CONTROL METHOD OF A TOUCH SCREEN DEVICE

Abstract

A control method of a touch screen device applicable to an inspection station (1) comprising a movable element, wherein the movable element is optionally a chuck stage (11), a camera stage (12) or a positioner (15), and wherein the method comprises: Displaying a first window (W1) and a second window (W2) on a touch screen device (14), Displaying a user interface (W11) in the first window (W1) and displaying a real-time image (W21) in the second window (W2) and Detecting a touch instruction generated on the user interface (W11), wherein the movable element moves according to the touch instruction, characterized in that the user interface (W11) comprises an image of a visual scroll wheel (A).

Description

BACKGROUNDTechnical field

[0001] The present invention relates to a control method of a touch display device, and more particularly to a control method of a touch display device of a movable member inspection station. State of the art

[0002] A common inspection station (wafer measuring station) controls a movable element, such as a chuck stage (wafer holder), a camera stage, or a positioner stage, in a device station using a physical button or joystick arranged on the device station. The movable element is moved based on the control of the physical button or joystick on the device station. When operating the physical button or joystick, a user can only determine a control result based on their operating experience and hand feel. As a result, various control requirements cannot be met. Conventional systems and / or control methods are known, for example, from documents JP 2014 116 460 A, JP 2012 104 154 A, and JP H05 80853 A. A control method of a touch screen device according to the preamble of claim 1 is described in JP 2014 116 460 A. SUMMARY

[0003] The present invention provides a control method of a touch screen device according to any one of claims 1, 5, or 8, which is applicable to an inspection station including a movable member, wherein the movable member is selectively a chuck stage, a camera stage, or a positioner. The control method of a touch screen device includes displaying a first window and a second window on a touch screen device, displaying an operation interface in the first window and displaying a real-time image in the second window, and recognizing a touch instruction generated on the operation interface, wherein the movable member moves according to the touch instruction.

[0004] Advantageous further training is the subject of dependent claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0005] The present invention will become more fully understood from the detailed description given below, which is given by way of illustration only and thus is not limitative of the present invention, wherein Fig. 1 shows a test station at which an embodiment of a control method of a touch screen device according to the present invention can be used; Fig. 2 is a schematic diagram of an embodiment in which a touch screen device of an inspection station, to which a control method of a touch screen device according to the present invention is applicable, displays an operation interface; Fig. 3 is a schematic diagram of another embodiment of an operation interface to which a control method of a touch screen device according to the present invention is applicable; Fig. 4 is a schematic diagram of yet another embodiment of an operation interface to which a control method of a touch screen device according to the present invention is applicable; Fig. 5 is a schematic diagram of yet another embodiment of an operator interface to which a control method of a touch screen device according to the present invention is applicable; and Fig. 6 is a schematic diagram of yet another embodiment of an operation interface to which a control method of a touch screen device according to the present invention is applicable. DETAILED DESCRIPTION

[0006] It will be Fig. 1, whereby Fig. 1 shows a test station for which an embodiment of a control method of a touch screen device according to the present invention is applicable. Fig. The inspection station 1 shown in Figure 1 includes a chuck stage 11, a camera stage 12, a probe support plate 13, a touchscreen device 14, a positioner 15, and a housing 16. The chuck stage 11, the camera stage 12, and the positioner 15 are movable elements. The touchscreen device 14 can be configured to display a digital wafer map, a wafer calibration substrate image, and an image captured in real time by the camera stage 12. The positioner 15 is arranged on the probe support plate 13. The positioner 15 can move relative to the probe support plate 13. The camera stage 12 can capture an image above the chuck stage 11 along a Z-axis direction or can capture an image along a side of the housing 16 along an X-axis direction or a Y-axis direction. Furthermore, the movable elements are not limited to the chuck stage 11, the camera stage 12 and the positioner 15.

