CIRCUIT FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) AND ASSOCIATED DEVICE

Abstract

Circuit for microelectromechanical systems, MEMS circuit (34), comprising: a first set of MEMS switches (28(1)-28(N)), each configured to close or open in response to receiving a high control voltage or a low control voltage, respectively; and a MEMS-based driver circuit (36) coupled to the first number of MEMS switches (28(1)-28(N)) and configured for the following: to receive a second set of control signals configured to jointly identify a selected MEMS switch from the first set of MEMS switches (28(1)-28(N)); to decode the second set of control signals to determine the selected MEMS switch; and to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch, where the second number of control signals is smaller than the first number of MEMS switches (28(1)-28(N)).

Description

Territory of Revelation

[0001] The disclosure relates to a circuit for microelectromechanical systems and a device for microelectromechanical systems. The technology of the disclosure further relates, in general, to the operation of switches for microelectromechanical systems (MEMS) in an electrical circuit. General state of the art

[0002] Mobile communication devices have become increasingly prevalent in today's society. This proliferation is partly driven by the many functions now supported by such devices. Increased processing power in these devices means that mobile communication devices have evolved from mere communication tools into complex mobile multimedia centers that enable enhanced user experiences.

[0003] The redefined user experience requires higher data rates, which are offered by wireless communication technologies such as Long-Term Evolution (LTE) and Fifth-Generation New Radio (5G-NR). In this regard, a mobile communication device may need to operate in a variety of modes, such as spatial multiple-input multiple-output (MIMO) diversity, spatial MIMO multiplexing, and / or radio frequency (RF) beamforming. Additionally, the mobile communication device may need to transmit RF signals, either simultaneously or sequentially, on different RF bands associated with different wireless communication technologies. Therefore, the mobile communication device may incorporate a number of RF filters to manage the communication of RF signals on these different RF bands.Accordingly, the mobile communication device can use a number of switches to switch the RF signals between different RF filters in different operating modes.

[0004] In particular, a conventional switch, such as a silicon-on-insulator (SOI) switch, can produce a relatively higher on-resistance (RON) when the conventional switch is closed, and a relatively higher off-capacitance (C). OFF ) generate when the conventional switch is open. Accordingly, the conventional switch can operate at a degraded figure-of-merit (FOM) (FOM = R). ON ×C OFF) suffer and cause unwanted insertion loss, degrading the RF efficiency and / or performance of the mobile communication device. In contrast, a microelectromechanical systems (MEMS) switch typically has a field of measurement (FOM) that is at least 1 / 3 lower than that of a conventional SOl switch. As a result, it may be possible to reduce the unwanted insertion loss associated with a conventional SOl switch by replacing it with a MEMS switch, thereby helping to improve the RF efficiency and / or performance of the mobile communication device. Document US 2012 / 0168290A1 discloses a switching device. Document US 6 972 881 B1 discloses a display with on-substrate muxing. Document US 2001 / 0030489A1 discloses a method for generating a signal with at least one desired output frequency. Brief description

[0005] The invention is defined in the independent claims. The dependent claims describe embodiments of the invention. Aspects disclosed in the detailed description include a circuit for microelectromechanical systems (MEMS) and an associated device. A MEMS device can be configured to include a MEMS circuit and a control circuit. In the examples discussed herein, the MEMS circuit and the control circuit are provided on separate semiconductor chips. The MEMS circuit includes a first set of MEMS switches, each configured to close or open based on a high control voltage (e.g., 40 V) or a low control voltage (e.g., 0 V), respectively.The MEMS circuit includes a MEMS-based driver circuit configured to receive a second set of control signals that collectively identify a selected MEMS switch from the first set of MEMS switches. Accordingly, the MEMS-based driver circuit decodes the second set of control signals and causes the selected MEMS switch to close by applying the high driver voltage. By using fewer control signals to control a larger number of MEMS switches, it may be possible to reduce the number of control lines between the control circuit and the MEMS circuit, thereby reducing the routing complexity and space requirements of the MEMS device.

[0006] In one aspect, a MEMS circuit is provided. The MEMS circuit includes an initial set of MEMS switches, each configured to close or open in response to receiving a high or low control voltage, respectively. The MEMS circuit also includes a MEMS-based driver circuit coupled to the initial set of MEMS switches. The MEMS-based driver circuit is configured to receive a second set of control signals, which are configured to collectively identify a selected MEMS switch from the initial set of MEMS switches. The MEMS-based driver circuit is also configured to decode the second set of control signals to determine the selected MEMS switch.The MEMS-based driver circuit is also configured to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch.

