System for automatic optical inspection and method for operating it

Abstract

System for automated optical inspection (AOI), with: - a first AOI machine set up to use an initial resolution to inspect an object in order to determine if there is a potentially defective area of ​​the object; - a second AOI machine electrically connected to the first AOI machine, wherein the second AOI machine is configured to use a second resolution for testing only within the potentially defective area to determine if any defect exists in the potentially defective area of ​​the object, wherein the second resolution is greater than the first resolution; and - a transport device module, which is set up to transport the object from the first AOI machine to the second AOI machine; wherein the first AOI machine has the following: - a first movement device module designed to carry the object; - a first optical module set up to capture a first image based on the first resolution of the object on the first motion device module; - a first processor set up to perform a calculation on the first image in order to detect the potentially defective area of ​​the object; and - a transmitter configured to transmit data pertaining to the potentially faulty area directly to the second AOI machine; wherein the second AOI machine has the following: - a receiver that is set up to receive the data belonging to the potentially faulty area directly from the transmitter of the first AOI machine; - a second movement device module designed to carry the object; - a second optical module designed to capture a second image based on the second resolution of the object on the second motion device module; and - a second processor set up to perform a calculation on the second image to detect if there is any error in the potentially faulty area of ​​the object.

Description

BACKGROUND Area of ​​the invention

[0001] The invention relates to a system for automatic optical inspection and a method for operating the same. Description of the state of the art

[0002] In the field of automated optical inspection, zero slippage means identifying all defects, while zero pseudo-defects means excluding genuinely normal products from those identified as defective. Due to the inherent conflict between zero slippage and zero pseudo-defects in a simple inspection, conventional automated single-machine, single-specification inspection cannot simultaneously meet both requirements.

[0003] A conventional method works fully or semi-manually (with machine) to verify the test results to achieve the goal of zero slippage as best as possible, and then continues to manually exclude the normal products from those identified as defective for the purpose of zero pseudo-defects.

[0004] However, human-dependent verification has the disadvantages of uncertainties, as well as unpredictability, lack of verifiability, lack of recordability, and low reproducibility. These uncertainties render the manual verification process unsuitable for integration into the trend toward fully automated, effective, and efficient productivity frameworks of Industry 4.0 with big data applications.

[0005] WO 2004 / 057 317 A1 discloses a method for classifying the quality of a surface using a single device and computer.

[0006] US 2008 / 0079931A1 discloses a system for inspecting a photomask with multiple cameras or lenses, each connected to its own processor and transmitting the evaluated data to a common controller, or connected to a common image processing processor.

[0007] EP 1 582 863 A1 describes a multi-resolution inspection system that requires user identification and is not fully automatic.

[0008] US Patent 4,764,969 A discloses a device for inspecting surfaces, comprising a first inspection unit for wide-angle inspection and analysis of the surface by image processing, and a second inspection unit for near-field inspection of selected areas with finer analysis than the first inspection. A common controller is connected to both inspection units, through which data is exchanged and which takes over control of the second inspection unit after the first inspection unit detects unusual areas on the surface. SUMMARY

[0009] The following presents a simplified summary of the disclosure with the aim of providing the reader with a basic understanding. This summary is not an exhaustive overview of the disclosure and does not identify any key or critical components of the present invention or outline the scope of protection of the present invention. Its sole purpose is to present some concepts disclosed herein in simplified form as an introduction to the detailed description presented later.

[0010] In accordance with embodiments of the present disclosure, the present disclosure proposes a system for automatic optical inspection and a method for operating the same, comprising the features of independent claims 1 and 5, in order to solve or circumvent the aforementioned problems and disadvantages in the prior art. Advantageous embodiments are described in the dependent claims.

[0011] One embodiment of the present disclosure relates to an automated optical inspection system comprising a first AOI machine and a second AOI machine, the second AOI machine being electrically connected to the first AOI machine. The first AOI machine is configured to use a first resolution to inspect an object in order to detect any potentially defective area of ​​the object. The second AOI machine is configured to use a second resolution, different from the first, to inspect only the area(s) of the object detected as potentially defective by the first AOI machine, in order to detect whether a defect exists within this / these potentially defective area(s) of the object, wherein the second resolution is higher than the first resolution.

