Calibration gauge

Abstract

Calibration gauge 300A, which calibrates a measuring device for measuring a three-dimensional geometry of a measurement target W, comprising: several elements to be measured 331, a frame part 340 to which the several elements to be measured are attached, and a mechanism part 400 that moves the frame part, wherein the mechanism part 400 comprises: a rotation mechanism 405 that rotates the frame part 340 about a first axis; a first pivoting mechanism 410 that pivots the frame part 340 about a second axis orthogonal to the first axis; and a second pivoting mechanism 420 that pivots the frame part 340 about a third axis orthogonal to the first and second axes.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a calibration gauge. BACKGROUND OF THE INVENTION

[0002] A measuring apparatus that includes a plurality of imaging devices and measures a three-dimensional geometry of a measurement target in a non-contact manner based on a result obtained by detecting the measurement target from a plurality of directions is known (see, for example, JP 2019-507885 A).

[0003] In such a measuring device, calibration of the device was performed by detecting the same calibration gauge with the plurality of imaging devices or by detecting a calibration gauge with known dimensions with the plurality of imaging devices. SUMMARY OF THE INVENTION PROBLEMS THAT THE INVENTION INTENDED TO SOLVED

[0004] However, a problem with the conventional calibration gauge was that multiple elements to be measured provided on the calibration gauge cannot be aligned in different directions.

[0005] Furthermore, it is desirable that no complicated operation control is required when operating the multiple elements to be measured.

[0006] The present disclosure focuses on these points and its object is to provide a calibration gauge that does not require complicated operation control and can align multiple elements to be measured in desirable directions. MEANS TO SOLVE THE PROBLEMS

[0007] A calibration gauge according to a first aspect of the present disclosure calibrates a measuring device for measuring a three-dimensional geometry of a measurement target and includes: a plurality of elements to be measured; a frame part to which the plurality of elements to be measured are mounted; and a mechanism part that moves the frame part, the mechanism part including: a rotation mechanism that rotates the frame part about a first axis; a first pivoting mechanism that pivots the frame part about a second axis orthogonal to the first axis; and a second pivoting mechanism that pivots the frame part about a third axis orthogonal to the first axis and the second axis.

[0008] The mechanism part may include a support member that supports the frame part, the first pivoting mechanism may include: a first movable part coupled to the support member; and a first linear actuator that moves the first movable part, and the first pivoting mechanism may be configured to pivot the support member about the second axis by causing the first linear actuator to move the first movable part.

[0009] The second pivot mechanism may include: a second movable part coupled to the support member; and a second linear actuator that moves the second movable part, wherein the second pivot mechanism may be configured to pivot the support member about the third axis by causing the second linear actuator to move the second movable part.

[0010] A connecting part between the first movable part and the support member and a connecting part between the second movable part and the support member may be ball joints, center parts of the plurality of ball joints may be arranged in a plane orthogonal to the first axis, and a pivot center of the support member may be arranged in the plane.

[0011] The first movable part may include a first coupling arm, one end of the first coupling arm is provided with the ball joint and the other end of the first coupling arm may be coupled to the first linear actuator, and the first coupling arm and the first linear actuator may be coupled by a knuckle joint that supports the first coupling arm rotatably about an axis.

[0012] The second movable part may include a second coupling arm, one end of the second coupling arm may be provided with the ball joint and the other end of the second coupling arm may be coupled to the second linear actuator, and the second coupling arm and the second linear actuator may be coupled by a knuckle joint that supports the second coupling arm rotatably about an axis.

[0013] The rotation mechanism may include a drive source that generates a drive force for rotating the frame part, the first linear actuator and the second linear actuator may be arranged at a first position in a direction along the first axis, and the drive source of the rotation mechanism may be arranged at a second position that is closer to the support member than the first position in the direction along the first axis.

[0014] The frame part may have a shape of a sphere or an ellipsoid on the surface of which the plurality of elements to be measured are provided, and at least a part of the mechanism part may be provided so as to be arranged within the sphere or the ellipsoid of the frame part.

[0015] The frame member may be provided such that a center of the sphere or ellipsoid is located at a pivot center that is an intersection point of the second axis and the third axis.

[0016] The mechanism part may have a shape in which, when viewed by projecting the mechanism part and the frame part in a direction of the first axis, the mechanism part is arranged entirely within an outer shape of the frame part.

[0017] The element to be measured may include: a main body part having a predetermined shape; and a label part provided on the main body part or a member attached to the main body part, wherein an identification code for identifying the element to be measured is shown. EFFECT OF THE INVENTION

[0018] According to the present disclosure, it is possible to provide a calibration gauge that does not require complicated operation control and can align a plurality of elements to be measured in desirable directions. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows an embodiment of a measuring system. Fig. 2 shows an example where the calibration gauge is mounted on a measuring device. Fig. 3 shows an embodiment of a control unit. Fig. 4 shows an example of an operating sequence of the measuring device. Fig. 5 shows a first embodiment of the calibration gauge. Fig. 6A and Fig. 6B each show an embodiment of an element to be measured. Fig. 7 shows a second embodiment of the calibration gauge. Fig. 8 is a side view of a calibration gauge according to one aspect of the present disclosure. Fig. 9 is a diagram showing a state in which a frame member is removed from the calibration gauge Fig. 8 away. Fig. 10 shows a perspective view of the calibration gauge in the state where the frame member is removed. Fig. 11 shows a perspective view of the calibration gauge in the state where the frame member is removed when viewed from a different direction. Fig. 12 shows an enlarged view of a structure that supports the frame part so that it can pivot in the mechanism part. Fig. 13 is a diagram illustrating a positional relationship between the frame member and a pivot center. Fig. 14A and Fig. 14B each schematically shows the pivoting of the support member and the frame part supported by the support member.

[0019] Although the present disclosure hereinafter mainly refers to a calibration gauge which is Fig. 8 to Fig. 14A and Fig. 14B, the underlying technology regarding calibration is first described. DETAILED DESCRIPTION OF THE INVENTION<Ausführungsbeispiel eines Messsystems S>

[0020] Fig. 1 shows an embodiment of a measuring system S according to the present invention. The measuring system S includes a measuring device 10 and a calibration gauge 30.

[0021] The measuring device 10 measures a three-dimensional geometry of a measurement target W (which may be referred to as a workpiece W hereinafter) by radiating light from a plurality of directions onto the measurement target W arranged in a three-dimensional space and receiving reflected light. Furthermore, the measuring device 10 radiates light from a plurality of directions onto the calibration gauge 30 arranged in the three-dimensional space and identifies calibration parameters used for calibration of the measuring device 10 itself by receiving reflected light. The measuring device 10 includes a stage 110, a movable part 120, an optical unit 130, and a control unit 140.

[0022] The measurement target W is mounted on the stage 110. When the measuring system S performs calibration on the measuring device 10, the calibration gauge 30 is mounted on the stage 110. The stage 110 is configured to be movable in a plurality of predetermined directions. In the present embodiment, an example is described in which the stage 110 is configured to be movable in a first direction and a second direction different from the first direction. The first direction and the second direction are, for example, orthogonal.

[0023] For example, the stage 110 functions as an XY stage that is movable in an X direction and a Y direction in an XY plane. In this case, a first direction is the X direction or the Y direction, and a second direction is the Y direction or the X direction.

[0024] The stage 110 is configured to be rotatable about axes oriented in a plurality of predetermined directions. In the present embodiment, an example is described in which the stage 110 is configured to be rotatable about axes oriented in a third direction and a fourth direction different from the third direction. The third direction and the fourth direction are orthogonal, for example. Here, the first direction and the third direction may coincide with each other, or the second direction and the fourth direction may coincide with each other.

[0025] For example, the stage 110 has a function of a rotary stage rotatable about an axis oriented in the X direction and a function of a rotary stage rotatable about an axis oriented in the Y direction. In this case, the third direction is the X direction or the Y direction, and the fourth direction is the Y direction or the X direction. The measuring device 10 must be configured so that the calibration gauge 30 can be moved, and a movable arm or the like that can move while fixing the calibration gauge 30 can be provided instead of the stage 110.