[0007] Further referring to Fig. 1, a wafer 20 is mounted on the chuck stage 11 of the inspection station 1, and a measuring probe 30 is fixed to the positioner 15. Here, the measuring probe 30 may be arranged on the positioner 15 and then attached to the probe support plate 13, or may be arranged on a measuring probe card and then attached to the probe support plate 13. The present invention is not limited thereto. The chuck stage 11 may be moved to approach the measuring probe 30, so that the measuring probe 30 on the probe support plate 13 is brought into contact with the wafer 20, and a tip of the measuring probe 30 contacts the wafer 20 and pierces an oxide layer to form an electrical connection for detection.

[0008] With reference to Fig. 1 and Fig. 2, the touch screen device 14 of the inspection station 1 may be configured to display an operation interface W11 for controlling the movable element, and a user controls the movable element by using the touch screen device 14. Further, in one embodiment, information related to the control is displayed using the touch screen device 14, so that a detection operator can determine a control state of the movable element more quickly and accurately. One step of the control method of a touch screen device according to the present invention is displaying a first window W1 and a second window W2 on the touch screen device 14. In one embodiment, the first window W1 and the second window W2 are displayed simultaneously on the touch screen device 14.Consequently, the first window W1 and the second window W2 may be displayed side by side on the touch screen device 14 or may be displayed in an overlapping manner on the touch screen device 14.

[0009] Furthermore, another step of the control method of a touch screen device according to the present invention is to display the operation interface W11 in the first window W1 and display a real-time image W21 in the second window W2. The operation interface W11 in the first window W1 is a graphic interface configured to control a displacement of the movable member, and the real-time image W21 in the second window W2 is an image captured by the camera stage 12 in real time and taken from the wafer 20 on the chuck stage 11.

[0010] Furthermore, a further step of the control method of a touch screen device according to the invention, after displaying the user interface W11 in the first window W1, is to recognize a touch instruction generated on the user interface W11, wherein the movable element moves according to the touch instruction.

[0011] In one embodiment, a manner in which the movable element moves according to the touch instruction generated on the user interface W11 in the first window W1 may include a linear translation, rotation, or a combination of a linear translation and a rotation. Specifically, in an embodiment in which the movable element performs a linear translation according to the touch instruction, the movable element may move along a single linear direction, move along two linear directions that are perpendicular to each other, or move along three linear directions that are perpendicular to each other.

[0012] Furthermore, the touch command generated on the user interface W11 may be the performance of a tap, rotate, slide, or multi-touch at a location located within the first window W1 of the touchscreen device 14 and corresponding to the user interface W11. More specifically, the user interface W11 may recognize the touch command when the user performs a tap, slide, or multi-touch at a location located within the first window W1 of the touchscreen device 14 and corresponding to the user interface W11. Of course, in other embodiments, a touch action suitable for generating a touch command may also be user-defined.

[0013] In some embodiments, the touch instruction generated in the first window W1 of the touch screen device 14 and corresponding to the user interface W11 may be different according to different images on the user interface W11. Referring to Fig. 2, the control surface W11, in one embodiment, includes an image of a visual scroll wheel A. In this embodiment, one way to generate a touch command on the image of the visual scroll wheel A may be an operation mode simulating that of a physical scroll wheel. More specifically, the user may scroll or slide on the image of the visual scroll wheel A of the touch screen device 14 to achieve the same control effect that can be achieved with a physical scroll wheel. Specifically, the image of the visual scroll wheel A has a rectangular outline, and a touch command can be generated by sliding along a long side of the image of the visual scroll wheel A. The touch command generated on the image of each visual scroll wheel A can be used to control the movable element to translate it along a single linear direction.Consequently, with reference to . Fig. 2 and Fig. 3 In other embodiments, when the movable element is to be controlled to translate along a plurality of linear directions, images of a plurality of visual scroll wheels A are provided in the first window W1, and the touch instructions generated on the images of the visual scroll wheels A can be used to control the movable element to translate to the different linear directions.