[0012] If one or more defects are found in the potentially defective area(s) of the object being inspected by the second AOI machine, the object may be determined by the second AOI machine to be unacceptable.

[0013] If no fault is found in the potentially faulty area(s) of the object being inspected by the second AOI machine, the object can be determined by the second AOI machine to be an acceptable object.

[0014] In one embodiment, if there is no potentially defective area of ​​the object inspected by the first AOI machine, the object may pass directly through the second AOI machine without being inspected.

[0015] The automatic optical inspection system also includes a transport device module, which is designed to transport the object from the first AOI machine to the second AOI machine.

[0016] The first AOI machine has a first motion device module configured to carry the object; a first set of optical module(s) configured to capture a first set of images based on the first resolution of the object on the first set of motion device module(s); a first set of processor(s) configured to perform a calculation on the first set of images in order to detect the potentially defective area(s) of the object; and a transmitter configured to transmit data pertaining to the potentially defective area(s) to the second AOI machine.

[0017] The second AOI machine has a receiver configured to receive data associated with the potentially defective area of ​​the object; a second set of motion device module(s) configured to carry the object; a second set of optical module(s) configured to capture a second set of images, based on the second resolution which is higher than the first resolution, of the potentially defective area(s) of the object on the second set of motion device module(s); and a second set of processor(s) configured to perform a set of calculation(s) on the second set of images to detect whether one or more defects are present in the potentially defective area of ​​the object.

[0018] The first set of images taken by the first AOI machine can be any image format of the object, and likewise the second set of images taken by the second AOI machine in the potentially faulty area(s) of the object.

[0019] In one embodiment, the formats mentioned in the preceding paragraph can be grayscale, color, HDR (high dynamic range), raw, compressed, one-dimensional, two-dimensional, three-dimensional, or any other possible image format.

[0020] In one embodiment, the object is a printed circuit board, a semiconductor wafer, a display panel, or the like.

[0021] The present invention further relates to a method for operating an AOI system comprising a first AOI machine and a second AOI machine, wherein the method for operation includes steps of using the first AOI machine to utilize a first resolution to inspect an object in order to detect at least one potentially defective area of ​​the object; and using the second AOI machine to utilize a second resolution that is greater than the first resolution of the first AOI machine to inspect only in the potentially defective area(s) in order to detect whether at least one defect is present in the potentially defective area(s) of the object.

[0022] If at least one error is present in the potentially faulty area(s) of the object, the object can be determined as an unacceptable object by the second AOI machine.

[0023] If no fault is found in the potentially faulty area(s) of the object, the object can be determined as an acceptable object by the second AOI machine.

[0024] In one embodiment, the object may pass directly through the second AOI machine without being inspected if no potentially defective area of ​​the object has been detected by the first AOI machine.

[0025] The procedure further includes the use of a transport device module to transport the object from the first AOI machine to the second AOI machine.

[0026] The step of using the first AOI machine comprises the following steps: carrying the object through a first set of motion device module(s) of the first AOI machine; capturing a first set of images based on a first resolution of the object on the first set of motion device module(s); performing a set of calculation(s) on the first set of images to detect if there is at least one potentially defective area of ​​the object; and transmitting data pertaining to the potentially defective area(s) of the object directly to the second AOI machine.

[0027] The step of using the second AOI machine comprises the following steps: directly receiving the data belonging to the potentially faulty area(s) of the object from the transmitter of the first AOI machine; carrying the object through a second set of motion device module(s) of the second AOI machine; capturing a second set of images based on the second resolution, which is higher than the first resolution of the first AOI machine, in the potentially faulty area(s) of the object on the second set of motion device module(s); and performing a set of calculation(s) on the second set of images to detect whether at least one fault is present in the potentially faulty area(s).

[0028] In one embodiment, the first set of images taken by the first AOI machine can have any image format, and likewise the set of images taken by the second AOI machine in the potentially defective area(s) of the object.

[0029] In one embodiment, the formats mentioned in the preceding paragraph can be grayscale, color, HDR (high dynamic range), raw, compressed, one-dimensional, two-dimensional, three-dimensional, or any other possible image format.

