Conveyor mechanism and film stretching device for stretching a film adhering to a plate-shaped object

Abstract

Conveying mechanism (140) for suction, holding and conveying a target object, wherein the conveying mechanism comprises: several suction parts (146), each of the several suction parts (146) having a suction pad (146b) and suctioning and holding the target object through the suction pad; a carrier (142) which is connected to each of the several suction parts (146) by a joint (148) which is pivotable; several elastic components (144), wherein one end part (144b) of each of the several elastic components (144) is attached to one of the several suction parts (146) and the other end part (144a) of each of the several elastic components (144) is attached to the support (142); several bellows-shaped suction pads (160); a vacuum control unit (156) comprising a valve (154) arranged in a predetermined flow path (150) connected to each of the multiple suction parts (146), and controlling the generation of a vacuum at each of the multiple suction parts (146); and a motion unit (136) which moves the carrier (142), wherein the carrier (142) has a pair of straight parts (142a) each with two end parts and on the end parts of the pair of straight parts (142a) a suction part (146) with suction pad (146b) and two bellows-shaped suction pads (160) arranged in a triangular shape are attached, and wherein the multiple elastic components (144) allow the multiple suction parts (146) to pivot in accordance with an inclination or deformation of the target object being suctioned and held, and, when the suction holding of the target object is released, the elastic components (144) return the suction pads (146b) to a predetermined orientation when the suction pads are not suctioning and holding the target object.

Description

BACKGROUND OF THE INVENTION AREA OF THE INVENTION

[0001] The present invention relates to a conveying mechanism that suctions and holds a target object and conveys it, and to a film stretching device that stretches a film which adheres to a plate-shaped object. DESCRIPTION OF THE RELATED STATE OF THE ART

[0002] A conveying mechanism is known that suctions and conveys a film-shaped target object that is flexible and stretchable / contractable. This conveying mechanism comprises a carrier which, in plan view, is essentially H-shaped and is made of, for example, metal. Several suction units are arranged on the carrier. Each suction unit has a suction part including a suction pad and a joint arranged between the suction part and the carrier. When a target object is suctioned and held by the conveying mechanism, the target object is, in some cases, deformed or tilted. The following technique is known as a countermeasure to this. In particular, a joint is designed to pivot (i.e., it is capable of oscillating).Even if a deformation, tilt, or similar feature occurs in a target object, the orientation of the lower surface of a suction pad is caused to follow a surface of the target object, and the target object is held properly (see, for example, patent application JP 2014 - 194 991 A).

[0003] Furthermore, publication JP H02 - 117 885 U discloses a spherical joint consisting of a spherical projection and a spherical recess that fit together, as well as a compensating spring that serves to return the position of a suction element in its free state to an essentially neutral position. Additionally, JP 2000 - 183 132 A relates to a vacuum suction conveying device and a conveying method equipped with a static elimination function for an object being conveyed. SUMMARY OF THE INVENTION

[0004] In a case where the orientation of the lower surface of the suction pad is caused to follow a surface of the target object, the orientation of the lower surface of the suction pad does not return from its orientation during transport to its original orientation even when the suction force is released after transport and the target object is separated from the suction pad. In some cases, it is impossible to attract and hold the next target object. The present invention was developed in light of this problem and aims to provide a transport mechanism in which the orientation of the lower surfaces of the suction pad returns to its original orientation after the suction force has been released.

[0005] In accordance with one aspect of the present invention, a conveying mechanism is provided which suctions in and holds a target object and conveys the target object.The conveying mechanism includes several suction parts, each of which has a suction pad and draws in and holds the target object through the suction pad; a carrier connected to each of the suction parts by a pivoting joint; several elastic components, one end of each of the elastic components being attached to one of the suction parts and the other end of each of the elastic components being attached to the carrier; several bellows-shaped suction pads; a vacuum control unit comprising a valve arranged in a predetermined flow path connected to each of the suction parts and controlling the generation of a vacuum at each of the suction parts; and a motion unit which moves the carrier.The carrier has a pair of straight sections, each with two end sections. Attached to the end sections of the pair of straight sections (142a) are a suction element (146) with a suction pad (146b) and two bellows-shaped suction pads (160) arranged in a triangular pattern. The multiple elastic components allow the suction element to pivot according to an inclination or deformation of the target object, which is being suctioned and held. When the suction holding of the target object is released, the elastic components return the suction pads to a predetermined orientation when the suction pads are no longer suctioning and holding the target object.

[0006] Preferably, each of the elastic components is a rubber film, a resin film, an elastomer film or a spring.

[0007] In accordance with a further aspect of the present invention, a film stretching device is provided that stretches a film which adheres to a plate-shaped object. The film stretching device includes a stretching unit which stretches the film which adheres to the plate-shaped object and which has a rectangular shape in a predetermined planar direction, and a frame arrangement unit which has a first suction pad for drawing in an annular frame in which an opening is formed with a diameter larger than a surface area of ​​the plate-shaped object, and which arranges the annular frame on one side of a surface of the film which has been stretched by the stretching unit in such a way that the annular frame surrounds the plate-shaped object.The film stretching device also includes a cutting unit comprising a cutting blade designed to cut into the film outside the opening of the annular frame to which the plate-shaped object and the annular frame adhere, and a conveying mechanism that suctions and holds an outer circumferential part of a hole cut into the film by the cutting blade and conveys the film to a disposal container.The conveying mechanism includes a suction element which has a second suction pad and draws in and holds the film through the second suction pad, a carrier which is connected to the suction element by a pivoting joint, an elastic component in which one end part is attached to the suction element and the other end part is attached to the carrier, a vacuum control unit which has a valve which is arranged in a predetermined flow path connected to the suction element and controls the generation of a vacuum at the suction element, and a motion unit which moves the carrier.The elastic component allows the suction part to pivot according to an inclination or deformation of the film that is being suctioned and held, and, when the holding of the film via suction action is released, the elastic component returns the orientation of the second suction pad to a predetermined orientation when the second suction pad is not suctioning and holding the film.

[0008] Preferably, the conveying mechanism causes the film sucked in and held by the suction part to be pressed against a surface of a film previously received in the disposal container and to adhere to it, and then releases a suction effect on the following film in order to stack the following film, which has been pressed against and adheres to the film previously received in the disposal container.

[0009] The conveying mechanism according to the present invention includes an elastic component in which one end is attached to the suction element and the other end is attached to the support. The elastic component allows the suction element to pivot in accordance with any inclination or deformation of the target object being drawn in and held. When the holding force of the target object is released beyond the suction action, the external force exerted by the target object on the suction element disappears, so that the orientation of the lower surface of the suction pad naturally returns to its original orientation due to the restoring force of the elastic component. Therefore, the advantage is that the suction process for the next target object to be drawn in is not hindered.