[0014] Further referring to Fig. 2 and Fig. 3, in an embodiment in which the images of a plurality of visual scroll wheels A are provided in the first window W1, according to one embodiment, the control directions of the movable elements corresponding to the images of the visual scroll wheels A can be directly indicated by letters, but not exclusively, so that a detection user can intuitively learn the control directions of the movable elements corresponding to the images of the visual scroll wheels A. In this embodiment, the first window W1 can include a letter indication at a location adjacent to the image of the visual scroll wheel A, wherein the letter indication directly corresponds to a control direction of a movable element of an image of an adjacent visual scroll wheel A.In a specific embodiment, the letter indication may be an English letter, such as X, Y, or Z, to directly indicate the control direction of the movable element corresponding to the image of the visual scroll wheel A, but is not limited thereto.

[0015] Further referring to Fig. 2 and Fig. 3, in another embodiment, the long side of the image of the visual scroll wheel A can be arranged along the control direction of the corresponding movable element, so that the user can intuitively determine the control directions of the movable elements corresponding to the images of the visual scroll wheels A through visual perception. In any case, the parallel arrangement of the images of the visual scroll wheels A and the differentiation of the control directions of the movable elements corresponding to the images of the visual scroll wheels A by means of a letter indication is also a practical implementation.

[0016] Further referring to Fig. 2 and Fig. 3, in order to more clearly indicate a touch manner of the image of the visual scroll wheel A to the detection user, the first window W1 in one embodiment may further include a first touch mark and a second touch mark at two ends of the long side of the image of the visual scroll wheel A. The first touch mark and the second touch mark may indicate, via images, movement toward the two ends of a direction that controls displacement of the movable element. Specifically, the first touch mark and the second touch mark are images of arrows pointing in opposite directions.Accordingly, the detection user can perform sliding or scrolling on the image of the visual scroll wheel A according to a display direction of the first touch mark or the second touch mark to generate the touch instruction on the image of the visual scroll wheel A.

[0017] With reference to Fig. 4, in one embodiment, the operation surface W11 may include an image of a visual joystick B. In this embodiment, one way to generate a touch command on the image of the visual joystick B may be an operation mode simulating that of a physical joystick. More specifically, the user may perform a drag and remain in contact with the image of the visual joystick B of the touch screen device 14 to achieve the same control effect that can be achieved with a physical joystick. Specifically, the image of the visual joystick B includes at least a touch joystick area B1, a command generation area B2, and a command boundary B3. The touch joystick area B1 is circular.The command boundary B3 and the outline of the touch control lever area B1 form concentric circles, the diameter of the command boundary B3 being larger than the diameter of the outline of the touch control lever area B1, and the space between the outline of the touch control lever area B1 and the command boundary B3 being the command generation area B2.

[0018] In this embodiment, the touch instruction can be generated when contact is maintained with the touch control lever area B1 in the image of the visual control lever B and when the touch control lever area B1 is dragged to the command generation area B2. The user can touch the touch control lever area B1 and push and pull the touch control lever area B1 in a rotational manner to be displaced toward the command boundary B3 to generate the touch instruction in the command generation area B2. Specifically, the touch control lever area B1 is dragged to an arbitrary position in the command generation area B2, and different coordinate values ​​can be defined depending on the two-dimensional coordinates. According to the different coordinate values, different touch instructions are generated on the operation surface W11.In a specific implementation, when the touch instruction is generated according to a two-dimensional coordinate value, the image of the visual control lever B can be used to control the movable member to be displaced along an X direction and a Y direction which are perpendicular to each other, but the invention is not limited thereto.

[0019] With reference to Fig. 5, in one embodiment, the command generation area B2 in the image of the visual joystick B further includes a plurality of first segment control areas B21. Specifically, the first segment control areas B21 are annular areas whose distances from the circle center of the touch joystick area B1 vary. Specifically, the first segment control areas B21 are concentric rings having different diameters relative to the touch joystick area B1. The first segment control area B21 further includes a plurality of second segment control areas B22, wherein the second segment control areas B22 are specifically sector areas obtained by dividing the first segment control area B21 with equal circumferential angles. Herein, different touch instructions can be generated in the first segment control area B21 and the second segment control area B22.In a specific implementation, the touch instructions generated in different first segment control areas B21 can be used to control the movable element to move at different movement speeds, and the touch instructions generated in different second segment control areas B22 can be used to control the movable element to displace in different displacement directions.

