Sensor assembly that can simulate photomasks

Abstract

A sensor assembly capable of simulating photomasks, comprising: a main body (10) which has an internal receiving chamber (13) and serves to simulate either the transport process or the manufacturing process of a photomask of a given size; a sensor module (20) which is housed in the receiving space (13) of the main body (10) and serves to capture at least one piece of environmental information and to calculate at least one piece of measurement information when simulating the main body (10); a power supply (30) which is housed in the receiving space (13) of the main body (10) and is electrically connected to the sensor module (20) and serves to provide the current required for the operation of the sensor module (20); a wireless charging receiver end (40) which is housed in the receiving chamber (13) of the main body (10) and is electrically connected to the power supply (30) and serves to charge the power supply (30) by being driven by an external force; and a charging box (50) which has inside a charging compartment (51) for receiving the main body (10) and is equipped with a wireless charging base (53) corresponding to the wireless charging receiving end (40) and is operable to drive the wireless charging receiving end (40) in order to charge the power supply (30).

Description

Field of invention

[0001] The present invention relates to the technical field of semiconductor manufacturing processes and in particular to a sensor assembly that can simulate photomasks, either by simulating the transport process or the manufacturing process of a photomask of a given size offline and by measuring various environmental information. State of the art

[0002] Document US 2014 / 0 086 475 A1 describes a method and system for performing a model-based registration and measurement of the critical dimension.

[0003] Document US 9 875 534 B2 also concerns the field of metrology, and specifically reticle metrology, disclosing a method for measuring the dimensions of features on a reticle.

[0004] Document US 2020 / 0143010A1 discloses a method for manufacturing a semiconductor device, which essentially comprises the following steps: designing a layout, manufacturing a photomask based on the layout, correcting the optical transmission of the photomask, and performing a photolithography process using the photomask with the corrected optical transmission to create a pattern on a substrate.

[0005] In the current semiconductor manufacturing process, lithography is one of the essential key steps. In lithography, light of a specific wavelength is projected, exposing the photoresist on the wafer after it has passed through a photomask. This causes the photoresist to undergo chemical changes, transferring the circuit pattern of the photomask onto the wafer.

[0006] The photomask plays a crucial role in the lithography process. It is a thin layer of quartz glass coated with a circuit pattern of a specific metal layer (e.g., chromium metal) arranged in a particular pattern. However, the photomask is similar to the wafer; both are precise and fragile substrates. The problem they can face is that the photomask material and its structural integrity are inherently fragile. Therefore, vibrations or tilting caused by the photomask during transport or the lithography process can compromise its structure. Furthermore, the photomask itself and its metal layer can be affected by ambient temperature and humidity, becoming deformed or brittle. All of these issues impair the photomask's performance.As soon as a problem occurs with the photomask, the wafers produced with the photomask can also be affected and no longer usable, leading to enormous losses for semiconductor manufacturers.

[0007] Taiwanese patent I463251 discloses a photomask structure for capturing environmental information. Within the photomask structure, several areas for capturing environmental information and a transmission module are arranged to capture and record the environment while the photomask is in operation. The user can then employ various effective solutions based on the environmental information. However, the problem with this photomask structure is that the environmental sensors are simply added to the standard photomask structure. Therefore, the environmental sensor only captures environmental information while the photomask structure is being transported or operated. If environmental problems are detected during the manufacturing process, the photomask structure can be affected, potentially leading to wafers that are damaged during production and therefore cannot be shipped.Environmental factors can only be improved after the fact. Essentially, it remains impossible to completely prevent the problem of environmental factors affecting photomasks. Therefore, how environmental information regarding the transport and operating environments of the photomask can be measured in advance to prevent its degradation during transport or manufacturing is of great importance to companies and researchers in the semiconductor industry and represents a pressing problem that needs to be solved. Object of the invention

[0008] The main object of the present invention is to provide a sensor assembly capable of simulating photomasks, which can simulate either the transport process or the manufacturing process of a photomask offline and acquire related environmental information in order to determine whether an anomaly exists in the working environment or the working machine.

