SYSTEM FOR DETECTING POSITION RELATIONSHIPS

Abstract

A system for detecting position relationships 50 comprises a measuring unit 51, which measures a position relationship; a recording unit 52, which records measurement data received from the measuring unit 51 in a time series; and a processing unit 53. The processing unit 53 acquires target time series data, which are the time series data of specific detection target sets that indicate the position relationship, based on the measurement data recorded by the recording unit 52. The processing unit 53 identifies a first peak and a second peak, which are two from a plurality of peaks of a target oscillation, which is the oscillation of the detection target sets that appear in the target time series data.The computing unit 53 calculates an average value of the acquisition target sets contained in the target time series data between the first peak and the second peak, as a static acquisition target set, which is an acquisition target set after the target oscillation has ceased.

Description

The present invention relates to a positional relationship recognition system that recognizes a relative positional relationship between a holding part and a transfer destination in a transport device, including a transport device that holds and transports a transport object with the holding part and the transfer destination to which the transport object is transferred from the transport device.An example of the above-described positional relationship recognition system is disclosed in JP 6 146 537 B1. Hereinafter, in the description of the related art, reference numerals of JP 6 146 537 B1 are given in brackets. The transport device described in JP 6 146 537 B1 includes a ceiling vehicle (10) that receives and transports a transport object having a holding part (15), and a loading opening (3) at which the transport object is transferred by the ceiling vehicle (10). The positional relationship recognition system described in JP 6 146 537 B1 is also configured to recognize a relative positional relationship between the holding part (15) and the loading port (3) using a teaching unit (20) mounted on the ceiling vehicle (10). Specifically, the actual position of the holding part (15) in a case where the reference position of the charging port (3) is set as the origin with the teaching unit (20) disposed above the charging port (3), and the rotation angle and the inclination angle of the holding part (15) with respect to a reference surface of the charging port (3) are detected as a detection target amount indicating the positional relationship.Meanwhile, vibration may occur in the detection target amount indicating the relative positional relationship between the holding part and the transfer target point (the loading port in JP 6 146 537 B1). For example, as described in paragraph 0028 and FIG. 6 of JP 6 146 537 B1, in a case where the teaching unit is shaken over the charging port, vibration occurs in the detection target amount. According to JP 6 146 537 B1, in a case where vibration occurs in the detection target amount as described above, the detection target amount can be accurately determined by obtaining the average value of the amplitude of the detection target amount.Although JP 6 146 537 B1 does not disclose a method for obtaining the average value of the amplitude of the detection target amount, it is conceivable that the average value of the amplitude of the detection target amount is obtained by, for example, calculating the temporal average value of the detection target amounts. However, the temporal average value may vary depending on a time range over which the average value is determined. Therefore, it is possible that the average value of the amplitude of the detection target (in other words, the static detection target value, i.e., the detection target value after the vibration is ended) cannot be accurately determined when only the temporal average value of the detection target values is obtained.Therefore, it is desirable to realize a technique that easily improves the accuracy of the derived static detection target amount even in a case where vibration occurs in the detection target amount indicating the relative positional relationship between the holding part and the transfer target point.The positional relationship recognition system according to the present disclosure is a positional relationship recognition system that recognizes a relative positional relationship between a holding part and a delivery target point in a transport facility including a transport device configured to hold a transport object with the holding part to transport the transport object and the delivery target point to which the transport object is delivered by the transport device, wherein the positional relationship recognition system includes a measurement unit configured to measure the positional relationship, a recording unit configured to record the measurement data obtained from the measurement unit in a time series, and a calculation unit in which the calculation unit includes target time series data that is time series data of specific detection target amounts indicating the positional relationship, on the basis of the measurement data recorded