Method for operating a particle beam device and / or a light microscope, computer program product, and particle beam device and light microscope for carrying out the method

Abstract

Method for operating a particle beam device (100, 200, 400) and / or a light microscope (800) for imaging, analyzing and / or processing an object (125, 425), wherein the method comprises the following steps: - Changing a first temperature of the object (125, 425), wherein the object (125, 425) is arranged on an object receiving device (122, 424) which is movable by at least one motor (M1 to M5) operated with a supply current, wherein changing the first temperature of the object (125, 425) causes a change in a second temperature of the object receiving device (122, 424) from a first temperature value of the object receiving device (122, 424) to a second temperature value of the object receiving device (122, 424); - Changing the supply current of the motor (M1 to M5) from a first current value to a second current value, wherein in both the first current value and the second current value the supply current is used to hold the object acquisition device (122, 424) by the motor (M1 to M5) in a position in the particle beam device (100, 200, 400) and / or in the light microscope (800); and - Changing the second temperature of the object receiving device (122, 424) from the second temperature value of the object receiving device (122, 424) to a third temperature value of the object receiving device (122, 424) due to heat generated by the motor (M1 to M5), which is achieved by the second current value of the supply current and supplied to the object receiving device (122, 424), wherein the third temperature value of the object receiving device (122, 424) lies in a temperature range for which the following applies: TOT 1 − 15 ∘ C ≤ TOT3 ≤ TOT 1 + 15 ∘ C , where TOT1 is the first temperature value of the object acquisition device (122, 424), and where TOT3 is the third temperature value of the object acquisition device (122, 424).

Description

[0001] The invention relates to a method for operating a particle beam device and / or a light microscope, a computer program product, and a particle beam device and a light microscope with which this method can be carried out. The particle beam device and / or the light microscope is / are designed for imaging, analyzing, and / or processing an object. For example, the particle beam device is designed as an electron beam device and / or as an ion beam device.

[0002] Electron beam instruments, in particular a scanning electron microscope (hereinafter also referred to as SEM) and / or a transmission electron microscope (hereinafter also referred to as TEM), are used to examine objects (samples) in order to obtain knowledge about their properties and behavior under certain conditions.

[0003] In a SEM, an electron beam (hereinafter also called a primary electron beam) is generated by a beam generator and focused onto the object under investigation by a beam guidance system. A deflection device guides the primary electron beam in a raster pattern across the surface of the object. The electrons of the primary electron beam interact with the object. This interaction produces interaction particles and / or interaction radiation. Specifically, electrons are emitted by the object (so-called secondary electrons), and electrons from the primary electron beam are backscattered by the object (so-called backscattered electrons). The secondary electrons and backscattered electrons are detected by a particle detector and used to generate an image. This produces an image of the object under investigation.The interaction radiation produced consists primarily of X-rays and / or cathodoluminescence. This interaction radiation is detected with a radiation detector and used especially for the analysis of the object.

[0004] In a TEM, a primary electron beam is also generated by a beam generator and directed onto the object under investigation using a beam guidance system. The primary electron beam passes through the object. As the primary electron beam passes through the object, the electrons interact with the material. The electrons passing through the object are focused by a system consisting of a lens and a projector onto a fluorescent screen or a detector (for example, a camera). This focusing can also be done in the scan mode of a TEM. Such a TEM is generally referred to as a STEM.Additionally, it may be possible to detect electrons backscattered from the object under investigation and / or secondary electrons emitted by the object under investigation using a further detector in order to image the object under investigation.

[0005] Furthermore, it is known from the prior art to use combination devices for examining objects, in which both electrons and ions can be directed onto the object under investigation. For example, it is known to equip a SEM with an additional ion beam column. Ions are generated by means of an ion beam generator arranged in the ion beam column, which are used for the preparation of an object (for example, removing material from the object or applying material to the object) or for imaging. The SEM serves here in particular to observe the preparation, but also for further examination of the prepared or unprepared object.

[0006] It is known to arrange an object to be examined with a particle beam instrument on an object holder, which in turn is arranged on an object stage. The object stage is located in a sample chamber of the particle beam instrument. The object stage is designed to be movable, with the movable design being ensured by several motion units from which the object stage is composed. The motion units enable movement of the object stage in at least one specific direction.

[0007] In particular, object tables are known that have several translational motion units (for example, about 3 to 4 translational motion units) as well as several rotational motion units (for example, 2 to 3 rotational motion units). For example, an object table is known that is movably arranged along a first translational axis (for example, an x-axis), along a second translational axis (for example, a y-axis), and along a third translational axis (for example, a z-axis). The first translational axis, the second translational axis, and the third translational axis are oriented perpendicular to each other. Furthermore, the known object table is rotatable about a first rotational axis and about a second rotational axis oriented perpendicular to the first rotational axis.

[0008] In the prior art, the driving force for movement by means of the motion units is provided by stepper motors. Each stepper motor is designated for movement along one of the translational axes or for rotation about one of the rotational axes. The stepper motors are arranged either inside the sample chamber of the particle beam instrument or outside of it. In the latter case, vacuum feedthroughs and mechanical devices are provided to ensure the control connection between the stepper motors and the stage.

[0009] A stepper motor known from the prior art has the following basic structure. The stepper motor is equipped with a rotor that is rotatably mounted within the motor. Furthermore, the stepper motor has coils arranged around the rotor. The coils provide a controlled, stepwise rotating electromagnetic field with which the rotor can be rotated by a minimum angle or by multiples of this minimum angle. In this way, it is possible to achieve a certain number of steps per revolution of the rotor. Stepper motors with different numbers of steps per revolution of the rotor are known from the prior art, for example, with 100 steps per revolution. In a stepper motor with 100 steps per revolution, the rotor rotates, for example, 3.6° per full step.

[0010] In addition to full-step operation, conventional stepper motors can also operate in microstepping mode. Microstepping allows for smaller steps than full steps by reducing the step angle. This is achieved by controlling the supply current to the individual coils in the stepper motor. Switching the supply current on or off at each coil creates a stepped overall control current profile, determined by the ratios of the supply current applied to each coil. The stepper motor is thus controlled by selectively controlling the supply current to each individual coil.By selectively phase-shifting the control of the supply current for the individual coils of the stepper motor, full steps or smaller steps (for example half steps, eighth steps or smaller steps) can be achieved.

[0011] It is also known from the prior art to hold the movable stage of the specimen in a sample chamber of the particle beam instrument at a specific position using the stepper motor(s). In other words, the stage should not move from this specific position. This is particularly desirable for good resolution and / or accurate imaging of an object positioned on the stage. When the stepper motor stops, the rotor remains in a predefinable position, which is determined by one of the microsteps. In this position, the supply current assumes a value determined by the operating amplitude and phase of the supply current required for the stepper motor in this position. This operating amplitude is static. It can lead to excessive thermal stress on the stepper motor, which is undesirable.For this reason, current technology provides that after shutdown, the amplitude of the supply current is reduced to a predefined holding amplitude. The supply current exhibiting this holding amplitude is also referred to as the holding current. At this holding current, the heating of the components remains at an acceptable level.

[0012] It is also known from the prior art to examine a frozen object with an electron microscope. This is advantageous, for example, when examining biological specimens. For this purpose, the frozen object is arranged on a coolable specimen holder. For example, the specimen holder can be cooled to temperatures of 140 °C or less using liquid nitrogen. The aforementioned specimen holder is arranged on the stage of the electron microscope. To prevent the stage from cooling down, it is known to thermally insulate the specimen holder against the stage.

[0013] However, it has been shown that the stage inevitably cools down over time. Since the stage is then no longer in thermal equilibrium, it expands thermally. This causes the stage to drift, deviating from its intended position. In other words, the stage drifts from its intended position. This is detrimental to good imaging, processing, and / or analysis of the object with an electron beam, as the spatial resolution decreases, thus reducing the quality of the imaging, processing, and / or analysis.

[0014] Measurements have shown that the drift of the specimen stage during cooling of the specimen holder to the aforementioned temperatures can be 10 to 15 times greater than the drift of the specimen stage before cooling. After cooling the specimen holder to a desired temperature and maintaining it at that temperature, the drift of the specimen stage is approximately the same as it was before cooling. However, the measurements also showed that the drift of the specimen stage increases again after a certain period following cooling and only gradually decreases over time.

[0015] The aforementioned disadvantages also exist when a cooled specimen holder is arranged on a movable stage of a light microscope.

[0016] With regard to the state of the art, reference is made, by way of example, to DE 10 2012 205 317 A1 and EP 2 573 794 A1.

[0017] The invention is based on the objective of reducing the drift of the object stage after cooling the object holder and after reaching a desired temperature of the object holder as quickly as possible to values ​​that the drift of the object stage exhibited before the object holder cooled.

[0018] According to the invention, this problem is solved by means of a method with the features of claim 1. A computer program product with program code that is loaded or loadable into a processor and that, when executed, controls a particle beam device and / or a light microscope such that a method according to the invention is carried out, is provided by claim 18. Furthermore, the invention relates to a particle beam device with the features of claim 19 and a light microscope with the features of claim 24. Further features of the invention will become apparent from the following description, the appended claims, and / or the accompanying figures.

[0019] The method according to the invention serves to operate a particle beam device and / or a light microscope for imaging, analyzing, and / or processing an object. For example, a particle beam is generated by at least one particle beam generator of the particle beam device. The particle beam contains charged particles. For example, the particles are electrons or ions. In particular, it is provided that the particle beam is directed or focused onto the object by at least one objective lens. Due to an interaction of the particle beam with the object, interaction radiation and / or interaction particles are generated. For example, the interaction radiation is X-ray radiation and / or cathodoluminescence light. The interaction radiation is detected by at least one radiation detector.The interaction particles are, for example, secondary particles emitted by the object, especially secondary electrons, and / or backscattered particles, especially backscattered electrons. These are detected with at least one particle detector.

[0020] The method according to the invention involves changing the initial temperature of an object. For example, the object is cooled and / or heated from a first temperature value to a second temperature value. Thus, changing the initial temperature of the object includes, for example, cooling and / or heating the object.

[0021] The object is arranged on a movable object-holding device of the particle beam instrument and / or the light microscope. The object is, for example, arranged directly on the object-holding device or by placing an intermediate component between the object and the object-holding device. The object-holding device may, for example, be a manipulator, a stage, and / or a holding device for holding and / or gripping the object. At least one motor, powered by a supply current, is provided for moving the object-holding device. For example, the object-holding device may be movable along a first translational axis (in particular an x-axis), along a second translational axis (in particular a y-axis), and along a third translational axis (in particular a z-axis).The first translation axis, the second translation axis, and the third translation axis are, for example, oriented perpendicular to each other. Furthermore, the object-holding device is designed to be rotatable about a first rotation axis and about a second rotation axis oriented perpendicular to the first rotation axis. In one embodiment of the method according to the invention, a motor is provided for each of the aforementioned axes, enabling the movement of the object-holding device along the respective axis.

[0022] Changing the object's first temperature causes a change in the object-capturing device's second temperature from a first temperature value to a second temperature value. In other words, a change in the object's first temperature also causes a change in the object-capturing device's second temperature.

[0023] In the method according to the invention, the supply current to the motor is changed from a first current value to a second current value. The supply current with the first or the second current value is used by the motor to hold the specimen handling device in a desired position within the particle beam instrument and / or the light microscope. In other words, the supply current with the first or the second current value is a holding current. With both the first and the second current values, the specimen handling device is held by the motor in the desired position within the particle beam instrument and / or the light microscope.When the holding current is applied to the motor, the specimen handling device is held and thus positioned in the desired position within the particle beam instrument and / or the light microscope. For example, the specimen handling device is located in a sample chamber of the particle beam instrument and / or the light microscope. Therefore, when the holding current is applied to the motor, the specimen handling device is held and thus positioned in the desired position within the sample chamber of the particle beam instrument and / or the light microscope.

[0024] In the method according to the invention, it is further provided that, due to heat generated by the motor, which is achieved through the second current value of the supply current and supplied to the object receiving device, the second temperature of the object receiving device is changed from the second temperature value of the object receiving device to a third temperature value of the object receiving device. The third temperature value of the object receiving device lies within a temperature range for which the following applies: TOT1−15∘C≤TOT3≤TOT1+15∘C where TOT1 is the first temperature value of the object acquisition device, and where TOT3 is the third temperature value of the object acquisition device.

[0025] In other words, the third temperature value of the object acquisition device lies within a range of ± 15 °C around the first temperature value of the object stage.

[0026] The method according to the invention is based on the surprising finding that the heat generated by the motors used for moving and positioning the object-holding device is utilized in such a way as to counteract changes in the object-holding device's secondary temperature. The higher the secondary current value of the supply current, the greater the heat generated by the motor. For example, the secondary temperature of the object-holding device can be increased by means of the heat from the motors if the secondary temperature of the object-holding device drops unintentionally. Alternatively, the secondary temperature of the object-holding device can be decreased by means of the heat from the motors if the secondary temperature of the object-holding device rises unintentionally.In the latter case, for example, less heat is generated by the motors and supplied to the object receiving device, thus reducing the second temperature of the object receiving device.

[0027] The method according to the invention enables a reduction and / or minimization of the influence of changes in the object's first temperature on the second temperature of the object receiving device. By reducing and / or minimizing this influence, the second temperature of the object receiving device does not change or changes only minimally, thus reducing thermal expansion of the object receiving device and the associated drift of the object receiving device compared to the prior art. It is therefore possible to reduce the drift of the object receiving device as quickly as possible after the object has cooled down and reached a desired temperature, back to the values ​​it exhibited before the object cooled down.