[0009] A further object of the present invention is to provide a sensor assembly with which photomasks can be simulated, with which the battery life of the sensor module can be improved by wireless charging technology.

[0010] To solve the aforementioned problems, the present invention provides a sensor assembly for simulating photomasks, comprising: a main body with an internal receiving chamber for simulating either the transport or manufacturing process of a photomask of a predetermined size; a sensor module housed in the receiving chamber of the main body for acquiring at least one piece of environmental information and calculating at least one piece of measurement information when simulating the main body; a power supply unit housed in the receiving chamber of the main body, electrically connected to the sensor module, and providing the current required for operating the sensor module; and a wireless charging receiver unit housed in the receiving chamber of the main body, electrically connected to the power supply unit, and used to charge the power supply unit by being driven by an external force.and a charging box which has an internal charging compartment for receiving the main body and is equipped with a wireless charging base corresponding to the wireless charging receiver end and is operable to drive the wireless charging receiver end in order to charge the power supply.

[0011] In one embodiment, a sensor assembly for simulating photomasks is further provided, comprising: a main body which has an internal receiving chamber and serves to simulate either the transport process or the manufacturing process of a photomask of a predetermined size; a sensor module which is housed in the receiving chamber of the main body and serves to acquire at least one piece of environmental information and to calculate at least one piece of measurement information when simulating the main body; a power supply which is housed in the receiving chamber of the main body and is electrically connected to the sensor module and serves to provide the current required for the operation of the sensor module; and a wireless charging receiver which is housed in the receiving chamber of the main body and is electrically connected to the power supply and serves to charge the power supply by being driven by an external force.

[0012] In one embodiment, the main body has a base and a top cover, wherein a recess is provided in the middle of the base, the top cover is arranged on the top of the recess, and the top cover and the recess together enclose the receiving space.

[0013] In one embodiment, the size of the main body is the same as the size of the photomask.

[0014] In one embodiment, a filler material with a predetermined weight is also arranged inside the main body, filling the receiving space.

[0015] In one embodiment, the sensor module comprises a printed circuit board, a sensor unit and a computing unit, wherein the sensor unit and the computing unit are arranged on the printed circuit board, the sensor unit serves to detect the main body and environmental information and to generate a detection signal, and the computing unit serves to receive the detection signal from the sensor unit and to calculate the measurement information according to the detection signal.

[0016] In one embodiment, the sensor module further comprises a storage unit and a transmission unit, wherein the storage unit is arranged on the circuit board and electrically connected to the computing unit and serves to store the measurement information supplied by the computing unit, and the transmission unit is arranged on the circuit board and electrically connected to the storage unit and serves to transmit the measurement information stored in the storage unit to an external remote device.

[0017] In one embodiment, the sensor unit comprises a vibration sensor which serves to detect the degree of vibration of the main body during the simulation and to generate a vibration signal, wherein the computing unit calculates a vibration value after receiving the vibration signal.

[0018] In one embodiment, the sensor unit comprises a balance sensor which serves to detect the degree of inclination of the main body during the simulation and to generate a balance signal, wherein the computing unit calculates an angle change value after receiving the balance signal.

[0019] In one embodiment, the sensor unit comprises a temperature sensor which serves to detect the ambient temperature of the main body during the simulation and to generate a temperature signal, wherein the computing unit calculates a temperature value after receiving the temperature signal.

[0020] In one embodiment, the sensor unit comprises a humidity sensor which serves to detect the ambient humidity of the main body during the simulation and to generate a humidity signal, wherein the computing unit calculates a humidity value after receiving the humidity signal. Brief description of the drawings Fig. Figure 1 shows an exploded view according to a first preferred embodiment of the present invention; Fig. 2 shows a partial exploded view according to a second preferred embodiment of the present invention; Fig. Figure 3 shows a sectional view of the main body according to the first preferred embodiment of the present invention; Fig. Figure 4 shows a block diagram according to the first preferred embodiment of the present invention. Detailed description of the exemplary implementations

[0021] It will be directed to the Fig. 1, Fig. 2, Fig. 3 to Fig.4. Reference is made to the sensor assembly with which photomasks can be simulated, according to a preferred embodiment of the present invention, serves to simulate and detect either the transport process or the manufacturing process of a photomask of a predetermined size (not shown). The sensor assembly with which photomasks can be simulated primarily comprises a main body 10, a sensor module 20, a power supply 30, a wireless charging receiver 40, and a charging box 50.

