PIEZO-ACTIVATED PLATFORMS FOR IMAGE SENSOR STABILIZATION

Abstract

Camera module, including: a movable substrate comprising a first principal surface and a second principal surface arranged opposite the first principal surface; an image sensor configured to acquire image data, wherein the image sensor is mechanically coupled to the first principal surface; a piezoelectrically actuated platform for microelectromechanical systems (MEMS) that is mechanically coupled to the second main surface of the movable substrate, such that the movable substrate and the piezoelectrically actuated MEMS platform are configured to move together; at least one piezoelectric actuator coupled to the piezoelectrically actuated MEMS platform, wherein the at least one piezoelectric actuator is configured to provide a mechanical counter-response to the piezoelectrically actuated MEMS platform; an actuation circuit configured to receive a motion sensor signal corresponding to a movement, to generate at least one actuation signal based on the motion sensor signal, and to provide that at least one actuation signal to the at least one piezoelectric actuator to generate the mechanical response at the piezoelectrically actuated MEMS platform in response to the movement indicated by the motion sensor signal; and at least one piezoelectric sensor configured to detect a counter-movement of the piezoelectrically actuated MEMS platform corresponding to the mechanical counter-reaction, and to generate at least one sensor feedback signal based on a piezoelectric effect corresponding to the counter-movement of the piezoelectrically actuated MEMS platform, wherein the actuating circuit is further configured to monitor the mechanical counter-reaction based on the at least one sensor feedback signal.

Description

BACKGROUND

[0001] An image sensor, or image transmitter, is a sensor that captures and transmits information used to create an image. This is done by converting the variable attenuation of light waves (as they pass through or are reflected by objects) into signals, such as currents, that carry the information. Image sensors can be used in electronic imaging devices of both analog and digital types, which may include digital cameras, camera modules, and camera phones. A complementary metal-oxide-semiconductor (CMOS) image sensor is a type of active pixel sensor that can be used in small consumer products, such as cameras and mobile phones.

[0002] US 2023 / 0283901 A1 relates to a MEMS lens image sensor assembly comprising an image sensor, an image stabilization assembly and a lens assembly.

[0003] US 2008 / 0273092 A1 discloses a micro-optical image stabilizer comprising a movable carrier on which an image sensor is arranged. SUMMARY

[0004] In some implementations, a camera module comprises a movable substrate, comprising a first principal surface and a second principal surface arranged opposite the first principal surface; an image sensor configured to acquire image data, wherein the image sensor is mechanically coupled to the first principal surface; a piezoelectrically actuated microelectromechanical systems (MEMS) platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the piezoelectrically actuated MEMS platform are configured to move together; and at least one piezoelectric actuator coupled to the piezoelectrically actuated MEMS platform, wherein the at least one piezoelectric actuator is configured to provide a mechanical counter-response to the piezoelectrically actuated MEMS platform.and an actuation circuit configured to receive a motion sensor signal corresponding to a movement, to generate at least one actuation signal based on the motion sensor signal, and to provide the at least one actuation signal to the at least one piezoelectric actuator to generate the mechanical counter-response on the piezoelectrically actuated MEMS platform in response to the movement indicated by the motion sensor signal.

[0005] In some implementations, a camera module comprises a movable substrate, comprising a first principal surface and a second principal surface located opposite the first principal surface; an image sensor configured to acquire image data, the image sensor being mechanically coupled to the first principal surface; a first piezoelectrically actuated MEMS platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the first piezoelectrically actuated MEMS platform are configured to move together along a first axis and a second axis perpendicular to the first axis;a first piezoelectric actuator coupled to the first piezoelectrically actuated MEMS platform, wherein the first piezoelectric actuator is configured to provide a first mechanical counter-response to the moving substrate by moving the first piezoelectrically actuated MEMS platform along the first axis; a second piezoelectric actuator coupled to the first piezoelectrically actuated MEMS platform, wherein the second piezoelectric actuator is configured to provide a second mechanical counter-response to the moving substrate by moving the first piezoelectrically actuated MEMS platform along the second axis;and an actuation circuit configured to receive at least one motion sensor signal indicating movement, to generate a first actuation signal based on the at least one motion sensor signal, to generate a second actuation signal based on the at least one motion sensor signal, to apply the first actuation signal to the first piezoelectric actuator to generate the first mechanical counter-response in response to the movement indicated by the at least one motion sensor signal, and to apply the second actuation signal to the second piezoelectric actuator to generate the second mechanical counter-response in response to the movement indicated by the at least one motion sensor signal.

[0006] In some implementations, a method for stabilizing the position of an image sensor includes determining, by means of an actuating circuit, a mechanical counter-reaction based on a motion sensor signal corresponding to a movement detected by a motion sensor, wherein the mechanical counter-reaction is in the opposite direction to the movement indicated by the motion sensor signal; generating, by means of the actuating circuit, an actuating signal based on the mechanical counter-reaction; and providing, by means of the actuating circuit, the actuating signal to a piezoelectric actuator coupled to a piezoelectrically actuated MEMS platform, wherein the actuation of the piezoelectric actuator causes a positional displacement of the piezoelectrically actuated MEMS platform to generate the mechanical counter-reaction. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Implementations are described herein with reference to the attached drawings. Fig. Figure 1 illustrates a camera system according to one or more implementations. Fig. Figure 2 illustrates a cross-section of a section of a camera module according to one or more implementations. Fig. Figure 3 illustrates a schematic block diagram of a control circuit according to one or more implementations. Fig. Figure 4 illustrates a platform layer of a camera module according to one or more implementations. Fig. Figure 5 illustrates a platform layer of a camera module according to one or more implementations. DETAILED DESCRIPTION

[0008] Details are set forth below to provide a more thorough explanation of exemplary implementations. However, it is obvious to experts in the field that these implementations can be executed without these specific details. In other cases, well-known structures and devices are shown in block diagram form or in a schematic view, rather than in detail, to avoid obscuring the implementations. Furthermore, features of the various implementations described below can be combined unless explicitly stated otherwise.

[0009] Furthermore, equivalent or identical elements, or elements with equivalent or identical functionality, are designated by equivalent or identical reference numerals in the following description. Since identical or functionally equivalent elements in the figures are provided with the same reference numerals, repeated descriptions for elements with the same reference numerals can be omitted. Therefore, descriptions provided for elements with the same or identical reference numerals are interchangeable.