[0028] In one embodiment of the method according to the invention, the object is additionally or alternatively arranged on an object holder. The object holder is arranged on the object receiving device. For example, in this embodiment, the object receiving device is designed as an object stage. Changing the first temperature of the object includes changing a third temperature of the object holder from a first temperature value of the object holder to a second temperature value of the object holder. For example, the object holder is cooled and / or heated from the first temperature value of the object holder to the second temperature value of the object holder. Accordingly, changing the third temperature of the object holder includes, for example, cooling and / or heating the object holder. The object holder is arranged, for example, on the object stage of the particle beam device and / or the light microscope, which is movably designed.This embodiment also has, in particular, the advantages already mentioned above.

[0029] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the third temperature of the specimen holder is changed by cooling or heating the specimen holder. For example, at least one cooling and / or heating device of the particle beam device and / or the light microscope is used for this purpose, which acts on the specimen holder and / or is arranged on the specimen holder.

[0030] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the first temperature of the object is changed by cooling or heating the object. For example, at least one cooling and / or heating device of the particle beam device and / or the light microscope is used for this purpose, which acts on the object and / or is arranged on the object.

[0031] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that a stepper motor is used as the motor, wherein the supply current is a holding current of the stepper motor. For example, the stepper motor has the configuration described below. The stepper motor is provided with a rotor that is rotatably arranged within the stepper motor. Furthermore, the stepper motor has coils that are arranged around the rotor. The coils provide a controlled, stepwise rotating electromagnetic field with which the rotor can be rotated by a minimum angle or by multiples of this minimum angle. In this way, it is possible to achieve a certain number of steps per revolution of the rotor. The stepper motor provides, for example, 100 steps per revolution.In a stepper motor with 100 steps per revolution, the rotor rotates by 3.6° for each full step, for example. Besides operating in full steps, the stepper motor can also operate in microstepping mode. The statements made above also apply here.

[0032] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that a brushless motor is used as the motor, wherein the supply current is a holding current of the brushless motor.

[0033] It is explicitly stated that the invention is not limited to the use of a stepper motor or a brushless motor. Rather, any motor that is driven by an electric current and that emits heat can be used for the invention.

[0034] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that when the first temperature of the object is changed, the object is cooled and the supply current is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object receiving device. In other words, when the first temperature of the object is changed, the object receiving device is cooled and the supply current is changed such that two conditions are met. First, the first temperature value of the object receiving device is greater than the second temperature value of the object receiving device. Second, the second temperature value of the object receiving device is less than the third temperature value of the object receiving device.

[0035] In one embodiment of the method according to the invention, it is additionally or alternatively provided that when the first temperature of the object is changed, the object is cooled with liquid nitrogen and the supply current is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object receiving device. In this embodiment as well, it is provided that when the first temperature of the object is changed, the object is cooled and the supply current is changed such that two conditions are met. First, the first temperature value of the object receiving device is greater than the second temperature value of the object receiving device. Second, the second temperature value of the object receiving device is less than the third temperature value of the object receiving device.

[0036] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that when the first temperature of the object is changed, the object is cooled with liquid helium and the supply current is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object receiving device. In this embodiment as well, it is provided that when the first temperature of the object is changed, the object is cooled and the supply current is changed such that two conditions are met. First, the first temperature value of the object receiving device is greater than the second temperature value of the object receiving device. Second, the second temperature value of the object receiving device is less than the third temperature value of the object receiving device.

[0037] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the change in the second temperature of the object receiving device from the second temperature value of the object receiving device to the third temperature value of the object receiving device is carried out in such a way that the third temperature value of the object receiving device corresponds to the first temperature value of the object receiving device. In other words, a change in the second temperature of the object receiving device is counteracted by the heat generated by the motor in such a way that the second temperature of the object receiving device returns to its original temperature value or substantially to its original temperature value before the change in the first temperature of the object receiving device, wherein the original temperature value corresponds to the first temperature value of the object receiving device.In this embodiment of the method according to the invention, one essentially obtains a drift of the object receiving device that occurred before the first temperature of the object was changed.

[0038] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the change in the second temperature of the object receiving device from the second temperature value to the third temperature value is carried out such that: TOT1 - 15 °C ≤ TOT3 ≤ TOT1. In other words, the third temperature value of the object receiving device lies within a range which is limited by a temperature 15 °C below the first temperature value of the object receiving device and by the first temperature value of the object receiving device itself. The limits of this range are included in the range. In yet another embodiment of the method according to the invention, it is additionally or alternatively provided that the change in the second temperature of the object receiving device from the second temperature value to the third temperature value is carried out such that: TOT1 ≤ TOT3 ≤ TOT1 + 15 °C.In other words, the third temperature value of the object acquisition device lies within a range bounded by the first temperature value of the object acquisition device itself and a temperature 15 °C above the first temperature value of the object acquisition device. The range boundaries are also included here.

[0039] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is modified such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current of the motor for holding the specimen handling device in a position in the particle beam instrument and / or the light microscope is modified such that the second current value of the supply current is greater than the first current value of the supply current. This results in more heat being generated by the motor, which is then transferred to the specimen handling device.

[0040] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is modified such that l1 > l2, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current of the motor for holding the specimen handling device in a position in the particle beam instrument and / or the light microscope is modified such that the second current value of the supply current is lower than the first current value of the supply current. This results in less heat being generated by the motor, which is then transferred to the specimen handling device.

[0041] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is changed such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. This embodiment of the method according to the invention is characterized by the additional feature that, after reaching the second current value of the supply current, the supply current is kept constant at the second current value. For example, it can also be provided that, after the first temperature change of the object has ended (in particular, after the object holder has finished cooling down), the supply current is changed back from the second current value to the first current value of the supply current. This will be discussed in more detail below.

[0042] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is changed such that l1 > l2, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. This embodiment of the method according to the invention is characterized by the additional feature that, after reaching the second current value of the supply current, the supply current is kept constant at the second current value. For example, it can also be provided that, after the first temperature change of the object has ended (in particular, after heating the object holder has ended), the supply current is changed back from the second current value to the first current value of the supply current. This will be discussed in more detail below.

[0043] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is changed when, during a change in the object's initial temperature, the object's initial temperature reaches or falls below a first predefinable temperature value. For example, if the object is cooled and its initial temperature reaches the first predefinable temperature value, then the supply current is changed as explained above and below. Alternatively, in this embodiment of the method according to the invention, it is provided that the supply current is changed when the object is cooled and its initial temperature falls below the first predefinable temperature value.In the aforementioned embodiments, the supply current is modified such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current to the motor used to hold the specimen handling device in a position within the particle beam instrument and / or the light microscope is modified such that the second current value is greater than the first. This results in the motor generating more heat, which is then transferred to the specimen handling device.

[0044] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is changed when, during a change in the object's initial temperature, the object's initial temperature reaches or exceeds a second predefinable temperature value. For example, if the object is heated and its initial temperature reaches the first predefinable temperature value, then the supply current is changed as explained above or below. Alternatively, in this embodiment of the method according to the invention, it is provided that the supply current is changed when the object is heated and its initial temperature exceeds the first predefinable temperature value.In the aforementioned embodiments, the supply current is modified such that l1 > l2, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current to the motor used to hold the specimen handling device in a position within the particle beam instrument and / or the light microscope is modified such that the first current value is greater than the second current value. This results in less heat being generated by the motor, which is then transferred to the specimen handling device.

[0045] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is changed when, during a change in the third temperature of the object holder, the third temperature of the object holder reaches or falls below a first predefinable temperature value. For example, if the object holder is cooled and the third temperature of the object holder reaches the first predefinable temperature value, then the supply current is changed as explained above and below. Alternatively, in this embodiment of the method according to the invention, it is provided that the supply current is changed when the object holder is cooled and the third temperature of the object holder falls below the first predefinable temperature value.In the aforementioned embodiments, the supply current is modified such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current to the motor used to hold the specimen handling device in a position within the particle beam instrument and / or the light microscope is modified such that the second current value is greater than the first. This results in the motor generating more heat, which is then transferred to the specimen handling device.

[0046] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current is changed when, during a change in the third temperature of the object holder, the third temperature of the object holder reaches or exceeds a second predefinable temperature value. For example, if the object holder is heated and the first temperature of the object holder reaches the first predefinable temperature value, then the supply current is changed as explained above or below. Alternatively, in this embodiment of the method according to the invention, it is provided that the supply current is changed when the object holder is heated and the third temperature of the object holder exceeds the first predefinable temperature value.In the aforementioned embodiments, the supply current is modified such that l1 > l2, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current to the motor used to hold the specimen handling device in a position within the particle beam instrument and / or the light microscope is modified such that the first current value is greater than the second current value. This results in less heat being generated by the motor, which is then transferred to the specimen handling device.

[0047] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the motor's supply current is changed from the second current value to the first current value when two conditions are met: (i) the change in the object's first temperature has ceased, and (ii) the object's first temperature assumes a third temperature value that lies in the range between the first and second temperature values. When the change in the object's first temperature has ceased and when the object's first temperature returns to the direction of its original first temperature value, the motor's supply current is changed from the second current value back to the original current value, namely the first current value. This prevents the object receiving device from heating up unnecessarily.

[0048] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current of the motor is changed from the second current value to the first current value when three conditions are met: (i) The change of the first temperature of the object has ended, (ii) the first temperature of the object assumes a third temperature value which lies in the range between the first temperature value and the second temperature value of the object, and (iii) a predefinable period of time has elapsed after the change of the first temperature of the object has ended.In other words, after the predefined time period has elapsed, when the initial temperature change of the object has ceased and when the object's temperature returns to its original value, the motor's supply current is changed from the second current value back to the original value, namely the first current value. This also prevents the object-holding device from overheating unnecessarily.

[0049] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the motor's supply current is changed from the second current value to the first current value when two conditions are met: (i) the change in the object's initial temperature has ceased, and (ii) the object's initial temperature reaches or exceeds a predefinable initial temperature threshold. This embodiment of the method according to the invention is particularly advantageous when the object reheats after cooling. The motor's supply current is then changed from the second current value back to the original current value, namely the first current value. This prevents the object receiving device from heating up unnecessarily.

[0050] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the motor's supply current is changed from the second current value to the first current value when two conditions are met: (i) the change in the object's first temperature has ceased, and (ii) the object's first temperature reaches or falls below a second predefinable temperature threshold. This embodiment of the method according to the invention is particularly advantageous when the object cools down again after being heated. The motor's supply current is then changed from the second current value back to the original current value, namely the first current value. This prevents the object receiving device from cooling down unnecessarily.

[0051] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the motor's supply current is changed from the second current value to the first current value when two conditions are met: (i) the change in the third temperature of the object holder has ended, and (ii) the third temperature of the object holder assumes a third temperature value that lies in the range between the first and second temperature values ​​of the object holder. When the change in the third temperature of the object holder has ended and when the third temperature of the object holder returns to the direction of the original first temperature value, then the motor's supply current is changed from the second current value back to the original current value, namely the first current value. This prevents the object holding device from heating up unnecessarily.

[0052] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the supply current of the motor is changed from the second current value to the first current value when three conditions are met: (i) the change of the third temperature of the object holder has ended, (ii) the third temperature of the object holder assumes a third temperature value which lies in the range between the first temperature value and the second temperature value of the object holder, and (iii) a predefinable period of time has elapsed after the change of the third temperature of the object holder has ended.In other words, after the predefined time period has elapsed, when the change in the third temperature of the object holder is complete and when the third temperature of the object holder returns to the original first temperature value, the motor's supply current is changed from the second current value back to the original current value, namely the first current value. This also prevents the object handling device from heating up unnecessarily.

[0053] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that the motor's supply current is changed from the second current value to the first current value when two conditions are met: (i) the change in the third temperature of the object holder has ended, and (ii) the third temperature of the object holder reaches or exceeds a predefinable first temperature threshold. This embodiment of the method according to the invention is particularly advantageous when the object holder reheats after cooling down. The motor's supply current is then changed from the second current value back to the original current value, namely the first current value. This prevents the object holding device from heating up unnecessarily.

[0054] In one embodiment of the method according to the invention, it is additionally or alternatively provided that the motor's supply current is changed from the second current value to the first current value when two conditions are met: (i) the change in the third temperature of the object holder has ended, and (ii) the third temperature of the object holder reaches or falls below a second predefinable temperature threshold. This embodiment of the method according to the invention is particularly advantageous when the object holder cools down again after heating. The motor's supply current is then changed from the second current value back to the original current value, namely the first current value. This prevents the object holding device from cooling down unnecessarily.

[0055] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that, before changing the first temperature of the object, the value of the second current value of the supply current is determined so that the second temperature of the object receiving device corresponds to the third temperature value. This process step of the embodiment of the method according to the invention does not necessarily have to be carried out by a user of the particle beam device and / or the light microscope. Rather, this process step can also be carried out at the factory by a manufacturer of the particle beam device and / or the light microscope. For example, it is provided that values ​​for the second current value of the supply current are stored in a database as a function of the second temperature of the object receiving device and the first temperature of the object.First, the second current value of the supply current is loaded from the database into a control unit of the particle beam device, depending on a desired value of the third temperature value of the object receiving device and on the existing second temperature value of the object. The loaded second current value of the supply current is then fed to the motor in such a way that the heat generated by the motor influences the second temperature of the object receiving device, adjusting it to the third temperature value of the object receiving device.

[0056] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that determining the second current value of the supply current comprises the following steps: - Setting the object's first temperature to several different second temperature values ​​of the object; as well as - Determining the second current value of the supply current for each of the several different second temperature values ​​of the object, wherein, when the determined second current value is supplied to the motor, the change in the second temperature of the object receiving device from the second temperature value of the object receiving device to the third temperature value of the object receiving device is achieved.

[0057] It is specifically intended that determining the value of the second current value of the supply current includes establishing a functional relationship between the different second temperature values ​​of the object and the determined second current values ​​of the supply current, as well as the third temperature value to be achieved by the object receiving device, through extrapolation and / or interpolation. Any suitable interpolation method may be used for interpolation, for example, linear interpolation, nonlinear interpolation, trigonometric interpolation, logarithmic interpolation, and / or spline interpolation. Any suitable extrapolation method may be used for extrapolation, for example, linear extrapolation, nonlinear extrapolation, trigonometric extrapolation, and / or logarithmic extrapolation.Additionally or alternatively, the functional relationship can be determined by averaging, calculating random values ​​and / or determining the smallest or largest value from the set of the first and second values.