[0022] Here, the size of the main body 10 corresponds to the size of the photomask of a predetermined size. For example, in the present embodiment, the photomask of a predetermined size is a flat rectangular structure with a length, width, and height of 6 inches, 6 inches, and 0.25 inches, and the main body 10 is also a flat rectangular structure with a length, width, and height of 6 inches, 6 inches, and 0.25 inches. In another embodiment, the appearance of the main body may be different if the photomask of a predetermined size is designed differently. Specifically, the main body 10 consists of a base 11 and a top cover 12. The base 11 and the top cover 12 are each planar components, with the top cover 12 being arranged on the upper surface of the base 11. In the present embodiment, the base 11 and the top cover 12 are made of quartz glass.In another embodiment, the base 11 and the top cover 12 can be made of tempered glass, heat-resistant glass, soda-lime glass, or another equivalent material suitable for photomasks. The main body 10 includes a receiving chamber 13 for accommodating the sensor module 20, the power supply 30, and the wireless charging receiver 40. Specifically, the base 11 has a recess 110 in its center, and the top cover 12 is positioned on top of the recess 110. When the base 11 is combined with the top cover 12, the recess 110 and the top cover 12 together enclose the receiving chamber 13.In the present embodiment, the base 11 is further provided with a second recess 111 surrounding the recess 110 and connected to the upper surface of the recess 110, the bottom surface height of the second recess 111 being greater than the bottom surface height of the recess 110. The shape of the second recess 111 corresponds to the upper cover 12, allowing the upper cover 12 to be accommodated within the second recess 111. In this case, the height of the upper surface of the upper cover 12 is the same as that of the upper surface of the base 11. In another embodiment, the upper cover can directly cover the upper surface of the base, in which case the height of the upper surface of the upper cover is greater than that of the upper surface of the base 11.Furthermore, the main body 10 is also provided with a filler 14 of a predetermined weight in the receiving space 13, wherein the filler fills the receiving space 13 and fixes the positions of the sensor module 20, the power supply 30, and the wireless charging receiver 40 within the receiving space 13. The user can adjust the weight and center of gravity of the main body 10 by matching the material of the filler 14 and the predetermined weight so that the weight and center of gravity of the main body 10 are close to the weight and center of gravity of the photomask of a predetermined size, thus making the simulation results more closely resemble the actual environment. In the present embodiment, the filler 14 is epoxy resin. In another embodiment, the filler 14 can be gel, air, or vacuum.

[0023] The sensor module 20 comprises a printed circuit board 21, a sensor unit 22, a processing unit 23, a storage unit 24, a transmission unit 25, and a parameter adjustment unit 26, wherein the printed circuit board 21 is arranged in the receiving space 13 of the main body 10 and rests against the bottom surface of the recess 110 of the base 11. In the present embodiment, the height of the printed circuit board 21 is less than the depth of the recess 110. The sensor unit 22, the processing unit 23, the storage unit 24, the transmission unit 25, and the parameter adjustment unit 26 are electrically connected to the printed circuit board 21.