[0007] In another aspect, a MEMS device is provided. The MEMS device includes a MEMS circuit. The MEMS circuit includes a first set of MEMS switches, each configured to close or open in response to receiving a high or low control voltage, respectively. The MEMS circuit also includes a MEMS-based driver circuit coupled to the first set of MEMS switches. The MEMS-based driver circuit is configured to receive a second set of control signals, which are configured to collectively identify a selected MEMS switch from the first set of MEMS switches. The MEMS-based driver circuit is also configured to decode the second set of control signals to determine the selected MEMS switch.The MEMS-based driver circuit is also configured to provide the high control voltage to the selected MEMS switch to close it. The MEMS device also includes a control circuit coupled to the MEMS-based driver circuit. This control circuit is configured to provide the second set of control signals to the MEMS-based driver circuit.

[0008] The person skilled in the art will understand the scope of the disclosure and realize additional aspects of it after reading the following detailed description in conjunction with the accompanying drawings. Brief description of the drawings

[0009] The attached drawings, which are integrated here and form part of this patent specification, illustrate several aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure. Fig. Figure 1 is a schematic representation of an existing microelectromechanical systems (MEMS) device in which a control circuit is configured to control a number of MEMS switches based on an equal number of control lines; Fig. Figure 2 is a schematic representation of an exemplary MEMS device configured according to an embodiment of the present disclosure to control a number of MEMS switches based on a lower number of control lines, in order to help reduce the routing complexity and space requirement of the MEMS device; Fig. Figure 3 is a schematic representation that provides an exemplary illustration of the MEMS device. Fig. 2 provides, configured according to an embodiment of the present disclosure to control twelve (12) MEMS switches based on four (4) control lines; The Fig. Figures 4A-4L are schematic diagrams providing exemplary illustrations of 12 MEMS-based decoders that are integrated into the MEMS device from the Fig. 2 and Fig. 3 can be included; Fig. Figure 5A is a schematic representation of an exemplary MEMS device configured according to an embodiment of the present disclosure to control a number of MEMS switches and a number of MEMS shunt switches based on a lower number of control lines; and Fig. Figure 5B is a schematic representation of an exemplary MEMS-based inverter (or inverter) that is part of the MEMS device. Fig. 5A can be provided to control the MEMS shunt switches. Detailed description

[0010] The embodiments set forth below represent the information necessary to enable a person skilled in the art to use the embodiments and illustrate the best way to implement them. Upon reading the following description with reference to the accompanying drawings, a person skilled in the art will understand the concepts of the disclosure and will recognize applications of these concepts that are not specifically addressed here. It is understood that these concepts and applications fall within the scope of the disclosure and the accompanying claims.

[0011] It is understood that, although the terms first, second, etc., may be used in this writing to describe different elements, these elements are not to be limited by these terms. These terms are used merely to distinguish one element from another. For example, a first element could be called a second element, and similarly, a second element could be called a third element, without departing from the scope of the present revelation. In the sense used here, the term "and / or" includes any and all combinations of one or more of the associated elements mentioned.

[0012] It is understood that when an element, such as a layer, area, or substrate, is described as being "on" another element or extending "to" another, it may be located directly on top of or extending directly onto the other element, or intervening elements may also be present. Conversely, when an element is described as being "directly on" another element or extending "directly" onto another, no intervening elements are present. Likewise, it is understood that when an element, such as a layer, area, or substrate, is described as being "over" another element or extending "over" another, it may be located directly above or extending directly onto the other element, or intervening elements may also be present.Conversely, if an element is described as being "directly above" or extending "directly above" another element, then there are no intervening elements. It is also understood that if an element is described as being "connected" or "coupled" to another element, it may be directly connected or coupled to that other element, or there may be intervening elements. Conversely, if an element is described as being "directly connected" or "directly coupled" to another element, then there are no intervening elements.

[0013] Relative terms, such as "below" or "above," "upper" or "lower," or "horizontal" or "vertical," may be used herein to describe a relationship of one element, layer, or area to another element, layer, or area, as illustrated in the figures. It is understood that these terms, and those discussed above, are intended to encompass various orientations of the device in addition to the orientation shown in the figures.

[0014] The terminology used herein serves only to describe certain embodiments and is not intended to limit the disclosure. In the sense used herein, the singular forms "a", "an", as well as "the", "a", "a" are to be understood as including the plural forms, unless the context clearly indicates otherwise. It is further understood that the expressions "comprises", "comprising", "includes", and / or "including", when used herein, indicate the presence of specified features, integers, steps, processes, elements, and / or components, but do not exclude the presence or addition of one or more features, integers, steps, processes, elements, components, and / or groups thereof.

[0015] Unless otherwise defined, all terms used in this document (including technical and scientific terms) have the same meaning as understood by an average person skilled in the art in the field to which this disclosure relates. Furthermore, it is understood that terms used herein are to be interpreted as having a meaning consistent with their meaning in the context of this patent specification and the relevant field, and not in an idealized or overly formal sense, unless expressly defined otherwise herein.