[0026] The movable part 120 moves the stage 110. In other words, the movable part 120 moves the measurement target W when the measurement target W is mounted on the stage 110. When the calibration gauge 30 is mounted on the stage 110, the movable part 120 moves the calibration gauge 30. The movable part 120 includes an actuator, such as a motor, and moves the stage 110 in the first direction or the second direction. Furthermore, the movable part 120 rotates the stage 110 about the axis oriented in the third direction. Likewise, the movable part 120 rotates the stage 110 about the axis oriented in the fourth direction.

[0027] The optical unit 130 includes a light source 131 and an imaging part 132. The light source 131 emits light onto the measurement target W. The light source 131 includes at least one of a halogen lamp, an LED, a laser beam, and the like. The light source 131 is a projector that emits light in a predetermined pattern, for example. The light emitted by the light source 131 is reflected by the measurement target W. The imaging part 132 captures the measurement target W when reflected light from the measurement target W is incident on the imaging part 132. The imaging part 132 includes a camera capable of capturing a still image, a video, and the like. The imaging part 132 may include a plurality of cameras.

[0028] A plurality of optical units 130 are provided at different positions of the measuring device 10. In other words, a plurality of light sources 131 irradiate light onto different areas of the measurement target W, and a plurality of imaging parts 132 each capture a plurality of different areas of the measurement target W. In this case, it is desirable that the plurality of optical units 130 be arranged so that the overall configuration of the measurement target W can be acquired by combining a plurality of acquisition results obtained by the plurality of imaging parts 132. In this case, it is desirable that the plurality of optical units 130 be arranged so that the overall configuration of the measurement target W can be acquired by combining a plurality of acquisition results obtained by the plurality of imaging parts 132.An example in which two optical units 130 are arranged is described in the present embodiment for the sake of simplicity, but the present disclosure is not limited thereto. Three or more optical units 130 may be arranged.

[0029] The control unit 140 controls the movable part 120 and the optical units 130. When the measurement target W is mounted on the stage 110, the control unit 140 acquires detection results of the measurement target W captured by the imaging parts 132 of the optical units 130 and measures the three-dimensional geometry of the measurement target W based on the acquired detection results. When the calibration gauge 30 is mounted on the stage 110, the control unit 140 acquires detection results of the calibration gauge 30 captured by the imaging parts 132 of the optical units 130 and identifies the calibration parameters to be used for calibrating the measuring device 10 based on the acquired detection results. The control unit 140 will be described later.

[0030] The calibration gauge 30 includes a plurality of elements 31 to be measured having a predetermined shape and is a gauge for calibrating the measuring device 10. In the present embodiment, an example is described in which the calibration gauge 30 includes the elements 31 to be measured on its upper surface. When the calibration gauge 30 is mounted on the stage 110, it is desirable that the plurality of elements 31 to be measured be provided such that the plurality of elements 31 to be measured are included in the field of view of the imaging part 132 included in an optical unit 130.

[0031] Fig. 2 shows an example in which the calibration gauge 30 is mounted on the measuring device 10 according to the present embodiment. Fig. 2 shows an example in which a first element 31a to be measured is located in a field of view 133a of a first imaging part 132a of a first optical unit 130a and a second element 31b to be measured is located in a field of view 133b of a second imaging part 132b of a second optical unit 130b.

[0032] In the present embodiment, an example is shown in which different elements 31 to be measured are included in the field of view 133a of the first imaging part 132a and the field of view 133b of the second imaging part 132b, but the present embodiment is not limited to this. For example, part or all of the first element 31a to be measured may be located in the field of view 133a of the first imaging part 132a, and part or all of the first element 31a to be measured may be located in the field of view 133b of the second imaging part 132b.

[0033] Each optical unit 130 can capture the element 31 to be measured in its field of view by irradiating the light from the light source 131 onto the calibration gauge 30 and capturing an image with the imaging part 132. Then, the control unit 140 acquires the acquisition results from the imaging parts 132 and measures the three-dimensional geometry of the element 31 to be measured. The element 31 to be measured has a predetermined size and a predetermined shape. The element 31 to be measured can be formed to have predetermined dimensions. The element 31 to be measured can have various shapes, markings, colors, and the like. In the present embodiment, an example will be described in which the element 31 to be measured takes a shape of a sphere, and the control unit 140 measures the center position of the sphere.

[0034] Here, the dimensions and positional relationship of the plurality of elements 31 to be measured provided in the calibration jig 30 may be known in advance. In this case, the control unit 140 may calibrate the measuring device 10 by comparing (i) the known dimensions and positional relationship of the elements 31 to be measured and (ii) a measurement result of the three-dimensional geometry of the element 31 to be measured. For example, the control unit 140 identifies coefficients or the like to be multiplied by the measurement result of the three-dimensional geometry as the calibration parameters so that the measurement result of the three-dimensional geometry of the element 31 to be measured conforms to the dimensions and positional relationship of the elements 31 to be measured.

[0035] However, in the case of the measuring device 10 for measuring a large target, the calibration gauge 30 also becomes large, and it was sometimes difficult to measure precise dimensions. In the case of the measuring device 10 for measuring a complicated target, the shape, arrangement, and the like of the calibration gauge 30 also become complicated, and it was sometimes difficult to measure precise dimensions.

[0036] On the other hand, even if the dimensions of such a calibration gauge 30 can be measured, the dimensions may vary due to environmental changes or the like, or an impact may cause dimensional deviation or the like, and therefore, it has been difficult to easily calibrate the measuring device 10. Therefore, a measuring system S according to the present embodiment makes it possible to calibrate such a measuring device 10 even with a calibration gauge 30 having a plurality of elements 31 to be measured whose dimensions and positional relationships are unknown. The control unit 140 of the measuring device 10 will now be described. <Ausführungsbeispiel der Steuereinheit 140>

[0037] Fig. Figure 3 shows an embodiment of the control unit 140 according to the present embodiment. The control unit 140 is, for example, a computer. The control unit 140 includes a communication section 210, a memory 220, a display section 230, and a control section 240.

[0038] The communication part 210 communicates with the movable part 120 and the optical unit 130. The communication part 210 transmits, for example, a control signal for moving the measurement target W or the calibration gauge 30 to the movable part 120. The communication part 210 can transmit a control signal for controlling the light source 131 and the imaging part 132 to the optical unit 130. The communication part 210 can receive the detection result of the imaging part 132 from the optical unit 130.

[0039] The communication part 210 communicates via a dedicated connection line, a communication network, and the like. The communication part 210 can function as an interface for connecting to the communication network, such as an Internet line, a wireless LAN, or a mobile phone network.

[0040] The memory 220 includes a storage medium such as a ROM (Read Only Memory), a RAM (Random Access Memory), or the like. The memory 220 may include a large-capacity storage device such as a hard disk drive (HDD) and / or a solid-state drive (SSD). For example, when the computer functions as the control unit 140, the memory 220 may store an OS (Operating System) that causes the computer to function and information such as a program. The memory 220 may store various types of information, including data to be referenced at the time of program execution.

[0041] The memory 220 may store intermediate data, calculation results, threshold values, reference values, parameters, and the like generated (or used) in an operating process of the control unit 140. Furthermore, the memory 220 may provide the stored data to a request source in response to a request from any part of the control unit 140.

[0042] The display section 230 displays information about the measurement of the measuring device 10. The display section 230 displays information such as measurement conditions, measurement items, and measurement results. The display section 230 can display a communication status of the control unit 140, an operating system, an execution status of applications, and the like. The display section 230 is a display such as a liquid crystal display or a monitor.

[0043] The control part 240 controls each part of the measuring device 10. For example, the control part 240 transmits and receives various types of information via the communication part 210. The control part 240 is, for example, a CPU (Central Processing Unit). The control part 240 controls the movable part 120 and the imaging parts 132 to measure the three-dimensional geometry of the measurement target W based on the detection results of the plurality of imaging parts 132.