[0024] The sensor unit 22 serves to acquire at least one piece of environmental information about the main body 10 of the photomask of a predetermined size during the real-time simulation of the transport and manufacturing process and to generate at least one acquisition signal at each predetermined interval. In the present embodiment, the sensor unit 22 comprises, but is not limited to, at least one of the following sensors: a vibration sensor 220, a balance sensor 221, a temperature sensor 222, and a humidity sensor 223. The environmental information includes, but is not limited to, at least one of the following: the degree of vibration of the main body 10, the degree of inclination of the main body 10, the ambient temperature, and the ambient humidity.The detection signal includes, but is not limited to, at least one of the following signals: a vibration signal, a balance signal, a temperature signal, and a humidity signal. The vibration sensor 220 is used to detect the degree of vibration of the main body 10 and to generate the vibration signal and transmit this vibration signal to the processing unit 23. The balance sensor 221 is used to detect the degree of inclination of the main body 10 and to generate the balance signal and transmit this balance signal to the processing unit 23. The temperature sensor 222 is used to detect the ambient temperature around the main body 10 and to generate the temperature signal and transmit this temperature signal to the processing unit 23.The humidity sensor 223 is used to detect the ambient humidity around the main body 10 and to generate the humidity signal and to transmit this humidity signal to the computing unit 23.

[0025] The processing unit 23 is electrically connected to the sensor unit 22 and serves to calculate the measurement information according to the detection signal generated by the sensor unit 22. In the present embodiment, the measurement information includes at least one of the following values: a vibration value, an inclination angle value (or an angle change value), a temperature value, and a humidity value. Specifically, in the present embodiment, the processing unit 23 can calculate the vibration value according to the vibration signal generated by the vibration sensor 220, calculate the inclination angle value (or the angle change value) according to the balance signal generated by the balance sensor 221, calculate the temperature value according to the temperature signal generated by the temperature sensor 222, and calculate the humidity value according to the humidity signal generated by the humidity sensor 223.

[0026] The storage unit 24 is electrically connected to the processing unit 23 and serves to receive and store the measurement information calculated by the processing unit 23. In the present embodiment, the storage unit 24 can record measurement information for more than 4 hours.

[0027] The transmission unit 25 is electrically connected to the storage unit 24 and serves to transmit the measurement information stored by the storage unit 24 to an external remote device 60 via a wired or wireless transmission method (including, but not limited to, Wi-Fi, Bluetooth, far-infrared, and radio frequency circuits). The remote device 60 includes, but is not limited to, at least one of the following: a personal mobile device (mobile phone, tablet computer), a computer, a physical server, and a cloud server. In another embodiment, the transmission unit 25 can also be directly electrically connected to the sensor unit and / or the processing unit to transmit the acquisition signal generated by the sensor unit and / or the measurement information calculated by the processing unit to the external remote device.

[0028] The parameter adjustment unit 26 is electrically connected to the sensor unit 22 and communicatively connected to the external remote device 60. Its purpose is to enable the user to adjust the related measurement parameters of the sensor unit 22 by operating the remote device 60. These measurement parameters include, but are not limited to, at least one vibration measurement parameter of the vibration sensor 220, at least one balance measurement parameter of the balance sensor 221, at least one temperature measurement parameter of the temperature sensor 222, and at least one humidity measurement parameter of the humidity sensor 223.

[0029] In the present invention, the sensor module can acquire 20 environmental information, which is not limited to the vibration, balance, temperature, and humidity sensing shown in the present embodiment. For example, the user can attach a pressure sensor, a light sensor, or other sensors that detect factors influencing the use of the photomask.

[0030] The power supply 30 is arranged in the receiving space 13 of the main body 10 and is located on the circuit board 21. In the present embodiment, the height of the power supply 30 is no greater than the depth of the recess 110. The power supply 30 is electrically connected to the sensor module 20 and serves to provide the current required for the operation of the sensor module 20. Specifically, the power supply 30 is a rechargeable battery, such as a lithium battery, a button battery, or other thin batteries, which can be arranged in the recess 110 of the base 11. In the present embodiment, the sensor module 20 can be operated continuously for more than 4 hours by the power supply 30 when the power supply 30 is fully charged.

[0031] The wireless charging receiver end 40 is arranged in the receiving space 13 of the main body 10 and is located on the circuit board 21. In the present embodiment, the height of the wireless charging receiver end 40 is no greater than the depth of the recess 110. Specifically, the wireless charging receiver end 40 is a receiving coil and is electrically connected to the power supply 30. The receiving coil can be driven by external electromagnetic induction to generate current for charging the power supply 30.

