Micromechanical switch with heating

By integrating an electrical heating element to thermally optimize the contact surfaces in MEMS relays, the MEMS relay achieves reduced electrical resistance and enhanced cycle stability, addressing the instability issues of conventional MEMS relays.

DE102024200716A1Pending Publication Date: 2025-07-31ROBERT BOSCH GMBH
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Patent Information

Application Number
DE102024200716
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-01-26
Publication Date
2025-07-31

AI Technical Summary

Technical Problem

Conventional MEMS relays suffer from high electrical contact resistance and instability due to insufficient contact surface optimization, which is exacerbated by small driving forces, leading to undesirable contact degradation and reduced service life.

Method used

Integration of an electrical heating element within the MEMS relay to heat the contact surfaces, optimizing the contact surface through thermal softening and regeneration, using materials like ruthenium or gold, to reduce electrical resistance and enhance cycle stability.

Benefits of technology

The solution reduces electrical contact resistance and improves cycle stability by maintaining an optimal contact surface state, extending the service life of the MEMS relay.

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Abstract

The invention is based on a micromechanical switch with at least one fixed electrical contact (10) and one movable electrical contact (20), which can be placed against one another to close an electrical line (30). The core of the invention is that the switch has a heater (40) designed to heat the fixed electrical contact and / or the movable electrical contact.
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Claims

[1] Micromechanical switch with at least one fixed electrical contact (10) and one movable electrical contact (20), which can be placed against each other to close an electrical line (30), characterized by that the switch has a heater (40) which is designed to heat the fixed electrical contact and / or the movable electrical contact. [2] Micromechanical switch according to claim 1, characterized by that the heater (40) is electrically operable, in particular a heating resistor. [3] Micromechanical switch according to claim 1 or 2, characterized by that the switch has a further fixed electrical contact (15) and the movable electrical contact (20) is designed as a contact bridge and can be applied to the fixed electrical contact (10) and the further fixed electrical contact in order to close the electrical line (30). [4] Micromechanical switch according to one of the preceding claims, characterized by that at least the fixed electrical contact (10) and / or the movable electrical contact (20) has a plurality of layers of different metals for electrical contacting.

Citation Information

Patent Citations

  • Electric heating deicing device for electromagnetic switch contact of starter

    CN103632859A

  • Mechanical switch with melting bridge

    US20080061911A1

  • CN000103632859A