[0058] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that, before changing the third temperature of the specimen holder, the value of the second current value of the supply current is determined so that the second temperature of the specimen receiving device corresponds to the third temperature value. This process step of the embodiment of the method according to the invention does not necessarily have to be carried out by a user of the particle beam device and / or the light microscope. Rather, this process step can also be carried out at the factory by a manufacturer of the particle beam device and / or the light microscope. For example, it is provided that values ​​for the second current value of the supply current are stored in a database as a function of the second temperature of the specimen receiving device and the third temperature of the specimen holder.First, the second current value of the supply current is loaded from the database into a control unit of the particle beam device, depending on a desired value of the third temperature value of the object receiving device and on the existing second temperature value of the object holder. The loaded second current value of the supply current is then fed to the motor in such a way that the heat generated by the motor influences the second temperature of the object receiving device, adjusting it to the third temperature value of the object receiving device.

[0059] In a further embodiment of the method according to the invention, it is additionally or alternatively provided that determining the value of the second current value of the supply current comprises the following steps: - Setting the third temperature of the object holder to several different second temperature values ​​of the object holder; as well as - Determining the second current value of the supply current for each of the several different second temperature values ​​of the object holder, wherein, when the determined second current value is supplied to the motor, the change in the second temperature of the object receiving device from the second temperature value of the object receiving device to the third temperature value of the object receiving device is achieved.

[0060] It is specifically intended that determining the value of the second current value of the supply current includes establishing a functional relationship between the different second temperature values ​​of the object holder and the determined second current values ​​of the supply current, as well as the third temperature value to be achieved by the object receiving device, through extrapolation and / or interpolation. Any suitable interpolation method may be used for interpolation, for example, linear interpolation, nonlinear interpolation, trigonometric interpolation, logarithmic interpolation, and / or spline interpolation. Similarly, any suitable extrapolation method may be used for extrapolation, for example, linear extrapolation, nonlinear extrapolation, trigonometric extrapolation, and / or logarithmic extrapolation.Additionally or alternatively, the functional relationship can be determined by averaging, calculating random values ​​and / or determining the smallest or largest value from the set of the first and second values.

[0061] The invention also relates to a computer program product with program code that can be loaded or is loaded into a processor of a particle beam device and / or a light microscope, wherein, when executed in the processor, the program code controls the particle beam device and / or the light microscope in such a way that a method with at least one of the preceding or following features or with a combination of at least two of the preceding or following features is carried out.

[0062] The invention further relates to a particle beam device for imaging, analyzing, and / or processing an object. The particle beam device comprises at least one beam generator for producing a particle beam with charged particles. For example, the charged particles are electrons or ions. Furthermore, the particle beam device is provided with at least one objective lens for focusing the particle beam onto the object. In addition, the particle beam device comprises, for example, at least one scanning device for scanning the particle beam across the object. Furthermore, the particle beam device is provided with at least one object holder for holding the object. The particle beam device according to the invention comprises at least one temperature control device in the form of a cooling and / or heating device for changing the temperature of the object holder and / or the object. For example, the temperature control device is designed as a cooling or heating device.

[0063] Furthermore, the particle beam device according to the invention is designed with at least one movable object receiving device. For example, the object receiving device is designed as an object table on which, in particular, the object holder is arranged. The particle beam device according to the invention also has at least one motor for moving the object receiving device. In addition, the particle beam device according to the invention has at least one power supply unit with which a supply current is supplied to the motor.

[0064] The object-holding device of the particle beam device according to the invention is, for example, movable along a first translational axis (in particular an x-axis), along a second translational axis (in particular a y-axis), and along a third translational axis (in particular a z-axis). The first translational axis, the second translational axis, and the third translational axis are, for example, oriented perpendicular to each other. Furthermore, the object-holding device is rotatable about a first rotational axis and about a second rotational axis oriented perpendicular to the first rotational axis. In one embodiment of the particle beam device according to the invention, a motor is provided for each of the aforementioned axes, which enables movement along the respective axis.

[0065] Furthermore, the particle beam device according to the invention is provided with at least one detector for detecting interaction particles and / or interaction radiation resulting from an interaction of the particle beam with the object. The particle beam device according to the invention is also provided with at least one display device for displaying an image and / or the result of an analysis of the object. In addition, the particle beam device according to the invention has at least one control unit with a processor into which the aforementioned computer program is loaded.

[0066] In one embodiment of the particle beam device according to the invention, it is additionally or alternatively provided that the motor is designed as a stepper motor, wherein the supply current is a holding current of the stepper motor. For example, the stepper motor has the configuration described below. The stepper motor is provided with a rotor that is rotatably arranged within the stepper motor. Furthermore, the stepper motor has coils that are arranged around the rotor. The coils provide a controlled, stepwise rotating electromagnetic field with which the rotor can be rotated by a minimum angle or by multiples of this minimum angle. In this way, it is possible to achieve a certain number of steps per revolution of the rotor. The stepper motor provides, for example, 100 steps per revolution.In a stepper motor with 100 steps per revolution, the rotor rotates by 3.6° for each full step, for example. Besides operating in full steps, the stepper motor can also operate in microstepping mode. In microstepping mode, smaller steps than a full step are provided. This is achieved by reducing the step angle. Reference is made to the explanations given above, which also apply here.

[0067] In a further embodiment of the particle beam device according to the invention, it is additionally or alternatively provided that the motor is designed as a brushless motor, wherein the supply current is a holding current of the brushless motor.

[0068] It is explicitly stated that the invention is not limited to the use of a stepper motor or a brushless motor. Rather, any motor that is driven by an electric current and emits heat can be used for the invention.

[0069] In a further embodiment of the particle beam device according to the invention, it is additionally or alternatively provided that the particle beam device has at least one temperature measuring unit for measuring the temperature of the object holder and / or the object receiving device and / or the object itself. For example, the temperature measuring unit is designed as an infrared measuring device or a semiconductor temperature sensor. However, the invention is not limited to the use of such temperature measuring units. Rather, any temperature measuring unit suitable for the invention can be used as the temperature measuring unit.

[0070] In one embodiment of the particle beam device according to the invention, it is additionally or alternatively provided that the beam generator is configured as a first beam generator, wherein the particle beam is configured as a first particle beam with first charged particles, and wherein the objective lens is configured as a first objective lens for focusing the first particle beam onto the object. Furthermore, the particle beam device has at least one second beam generator for generating a second particle beam with second charged particles and at least one second objective lens for focusing the second particle beam onto the object.

[0071] In a further embodiment of the particle beam device according to the invention, it is provided that the particle beam device is an electron beam device and / or an ion beam device.

[0072] The invention further relates to a light microscope for imaging, analyzing, and / or processing an object. The light microscope has at least one light source for generating light and at least one optical unit for directing the light onto an object. Furthermore, the light microscope according to the invention is provided with at least one specimen holder for holding the object. The light microscope according to the invention has at least one temperature control device in the form of a cooling and / or heating device for changing the temperature of the specimen holder and / or the object. For example, the temperature control device is designed as a cooling or heating device.

[0073] Furthermore, the light microscope according to the invention is designed with at least one movable object receiving device. For example, the object receiving device is designed as a stage on which, in particular, the specimen holder is arranged. The light microscope according to the invention also has at least one motor for moving the object receiving device. In addition, the light microscope according to the invention has at least one power supply unit that supplies current to the motor.

[0074] The object-holding device of the light microscope according to the invention is, for example, movable along a first translational axis (in particular an x-axis), along a second translational axis (in particular a y-axis), and along a third translational axis (in particular a z-axis). The first translational axis, the second translational axis, and the third translational axis are, for example, oriented perpendicular to each other. Furthermore, the object-holding device is rotatable about a first rotational axis and about a second rotational axis oriented perpendicular to the first rotational axis. In one embodiment of the light microscope according to the invention, a motor is provided for each of the aforementioned axes, which enables movement along the respective axis.

[0075] Furthermore, the light microscope according to the invention has at least one control unit with a processor into which a aforementioned computer program product is loaded.

[0076] In one embodiment of the light microscope according to the invention, it is additionally or alternatively provided that the motor is designed as a stepper motor, wherein the supply current is a holding current of the stepper motor. For example, the stepper motor has the configuration described below. The stepper motor is provided with a rotor that is rotatably arranged within the stepper motor. Furthermore, the stepper motor has coils that are arranged around the rotor. The coils provide a controlled, stepwise rotating electromagnetic field with which the rotor can be rotated by a minimum angle or by multiples of this minimum angle. In this way, it is possible to achieve a certain number of steps per revolution of the rotor. The stepper motor provides, for example, 100 steps per revolution.In a stepper motor with 100 steps per revolution, the rotor rotates by 3.6° for each full step, for example. Besides operating in full steps, the stepper motor can also operate in microstepping mode. In microstepping mode, smaller steps than a full step are provided. This is achieved by reducing the step angle. Reference is made to the explanations given above, which also apply here.

[0077] In a further embodiment of the light microscope according to the invention, it is additionally or alternatively provided that the motor is designed as a brushless motor, wherein the supply current is a holding current of the brushless motor.

[0078] It is explicitly stated that the invention is not limited to the use of a stepper motor or a brushless motor. Rather, any motor that is driven by an electric current and emits heat can be used for the invention.

[0079] In a further embodiment of the light microscope according to the invention, it is additionally or alternatively provided that the light microscope has at least one temperature measuring unit for measuring the temperature of the specimen holder and / or the specimen receiving device and / or the specimen. For example, the temperature measuring unit is designed as an infrared measuring device or a semiconductor temperature sensor. However, the invention is not limited to the use of such temperature measuring units. Rather, any temperature measuring unit suitable for the invention can be used as the temperature measuring unit.

[0080] The invention is described in more detail below with reference to embodiments and the accompanying drawings. These show: Fig. 1 a first embodiment of a particle beam device; Fig. 2 a second embodiment of a particle beam device; Fig. 3 a third embodiment of a particle beam device; Fig. 3A a schematic representation of a light microscope; Fig. 4 a schematic representation of an embodiment of a movable object stage for a particle beam device and / or a light microscope; Fig. 5 another schematic representation of the object table according to Fig. 4; Fig. 6 a schematic representation of a flowchart of a first embodiment of the method according to the invention; Fig. 7 a schematic representation of a flowchart of a second embodiment of the method according to the invention; Fig. 8 a schematic representation of a flowchart of a third embodiment of the method according to the invention; Fig. 9 a schematic representation of a flowchart of a fourth embodiment of the method according to the invention; Fig. 10 a schematic representation of a flowchart of a fifth embodiment of the method according to the invention; Fig. 11 a schematic representation of a flowchart of a sixth embodiment of the method according to the invention; Fig. 12 a schematic representation of a flowchart of a seventh embodiment of the method according to the invention; Fig. 13 a schematic representation of a flowchart of an eighth embodiment of the method according to the invention; Fig. 14 a schematic representation of a flowchart of a ninth embodiment of the method according to the invention; Fig. 15 a schematic representation of a flowchart of an embodiment of the method according to the invention for determining current values; Fig. 16 a schematic representation of current values ​​of a motor supply current as a function of the temperature of an object holder; as well as Fig. 17 a schematic representation of a flowchart of a tenth embodiment of the method according to the invention.

[0081] The invention will now be explained in more detail using particle beam devices in the form of a SEM and in the form of a combination device comprising an electron beam column and an ion beam column. It is expressly pointed out that the invention can be used with any particle beam device, in particular with any electron beam device and / or any ion beam device.

[0082] Fig. Figure 1 shows a schematic representation of a SEM 100. The SEM 100 has a first radiation source in the form of an electron source 101, which is configured as a cathode. Furthermore, the SEM 100 is provided with an extraction electrode 102 and an anode 103, which is mounted on one end of a beam guide tube 104 of the SEM 100. For example, the electron source 101 is configured as a thermal field emitter. However, the invention is not limited to such an electron source 101. Rather, any electron source can be used.

[0083] Electrons emitted from electron source 101 form a primary electron beam. Due to a potential difference between electron source 101 and anode 103, the electrons are accelerated to anode potential. In the embodiment shown here, the anode potential is 100 V to 35 kV relative to the ground potential of a sample chamber housing 120, for example 5 kV to 15 kV, particularly 8 kV. Alternatively, it could also be at ground potential.

[0084] Two condenser lenses are arranged on the beamline tube 104: a first condenser lens 105 and a second condenser lens 106. Looking from the electron source 101 towards a first objective lens 107, the first condenser lens 105 and then the second condenser lens 106 are arranged. It is explicitly noted that other embodiments of the SEM 100 may have only a single condenser lens. A first aperture unit 108 is arranged between the anode 103 and the first condenser lens 105. The first aperture unit 108, together with the anode 103 and the beamline tube 104, is at a high-voltage potential, namely the potential of the anode 103 or at ground. The first aperture unit 108 has numerous first aperture openings 108A, one of which is located in Fig. Figure 1 illustrates this. For example, two first aperture openings 108A are present. Each of the numerous first aperture openings 108A has a different opening diameter. By means of an adjustment mechanism (not shown), it is possible to set a desired first aperture opening 108A on an optical axis OA of the SEM 100. It is explicitly noted that in further embodiments, the first aperture unit 108 may only be provided with a single first aperture opening 108A. In this embodiment, an adjustment mechanism cannot be provided. The first aperture unit 108 is then designed to be stationary. A stationary second aperture unit 109 is arranged between the first condenser lens 105 and the second condenser lens 106. Alternatively, it is provided that the second aperture unit 109 is designed to be movable.

[0085] The first objective lens 107 has pole shoes 110 in which a bore is formed. The beam guide tube 104 is guided through this bore. A coil 111 is arranged in the pole shoes 110.