[0032] The charging box 50 is an openable and closable box with an internal charging compartment 51, allowing the main body 10 to be housed and stored within this compartment. The charging box 50 is equipped with several positioning elements 52 against which the main body 10 can rest, preventing it from shifting within the box. A wireless charging base 53, corresponding to the wireless charging receiver end 40, is located on the base of the charging box 50. One end of the wireless charging base is electrically connected to a switch (not shown). When the main body 10 is positioned in the charging compartment 51 of the charging box 50, actuating the wireless charging base 53 generates a change in the magnetic field, thereby driving the wireless charging receiver end 40 by electromagnetic induction to generate current for charging the power supply 30.In this way, the main body 10 can maintain a certain charge level when stored in the charging box 50, so that the main body 10 does not stop capturing due to insufficient power during capture, in order to improve the endurance of the power supply 30.

[0033] According to the above structural configuration, the operation and use of the sensor assembly according to the invention, with which photomasks can be simulated, are as follows: If the user suspects that something unusual is occurring in the work environment and / or the machine before or after performing online work on a photomask of a predetermined size in that environment or machine, the user can use the sensor assembly according to the invention, which can simulate photomasks, to simulate either the transport process or the manufacturing process of the photomask of a predetermined size offline. Here, "online" means that the photomask of a predetermined size is in the actual transport and manufacturing process, and "offline" means that the photomask of a predetermined size is not being transported in the work environment or processed on the machine. Furthermore, the transport process mentioned here includes transport before entering and after exiting the machine.The manufacturing process encompasses the process of moving and inserting the photomask into the machine. In other words, the transport and manufacturing processes should include all work processes of the photomask of a specified size. When the user performs a simulation using the sensor assembly that can simulate photomasks, the main body 10 is transported in the work environment along with a transport device (e.g., a robot arm, a lifting rail, a transport vehicle, or by manual handling) and moved within the machine by a transfer device (e.g., a robot arm, an automated robot, or a lifting rail). At this point, the sensor module 20 and the sensor unit 22 synchronously capture the main body 10 and its surroundings in real time once per interval.For example, in the present embodiment, the vibration sensor 220 can detect the degree of vibration of the main body 10 during the transport and manufacturing process, the balance sensor 221 can detect the degree of inclination of the main body 10 during the transport and manufacturing process, the temperature sensor 222 can detect the ambient temperature of the main body 10 during the transport and manufacturing process, and the humidity sensor 223 can detect the ambient humidity of the main body 10 during the transport and manufacturing process, wherein the measurement information obtained by the computing unit 23 from the detection signal received by the sensor unit 22 is stored by the storage unit 24 or transmitted by the transmission unit 25 during or after the simulation.Since the shape of the main body 10 is the same as that of the photomask of a specified size, and since the transport path and movement path of the main body 10 are the same as those of the photomask of a specified size during online operation, the environmental information obtained by the main body 10 during offline simulation can essentially be considered the same environmental information obtained by the photomask of a specified size during online operation. In this way, the user can view and analyze the measurement information by operating the remote device 60 and determine offline in advance whether the photomask of a specified size is subject to vibrations or tilting in the working environment and on the machine, and whether the temperature and humidity of the working environment and the machine cause the photomask to deform, expand due to heat, shrink, or become brittle.If, after analyzing the measurement data, the user determines that the environmental information is abnormal, they can perform further inspection and maintenance of the work environment and the machine. This ensures that the photomask of a predetermined size is not affected by environmental factors during subsequent online operations.