[0020] Further referring to Fig. 5, in a specific embodiment, the first segment control area B21 may also be configured to control the movement speed of the movable element depending on a distance from the touch control lever area B1. As an example, but not limited to, the first segment control area B21 closer to the touch control lever area B1 controls the movement speed of the movable element to be slower, with the movement speed of the movable element increasing as the distance from the touch control lever area B1 increases. Of course, the user may independently define the first segment control areas B21 to control the movement speed of the movable element.

[0021] From the example in Fig. 5 shows that the command generation area B2 in the image of the visual joystick B includes four first segment control areas B21, and the first segment control areas B21 may include a different number of second segment control areas B22. In this embodiment, the first segment control areas B21 may include different numbers of second segment control areas B22 according to different areas. Specifically, the first segment control area B21 closest to the touch joystick area B1 includes four second segment control areas B22, and the remaining first segment control areas B21 may include eight second segment control areas B22 as their areas gradually increase. Note that the numbers of the first segment control areas B21 and the second segment control areas B22 are used only as examples for description.The present invention is not limited to this. By setting different numbers of the first segment control areas B21 or the second segment control areas B22, the accuracy of the touch instruction is improved.

[0022] According to the above, when the user touches and presses the touch control lever area B1 in the image of the visual control lever B and pulls the touch control lever area B1 to displace it toward different first segment control areas B21 and different second segment control areas B22, the user can accordingly control the movable member to displace it in different directions at different movement speeds. When touching and pressing and controlling the image of the visual control lever B, the user can quickly determine a control speed or direction corresponding to an ongoing operation from the representations of the first segment control area B21 and the second segment control area B22 displayed on the operation surface W11 and through visual perception, thereby executing control more quickly and accurately.

[0023] Since the overall image of the visual control lever B is a two-dimensional circular planar representation, referring to Fig. 5 In an embodiment in which the control surface W11 includes the image of the visual joystick B, the image of the visual joystick B is primarily used to control movement of the movable element in mutually perpendicular two-dimensional directions. When the movable element is required to be moved in three-dimensional directions, the control surface W11 may include both the image of a visual scroll wheel A and the image of a visual joystick B. A touch instruction corresponding to movement in two-dimensional directions is generated by using the image of the visual joystick B, and a touch instruction for movement in a third direction perpendicular to the two-dimensional directions is generated by using the image of the visual scroll wheel A to satisfy a movement control requirement in three-dimensional directions.

[0024] According to Fig. 6, in one embodiment, the operation surface W11 may include an image of a visual dial C. Here, the visual dial C has a circular outline and a rotary key C1 located within the area of ​​the circular outline. The rotary key C1 is generally a long structure that horizontally crosses the center of the image of the visual dial C. Thus, the shape of the structure of the visual dial C provides the user with a control manner capable of simulating a physical button, wherein the rotary key C1 is touched and pressed for rotation. In this embodiment, a direction of a connecting line of two ends of the rotary key C1 is set as a direction that controls a displacement of the movable member, and the rotary key C1 can generate a touch instruction when pulled, rotated, or slid.A specific application method of the visual scroll wheel C is that the user can adjust the direction of the connecting line between the two ends of the rotary key C1 to the direction in which the movable element is to be controlled for movement, and then perform a sliding movement on the rotary key C1 to control the movement of the movable element. Here, the method for performing the sliding movement on the rotary key C1 to generate a touch command is identical to the method for generating a touch command on the image of the visual scroll wheel A.

[0025] According to the above embodiment, the user can freely rotate the rotary key C1 to define a direction that controls the displacement of the movable element, thereby increasing the freedom of control. Additionally, in one embodiment, detecting a rotational action of the rotary key C1 to control rotation of the movable element is also a possible implementation.