[0086] An electrostatic deceleration device is arranged in a lower section of the beam guide tube 104. This device comprises a single electrode 112 and a tubular electrode 113. The tubular electrode 113 is located at one end of the beam guide tube 104, which faces an object 125 mounted on an object holder 114. The object holder 114 is described below. The tubular electrode 113, together with the beam guide tube 104, is at the potential of the anode 103, while the single electrode 112 and the object 125 are at a lower potential than the potential of the anode 103. In this case, this is the ground potential of the housing of the sample chamber 120. In this way, the electrons of the primary electron beam can be decelerated to a desired energy required for the examination of the object 125.

[0087] The SEM 100 also features a scanning device 115, by which the primary electron beam can be deflected and scanned across the object 125. The electrons of the primary electron beam interact with the object 125. As a result of this interaction, interaction particles are produced, which are then detected. In particular, electrons are emitted from the surface of the object 125 – so-called secondary electrons – or electrons from the primary electron beam are backscattered – so-called backscattered electrons.

[0088] Object 125 and the single electrode 112 can also be at different potentials, including potentials different from ground. This makes it possible to adjust the location of the delay of the primary electron beam relative to object 125. For example, if the delay is performed quite close to object 125, imaging errors are reduced.

[0089] For the detection of secondary electrons and / or backscattered electrons, a detector array comprising a first detector 116 and a second detector 117 is arranged in the beamline 104. The first detector 116 is arranged along the optical axis OA on the source side, while the second detector 117 is arranged along the optical axis OA on the object side within the beamline 104. The first detector 116 and the second detector 117 are offset from each other in the direction of the optical axis OA of the SEM 100. Both the first detector 116 and the second detector 117 each have a through-hole through which the primary electron beam can pass. The first detector 116 and the second detector 117 are approximately at the potential of the anode 103 and the beamline 104, respectively. The optical axis OA of the SEM 100 passes through the respective through-holes.

[0090] The second detector 117 is primarily used for the detection of secondary electrons. Upon exiting the object 125, the secondary electrons initially possess low kinetic energy and move in any direction. The strong suction field emanating from the tubular electrode 113 accelerates the secondary electrons towards the first objective lens 107. The secondary electrons enter the first objective lens 107 in an approximately parallel direction. The beam diameter of the secondary electrons remains small even within the first objective lens 107. The first objective lens 107 exerts a strong effect on the secondary electrons, creating a comparatively short focus with sufficiently steep angles to the optical axis OA, such that the secondary electrons diverge considerably after passing through the focus and strike the second detector 117 on its active surface.Electrons backscattered from object 125—that is, backscattered electrons which, compared to the secondary electrons, have a relatively high kinetic energy upon exiting object 125—are detected by the second detector 117 only to a small extent. The high kinetic energy and the angles of the backscattered electrons to the optical axis OA upon exiting object 125 result in a beam waist, i.e., a beam region with a minimum diameter, of backscattered electrons located near the second detector 117. A large proportion of the backscattered electrons pass through the aperture of the second detector 117. The first detector 116 therefore serves primarily to detect the backscattered electrons.

[0091] In a further embodiment of the SEM 100, the first detector 116 can additionally be equipped with a retarding grid 116A. The retarding grid 116A is arranged on the side of the first detector 116 facing the object 125. The retarding grid 116A has a negative potential with respect to the potential of the beam guide tube 104, such that only backscattered electrons with high energy pass through the retarding grid 116A to the first detector 116. Additionally or alternatively, the second detector 117 has another retarding grid, which is configured analogously to the aforementioned retarding grid 116A of the first detector 116 and has an analogous function.

[0092] Furthermore, the SEM 100 has a chamber detector 119 in the sample chamber 120, for example an Everhart-Thornley detector or an ion detector, which has a metal-coated detection surface that shields light.

[0093] The detection signals generated by the first detector 116, the second detector 117 and the chamber detector 119 are used to generate an image or images of the surface of the object 125.

[0094] It is explicitly noted that the apertures of the first aperture unit 108 and the second aperture unit 109, as well as the through-holes of the first detector 116 and the second detector 117, are exaggerated. The through-holes of the first detector 116 and the second detector 117 have a perpendicular dimension OA ranging from 0.5 mm to 5 mm. For example, they are circular and have a diameter ranging from 1 mm to 3 mm perpendicular to the optical axis OA.

[0095] In the embodiment shown here, the second aperture unit 109 is designed as a pinhole aperture and is provided with a second aperture opening 118 for the passage of the primary electron beam, which has a dimension in the range of 5 µm to 500 µm, for example 35 µm. Alternatively, in a further embodiment, the second aperture unit 109 is provided with several aperture openings that can be mechanically displaced relative to the primary electron beam or that can be reached by the primary electron beam using electrical and / or magnetic deflection elements. The second aperture unit 109 is designed as a pressure-stepped aperture. This separates a first region in which the electron source 101 is arranged and in which an ultra-high vacuum prevails (10 -7 hPa up to 10 -12 hPa), from a second area which has a high vacuum (10 -3 hPa up to 10 -7hPa). The second area is the intermediate pressure area of ​​the jet guide tube 104, which leads to the sample chamber 120.

[0096] Sample chamber 120 is under vacuum. A pump (not shown) is arranged on sample chamber 120 to generate the vacuum. During the Fig. In the embodiment shown in Figure 1, the sample chamber 120 is operated in a first pressure range or in a second pressure range. The first pressure range includes only pressures less than or equal to 10 -3 hPa, and the second pressure range only includes pressures greater than 10 -3 hPa. To ensure these pressure ranges, the sample chamber 120 is vacuum-sealed.

[0097] The object holder 114 is arranged on an object receiving device in the form of an object table 122. The object table 122 is designed to be movable in three mutually perpendicular directions, namely in an x-direction (first table axis), in a y-direction (second table axis), and in a z-direction (third table axis). Furthermore, the object table 122 can be rotated about two mutually perpendicular rotation axes (table rotation axes). The invention is not limited to the object table 122 described above. Rather, the object table 122 can have further translational and rotational axes along which or about which the object table 122 can move.

[0098] In another embodiment of the SEM 100, the object holder 114 is designed as an object receiving device, for example in the form of a manipulator and / or a gripper for holding the object 125. The object holder 114 is then, for example, designed to be movable as described above and below with regard to the object table 122.

[0099] The SEM 100 also features a third detector 121, which is located in the sample chamber 120. More precisely, the third detector 121 is positioned behind the specimen holder 114 along the optical axis OA, as viewed from the electron source 101. The specimen holder 114 can be rotated so that the object 125 mounted on the specimen holder 114 can be irradiated by the primary electron beam. As the primary electron beam passes through the object 125 under investigation, the electrons interact with the material of the object 125. The electrons passing through the object 125 are detected by the third detector 121.

[0100] A radiation detector 500 is arranged at the sample chamber 120, which detects interaction radiation, for example, X-rays and / or cathodoluminescence. The radiation detector 500, the first detector 116, the second detector 117, and the chamber detector 119 are connected to a control unit 123, which includes a monitor 124. The third detector 121 is also connected to the control unit 123. This is not shown for clarity. The control unit 123 processes detection signals generated by the first detector 116, the second detector 117, the chamber detector 119, the third detector 121, and / or the radiation detector 500 and displays them as images on the monitor 124.

[0101] The control unit 123 has a database 126 in which data can be stored by the control unit 123 and / or from which data can be loaded into a processor of the control unit 123.

[0102] A cooling and / or heating device 127 is arranged on the object holder 114, which is used to cool and / or heat the object holder 114 and / or the object 125. This will be discussed in more detail below.

[0103] To determine a first temperature of the object 125, a third temperature of the object holder 114, and / or a second temperature of the object stage 122, a temperature measuring unit 128 is arranged in the sample chamber 120. For example, the temperature measuring unit 128 is configured as an infrared measuring device or a semiconductor temperature sensor. However, the invention is not limited to the use of such temperature measuring units. Rather, any temperature measuring unit suitable for the invention can be used.

[0104] The control unit 123 of the SEM 100 includes the processor or is configured as a processor. A computer program is loaded into the processor, which controls the SEM 100 in such a way that the method according to the invention is executed. This will be discussed in more detail below.

[0105] Fig. Figure 2 shows a particle beam device in the form of a combination device 200. The combination device 200 has two particle beam columns. One of these is equipped with the SEM 100, as described in the Fig. Figure 1 already shows this, but without the sample chamber 120. Instead, the SEM 100 is arranged on a sample chamber 201. The sample chamber 201 is under vacuum. A pump (not shown) is arranged on the sample chamber 201 to generate the vacuum. In the Fig. In the embodiment shown in section 2, the sample chamber 201 is operated in a first pressure range or in a second pressure range. The first pressure range includes only pressures less than or equal to 10 -3 hPa, and the second pressure range only includes pressures greater than 10 -3 hPa. To ensure these pressure ranges, sample chamber 201 is sealed using vacuum technology.

[0106] Sample chamber 201 contains a chamber detector 119, which is designed, for example, as an Everhart-Thornley detector or an ion detector and has a metal-coated detection surface that shields light. Furthermore, the third detector 121 is arranged in sample chamber 201.

[0107] The SEM 100 serves to generate a first particle beam, namely the primary electron beam described above, and features the optical axis mentioned above, which is located in the Fig. 2 is designated with the reference numeral 709 and is hereinafter also referred to as the first beam axis. Secondly, the combination device 200 is equipped with an ion beam device 300, which is also arranged on the sample chamber 201. The ion beam device 300 also has an optical axis, which is located in the Fig. 2 is designated with the reference numeral 710 and is subsequently also referred to as the second beam axis.

[0108] The SEM 100 is arranged vertically with respect to sample chamber 201. In contrast, the ion beam device 300 is arranged at an angle of approximately 0° to 90° to the SEM 100. In the Fig. Figure 2 shows, for example, an arrangement of approximately 50°. The ion beam device 300 has a second beam generator in the form of an ion beam generator 301. Ions are generated by the ion beam generator 301, forming a second particle beam in the form of an ion beam. The ions are accelerated by means of an extraction electrode 302, which is at a predetermined potential. The second particle beam then passes through an ion optic of the ion beam device 300, the ion optic comprising a condenser lens 303 and a second objective lens 304. The second objective lens 304 ultimately generates an ion probe, which is focused onto the object 125 arranged on a specimen holder 114. The specimen holder 114 is arranged on a specimen receiving device in the form of a specimen table 122.

[0109] In a further embodiment of the combination device 200, the object holder 114 is designed as an object receiving device, for example in the form of a manipulator and / or a gripper for holding the object 125. The object holder 114 is then, for example, designed to be movable as described above and below with regard to the object table 122.

[0110] Above the second objective lens 304 (i.e., in the direction of the ion beam generator 301), an adjustable or selectable aperture 306, a first electrode arrangement 307, and a second electrode arrangement 308 are arranged, wherein the first electrode arrangement 307 and the second electrode arrangement 308 are designed as scanning electrodes. The second particle beam is scanned across the surface of the object 125 by means of the first electrode arrangement 307 and the second electrode arrangement 308, with the first electrode arrangement 307 acting in a first direction and the second electrode arrangement 308 acting in a second direction opposite to the first. Thus, scanning is performed, for example, in an x-direction. Scanning in a perpendicular y-direction is achieved by further electrodes (not shown) rotated by 90° on the first electrode arrangement 307 and on the second electrode arrangement 308.

[0111] As explained above, the object holder 114 is arranged on the object table 122. Also in the Fig. In the embodiment shown in Figure 2, the object stage 122 is designed to be movable in three mutually perpendicular directions, namely in an x-direction (first table axis), in a y-direction (second table axis), and in a z-direction (third table axis). Furthermore, the object stage 122 can be rotated about two mutually perpendicular axes of rotation (table rotation axes).

[0112] The one in Fig. The distances shown between the individual units of the combination device 200 are exaggerated to better illustrate the individual units of the combination device 200.

[0113] A radiation detector 500 is arranged at the sample chamber 201, which detects interaction radiation, for example X-rays and / or cathodoluminescence light. The radiation detector 500 is connected to a control unit 123, which has a monitor 124. The control unit 123 processes detection signals from the first detector 116, the second detector 117 (in Fig. 2 not shown), the chamber detector 119, the third detector 121 and / or the radiation detector 500 are generated and displays these in the form of images on the monitor 124.

[0114] The control unit 123 has a database 126 in which data can be stored by the control unit 123 and / or from which data can be loaded into a processor of the control unit 123.

[0115] A cooling and / or heating device 127 is arranged on the object holder 114, which is used to cool and / or heat the object holder 114 and / or the object 125. This will be discussed in more detail below.

[0116] To determine a first temperature of the object, a third temperature of the object holder 114, and / or a second temperature of the object stage 122, a temperature measuring unit 128 is arranged in the sample chamber 201. For example, the temperature measuring unit 128 is configured as an infrared measuring device or a semiconductor temperature sensor. However, the invention is not limited to the use of such temperature measuring units. Rather, any temperature measuring unit suitable for the invention can be used.

[0117] The control unit 123 of the combination device 200 includes the processor or is designed as a processor. A computer program is loaded into the processor, which controls the combination device 200 in such a way that the method according to the invention is carried out. This will be discussed in more detail below.

[0118] Fig. Figure 3 is a schematic representation of a further embodiment of a particle beam device according to the invention. This embodiment of the particle beam device is designated by reference numeral 400 and includes a mirror corrector for correcting, for example, chromatic and / or spherical aberration. The particle beam device 400 comprises a particle beam column 401, which is designed as an electron beam column and essentially corresponds to an electron beam column of a corrected SEM. However, the particle beam device 400 is not limited to an SEM with a mirror corrector. Rather, the particle beam device can include any type of corrector unit.