[0034] In summary, the following can be stated: Because the size and weight of the main body 10 of the sensor assembly according to the invention, which can be used to simulate photomasks, correspond to the size and weight of the photomask of a predetermined size, the transport and manufacturing process of the photomask of a predetermined size can be simulated offline. Since the related environmental information is measured in real time by the sensor module 20 and the measurement data is obtained, the user can use this information to determine offline in advance whether there are any problems with the overall working environment of the photomask and to eliminate these problems before the photomask is used for online work. In this way, the present invention effectively solves the problem of the photomask being affected by environmental factors during transport or manufacturing.Furthermore, the present invention provides a technique by which wireless charging of the power supply 30 is supported, which improves the endurance of the sensor module 20. Reference symbol list 10 main bodies 11 Basic 110 Exclusion 12 top cover 13 Recording Room 14 Filler 20 sensor modules 21 circuit board 22 Sensor unit 220 vibration sensor 221 Balance sensor 222 Temperature sensor 223 Humidity sensor 23 Calculation unit 24 storage units 25 transmission unit 26 Parameter adjustment unit 30 Power supply 40 wireless charging receiver end 50 charging boxes 51 cargo space 52 Positioning piece 53 wireless charging base 60 Remote Device

Claims

[1] A sensor assembly capable of simulating photomasks, comprising: a main body (10) which has an internal receiving chamber (13) and serves to simulate either the transport process or the manufacturing process of a photomask of a given size; a sensor module (20) which is housed in the receiving space (13) of the main body (10) and serves to capture at least one piece of environmental information and to calculate at least one piece of measurement information when simulating the main body (10); a power supply (30) which is housed in the receiving space (13) of the main body (10) and is electrically connected to the sensor module (20) and serves to provide the current required for the operation of the sensor module (20); a wireless charging receiver end (40) which is housed in the receiving chamber (13) of the main body (10) and is electrically connected to the power supply (30) and serves to charge the power supply (30) by being driven by an external force; and a charging box (50) which has inside a charging compartment (51) for receiving the main body (10) and is equipped with a wireless charging base (53) corresponding to the wireless charging receiving end (40) and is operable to drive the wireless charging receiving end (40) in order to charge the power supply (30). [2] Sensor assembly for simulating photomasks according to claim 1, wherein the main body (10) has a base (11) and an upper cover (12), wherein a recess (110) is provided in the center of the base (11), the upper cover (12) is arranged on the top of the recess (110), and the upper cover (12) and the recess (110) together enclose the receiving space (13). [3] Sensor assembly with which photomasks can be simulated according to claim 1, wherein the size of the main body (10) is the same as that of the photomask of specified size. [4] Sensor assembly with which photomasks can be simulated according to claim 1, in which a filler material (14) with a predetermined weight is further arranged inside the main body (10) filling the receiving space (13). [5] Sensor assembly for simulating photomasks according to claim 1, wherein the sensor module (20) comprises a printed circuit board (21), a sensor unit (22) and a computing unit (23), wherein the sensor unit (22) and the computing unit (23) are arranged on the printed circuit board (21), the sensor unit (22) serves to detect the main body (10) and the environmental information and to generate a detection signal, and the computing unit (23) serves to receive the detection signal from the sensor unit (22) and to calculate the measurement information according to the detection signal. [6] Sensor assembly for simulating photomasks according to claim 5, wherein the sensor module (20) further comprises a storage unit (24) and a transmission unit (25), the storage unit (24) being arranged on the circuit board (21) and electrically connected to the computing unit (23) and serving to store the measurement information supplied by the computing unit (23), and the transmission unit (25) being arranged on the circuit board (21) and electrically connected to the storage unit (24) and serving to transmit the measurement information stored in the storage unit (24) to an external remote device (60). [7] Sensor assembly for simulating photomasks according to claim 5, wherein the sensor unit (22) comprises a vibration sensor (220) for detecting the degree of vibration of the main body (10) during the simulation and for generating a vibration signal, wherein the computing unit (23) calculates a vibration value after receiving the vibration signal. [8] Sensor assembly for simulating photomasks according to claim 5, wherein the sensor unit (22) comprises a balance sensor (221) for detecting the degree of