[0030] In one embodiment, the object is a printed circuit board, a semiconductor wafer, a display panel, or the like. In accordance with the foregoing, the present disclosure presents the AOI system with

[0031] It delivers zero pseudo-errors and zero slippage, thereby eliminating the costs and uncertainties of human-dependent inspection. Furthermore, the AOI system integrates the processes of first and second AOI machines into the Industry 4.0 framework with big data applications.

[0032] Many of the related features are more easily accessible by being made more understandable through reference to the following detailed description in conjunction with the associated images. Brief description of the drawings

[0033] The invention is more fully understood by reading the following detailed description of the embodiment with reference to the associated drawings as follows: Fig. 1 is a schematic drawing illustrating an automated optical inspection (AOI) system according to some embodiments of the present disclosure; Fig. Figure 2 is a schematic drawing illustrating a first AOI machine according to some embodiments of the present disclosure; Fig. Figure 3 is a schematic drawing illustrating a second AOI machine according to some embodiments of the present disclosure; and Fig. Figure 4 is a flowchart illustrating a method for operating an AOI system according to some embodiments of the present disclosure. Detailed description

[0034] Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numerals are used in the drawings and the description to refer to the same or identical parts.

[0035] In the description and in the following claims, the meaning of "a" and "the" includes a reference to the plural, unless the context clearly indicates otherwise. Likewise, in the description and in the following claims, the terms "have or have," "comprise or encompass," "have or have," "include or contain," and the like are to be understood as open, i.e., encompassing, without being limited thereto. According to its use in the description and in the following claims, the meaning of "in" includes the meanings of "in" and "on," unless the context clearly indicates otherwise.

[0036] It is understood that although the terms first, second, etc. may be used here to describe different elements, these elements are not limited by these terms. The terms are used solely to distinguish one element from another. For example, a first element may be referred to as a second element, and correspondingly a second element as a first element, without leaving the scope of an embodiment. As used, the term "and / or" includes any and all combinations of one or more of the related listed elements.

[0037] It is understood that an element described as "connected" or "coupled" to another element may be directly connected or coupled to that other element, or there may be elements in between. Conversely, there are no elements in between when an element is described as "directly connected" or "directly coupled" to another element.

[0038] Unless otherwise defined, all terms (including technical and scientific terms) are used here with the same meaning as understood by a person skilled in the art in the field to which the example embodiment belongs. It is further understood that terms such as those defined in commonly used dictionaries are to be interpreted with a meaning consistent with their meaning in the context of the technical field and not as an idealized or overly formal meaning, unless expressly defined as such herein.

[0039] Fig. Figure 1 is a schematic drawing illustrating a system for automatic optical inspection 100 according to some embodiments of the present disclosure. As in Fig. As shown in Figure 1, the automatic optical inspection system 100 comprises a first AOI machine 110, a second AOI machine 120, and a set of transport device module(s) 130. For example, the first AOI machine 110 could be a 3D solder paste inspection (SPI) machine, or the like. The second AOI machine 120 could be an automatic re-inspection machine. The set of transport device module(s) 130 could be a set of robot arm(s), a track, a clamping device, a rail-guided vehicle (RGV), an automated guided vehicle (AGV), an automatic transport device, or the like.

[0040] The second AOI machine 120 is electrically connected to the first AOI machine 110, enabling the first AOI machine 110 to transfer data to the second AOI machine 120. Furthermore, the set of transport device module(s) 130 physically connects the first AOI machine 110 and the second AOI machine 120, allowing the transport device module(s) 130 to transport an object 190 from the first AOI machine 110 to the second AOI machine 120. In one embodiment, the object 190 is a printed circuit board. In an alternative embodiment, the object 190 is a semiconductor wafer, a display panel, or the like.