[0119] The particle beam column 401 comprises a particle beam generator in the form of an electron source 402 (cathode), an extraction electrode 403, and an anode 404. For example, the electron source 402 is configured as a thermal field emitter. Electrons emitted from the electron source 402 are accelerated towards the anode 404 due to a potential difference between the electron source 402 and the anode 404. Thus, a particle beam in the form of an electron beam is generated along a first optical axis OA1.

[0120] The particle beam is guided along a beam path corresponding to the first optical axis OA1 after it exits the electron source 402. A first electrostatic lens 405, a second electrostatic lens 406, and a third electrostatic lens 407 are used to guide the particle beam.

[0121] Furthermore, the particle beam is aligned along the beam path using a beam guidance device. The beam guidance device of this embodiment comprises a source alignment unit with two magnetic deflection units 408 arranged along the first optical axis OA1. In addition, the particle beam device 400 comprises electrostatic beam deflection units. A first electrostatic beam deflection unit 409, which in another embodiment is also configured as a quadrupole, is arranged between the second electrostatic lens 406 and the third electrostatic lens 407. The first electrostatic beam deflection unit 409 is also arranged downstream of the magnetic deflection units 408. A first multipole unit 409A, in the form of a first magnetic deflection unit, is arranged on one side of the first electrostatic beam deflection unit 409.Furthermore, a second multipole unit 409B, in the form of a second magnetic deflection unit, is arranged on the other side of the first electrostatic beam deflection unit 409. The first electrostatic beam deflection unit 409, the first multipole unit 409A, and the second multipole unit 409B are adjusted to align the particle beam with respect to the axis of the third electrostatic lens 407 and the inlet window of a beam deflection device 410. The first electrostatic beam deflection unit 409, the first multipole unit 409A, and the second multipole unit 409B can act together like a Wien filter. Another magnetic deflection element 432 is arranged at the inlet of the beam deflection device 410.

[0122] The beam deflection device 410 is used as a particle beam deflector, which deflects the particle beam in a specific manner. The beam deflection device 410 comprises several magnetic sectors, namely a first magnetic sector 411A, a second magnetic sector 411B, a third magnetic sector 411C, a fourth magnetic sector 411D, a fifth magnetic sector 411E, a sixth magnetic sector 411F, and a seventh magnetic sector 411G. The particle beam enters the beam deflection device 410 along the first optical axis OA1 and is deflected by the beam deflection device 410 in the direction of a second optical axis OA2. The beam deflection is achieved by the first magnetic sector 411A, the second magnetic sector 411B, and the third magnetic sector 411C by an angle of 30° to 120°.The second optical axis OA2 is aligned at the same angle to the first optical axis OA1. The beam deflection device 410 also deflects the particle beam, which is guided along the second optical axis OA2, in the direction of a third optical axis OA3. The beam deflection is provided by the third magnetic sector 411C, the fourth magnetic sector 411D, and the fifth magnetic sector 411E. In the embodiment shown in... Fig. 3. The deflection to the second optical axis OA2 and to the third optical axis OA3 is provided by deflecting the particle beam at an angle of 90°. Thus, the third optical axis OA3 is coaxial with the first optical axis OA1. However, it should be noted that the particle beam device 400 according to the invention described herein is not limited to deflection angles of 90°. Rather, any suitable deflection angle can be selected by the beam deflection device 410, for example, 70° or 110°, so that the first optical axis OA1 is not coaxial with the third optical axis OA3. For further details of the beam deflection device 410, reference is made to WO 2002 / 067286 A2.

[0123] After the particle beam is deflected by the first magnetic sector 411A, the second magnetic sector 411B, and the third magnetic sector 411C, the particle beam is guided along the second optical axis OA2. The particle beam is guided to an electrostatic mirror 414 and, on its way to the electrostatic mirror 414, passes by a fourth electrostatic lens 415, a third multipole unit 416A in the form of a magnetic deflection unit, a second electrostatic beam deflection unit 416, a third electrostatic beam deflection unit 417, and a fourth multipole unit 416B in the form of a magnetic deflection unit. The electrostatic mirror 414 comprises a first mirror electrode 413A, a second mirror electrode 413B, and a third mirror electrode 413C.Electrons from the particle beam, which are reflected back at the electrostatic mirror 414, travel again along the second optical axis OA2 and re-enter the beam deflection device 410. They are then deflected by the third magnetic sector 411C, the fourth magnetic sector 411D and the fifth magnetic sector 411E to the third optical axis OA3.

[0124] The electrons of the particle beam exit the beam deflection device 410 and are guided along the third optical axis OA3 to an object 425, which is to be examined and is mounted on an object holder 114. On its way to the object 425, the particle beam is guided to a fifth electrostatic lens 418, a beam guide tube 420, a fifth multipole unit 418A, a sixth multipole unit 418B, and an objective lens 421. The fifth electrostatic lens 418 is an electrostatic immersion lens. The particle beam is decelerated or accelerated by the fifth electrostatic lens 418 to an electrical potential of the beam guide tube 420.

[0125] The particle beam is focused by the objective lens 421 into a focal plane in which the object 425 is located. The object holder 114 is mounted on an object receiving device in the form of a movable object stage 424. The movable object stage 424 is located in a sample chamber 426 of the particle beam instrument 400. The object stage 424 is movable in three mutually perpendicular directions: an x-direction (first stage axis), a y-direction (second stage axis), and a z-direction (third stage axis). Furthermore, the object stage 424 can be rotated about two mutually perpendicular rotation axes (stage rotation axes).

[0126] In a further embodiment of the particle beam device 400, the object holder 114 is designed as an object receiving device, for example in the form of a manipulator and / or a gripper for holding the object 425. The object holder 114 is then, for example, designed to be movable as described above and below with regard to the object table 424.

[0127] The sample chamber 426 is under vacuum. A pump (not shown) is arranged on the sample chamber 426 to generate the vacuum. During the Fig. In the embodiment shown in Figure 3, the sample chamber 426 is operated in a first pressure range or in a second pressure range. The first pressure range includes only pressures less than or equal to 10 -3 hPa, and the second pressure range only includes pressures greater than 10 -3 hPa. To ensure these pressure ranges, sample chamber 426 is vacuum-sealed.

[0128] The objective lens 421 can be configured as a combination of a magnetic lens 422 and a sixth electrostatic lens 423. The end of the beam guide tube 420 can also be an electrode of an electrostatic lens. Particles from the particle beam device are decelerated to a potential of the object 425 after exiting the beam guide tube 420. The objective lens 421 is not limited to a combination of the magnetic lens 422 and the sixth electrostatic lens 423. Rather, the objective lens 421 can assume any suitable form. For example, the objective lens 421 can also be configured as a purely magnetic lens or as a purely electrostatic lens.

[0129] The particle beam, focused onto object 425, interacts with it, generating interaction particles. Specifically, secondary electrons are emitted from object 425, or backscattered electrons are scattered by object 425. The secondary electrons or backscattered electrons are then accelerated and guided into the beam guide tube 420 along the third optical axis OA3. The paths of the secondary electrons and backscattered electrons, in particular, run in the opposite direction to the particle beam.

[0130] The particle beam device 400 comprises a first analysis detector 419, which is arranged along the beam path between the beam deflection device 410 and the objective lens 421. Secondary electrons traveling in directions oriented at a large angle to the third optical axis OA3 are detected by the first analysis detector 419. Backscattered electrons and secondary electrons that have a small axial distance to the third optical axis OA3 at the location of the first analysis detector 419—i.e., backscattered electrons and secondary electrons that are a small distance from the third optical axis OA3 at the location of the first analysis detector 419—enter the beam deflection device 410 and are deflected by the fifth magnetic sector 411E, the sixth magnetic sector 411F, and the seventh magnetic sector 411G along a detection beam path 427 to a second analysis detector 428.The deflection angle is, for example, 90° or 110°.

[0131] The first analysis detector 419 generates detection signals, largely produced by emitted secondary electrons. These signals are fed to a control unit 123 and used to obtain information about the properties of the interaction area between the focused particle beam and the object 425. Specifically, the focused particle beam is rasterized across the object 425 using a raster device 429. The detection signals generated by the first analysis detector 419 then enable the creation of an image of the rasterized area of ​​the object 425, which can be displayed on a display unit. The display unit is, for example, a monitor 124 located at the control unit 123.

[0132] The second analysis detector 428 is also connected to the control unit 123. Detection signals from the second analysis detector 428 are sent to the control unit 123 and used to generate an image of the rasterized area of ​​the object 425 and display it on a display unit. The display unit is, for example, the monitor 124, which is located on the control unit 123.

[0133] A radiation detector 500 is arranged at the sample chamber 426, which detects interaction radiation, for example X-rays and / or cathodoluminescence. The radiation detector 500 is connected to the control unit 123, which includes the monitor 124. The control unit 123 processes detection signals from the radiation detector 500 and displays them as images on the monitor 124.

[0134] The control unit 123 has a database 126 in which data can be stored by the control unit 123 and / or from which data can be loaded into a processor of the control unit 123.

[0135] A cooling and / or heating device 127 is arranged on the object holder 114, which is used to cool and / or heat the object holder 114 and / or the object 425. This will be discussed in more detail below.

[0136] To determine a first temperature of the object 425, a third temperature of the object holder 114, and / or a second temperature of the object stage 424, a temperature measuring unit 128 is arranged in the sample chamber 426. For example, the temperature measuring unit 128 is configured as an infrared measuring device or a semiconductor temperature sensor. However, the invention is not limited to the use of such temperature measuring units. Rather, any temperature measuring unit suitable for the invention can be used.

[0137] The control unit 123 of the particle beam device 400 includes the processor or is designed as a processor. A computer program is loaded into the processor, which controls the particle beam device 400 in such a way that the method according to the invention is carried out. This will be discussed in more detail below.

[0138] Fig. Figure 3A shows a schematic representation of a light microscope 800. The light microscope 800 has a light source 801 for generating light and an optical unit 802 for directing the light onto the specimen 125. Furthermore, the light microscope 800 is equipped with a specimen holder 114 for holding the specimen 125. In addition, the light microscope 800 has a movable stage 122 on which the specimen holder 114 is mounted.

[0139] The stage 122 of the light microscope 800 is, for example, movable along a first translation axis (in particular an x-axis), along a second translation axis (in particular a y-axis), and along a third translation axis (in particular a z-axis). The first translation axis, the second translation axis, and the third translation axis are, for example, oriented perpendicular to each other. Furthermore, the stage 122 is rotatable about a first rotation axis and about a second rotation axis oriented perpendicular to the first rotation axis. In one embodiment of the light microscope 800, a motor is provided for each of the aforementioned axes, which enables movement along the respective axis.

[0140] In a further embodiment of the light microscope 800, the specimen holder 114 is designed as a specimen receiving device, for example in the form of a manipulator and / or a gripper for holding the specimen 125. The specimen holder 114 is then, for example, designed to be movable as described above and below with regard to the specimen stage 122.

[0141] The light microscope 800 has a control unit 123 which is equipped with a monitor 124 on which images of the object 125 recorded with the light microscope 800 can be displayed.

[0142] The control unit 123 has a database 126 in which data can be stored by the control unit 123 and / or from which data can be loaded into a processor of the control unit 123.

[0143] A cooling and / or heating device 127 is arranged on the object holder 114, which is used to cool and / or heat the object holder 114 and / or the object 125. This will be discussed in more detail below.

[0144] To determine a first temperature of the object, a third temperature of the specimen holder 114, and / or a second temperature of the specimen stage 122, the light microscope 800 has a temperature measuring unit 128. For example, the temperature measuring unit 128 is configured as an infrared measuring device or a semiconductor temperature sensor. However, the invention is not limited to the use of such temperature measuring units. Rather, any temperature measuring unit suitable for the invention can be used.

[0145] The control unit 123 of the light microscope 800 includes the processor or is designed as a processor. A computer program is loaded into the processor, which controls the light microscope 800 in such a way that the method according to the invention is carried out. This will be discussed in more detail below.

[0146] The following section will discuss in more detail the stage 122, 424 of the particle beam instruments 100, 200 and 400 described above, as well as the light microscope 800. The stage 122, 424 is designed as a movable stage, which is located in the Fig. 4 and Fig. Figure 5 is shown schematically. It should be noted that the invention is not limited to the object stage 122, 424 described herein. Rather, the invention can include any movable object stage suitable for the invention.

[0147] The object holder 114 is arranged on the object stage 122, 424, and the object 125, 425 is arranged in the object holder. The object stage 122, 424 has movement elements that ensure movement of the object stage 122, 424 such that an area of ​​interest on the object 125, 425 can be examined using a particle beam and / or a light beam. The movement elements are located in the Fig. 4 and Fig. 5 are shown schematically and are explained below.

[0148] The specimen stage 122, 424 has a first movement element 600, which is arranged, for example, on a housing 601 of the sample chamber 120, 201, or 426 in which the specimen stage 122, 424 is located. The first movement element 600 enables movement of the specimen stage 122, 424 along the z-axis (third table axis). Furthermore, a second movement element 602 is provided. The second movement element 602 enables rotation of the specimen stage 122, 424 about a first table rotation axis 603, which is also referred to as the tilt axis. This second movement element 602 serves to tilt an object 125, 425 arranged in the specimen holder 114 about the first table rotation axis 603.

[0149] A third movement element 604 is arranged on the second movement element 602. This third movement element serves as a guide for a slide and ensures that the object stage 122, 424 is movable in the x-direction (first stage axis). The aforementioned slide is itself a further movement element, namely a fourth movement element 605. The fourth movement element 605 is designed such that the object stage 122, 424 is movable in the y-direction (second stage axis). For this purpose, the fourth movement element 605 has a guide in which another slide is guided, on which the object holder 114 is arranged.

[0150] The object holder 114 is in turn equipped with a fifth movement element 606, which makes it possible to rotate the object holder 114 about a second table rotation axis 607. The second table rotation axis 607 is oriented perpendicular to the first table rotation axis 603.