[0010] The above and other problems, features and advantages of the present invention, as well as the manner of its implementation, will best become clearer by studying the following description and attached claims, with reference to the attached drawings, which show preferred embodiments of the invention, and the invention itself will be best understood thereby. BRIEF DESCRIPTION OF THE DRAWINGS Fig. Figure 1 is a perspective view of a film stretching device; Fig. 2 is a perspective view of a transfer unit; Fig. 3 is a top view of a stretching unit; Fig. 4A is a perspective view of a Z-axis direction movement mechanism, etc.; Fig. 4B is a perspective view of a transport mechanism; Fig. 5A is a partial sectional view of a suction part, etc.; Fig. 5B is an enlarged view of the suction part, etc., when the orientation of the bottom surface of a suction pad has changed; Fig. 6 is a diagram illustrating a foil stretching step; Fig. Figure 7 is a diagram illustrating a frame arrangement step and a cutting step; Fig. Figure 8 is a diagram or chart illustrating a component chip separation step; Fig. Figure 9 is a diagram illustrating a foil suction step; Fig. Figure 10 is a diagram illustrating a clamp unit evacuation step; Fig. Figure 11 is a diagram illustrating a foil disposal step; Fig. 12 is a flowchart illustrating a processing procedure for a slide; Fig. Figure 13 is a diagram illustrating the foil disposal step in accordance with a modified example; Fig. Figure 14 is an enlarged partial view of the conveying mechanism in accordance with a second embodiment; and Fig. Figure 15 is a diagram illustrating the positional relationship between the suction pad and bellows-shaped suction pads. DETAILED EXPLANATION OF THE PREFERRED EXECUTION FORMS

[0011] Embodiments in accordance with an aspect of the present invention are described with reference to the accompanying drawings. Fig. Figure 1 is a perspective view of a film stretching device 2 in accordance with a first embodiment. The film stretching device 2 is a device for adhering a film (target object) 19, which is a stretchable / contractable stretching band exhibiting stretchability / contractability, to a plate-shaped workpiece (plate-shaped object) 11 (see Figure 1). Fig. 2 etc.) and then stretching the foil 19. First, the workpiece 11 etc. is stretched with reference to Fig. 2 described.

[0012] The workpiece 11 of the present embodiment is a wafer made of a semiconductor material, such as silicon, and has a circular disk shape. Several intersecting parting lines 13 are provided on the side of a front surface 11a of the workpiece. A component 15, such as an integrated circuit (IC) or a large-scale integration (LSI), is formed in areas highlighted by the parting lines 13. A protective component 17, which has substantially the same diameter as the workpiece 11 and is made of a resin, adheres to the side of the front surface 11a.

[0013] In the workpiece 11 of the present embodiment, several modified layers are formed at different depths along each of the planned parting lines 13. The modified layers are formed using a laser processing device (not illustrated). For example, a modified layer is formed by positioning the focal point of a laser beam of a wavelength that can be transmitted through the workpiece 11 at a predetermined depth inside the workpiece 11 and moving the focal point along the planned parting lines 13.

[0014] The workpiece 11, which is in Fig. 2 is illustrated, is in a state before the workpiece 11 is cut into several component chips 25 (see Fig. 6 etc.) using modified layers as starting points by applying an external force to the workpiece 11 after the multiple modified layers have been formed along each planned separation line 13. The workpiece 11 is not limited to the state prior to its separation and can be in the state in which it has been divided into the multiple component chips 25 by grinding, cutting, etc. Furthermore, there is no particular restriction regarding the material, shape, structure, size, etc., of the workpiece 11. For example, it is also possible to use a substrate as the workpiece 11 that is made of a semiconductor material other than silicon. Furthermore, there is also no particular restriction regarding the type, quantity, shape, structure, size, arrangement, etc., of the component 15.

[0015] Again, with reference to Fig. 1. Components of the film stretching device 2 are described. An X-axis direction, a Y-axis direction and a Z-axis direction, which are in Fig. The directions illustrated in Figure 1 are perpendicular to each other. The film stretching device 2 includes a base 4 with a flat plate shape. At a corner section of the base 4, which is located at an end section on one side in the X-axis direction, a film feed unit 8 is arranged for feeding the film 19 to the workpiece 11. Fig. Figure 1 shows the film feed unit 8 simplified as a rectangular cuboid.

[0016] In the film feed unit 8, a roll body (not illustrated) is arranged around which the film 19 is wound with a release film to form a roll shape. The film 19 has a base layer and an adhesive layer, which is arranged on one surface of the base layer. The base layer is made of a resin, such as a polyolefin-based resin. Furthermore, the adhesive layer is made of a resin, such as an ultraviolet-curable resin, and the release film described above adheres to the adhesive layer.

[0017] The film feed unit 8 comprises a feed roller (not illustrated) that discharges the film 19 with the release liner from the roll body, and a separating plate (not illustrated) that peels the release liner from the film 19 with the release liner. Furthermore, the film feed unit 8 comprises a rewind roller (not illustrated) that winds up the separated release liner, and an adhesive roller that supports the base layer side of the film 19 from which the release liner has been separated.

[0018] Above the film feed unit 8, an adhesion unit 10 is arranged, which presses the workpiece 11 against the adhesive side of the film 19 in the state in which the adhesion unit suctions and holds the workpiece 11. The adhesion unit 10 includes a support part 12, including a pair of arm parts with longitudinal sections, each arranged substantially parallel to the Y-axis direction. The end parts of the arm part pair are coupled by a coupling part, which is arranged substantially parallel to the X-axis direction. Furthermore, a shaft part 14 with a circular column shape, having a vertical direction that is substantially parallel to the X-axis direction, is arranged between the arm part pair. A rotary drive source (not illustrated), such as a motor, is coupled to an end part of the shaft part 14.

[0019] A base part 16 with a flat, plate-like shape is attached to the shaft part 14 between one end and the other end. A clamping table 20 with a circular disk shape is attached to a surface of this base part 16. The clamping table 20 has a circular, porous plate that is connected to a suction source, such as an ejector, by a predetermined flow path. An upper surface 20a of the porous plate is exposed in the surface of the clamping table 20, and a negative pressure is generated at the upper surface 20a (holding surface) when the suction source is actuated.