[0016] Aspects disclosed in the detailed description include a microelectromechanical systems (MEMS) circuit and an associated device. A MEMS device can be configured to include a MEMS circuit and a control circuit. In the examples discussed herein, the MEMS circuit and the control circuit are provided on separate semiconductor chips. The MEMS circuit includes a first set of MEMS switches, each configured to close or open based on a high control voltage (e.g., 40 V) or a low control voltage (e.g., 0 V), respectively. The MEMS circuit includes a MEMS-based driver circuit configured to receive a second set of control signals that together identify a selected MEMS switch from the first set of MEMS switches.Accordingly, the MEMS-based driver circuit decodes the second set of control signals and causes the selected MEMS switch to close by applying the high driver voltage. By using fewer control signals to control a larger number of MEMS switches, it may be possible to reduce the number of control lines between the control circuit and the MEMS circuit, thereby helping to reduce the routing complexity and space requirements of the MEMS device.

[0017] Before discussing a MEMS circuit and an associated MEMS device of the present disclosure, reference will first be made to Fig. 1. A brief overview of an existing MEMS device that uses individual control lines to control a number of MEMS switches is provided. The discussion of specific exemplary aspects of the MEMS circuit and the associated MEMS device of the present disclosure begins below with reference to Fig. 2.

[0018] In this regard, Fig. Figure 1 shows a schematic representation of an existing MEMS device 10, in which a control circuit 12 is configured to control a number of MEMS switches 14(1)-14(N) based on an equal number of control lines 16(1)-16(N). The MEMS switches 14(1)-14(N) can be closed together or individually to couple a number of RF signals 18(1)-18(N) to such active / passive circuits as RF filters and / or antennas (not shown). The control circuit 12 can be configured to control the MEMS switches 14(1)-14(N) each via a number of control signals 20(1)-20(N). The control signals 20(1)-20(N) are provided by the control circuit 12 to the MEMS switches 14(1)-14(N) via the control lines 16(1)-16(N). The number of control lines 16(1)-16(N) is equal to the number of MEMS switches 14(1)-14(N).

[0019] The control circuit 12 can be provided in a first semiconductor chip 22, while the MEMS switches 14(1)-14(N) are provided in a second semiconductor chip 24, which is separate from the first semiconductor chip 22. The existing MEMS device 10 can incorporate a large number of the MEMS switches 14(1)-14(N) (e.g., N = 16, 32, 64, 128, 256, and so on) when provided in a wireless communication device (not shown) to support such RF technologies as multiple-input multiple-output (MIMO) and / or beamforming in a millimeter-wave (mm-wave) RF spectrum. Accordingly, it may be necessary to place an equal number of control lines 16(1)-16(N) between the first semiconductor chip 22 and the second semiconductor chip 24 to control the MEMS switches 14(1)-14(N).As a result, it may be necessary to provide the existing MEMS device 10 with a larger footprint to accommodate an increased number of control lines 16(1)-16(N). In this regard, it may be desirable to reduce the number of control lines 16(1)-16(N) between the first semiconductor chip 22 and the second semiconductor chip 24, especially if the second semiconductor chip 24 includes a large number of MEMS switches 14(1)-14(N).

[0020] Fig. Figure 2 is a schematic representation of an exemplary MEMS device 26 configured according to an embodiment of the present disclosure to control a first number of MEMS switches 28(1)-28(N) (interchangeable as “SW1-SW1”). N“designated and referenced) based on a second number of control lines 30(1)-30(M) (M <N) zu steuern, um dabei behilflich zu sein, Verlegungskomplexität und Platzbedarf der MEMS-Vorrichtung 26 zu reduzieren. Zur Vereinfachung des mathematischen Ausdrucks werden N und M hierin nachfolgend als die „erste Anzahl“ bzw. die „zweite Anzahl“ bezeichnet.

[0021] Each of the MEMS switches 28(1)-28(N) can be closed or opened in response to receiving a high control voltage (e.g., 40 V) or a low control voltage (e.g., 0 V). In a non-restrictive example, the MEMS switches 28(1)-28(N) can be closed to allow a number of RF signals 32(1)-32(N) to be routed to RF filters and / or antennas (not shown) coupled to the MEMS switches 28(1)-28(N). Conversely, the MEMS switches 28(1)-28(N) can be opened to block the RF signals 32(1)-32(N) from RF filters and / or antennas.

[0022] The MEMS device 26 includes a MEMS circuit 34. The MEMS circuit 34 includes the MEMS switches 28(1)-28(N) and a MEMS-based driver circuit 36, each of which is coupled to the MEMS switches 28(1)-28(N) via a number of control voltage lines 38(1)-38(N). In this respect, the MEMS circuit 34 includes the same number of control voltage lines 38(1)-38(N) as the MEMS switches 28(1)-28(N).