[0151] Due to the arrangement described above, the object table 122, 424 of the embodiment discussed here has the following kinematic chain: first movement element 600 (movement along the z-axis) - second movement element 602 (rotation about the first table rotation axis 603) - third movement element 604 (movement along the x-axis) - fourth movement element 605 (movement along the y-axis) - fifth movement element 606 (rotation about the second table rotation axis 607).

[0152] In a further embodiment (not shown), it is provided to arrange further movement elements on the object table 122, 424, so that movements along further translational axes and / or around further rotational axes are made possible.

[0153] As from the Fig. As can be seen in Figure 5, each of the aforementioned motion elements is connected to a drive unit in the form of a motor M1 to M5. The first motion element 600 is connected to a first drive unit M1 and is driven by a drive force provided by the first drive unit M1. The second motion element 602 is connected to a second drive unit M2, which drives the second motion element 602. The third motion element 604 is in turn connected to a third drive unit M3. The third drive unit M3 provides a drive force to drive the third motion element 604. The fourth motion element 605 is connected to a fourth drive unit M4, with the fourth drive unit M4 driving the fourth motion element 605. Furthermore, the fifth motion element 606 is connected to a fifth drive unit M5.The fifth drive unit M5 provides a drive force which drives the fifth motion element 606.

[0154] The aforementioned drive units M1 to M5 can, for example, be designed as stepper motors and are controlled by a control unit 608 and each supplied with a supply current by the control unit 608 (see Fig. 5) It is explicitly noted that the invention is not limited to movement by stepper motors. Rather, any drive units can be used, for example, brushless motors. By supplying the power supply to the drive units M1 to M5, the drive units M1 to M5 are controlled such that the stage 122, 424 is moved to a desired position in the sample chamber 120, 201, 426. The stage 122, 424 is held in this desired position by means of the drive units M1 to M5. In other words, the stage 122, 424 should not move from this desired position. This is particularly desirable for good resolution and / or accurate imaging of an object 125, 425 arranged on the stage 122, 424.When the drive units M1 to M5 are stopped, the amplitude of the supply current for each drive unit M1 to M5 is reduced to a predefinable holding amplitude. The supply current exhibiting this holding amplitude is also referred to as the holding current. When the supply current for each drive unit M1 to M5 exhibits the holding current, the object stage 122, 424 remains in the desired position.

[0155] The inventive method is explained in more detail below using the SEM 100 as an example. The same applies to the combination device 200, the particle beam device 400, and the light microscope 800.

[0156] Fig. Figure 6 shows a schematic representation of a flowchart for an embodiment of the method according to the invention. In process step S1, the temperature of the object holder 114, on which the object 125 is arranged, is changed from a first temperature value of the object holder 114 to a second temperature value of the object holder 114 by means of the cooling and / or heating device 127. For example, the object holder 114 is cooled and / or heated from the first temperature value of the object holder 114 to the second temperature value of the object holder 114. Additionally or alternatively, the temperature of the object 125 is changed from a first temperature value of the object 125 to a second temperature value of the object 125 by means of the cooling and / or heating device 127. For example, the object 125 is cooled and / or heated from the first temperature value of the object 125 to the second temperature value of the object 125.

[0157] Changing the third temperature of the object holder 114 and / or the first temperature of the object 125 causes a change in the second temperature of the object stage 122 from a first temperature value of the object stage 122 to a second temperature value of the object stage 122. In other words, changing the third temperature of the object holder 114 and / or the first temperature of the object 125 also causes a change in the second temperature of the object stage 122.

[0158] In process step S2, the supply current to the drive units M1 to M5 is changed from a first current value to a second current value. At both the first and second current values, the object stage 122 is held in the desired position in the sample chamber 120 by the drive units M1 to M5. Thus, the aforementioned supply current is a holding current. In other words, when the supply current is at either the first or second current value, the object stage 122 is held in the desired position in the sample chamber 120 by the drive units M1 to M5.

[0159] In process step S3, the first temperature of the object stage 122 is changed. More precisely, due to heat generated by the drive units M1 to M5, which is achieved through the second current value of the supply current and supplied to the object stage 122, the second temperature of the object stage 122 is changed from the second temperature value to a third temperature value. The third temperature value of the object stage 122 lies within a temperature range for which the following applies: TOT1−15∘C≤TOT3≤TOT1+15∘C, where TOT1 is the first temperature value of the object stage 122, and where TOT3 is the third temperature value of the object stage 122.

[0160] In other words, the third temperature value of the object stage 122 lies within a range of ± 15 °C around the first temperature value of the object stage 122.

[0161] In one embodiment of the method according to the invention, the process steps S1 to S3 are repeated.

[0162] Fig. Figure 7 shows a schematic representation of a flowchart of a further embodiment of the method according to the invention. The embodiment of the Fig. 7 is based on the embodiment of the Fig. 6. Therefore, reference is first made to the above statements, which also apply here. The embodiment of the Fig. Figure 7 provides for cooling of the object holder 114 in process step S1A. Accordingly, in process step S1A, the third temperature of the object holder 114, on which the object 125 is arranged, is lowered from the first temperature value of the object holder 114 to the second temperature value of the object holder 114 by means of the cooling and / or heating device 127. Thus, the first temperature value of the object holder 114 is higher than the second temperature value of the object holder 114. For cooling, liquid nitrogen or liquid helium, for example, is used. The first temperature value of the object holder 114 is, for example, room temperature. The second temperature value of the object holder 114 is, for example, less than or equal to -140 °C. Additionally or alternatively, the embodiment of the Fig. 7. Cooling of object 125 in process step S1A is described. Accordingly, in process step S1A, the first temperature of object 125 is lowered from a first temperature value to a second temperature value by means of the cooling and / or heating device 127. Thus, the first temperature value of object 125 is higher than the second temperature value. For cooling, liquid nitrogen or liquid helium, for example, is used. The first temperature value of object 125 is, for example, room temperature. The second temperature value of object 125 is, for example, less than or equal to -140 °C.

[0163] Changing the first temperature of object 125 and / or the third temperature of object holder 114 causes a change in the second temperature of object table 122 from the first temperature value of object table 122 to the second temperature value of object table 122. In other words, a change in the first temperature of object 125 and / or the third temperature of object holder 114 also causes a change in the second temperature of object table 122. In this case, the first temperature value of object table 122 is higher than the second temperature value of object table 122. For example, the first temperature value of object table 122 is room temperature, and the second temperature value of object table 122 is approximately 5 °C to 15 °C below room temperature.

[0164] In process step S2A, the supply current of the drive units M1 to M5 is changed from the first current value to the second current value. During the Fig. In the embodiment of the method according to the invention shown in Figure 7, the supply current of the drive units M1 to M5 is changed such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. In other words, the supply current of the drive units M1 to M5 for holding the specimen stage 122 in the specimen chamber 120 is changed such that the second current value of the supply current is greater than the first current value of the supply current. This results in more heat being generated by the drive units M1 to M5, which is supplied to the specimen stage 122.

[0165] In process step S3A, the first temperature of the object stage 122 is changed. More precisely, due to the heat generated in the drive units M1 to M5, which is achieved by the second current value of the supply current and supplied to the object stage 122, the second temperature of the object stage 122 is changed from the second temperature value to the third temperature value. The third temperature value of the object stage 122 lies within the temperature range already mentioned above.

[0166] At the in Fig. In the embodiment of the method according to the invention shown in Figure 7, it is particularly provided that the supply current is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object stage 122. In other words, the supply current is changed such that two conditions are met. Firstly, the first temperature value of the object stage 122 is greater than the second temperature value of the object stage 122. Secondly, the second temperature value of the object stage 122 is less than the third temperature value of the object stage 122.

[0167] In a further embodiment of the method according to the Fig. 7. It is additionally or alternatively provided that the change in the second temperature of the object stage 122 from the second temperature value of the object stage 122 to the third temperature value of the object stage 122 is carried out in such a way that the third temperature value of the object stage 122 corresponds to the first temperature value of the object stage 122. In other words, a change in the second temperature of the object stage 122 is counteracted by the heat generated by the drive units M1 to M5 in such a way that the second temperature of the object stage 122 returns to its original temperature value or substantially to its original temperature value before the change in the first temperature of the object holder 114, the original temperature value corresponding to the first temperature value of the object stage 122.In this embodiment of the method according to the invention, one essentially obtains a drift of the object table 122 that occurred before changing the first temperature of the object 125 and / or the third temperature of the object holder 114.

[0168] In a further embodiment of the method according to the Fig. In section 7, it is stipulated that the change in the second temperature of the object stage 122 from the second temperature value to the third temperature value is such that: TOT1 - 15 °C ≤ TOT3 ≤ TOT1. In other words, the third temperature value of the object stage 122 lies within a range bounded by a temperature 15 °C below the first temperature value of the object stage 122 and by the first temperature value of the object stage 122 itself. The range boundaries are included in the range.

[0169] Fig. Figure 8 shows yet another embodiment of the method according to the invention, which is based on the embodiment of the Fig. 7. Therefore, reference is first made to the remarks made above, which also apply here. In contrast to the embodiment of the Fig. 7 shows the embodiment of the Fig. 8. The execution of a process step S4A, which is performed, for example, between process steps S2A and S3A. The supply current is changed such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current. After reaching the second current value of the supply current, the supply current is held constant at that value.

[0170] Fig. Figure 9 shows yet another embodiment of the method according to the invention, which is based on the embodiment of the Fig. 7. Therefore, reference is first made to the remarks made above, which also apply here. In contrast to the embodiment of the Fig. 7 shows the embodiment of the Fig. 9. The execution of process step S5A replaces process step S2A. Process step S5A is executed, for example, between process steps S1A and S3A. In process step S5A, the supply current is changed when, during changes to the first temperature of object 125 and / or the third temperature of object holder 114, the first temperature of object 125 and / or the third temperature of object holder 114 reaches or falls below a first predefinable temperature value, for example, 0 °C. In this embodiment of the method according to the invention, the supply current is also changed such that l2 > l1, where l1 is the first current value of the supply current and l2 is the second current value of the supply current.In other words, the supply current to the drive units M1 to M5 for holding the specimen stage 122 at the desired position in the sample chamber 120 is modified by the drive units M1 to M5 such that the second current value is greater than the first current value. This results in more heat being generated by the drive units M1 to M5, which is then transferred to the specimen stage 122.

[0171] Fig. Figure 10 shows yet another embodiment of the method according to the invention, which is based on the embodiment of the Fig. 7. Therefore, reference is first made to the remarks made above, which also apply here. In contrast to the embodiment of the Fig. 7 shows the embodiment of the Fig. 10. The execution of a process step S6A, which is executed, for example, after process step S3A. After the cooling of the object holder 114 and / or the object 125 has ended, the supply current of the drive units M1 to M5 is changed again. For example, the supply current of the drive units M1 to M5 is changed back from the second current value to the first current value when two conditions are met: (i) The cooling of the object holder 114 and / or the object 125 has ended, and (ii) the first temperature of the object 125 and / or the third temperature of the object holder 114 assumes a third temperature value that lies in the range between the first temperature value and the second temperature value of the object holder 114 and / or the object 125.If, therefore, the first temperature of object 125 and / or the third temperature of object holder 114 moves back towards the original first temperature value of object holder 114 and / or object 125 (i.e., towards room temperature), then the supply current of the drive units M1 to M5 is changed from the second current value back to the original current value, namely the first current value. This causes the drive units M1 to M5 to generate less heat, thus preventing the object stage 122 from being heated unnecessarily.

[0172] Alternatively to the above, in an embodiment of the method according to the invention, in process step S6A the supply current of the drive units M1 to M5 is changed back from the second current value to the first current value when three conditions are met: (i) the cooling of the object holder 114 and / or the object 125 has ended, (ii) the first temperature of the object 125 and / or the third temperature of the object holder 114 assumes a third temperature value which lies in the range between the first temperature value and the second temperature value of the object holder 114 and / or the object 125, and (iii) a predefinable time period has elapsed after the cooling of the object holder 114 and / or the object 125 has ended.In other words, after the predefined time period has elapsed, when the cooling of the object holder 114 and / or the object 125 is complete, and when the first temperature of the object and / or the third temperature of the object holder 114 returns to the original first temperature value (i.e., towards room temperature), the supply current of the drive units M1 to M5 is changed from the second current value back to the original current value, namely the first current value. This also results in the drive units M1 to M5 generating less heat, thus preventing the object stage 122 from being heated unnecessarily.

[0173] Alternatively to the above, in one embodiment of the method according to the invention, in process step S6A the supply current of the drive units M1 to M5 is changed from the second current value to the first current value when two conditions are met: (i) the cooling of the object holder 114 and / or the object 125 is complete, and (ii) the first temperature of the object 125 and / or the third temperature of the object holder 114 reaches or exceeds a predefinable temperature threshold, for example -100 °C or -80 °C or -60 °C. This embodiment of the method according to the invention is particularly advantageous if the object holder 114 and / or the object 125 warms up again after cooling. Then the supply current of the drive units M1 to M5 is changed from the second current value back to the original current value, namely the first current value.This means that the drive units M1 to M5 generate less heat, thus preventing the object stage 122 from being heated unnecessarily.

[0174] Fig. Figure 11 shows a schematic representation of a flowchart of a further embodiment of the method according to the invention. The embodiment of the Fig. 11 is based on the embodiment of the Fig. 6. Therefore, reference is first made to the above statements, which also apply here. The embodiment of the Fig. Section 11 provides for heating the object holder 114 and / or the object 125 in process step S1B. Accordingly, in process step S1B, the third temperature of the object holder 114, on which the object 125 is located, is increased from the first temperature value of the object holder 114 to the second temperature value of the object holder 114 by means of the cooling and / or heating device 127. Thus, the first temperature value of the object holder 114 is lower than the second temperature value of the object holder 114. The first temperature value of the object holder 114 is, for example, the room temperature. The second temperature value of the object holder 114 is, for example, less than or equal to 40 °C. Additionally or alternatively, in process step S1B, the first temperature of the object 125 is increased from a first temperature value of the object 125 to a second temperature value of the object 125 by means of the cooling and / or heating device 127.Therefore, the first temperature value of object 125 is lower than the second temperature value of object 125. The first temperature value of object 125 is, for example, the room temperature. The second temperature value of object 125 is, for example, less than or equal to 40 °C.