[0010] Each of the illustrated x-axis, y-axis, and z-axis is essentially perpendicular to the other two axes. In other words, the x-axis is essentially perpendicular to the y-axis and the z-axis, the y-axis is essentially perpendicular to the x-axis and the z-axis, and the z-axis is essentially perpendicular to the x-axis and the y-axis. In some cases, a single reference symbol is shown to refer to a single face, or fewer than all instances of a part may be labeled with all faces of that part. All instances of the part may include associated faces of that part, although not every face is labeled.

[0011] The orientations of the various elements in the figures are shown as examples, and the illustrated examples may be rotated relative to the depicted orientations. The descriptions provided herein and the following claims apply to any structures exhibiting the described relationships between various features, regardless of whether the structures are in the specific orientation shown in the drawings or rotated relative to such an orientation. Similarly, spatially relative terms such as "above," "below," "under," "lesser," "above," "upper," "middle," "left," and "right" are used herein for the convenience of description to express the relationship of one element to one or more other elements, as illustrated in the figures.The spatially relative terms are intended to encompass various orientations of the element, structure, and / or arrangement during use or operation, in addition to those depicted in the figures. A structure and / or arrangement may be oriented differently (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein may be interpreted accordingly. Furthermore, the cross-sectional views in the figures show only features within the planes of the cross-sections and do not show materials behind the planes of the cross-sections unless otherwise indicated for the sake of simplicity.

[0012] It is understood that when an element is described as "connected" or "coupled" to another element, it may be directly connected or coupled to the other element, or there may be intervening elements. In contrast, when an element is described as "directly connected" or "directly coupled" to another element, there are no intervening elements. Other words used to describe the relationship between elements should be interpreted in the same way (e.g., "between" versus "directly between," "adjacent" versus "directly adjacent," etc.).

[0013] In the implementations described herein or shown in the drawings, any direct electrical connection or coupling (e.g., any connection or coupling without any additional intervening elements) can also be implemented by an indirect connection or coupling (e.g., a connection or coupling with one or more additional intervening elements, or vice versa), as long as the general purpose of the connection or coupling (e.g., to transmit a certain type of signal or to transmit a certain type of information) is substantially maintained. Features from different implementations can be combined to form other implementations. For example, variations or modifications described with respect to one of the implementations may also be applicable to other implementations unless otherwise stated.

[0014] For example, the terms "essentially" and "approximately" may be used herein to account for small manufacturing tolerances or other factors (e.g., within 5%) that are considered acceptable in the industry without deviating from the aspects of the implementations described herein. For example, a resistor with an approximate resistance value may practically have a resistance within 5% of the approximate resistance value. As another example, a signal with an approximate signal value may practically have a signal value within 5% of the approximate signal value.

[0015] In the present disclosure, expressions, including ordinal numbers such as "first," "second," and / or the like, may modify various elements. However, such elements are not restricted by such expressions. For example, such expressions do not restrict the order and / or importance of the elements. Instead, such expressions are used merely for the purpose of distinguishing one element from the other elements. For example, a first field and a second field denote different fields, although both are fields. By a further example, a first element could be designated as a second element, and likewise, a second element could also be designated as a first element, without deviating from the scope of the present disclosure.

[0016] Handheld cameras can be prone to movement during image capture, which can lead to image blur. Movement can be caused by camera shake, hand jitter, and other types of camera movement. When the camera moves, an image sensor within the camera module may be affected. Therefore, an image can become blurry if the image sensor moves while capturing light waves to generate image data.

[0017] Some implementations disclosed herein are directed toward the use of one or more piezoelectric actuators to stabilize an image sensor during camera movement in order to reduce or prevent image blur. For example, a motion sensor can be used to detect movement of the camera module, and the one or more piezoelectric actuators can be used to generate a mechanical counter-reaction (e.g., a counter-movement) to counteract the movement detected by the motion sensor. As a result, the position of the image sensor can be stabilized to reduce or prevent image blur. For example, the mechanical counter-reaction provided by the one or more piezoelectric actuators can hold the image sensor in a stable or substantially stable position to reduce or prevent image blur.

[0018] In some implementations, one or more piezoelectric sensors can be provided to supply localized feedback information to ensure that the mechanical counter-reaction is balanced with respect to the movement detected by the motion sensor.

[0019] In some implementations, one or more piezoelectric actuators can be used to provide a focusing function by moving the image sensor closer to or further away from a scene, thus bringing one or more objects in the scene into focus on the image sensor. This focusing function can be an autofocus function.

[0020] "Sensor" can refer to a component that converts a property to be measured into an electrical signal (e.g., a current signal or a voltage signal). The property to be measured can include, but is not limited to, a magnetic field, an electric field, an electromagnetic wave (e.g., a radio wave), pressure, force, current, or voltage. For a piezoelectric sensor, the property to be measured is mechanical energy, such as a mechanical force, mechanical motion, mechanical displacement, and / or mechanical deformation. The piezoelectric sensor can generate a signal, such as a voltage, when mechanical energy is applied to it based on a piezoelectric effect.Thus, a piezoelectric sensor is a device that can use the piezoelectric effect to measure mechanical changes in pressure, acceleration, strain, or force by converting a mechanical change into electrical energy.

[0021] Conversely, a piezoelectric actuator can be a transducer that converts electrical energy into mechanical energy, such as a mechanical displacement or voltage, based on a piezoelectric effect. For example, the piezoelectric actuator can directly convert electrical energy, such as a current or voltage, into linear motion. Thus, a mechanical displacement or force can be proportional to the electrical energy applied to the piezoelectric actuator.

[0022] Fig. Figure 1 illustrates a camera system 100 according to one or more implementations. The camera system 100 can include a camera module 102 and a motion sensor 104 located outside the camera module 102 (e.g., an external motion sensor). The motion sensor 104 can be electrically coupled to the camera module 102 to provide the camera module 102 with motion sensor signals corresponding to the movement. The motion sensor 104 can be a gyroscope, an accelerometer, or another type of motion detection device.

[0023] Both the camera module 102 and the motion sensor 104 can be arranged within the housing of a device, such as a camera or a mobile phone. Thus, the device can be a portable device, such as a handheld device.