[0020] An air cylinder 18 for moving the support part 12 along the Z-axis direction is arranged on a side surface located on the side opposite the base part 16 in the coupling part of the support part 12. The air cylinder 18 has a cylinder tube and a piston rod, and the support part 12 described above is attached to the upper end of the piston rod. A rectangular plate 22 is attached to the lower part of the air cylinder 18. The rectangular plate 22 is located directly below the clamping table 20 and has a through-opening 22a with a diameter larger than the outer diameter of the clamping table 20.

[0021] On one side of the rectangular plate 22, in the X-axis direction, a cutting blade portion 24 for cutting the film 19 and a heating device 26 for heating the cutting blade are arranged. The cutting blade portion 24 can move along the Y-axis direction by means of a movement mechanism (not illustrated) located on the rectangular plate 22. A ball-screw-type X-axis movement mechanism 28 for moving the adhesive unit 10 in the X-axis direction is arranged at one end of the rectangular plate 22 on one side in the Y-axis direction. The X-axis movement mechanism 28 has a pair of guide rails 30 that are substantially parallel to the X-axis direction and arranged to overlap in the Z-axis direction.

[0022] A motion plate 32 is mounted on each guide rail 30 so as to be movable in the X-axis direction. A nut (not illustrated) is arranged on the rear surface of the motion plate 32, and a ball screw 34, substantially parallel to the X-axis direction, is rotatably coupled to this nut. A rotary drive source 36, such as a motor, is coupled to an end part of the ball screw 34.

[0023] Here, the process of adhering the film 19 to the side of a rear surface 11b of the workpiece 11 is briefly described. First, the adhesion unit 10 is positioned above the layer feed unit 8. With the upper surface 20a of the clamping table 20 facing upwards, the side of the front surface 11a of the workpiece 11 is drawn in and held by the upper surface 20a. Next, the shaft part 14 is rotated, and the upper surface 20a is oriented upwards. By actuating the air cylinder 18 and moving the upper surface 20a downwards, the adhesive layer of the film 19 is applied to the entire side of the rear surface 11b of the workpiece 11. The film 19 is then cut by moving the cutting blade part 24 along the Y-axis, and the adhesion unit 10 is subsequently moved along the X-axis to the other side.This essentially cuts the foil 19 into a square (rectangle), and the protective component 17, the workpiece 11 and the foil 19 are joined together (see . Fig. 2).

[0024] The workpiece 11, to which the film 19 is attached, is transferred to a transfer unit 40, which is arranged below the adhesive unit 10. Fig. Figure 2 is a perspective view of the transfer unit 40. The transfer unit 40 has a rectangular motion plate 42. A rotary drive source 44, such as a motor, is arranged on the motion plate 42. An output shaft of the rotary drive source 44 (not illustrated) is arranged substantially parallel to the Z-axis direction, and the central part of the lower surface of a circular disk 46 is attached to this output shaft.

[0025] An air cylinder 48 is arranged at the central part of the upper surface of the circular disk 46. The air cylinder 48 has a circular column-shaped cylinder tube 48a, which is arranged essentially parallel to the Z-axis direction. The lower part of a piston rod 48b is arranged inside the cylinder tube 48a. The lower part of a clamping table 50 is attached to the upper end part of the piston rod 48b. The structure of the clamping table 50 is essentially the same as that of the clamping table 20 described above. A holding surface 50a, in which a vacuum is generated, is exposed in the upper surface of the clamping table 50.

[0026] A clamping mechanism 52 for clamping the four corners of the film 19 is arranged on the side surface of the clamping table 50 at each of four locations that differ from one another in the circumferential direction of the clamping table 50. A support post 54 with a rectangular cuboid shape is arranged between the two clamping mechanisms 52 in the circumferential direction of the clamping table 50. The lower end of the support post 54 is attached to the upper surface of the circular disc 46. Two roller parts 56 are arranged at the upper end of the support post 54. Each roller part 56 is used when an annular frame 23, which will be described later, adheres to the film 19.

[0027] An air cylinder (not illustrated) is arranged at the lower part of each roller section 56, and the height of each roller section 56 is adjusted by this air cylinder. A cutting unit 58 with an annular cutting blade 58a is arranged between the two roller sections 56. An air cylinder (not illustrated) is also arranged at the lower part of the cutting unit 58. The height of the upper end of the cutting blade 58a is adjusted by this air cylinder. As shown in Fig. As illustrated in Figure 1, an X-axis motion mechanism 60 is coupled to the lower part of the motion plate 42 of the transfer unit 40.

[0028] The X-axis motion mechanism 60 has a pair of guide rails 62 arranged substantially parallel to the X-axis direction. The motion plate 42 is movably mounted on the guide rails 62 in the X-axis direction. A nut (not illustrated) is located on the rear surface of the motion plate 42. A ball screw 64, also substantially parallel to the X-axis direction, is rotatably coupled to the nut. A rotary drive source (not illustrated), such as a motor, is coupled to an end of the ball screw 64. A release mechanism 70 for separating the protective component 17, which adheres to the side of the front surface 11a of the workpiece 11, is located on the upper side relative to the transfer unit 40.

[0029] When the protective component 17 on the side of the front surface 11a is separated by the separation mechanism 70 after the film 19 adheres to the side of the rear surface 11b, a workpiece unit 21, which is made up of the workpiece 11 and the film 19, is formed (see Fig. 3 etc.). As in Fig. As illustrated in Figure 1, a stretching unit 72 is arranged in the X-axis direction relative to the separating mechanism 70 on the other side and above the transfer unit 40. The stretching unit 72 stretches the film 19 of the workpiece unit 21, which is held by the transfer unit 40, along the XY plane direction (predetermined planar direction).

[0030] The 72 expansion unit is mainly used with reference to Fig. 3 described. Fig. Figure 3 is a top view of the stretching unit 72. The stretching unit 72 has a first clamping unit 74A that clamps the foil 19. The first clamping unit 74A has a lower clamping part 76a (see Figure 3). Fig. 6) and an upper bracket part 76b, each having a longitudinal part along the Y-axis direction. Several rollers 76a1 (see Fig. 6) are arranged on the side of the upper surface of the lower clamp part 76a along the Y-axis direction. Each roller 76a1 can rotate about an axis of rotation that is substantially parallel to the X-axis direction, and substantially half of the roller 76a1 projects upwards in the radial direction from the upper surface of the lower clamp part 76a. Similarly, several rollers 76b1 (see Fig. 6) arranged on the side of the lower surface of the upper clamp part 76b along the Y-axis direction. Each roller 76b1 can rotate about an axis of rotation that is substantially parallel to the X-axis direction, and substantially half of the roller 76b1 projects radially from the lower surface of the upper clamp part 76b.