[0044] The control part 240 includes a signal output part 241, a detection part 242, a measurement part 243, a rotation matrix identification part 244, and a translation vector identification part 245. In other words, the CPU functions as the control part 240, which includes the signal output part 241, the detection part 242, the measurement part 243, the rotation matrix identification part 244, and the translation vector identification part 245, by executing the program stored in the memory 220.

[0045] The signal output part 241 outputs a control signal for controlling each part of the measuring device 10 to the communication part 210. For example, the signal output part 241 outputs a control signal for controlling the light source 131 and the imaging part 132 of the optical unit 130. As an example, the signal output part 241 outputs a control signal for causing the light source 131 of one optical unit 130 to emit light in a predetermined pattern and a control signal for causing the imaging part 132 of one optical unit 130 to capture an image. Thus, the communication part 210 transmits the control signals to the one optical unit 130, and the one optical unit 130 captures an image of an object (e.g., the element 31 to be measured) in its field of view.

[0046] The signal output part 241 outputs a control signal for driving the movable part 120. The signal output part 241 can output a control signal for causing the display part 230 to display information or the like. The signal output part 241 can generate a control signal corresponding to an operational purpose or can output a control signal with a predetermined signal pattern. The signal pattern of the control signal can be stored in the memory 220.

[0047] The acquisition part 242 acquires data of the acquired image captured by the imaging part 132 of the optical unit 130 as the acquisition result. The acquisition part 242 can store the acquired acquisition result of the imaging part 132 in the memory 220. The acquisition part 242 can also acquire information about the current position of the stage 110.

[0048] The measuring part 243 measures the three-dimensional geometry of the measurement target W or the calibration gauge 30 based on the detection result of the imaging part 132 detected by the detecting part 242. The measuring part 243 measures, for example, a length of a predetermined portion, dimensions of a predetermined shape, and the like of the measurement target W. Using the detection results of the plurality of imaging parts 132, the measuring part 243 can also measure the length and shape of a predetermined portion of the measurement target W that cannot fit within the field of view of one imaging part 132. Since the process in which the measuring part 243 measures the three-dimensional geometry of the measurement target W from the detection results of the plurality of imaging parts 132 is well known, a detailed description thereof will be omitted here.

[0049] The rotation matrix identification part 244 identifies a rotation matrix used for calibrating the measuring device 10. The translation vector identification part 245 identifies a translation vector used for calibrating the measuring device 10. The operations of the rotation matrix identification part 244 and the translation vector identification part 245 are described below. <Beispiel eines Betriebsablaufs der Messvorrichtung 10>

[0050] Fig. Fig. 4 shows an example of an operation flow of the measuring device 10 according to the present embodiment. The measuring device 10 executes operations from S51 to S66 shown in Fig. 4 to identify the calibration parameters used for calibrating the measuring device 10 itself. Although the measuring device 10 includes the plurality of optical units 130, in this operation flow, an operation example using the first optical unit 130a and the second optical unit 130b will be described in a simplified manner.

[0051] First, the measuring device 10 performs calibration for each optical unit 130 before calibrating the measuring device 10 using the calibration gauge 30. In this case, the measuring device 10 calibrates each optical unit 130 using a reference gauge that is smaller in size than the calibration gauge 30. The size of the reference gauge is, for example, a size that fits within the field of view of the imaging part 132 included in an optical unit 130.

[0052] The reference gauge includes a plurality of reference measuring elements, at least one of which has a known dimension or positional relationship. For example, the reference measuring element has approximately the same shape as the element 31 to be measured. Alternatively, the reference gauge may have a shape with known dimensions. Such a small reference gauge exhibits little change over time and is a commonly used gauge that is easy to handle. Since the calibration for each optical unit 130 using such a reference gauge is well known, the calibration operation is briefly described here.

[0053] First, the stage 110 of the measuring device 10 is mounted with a reference gauge (S51). Multiple reference gauges may be mounted on the stage 110, or one reference gauge may be mounted instead. In a case where multiple reference gauges are mounted on the stage 110, it is desirable to arrange the multiple reference gauges so that they are included in the respective fields of view of the optical units 130. Then, the control part 240 performs calibration for each optical unit 130 (S52).

[0054] For example, the control part 240 acquires the reference gauge with the first imaging part 132a of the first optical unit 130a and calibrates a first coordinate system indicating first coordinate positions in the field of view 133a of the first imaging part 132a based on a detection result of the first imaging part 132a. Then, the control part 240 identifies a first coefficient to be multiplied by the measurement result of the three-dimensional geometry so that the measurement result of the three-dimensional geometry of the reference measuring element of the reference gauge agrees with the known dimensions and positional relationship of the reference measuring element.

[0055] Next, the control part 240 detects the reference gauge with the second imaging part 132b of the second optical unit 130b and calibrates a second coordinate system indicating second coordinate positions in the field of view 133b of the second imaging part 132b based on a detection result of the second imaging part 132b. In a case where a reference gauge is mounted on the stage 110, when the calibration of the first optical unit 130a is completed, the control part 240 causes the stage 110 to be moved such that the reference gauge is included in the field of view of the second optical unit 130b to be calibrated next, and then starts, for example, the calibration of the second optical unit 130b.

[0056] In a manner similar to the calibration of the first optical unit 130a, the control part 240 identifies a second coefficient to be multiplied by the measurement result of the three-dimensional geometry so that the measurement result of the three-dimensional geometry of the reference measuring element, based on the detection result of the second imaging part 132b, matches the known dimensions and positional relationship of the reference measuring element. As described above, the control part 240 calibrates each of the plurality of optical units 130. The control part 240 can store the identified coefficients in the memory 220.

[0057] Next, the calibration gauge 30 is mounted on the stage 110 of the measuring device 10 (S53). Next, the control part 240 detects the calibration gauge 30 located at a first reference position (S54). The first reference position is a predetermined position, such as an initial position of the stage 110. For example, when the calibration gauge 30 is located at the first reference position, it is desirable that a positional relationship between the calibration gauge 30, the plurality of optical units 130, and the first reference position be determined in advance so that a plurality of elements 31 to be measured of the calibration gauge 30 are located in the fields of view 133 of the plurality of imaging parts 132.

[0058] For example, the control part 240 causes the stage 110 to move and then places the calibration jig 30 at the first reference position. After turning on the light sources 131 of the plurality of optical units 130, the control part 240 then picks up the calibration jig 30 using the imaging parts 132. Thereby, the first imaging part 132a picks up the first element to be measured 31a among the plurality of elements to be measured 31 included in the calibration jig 30 at the first reference position, and the second imaging part 132b, which is different from the first imaging part 132a, picks up the second element to be measured 31b, which is different from the first element to be measured 31a.

[0059] Next, the control part 240 causes the calibration gauge 30 to be moved in a predetermined first direction from the first reference position (S55). For example, the control part 240 causes the stage 110 to be moved a predetermined distance in the first direction. It is desirable for the control part 240 to cause the stage 110 to be moved in the first direction within a range in which the plurality of elements 31 to be measured of the calibration gauge 30 are included in the fields of view of the plurality of imaging parts 132.

[0060] Then, the control part 240 captures the calibration gauge 30 using the plurality of optical units 130 (S56). After turning on the light sources 131 of the plurality of optical units 130, the control part 240 captures the calibration gauge 30 using the imaging part 132. At this time, the first imaging part 132a captures the first element to be measured 31a that has been moved in the first direction, and the second imaging part 132b captures the second element to be measured 31b that has been moved in the first direction.

[0061] Next, the control part 240 causes the calibration gauge 30 to be moved from the first reference position in a predetermined second direction, which is different from the first direction (S57). After moving the stage 110 back to the first reference position, for example, the control part 240 causes the stage 110 to be moved a predetermined distance in the second direction. Alternatively, after causing the stage 110 to be moved the predetermined distance in the second direction, the control part 240 may move the stage 110 back in the direction opposite to the first direction by the distance moved in S55.