[0024] The camera module 102 can include a housing 106, a lens 108, an image sensor 110, a movable substrate 112, one or more piezoelectrically actuated MEMS platforms 114, one or more piezoelectric actuators 116, and a circuit substrate 118. The lens 108 can be positioned above the image sensor 110 to focus light onto the image sensor 110.

[0025] The movable substrate 112 can include a first main surface 120 and a second main surface 122, which is arranged opposite the first main surface 120. The image sensor, which is configured to acquire image data, can be mechanically coupled to the first main surface 120.

[0026] The piezoelectrically actuated MEMS platforms 114 can be mechanically coupled to the second main surface 122 of the movable substrate 112, such that the movable substrate 112 and the piezoelectrically actuated MEMS platforms 114 are configured to move together. That is, a movement of the movable substrate 112 can cause the piezoelectrically actuated MEMS platforms 114 to move in a similar manner in size, direction, speed, and / or acceleration as the movement of the movable substrate 112, and vice versa. In some implementations, the piezoelectrically actuated MEMS platforms 114 can be coupled in series, so that each piezoelectrically actuated MEMS platform 114 can act in conjunction with other piezoelectrically actuated MEMS platforms 114.

[0027] The piezoelectric actuators 116 can be mechanically coupled to the piezoelectrically actuated MEMS platforms 114. For example, one or more piezoelectric actuators 116 can be mechanically coupled to a respective piezoelectrically actuated MEMS platform 114 to provide a mechanical response to the respective piezoelectrically actuated MEMS platform 114. By causing the piezoelectrically actuated MEMS platforms 114 to move, the piezoelectric actuators 116 can provide a mechanical response to the movable substrate 112 and ultimately to the image sensor 110. The movement detected by the motion sensor 114 can be caused by camera shake, hand jitter, or some other type of movement that may have caused image blurring, if not for the mechanical response.Thus, the mechanical counter-reaction applied to the piezoelectrically actuated MEMS platforms 114 by the piezoelectric actuators 116 can be used to stabilize the image sensor 110 if movement is detected by the motion sensor 104.

[0028] The circuit substrate 118 can include an actuation circuit that is electrically coupled to the motion sensor 104 and the piezoelectric actuators 116. The actuation circuit can receive the motion sensor signal corresponding to a movement from the motion sensor 104, generate at least one actuation signal based on the motion sensor signal, and provide this at least one actuation signal to at least one piezoelectric actuator 116 to generate the mechanical response on the movable substrate 112 in response to the movement indicated by the motion sensor signal. In other words, the piezoelectric actuators 116 can generate the mechanical response on the piezoelectrically actuated MEMS platforms 114, which is then transmitted to the movable substrate 112 via a mechanical coupling between the piezoelectrically actuated MEMS platforms 114 and the movable substrate 112.

[0029] The mechanical counter-reaction can be in the opposite direction to the movement indicated by the motion sensor signal. For example, the mechanical counter-reaction can be equal in magnitude to the movement indicated by the motion sensor signal in order to stabilize the camera system 100 in a stable position. The mechanical counter-reaction can involve a counter-movement in a lateral plane (e.g., an xy-plane) parallel to the first main surface 120. Additionally or alternatively, the mechanical counter-reaction can involve a counter-movement in a vertical plane (e.g., an xz-plane or a yz-plane) perpendicular to the first main surface 120. The actuation circuit can determine at least one magnitude, direction, velocity, or acceleration of the movement based on the motion sensor signal.Additionally, the actuating circuit can calculate the mechanical counter-reaction based on at least one of the magnitude, direction, speed, or acceleration of the movement indicated by the motion sensor signal, in order to counteract the movement indicated by the motion sensor signal.

[0030] In some implementations, each piezoelectrically actuated MEMS platform 114 can be coupled to a plurality of piezoelectric actuators 116. In this case, the actuation circuit can selectively actuate one or more of the plurality of piezoelectric actuators 116 to generate the mechanical counter-reaction at a respective piezoelectrically actuated MEMS platform 114. For example, the actuation circuit can select which piezoelectric actuators 116 to activate based on a direction of movement indicated by the motion sensor signal. For example, some piezoelectric actuators 116 can be configured to provide a counter-movement along a first axis (e.g., an x-axis), some piezoelectric actuators 116 can be configured to provide a counter-movement along a second axis (e.g., a y-axis), and some piezoelectric actuators 116 can be configured to provide a counter-movement along a second axis (e.g., a y-axis).to provide a counter-movement along a y-axis), and some piezoelectric actuators 116 can be configured to provide a counter-movement along a third axis (e.g., a z-axis). Thus, depending on the direction of movement indicated by the motion sensor signal, the mechanical counter-movement can include one or more counter-movements along the first axis, the second axis, and / or the third axis. Accordingly, the actuation circuit can generate at least one actuation signal to stabilize the movable substrate 112 and the image sensor 110. In some implementations, the actuation circuit can generate at least one actuation signal to hold the movable substrate 112 at a target position.

[0031] In some implementations, one or more of the piezoelectric actuators 116 can be used to provide a focusing function, such as an autofocus function. The movable substrate 112 can be configured to move in an out-of-plane direction (e.g., a z-direction) to change the distance between the lens 108 and the image sensor 110, thereby focusing light from the lens 108 onto the image sensor 110. The actuator circuit can actuate one or more of the piezoelectric actuators 116, which are configured to move the movable substrate 112 in the out-of-plane direction, to shift the position of the movable substrate 112 in the out-of-plane direction based on a focus control parameter.

[0032] In some implementations, the camera module 102 can include at least one piezoelectric sensor (in Fig. (1 not illustrated) which includes a circuit configured to detect a counter-movement of one or more of the piezoelectrically actuated MEMS platforms 114 corresponding to the mechanical counter-reaction, and to generate at least one sensor feedback signal based on a piezoelectric effect corresponding to the counter-movement of the one or more of the piezoelectrically actuated MEMS platforms 114. The actuator circuit can monitor the mechanical counter-reaction based on the at least one sensor feedback signal. For example, the actuator circuit can determine a displacement corresponding to the counter-movement based on the at least one sensor feedback signal, compare the displacement with a target displacement to generate a comparison result, and regulate the at least one actuator signal based on the comparison result so that the displacement equals a target displacement.Thus, the actuation circuit can generate at least one actuation signal to move one or more piezoelectrically actuated MEMS platforms 114 towards a target position based on at least one sensor feedback signal.