[0026] In the above embodiments, the control surface W11 may further include a value display area at a position adjacent to the visual scroll wheel A, the visual joystick B, or the visual rotary wheel C, wherein the value display area displays a maximum possible displacement value of the displacement that the movable element performs according to the control. The maximum possible displacement value of the displacement can be defined by the user, thereby ensuring that the movable element is within a permissible or expected displacement range in an operation in which a displacement of the movable element is controlled.

[0027] In the above embodiments, all of the touch commands generated by the user on the visual scroll wheel A, the visual joystick B, and the visual rotary wheel C can control the translation directions of the movable element according to the directions of the touch commands generated. In other embodiments, the distances and speeds of the touch commands generated on the images of the visual scroll wheel A, the visual joystick B, and the visual rotary wheel C can be a translation, a distance, and a speed that control the movable element accordingly. Specifically, the speed and distance of the touch command generated on the operation surface W11 are directly proportional to a speed and distance of the translation the movable element is controlled to perform.

[0028] Specifically, since the allowable displacement amounts of the movable member may be different in different directions, the maximum displacement amounts of the movable member are naturally different for different directions. In addition to setting the maximum displacement values ​​of the movable member separately for different directions, a transmission ratio of the image of the visual scroll wheel A, the visual joystick B, or the visual rotary wheel C can be defined according to requirements.For example, if four visual scroll wheels A are provided on the operation surface W11 to respectively control an X direction, a Y direction, a Z direction of the movable element and a rotation angle θ, when the maximum displacement amount of the movable element in the X direction is much larger than that in the Z direction, the user can make a definition by himself, so that by means of touch instructions that generate an equal distance in the images of the visual scroll wheels A corresponding to the X direction and the Z direction, the movable element is accordingly controlled to be displaced over different distances.For example, it is specified that a touch command that generates a 1 cm shift in the image of the visual scroll wheel A corresponding to the X direction correspondingly controls a 10 cm shift of the movable element, while a touch command that generates a 1 cm shift in the image of the visual scroll wheel A corresponding to the Y direction correspondingly controls a 1 cm shift of the movable element. Thus, it can be ensured that the control for the directions can be fully implemented within the limited space of the user interface W11.

[0029] Additionally, in the above embodiments, a way to generate the touch instruction on the images of the visual scroll wheel A, the visual joystick B, and the visual rotary wheel C for respectively controlling a displacement of the movable element may be, but is not limited to, controlling the movable element for continuous and uninterrupted displacement. In other embodiments, the movable element may be controlled to be displaced in a stepped manner, and corresponding display information may be displayed on the operation interface W11 so that the user can know a current displacement mode of the movable element (for example, the STEP display indicates a step displacement).

[0030] With reference to Fig. 2, in one embodiment, the touchscreen device 14 may further display a third window W3 to enable the user to quickly determine a current position and control state of the movable element on the touchscreen device 14. The third window W3 may overlap with, but is not limited to, the second window W2 or the first window W1, with a current position data value of the movable element being displayed in the third window W3.

[0031] Referring again to Fig.2, the touch screen device 14 may further include a fourth window W4 in one embodiment. The fourth window W4 may overlap with the second window W2, but is not limited thereto, wherein the fourth window W4 displays a digital wafer map. The wafer map displayed in the fourth window W4 is a digital wafer map of the wafer 20 shown in the second window W2, wherein the wafer map of the fourth window W4 has a standard mark H. The touch instruction on the operation surface W11 for controlling the movable element to be displaced controls the displacement using the standard mark H as a standard position. The position data displayed in the third window W3 is also a relative coordinate position value generated using the standard mark H as the standard position.