[0062] Alternatively, the control part 240 may cause the stage 110 to be moved by the predetermined distance in the second direction and subtract the distance moved in S55 from the measurement result. It is desirable for the control part 240 to cause the stage 110 to be moved in the second direction within the range in which the plurality of elements 31 to be measured of the calibration gauge 30 are included in the fields of view of the plurality of imaging parts 132.

[0063] Then, the control part 240 captures the calibration gauge 30 using the plurality of optical units 130 (S58). The control part 240 captures the calibration gauge 30 through the same process as in S56. At this time, the first imaging part 132a captures the first element to be measured 31a that has been moved in the second direction, and the second imaging part 132b captures the second element to be measured 31b that has been moved in the second direction.

[0064] Next, the control part 240 detects the calibration gauge 30 located at a second reference position (S59). The second reference position is a predetermined position, such as the initial position of the stage 110. Similar to the first reference position, the second reference position is a position where the plurality of elements 31 to be measured of the calibration gauge 30 are located in the fields of view 133 of the plurality of imaging parts 132 when the calibration gauge 30 is located at the second reference position.

[0065] For example, after the stage 110 is caused to move to the second reference position, the control part 240 detects the calibration gauge 30 using the imaging part 132 in the same manner as in the process in S54. The second reference position may be the position of the calibration gauge 30 after it has been moved in the second direction. In this case, the process in S59 can be omitted because the process in S59 has the same result as the process in S58. Furthermore, the second reference position may be the same position as the first reference position, and in this case, the control part 240 can simply move the calibration gauge 30 to the second reference position because the process in S59 has the same result as the process in S54.

[0066] Next, the control part 240 causes the calibration gauge 30 to rotate in a predetermined direction about an axis oriented in a predetermined third direction (S60). For example, the control part 240 causes the stage 110 to rotate by a predetermined angle θ within a range in which the plurality of elements 31 to be measured of the calibration gauge 30 are in the fields of view 133 of the plurality of imaging parts 132.

[0067] Then, the control part 240 captures the calibration gauge 30 using the plurality of optical units 130 (S61). The control part 240 captures the calibration gauge 30 by performing the same process as in S56. As a result, the first imaging part 132a captures the first element 31a to be measured after rotating around the axis oriented in the third direction, and the second imaging part 132b captures the second element 31b to be measured after rotating around the axis oriented in the third direction.

[0068] Next, the control part 240 causes the calibration gauge 30 to rotate in a predetermined direction about an axis oriented in a predetermined fourth direction different from the third direction (S62). For example, after rotating the stage 110 back by the predetermined angle θ about the axis oriented in the third direction, the control part 240 causes the stage 110 to rotate by a predetermined angle φ about the axis oriented in the fourth direction within the range where the plurality of elements 31 to be measured of the calibration gauge 30 are in the fields of view 133 of the plurality of imaging parts 132.

[0069] Alternatively, after causing the stage 110 to rotate by the predetermined angle φ around the axis oriented in the fourth direction, the control part 240 may reverse the stage 110 by the predetermined angle θ around the axis oriented in the third direction. Alternatively, the control part 240 may cause the stage 110 to rotate by the predetermined angle φ around the axis oriented in the fourth direction and subtract an amount of rotation of the stage 110 rotated by the predetermined angle φ around the axis oriented in the fourth direction from the measurement result.

[0070] The control part 240 detects the calibration gauge 30 using the plurality of optical units 130 (S63). The control part 240 detects the calibration gauge 30 through the same process as in S61. As described above, the control part 240 outputs the control signal from the signal output part 241 and, while moving the calibration gauge 30, detects the elements 31 to be measured with the plurality of imaging parts 132 before and after the movement of the calibration gauge 30. Then, the detection part 242 detects the detection results of the imaging parts 132.

[0071] In Fig. 4, an example was described in which the control part 240 executes the following: moving the calibration gauge 30 in the first direction, moving it in the second direction, rotating it by the angle θ, and rotating it by the angle φ in this order, but the present disclosure is not limited thereto. The control part 240 may execute the movement of the calibration gauge 30 in the first direction, moving it in the second direction, rotating it by the angle θ, and rotating it by the angle φ in an order that differs from that of Fig. 4 differs.

[0072] Next, the control part 240 identifies a coordinate position of the element to be measured 31 for each position to which the calibration gauge 30 has been moved based on the detection results of the plurality of imaging parts 132 (S64). For example, the measuring part 243 identifies first coordinate positions indicating a position of the first element to be measured 31a in the first coordinate system based on the field of view of the first imaging part 132a in a plurality of acquired images acquired by the first imaging part 132a. Further, the measuring part 243 identifies second coordinate positions indicating a position of the second element to be measured 31b in the second coordinate system based on the field of view of the second imaging part 132b in a plurality of acquired images acquired by the second imaging part 132b.

[0073] After the process in S64 in Fig. 4, the rotation matrix identification part 244 of the control part 240 identifies a rotation matrix for rotating the coordinates such that a direction in which the first coordinate position is moved and a direction in which the second coordinate position is moved coincide with each other before and after the calibration gauge 30 is moved in the first direction and the second direction (S65). After the process in S65, the translation vector identification part 245 identifies a translation vector for translating the coordinates such that the distance between the first element to be measured 31a and the second element to be measured 31b is the same before and after the rotation. <Ausführungsbeispiel der Kalibrierlehre 300>

[0074] Fig. 5 shows a first embodiment of the calibration gauge 300 according to the present embodiment. Fig. 5 shown calibration gauge 300, processes are carried out which are similar to those in Fig. 2 according to the present embodiment are designated by the same reference numerals, and redundant description thereof will be omitted. In other words, the calibration gauge 300 functions like the calibration gauge 300 shown in Fig. 2. The calibration gauge 300 can be configured as a reference gauge for performing a calibration for each optical unit 130. The calibration gauge 300 includes a plurality of elements 31 to be measured and a frame part 40.

[0075] The plurality of elements 31 to be measured are attached to the frame part 40. Although Fig. While FIG. 5 shows an example in which the frame member 40 is a plate member, it is not limited to this. The frame member 40 may be any member as long as it can fix the members 31 to be measured, and may be a rod member or the like.

[0076] Similar to Fig. 2 shows Fig. 5 shows an example in which the first element 31a to be measured is located in the field of view 133a of the first imaging part 132a of the first optical unit 130a and the second element 31b to be measured is located in the field of view 133b of the second imaging part 132b of the second optical unit 130b. It should be noted that, although the number of elements 31 to be measured in Fig. 5 is lower than that of Fig. 2, more elements 31 to be measured can be attached to the frame part 40. <Erstes Ausführungsbeispiel eines zu messenden Elements 31>

[0077] Fig. 6A and Fig. 6B each show a first embodiment of an element to be measured 31 according to the present embodiment. As shown in Fig. As shown in Figure 6A, the element to be measured 31 includes a main body part 32, a label part 33, and a plate member 34. The main body part 32 has a predetermined shape. The shape of the main body part 32 is, for example, a solid of revolution such as a sphere, an ellipsoid, or a cylinder. Alternatively, the shape of the main body part 32 may be a polyhedron.

[0078] Fig. 6A and Fig. 6B each show an example in which a plurality of label pieces 33 are attached to the plate member 34 by a known method such as printing or gluing, and the label pieces 33 are provided on the main body part 32 via the plate member 34. It is desirable that the label pieces 33 be provided at many parts of the main body part 32. For example, the main body part 32 includes a plurality of plate members 34, and the plurality of label pieces 33 are provided at a plurality of different positions on the main body part 32 to such an extent that at least one label piece 33 is included in the captured images when the element 31 to be measured is captured from different angles.