[0033] As stated above, Fig. 1 is provided merely as an example. Other examples may differ from what is described in relation to Fig. 1 is described. In some implementations, additional circuit components can be added without deviating from the disclosure provided above.

[0034] Fig. Figure 2 illustrates a cross-section of section 200 of a camera module according to one or more implementations. The camera module can be used in conjunction with Fig. The camera module 102 described in Section 1 can be similar. Thus, section 200 of the camera module can include the image sensor 110, the movable substrate 112, the piezoelectrically actuated MEMS platforms 114, and the piezoelectric actuators 116. Additionally, section 200 of the camera module can include columns 202 that mechanically couple each piezoelectrically actuated MEMS platform 114 to the second main surface 122 of the movable substrate 112. Thus, each piezoelectrically actuated MEMS platform 114 can be mechanically coupled to the second main surface 122 of the movable substrate 112, so that the movable substrate 112 and the piezoelectrically actuated MEMS platforms 114 are configured to move together in one or more directions. In some implementations, the movable substrate 112, the piezoelectrically actuated MEMS platforms 114 and the columns 202 can be made of silicon.In some implementations, the movable substrate 112, the piezoelectrically actuated MEMS platforms 114, and the columns 202 can form a single, integral structure. For example, the movable substrate 112, the piezoelectrically actuated MEMS platforms 114, and the columns 202 can be formed from a single block of silicon. In some implementations, the movable substrate 112, the piezoelectrically actuated MEMS platforms 114, and the columns 202 can be formed by etching the single block of silicon.

[0035] One or more actuator springs 204 can be used to couple each piezoelectric actuator 116 to a respective piezoelectrically actuated MEMS platform 114. Each piezoelectric actuator 116 can include a diaphragm, which can be coupled to one or more actuator springs 204 and driven by an actuation signal. When an actuation signal is applied to a piezoelectric actuator 116, the actuator signal can cause a deflection of the diaphragm proportional to the magnitude of the actuator signal. For example, a thin piezoelectric film, to which the actuation signal is applied, can be arranged on the diaphragm. The deflection of the diaphragm can be configured to cause a positional displacement of a respective piezoelectrically actuated MEMS platform 114 in a corresponding actuation direction.For example, the deflection of the diaphragm can cause an actuator spring 204 to move, and movement of the actuator spring 204 can cause the respective piezoelectrically actuated MEMS platform 114 to move in a corresponding actuation direction. The degree of movement can be proportional to the degree of deflection of the diaphragm. Thus, an actuation circuit 208 can apply the actuation signal to the diaphragm of a piezoelectric actuator 116 to induce the deflection of the diaphragm and cause the respective piezoelectrically actuated MEMS platform 114 to move in a corresponding actuation direction.

[0036] In some implementations, section 200 of the camera module may include one or more piezoelectric sensors 206 to provide localized feedback information to ensure that a mechanical counter-reaction with respect to the motion detected by the motion sensor 104 is balanced. Each piezoelectric sensor 206 may be configured to monitor the position of a respective piezoelectrically actuated MEMS platform 114 and / or the displacement of a diaphragm of a respective piezoelectric actuator 116. For example, a piezoelectric sensor 206 may detect a counter-movement of the respective piezoelectrically actuated MEMS platform 114 corresponding to the mechanical counter-reaction and generate at least one sensor feedback signal based on a piezoelectric effect corresponding to the counter-movement of the respective piezoelectrically actuated MEMS platform 114.The actuating circuit 208 can monitor the mechanical counter-reaction based on each sensor feedback signal. In some implementations, the actuating circuit 208 can determine a displacement corresponding to the counter-movement based on each sensor feedback signal, compare the displacement with a target displacement to generate a comparison result, and regulate one or more actuating signals based on the comparison result so that the displacement equals a target displacement. Thus, the actuating circuit 208 can generate the actuating signals to move each piezoelectrically actuated MEMS platform 114 toward a target position based on the sensor feedback signals.

[0037] In some implementations, a piezoelectric sensor 206 can detect a mechanical displacement of a respective piezoelectric actuator 116 and generate a corresponding electrical charge. The electrical charge can be used by the actuation circuit 208 to confirm whether the target displacement has been reached. If the displacement is outside the target range, the actuation circuit 208 can adjust the actuation signal to achieve the target displacement. In some implementations, a piezoelectric sensor 206 can be mechanically coupled to the respective piezoelectrically actuated MEMS platform 114 to detect movement of the respective piezoelectrically actuated MEMS platform 114. For example, movement of the respective piezoelectrically actuated MEMS platform 114 can cause a diaphragm of the piezoelectric sensor 206 to deflect, resulting in the generation of a corresponding electrical charge.

[0038] In some implementations, other types of feedback sensors can be used to provide sensor feedback signals. For example, capacitive or magnetic sensing can be used to detect the position of one or more piezoelectrically actuated MEMS platforms 114 or the position of the moving substrate 112.

[0039] As stated above, Fig. 2 is provided as an example. Other examples may differ from what is provided in relation to Fig. 2 is described. In some implementations, additional circuit components can be added without deviating from the disclosure provided above.

[0040] Fig. Figure 3 illustrates a schematic block diagram of a control circuit 300 according to one or more implementations. The camera module can be used in conjunction with Fig. 1 and Fig. The control circuit 300 described in Section 2 (e.g., actuation circuit 208) may be similar. The control circuit 300 may include a compensation component 302, a piezoelectric actuator controller 304, one or more analog-to-digital converters (ADCs) 306, and a processing circuit 308 (e.g., a processor). The ADCs 306 can sample sensor feedback signals received from one or more piezoelectric sensors 206. The processing circuit 308 can process digital signals from the ADCs 306 to determine a displacement corresponding to one or more counter-movements and generate a position signal representative of the displacement. The compensation component 302 can receive the motion sensor signal and the position signal and determine a difference value (e.g., an error value) between the motion sensor signal and the position signal.The piezoelectric actuator 304 can regulate one or more actuation signals based on the differential value, so that the displacement equals a target displacement. Thus, the piezoelectric actuator 304 can use the differential value as a comparison result to move the movable substrate 112 towards a target position, to counteract any movement detected by the motion sensor 104, and to stabilize the image sensor 110.