[0023] The MEMS device 26 includes a control circuit 40, which can be, for example, a microprocessor, a microcontroller, or a field-programmable gate array (FPGA). The control circuit 40 is coupled to the MEMS-based driver circuit 36 ​​via the second set of control lines 30(1)-30(M). The control circuit 40 is configured to provide a second set of control signals 42(1)-42(M) to the MEMS-based driver circuit 36, each via the second set of control lines 30(1)-30(M). Additionally, the control circuit 40 also provides a direct current (DC) voltage V. DC The DC voltage is supplied to the MEMS-based driver circuit 36 ​​via a DC voltage line 44. In a non-restrictive example, the DC voltage V is DC greater than or equal to the high control voltage (e.g. 40 V).

[0024] The control circuit 40 can be configured to generate the control signals 42(1)-42(M) to jointly identify a selected MEMS switch from among the MEMS switches 28(1)-28(N), which is to be closed by the MEMS-based driver circuit 36. The MEMS-based driver circuit 36 ​​receives and decodes the control signals 42(1)-42(M) to determine the selected MEMS switch identified by these signals. Accordingly, the MEMS-based driver circuit 36 ​​closes the selected MEMS switch by applying the DC voltage V. DC to the selected MEMS switch as the high control voltage.

[0025] In a non-restrictive example, the control circuit 40 is provided in a first semiconductor chip 46, and the MEMS circuit 34 is provided in a second semiconductor chip 48, which is separate from the first semiconductor chip 46. In contrast to the existing MEMS device 10 made of Fig. 1. The MEMS device 26 uses fewer control lines 30(1)-30(M) than the MEMS switches 28(1)-28(N) (M < N). This may reduce the routing complexity between the first semiconductor chip 46 and the second semiconductor chip 48, thereby helping to reduce the space requirement of the MEMS device 26.

[0026] In a non-restrictive example, the first number N and the second number M can be determined based on the following equation (Eq. 1). 2M≥N

[0027] According to the preceding equation (Eq. 1), the control circuit 40 can be configured to program the control signals 42(1)-42(M) to jointly generate a first number of binary codewords BW1-BW Nto represent, in order to uniquely identify the MEMS switches 28(1)-28(N). The control circuit 40 can activate the high control voltage (e.g., 40 V) on a selected control line from the control lines 30(1)-30(M), so that a corresponding control signal from the control signals 42(1)-42(M) generates a binary one (1) in any one of the binary codewords BW1-BW N can represent. In contrast, the control circuit on the selected control line can deactivate the high control voltage or activate the low control voltage (e.g., 0 V), so that the corresponding control signal is a binary zero (0) in any of the binary codewords BW1-BW. N can represent.

[0028] The MEMS-based driver circuit 36 ​​can be configured to include an initial number of MEMS-based decoders 50(1)-50(N), each coupled to the MEMS switches 28(1)-28(N). There is an equal number of MEMS-based decoders 50(1)-50(N) and MEMS switches 28(1)-28(N). The MEMS-based decoders 50(1)-50(N) are each configured according to the binary codewords BW1-BW1. N Configured. A non-restrictive example of configuring the MEMS-based decoders 50(1)-50(N) according to the binary codewords BW1-BW N will be discussed later with reference to the Fig. 4A-4I provided.

[0029] In this regard, if the control circuit 40 generates the control signals 42(1)-42(M) to jointly select a binary codeword from the binary codewords BW1-BW NTo represent the selected binary codeword, a selected MEMS-based decoder, configured according to the selected codeword, can decode it from among the MEMS-based decoders 50(1)-50(N). Accordingly, the selected MEMS-based decoder can output the DC voltage V DC than applying the high control voltage to cause the selected MEMS switch to close. In a non-restrictive example, the MEMS-based decoders 50(1)-50(N) that are not configured according to the selected binary codeword can open the remaining MEMS switches (except for the selected MEMS switch) from MEMS switches 28(1)-28(N).

[0030] In a non-restrictive example, the MEMS circuit 34 contains twelve (12) MEMS switches. Thus, the first number N is equal to twelve (12). According to the preceding equation (Eq. 1), the second number M must be four (4). In this respect, Fig. 3 a schematic representation that provides an exemplary illustration of the MEMS device 10 from Fig. 2 provides, configured according to an embodiment of the present disclosure to provide the 12 MEMS switches 28(1)-28(12) (interchangeable as “SW1-SW 12 “designated and referenced) to control on the basis of 4 control lines 30(1)-30(4). Common elements between the Fig. 2 and Fig. Three of them are shown therein with common element numbers and are not described again here.