[0031] An end part of a Fig. 3. The lower arm, not illustrated, with a substantially L-shape in the view from below, is coupled to a substantially central part of the lower bracket part 76a. Likewise, an end part of an upper arm 78, with a substantially L-shape in a view from below, is coupled to a substantially central part of the upper bracket part 76b. A in Fig. 3. A lower movable plate (not illustrated) is coupled to the other end part of the lower arm, and an upper movable plate 80 is coupled to the other end part of the upper arm 78. The lower movable plate and the upper movable plate 80 are coupled so as to be movable in the Z-axis direction by a guide rail 82, which is arranged substantially parallel to the Z-axis direction.

[0032] A nut part is arranged on the side opposite the lower arm (rear surface side) in the lower movable plate, and a nut part is also arranged on the side opposite the upper arm 78 (rear surface side) in the upper movable plate 80 (neither of which is in Fig. 3 illustrated). One in Fig. 3. A ball screw (not illustrated), which is essentially parallel to the Z-axis direction, is rotatably coupled to the nut part of the lower movable plate, and one in Fig. Three non-illustrated rotary drive sources, such as a motor, are coupled to the lower end of this ball screw. Similarly, a Fig. 3. A ball screw (not illustrated) which is essentially parallel to the Z-axis direction, rotatably coupled to the nut part of the upper movable plate 80, and a rotary drive source 84, such as a motor, is coupled to the upper end part of this ball screw.

[0033] When the lower arm is raised by actuating the rotary drive source, and the upper arm 78 is lowered by actuating the rotary drive source 84, the film 19 can be clamped by the multiple rollers 76a1 of the lower clamping part 76a and the multiple rollers 76b1 of the upper clamping part 76b. The guide rail 82 is attached to a surface of a base part with a rectangular cuboid shape, and an X-axis movement mechanism 86 for moving the first clamping unit 74A along the X-axis direction is arranged at the lower part of this base part.

[0034] The X-axis motion mechanism 86 has a nut (not illustrated) located at the lower part of the base part and a ball screw 88 rotatably coupled to this nut and essentially parallel to the X-axis direction. A rotary drive source 90, such as a motor, is coupled to one end of the ball screw 88. Furthermore, a bearing 92 is coupled to the other end of the ball screw 88. When the first clamping unit 74a is moved in the X-axis direction to one side in the state where the film 19 is clamped by the lower clamping part 76a and the upper clamping part 76b, the film 19 is pulled in the X-axis direction to one side.

[0035] When the stretching unit 72 is viewed from above, a second clamping unit 74B is arranged on the opposite side of the first clamping unit 74A with respect to a straight line (first axis of symmetry) that runs through the center of the stretching unit 72 in the X-axis direction and is parallel to the Y-axis direction. The structure of the second clamping unit 74B is essentially the same as that of the first clamping unit 74A. However, the lower arm and the upper arm 78 of the second clamping unit 74B are arranged symmetrically with respect to the lower arm and the upper arm 78 of the first clamping unit 74A about the first axis of symmetry.

[0036] When the second clamping unit 74B is moved in the X-axis direction by the X-axis movement mechanism 86 for the second clamping unit 74B in the state in which the film 19 is moved to the other side by the lower clamping part 76a and the upper clamping part 76b of the second clamping unit 74B, the film 19 is pulled to the other side in the X-axis direction. A third clamping unit 74C is arranged between the first clamping unit 74A and the second clamping unit 74B, which is closer in the Y-axis direction to the other side than the end parts of the upper clamping parts 76b on the other side in the Y-axis direction. The third clamping unit 74C has a Fig. 3 lower bracket part and upper bracket part 94, each of which has a longitudinal part along the X-axis direction.

[0037] Several in Fig. Three rollers (not illustrated) are arranged along the X-axis direction on the upper surface of the lower clamp part. Each roller can rotate about an axis of rotation substantially parallel to the Y-axis direction, and substantially half of the roller projects upward in the radial direction from the upper surface of the lower clamp part. Similarly, several rollers (not illustrated) are arranged along the X-axis direction on the lower surface of the upper clamp part 94. Each roller can rotate about an axis of rotation substantially parallel to the Y-axis direction, and substantially half of the roller projects downward in the radial direction from the lower surface of the upper clamp part 94.

[0038] An end portion of a straight-shaped lower arm (not illustrated) is coupled to a subsequent middle portion of the lower clamping section such that the lower arm extends to the opposite side in the Y-axis direction. Similarly, an end portion of a straight-shaped upper arm 96 is coupled to a substantially middle portion of the upper clamping section 94 such that the upper arm 96 extends to the opposite side in the Y-axis direction. A lower movable plate (not illustrated) is coupled to the other end portion of the lower arm, and an upper movable plate 98 is coupled to the other end portion of the upper arm 96. The lower movable plate and the upper movable plate 98 are movably mounted in the Z-axis direction on a guide rail 100, which is arranged substantially parallel to the Z-axis.

[0039] A nut is arranged on the side opposite the lower arm (rear surface) in the lower movable plate, and a nut is also arranged on the side opposite the upper arm 96 (rear surface) in the upper movable plate 98 (both not illustrated). A ball screw (not illustrated), oriented substantially parallel to the Z-axis direction, is rotatably coupled to the nut of the lower movable plate, and a rotary drive source (not illustrated), such as a motor, is coupled to the lower end of this ball screw. Similarly, a ball screw (not illustrated), oriented substantially parallel to the Z-axis direction, is rotatably coupled to the nut of the upper movable plate 98, and a rotary drive source 102, such as a motor, is coupled to the upper end of this ball screw.

[0040] When the lower arm is raised by actuating the rotary drive source for the lower clamping part and the upper arm 96 is lowered by actuating the rotary drive source 102, the film 19 can be clamped by each roller of the lower clamping part and each roller of the upper clamping part 94. The guide rail 100 is attached to a surface of a base part with a rectangular cuboid shape, and a Y-axis movement mechanism 104 for moving the third clamping unit 74C along the Y-axis direction is arranged at the lower part of this base part.

[0041] The Y-axis motion mechanism 104 has a nut (not illustrated) located at the lower part of the base part and a ball screw 106 rotatably coupled to this nut and parallel to the Y-axis direction. A rotary drive source 108, such as a motor, is coupled to one end of the ball screw 106. A bearing is coupled to the other end of the ball screw 106. When the third clamping unit 74C is moved to the opposite side in the Y-axis direction, in which the film is clamped by the lower clamping part and the upper clamping part 94, the film 19 is pulled to the opposite side in the Y-axis direction.