[0041] As stated above, Fig. 3 is provided as an example. Other examples may differ from what is provided in relation to Fig. 3 is described. In some implementations, additional circuit components can be added without deviating from the disclosure provided above.

[0042] Fig. Figure 4 illustrates a platform layer 400 of a camera module according to one or more implementations. The camera module can be used in conjunction with Fig. The platform layer 400 can be similar to the camera module 102 described in Section 1. The platform layer 400 can include a fixed frame 402 and a plurality of piezoelectrically actuated MEMS platforms 114 configured to move in a lateral plane (e.g., an xy-plane). Each piezoelectrically actuated MEMS platform 114 can be attached to a respective column 202. Additionally, each piezoelectrically actuated MEMS platform 114 can be mechanically coupled to the fixed frame 402 by a plurality of anchors 404 or other fastening structures. Thus, each piezoelectrically actuated MEMS platform 114 can move together with the movable substrate 112 along the first axis (e.g., the x-axis) and the second axis (e.g., the y-axis).

[0043] Each piezoelectrically actuated MEMS platform 114 can be coupled to one or more piezoelectric actuators 116x. The piezoelectric actuators 116x can be configured to provide an initial mechanical response to the movable substrate 112 by moving each piezoelectrically actuated MEMS platform along the first axis. Thus, the piezoelectric actuators 116x can be configured to provide lateral movement along the first axis. The piezoelectric actuators 116x can be coupled to the frame 402 and the piezoelectrically actuated MEMS platforms 114 by actuator springs 204. The piezoelectric actuators 116x can be configured to assist each other in providing the initial mechanical response to the movable substrate 112 by moving each piezoelectrically actuated MEMS platform 114 along the first axis.

[0044] Additionally, each piezoelectrically actuated MEMS platform 114 can be coupled to one or more piezoelectric actuators 116y. The piezoelectric actuators 116y can be configured to provide a second mechanical counter-response to the movable substrate 112 by moving each piezoelectrically actuated MEMS platform along the second axis. Thus, the piezoelectric actuators 116y can be configured to provide lateral movement along the second axis. The piezoelectric actuators 116y can be coupled to the frame 402 and the piezoelectrically actuated MEMS platforms 114 by actuator springs 204. The piezoelectric actuators 116y can be configured to assist each other in providing the second mechanical counter-response to the movable substrate 112 by moving each piezoelectrically actuated MEMS platform 114 along the second axis.

[0045] The actuation circuit 208 can selectively control each of the piezoelectric actuators 116x and each of the piezoelectric actuators 116y via actuation signals to generate the first mechanical counter-reaction and the second mechanical counter-reaction to counteract the movement indicated by the motion sensor signal along both the first axis and the second axis.

[0046] Additionally, the platform layer 400 can incorporate a variety of piezoelectric sensors 206. Each piezoelectric sensor 206 can detect a mechanical displacement of a corresponding piezoelectric actuator 116 located adjacent to the piezoelectric sensor 206 and generate a sensor feedback signal based on the mechanical displacement. The actuation circuit 208 can receive the sensor feedback signals from the piezoelectric sensors 206, determine a displacement corresponding to a counter-movement based on the sensor feedback signals, compare the displacement with a target displacement to generate a comparison result, and regulate one or more of the actuation signals based on the comparison result so that the displacement equals a target displacement.

[0047] As stated above, Fig. 4 is provided as an example. Other examples may differ from what is provided in relation to Fig. 4 is described. In some implementations, additional circuit components can be added without deviating from the disclosure provided above.

[0048] Fig. Figure 5 illustrates a platform layer 500 of a camera module according to one or more implementations. The camera module can be used in conjunction with Fig. The platform layer 500 can be similar to the camera module 102 described in Section 1. The platform layer 500 can include a fixed frame 502, a plurality of piezoelectrically actuated MEMS platforms 114 configured to move in a lateral plane (e.g., an xy-plane), and a plurality of piezoelectrically actuated MEMS platforms 504 configured to move in a vertical plane (e.g., the xz-plane or the yz-plane). In other words, the plurality of piezoelectrically actuated MEMS platforms 504 can be configured to move in a vertical direction (e.g., a z-direction) along a third axis (e.g., the z-axis).

[0049] Each piezoelectrically actuated MEMS platform 504 can be attached to a respective column 202 and can further be attached to a respective piezoelectrically actuated MEMS platform 114. For example, a piezoelectrically actuated MEMS platform 504 can be attached to a respective piezoelectrically actuated MEMS platform 114 by one or more bending beams 506.

[0050] Thus, each piezoelectrically actuated MEMS platform 114 can move together with the movable substrate 112 along the first axis (e.g., the x-axis) and the second axis (e.g., the y-axis), and each piezoelectrically actuated MEMS platform 504 can move together with the movable substrate 112 along the third axis (e.g., the z-axis). As a result, the movable substrate 112 can move in three dimensions.

[0051] Each piezoelectrically actuated MEMS platform 114 can be coupled with one or more piezoelectric actuators 116x and with one or more piezoelectric actuators 116y, similar to the connection with Fig. 4 described.

[0052] Each piezoelectrically actuated MEMS platform 504 can be coupled to one or more piezoelectric actuators 116z. The piezoelectric actuators 116z can be configured to provide a third mechanical counter-reaction to the movable substrate 112 by displacing a respective piezoelectrically actuated MEMS platform along the third axis. Thus, the piezoelectric actuators 116y can be configured to provide vertical movement along the third axis. A membrane of each piezoelectric actuator 116z can be coupled to a respective piezoelectrically actuated MEMS platform 114 by means of a bending beam 506. Since a membrane of a piezoelectric actuator 116z is subject to mechanical deflection, vertical movement can be induced using the bending beam 506.The piezoelectric actuators 116z can be configured to assist each other in providing the third mechanical counter-reaction to the movable substrate 112 by moving a respective piezoelectrically actuated MEMS platform 504 along the third axis.

[0053] The actuation circuit 208 can generate actuation signals to be applied to the piezoelectric actuators 116z based on a motion sensor signal, and apply the actuation signals to the piezoelectric actuators 116z to generate the third mechanical counter-reaction in response to the movement indicated by the motion sensor signal.

