12 of the damping device 7 facing away from the deflection device 5.

[0053] Thus, it is advantageously possible that, with the aid of electrodes, preferably detection electrodes, which move towards each other, not only the electrical properties but also the mechanical damping properties of the micromechanical component 1 can be specifically influenced.

[0054] To detect a translational movement and / or rotational movement of the micromechanical component 1, a deflection of the deflection device 5 along the deflection direction 101 is preferably detected capacitively. In the following, a preferred operating method of the micromechanical component 1 according to the invention is described by way of example using the first coupling device 21, wherein the description also applies correspondingly to the second coupling device 22, the further first coupling device 21', and the further second coupling device 22'.

[0055] In a first operating step, the deflection device 5 is deflected in the direction of the deflection direction 101, for example due to an acceleration force or Coriolis force acting on the deflection device 5 in the direction of the deflection direction 101.

[0056] In a second operating step, a pivoting movement of the first coupling device 21 is effected depending on the deflection of the deflection device 5 in the direction of the deflection direction 101. In this case, a first end of the first leg 41, which is elastically coupled to the deflection device 5, is driven in the direction of the deflection direction 101 in such a way that a first pivoting movement of the first coupling element 31 about the first pivot axis 51, preferably in the image plane of the Fig. 1 counterclockwise. As a result, the second coupling element 32, due to the spring-elastic coupling between the first coupling element 31 and the second coupling element 32 - here by means of the spring means 35, ie between the second leg 42 and the third leg 43 - a second pivoting movement of the second coupling element 32 about the second pivot axis 52, preferably in the image plane of the Fig. 1 in a clockwise direction. Thus, the fourth leg 44 pivots in a direction opposite to the deflection direction 101. As a result, the damping device 7, which is elastically coupled to the fourth leg 44, is deflected parallel to and opposite to the deflection direction 101. In particular, an opposite deflection of the deflection device 5, parallel to but opposite to the deflection direction 101, analogously causes a deflection of the damping device 7 parallel to and opposite to the deflection direction 101.

[0057] The micromechanical component 1 according to the invention is particularly advantageous compared to conventional inertial sensors, which comprise both fixed and movable structures. The micromechanical component 1 according to the invention offers particular advantages with regard to space consumption and improved clipping behavior compared to the prior art.

[0058] By moving structures or the deflection device 5 and / or the damping device 7, in particular, speed-dependent damping forces build up. The damping forces arise due to various physical effects. One of several of these damping contributions is called squeeze-film damping, which occurs, for example, when moving structures towards fixed structures. In this case, a medium, preferably a gas, is compressed between the structures. A damping contribution, also called inverse quality factor, due to squeeze-film damping on a long rectangular plate of length L, height h and with gap or distance d can be estimated analytically, for example, by QSqueeze−1=μeffmωLeffheff3d3

[0059] Here µ effthe effective viscosity of the medium, preferably a surrounding gas, m the mass, and ω the angular frequency of the plate, which oscillates particularly harmoniously against a wall. According to the invention, the micromechanical component 1 preferably comprises a medium with a viscosity matched to the desired damping forces. The effect is thus strongly dependent on the gap width between fixed and movable structures. The smaller the residual gap and the higher the speed, the higher the damping force. In addition, there is also a significant dependence on the height of the plate. A numerical simulation of a normalized inverse detection quality 600 as a function of or depending on a gap distance 601 is shown by way of example in Fig. 4 for a micromechanical component 1 or a rotation rate sensor.

Claims

[1] Micromechanical component (1), wherein the micromechanical component (1) comprises a deflection device (5) which can be deflected parallel to a deflection direction (101), wherein the micromechanical component (1) comprises a damping device (7), characterized by that a surface (200) of the deflection device (5) facing the damping device (7) is larger than a cutting surface (300) of the deflection device (5) arranged perpendicular to the deflection direction (101) and arranged in a region (11) of the deflection device (5) facing away from the damping device (7), wherein a further surface (201) of the damping device (7) facing the deflection device (5) is larger than a further cutting surface (301) of the damping device (7) arranged perpendicular to the deflection direction (101) and arranged in a further region (12) of the damping device (7) facing away from the deflection device (5). [2] Micromechanical component (1) according to claim 1, wherein an extension of the surface (200) perpendicular to a main extension plane (100) of a substrate (3) of the micromechanical component (1) running parallel to the deflection direction (101) is greater than an extension of the cutting surface (300) perpendicular to the main extension plane (100). [3] Micromechanical component (1) according to one of the preceding claims, wherein an extension of the surface (200) parallel to a main extension plane (100) of a substrate (3) of the micromechanical component (1) running parallel to the deflection direction (101) is greater than an extension of the cutting surface (300) parallel to the main extension plane (100). [4] Micromechanical component (1) according to one of the preceding claims, wherein an extension of the further surface (201) perpendicular to a main extension plane (100) of a substrate (3) of the micromechanical component (1) running parallel to the deflection direction (101) is greater than an extension of the further cut surface (301) perpendicular to the main extension plane (100). [5] Micromechanical component (1) according to one of the preceding claims, wherein an extension of the further surface (201) parallel to a main extension plane (100) of a substrate (3) of the micromechanical component (1) running parallel to the deflection direction (101) is greater than an extension of the further cut surface (301) parallel to the main extension plane (100). [6] Micromechanical component (1) according to one of the preceding claims, wherein the damping device (7) is deflectable parallel to the deflection direction (101), wherein the micromechanical component (1) is designed such that a deflection of the deflection device (5) along the deflection direction (101) causes a deflection of the damping device (7) counter to the deflection direction (101). [7] Micromechanical component (1) according to one of the preceding claims, wherein the micromechanical component (1) is designed such that a first projection of the deflection device (5) onto a main extension plane (100) of a substrate (3) of the micromechanical component (1) running parallel to the deflection direction (101) and a second projection of the damping device (7) onto the main extension plane (100) overlap. [8] Micromechanical component (1) according to one of the preceding claims, wherein the damping device (7) comprises a third region (13) and a fourth region (14) separated from the third region (13), preferably galvanically separated. [9] Micromechanical component (1) according to claim 8, wherein the damping device (7) comprises a fifth region (15) separated, preferably galvanically separated, from the third region (13) and / or from the fourth region (14).

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