[0032] From the foregoing, it is apparent that in the present invention, the user can control the movable member by displaying various touch images displayed on the operation surface W11 for touch and control by a touch method, wherein the images or values ​​displayed on the operation surface W11 quickly provide the user with accurate control values, thereby improving the precision and efficiency of control of the movable member. LIST OF REFERENCE SYMBOLS 1 test station 11 Chuck platform 12 Camera stage 13 Probe carrier plate 14 touch screen device 15 positioners 16 housings W1 first window W11 user interface W2 second window W21 real-time image W3 third window W4 fourth window A visual scroll wheel B visual control lever B1 Touch control lever area B2 Command generation area B21 first segment control area B22 second segment control area B3 Command Limit C visual dial C1 rotary key H Standard marking

Claims

[1] A control method of a touch screen device applicable to an inspection station (1) comprising a movable element, the movable element being optionally a chuck stage (11), a camera stage (12) or a positioner (15), and the method comprising: Displaying a first window (W1) and a second window (W2) on a touch screen device (14), Displaying a user interface (W11) in the first window (W1) and displaying a real-time image (W21) in the second window (W2) and Detecting a touch instruction generated on the user interface (W11), whereby the movable element moves according to the touch instruction characterized by that the user interface (W11) includes an image of a visual scroll wheel (A). [2] A control method of a touch screen device according to claim 1, wherein the first window (W1) can overlap with the second window (W2) in a shifted manner. [3] A control method of a touch screen device according to claim 1, wherein the first window (W1) further displays a value display area, the value display area displaying a maximum possible shift value of a shift that controls the visual scroll wheel (A) so that the movable member executes it accordingly. [4] A control method of a touch screen device according to claim 1, wherein the movable member rotates or performs a linear displacement according to the touch instruction. [5] A control method of a touch screen device applicable to an inspection station (1) comprising a movable element, the movable element being optionally a chuck stage (11), a camera stage (12) or a positioner (15), and the method comprising: Displaying a first window (W1) and a second window (W2) on a touch screen device (14), Displaying a user interface (W11) in the first window (W1) and displaying a real-time image (W21) in the second window (W2) and Detecting a touch instruction generated on the user interface (W11), whereby the movable element moves according to the touch instruction, characterized by that the user interface (W11) includes an image of a visual control lever (B), wherein the image of the visual control lever (B) further comprises a Touch control lever area (B1), a command generation area (B2) and a command boundary (B3), wherein the command boundary (B3) and the outline of the touch control lever area (B1) form concentric circles, wherein the area between the outline of the touch control lever area (B1) and the command boundary (B3) is the command generation area (B2), and wherein a touch instruction can be generated when contact with the touch control lever area (B1) is maintained and the touch control lever area (B1) is pulled towards the command generation area (B2), and wherein the command generation area (B2) further comprises a plurality of first segment control areas (B21), wherein the plurality of first segment control areas (B21) further separately comprises a plurality of second segment control areas (B22),wherein the plurality of first segment control areas (B21) and the plurality of second segment control areas (B22) can each generate different touch instructions.., [6] A control method of a touch screen device according to claim 5, wherein the touch instructions generated respectively in the plurality of first segment control areas (B21) can control the movable member to move at different moving speeds, and the touch instructions generated respectively in the plurality of second segment control areas (B22) can control the movable member to displace in different displacement directions. [7] A control method of a touch screen device according to any one of claims 1 or 5, wherein the operation surface (W11) includes an image of a visual dial (C), the visual dial (C) having a circular outline and a rotary key (C1) located within the range of the circular outline, wherein touching and pressing and rotation are performed on the rotary key (C1) to change a sliding direction of the movable member. [8] A control method of a touch screen device applicable to an inspection station (1) comprising a movable element, the movable element being optionally a chuck stage (11), a camera stage (12) or a positioner (15), and the method comprising: Displaying a first window (W1) and a second window (W2) on a touch screen device (14), Displaying a user interface (W11) in the first window (W1) and displaying a real-time image (W21) in the second window (W2) and Detecting a touch instruction generated on the user interface (W11), whereby the movable element moves according to the touch instruction characterized by that the user interface (W11) comprises an image of a visual scroll wheel (A) and an image of a visual control lever (B). [9] A control method of a touch screen device according to any one of claims 1, 5 or 8, wherein a manner of generating the touch instruction on the operation surface (W11) is tapping, sliding or multi-touching. [10] A control method of a touch screen device according to any one of claims 1, 5 or 8, wherein the touch screen device (14) further displays a third window (W3), the third window (W3) displaying movement information of the movable member.

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