[0054] Additionally, the platform layer 500 can incorporate a variety of piezoelectric sensors 508. Each piezoelectric sensor 508 can detect a mechanical displacement of a corresponding piezoelectric actuator 116z located adjacent to the piezoelectric sensor 508 and generate a sensor feedback signal based on the mechanical displacement. The actuation circuit 208 can receive the sensor feedback signals from the piezoelectric sensors 508, determine a displacement corresponding to a counter-movement based on the sensor feedback signals, compare the displacement with a target displacement to generate a comparison result, and regulate one or more of the actuation signals based on the comparison result so that the displacement equals a target displacement.

[0055] In some implementations, the actuating circuit 208 can use the piezoelectric actuators 116z to perform a focusing function, such as an autofocus function. For example, the movable substrate 112 can be configured to move in an out-of-plane direction (e.g., a vertical or z-direction) to change the distance between the lens 108 and the image sensor 110, thus focusing light from the lens 108 onto the image sensor 110. The actuating circuit 208 can actuate one or more of the piezoelectric actuators 116z to move the position of the piezoelectrically actuated MEMS platforms 504 in the out-of-plane direction based on a focus control parameter. The focus control parameter can correspond to the autofocus function.Thus, by moving the piezoelectrically actuated MEMS platforms 504 in the direction outside the plane, the position of the movable substrate 112 can also be moved in the direction outside the plane.

[0056] As stated above, Fig. 5 is provided as an example. Other examples may differ from what is provided in relation to Fig. 5 is described. In some implementations, additional circuit components can be added without deviating from the disclosure provided above.