[0042] A fourth clamping unit 74D is arranged on the side opposite the third clamping unit 74C with respect to the lower clamping part 76a and the upper clamping part 76b of the first clamping unit 74A. The structure of the fourth clamping unit 74D is essentially the same as that of the third clamping unit 74C. However, an end portion (not illustrated) of a lower arm with a straight shape is coupled to the lower clamping part in such a way that the lower arm extends to one side in the Y-axis direction. Similarly, an end portion of the upper arm 96 with a straight shape is coupled to the upper clamping part 94 in such a way that the upper arm 96 extends to one side in the Y-axis direction.

[0043] When the fourth clamping unit 74D is moved to one side in the Y-axis direction in the state where the sheet 19 is clamped by the lower clamping part and the upper clamping part 94 of the fourth clamping unit 74D, the sheet 19 is pulled to one side in the Y-axis direction. Referring again to Fig. 1. Other components of the film stretching device 2 are described. On one side of the stretching unit 72 in the Y-axis direction, there is a frame bearing area (not illustrated) in which the ring-shaped frames 23 made of metal (see Fig. 7) are arranged to be stacked in the Z-axis direction. The annular frame 23 is an annular thin plate and has a through-opening (opening) 23a with a diameter larger than the diameter (size) of the front surface 11a or the rear surface 11b (that is, a surface) of the workpiece 11 (see Fig. 7).

[0044] A frame arrangement unit 110 is arranged above the base 4. The frame arrangement unit 110 transports an annular frame 23 in the state in which the frame arrangement unit 110 suctions and holds the annular frame 23 and arranges it on the side of a surface 19a of the film 19 (that is, a surface on the side of the adhesive layer in the film 19, see Figure 1). Fig. 7), which is stretched by the stretching unit 72. The frame assembly unit 110 includes a base part 112, which, viewed from above, has a circular disk shape and is made of metal. On the side of the lower surface of the base part 112, four suction pads (first suction pads) 112a are arranged such that they are separated from each other along the circumferential direction of the base part 112.

[0045] The suction pads 112a of the present embodiment are pads used in a suction mechanism of a vacuum system. The other end of a flow path (not illustrated) is connected to these suction pads 112a. The flow path is connected at one end to a suction source (not illustrated), such as a vacuum pump or an ejector. A valve (not illustrated), such as a solenoid valve, is arranged in this flow path. When the valve is set to the open position, a vacuum is created on the lower surface of the suction pads 112a. The suction pads 112a are not limited to vacuum systems and can be pads used in a suction mechanism of a Bernoulli system (i.e., a Bernoulli clamping system). In the case of the Bernoulli system, instead of the suction source, a gas supply source for supplying a gas, such as air, is arranged at one end of the flow path.Instead of the multiple independent suction pads 112a, a ring-shaped suction pad can be arranged on the side of the lower surface of the base part 112.

[0046] The lower end of a support column 114a, having a rectangular column shape and a longitudinal section extending along the Z-axis, is connected to the upper surface of the base part 112. An end of a connecting part 114b, also having a rectangular column shape and extending along the X-axis, is connected to the upper end of the support column 114a. A surface (front surface) of a rectangular motion plate 114c is connected to the other end of the connecting part 114b. A Z-axis motion mechanism 116 is located on the side of the other surface (rear surface) of the motion plate 114c. Fig. 4A is a perspective view of the Z-axis direction movement mechanism 116 etc.

[0047] The Z-axis direction motion mechanism 116 has a flat, plate-shaped motion plate 118 with a longitudinal section oriented along the Z-axis. A pair of guide rails 120, also oriented along the Z-axis, is attached to one surface (the front surface) of the motion plate 118. The motion plate 114c, described above, is movably mounted on the pair of guide rails 120 along the Z-axis. A nut (not illustrated) is located on the rear surface of the motion plate 114c, and a ball screw 122, oriented along the pair of guide rails 120, is rotatably coupled to this nut.

[0048] A rotary drive source 124, such as a motor, is located at the upper end of the ball screw 122. The motion plate 118, the guide rails 120, the ball screw 122, the rotary drive source 124, etc., form the Z-axis direction motion mechanism 116, which moves the support column 114a along the Z-axis direction. The side of one surface (front surface) of a motion block 126 is attached to the side of the other surface (rear surface) of the motion plate 118. The motion block 126 is movably mounted on a pair of guide rails 128, which are substantially parallel to the Y-axis direction and arranged to overlap in the Z-axis direction.

[0049] A nut (not illustrated) is located on the side of the other surface (rear surface) of the motion block 126, and a ball screw 130, arranged between the pair of guide rails 128 substantially parallel to the Y-axis direction, is rotatably coupled to this nut. A rotary drive source 132, such as a motor, is coupled to an end of the ball screw 130. The motion block 126, the guide rails 128, the ball screw 130, the rotary drive source 132, etc., form a Y-axis motion mechanism 134 that moves the support column 114a, etc., along the Y-axis direction.

[0050] As in Fig. As illustrated in Figure 1, an air cylinder 138 is attached to a side surface of the support column 114a. The air cylinder 138 has a cylinder tube 138a whose longitudinal direction is oriented along the Z-axis. The upper part of a piston 138b is located inside the cylinder tube 138a. A conveying mechanism 140 is attached to the lower part of the piston 138b. The Z-axis movement mechanism 116, the Y-axis movement mechanism 134, and the air cylinder 138 form a motion unit 136 for moving the conveying mechanism 140 along the Z-axis and Y-axis directions (see Figure 1). Fig. 4A).

[0051] Fig. 4B is a perspective view of the conveying mechanism 140, which suctions and holds the slide 19 (target object) and conveys the slide 19. In Fig. Figure 4B illustrates some components in a simplified manner using lines, functional blocks, etc. The conveying mechanism 140 includes a support 142, which, viewed from above, is essentially H-shaped and made of metal. The support 142 includes a pair of straight parts 142a, which are arranged essentially parallel to the X-axis direction. The central longitudinal portions of the pair of straight parts 142a are coupled by a coupling part 142b, which is arranged essentially parallel to the Y-axis direction.

[0052] Cylindrical sections 142c are formed at the lower ends of both straight sections 142a. The cylindrical sections 142c are part of the support 142. Flow paths are formed within the cylindrical sections 142c, and one end of a hose, tube (none of which are illustrated), or similar component, forming a flow path 150 (predetermined flow path), is connected to the upper part of the cylindrical section 142c. A suction source 152, such as a vacuum pump or ejector, is connected to the other end of the flow path 150. Furthermore, a valve 154, such as a solenoid valve, controlled by a control unit described later, is arranged within the flow path 150.