[0041] In practice, the first AOI machine 110 is configured to use an initial resolution (e.g., a relatively low resolution) to inspect object 190 in order to identify at least one potentially defective area 192 of object 190. Since the initial resolution is relatively low, the first AOI machine 110 can quickly identify at least one potentially defective area 192 of a zero-slip type, and the at least one potentially defective area 192 in object 190 can be evaluated as a true or false zero-pseudo-defect. For example, true defects include conductors with various protrusions, some of which could cause short circuits, copper spatter, certain missing features, conductors with distinct notches, an unlocalized impermissible width, breaks along conductors, or the like.

[0042] Accordingly, the second AOI machine 120 is configured to use a second resolution (e.g., a relatively high resolution) to inspect only the potentially defective area(s) 192 instead of the entire object 190, thereby reducing the cycle time for this follow-up inspection. Since the second resolution is relatively high, the second AOI machine 120 can be used to automatically and accurately determine whether at least one defect (e.g., a true defect) exists in the potentially defective area(s) 192 of the object 190, thus achieving zero pseudo-defects without manual inspection. In some embodiments, the second resolution is higher than the first resolution. For example, the second resolution is 2 to 3 µm and the first resolution is 10 µm, although the present disclosure is not limited to such embodiments.

[0043] If at least one defect is detected in the potentially defective area(s) of object 190 by the second AOI machine 120, then object 190 is designated as an unacceptable object by the second AOI machine 120. If no defect is detected by the second AOI machine 120 in the first defective area(s) 192 of the object, then object 190 is designated as an acceptable object by the second AOI machine 120.

[0044] Furthermore, if no potentially defective area of ​​object 190 is detected by the first AOI machine, object 190 may pass directly through the second AOI machine 120 without being inspected.

[0045] Fig. Figure 2 is a schematic drawing showing a first AOI machine 110 according to some embodiments of the present disclosure. As in Fig. As shown in Figure 2, the first AOI machine 110 comprises a first set of transport device module(s) 210, a first set of optical module(s) 220, a first set of processor(s) 230 and a transmitter 240.

[0046] Structurally, the first set of processor(s) 230 is electrically connected to the first set of transport device module(s) 210, to the first set of optical module(s) 220, and to the set of transmitter(s) 240. For example, the first set of transport device module(s) 210 can be a set of robot arm(s), an XY table, an XY object table, an XYZ table, and a set of conveyor(s) or other axis controllers. The first set of optical module(s) 220 can comprise a set of lens(es) (e.g., a set of telecentric lenses, a set of microscopic lenses, and the like) and a set of image sensor(s) (e.g., a set of 2D image data sensor(s), a set of 3D topography data sensor(s), and the like), wherein the set of 2D image data sensor(s) can capture black and white images, color images, infrared (IR) images, and the like, and wherein the set of 3D topography data sensor(s) can capture laser image data, patterns, focus variation data (DFF), or the like.The first set of processor(s) 230 can be a set of main processor(s) (CPU), a set of microcontroller(s), or the like. The transmitter 240 can be a set of wired and / or wireless transmitter(s) that communicates directly with the second AOI machine 120.

[0047] In practice, the first set of motion device module(s) 210 is configured to carry the object 190. The first set of optical modules 220 is configured to capture a first set of images of the object 190 based on the first resolution on the first set of motion device module(s) 210. The first set of processor(s) 230 is configured to perform a set of calculations on the first set of images in order to detect the at least one potentially defective area 192 of the object 190. The set of transmitter(s) 240 is configured to directly transmit data belonging to the at least one potentially defective area 192 of the object 190 to the second AOI machine.

[0048] Fig. Figure 3 is a schematic drawing showing a second AOI machine 120 according to some embodiments of the present disclosure. As in Fig. As shown in Figure 3, the second AOI machine 120 comprises a second set of motion device module(s) 310, a second set of optical module(s) 320, a second set of processor(s) 330 and a receiver 340.