[0057] The following provides an overview of some aspects of the present revelation: Aspect 1: a camera module comprising: a movable substrate comprising a first principal surface and a second principal surface arranged opposite the first principal surface; an image sensor configured to acquire image data, wherein the image sensor is mechanically coupled to the first principal surface; a piezoelectrically actuated microelectromechanical systems (MEMS) platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the piezoelectrically actuated MEMS platform are configured to move together; at least one piezoelectric actuator coupled to the piezoelectrically actuated MEMS platform, wherein the at least one piezoelectric actuator is configured to provide a mechanical counter-response to the piezoelectrically actuated MEMS platform;and an actuation circuit configured to receive a motion sensor signal corresponding to a movement, to generate at least one actuation signal based on the motion sensor signal, and to provide the at least one actuation signal to the at least one piezoelectric actuator to generate the mechanical counter-response at the piezoelectrically actuated MEMS platform in response to the movement indicated by the motion sensor signal. Aspect 2: Camera module according to aspect 1, wherein the actuation circuit is configured to receive the motion sensor signal from a motion sensor. Aspect 3: Camera module according to one of aspects 1-2, wherein the mechanical counter-reaction of the movement indicated by the motion sensor signal is in the opposite direction. Aspect 4: Camera module according to aspect 3, where the mechanical counter-reaction is equal in magnitude to the movement indicated by the motion sensor signal. Aspect 5: Camera module according to one of aspects 1-4, wherein the mechanical counter-reaction involves a counter-movement in a lateral plane that is parallel to the first main surface. Aspect 6: Camera module according to one of aspects 1-5, wherein the mechanical counter-reaction involves a counter-movement in a vertical plane that is perpendicular to the first main surface. Aspect 7: Camera module according to one of aspects 1-6, wherein the actuation circuit is configured to determine at least one of the magnitude, direction, velocity or acceleration of the movement based on the motion sensor signal and to calculate the mechanical counter-reaction based on the at least one of the magnitude, direction, velocity or acceleration of the movement indicated by the motion sensor signal. Aspect 8: Camera module according to one of aspects 1-7, wherein the piezoelectrically actuated MEMS platform is coupled to a plurality of piezoelectric actuators, and wherein the actuation circuit is configured to selectively actuate one or more of the plurality of piezoelectric actuators to generate the mechanical counter-reaction at the piezoelectrically actuated MEMS platform. Aspect 9: Camera module according to one of aspects 1-8, wherein the actuation circuit is configured to generate the at least one actuation signal to stabilize the movable substrate and the image sensor. Aspect 10: Camera module according to one of aspects 1-9, wherein the actuation circuit is configured to generate at least one actuation signal to hold the movable substrate at a target position. Aspect 11: Camera module according to any of aspects 1-10, further comprising: one or more actuator springs, wherein each actuator spring is coupled to the piezoelectrically actuated MEMS platform and to a respective piezoelectric actuator of the at least one piezoelectric actuator, wherein each piezoelectric actuator comprises a diaphragm coupled to a respective actuator spring, wherein a deflection of the diaphragm is configured to cause a positional displacement of the piezoelectrically actuated MEMS platform in a corresponding actuation direction, and wherein the actuator circuit is configured to apply an actuation signal to the diaphragm of a piezoelectric actuator to induce the deflection of the diaphragm. Aspect 12: Camera module according to any of aspects 1-11, further comprising: a lens arranged above the image sensor, wherein the movable substrate is configured to move in an out-of-plane direction to change a distance between the lens and the image sensor to focus light from the lens onto the image sensor, wherein the actuator circuit is configured to actuate one or more of the at least one piezoelectric actuator to move a position of the piezoelectrically actuated MEMS platform in the out-of-plane direction based on a focus control parameter. Aspect 13: Camera module according to any of aspects 1-12, further comprising: at least one piezoelectric sensor configured to detect a counter-movement of the piezoelectrically actuated MEMS platform corresponding to the mechanical counter-reaction, and to generate at least one sensor feedback signal based on a piezoelectric effect corresponding to the counter-movement of the piezoelectrically actuated MEMS platform, wherein the actuator circuit is configured to monitor the mechanical counter-reaction based on the at least one sensor feedback signal. Aspect 14: Camera module according to aspect 13, wherein the actuation circuit is configured to determine a displacement corresponding to the counter-movement based on the at least one sensor feedback signal, to compare the displacement with a target displacement to generate a comparison result, and to regulate the at least one actuation signal based on the comparison result so that the displacement equals a target displacement. Aspect 15: Camera module according to aspect 13, wherein the actuation circuit is configured to generate the at least one actuation signal to move the piezoelectrically actuated MEMS platform towards a target position based on the at least one sensor feedback signal. Aspect 16: Camera module, comprising: a movable substrate comprising a first principal surface and a second principal surface arranged opposite the first principal surface; an image sensor configured to acquire image data, the image sensor being mechanically coupled to the first principal surface; a first piezoelectrically actuated microelectromechanical systems (MEMS) platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the first piezoelectrically actuated MEMS platform are configured to move together along a first axis and a second axis perpendicular to the first axis;a first piezoelectric actuator coupled to the first piezoelectrically actuated MEMS platform, wherein the first piezoelectric actuator is configured to provide a first mechanical counter-reaction to the moving substrate by moving the first piezoelectrically actuated MEMS platform along the first axis; a second piezoelectric actuator coupled to the first piezoelectrically actuated MEMS platform, wherein the second piezoelectric actuator is configured to provide a second mechanical counter-reaction to the moving substrate by moving the first piezoelectrically actuated MEMS platform along the second axis;and an actuation circuit configured to receive at least one motion sensor signal indicating movement, to generate a first actuation signal based on the at least one motion sensor signal, to generate a second actuation signal based on the at least one motion sensor signal, to apply the first actuation signal to the first piezoelectric actuator to generate the first mechanical counter-response in response to the movement indicated by the at least one motion sensor signal, and to apply the second actuation signal to the second piezoelectric actuator to generate the second mechanical counter-response in response to the movement indicated by the at least one motion sensor signal. Aspect 17: Camera module according to aspect 16, further comprising: a first piezoelectric sensor configured to detect a first mechanical deflection of the first piezoelectric actuator corresponding to the first mechanical counter-reaction, and to generate a first sensor feedback signal based on the first mechanical deflection;and a second piezoelectric sensor configured to detect a second mechanical displacement of the second piezoelectric actuator corresponding to the second mechanical counter-reaction, and to generate a second sensor feedback signal based on the second mechanical displacement, wherein the actuation circuit is configured to receive the first sensor feedback signal and the second sensor feedback signal, to determine a displacement corresponding to a counter-movement based on the first sensor feedback signal and the second sensor feedback signal, to compare the displacement with a target displacement to generate a comparison result, and to regulate at least one of the first actuation signal or the second actuation signal based on the comparison result so that the displacement equals a target displacement. Aspect 18: Camera module according to one of Aspects 16-17, further comprising: a second piezoelectrically actuated MEMS platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the second piezoelectrically actuated MEMS platform are configured to move together along a third axis perpendicular to the first and second axes;and a third piezoelectric actuator coupled to the second piezoelectrically actuated MEMS platform, wherein the third piezoelectric actuator is configured to provide a third mechanical counter-reaction to the movable substrate by moving the second piezoelectrically actuated MEMS platform along the third axis, wherein the actuation circuit is configured to generate a third actuation signal based on the at least one motion sensor signal and to apply the third actuation signal to the third piezoelectric actuator to generate the third mechanical counter-reaction in response to the movement indicated by the at least one motion sensor signal. Aspect 19: Camera module according to aspect 18, further comprising: a first piezoelectric sensor configured to detect a first mechanical displacement of the first piezoelectric actuator corresponding to the first mechanical reaction and to generate a first sensor feedback signal based on the first mechanical displacement; a second piezoelectric sensor configured to detect a second mechanical displacement of the second piezoelectric actuator corresponding to the second mechanical reaction and to generate a second sensor feedback signal based on the second mechanical displacement; and a third piezoelectric sensor configured to detect a third mechanical displacement of the third piezoelectric actuator corresponding to the third mechanical reaction and to generate a third sensor feedback signal based on the third mechanical displacement.wherein the actuation circuit is configured to receive the first sensor feedback signal, the second sensor feedback signal, and the third sensor feedback signal, to determine a displacement corresponding to a counter-movement based on the first sensor feedback signal, the second sensor feedback signal, and the third sensor feedback signal, to compare the displacement with a target displacement to generate a comparison result, and to regulate at least one of the first actuation signal, the second actuation signal, or the third actuation signal based on the comparison result such that the displacement equals a target displacement. Aspect 20: Camera module according to aspect 18, wherein the second piezoelectrically actuated MEMS platform is mechanically coupled to the first piezoelectrically actuated MEMS platform. Aspect 21: Camera module according to one of aspects 16-20, further comprising: a second piezoelectrically actuated MEMS platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the second piezoelectrically actuated MEMS platform are configured to move together along a third axis perpendicular to the first and second axes;and a third piezoelectric actuator coupled to the second piezoelectrically actuated MEMS platform, wherein the third piezoelectric actuator is configured to move the second piezoelectrically actuated MEMS platform along the third axis, wherein the actuation circuit is configured to generate a third actuation signal based on an autofocus function and to apply the third actuation signal to the third piezoelectric actuator to move the second piezoelectrically actuated MEMS platform along the third axis. Aspect 22: Camera module according to any of Aspects 16-21, further comprising: a second piezoelectrically actuated MEMS platform mechanically coupled to the second principal surface of the movable substrate such that the movable substrate and the second piezoelectrically actuated MEMS platform are configured to move together along the first and second axes; a third piezoelectric actuator coupled to the second piezoelectrically actuated MEMS platform, wherein the third piezoelectric actuator is configured to assist in providing the first mechanical counter-reaction to the movable substrate by moving the second piezoelectrically actuated MEMS platform along the first axis; and a fourth piezoelectric actuator coupled to the second piezoelectrically actuated MEMS platform, wherein the second piezoelectric actuator is configuredto assist in providing the second mechanical counter-reaction to the moving substrate by moving the second piezoelectrically actuated MEMS platform along the second axis, the actuation circuit being configured to generate a third actuation signal based on the at least one motion sensor signal, to generate a fourth actuation signal based on the at least one motion sensor signal, to apply the third actuation signal to the third piezoelectric actuator to generate the first mechanical counter-reaction in response to the movement indicated by the at least one motion sensor signal, and to apply the fourth actuation signal to the fourth piezoelectric actuator to generate the second mechanical counter-reaction in response to the movement indicated by the at least one motion sensor signal. Aspect 23: Camera module according to any of aspects 16-22, further comprising: a first feedback sensor configured to detect a first counter-movement of the piezoelectrically actuated MEMS platform corresponding to the first mechanical counter-reaction, and to generate a first sensor feedback signal based on the first counter-movement of the piezoelectrically actuated MEMS platform;and a second feedback sensor configured to detect a second counter-movement of the piezoelectrically actuated MEMS platform corresponding to the second mechanical counter-reaction, and to generate a second sensor feedback signal based on the second counter-movement of the piezoelectrically actuated MEMS platform, wherein the actuation circuit is configured to determine a displacement corresponding to the first counter-movement and the second counter-movement based on the first sensor feedback signal and the second sensor feedback signal, to compare the displacement with a target displacement to generate a comparison result, and to regulate the first actuation signal and the second actuation signal based on the comparison result so that the displacement equals a target displacement. Aspect 24: Method for stabilizing the position of an image sensor, comprising: determining, by means of an actuating circuit, a mechanical counter-reaction based on a motion sensor signal corresponding to a movement detected by a motion sensor, wherein the mechanical counter-reaction is in the opposite direction to the movement indicated by the motion sensor signal; generating, by means of the actuating circuit, an actuating signal based on the mechanical counter-reaction; and providing, by means of the actuating circuit, the actuating signal to a piezoelectric actuator coupled to a piezoelectrically actuated microelectromechanical systems (MEMS) platform, wherein the actuating of the piezoelectric actuator causes a positional displacement of the piezoelectrically actuated MEMS platform to generate the mechanical counter-reaction.Aspect 25: System that is configured to perform one or more operations listed in one or more of Aspects 1-24. Aspect 26: Device comprising means for carrying out one or more operations listed in one or more of Aspects 1-24. Aspect 27: Non-volatile computer-readable medium storing a set of instructions, wherein the set of instructions comprises one or more instructions which, when executed by a device, cause the device to perform one or more operations listed in one or more of Aspects 1-24. Aspect 28: Computer program product, comprising instructions or code for performing one or more operations listed in one or more of Aspects 1-24.