[0053] Upper end parts (the other end parts) 144a of elastic components 144 are attached to the outer circumferential surfaces of the cylindrical parts 142c on the side of the base part. The elastic components 144 of the present embodiment are elastic sheet materials that have been formed into a cylindrical shape using an elastic material. Examples of elastic materials used include rubber, such as natural or synthetic rubber; a polyolefin-based resin, such as polyethylene (PE), polypropylene (PP), or polystyrene (PS); a polyester-based resin, such as polyethylene terephthalate (PET); or an elastomer. The shape of the elastic components 144 is not limited to a cylindrical shape and can be a strip shape.This means that the elastic components can be 144 rubber surface materials, resin surface materials, elastomer surface materials or similar materials in cylindrical or strip form.

[0054] If the elastic components 144 are in the form of strips, several strip-shaped sheet materials are individually arranged in the circumferential direction of the cylindrical parts 142c. Furthermore, the elastic components 144 need not be sheet materials with a cylindrical or strip shape, but can be springs. In the case of using springs as elastic components 144, several springs are individually arranged in the circumferential direction of the cylindrical parts 142c. Any type of spring can be used, such as a coil spring or a leaf spring. The material and shape of the elastic components 144 are not limited to the examples described above, as long as they can exert a restoring force in the XY-plane direction.

[0055] The outer circumferential side surfaces of the suction parts 146 with a circular column shape are attached to lower end parts (the one end parts) 144b of the elastic components 144. Fig. 5A is a partial sectional side view of the suction part 146, etc. In Fig. 5A is a section of the cylindrical part 142c, the elastic component 144, and the suction part 146. As shown in Fig. As illustrated in Figure 5A, a joint 148 is connected to the lower part of the cylindrical part 142c in such a way that it can pivot within a predetermined fixed angle range, and the middle part of the upper part of the suction part 146 is attached to the lower part of the joint 148.

[0056] A flow path 146a is formed in the suction part 146 and is arranged with a suction pad (second suction pad) 146b in such a way that a holding surface faces downwards, creating a vacuum. Fig. Figure 5A illustrates the side surface of the suction pad 146b. Although the suction pad 146b itself is made of rubber or a similar material, its surface is coated with a release agent made of polytetrafluoroethylene or a similar material. Therefore, the suction pad 146b can be easily separated from the film 19 even after it has come into contact with the adhesive layer of the film 19.

[0057] The flow path 146a is connected to the other end of the flow path 150 in the support 142 by a flow path 148a of the joint 148. A vacuum control unit 156, which includes the valve 154, etc., controls the generation of a vacuum at the suction pad 146b. For example, when the valve 154 is set to the open position, the suction pad 146b communicates with the suction source 152, and a vacuum is generated at the suction pad 146b. Furthermore, when the valve 154 is set to the closed position, the suction pad 146b and the suction source 152 are disconnected, and the transfer of the vacuum from the suction source 152 to the suction pad 146b is interrupted.

[0058] The suction pad 146b of the present embodiment is a pad used in a suction mechanism of a vacuum system. However, the suction pad 146b is not limited to this and can be a pad used in a suction mechanism of a Bernoulli system. In the case of the Bernoulli system, a gas supply source for supplying a gas, such as air, is arranged at one end of the flow path 150 instead of the suction source 152. For example, the gas supply source has a compressor that compresses air, a tank in which the compressed air is collected, and a filter that removes water droplets and dust from the air. When the valve 154 is set to the open position, the gas is supplied from the gas supply source to the suction pad 146b.If the suction pad 146b expels the gas in the radial direction outside the lower circular surface or expels the gas in such a way that a vortex flow is generated under the lower surface, the pressure drops and, in accordance with Bernoulli's principle, a vacuum is created in the vicinity of the central part of the lower surface of the suction pad 146b.

[0059] The joint 148 will now be described in more detail. The joint 148 has a spherical part 148b made of metal. A cylindrical part 148c is attached to the lower part of the spherical part 148b. The flow path 148a, which has a diameter smaller than the diameter of the flow path 150, is formed in the spherical part 148b and the cylindrical part 148c such that it penetrates both. The spherical part 148b is held by the base of the cylindrical part 148c in such a way as to prevent it from being displaced along the X-axis, Y-axis, and Z-axis directions, but to allow it to rotate in any direction as long as the flow path 148a communicates with the flow path 150.

[0060] A structure that allows the rotation of such a spherical part 148b is described, for example, in the Japanese patent no. 2014-194991 published above. In connection with the rotation of the spherical part 148b, the joint 148 and the suction element 146 can pivot together (i.e., pivoting is permitted). If the joint 148 is considered, for example, in any direction perpendicular to the Z-axis direction, the joint 148 can pivot within a range of +15° to -15° with respect to the Z-axis direction. Therefore, even if a deformation, tilt, or similar change occurs in the film 19 when the suction pad 146b is holding and gripping the film 19, the orientation of the lower surface of the suction pad 146b can change to follow the surface of the film 19.

[0061] Fig. Figure 5B is an enlarged view of the suction element 146, etc., when the orientation of the lower surface of the suction pad 146b has changed from a predetermined orientation A1 parallel to the Z-axis direction to an orientation A2 that differs from orientation A1. When the suction holding of the film 19 is released, the external force acting on the suction element 146 disappears from the film 19. Due to the restored force of the elastic component 144, the joint 148 and the suction element 146 pivot, and the orientation of the lower surface of the suction pad 146b thus returns to the original predetermined orientation A1 when the film 19 is not suctioned and held (that is, the state of the Fig. 5A). Accordingly, the conveying mechanism 140 of the present embodiment has the advantage that a suction operation for the next film 19 to be suctioned is not hindered.

[0062] Furthermore, the film stretching device 2 is equipped with a control unit (not illustrated) that controls the operation of the respective rotary drive sources, suction sources, valve 154, etc. For example, the control unit is a computer that includes a processing unit, such as a processor like a Central Processing Unit (CPU), a main memory device, such as Dynamic Random Access Memory (DRAM), Static Random Access Memory (SRAM), or Read Only Memory (ROM), and an auxiliary memory device, such as Flash Memory, a Hard Disk Drive, or a Solid State Drive. Software, which includes a predefined program, is stored in the auxiliary memory device. Functions of the control unit are implemented by the operation of the processing unit, etc., in accordance with this software.Next, the operation of the film stretching device 2 will be carried out mainly using the . Fig. 6 to 12 described. Fig. Figure 12 is a flowchart illustrating a processing procedure for film 19 using the film stretching device 2.