[0079] The plate member 34 is a band-shaped member provided around the main body member 32. A plurality of label members 33 may be provided on the plate member 34. It is desirable that the plurality of label members 33 be provided on both the front and back surfaces of the plate member 34. Fig. 6A and Fig. 6B each show an example in which four label parts 33 are provided on one of the surfaces of the plate member 34. The label parts 33 may be provided on the plate member 34 as described above or on other parts of the main body part 32 instead of or in addition to the plate member 34.

[0080] Fig. Figure 6B shows an example in which a single label part 33, which is from L1 to L2 of the Fig. 6A, is shown in a rectangular shape. The label part 33 includes, for example, a recognition code 35 and an identification code 36.

[0081] The recognition code 35 is a code common to the plurality of elements 31 to be measured for recognizing the label part 33. The identification code 36 is a code for identifying the element 31 to be measured. It is desirable that the recognition code 35 and the identification code 36 be codes of different shapes or codes of different types. For example, the identification code 36 consists of a combination of basic portions of a predetermined first shape, and the recognition code 35 consists of a combination of basic portions of a predetermined second shape that differs in size from the first shape.

[0082] Fig. 6A and Fig. 6B each shows an example in which the recognition code 35 and the identification code 36 are displayed as barcodes with different line widths. For example, a minimum line width d of the recognition code 35 is half of a minimum line width D of the identification code 36. The recognition code 35 and the identification code 36 each indicate a predetermined value. For example, the recognition code 35 indicates a predetermined 8-bit value (01010101), and the identification code 36 indicates a predetermined 8-bit value (01001010). <Zweites Ausführungsbeispiel der Kalibrierlehre 300>

[0083] Fig. 7 shows a second embodiment of the calibration gauge 300 according to the present embodiment. In the calibration gauge 300 of the second embodiment, the frame part 40 has a spherical or ellipsoidal shape. The frame part 40 can be formed into at least a partial spherical or ellipsoidal shape by combining a plurality of rod members or the like. Furthermore, the frame part 40 can include a part having a shape of at least a portion of a sphere or an ellipsoid.

[0084] The frame part 40 includes a plurality of rod elements 41, which are also arcuate, a column element 42, and, for example, a base 43. The plurality of rod elements 41 can be attached to the column element 42 so as to be rotatable about the column element 42 as an axis. The column element 42 is attached to the base 43. It is desirable that surfaces of the plurality of rod elements 41 that are in contact with the outside form a spherical surface or an ellipsoid.

[0085] Each of the arcuate rod members 41 is provided to be movable in a Z direction. Each of the arcuate rod members 41 can be configured to be movable in a circumferential direction of a circle drawn through the arc. A plurality of elements 31 to be measured are attached to the outer side of the plurality of rod members 41. In this way, the plurality of elements 31 to be measured can be arranged in a spherical array or an ellipsoidal array. Fig. 7 shows an example of a spherical frame part 40 in which the column member 42 extends in the Z direction and the plurality of rod members 41 are provided to be rotatable about the Z direction as an axis.

[0086] The arrangement positions and / or orientations of the plurality of imaging parts 132 can be changed depending on the measurement target. By arranging the plurality of elements 31 to be measured in such a spherical arrangement, the plurality of elements 31 to be measured can be included in the respective fields of view of the imaging parts 132 even if the arrangement positions and / or orientations of the imaging parts 132 are changed. The imaging parts 132 can be arranged to surround the measurement target. In this case, the arrangement positions and orientations may be different for each imaging part 132. Even in such a case, by arranging the plurality of elements 31 to be measured in the spherical arrangement, it is possible to include the plurality of elements 31 to be measured in the respective fields of view of the imaging parts 132.

[0087] Each of the plurality of elements 31 to be measured is provided on a spherical or ellipsoidal surface of the frame part 40. The plurality of elements 31 to be measured are provided such that adjacent elements 31 to be measured are within a predetermined distance range on a spherical surface of the sphere formed, for example, by the frame part 40. For example, if the main body part 32 of the element 31 to be measured is a sphere, the predetermined distance is approximately twice to four times the diameter of the sphere. If the main body part 32 of the element 31 to be measured is an ellipsoid, the predetermined distance may be approximately twice to four times the major axis of the ellipsoid.

[0088] It is desirable that the elements 31 to be measured be arranged so that the label part 33 is included in the fields of view of multiple imaging parts 132. An example is conceived in which the frame part 40 is considered a spheroid with the Z direction as a rotation axis and has spherical coordinates similar to those of a celestial body or the like. The plurality of elements 31 to be measured are desirably arranged in the same width direction and / or the same length direction of such a spheroid. In addition, each of the elements 31 to be measured is arranged so that at least one label part 33 is displayed within a side that is orthogonal to the normal direction of the spheroid and, for example, faces the outside of the frame part 40.

[0089] For example, it is desirable that the plurality of elements 31 to be measured be densely arranged on the spherical surface of the sphere, so that even if the imaging parts 132 capture a portion of the calibration gauge 300, a plurality of elements 31 to be measured on which the label part 33 can be read are included in the captured images. In this way, it is possible to identify the plurality of elements 31 to be measured in the captured images of the calibration gauge 300 captured by the plurality of imaging parts 132 by mounting only one calibration gauge 300 of the second embodiment on the stage 110.

[0090] Therefore, as described above, it is possible to identify the calibration parameters to be used for calibrating the plurality of imaging parts 132 themselves based on the captured images of the calibration jig 300 obtained by the plurality of imaging parts 132 before and after moving the calibration jig 300. An example was described in which the calibration jig 300 is mounted on the stage 110 and moved while identifying the calibration parameters described above, but the present disclosure is not limited thereto. Apart from moving the stage 110, the calibration jig 300 may be configured so that the plurality of elements 31 to be measured can be moved while maintaining their relative positional relationship.

[0091] The calibration gauge 300 further includes a frame part moving part that, for example, moves the frame part 40 together with the plurality of elements 31 to be measured. The frame part moving part includes an actuator, such as a motor, and moves the frame part 40 in a plurality of predetermined directions. Furthermore, the frame part moving part can rotate the frame part 40 about an axis oriented in a predetermined direction. The frame part moving part is configured to move, for example, the plurality of elements 31 to be measured in an X direction, a Y direction, and a Z direction. In addition, the frame part moving part can be configured to rotate the plurality of elements 31 to be measured about the X direction, the Y direction, and the Z direction as rotation axes.In this way, the measuring device 10 can identify the calibration parameters to be used for calibration by moving the frame part 40 of the calibration gauge 300 without moving the stage 110.

[0092] For example, recorded in S54 of the Fig. 4, the control part 240 detects the calibration gauge 300 arranged at the first reference position. The first imaging part 132a detects the calibration gauge 300 so that some of the first elements to be measured 31a among the plurality of elements to be measured 31 provided in the calibration gauge 300 are included in its field of view. The second imaging part 132b, which is different from the first imaging part 132a, detects the calibration gauge 300 so that some of the second elements to be measured 31b, which are different from the first elements to be measured 31a detected by the first imaging part 132a, are included in its field of view.

[0093] The detection of the calibration gauge 300 in S58, S59, S61, and S63 is the same as that in S54. Additionally, in S55, S57, S60, and S62, the control part 240 may move the stage 110 or may instead move the calibration gauge 300 by controlling the frame part movement part of the calibration gauge 300.

[0094] Then, in S64, the measuring part 243 analyzes the label parts 33 of the elements 31 to be measured from the captured images acquired by the first imaging part 132a to identify the first elements 31a to be measured. The measuring part 243 identifies first coordinate positions indicating positions of the identified first elements 31a to be measured in the first coordinate system based on the field of view of the first imaging part 132a.

[0095] Similarly, the measuring part 243 analyzes the label parts 33 of the elements to be measured from the captured images acquired by the second imaging part 132b to identify the second elements 31b to be measured. The measuring part 243 identifies second coordinate positions indicating positions of the identified second elements 31b to be measured in the second coordinate system based on the field of view of the second imaging part 132b.

[0096] After S64, as described above, the calibration parameters for calibrating the first imaging part 132a and the second imaging part 132b can be identified from positional relationships between the identified first elements to be measured 31a and the identified second elements to be measured 31b.