[0058] The foregoing disclosure provides illustration and description but is not intended to be exhaustive or to restrict the implementations to the exact form disclosed. Modifications and variations are possible in light of the above disclosure or may be derived from the execution of the implementations.

[0059] Some implementations can be described herein in connection with thresholds. As used herein, "meeting" a threshold may refer to a value that is greater than the threshold, higher than the threshold, greater than or equal to the threshold, less than the threshold, less than the threshold, lower than the threshold, less than or equal to the threshold, equal to the threshold, or the like.

[0060] As used herein, the term "component" shall be understood generally to mean hardware, firmware, or a combination of hardware and software. It is obvious that systems and / or procedures described herein may be implemented in various forms of hardware, firmware, or a combination of hardware and software. The actual specialized control hardware or software code used to implement these systems and / or procedures does not limit the implementations. Thus, the operation and behavior of the systems and / or procedures have been described herein without reference to specific software code—it is understood that software and hardware may be designed to implement the systems and / or procedures based on the description herein.

[0061] Each of the processing components can be implemented as a central processing unit (CPU) or another type of processor that reads and executes a software program from a non-volatile, computer-readable recording medium, such as a hard disk or semiconductor storage device. For example, instructions can be executed by one or more processors, such as one or more CPUs, digital signal processors (DSPs), general-purpose microprocessors, application-specific integrated circuits (ASICs), field-programmable logic arrays (FPLAs), programmable logic controllers (PLCs), or other equivalent integrated or discrete logic circuits. Accordingly, the term "processor," as used herein, refers to any of the foregoing structures or any other structure suitable for implementing the techniques described herein.Software can be stored on a non-volatile, computer-readable medium such that the non-volatile, computer-readable medium contains program code or a program algorithm stored on it which, when executed, causes the processor to perform the steps of a procedure via a computer program.

[0062] A controller incorporating hardware can also perform one or more of the techniques described in this disclosure. A controller incorporating one or more processors can use electrical signals and digital algorithms to perform its acquisition, analysis, and control functions, which may further include correction functions. Such hardware, software, and firmware can be implemented within the same device or within separate devices to support the various techniques described in this disclosure.

[0063] A signal processing circuit and / or a signal conditioning circuit can receive one or more signals (e.g., measurement signals) from one or more components in the form of raw measurement data and can derive further information from the measurement signal. Signal conditioning, as used herein, refers to manipulating an analog signal in such a way that the signal meets the requirements of a subsequent processing stage. Signal conditioning can include analog-to-digital conversion (e.g., via an analog-to-digital converter), amplification, filtering, conversion, biasing, range matching, isolation, and any other processes necessary to make a signal suitable for processing after conditioning.

[0064] Even if certain combinations of features are listed in the claims and / or disclosed in the patent specification, these combinations are not intended to limit the disclosure of implementations described herein. Many of these features can be combined in ways not expressly listed in the claims and / or disclosed in the patent specification. For example, the disclosure includes each dependent claim in a set of claims in combination with each other individual claim in that set of claims and each combination of several claims in that set of claims. As used herein, a phrase referring to "at least one of" a list of elements refers to each combination of those elements, including individual elements. As an example, "at least one of: a, b, or c" is intended to cover a, b, c, a + b, a + c, b + c, and a + b + c, as well as each combination with multiples of the same element (e.g.,a + a, a + a + a, a + a + b, a + a + c, a + b + b, a + c + c, b + b, b + b + b, b + b + c, c + c and c + c + c or any other order of a, b and c).

[0065] Furthermore, it is understood that the disclosure of multiple acts or functions in the patent specification or in the claims should not be interpreted as being in a specific order. Therefore, the disclosure of multiple acts or functions does not restrict them to a particular order unless such acts or functions are not interchangeable for technical reasons. Furthermore, in some implementations, a single act may comprise or be broken down into multiple sub-acts. Such sub-acts may be included and form part of the disclosure of that single act unless they are expressly excluded.

[0066] No element, action, or instruction used herein should be construed as critical or material unless expressly described as such. Furthermore, as used herein, the article "the" should include one or more elements referred to in conjunction with the article "the" and may be used interchangeably with "the one or several." Also, as used herein, the terms "has," "have," "having," or the like should be open terms that do not restrict any element they modify (e.g., an element "having" A may also have B). Furthermore, the phrase "based on" should mean "at least partly based on" unless expressly stated otherwise. As used herein, the term "several" may be replaced by "a multitude of" and vice versa.Furthermore, as used herein, the term “or” is to be inclusive when used in a series and can be used interchangeably with “and / or” unless expressly stated otherwise (e.g. when used in combination with “either” or “only one of”).

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