[0063] In the transfer unit 40, the workpiece unit 21 is suctioned and held in the state in which the four corners of the film 19 are clamped by the clamping mechanisms 52. First, this transfer unit 40 is moved to the lower side of the stretching unit 72. Then, the clamping table 50 in the transfer unit 40 is raised by the air cylinder 48, and the workpiece unit 21 is moved to essentially the same height as that of the first clamping unit 74A to the fourth clamping unit 74D.

[0064] After the four sides of the film 19 have been clamped by the first clamping unit 74A to the fourth clamping unit 74D, the suction effect is released by the clamping table 50, and the clamping table 50 is evacuated downwards. Next, the first clamping unit 74A to the fourth clamping unit 74D stretch the film 19 along the XY plane direction. In conjunction with the stretching of the film 19, an external force is applied to the workpiece 11, and the workpiece 11 is divided into several component chips 25 with the modified layers as starting points (film expansion step S10). Fig. Figure 6 is a diagram illustrating the foil expansion step S10.

[0065] As in Fig. As illustrated in Figure 7, next, one surface of the annular frame 23 is suctioned and held by the suction pads 112a of the frame assembly unit 110, and the annular frame 23 is conveyed to position it on the adhesive side of the stretched film 19 (frame assembly step S20). The annular frame 23 is positioned so that it surrounds the workpiece 11 after parting (i.e., all the component chips 25). Then, after the two roller parts 56 of the transfer unit 40 have been lifted, the rotary drive source 44 is actuated, and the support post 54 is rotated in a predetermined direction. This securely adheres the annular frame 23 to the film 19.

[0066] The two roller parts 56 are then lowered. Instead, the sliding unit 58 is raised, and the cutting blade 58a is made to cut into an area in the film 19 located outside the through-opening 23a and directly below the frame 23. The support post 54 is then rotated in a predetermined direction. This cuts the film 19 into a circular shape along the location of the upper end of the cutting blade 58a (cutting step S30). Fig. Figure 7 is a diagram illustrating the frame assembly step S20 and the cutting step S30. Fig. In version 7, the transport mechanism 140 was omitted.

[0067] The cutting step S30 forms a component chip unit 27 in which the circular foil 19, the ring-shaped frame 23 and the several component chips 25 are integrated (see Fig. 8). Furthermore, a hole 19b, which accompanies the cutting step S30, is formed in the foil 19 (see Fig. 8) Next, the Z-axis direction movement mechanism 116 is actuated and the frame assembly unit 110 is moved upwards. This separates the component chip unit 27 from the film 19 (component chip unit separation step S40).

[0068] Fig. Figure 8 is a diagram illustrating the component chip unit separation step S40. Fig. In step 8, the transport mechanism 140 was also omitted. After the component chip unit separation step S40, the support column 114a is lowered by the Z-axis direction movement mechanism 116. Additionally, the piston 138b is moved downwards to lower the transport mechanism 140 in the stretched state towards the film 19. Then, an outer circumferential part 19c of the film 19, which is located outside the end parts in the Y-axis direction at the first clamping unit 74A and the second clamping unit 74B, is drawn in and held by the suction elements 146 of the transport mechanism 140 (film suction step S50). Fig. Figure 9 is a diagram illustrating the S50 foil suction step. Fig. In section 9, the frame arrangement unit 110 was omitted.

[0069] After the film 19 has been held by the suction elements 146, the upper and lower clamp parts of each clamping unit are separated in the Z-axis direction to release the clamping of the film 19 by each clamping unit. Then, the first clamping unit 74A is moved to one side in the X-axis direction, and the second clamping unit 74B is moved to the other side in the X-axis direction. Furthermore, the third clamping unit 74C is moved to the opposite side in the Y-axis direction, and the fourth clamping unit 74D is moved to one side in the Y-axis direction. In this way, each clamping unit is removed from the film 19 (clamping unit evacuation step S60).

[0070] Fig. Figure 10 is a diagram illustrating the clamp unit evacuation step (S60). Also in Fig. In section 10, the frame arrangement unit 110 was omitted. Furthermore, in the Fig. Steps 6 to 10 omit the third clamping unit 74C and the fourth clamping unit 74D. During the clamping unit evacuation step S60, the stretched film 19 contracts due to the release of the external force. Therefore, deformation or similar occurs in the film 19. However, as described above, the suction element 146 and the joint 148 can pivot integrally, and consequently, the orientation of the lower surfaces of the suction pads 146b can change to follow the surface of the film 19.

[0071] Following the clamp unit evacuation step S60, the conveying mechanism 140 is moved upwards to a film storage area (not illustrated) located on one side of the stretching unit 72 in the Y-axis direction. A disposal container 158 is provided in the film storage area, in which the used films 19 are deposited. The disposal container 158 has a rectangular opening in its upper part, which, when viewed from above, is larger than the size of the support 142 in the XY plane direction. The disposal container 158 is a rectangular cuboid box body constructed from four side plates and a bottom plate.

[0072] The conveying mechanism 140 releases the suction holding of the used film 19 above the disposal container 158 in order to let the film 19 fall downwards (film disposal step S70). This transports the used film 19 to the disposal container 158. Fig. Figure 11 is a diagram illustrating the film disposal step S70. Fig. In Figure 11, the frame assembly unit 110 was also omitted. After the film disposal step S70, in the present embodiment, the joints 148 are pivoted by the restoring force of the elastic components 144, and the orientation of the lower surfaces of the suction pads 146b is restored to their original predetermined orientation. This has the advantage that the process in which the film 19 is subsequently suctioned in by means of the conveying mechanism 140 is not obstructed. After S70, the frame assembly unit 110 moves to the upper side of a conveying table, which is not illustrated in the diagram, and transfers the component chip unit 27 to the conveying table. The component chip unit 27 is then conveyed by the conveying table in the film stretching device 2 to a predetermined area.

[0073] Next, a modified example of film disposal step S70 is described. Fig. Figure 13 is a diagram illustrating the film disposal step S70 in accordance with the modified example. Fig. In Figure 13, the frame assembly unit 110 was omitted. In this modified example, the conveying mechanism 140 transports the carrier 142 into the interior of the disposal container 158 in the state in which the film 19 is drawn in and held by the suction elements 146. The carrier 142 is then lowered until the other surface of the film 19 (surface of the base layer, as arranged on the side opposite the adhesive layer) comes into contact with the upper surface of the base plate of the disposal container 158. The suction effect on the film 19 is then released.