[0031] As discussed previously in Fig. 2. The control circuit 40 can be configured to use 12 binary codewords BW1-BW. 12 to be generated jointly based on the control signals 42(1)-42(4). The 12 binary codewords BW1-BW 12are configured to uniquely identify each of the 12 MEMS switches 28(1)-28(12). The control circuit 40 can activate the high control voltage (e.g., 40 V) on a selected control line from control lines 30(1)-30(4), so that a corresponding control signal from control signals 42(1)-42(4) will produce a binary 1 in any of the 12 binary codewords BW1-BW1. 12 can represent. In contrast, the control circuit on the selected control line can deactivate the high control voltage or activate the low control voltage (e.g., 0 V), so that the corresponding control signal is a binary 0 in any of the binary codewords BW1-BW. 12 can represent. In a non-restrictive example, the control circuit 40 can represent the 12 binary codewords BW1-BW. 12 generate based on the following coding table (Table 1). Table 1 Binary Codeword BW1-BW 12 Steuersignal42(4) Steuersignal42(3) Steuersignal42(2) Steuersignal42(1) MEMS switch, identified by binary codeword BW1-BW 12 BW1 0 0 0 1 SW1 / 28(1) BW2 0 0 1 0 SW2 / 28(2) BW3 0 0 1 1 SW3 / 28(3) BW4 0 1 0 0 SW4 / 28(4) BW5 0 1 0 1 SW5 / 28(5) BW6 0 1 1 0 SW6 / 28(6) BW7 0 1 1 1 SW7 / 28(7) BW8 1 0 0 0 SW8 / 28(8) BW9 1 0 0 1 SW9 / 28(9) BW 10 1 0 1 0 SW 10 / 28(10) BW 11 1 0 1 1 SW 11 / 28(11) BW 12 1 1 0 0 SW 12 / 28(12)

[0032] For example, to generate the binary codeword BW1 to uniquely identify the MEMS switch 28(1), the control circuit 40 can generate the control signal 42(1) at the high control voltage (e.g., 40 V), while the control signals 42(2)-42(4) are generated at the low control voltage (e.g., 0 V). By providing the four control lines 30(1)-30(4) in the MEMS device 26, the four control signals 42(1)-42(4) together can represent up to 16 binary codewords (0000-1111). However, since the MEMS circuit 34 only contains 12 MEMS switches, the binary codewords 1101-1111 are reserved. Additionally, the binary codeword 0000 can be configured to cause all 12 MEMS switches 28(1)-28(12) to be opened simultaneously.

[0033] The MEMS-based driver circuit 36 ​​includes the MEMS-based decoders 50(1)-50(12) (referred to as "MEMS-based decoder 1-MEMS-based decoder 12"). The MEMS-based decoders 50(1)-50(12) are each designated according to the binary codewords BW1-BW 12 Configured. Depending on the selected binary codeword, which is jointly represented by the control signals 42(1)-42(4), one of the MEMS-based decoders 50(1)-50(12) is uniquely identified by the selected binary codeword and can thus decode the selected binary codeword. Accordingly, the MEMS-based decoder can output the DC voltage V DC than applying the high control voltage to close the MEMS switch that is coupled to the MEMS-based decoder.

[0034] In a non-restrictive example, each of the MEMS-based decoders 50(1)-50(12) includes the same number of MEMS switches as the number of control signals 42(1)-42(4). In this respect, each of the MEMS-based decoders 50(1)-50(12) includes 4 MEMS switches, which are controlled according to a corresponding binary codeword from the binary codewords BW1-BW 12 are configured. Fig. 4A-4L are schematic representations that provide exemplary illustrations of MEMS-based decoders 50(1)-50(12) in the MEMS-based driver circuit 36. Fig. 3. Provide common elements between the Fig. 3 and 4A-4L are shown therein with common element numbers and are not described again here.

[0035] Fig. Figure 4A is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(1) from Fig. 3. The MEMS-based decoder 50(1) includes four MEMS switches 52(1)-52(4). The MEMS switches 52(1)-52(4) are each opened or closed by the control signals 42(1)-42(4). In particular, the MEMS-based decoder 50(1) is configured according to the binary codeword BW1 in the preceding coding table (Table 1). In this respect, when the control signals 42(1)-42(4) together represent the binary codeword BW1, the MEMS switch 52(1) is closed and the MEMS switches 52(2)-52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(1) to activate the MEMS switch 28(1) (not shown) in the MEMS circuit 34 Fig. 3. The MEMS-based decoder 50(1) can include a resistor 54 coupled between the control voltage line 38(1) and ground (GND). The resistor 54 can be configured to pull down the control voltage line 38(1) when the control signals 42(1)-42(4) together represent a binary codeword other than the binary codeword BW1. In an alternative embodiment, it may also be possible to couple the resistor 54 to the DC voltage line 44.