[0049] The second set of processor(s) 330 is electrically connected to the second set of motion device module(s) 310, the second set of optical module(s) 320, and the receiver 340. For example, the second set of motion device module(s) 310 can be a set of robot arm(s), an XY stage, an XY stage, an XYZ stage, and a set of transport device(s) or other axis controller(s). The second set of optical module(s) 320 can be a set of lenses (e.g., a set of telecentric lenses, a set of microscopic lenses, and the like) and a set of image sensor(s) (e.g.,The first AOI machine 110 comprises a set of 2D image data sensor(s), a set of 3D topography data sensor(s), and the like, wherein the set of 2D image data sensor(s) can acquire black and white images, color images, infrared (IR) images, or the like, and wherein the set of 3D topography data sensor(s) can acquire laser image data, patterns, focus variation (DFF) data, and the like. The second set of processor(s) 330 can be a set of main processor(s) (CPU), a set of microcontroller(s), or the like. The receiver 340 can be a set of wired and / or wireless receiver(s) that communicates directly with the transmitter 240 of the first AOI machine 110.

[0050] Specifically, the receiver 340 is configured to receive the data associated with the at least one potentially defective area 192 of the object 190 directly from the transmitting device 240. The second set of motion device module(s) 310 is configured to carry the object 190. The second set of optical module(s) 320 is configured to capture a second set of images, based on the second resolution, which is higher than the first resolution, of the at least one potentially defective area 192 of the object 190 on the second motion device module 310. The second set of processor(s) is configured to perform a set of calculations on the second set of images to detect whether at least one defect exists in the at least one potentially defective area 192 of the object 190.

[0051] In one embodiment, the first set of images acquired by the first AOI machine can be of any image format, and the same applies to the second set of images acquired by the second AOI machine in the potentially defective area(s) of the object. In another embodiment, these formats can be grayscale, color, HDR (high dynamic range), raw, compressed, one-dimensional, two-dimensional, three-dimensional, or any other possible image format.

[0052] For a complete understanding of the operation of the AOI system 100 with reference to the Fig. 1, Fig. 2, Fig. 3 to Fig. 4 is Fig. 4 a flowchart illustrating a method 400 for operating an AOI system 100 according to some embodiments of the present disclosure. As in Fig.As shown in Figure 4, the operating procedure 400 comprises the operations S410, S420 and S430. It will be understood by a person skilled in the art that, although the steps described in the present embodiment may be carried out in a certain order, the sequence in which these steps are performed may be changed depending on the specific requirements, unless otherwise expressly stated; in some cases, all or some of these steps may be carried out simultaneously.

[0053] In operation S410, the first AOI machine 110 is used to inspect an object at a first resolution to identify at least one potentially defective area 192 of the object 190. Specifically, the object 190 is carried by a first set of motion device module(s) 210 of the first AOI machine 110. A first set of images is acquired of the object 190 on the first set of motion device module(s) 210 based on the first resolution. A set of calculation(s) is performed on the first set of images to identify the potentially defective area(s) 192 of the object 190, and data associated with the potentially defective area(s) 192 of the object 190 are transferred to the second AOI machine 120.

[0054] In operation S420, the set of transport device module(s) 130 is used to transport the object 190 from the first AOI machine 110 to the second AOI machine 120.

[0055] In operation S430, the second AOI machine 120 is used to utilize a second resolution for inspection in only the potentially defective area(s) 192 to determine whether at least one defect exists in the potentially defective area(s) 192 of the object 190, with the second resolution being higher than the first resolution.Specifically, the data relating to the potentially faulty area(s) of the object are received by the first AOI machine 110, the object 190 is carried by the second set of motion device module(s) 310 of the second AOI machine 120, a second image(s) based on the second resolution of the potentially faulty area(s) 192 of the object 190 is taken on the second set of motion device module(s) 310, and a set of calculation(s) is performed on the second set of images to determine if there is at least one fault in the potentially faulty area(s) 192 of the object 190.

[0056] In operating procedure 400, the object 190 is determined by the second AOI machine 120 to be an unacceptable object if at least one defect is detected within the potentially defective area(s) 192 of the object 190 by the second AOI machine.

[0057] In operating procedure 400, the object 190 is determined by the second AOI machine 120 to be an acceptable object if no defect is detected within the potentially defective area(s) 192 of the object 190 by the second AOI machine 120.

[0058] In operating procedure 400, the object can pass directly through the second AOI machine without being inspected if no potentially defective area 192 of the object 190 has been detected by the first AOI machine 110.