[0074] Next, the carrier 142 is lifted. In this way, the first piece of film 19 is placed on the base plate of the disposal container 158. After a second cycle from S10 to S60, the conveying mechanism 140, during a second cycle of the film disposal step S70, transports the carrier 142 into the interior of the disposal container 158 in a similar manner, with the film 19 being suctioned and held in place. As a result, the second piece of film 19 is pressed against and adheres to one surface 19a of the first piece of film 19, which was previously picked up in the disposal container 158. The suction on the film 19 is then released. In this way, the second and subsequent pieces of film 19 are positioned in essentially the same position in the XY plane direction on the film 19 that was previously picked up in the disposal container 158.Therefore, the sheets 19 used are stacked in a relatively orderly fashion along the Z-axis. Consequently, the height of the stacked body formed from the multiple sheets 19 used can be reduced compared to a case where multiple sheets 19 are stacked randomly. Accordingly, transporting, placing, etc., this stacked body is simplified.

[0075] Next, a second embodiment will be described. Fig. Figure 14 is an enlarged partial view of the conveying mechanism 140 according to the second embodiment. In the conveying mechanism 140 of the second embodiment, the upper parts of the two plate-shaped columns 142D are attached to each of the lower parts of both end parts of the straight parts 142a of the support 142. The longitudinal parts of the respective columns 142d are arranged substantially parallel to the Z-axis direction. A horizontal plate 142e with a right-angled triangular shape (viewed from above) is attached to the lower part of each column 142d. The cylindrical part 142c described above is attached to a right-angled part and to each of the two acute-angled parts of the horizontal plate 142e.

[0076] A hose, pipe, or similar component establishing the flow path 150 is connected to the upper part of each cylindrical part 142c. Fig. In the first embodiment, the hose or similar component was omitted. The upper end part 144a of the elastic component 144 described above is attached to the lower part of the cylindrical part 142c, which is located at the right-angled part of the horizontal plate 142e. Furthermore, the upper part of the outer circumferential side surface of the suction part 146 is attached to the lower end part 144b of the elastic component 144. The middle part of the upper part of the suction part 146 is attached to the lower part of the joint 148, similar to the first embodiment.

[0077] A bellows-shaped suction pad 160 is attached to the cylindrical part 142c, which is arranged at each of the two acute-angled parts of the horizontal plate 142e. The surfaces of the bellows-shaped suction pads 160, like the suction pad 146 of the suction part 146, are also covered by a release agent. The bellows-shaped suction pads 160 and the suction pad 146b of the suction part 146 draw suction onto and hold one surface 19a of the film 19. Fig. Figure 15 is a diagram illustrating the positional relationship between the suction pad 146b and the bellows-shaped suction pads 160 in each horizontal plate 142e.

[0078] In the second embodiment, the film 19 is suctioned and held by the suction pads 146b and the bellows-shaped suction pads 160. Therefore, the film 19 can be suctioned and held even if it deforms or similarly detaches from one of the suction pads 146b or the bellows-shaped suction pads 160. This means that the film 19 can be suctioned and held more securely compared to the first embodiment.

Claims

[1] A conveying mechanism (140) for sucking, holding and conveying a target object, the conveying mechanism comprising: a plurality of suction parts (146), each of the plurality of suction parts (146) having a suction pad (146b) and sucking and holding the target object through the suction pad; a support (142) connected to each of the plurality of suction members (146) by a joint (148) that is pivotable; a plurality of elastic components (144), wherein one end portion (144b) of each of the plurality of elastic components (144) is attached to one of the plurality of suction portions (146) and the other end portion (144a) of each of the plurality of elastic components (144) is attached to the carrier (142); several bellows-shaped suction pads (160); a negative pressure control unit (156) having a valve (154) arranged in a predetermined flow path (150) connected to each of the plurality of suction parts (146) and controlling generation of a negative pressure at each of the plurality of suction parts (146); and a movement unit (136) which moves the carrier (142), wherein the carrier (142) has a pair of straight parts (142a) each having two end parts, and a suction part (146) with a suction pad (146b) and two bellows-shaped suction pads (160) arranged in a triangular shape are fastened to the end parts of the pair of straight parts (142a), and wherein the plurality of elastic components (144) allow pivoting of the plurality of suction parts (146) in accordance with an inclination or deformation of the target object being sucked and held, and, when the suction holding of the target object is released, the elastic components (144) return an orientation of the suction pads (146b) to a predetermined orientation when the suction pads are not sucking and holding the target object. [2] The conveying mechanism (140) of claim 1, wherein each of the elastic components (144) is a rubber sheet material, a resin sheet material, an elastomer sheet material, or a spring. [3] Film stretching device (2) for stretching a film (19) adhering to a plate-shaped object, the film stretching device comprising: a stretching unit (72) which stretches the film (19) adhering to the plate-shaped object and which has a rectangular shape in a predetermined planar direction; a frame arranging unit (110) having a first suction pad (112a) for sucking an annular frame (23) in which an opening (23a) is formed with a diameter larger than the size of a surface of the plate-shaped object, and arranging the annular frame (23) on a surface side of the film (19) stretched by the stretching unit (72) in such a manner that the annular frame (23) surrounds the plate-shaped object; a cutting unit (58) having a cutting blade (58a) and intended to cut, by means of the cutting blade (58a), outside the opening (23a) of the annular frame (23) into the film (19) to which the plate-shaped object and the annular frame (23) adhere; and a conveying mechanism (140) which sucks and holds an outer peripheral part of a hole cut in the film by the cutting blade (58a) and conveys the film (19) to a disposal container (158), the conveying mechanism (140) comprising: a suction part (146) having a second suction pad (146b) and sucking and holding the film (19) through the second suction pad, a support (142) connected to the suction part (146) by a pivotable joint (148), an elastic component (144) having one end portion (144b) attached to the suction portion (146) and the other end portion (144a) attached to the support (142), a negative pressure control unit (156) having a valve (154) arranged in a predetermined flow path (150) connected to the suction part (146) and controlling the generation of a negative pressure at the suction part (146), and a movement unit (136) which moves the carrier (142), and wherein the elastic component (144) allows pivoting of the suction part (146) according to an inclination or deformation of the film (19) which is sucked and held, and, when the suction holding of the film (19) is released, the elastic component (144) returns an orientation of the second suction pad (146b) to a predetermined orientation when the second suction pad does not suck and hold the film (19). [4] The film stretching device (2) according to claim 3, wherein the conveying mechanism (140) causes the film (19) sucked and held by the suction part (146) to be pressed and adhered as a subsequent film against a surface of a film (19) previously received in the disposal container (158), and then releases a suction action to the subsequent film (19) to stack the subsequent film (19) pressed and adhered to the film (19) previously received in the disposal container (158).

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