[0097] Furthermore, in S51 and S52 of the Fig. 4, an example will be described in which each optical unit 130 is calibrated using the reference gauge having a smaller size than the calibration gauge 30. Here, since the size of the calibration gauge 300 of the second embodiment can be made smaller than the size of the calibration gauge 30, the calibration gauge 300 can also function as the reference gauge.

[0098] The calibration gauge 300 can be used, for example, as a reference gauge by storing measured dimensions and positional relationships of at least a subset of the plurality of elements 31 to be measured in advance in the memory 220 or the like. In other words, the measuring device 10 can Fig. 4 using a calibration gauge 300. <Drittes Ausführungsbeispiel der Kalibrierlehre >

[0099] It has been described above that the calibration gauge can be configured so that the plurality of elements to be measured can be moved while maintaining their relative positional relationship. An example of such a calibration gauge is described below with reference to Fig. 8 to Fig. 14A and Fig. 14B.

[0100] Fig. 8 is a side view of a calibration gauge 300A according to one aspect of the present disclosure. Fig. Fig. 9 is a diagram showing a state in which a frame member is removed from the calibration gauge 300A Fig. 8 away. Fig. 10 is a perspective view of the calibration gauge 300A in the state where the frame member is removed. Fig. 11 is a perspective view of the calibration gauge 300A in the state where the frame member is removed, when viewed from a different direction.

[0101] As in Fig. As shown in Figure 8, the calibration gauge 300A includes a plurality of elements to be measured 331, a frame part 340, and a mechanism part 400. Since the element to be measured 331 and the frame part 340 have the same configuration as the element to be measured 31 and the frame part 40 described above, a detailed description thereof will be omitted. One of the features of the calibration gauge 300A is that the plurality of elements to be measured 331 and the frame part 340 can move around each axis: a central axis Lx (roll axis), a central axis Ly (pitch axis), and a central axis Lz (yaw axis), as shown in Fig. 11 shown.

[0102] As in Fig. As shown in Figure 8, the element to be measured 331 includes a main body part 332 and a label part 333. The main body part 332 is, for example, a sphere. The label part 333 is an annular plate-shaped element provided on an outer peripheral surface of the main body part 332. The label part 333 is the same as that shown in Fig. 6 and includes a display of an identification code for identifying the element 331 to be measured.

[0103] The frame part 340 is a member that forms an outer peripheral surface of the sphere, and the plurality of elements 331 to be measured are attached to the outer peripheral surface. As shown in Fig. 8 and Fig. 9, the frame part 340 includes a frame element 341, a column element 342 and a base 343.

[0104] As mentioned with reference to Fig. 7, the frame member 341 has an outer peripheral portion forming an arc. The frame member 341 is removably attached to the column member 342. In the example of Fig. 8, a plurality of frame members 341 are provided so as to extend radially around the column member 342. The plurality of frame members 341 thus provided form the spherical outer peripheral surface to which the element to be measured 331 is attached.

[0105] The plurality of frame elements 341 are connected to one another, for example, as a spherical subassembly. The spherical subassembly is removably attached to the column element 342.

[0106] The spherical outer peripheral surface formed by the plurality of frame members 341 is not completely closed, and an opening 340h ( Fig. 8) is provided on a portion of a lower end side. As described above, it is possible to insert a portion of the mechanism part 400 into the ball because a portion of the ball is open.

[0107] As in Fig. 9, the frame part 340 is supported by the mechanism part 400. Specifically, the frame part 340 is supported by the mechanism part 400 by attaching a base 343, which is provided with a columnar member 342 on its upper surface, to a support member 403 (described in detail later). (Mechanism part 400)

[0108] The mechanism part 400 is a mechanism that moves, for example, the frame part 340 in a predetermined direction on a stage of a coordinate measuring machine. As shown in Fig. As shown in Fig. 9, the mechanism part 400 includes a support body 401, a support member 403, a rotation mechanism 405, a first pivoting mechanism 410, and a second pivoting mechanism 420.

[0109] The support body 401 extends in a Z-axis direction and supports various components that constitute the mechanism part 400. Specifically, the support body 401 supports the first pivot mechanism 410, the second pivot mechanism 420, and the support member 403.

[0110] The support member 403 supports the frame part 340 and is provided at an upper portion of the support body 401. As shown in Fig. 10 and Fig. 11, the support member 403 is a plate-shaped element as an example. The outer shape of the support member 403 is, for example, a quadrilateral. As shown in Fig. As shown in Figure 11, the support member 403 is configured to pivot about the central axis Lx extending in an X-axis direction and the central axis Ly extending in a Y-axis direction. A structure that pivotally supports the support member 403 will be described later with reference to other drawings. (Rotation mechanism 405)

[0111] The rotation mechanism 405 ( Fig. 9) rotates the frame part 340 around the central axis Lz in the Z-axis direction. In this example, the rotation mechanism 405 rotates the frame part 340 by 360 degrees or more, for example. The rotation mechanism 405 can rotate the frame part 340 within an angular range of less than 360 degrees.

[0112] The rotation mechanism 405 includes a rotation motor 405a as a drive source that generates a driving force for rotating the frame part 340. As an example, the rotation motor 405a is mounted on a lower surface of the support member 403. By transmitting the driving force from the rotation motor 405a to the base 343 via a transmission mechanism (not shown), the frame part 340 rotates around the central axis Lz in the Z-axis direction. Note that although the frame part 340 rotates on the support member 403, the support member 403 itself does not rotate. In this example, the rotation mechanism 405 is arranged to be positioned within the contour of the support member 403 in a plan view.

[0113] Regarding the arrangement of the rotation mechanism 405, the first swing mechanism 410, and the second swing mechanism 420, it is assumed that all of these mechanisms are arranged together, for example, at approximately the same position (approximately the same height) in a direction along the central axis Lz. However, in the case of such a configuration, the size (projected area) of a mechanism part becomes large when the mechanism part is projected onto an XY plane.

[0114] Such a mechanism part is unsuitable for arranging the mechanism part such that a part of it is housed within the frame member 341, which is a sphere. Furthermore, in a configuration in which such a mechanism part is arranged outside the sphere (for example, below the sphere), there is a large structure under the frame member 341. Consequently, it becomes difficult to grasp the element 331 to be measured from below.

[0115] Therefore, in the calibration gauge 300A, the first pivoting mechanism 410 and the second pivoting mechanism 420 are arranged at a first position in the direction along the central axis Lz, and the rotation mechanism 405 is arranged at a second position that is closer to the support member 403 than the first position. In particular, as shown in Fig. As shown in Figure 9, a first linear actuator 415 of the first pivot mechanism 410 and a second linear actuator 425 of the second pivot mechanism 420 are provided below the rotation mechanism 405. With such a configuration, the rotation mechanism 405, the first pivot mechanism 410, and the second pivot mechanism 420 can be arranged compactly around the central axis Lz. (First swivel mechanism 410)

[0116] As in Fig. As shown in Figure 11, the first pivot mechanism 410 pivots the frame member 340 about the central axis Ly. The first pivot mechanism 410 includes a first movable member 411 and the first linear actuator 415.

[0117] Specifically, the first movable part 411 includes a first coupling arm 412, a ball joint 413a, and a knuckle joint 413b. One end of the first movable part 411 is coupled to the support member 403. The first movable part 411 moves in the Z-axis direction by receiving force from the first linear actuator 415, thereby applying force to the support member 403 to move the support member 403.

[0118] The first linear actuator 415 includes a linear motor 415a and a linear guide 415b. The linear motor 415a moves its movable arm 417 in the Z-axis direction using, for example, the driving force of a pulse motor.

[0119] The linear guide 415b is provided such that it is positioned between the linear motor 415a and the first movable part 411. The linear guide 415b includes a rail extending in the Z-axis direction and a motion block that reciprocates along the rail. The linear guide 415b transmits power from the linear motor 415a to the first movable part 411.