[0036] Fig. Figure 4B is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(2) from Fig. 3 provides. The MEMS-based decoder 50(2) is configured according to the binary codeword BW2 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW2, the MEMS switch 52(2) is closed and the MEMS switches 52(1), 52(3) and 52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(2) to activate the MEMS switch 28(2) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0037] Fig. Figure 4C is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(3) from Fig. 3 provides. The MEMS-based decoder 50(3) is configured according to the binary codeword BW3 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW3, the MEMS switches 52(1) and 52(2) are closed and the MEMS switches 52(3) and 52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(3) to activate the MEMS switch 28(3) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0038] Fig. 4D is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(4) from Fig. 3 provides. The MEMS-based decoder 50(4) is configured according to the binary codeword BW4 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW4, the MEMS switch 52(3) is closed and the MEMS switches 52(1), 52(2) and 52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(4) to activate the MEMS switch 28(4) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0039] Fig. Figure 4E is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(5) from Fig. 3 provides. The MEMS-based decoder 50(5) is configured according to the binary codeword BW5 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW5, the MEMS switches 52(1) and 52(3) are closed and the MEMS switches 52(2) and 52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(5) to activate the MEMS switch 28(5) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0040] Fig. 4F is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(6) from Fig. 3 provides. The MEMS-based decoder 50(6) is configured according to the binary codeword BW6 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW6, the MEMS switches 52(2) and 52(3) are closed and the MEMS switches 52(1) and 52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(6) to activate the MEMS switch 28(6) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0041] Fig. 4G is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(7) from Fig. 3 provides. The MEMS-based decoder 50(7) is configured according to the binary codeword BW7 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW7, the MEMS switches 52(1), 52(2) and 52(3) are closed and the MEMS switch 52(4) is opened, thereby supplying the DC voltage V DC output on the control voltage line 38(7) to activate the MEMS switch 28(7) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0042] Fig. 4H is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(8) from Fig. 3 provides. The MEMS-based decoder 50(8) is configured according to the binary codeword BW8 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW8, the MEMS switch 52(4) is closed and the MEMS switches 52(1), 52(3) and 52(4) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(8) to activate the MEMS switch 28(8) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0043] Fig. Figure 4I is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(9) from Fig. 3 provides. The MEMS-based decoder 50(9) is configured according to the binary codeword BW9 in the preceding coding table (Table 1). In this regard, when the control signals 42(1)-42(4) together represent the binary codeword BW9, the MEMS switches 52(1) and 52(4) are closed and the MEMS switches 52(2) and 52(3) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(9) to activate the MEMS switch 28(9) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0044] Fig. 4J is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(10) from Fig. 3 provides. The MEMS-based decoder 50(10) corresponds to the binary codeword BW. 10 configured in the preceding coding table (Table 1). In this regard, if the control signals 42(1)-42(4) together form the binary codeword BW 10To represent, MEMS switches 52(2) and 52(4) are closed and MEMS switches 52(1) and 52(3) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(10) to activate the MEMS switch 28(10) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0045] Fig. 4K is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(11) from Fig. 3 provides. The MEMS-based decoder 50(11) corresponds to the binary codeword BW. 11 configured in the preceding coding table (Table 1). In this regard, when the control signals 42(1) - 42(4) together represent the binary codeword BW1, the MEMS switches 52(1), 52(2) and 52(4) are closed and the MEMS switch 52(3) is opened, thereby increasing the DC voltage V DCoutput on the control voltage line 38(11) to activate the MEMS switch 28(11) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0046] Fig. 4L is a schematic representation that provides an exemplary illustration of the MEMS-based decoder 50(12) from Fig. 3 provides. The MEMS-based decoder 50(12) corresponds to the binary codeword BW. 12 configured in the preceding coding table (Table 1). In this regard, if the control signals 42(1) - 42(4) together form the binary codeword BW 12 To represent, the MEMS switches 52(3) and 52(4) are closed and the MEMS switches 52(1) and 52(2) are opened, thereby increasing the DC voltage V DC output on the control voltage line 38(12) to activate the MEMS switch 28(12) (not shown) in the MEMS circuit 34 Fig. 3 to close.

[0047] Fig. 5A is a schematic representation of an exemplary MEMS device 26A configured according to an embodiment of the present disclosure to include a first number of MEMS switches 56(1) - 56(N) (interchangeable as “SW1-SW1”). N " designated and referenced) and a first number of MEMS shunt switches 58(1) - 58(N) based on a second number of control lines 30(1) - 30(M) (M <N) zu steuern. Gemeinsame Elemente zwischen den Fig. 2 and Fig. 5A are shown therein with common element numbers and are not described again here.