[0175] As explained above, changing the first temperature of object 125 and / or the third temperature of object holder 114 causes a change in the second temperature of object table 122 from the first temperature value of object table 122 to the second temperature value of object table 122. In other words, a change in the first temperature of object 125 and / or the third temperature of object holder 114 also causes a change in the second temperature of object table 122. In this case, the first temperature value of object table 122 is lower than the second temperature value of object table 122. For example, the first temperature value of object table 122 is room temperature, and the second temperature value of object table 122 is approximately 5 °C to 15 °C above room temperature.

[0176] In process step S2B, the supply current of the drive units M1 to M5 is changed from the first current value to the second current value. During the Fig. In the embodiment of the method according to the invention shown in Figure 11, the supply current of the drive units M1 to M5 is modified such that I1 > I2, where I1 is the first current value of the supply current and I2 is the second current value of the supply current. In other words, the supply current of the drive units M1 to M5 for holding the specimen stage 122 in the specimen chamber 120 is modified such that the second current value of the supply current is lower than the first current value of the supply current. This results in less heat being generated by the drive units M1 to M5, which is then transferred to the specimen stage 122.

[0177] In process step S3B, the second temperature of the object stage 122 is changed. More precisely, due to the heat generated in the drive units M1 to M5, which is produced by the second current value of the supply current and supplied to the object stage 122, the second temperature of the object stage 122 is changed from the second temperature value to the third temperature value. The third temperature value of the object stage 122 lies within the temperature range already mentioned above.

[0178] At the in Fig. In the embodiment of the method according to the invention shown in Figure 11, it is particularly provided that: TOT1 < TOT2 and TOT2 > TOT3, where TOT2 is the second temperature value of the object stage 122. In other words, the supply current is changed such that two conditions are met. Firstly, the first temperature value of the object stage 122 is less than the second temperature value of the object stage 122. Secondly, the second temperature value of the object stage 122 is greater than the third temperature value of the object stage 122.

[0179] In one embodiment of the method according to the invention Fig. 11. It is additionally or alternatively provided that the change in the second temperature of the object stage 122 from the second temperature value of the object stage 122 to the third temperature value of the object stage 122 is carried out in such a way that the third temperature value of the object stage 122 corresponds to the first temperature value of the object stage 122. In other words, a change in the second temperature of the object stage 122 is counteracted by the heat generated by the drive units M1 to M5 in such a way that the second temperature of the object stage 122 returns to its original temperature value or substantially to its original temperature value before the change in the first temperature of the object holder 114, the original temperature value corresponding to the first temperature value of the object stage 122.In this embodiment of the method according to the invention, one essentially obtains a drift of the object table 122 that occurred before changing the first temperature of the object 125 and / or the third temperature of the object holder 114.

[0180] In a further embodiment of the method according to the Fig. In section 11, it is stipulated that the change in the second temperature of the object stage 122 from the second temperature value to the third temperature value is carried out such that: TOT1 ≤ TOT3 ≤ TOT1 + 15 °C. In other words, the third temperature value of the object stage 122 lies within a range which is bounded by the first temperature value itself and by a temperature 15 °C above the first temperature value of the object stage 122. The range boundaries are included in the range.

[0181] Fig. Figure 12 shows yet another embodiment of the method according to the invention, which is based on the embodiment of the Fig. 11. Therefore, reference is first made to the remarks made above, which also apply here. In contrast to the embodiment of the Fig. 11 shows the embodiment of the Fig. 12. The execution of a process step S4B, which is performed, for example, between process steps S2B and S3B. The supply current is changed such that: I1 > I2, where I1 is the first current value of the supply current and I2 is the second current value of the supply current. After reaching the second current value of the supply current, the supply current is held constant at that value.

[0182] Fig. Figure 13 shows yet another embodiment of the method according to the invention, which is based on the embodiment of the Fig. 11. Therefore, reference is first made to the remarks made above, which also apply here. In contrast to the embodiment of the Fig. 11 shows the embodiment of the Fig. 13. The execution of process step S5B instead of process step S2B. For example, process step S5B is executed between process steps S1B and S3B. In process step S5B, the supply current is changed if, during the changing of the first temperature of object 125 and / or the third temperature of object holder 114, the first temperature of object 125 and / or the third temperature of object holder 114 reaches or exceeds a first predefinable temperature value. In this embodiment of the method according to the invention, the supply current is also changed such that: I1 > I2, where I1 is the first current value of the supply current and I2 is the second current value of the supply current.In other words, the supply current to the drive units M1 to M5 for holding the specimen stage 122 at the desired position in the sample chamber 120 is modified by the drive units M1 to M5 such that the second current value of the supply current is lower than the first current value of the supply current. This results in less heat being generated by the drive units M1 to M5, which is then transferred to the specimen stage 122.

[0183] Fig. Figure 14 shows yet another embodiment of the method according to the invention, which is based on the embodiment of the Fig. 11. Therefore, reference is first made to the remarks made above, which also apply here. In contrast to the embodiment of the Fig. 11 shows the embodiment of the Fig. 14. The execution of a process step S6B, which is executed, for example, after process step S3B. After the heating of the object holder 114 and / or the object 125 has ended, the supply current of the drive units M1 to M5 is changed again. For example, the supply current of the drive units M1 to M5 is changed back from the second current value to the first current value when two conditions are met: (i) the heating of the object holder 114 and / or the object 125 has ended, and (ii) the first temperature of the object 125 and / or the third temperature of the object holder 114 assumes a third temperature value that lies in the range between the first temperature value and the second temperature value of the object holder 114 and / or the object 125.Therefore, if the first temperature of object 125 and / or the third temperature of object holder 114 moves back towards the original first temperature value of the object and / or object holder 114 (i.e., towards room temperature), then the supply current of the drive units M1 to M5 is changed from the second current value back to the original current value, namely the first current value. This causes the drive units M1 to M5 to generate more heat again.

[0184] Alternatively to the foregoing, in an embodiment of the method according to the invention, in process step S6B the supply current of the drive units M1 to M5 is changed back from the second current value to the first current value when three conditions are met: (i) the heating of the object holder 114 and / or the object has ended, (ii) the first temperature of the object 125 and / or the third temperature of the object holder 114 assumes a third temperature value which lies in the range between the first temperature value and the second temperature value of the object holder 114 and / or the object 125, and (iii) a predefinable time period has elapsed after the heating of the object holder 114 and / or the object 125 has ended.In other words, after the predefined time period has elapsed, when the heating of the object holder 114 and / or the object 125 has ended, and when the first temperature of the object 125 and / or the third temperature of the object holder 114 returns to the original first temperature value (i.e., towards room temperature), the supply current of the drive units M1 to M5 is changed from the second current value back to the original current value, namely the first current value. This also causes the drive units M1 to M5 to generate more heat again.

[0185] Alternatively to the above, in one embodiment of the method according to the invention, in process step S6B, the supply current of the drive units M1 to M5 is changed from the second current value to the first current value when two conditions are met: (i) the heating of the object holder 114 and / or the object 125 has ended, and (ii) the first temperature of the object 125 and / or the third temperature of the object holder 114 reaches or falls below a predefinable temperature threshold, for example, 35 °C, 32 °C, or 30 °C. Then the supply current of the drive units M1 to M5 is changed from the second current value back to the original current value, namely the first current value. This causes the drive units M1 to M5 to generate more heat again.

[0186] As mentioned above, in a further embodiment of the SEM 100, the object holder 114 is designed as an object receiving device, for example in the form of a manipulator and / or a gripper for holding the object 125. The object holder 114 is then, for example, movably designed as described above and below with regard to the object table 122. An embodiment of the method according to the invention with regard to this further embodiment of the SEM 100 is described below. First, the temperature of the object 125 is changed from a first temperature value to a second temperature value by means of the cooling and / or heating device 127. For example, the object 125 is cooled and / or heated from the first temperature value to the second temperature value.Changing the first temperature of object 125 causes a change in the third temperature of object holder 114 from a first temperature value of object holder 114 to a second temperature value of object holder 114. In other words, a change in the first temperature of object 125 also causes a change in the third temperature of object holder 114.

[0187] The supply current to the drive units M1 to M5 of the specimen holder 114 is then changed from a first current value to a second current value. At both the first and second current values ​​of the supply current, the specimen holder 114 is held in the desired position in the specimen chamber 120 by the drive units M1 to M5. Thus, the aforementioned supply current is a holding current. In other words, when the supply current is at either the first or the second current value, the specimen holder 114 is held in the desired position in the specimen chamber 120 by the drive units M1 to M5.

[0188] Furthermore, the third temperature of the object holder 114 is now changed. More precisely, due to heat generated by the drive units M1 to M5, which is achieved through the second current value of the supply current and supplied to the object holder 114, the third temperature of the object holder 114 is changed from the second temperature value to a third temperature value. The third temperature value of the object holder 114 lies within a temperature range for which the following applies: TOT1−15∘C≤TOT3≤TOT1+15∘C, where TOT1 is the first temperature value of the object holder 114, and where TOT3 is the third temperature value of object holder 114.

[0189] In other words, the third temperature value of the object holder 114 lies within a range of ± 15 °C around the first temperature value of the object holder 114. This embodiment of the method according to the invention can include the variants already described above with regard to the further embodiments of the method according to the invention.

[0190] In a further embodiment of the method according to the invention, it is provided that, before changing the first temperature of the object 125 and / or the third temperature of the object holder 114, the value of the second current value of the supply current is determined so that the second temperature of the object stage 122 corresponds to the third temperature value. This is explained below with reference to the third temperature of the object holder 114. The same applies to the first temperature of the object 125. This process step of the embodiment of the method according to the invention does not necessarily have to be carried out by a user of the SEM 100. Rather, this process step can also be carried out at the factory by a manufacturer of the SEM 100.For example, it is planned that database 126 contains values ​​for the second current value of the supply current, depending on the second temperature value of the object holder 114 and depending on the third temperature value to be achieved of the object table 122. Then, according to process step S1, the following occurs. Fig. 6 in a process step S10 (see Fig. 17) First, the second current value of the supply current, depending on the second temperature value of the object holder 114 and depending on the desired third temperature value of the object stage 122, is loaded from database 126 into the control unit 123 of the SEM 100. Subsequently, process steps S2 and S3 are carried out according to the Fig. 6. The charged second current value of the supply current is then supplied to the drive units M1 to M5.

[0191] In one embodiment of the method according to the invention, determining the second current value of the supply current comprises the following steps: - Setting the third temperature of the object holder 114 to several different second temperature values ​​of the object holder 114; as well as - Determining the second current value of the supply current for each of the several different second temperature values ​​of the object holder 114, wherein when the determined second current value is supplied to the drive units M1 to M5 a change in the second temperature of the object table 122 from the second temperature value of the object table 122 to the third temperature value of the object table 122 is achieved.

[0192] This is shown in the flowchart of the Fig. Figure 15 illustrates this. In process step S7, the third temperature of the object holder 114 is set to a second temperature value, for example, the value T21. Then, in process step S8, the second current value of the supply current is determined so that a specific, predetermined third temperature value of the object stage 122 is achieved. This is, for example, the second current value I21. Fig. Figure 16 shows a schematic representation of the second current value of the supply current as a function of the second temperature value of the object holder 114 for a specific predetermined third temperature value of the object table 122.

[0193] Once the second current value of the supply current has been determined, process step S9 stores this value in database 126. Process step S10 checks whether another second current value should be determined. If so, process steps S7 to S9 are repeated. In this way, further second current values ​​are determined based on the second temperature value of object holder 114. For example, a second current value I22 is determined for the second temperature value T22 of object holder 114. Furthermore, a second current value I23 is determined for the second temperature value T23 of object holder 114.

[0194] In this embodiment of the method according to the invention, a functional relationship I(T) between the second current value of the supply current and the second temperature value of the object holder 114 is determined for a specific predetermined third temperature value of the object stage 122. Using this functional relationship, the second current value of the supply current required for the second temperature of the object stage 122 to reach the third temperature value can then be determined for every second temperature value of the object holder 114. The functional relationship can be determined by extrapolation and / or interpolation. Any suitable interpolation method can be used, for example, linear interpolation, nonlinear interpolation, trigonometric interpolation, logarithmic interpolation, and / or spline interpolation.Any suitable extrapolation method can be used, for example, linear extrapolation, nonlinear extrapolation, trigonometric extrapolation, and / or logarithmic extrapolation. Additionally or alternatively, the functional relationship can be determined by averaging, generating random values, and / or finding the smallest or largest value from the set of the first and second values.

[0195] Should it be necessary to measure the temperature of the object holder 114, the object 125 and / or the object table 122, this will be done with the temperature measuring unit 128.

[0196] All embodiments of the method according to the invention have the advantages already explained above. Reference is made to these here.