[0120] The first coupling arm 412 couples the first linear actuator 415 and the support member 403. The ball joint 413a is provided at one end (upper end) of the first coupling arm 412. The first coupling arm 412 is coupled to the support member 403 via the ball joint 413a. Specifically, the upper end of the first coupling arm 412 is coupled to the support member 403 at a position near the outer periphery of the lower surface of the support member 403. In the calibration jig 300A, a ball joint is used as a connecting part between the first movable part 411 and the support member 403. As described below, a ball joint 423a is similarly used as a connecting part between a second coupling arm 422 of the second swing mechanism 420 and the support member 403.

[0121] The centers of the ball joint 413a and the ball joint 423a may be arranged in different planes orthogonal to the Z-axis, but in the calibration gauge 300A, the centers of the ball joint 413a and the ball joint 423a are arranged in the same plane. The effect of such a configuration will be described later along with the description of the pivot center of the frame part 340.

[0122] The knuckle joint 413b is provided at the lower end of the first coupling arm 412. The first coupling arm 412 and the first linear actuator 415 are coupled via the knuckle joint 413b. The knuckle joint 413b is a component that allows an object to rotate about an axis. In the example of Fig. 11, the first coupling arm 412 is coupled to a movable arm 417 of the first linear actuator 415 by the knuckle joint 413b, which supports the first coupling arm 412 rotatably about a central axis (about an axis) parallel to the direction of the central axis Ly. A ball joint can be used at this connection point, but by using the Fig. 11, the accuracy of the movement of the first coupling arm 412 is improved. This makes it possible to improve the positional accuracy of the support member 403 and the plurality of elements to be measured 331 that move together with the support member 403. (Second swivel mechanism 420)

[0123] The second pivot mechanism 420 is the same as the first pivot mechanism 410, except that (i) an arrangement position of the mechanism part 400 differs from that of the first pivot mechanism 410, and (ii) the lower end of the second coupling arm 422 is a ball joint 423b. The second pivot mechanism 420 pivots the frame part 340 about the central axis Lx. As shown in Fig. 11, the second pivot mechanism 420 is arranged at a position shifted by 90 degrees in the circumferential direction of the central axis Lz with respect to the first pivot mechanism 410.

[0124] The second swing mechanism 420 includes a second movable part 421 and a second linear actuator 425 in the same manner as the configuration of the first swing mechanism 410. The second movable part 421 includes the second coupling arm 422, the ball joint 423a and the ball joint 423b.

[0125] One end of the second movable part 421 is coupled to the support member 403. The second movable part 421 moves in the Z-axis direction by receiving force from the second linear actuator 425, thereby applying force to the support member 403 to move the support member 403.

[0126] The linear motor 425a moves its movable arm 427 in the Z-axis direction using the drive force of the pulse motor. A linear guide 425b transmits power from the linear motor 425a to the second coupling arm 422.

[0127] The second coupling arm 422 couples the second linear actuator 425 and the support member 403. The ball joint 423a and the ball joint 423b are provided at an upper end and a lower end of the second coupling arm 422, respectively. Similar to the first movable part 411, the second coupling arm 422 is coupled to the lower surface of the support member 403 via the ball joint 423a. In this example, a distance from the central axis Lx to the ball joint 423a (distance in a plan view) is the same as a distance from the central axis Lx to the ball joint 423a (distance in a plan view).

[0128] A knuckle joint can be used to couple the second coupling arm 422 and the second linear actuator 425. In the case of the configuration in which the knuckle joints are used for both the first coupling arm 412 and the second coupling arm 422, an improvement in the positional accuracy of the frame part 340 and the element to be measured 331 attached thereto can be expected. However, high dimensional accuracy will be required when assembling the mechanism part 400. Therefore, in the calibration gauge of one embodiment of the present disclosure, a knuckle joint is used for the first coupling arm 412 and a ball joint for the second coupling arm 422, as shown in Fig. 11. Whether the ball joint or the knuckle joint is used at the end of a coupling arm can be appropriately selected for the calibration gauge according to the required accuracy and other factors.

[0129] The mechanism part 400 configured as described above is provided in a shape such that the mechanism part 400 fits into a circle, which is an outer shape of the frame part 340, when viewed by projecting the mechanism part 400 and the frame part 340 in the Z direction. According to such a configuration, the projected area of ​​the calibration gauge 300A is reduced. Furthermore, it is easy to pick up the plurality of elements 331 to be measured, which are arranged in a spherical shape, from below. (Pivoting the support member 403 and the frame part 340 supported thereby)

[0130] Fig. 12 shows an enlarged view of a structure that pivotally supports the frame part 340 in the mechanism part. Fig. 13 is a diagram illustrating a positional relationship between the frame part 340 and a pivot center 455a. Fig. 14A and Fig. 14B each schematically shows the pivoting of the support member 403 and the frame part 340 supported by the support member 403.

[0131] As in Fig. 12 and Fig. As shown in Figure 13, the support member 403 is coupled to the center column 402 via a ball joint 455 provided at an upper end of the center column 402 of the support body 401. Thus, the support member 403 is provided to be reorientable with respect to the center column 402 within a range of motion of the ball joint 455. Specifically, the support member 403 is provided to be able to change its orientation around the pivot center 455a, which is the center of a ball of the ball joint 455.

[0132] As in Fig. 12 and Fig. As shown in Fig. 13, a state in which the center column 402 of the mechanism part 400 and the column member 342 of the frame part 340 extend along the center axis Lz is an initial state of the calibration gauge 300A. In this state, the plate-shaped support member 403 extends in a plane orthogonal to the center axis Lz. The center axis Lx ( Fig. 11) and the central axis Ly pass through the pivot center 455a and are orthogonal to each other.

[0133] As in Fig. As shown in Figure 13, the frame part 340 is arranged so that the center of the sphere of the frame element 341 coincides with the pivot center 455a. Since the pivot center 455a and the center of the sphere of the frame element 341 are arranged at the same position as described above, the sphere of the frame element 341 rotates around its center as a rotation center when the support member 403 is pivoted. Such a configuration does not require complicated calculations for calibration based on the captured images of the plurality of elements 31 to be measured. (Operations of the calibration gauge 300A)

[0134] As in Fig. 14A, the second movable part 421 is moved from the initial state of the calibration gauge 300A by, for example, operating the second linear actuator 425 of the second swing mechanism 420.

[0135] Then, as in Fig. 14B, the support member 403 is pushed upward by the second movable part 421, whereby the support member 403 pivots together with the frame part 340 on the support member 403. Specifically, the frame part 340 pivots about the central axis Lx by a predetermined angle. In a case where the second movable part 421 is moved from the state of Fig. 14A is retracted in a direction opposite to the feed direction, the frame part 340 pivots in the opposite direction compared to the above description.

[0136] Although in the Fig. 14A and Fig. 14B, the frame member 340 pivots about the central axis Ly by a predetermined angle when the first movable member 411 is moved by operating the first linear actuator 415 of the first pivot mechanism 410.

[0137] In a case where the frame part 340 is to be rotated about the central axis Lz, the rotation mechanism 405 can be actuated in a manner described above. The frame part 340 can be rotated either clockwise or counterclockwise.

[0138] In the calibration gauge 300A, as described above, the frame part 340 can be moved in a desired direction by independently operating the rotation mechanism 405, the first pivoting mechanism 410, and the second pivoting mechanism 420 in an appropriate manner. (Effects of the calibration gauge 300A)

[0139] According to the calibration gauge 300A described above, the mechanism part 400 is provided, which includes the rotation mechanism 405 that rotates the frame part 340 about the central axis Lz, the first pivoting mechanism 410 that pivots the frame part 340 about the central axis Ly, and the second pivoting mechanism 420 that pivots the frame part 340 about the central axis Lx. Therefore, the member to be measured 331 can be moved in the desired direction by operating each mechanism.