[0048] The MEMS device 26A includes a MEMS-based driver circuit 36A. The MEMS-based driver circuit 36A includes an initial set of MEMS-based inverters 60(1) - 60(N) (referred to as "inverters"), each coupled to the MEMS-based decoders 50(1) - 50(N). The MEMS-based inverters 60(1) - 60(N) are configured to operate (open or close) the MEMS shunt switches 58(1) - 58(N).

[0049] More specifically, each of the MEMS-based inverters 60(1) - 60(N) is configured to open a coupled MEMS shunt switch from the MEMS shunt switches 58(1) - 58(N) in response to a coupled MEMS-based decoder from the MEMS-based decoders 50(1) - 50(N) outputting the high control voltage. For example, the MEMS-based inverter 60(1) is configured to output the low control voltage to open the MEMS shunt switch 58(1) when the MEMS-based decoder 50(1) outputs the high control voltage to close the MEMS switch 56(1).

[0050] Each of the MEMS-based inverters 60(1) - 60(N) is also configured to close a coupled MEMS shunt switch from the MEMS shunt switches 58(1) - 58(N) in response to a coupled MEMS-based decoder from the MEMS-based decoders 50(1) - 50(N) outputting the low control voltage. For example, the MEMS-based inverter 60(1) is configured to output the high control voltage to close the MEMS shunt switch 58(1) when the MEMS-based decoder 50(1) outputs the low control voltage to open the MEMS switch 56(1).

[0051] Fig. 5B is a schematic representation of an exemplary MEMS-based inverter 60X, which is used in the MEMS device 26A. Fig. 5A can be provided as any of the MEMS-based inverters 60(1) - 60(N). Common elements between the Fig. 5A and Fig.5B are shown therein with common element numbers and are not described again here.

[0052] The MEMS-based inverter 60X includes a MEMS switch 62. The MEMS switch 62 has a control end 64 that is coupled to the control voltage lines 38(1) - 38(N). The MEMS switch 62 has a second end 66 that is coupled to GND, and a third end 68 that is coupled to the DC voltage line 44 via a resistor 70. The resistor 70 can be configured to limit electrical current flowing from the third end 68 through the MEMS switch 62 to GND when the MEMS switch 62 is closed.

[0053] In this regard, when the MEMS-based decoders 50(1)-50(N) output the high control voltage to the control voltage lines 38(1)-38(N), the MEMS switch 62 closes, thereby outputting the low control voltage (by coupling to GND). Conversely, when the MEMS-based decoders 50(1)-50(N) output the low control voltage to the control voltage lines 38(1)-38(N), the MEMS switch 62 opens, thereby outputting the high control voltage (by coupling to the DC voltage line 44).

[0054] The person skilled in the art will recognize improvements and modifications to the embodiments of the present disclosure. All such improvements and modifications are considered to fall within the scope of the concepts disclosed herein and the following patent claims.