[0197] The features of the invention disclosed in this description, in the drawings, and in the claims can be essential for realizing the invention in its various embodiments, both individually and in any combination. The invention is not limited to the described embodiments. It can be varied within the scope of the claims and taking into account the knowledge of the person skilled in the art. Reference symbol list 100 SEM 101 Electron source 102 Extraction electrode 103 Anode 104 Beam guide tube 105 first condenser lens 106 second condenser lens 107 first objective lens 108 first aperture unit 108A first aperture 109 second aperture unit 110 pole shoes 111 Coil 112 individual electrodes 113 Pipe electrode 114 object holders 115 Grid system 116 first detector 116A Counterfield grid 117 second detector 118 second aperture 119 Chamber detector 120 sample chamber 121 third detector 122 Object table 123 Control unit (processor) 124 Monitor 125 objects 126 database 127 Cooling and / or heating equipment 128 Temperature measuring unit 200 combination device 201 Sample chamber 300 ion beam device 301 Ion Beam Generators 302 Extraction electrode in the ion beam device 303 Condenser lens 304 second lens 306 adjustable or selectable aperture 307 first electrode arrangement 308 second electrode arrangement 400 particle beam device with corrector unit 401 Particle beam column 402 Electron source 403 Extraction electrode 404 Anode 405 first electrostatic lens 406 second electrostatic lens 407 third electrostatic lens 408 magnetic deflection unit 409 first electrostatic beam deflection unit 409A first multipole unit 409B second multipole unit 410 Beam deflection device 411A first magnetic sector 411B second magnetic sector 411C third magnetic sector 411D fourth magnetic sector 411E fifth magnetic sector 411F sixth magnetic sector 411G seventh magnetic sector 413A first mirror electrode 413B second mirror electrode 413C third mirror electrode 414 electrostatic mirror 415 fourth electrostatic lens 416 second electrostatic beam deflection unit 416A third multipole unit 416B fourth multipole unit 417 third electrostatic beam deflection unit 418 fifth electrostatic lens 418A fifth multipole unit 418B sixth multipole unit 419 first analysis detector 420 Beam guide tube 421 Lens 422 magnetic lens 423 sixth electrostatic lens 424 Object table 425 object 426 Sample chamber 427 Detection beam path 428 second analysis detector 429 Grid system 432 additional magnetic deflection element 500 radiation detector 600 first movement element 601 Housing 602 second movement element 603 first table rotation axis 604 third movement element 605 fourth movement element 606 fifth movement element 607 second table rotation axis 608 Control unit 709 first beam axis 710 second beam axis 800 light microscope 801 Light source 802 optical unit M1 first drive unit M2 second drive unit M3 third drive unit M4 fourth drive unit M5 fifth drive unit OA optical axis OA1 first optical axis OA2 second optical axis OA3 third optical axis S1 to S3 process steps S1A to S6A procedure steps S1B to S6B procedure steps S7 to S10 process steps

Claims

[1] Method for operating a particle beam device (100, 200, 400) and / or a light microscope (800) for imaging, analyzing and / or processing an object (125, 425), the method comprising the following steps: - Changing a first temperature of the object (125, 425), wherein the object (125, 425) is arranged on an object receiving device (122, 424) which is movable by at least one motor (M1 to M5) operated with a supply current, wherein changing the first temperature of the object (125, 425) causes a change in a second temperature of the object receiving device (122, 424) from a first temperature value of the object receiving device (122, 424) to a second temperature value of the object receiving device (122, 424); - Changing the supply current of the motor (M1 to M5) from a first current value to a second current value, wherein in both the first current value and the second current value the supply current is used to hold the object acquisition device (122, 424) by the motor (M1 to M5) in a position in the particle beam device (100, 200, 400) and / or in the light microscope (800); and - Changing the second temperature of the object receiving device (122, 424) from the second temperature value of the object receiving device (122, 424) to a third temperature value of the object receiving device (122, 424) due to heat generated by the motor (M1 to M5), which is achieved by the second current value of the supply current and supplied to the object receiving device (122, 424), wherein the third temperature value of the object receiving device (122, 424) lies in a temperature range for which the following applies: TOT1−15∘C≤TOT3≤TOT1+15∘C, where TOT1 is the first temperature value of the object acquisition device (122, 424), and where TOT3 is the third temperature value of the object acquisition device (122, 424). [2] Method according to claim 1, wherein the object (125, 425) is arranged on an object holder (114), wherein the object holder (114) is arranged on the object receiving device (122, 424), wherein the object receiving device (122, 424) is designed as an object table and wherein the method comprises the following step: - Changing the first temperature of the object (125, 425) by changing a third temperature of the object holder (114) from a first temperature value of the object holder (114) to a second temperature value of the object holder (114). [3] Method according to claim 2, wherein the changing of the third temperature of the object holder (114) is carried out by cooling or heating the object holder (114). [4] Method according to any of the preceding claims, wherein the change of the first temperature of the object (125, 425) is carried out by cooling or heating the object (125, 425). [5] A method according to any of the preceding claims, wherein the method has at least one of the following features: (i) a stepper motor is used as the motor (M1 to M5), the supply current being a holding current of the stepper motor; (ii) a brushless motor is used as the motor (M1 to M5), wherein the supply current is a holding current of the brushless motor. [6] A method according to any of the preceding claims, wherein the method comprises at least one of the following steps: (i) when changing the first temperature of the object (125, 425) the object (125, 425) is cooled and the supply current is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object receiving device (122, 424); (ii) when changing the first temperature of the object (125, 425) the object (125, 425) is cooled with liquid nitrogen and the supply flow is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object receiving device (122, 424); (iii) when changing the first temperature of the object (125, 425) the object (125, 425) is cooled with liquid helium and the supply current is changed such that: TOT1 > TOT2 and TOT2 < TOT3, where TOT2 is the second temperature value of the object receiving device (122, 424). [7] Method according to one of the preceding claims, wherein the change of the second temperature of the object receiving device (122, 424) from the second temperature value of the object receiving device (122, 424) to the third temperature value of the object receiving device (122, 424) is carried out such that the third temperature value of the object receiving device (122, 424) corresponds to the first temperature value of the object receiving device (122, 424). [8] Method according to one of the preceding claims, wherein the change of the second temperature of the object receiving device (122, 424) from the second temperature value to the third temperature value is carried out such that one of the following relationships holds: TOT1−15∘C≤TOT3≤TOT1; TOT1≤TOT3≤TOT1+15∘C; [9] A method according to any of the preceding claims, wherein the method comprises one of the following steps: (i) the supply current is changed such that: I2 > I1, where I1 is the first current value of the supply current and where I2 is the second current value of the supply current; (ii) the supply current is changed such that: I1 > I2, where I1 is the first current value of the supply current and where I2 is the second current value of the supply current; (iii) the supply current is changed such that: I2 > I1, where I1 is the first current value of the supply current, where I2 is the second current value of the supply current and where, after reaching the second current value, the supply current is kept constant at the second current value; (iv) the supply current is changed such that: I1 > I2, where I1 is the first current value of the supply current, where I2 is the second current value of the supply current and where, after reaching the second current value, the supply current is kept constant at the second current value; (v) if, when changing the first temperature of the object (125, 425), the first temperature of the object (125, 425) reaches or falls below a first predefinable temperature value, the supply current is changed such that: I2 > I1, where I1 is the first current value of the supply current and where I2 is the second current value of the supply current; (vi) if, when changing the first temperature of the object (125, 425), the first temperature of the object (125, 425) reaches or exceeds a second predefinable temperature value, the supply current is changed such that: I1 > I2, where I1 is the first current value of the supply current and where I2 is the second current value of the supply current. [10] The method of claim 2, wherein the method comprises one of the following steps: (i) when changing the third temperature of the object holder (114) if the third temperature of the object holder (114) reaches or falls below a first predefinable temperature value, the supply current is changed such that: I2 > I1, where I1 is the first current value of the supply current and where I2 is the second current value of the supply current; (ii) if, when changing the third temperature of the object holder (114), the third temperature of the object holder (114) reaches or exceeds a second predefinable temperature value, the supply current is changed such that: I1 > I2, where I1 is the first current value of the supply current and where I2 is the second current value of the supply current. [11] A method according to any of the preceding claims, wherein the method comprises one of the following steps: (i) after the first temperature of the object (125, 425) has finished changing and when the first temperature of the object (125, 425) reaches a third temperature value which is in the range between the first temperature value and the second temperature value of the object (125, 425), the supply current of the motor (M1 to M5) is changed from the second current value to the first current value; (ii) after a predetermined time period following the cessation of the change of the first temperature of the object (125, 425) and when the first temperature of the object (125, 425) assumes a third temperature value which is in the range between the first temperature value and the second temperature value of the object (125, 425), the supply current of the motor (M1 to M5) is changed from the second current value to the first current value; (iii) if, after the first temperature of the object (125, 425) has been changed, the first temperature of the object (125, 425) reaches or exceeds a first predefinable temperature threshold, the supply current is changed from the second current value to the first current value; (iv) if, after the first temperature of the object (125, 425) has been changed, the first temperature of the object (125, 425) reaches or falls below a second predefinable temperature threshold, the supply current is changed from the second current value to the first current value. [12] The method of claim 2, wherein the method comprises one of the following steps: (i) after the third temperature of the object holder (114) has finished changing and when the third temperature of the object holder (114) assumes a third temperature value which is in the range between the first temperature value and the second temperature value of the object holder (114), the supply current of the motor (M1 to M5) is changed from the second current value to the first current value; (ii) after a predetermined time period following the cessation of the change of the third temperature of the object holder (114) and when the third temperature of the object holder (114) assumes a third temperature value which is in the range between the first temperature value and the second temperature value of the object holder (114), the supply current of the motor (M1 to M5) is changed from the second current value to the first current value; (iii) if, after the third temperature of the object holder (114) has been changed, the third temperature of the object holder (114) reaches or exceeds a first predefinable temperature threshold, the supply current is changed from the second current value to the first current value; (iv) if, after the third temperature of the object holder (114) has been changed, the third temperature of the object holder (114) reaches or falls below a second predefinable temperature threshold, the supply current is changed from the second current value to the first current value. [13] Method according to one of the preceding claims, wherein, before changing the first temperature of the object (125, 425), the value of the second current value of the supply current is determined so that the second temperature of the object receiving device (122, 424) has the third temperature value. [14] Method according to claim 13, wherein determining the second current value of the supply current comprises: - Setting the object's first temperature (125, 425) to several different second temperature values; as well as - Determining the second current value for each of the several different second temperature values, wherein, when the determined second current value is supplied to the motor (M1 to M5), the change in the second temperature of the object receiving device (122, 424) from the second temperature value of the object receiving device (122, 424) to the third temperature value of the object receiving device (122, 424) is achieved. [15] Method according to claim 2, wherein, before changing the third temperature of the object holder (114), the value of the second current value of the supply current is determined so that the second temperature of the object receiving device (122, 424) has the third temperature value. [16] Method according to claim 15, wherein determining the second current value of the supply current comprises: - Setting the third temperature of the object holder (114) to several different second temperature values; as well as - Determining the second current value for each of the several different second temperature values, wherein, when the determined second current value is supplied to the motor (M1 to M5), the change in the second temperature of the object receiving device (122, 424) from the second temperature value of the object receiving device (122, 424) to the third temperature value of the object receiving device (122, 424) is achieved. [17] Method according to claim 14 or 16, wherein determining the second current value comprises extrapolation and / or interpolation. [18] Computer program product comprising a program code that can be loaded into a processor (123) and which, when executed, controls a particle beam device (100, 200, 400) and / or a light microscope (800) such that a method according to at least one of the preceding claims is carried out. [19] Particle beam device (100, 200, 400) for imaging, analyzing and / or processing an object (125, 425), with - at least one beam generator (101, 301, 402) for generating a particle beam with charged particles; - at least one objective lens (107, 304, 421) for focusing the particle beam onto the object (125, 425); - at least one scanning device (115, 429) for scanning the particle beam over the object (125, 425); - at least one object holder (114) for holding the object (125, 425); - at least one cooling and / or heating device (127) for changing the temperature of the object holder (114) and / or the object (125, 425); - at least one movable object receiving device (122, 424) on which the object holder (114) is arranged; - at least one motor (M1 to M5) for moving the object receiving device (122, 424); - at least one power supply unit (608) to supply the motor (M1 to M5) with a supply current; - at least one detector (116, 117, 119, 121, 419, 428, 500) for the detection of interaction particles and / or interaction radiation resulting from an interaction of the particle beam with the object (125, 425); - at least one display device (124) for displaying the image and / or a result of the analysis of the object (125, 425); and with - at least one control unit (123) with a processor in which a computer program product according to claim 18 is loaded. [20] Particle beam device (100, 200, 400) according to claim 19, wherein the motor (M1 to M5) for moving the object receiving device (122, 424) is designed as a stepper motor and / or as a brushless motor. [21] Particle beam device (100, 200, 400) according to claim 19 or 20, wherein the particle beam device (100, 200, 400) has at least one temperature measuring unit (128) for measuring the temperature of the object holder (114) and / or the object receiving device (122, 424) and / or the object (125, 425). [22] Particle beam device (200) according to one of claims 19 to 21, wherein the beam generator (101) is configured as a first beam generator (101) and the particle beam is configured as a first particle beam with first charged particles, wherein the objective lens (107) is configured as a first objective lens for focusing the first particle beam onto the object (125), and wherein the particle beam device (200) further comprises: - at least one second beam generator (301) for generating a second particle beam with second charged particles; and - at least one second objective lens (304) for focusing the second particle beam onto the object (125). [23] Particle beam device (100, 200, 400) according to any one of claims 19 to 22, wherein the particle beam device (100, 200, 400) is an electron beam device and / or an ion beam device. [24] Light microscope (800) for imaging, analyzing and / or processing an object, with - at least one light source (801) for generating light; - at least one optical unit (802) for guiding the light onto the object (125); - at least one object holder (114) for holding the object (125); - at least one cooling and / or heating device (127) for changing the temperature of the object holder (114) and / or the object (125, 425); - at least one movable object receiving device (122) on which the object holder (114) is arranged; - at least one motor (M1 to M5) for moving the object receiving device (122); - at least one power supply unit (608) for supplying the motor (M1 to M5) with a supply current; and with - a control unit (123) comprising a processor in which a computer program product according to claim 18 is loaded. [25] Light microscope (800) according to claim 24, wherein the motor (M1 to M5) for moving the object receiving device (122) is designed as a stepper motor and / or as a brushless motor. [26] Light microscope (800) according to claim 24 or 25, wherein the light microscope (800) has at least one temperature measuring unit (128) for measuring the temperature of the specimen holder (114) and / or the stage (122) and / or the object (125, 425).

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