inclination of the main body (10) during the simulation and for generating a balance signal, wherein the computing unit (23) calculates an angle change value after receiving the balance signal. [9] Sensor assembly for simulating photomasks according to claim 5, wherein the sensor unit (22) comprises a temperature sensor (222) for detecting the ambient temperature of the main body (10) during the simulation and for generating a temperature signal, wherein the computing unit (23) calculates a temperature value after receiving the temperature signal. [10] Sensor assembly for simulating photomasks according to claim 5, wherein the sensor unit (22) comprises a humidity sensor (223) for detecting the ambient humidity of the main body (10) during the simulation and for generating a humidity signal, wherein the computing unit (23) calculates a humidity value after receiving the humidity signal. [11] A sensor assembly that can simulate photomasks, comprising: a main body (10) which has an internal receiving chamber (13) and serves to simulate either the transport process or the manufacturing process of a photomask of a given size; a sensor module (20) which is housed in the receiving space (13) of the main body (10) and serves to capture at least one piece of environmental information and to calculate at least one piece of measurement information when simulating the main body (10); a power supply (30) which is housed in the receiving chamber (13) of the main body (10) and is electrically connected to the sensor module (20) and serves to provide the current required for the operation of the sensor module (20); and a wireless charging receiving end (40) which is housed in the receiving space (13) of the main body (10) and is electrically connected to the power supply (30) and serves to charge the power supply (30) by being driven by an external force. [12] Sensor assembly for simulating photomasks according to claim 11, wherein the main body (10) has a base (11) and an upper cover (12), wherein a recess (110) is provided in the center of the base (11), the upper cover (12) is arranged on the top of the recess (110), and the upper cover (12) and the recess (110) together enclose the receiving space (13). [13] Sensor assembly with which photomasks can be simulated according to claim 11, wherein the size of the main body (10) is the same as the size of the photomask. [14] Sensor assembly with which photomasks can be simulated according to claim 11, in which a filler material (14) with a predetermined weight is further arranged inside the main body (10) filling the receiving space (13). [15] Sensor assembly for simulating photomasks according to claim 11, wherein the sensor module (20) comprises a printed circuit board (21), a sensor unit (22) and a computing unit (23), wherein the sensor unit (22) and the computing unit (23) are arranged on the printed circuit board (21), the sensor unit (22) serves to detect the main body (10) and the environmental information and to generate a detection signal, and the computing unit (23) serves to receive the detection signal from the sensor unit (22) and to calculate the measurement information according to the detection signal. [16] Sensor assembly for simulating photomasks according to claim 15, wherein the sensor module (20) further comprises a storage unit (24) and a transmission unit (25), the storage unit (24) being arranged on the circuit board (21) and electrically connected to the computing unit (23) and serving to store the measurement information supplied by the computing unit (23), and the transmission unit (25) being arranged on the circuit board (21) and electrically connected to the storage unit (24) and serving to transmit the measurement information stored in the storage unit (24) to an external remote device (60). [17] Sensor assembly for simulating photomasks according to claim 15, wherein the sensor unit (22) comprises a vibration sensor (220) for detecting the degree of vibration of the main body (10) during the simulation and for generating a vibration signal, wherein the computing unit (23) calculates a vibration value after receiving the vibration signal. [18] Sensor assembly for simulating photomasks according to claim 15, wherein the sensor unit (22) comprises a balance sensor (221) for detecting the degree of inclination of the main body (10) during the simulation and for generating a balance signal, wherein the computing unit (23) calculates an angle change value after receiving the balance signal. [19] Sensor assembly for simulating photomasks according to claim 15, wherein the sensor unit (22) comprises a temperature sensor (222) for detecting the ambient temperature of the main body (10) during the simulation and for generating a temperature signal, wherein the computing unit (23) calculates a temperature value after receiving the temperature signal. [20] Sensor assembly for simulating photomasks according to claim 15, wherein the sensor unit (22) comprises a humidity sensor (223) for detecting the ambient humidity of the main body (10) during the simulation and for generating a humidity signal, wherein the computing unit (23) calculates a humidity value after receiving the humidity signal.

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