Claims

[1] Circuit for microelectromechanical systems, MEMS circuit (34), comprising: a first set of MEMS switches (28(1)-28(N)), each configured to close or open in response to receiving a high control voltage or a low control voltage, respectively; and a MEMS-based driver circuit (36) coupled to the first number of MEMS switches (28(1)-28(N)) and configured for the following: to receive a second set of control signals configured to jointly identify a selected MEMS switch from the first set of MEMS switches (28(1)-28(N)); to decode the second set of control signals to determine the selected MEMS switch; and to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch, where the second number of control signals is smaller than the first number of MEMS switches (28(1)-28(N)). [2] MEMS circuit (34) according to claim 1, wherein the MEMS-based driver circuit (36) is further configured to receive and provide a DC voltage to the selected MEMS switch as the high control voltage. [3] MEMS circuit (34) according to one of claims 1 to 2, wherein the MEMS-based driver circuit (36) comprises a first number of MEMS-based decoders (50(1)-50(12)) each coupled to the first number of MEMS switches (28(1)-28(N)), wherein the first number of MEMS-based decoders (50(1)-50(12)) is quantitatively equal to the first number of MEMS switches (28(1)-28(N)) and is configured as follows: to decode the second set of control signals to determine the selected MEMS switch; and to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch. [4] MEMS circuit (34) according to claim 3, wherein the second number of control signals is further configured to jointly define a first number of binary codewords, each of which uniquely defines the first number of MEMS-based decoders (50(1)-50(12)), each of which from the first number of binary codewords comprises one or more binary ones corresponding to activations of one or more of the second number of control signals. [5] MEMS circuit (34) according to claim 4, wherein each of the first number of MEMS-based decoders (50(1)-50(12)) comprises a second number of MEMS switches arranged according to a corresponding binary codeword from the first number of binary codewords, wherein the second number of MEMS switches is quantitatively equal to the second number of control signals. [6] MEMS circuit (34) according to claim 4, wherein: the second set of control signals is further configured to jointly represent a selected binary codeword from the first set of binary codewords to uniquely identify a selected MEMS-based decoder from the first set of MEMS-based decoders (50(1)-50(12)); and The selected MEMS-based decoder is configured to: decode the second set of control signals to determine the selected MEMS switch; and to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch. [7] MEMS circuit (34) according to claim 6, further comprising: a first number of MEMS shunt switches (58(1)-58(N)) coupled to the first number of MEMS switches, each of which is configured to close or open in response to receiving the high control voltage or the low control voltage, respectively; and a first number of MEMS-based inverters, each coupled to the first number of MEMS-based decoders (50(1)-50(12)), each of which is configured by the first number of MEMS-based inverters for the following: to provide the low control voltage to open a coupled MEMS shunt switch from the first number of MEMS shunt switches in response, so that a coupled MEMS-based decoder from the first number of MEMS-based decoders (50(1)-50(12)) outputs the high control voltage; and to provide the high control voltage to close the coupled MEMS shunt switch in response, so that the coupled MEMS-based decoder outputs the low control voltage. [8] Device for microelectromechanical systems, MEMS device (26), comprising: a circuit for microelectromechanical systems, MEMS circuit (34) according to claim 1; and a control circuit (40) coupled to the MEMS-based driver circuit (36) and configured to provide the second set of control signals to the MEMS-based driver circuit. [9] MEMS device (26) according to claim 8, comprising: a first semiconductor chip comprising the MEMS circuit (34); and a second semiconductor chip, comprising the control circuitry. [10] MEMS device (26) according to claim 8 or 9, wherein: the control circuit (40) is further designed for the following: to determine the selected MEMS switch from the first number of MEMS switches (28(1)-28(N)) to be closed; to generate the second set of control signals to jointly identify the selected MEMS switch; and to provide the second set of control signals and a direct current (DC) voltage for the MEMS-based driver circuit; and wherein the MEMS-based driver circuit (36) is further configured to provide the DC voltage to the selected MEMS switch as the high control voltage. [11] MEMS device (26) according to any one of claims 8 to 10, wherein the MEMS-based driver circuit (36) comprises a first number of MEMS-based decoders (50(1)-50(12)) each coupled to the first number of MEMS switches (28(1)-28(N)), wherein the first number of MEMS-based decoders (50(1)-50(12)) is quantitatively equal to the first number of MEMS switches (28(1)-28(N)) and is configured as follows: to decode the second set of control signals to determine the selected MEMS switch; and to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch. [12] MEMS device (26) according to claim 11, wherein the control circuit (40) is further configured to generate the second number of control signals to jointly define a first number of binary codewords, each of which uniquely defines the first number of MEMS-based decoders (50(1)-50(12)), each of which comprises one or more binary ones corresponding to the activations of one or more of the second number of control signals. [13] MEMS device (26) according to claim 12, wherein each of the first number of MEMS-based decoders (50(1)-50(12)) comprises a second number of MEMS switches arranged according to a corresponding binary codeword from the first number of binary codewords, wherein the second number of MEMS switches is quantitatively equal to the second number of control signals. [14] MEMS device (26) according to claim 12, wherein: the second set of control signals is further configured to jointly represent a selected binary codeword from the first set of binary codewords in order to uniquely identify a selected MEMS-based decoder (50(1)-50(12)) from the first set of MEMS-based decoders; and The selected MEMS-based decoder is configured to: decode the second set of control signals to determine the selected MEMS switch; and to provide the high control voltage to the selected MEMS switch in order to close the selected MEMS switch. [15] MEMS device (26) according to claim 14, further comprising: a first number of MEMS shunt switches (58(1)-58(N)) each coupled to the first number of MEMS switches (28(1)-28(N)), each of which is configured by the first number of MEMS shunt switches (58(1)-58(N)) to close or open in response to receiving the high control voltage or the low control voltage, respectively; and a first number of MEMS-based inverters, each coupled to the first number of MEMS-based decoders (50(1)-50(12)), each of which is configured by the first number of MEMS-based inverters for the following: to provide the low control voltage to open a coupled MEMS shunt switch (58(1)-58(N)) from the first number of MEMS shunt switches in response thereto, so that a coupled MEMS-based decoder from the first number of MEMS-based decoders (50(1)-50(12)) outputs the high control voltage; and to provide the high control voltage to close the coupled MEMS shunt switch in response, so that the coupled MEMS-based decoder outputs the low control voltage. [16] MEMS device (26) according to claim 15, wherein each of the first number of MEMS-based inverters comprises a MEMS switch configured to be closed in response to the coupled MEMS-based decoder outputting the high control voltage and to be opened in response to the coupled MEMS-based decoder outputting the low control voltage.

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