[0059] In accordance with the foregoing, the present disclosure provides an AOI system 100 with zero pseudo-errors and zero slippage, thereby eliminating the costs and uncertainties of human-dependent verification. Furthermore, the AOI system 100 integrates the process of first and second AOI machines 110 and 120 into the structure of Industry 4.0 with big data applications.

[0060] It is understood by those skilled in the art that various modifications and variations of the present invention are possible without departing from the field or the essence of the invention. In light of the foregoing, it is intended that the present invention covers modifications and variations provided for in this invention which fall within the scope of the patent claims.

Claims

[1] System for automated optical inspection (AOI), with: - a first AOI machine set up to use an initial resolution to inspect an object in order to determine if there is a potentially defective area of ​​the object; - a second AOI machine electrically connected to the first AOI machine, wherein the second AOI machine is configured to use a second resolution for testing only within the potentially defective area to determine if any defect exists in the potentially defective area of ​​the object, wherein the second resolution is greater than the first resolution; and - a transport device module, which is set up to transport the object from the first AOI machine to the second AOI machine; wherein the first AOI machine has the following: - a first movement device module designed to carry the object; - a first optical module set up to capture a first image based on the first resolution of the object on the first motion device module; - a first processor set up to perform a calculation on the first image in order to detect the potentially defective area of ​​the object; and - a transmitter configured to transmit data pertaining to the potentially faulty area directly to the second AOI machine; wherein the second AOI machine has the following: - a receiver that is set up to receive the data belonging to the potentially faulty area directly from the transmitter of the first AOI machine; - a second movement device module designed to carry the object; - a second optical module designed to capture a second image based on the second resolution of the object on the second motion device module; and - a second processor set up to perform a calculation on the second image to detect if there is any error in the potentially faulty area of ​​the object. [2] System for an automatic optical inspection according to claim 1, wherein the first image acquired by the first AOI machine is a format of an image of the object, and wherein the second set of images is obtained only from images acquired by the second AOI machine within the potentially defective area of ​​the object. [3] System for an automatic optical inspection according to claim 2, wherein the format can be grayscale, color, HDR (with a high dynamic range), raw, compressed, one-dimensional, two-dimensional or three-dimensional. [4] Method for operating an AOI system comprising a first AOI machine and a second AOI machine, wherein the method has: Using the first AOI machine to employ an initial resolution to inspect an object in order to identify a potentially defective area of ​​the object, wherein the use of the first AOI machine has the following: - Carrying the object by a first motion device module of the first AOI machine; - Capturing an initial image based on the first resolution of the object on the first motion device module; - Performing a calculation on the first image to identify the potentially defective area of ​​the object; and - Transferring data belonging to the potentially faulty area directly to the second AOI machine; - Using a transport device module to transport the object from the first AOI machine to the second AOI machine; and - Using the second AOI machine to employ a second resolution to check only within the potentially defective area to determine if there is any defect in the potentially defective area of ​​the object, wherein the second resolution is greater than the first resolution, wherein the use of the second AOI machine has the following: - Receiving the data belonging to the potentially faulty area of ​​the object directly from the transmitter of the first AOI machine; - Carrying the object by a second motion device module of the second AOI machine; - Capturing a second image based on the second resolution of the potentially faulty area of ​​the object on the second motion device module; and - Performing a calculation on the second image to determine if there is any error in the potentially faulty area of ​​the object. [5] Method for operation according to claim 4, wherein, in the event of any defect within the potentially defective area, the object is determined by the second AOI machine to be an unacceptable object. [6] Method for operation according to claim 4, wherein, if there is no defect within the potentially defective area of ​​the object, the object is determined by the second AOI machine as an acceptable object. [7] Method for operation according to claim 4, wherein if no potentially defective area of ​​the object is detected by the first AOI machine, the object can pass directly through the second AOI machine without being inspected. [8] Method for operation according to claim 4, wherein the first image taken by the first AOI machine is any format of an image of the object, and the second image taken by the second AOI machine is within the potentially defective area of ​​the object. [9] Method for operating according to claim 8, wherein the format is grayscale, color, HDR (with a high dynamic range), raw, compressed, one-dimensional, two-dimensional or three-dimensional.

Images