[0140] In particular, since the operations of the rotation mechanism 405, the first pivot mechanism 410, and the second pivot mechanism 420 correspond to the yaw component, the pitch component, and the roll component, respectively, controlling these mechanisms is simple. To pivot the frame part 340 about the central axis Lx or the central axis Ly, a configuration is conceivable in which the frame part 340 is moved about a predetermined axis by, for example, simultaneously operating the first pivot mechanism 410 and the second pivot mechanism 420. However, since synchronous control of the two mechanisms is required in this case, their control becomes complicated. In addition, since the trajectory along which the support member 403 moves becomes complicated, there is a concern that the positional accuracy of the plurality of elements 331 to be measured may decrease.In contrast, in the calibration gauge 300A, the frame part 340 can be pivoted by the independent operation of the first pivot mechanism 410 or the second pivot mechanism 420. Therefore, no complicated control is required, and the positional accuracy of the frame part 340 can be improved.

[0141] In the calibration jig 300A, the first pivoting mechanism 410 and the second pivoting mechanism 420 each actuate the movable part using a linear actuator. To pivot the frame part 340 about the central axis Lx or the central axis Ly, a configuration using, for example, a rotation mechanism such as the rotation mechanism 405 is conceivable. However, according to the configuration using the linear actuator as in the calibration jig 300A, it is not necessary to dispose various mechanisms near the pivoting center 455a compared to the rotation mechanism. Therefore, the mechanism near the pivoting center 455a can be miniaturized. Such a configuration is particularly advantageous in the configuration in which a part of the mechanism part 400 is disposed within the frame part 340, as in Fig. 11 shown.

[0142] In the calibration gauge 300A, as in Fig.As shown in Figure 11, the center portion of the ball joint 413a and the center portion of the ball joint 423b are arranged on the same plane. Furthermore, the pivot center 455a is arranged on this plane. According to such a configuration, the support member 403 and the frame part 340 supported by the support member 403 can be properly moved around the pivot center 455a according to the operations of the first pivot mechanism 410 and the second pivot mechanism 420. <Modifiziertes Beispiel>

[0143] Although the specific structure of the calibration gauge 300A has been described above, the calibration gauge 300A is not necessarily limited to the above structure. For example, if the size of the frame part 340 is sufficiently large, not only a part of the mechanism part 400 but also the entire mechanism part 400 may be arranged within the frame part 340.

[0144] As described above, since the shape of the frame part 340 is not limited to a sphere, part or all of the mechanism part 400 may be arranged, for example, within the ellipsoid-shaped frame part 340.

[0145] The mechanism part 400 may further include the XY stage at a lower portion thereof and may have a configuration in which the frame part 340 can be moved to any position within the XY plane by operating the XY stage.

[0146] The present invention will be explained based on the exemplary embodiments. The technical scope of the present invention is not limited to the scope explained in the above embodiments, and it is possible to make various changes and modifications within the scope of the invention. For example, the entire device or a part thereof may be configured with any unit that is functionally or physically distributed or integrated. Further, new exemplary embodiments produced by any combinations thereof are included in the exemplary embodiments. Furthermore, effects of the new exemplary embodiments brought about by the combinations also have the effects of the original exemplary embodiments. [Description of reference symbols] 10 Measuring device 30 Calibration gauge 31 Element to be measured 31 Multiple elements to be measured 32 Main body part 33 Label part 34 plate element 35 Identification code 36 Identification code 40 frame part 41 rod element 42 Column element 43 bases 110 Object table 120 Moving part 130 optical unit 131 Light source 132 Illustration section 133 Field of view 210 Communication section 220 storage 230 Display part 240 control unit 241 Signal output section 242 Recording part 243 measuring part 244 Rotation matrix identification part 245 Translation vector identification part 300 Calibration gauge 300A calibration gauge 331 Element to be measured 332 Main body part 333 Label part 340 frame part 341 frame element 342 Column element 343 base 400 mechanism part 401 support body 402 center column 403 supporting member 405 Rotation mechanism 405a rotary engine 410 First swivel mechanism 411 First moving part 412 First coupling arm 413a ball joint 413b Steering knuckle joint 415 First linear actuator 415a linear motor 415b linear guide 417 Movable arm 420 Second swivel mechanism 421 Second movable part 422 Second coupling arm 423a ball joint 423b ball joint 425 Second linear actuator 425a linear motor 425b linear guide 427 Movable arm 455 ball joint 455a Swivel center Lx central axis Ly central axis Lz central axis S measuring system W Measurement target QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] JP 2019-507885 A

[0002]

Claims

[1] Calibration gauge (300A) that calibrates a measuring device for measuring a three-dimensional geometry of a measurement target, the calibration gauge comprising: several elements to be measured (331); a frame part (340) to which the plurality of elements to be measured are attached; and a mechanism part (400) that moves the frame part, the mechanism part comprising: a rotation mechanism (405) that rotates the frame member about a first axis; a first pivoting mechanism (410) pivoting the frame member about a second axis orthogonal to the first axis; and a second pivoting mechanism (420) pivoting the frame member about a third axis orthogonal to the first axis and the second axis. [2] Calibration gauge according to claim 1, wherein the mechanism part (400) comprises a support member (403) which supports the frame part, the first pivot mechanism comprises: a first movable part (411) coupled to the support member; and a first linear actuator (415) that moves the first movable part, and the first pivoting mechanism is configured to pivot the support member about the second axis by causing the first linear actuator to move the first movable part. [3] Calibration gauge according to claim 2, wherein the second pivoting mechanism (420) comprises: a second movable part (421) coupled to the support member; and a second linear actuator (425) which moves the second movable part, wherein the second pivoting mechanism is configured to pivot the support member about the third axis by causing the second linear actuator to move the second movable part. [4] Calibration gauge according to claim 3, wherein a connecting part between the first movable part (411) and the support member (403) and a connecting part between the second movable part (421) and the support member (403) are ball joints (413a, 423a), Middle parts of the plurality of ball joints are arranged in a plane orthogonal to the first axis and a pivot center of the support member is arranged in the plane. [5] Calibration gauge according to claim 4, wherein the first movable part (411) includes a first coupling arm (412), one end of the first coupling arm is provided with the ball joint and the other end of the first coupling arm is coupled to the first linear actuator, and the first coupling arm and the first linear actuator are coupled by a knuckle joint (413b) which supports the first coupling arm rotatably about an axis. [6] Calibration gauge according to claim 5, wherein the second movable part (421) includes a second coupling arm (422), one end of the second coupling arm is provided with the ball joint and the other end of the second coupling arm is coupled to the second linear actuator, and the second coupling arm and the second linear actuator are coupled by a knuckle joint that supports the second coupling arm rotatably about an axis. [7] Calibration gauge according to claim 3, wherein the rotation mechanism (405) includes a drive source that generates a driving force for rotating the frame part, the first linear actuator (415) and the second linear actuator (425) are arranged at a first position in a direction along the first axis, and the drive source of the rotation mechanism (405) is arranged at a second position which is closer to the support member (403) than the first position in the direction along the first axis. [8] Calibration gauge according to one of claims 1 to 7, wherein the frame part (340) has a shape of a sphere or an ellipsoid, on the surface of which the plurality of elements to be measured are provided, and at least a part of the mechanism part is provided so as to be arranged within the sphere or ellipsoid of the frame part. [9] Calibration gauge according to claim 8, wherein the frame part (340) is provided such that a center of the sphere or the ellipsoid is arranged at a pivot center (455a) which is an intersection point of the second axis and the third axis. [10] Calibration gauge according to claim 8, wherein the mechanism part (400) has a shape in which, when viewed by projecting the mechanism part and the frame part in a direction of the first axis, the mechanism part is arranged entirely within an outer shape of the frame part (340). [11] Calibration gauge according to one of claims 1 to 7, wherein the element to be measured (331) comprises: a main body part (332) having a predetermined shape; and a label part (333) provided on the main body part or an element attached to the main body part, wherein an identification code for identifying the element to be measured is shown.

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