by the measurement unit, and a calculation unit in which the calculation unit acquires target time series data that is time series data of specific acquisition target amounts indicating the positional relationship on the basis of the measurement data recorded in the recording unit, identifies a first peak and a second peak that are two of a plurality of peaks of a target vibration that is a vibration of the acquisition target amounts appearing in the target time series data, and calculates an average value of the acquisition target amounts included in the target time series data between the first peak and the second peak as a static acquisition target amount that is an acquisition target amount after the target vibration has ceased.According to the present configuration, when the temporal average value of the detection target amounts is obtained as a static detection target amount which is the detection target amount after the vibration of the detection target amount has ceased, the average value is obtained using the target time series data between the first peak and the second peak as a target. In this way, the number of data points distorted toward the positive side with respect to the average value of the amplitude and the number of data points distorted toward the negative side with respect to the average value of the amplitude included in the target time series data which is a target for obtaining the average value can be made equivalent (equal or approximately equal). This facilitates suppression of distortion of the average value of the detection target amounts on the positive or negative side with respect to the average value of the amplitude. Accordingly, it is easier to improve the accuracy of the static detection target amount derived from the calculation unit.Further features and advantages of the system for recognizing positional relationships will become apparent from the following description of an embodiment which is explained with reference to the drawings, wherein FIG. 1 is a diagram showing a transport device according to an embodiment; FIG. 2 is a diagram showing a transport device according to the embodiment; FIG. 3 is a block diagram showing a positional relationship recognition system according to this embodiment; FIG. 4 is a diagram showing a detection unit and a detected unit according to the embodiment; FIG. 5 is a diagram showing the detection unit and the detected unit according to the embodiment; FIG. 6 is a perspective view of the detected unit according to the embodiment; FIG. 7 is an explanatory diagram for an X-direction distance, a Y-direction distance, and a Z-axis rotation angle; FIG. 8 is an explanatory diagram for a distance in the Z direction and an inclination angle in the X direction; FIG. 9 is an explanatory diagram for the distance in the Z direction and an inclination angle in the Y direction; FIG. 10 is a diagram showing an example of time-series data of a detection target amount; and FIG. 11 is a diagram showing another example of the time-series data of the detection target amount.An embodiment of a position relationship recognition system will be described with reference to the drawings. As illustrated in FIG. 3, the positional relationship recognition system 50 includes a measurement unit 51, a recording unit 52, and a calculation unit 53. In the present embodiment, a detection unit 60 (see FIGS. 4 and 5 ) described below includes the measurement unit 51, the recording unit 52, and the calculation unit 53 provided in the positional relationship recognition system 50. In contrast to such a configuration, it is also possible to adopt a configuration in which the measurement unit 51, the recording unit 52, and the calculation unit 53 are separately provided in a plurality of hardware components. For example, it is possible to adopt a configuration in which the measurement unit 51 and the recording unit 52 are provided in the detection unit 60 and the calculation unit 53 is provided in the transport device 1 described below (see FIGS. 1 and 2 ). In this case, the function of the calculation unit 53 is realized by, for example, a control unit 30 (see FIG. 2 ) that controls the transport device 1.The positional relationship recognition system 50 is used in the transport device 100 shown in FIG. 1. The transport device 100 includes a transport device 1 that holds and transports a transport object 2 by means of a holding part 10, and a transfer destination point 6 to which the transport object 2 is transferred from the transport device 1. The positional relationship recognition system 50 recognizes the relative positional relationship between the holding part 10 and the transfer destination 6 in the transport device 100. The transport object 2 is, for example, a front opening unified pod (FOUP) that accommodates a semiconductor wafer. In addition, the transfer point 6 is, for example, a loading port of a processing device 5 that processes the transport object 2 (or the contents accommodated in the transport object 2), an input / output port or an input / output conveyor of a storage device that stores the transport object 2, or a storage shelf that temporarily stores the transport object 2. The storage shelf is arranged, for example, above (Z 1) the loading opening of the processing device 5.Hereinafter, a direction along an up-down direction (vertical direction) is referred to as a Z direction, a direction perpendicular to the Z direction is referred to as an X direction, and a direction perpendicular to both the Z direction and the X direction is referred to as a Y direction. In addition, one side in the X direction is referred to as a first side in the X direction X 1, and the other side in the X direction is referred to as a second side in the X direction X 2. Moreover, one side in the Y direction is referred to as a first side in the Y direction Y 1 and the other side in the Y direction is referred to as a second side in the Y direction Y 2. In the present specification, the term "along a direction(s)" is not limited to a side parallel to the direction, but also includes a side that is slightly inclined with respect to the direction.The transport device 1 according to the present embodiment illustrated in FIGS. 1 and 2 is configured as follows. The transport device 1 includes a traveling unit 41 that moves along a traveling path, and a body 44 connected to the traveling unit 41. the body 44 is supported by the traveling unit 41 and is disposed below (Z 2) the traveling unit 41. The transport object 2 is transported by the transport device 1 while being accommodated in the body 44 (specifically, in an inner space of a cover part 45 provided in the body 44).The travel path on which the travel unit 41 moves is formed by a rail 4. The traveling unit 41 includes a wheel 43 that rolls on a traveling surface (here, the upper surface) of the rail 4. Since the wheel 43 is rotated by a travel drive motor 42 (e.g., an electric motor such as a servo motor), the travel unit 41 travels along the rail 4.The transport device 1 is configured to transfer the transport object 2 to the transfer destination 6 by lowering the holding part 10 (in particular, the holding part 10 holding the transport object 2). As illustrated in FIGS. 4 and 5, a positioning mechanism 7 that engages a lower part of the transport object 2 to position the transport object 2 is provided at the transfer target point 6. The transport object 2 transported from the holding part 10 to the transfer destination 6 is placed at the transfer destination 6 while being positioned by the positioning mechanism 7. In FIG. 1, the positioning mechanism 7 is not shown.In the examples illustrated in FIGS. 4 and 5, the positioning mechanism 7 is configured to engage a lower portion of the lower part of the transport object 2 to position the transport object 2. Specifically, the positioning mechanism 7 includes a kinematic pin that engages with a recessed portion (e.g., a groove-shaped recessed portion) (not illustrated) formed at the lower portion of the transport object 2 and is configured to position the transport object 2 by engaging the kinematic pin with the recessed portion. The configuration of the positioning mechanism 7 is not limited thereto, and it is also possible to adopt, for example, a configuration in which the positioning mechanism 7 engages with an outer edge of the lower part of the transport object 2 to position the transport object 2.The transport device 1 includes a raising and lowering device 20 that raises and lowers the holding member 10. The configuration of the raising and lowering device 20 is not limited to this, but in the present embodiment, the raising and lowering device 20 is configured as follows. As illustrated in FIG. 2, the raising and lowering device 20 includes a rotating body 21 (e.g., a drum), a windable member 22 (e.g., a belt or a wire) wound around the rotating body 21 to be freely wound and unwound, and a raising and lowering drive motor 23 (e.g., an electric motor such as a servomotor) that rotates the rotating body 21. The raising and lowering device 20 is configured to raise and lower the holding part 10 by winding and unwinding the windable member 22 by the rotation of the rotating body 21, the holding part 10 being suspended from the windable member 22. Specifically, the raising and lowering device 20 raises the holding part 10 by winding the windable member 22, and lowers the holding part 10 by unwinding the windable member 22.In a case where the transport device 1 performs a travel operation along the travel path, the holding part 10 is disposed at a travel height. Here, the travel height refers to the height at which the transport object 2 held by the holding part 10 is accommodated in the body 44 (see FIG. 2 ). If the transport object 2 is moved between the holding part 10 and the transfer destination 6, the holding part 10 is located at a transfer height. The transfer height is a height corresponding to the transfer target point 6 (see FIG. 1 ) and is set corresponding to the height of the transfer target point 6.As illustrated in FIGS. 1 and 2, the holding part 10 is configured to hold the transport object 2 from above (Z 1). Specifically, the holding part 10 holds the transport object 2 by supporting a flange portion 2 aformed on the upper part of the transport object 2 with a support member 11. The transport device 1 includes a holding drive motor (e.g., an electric motor such as a servomotor) (not illustrated) that drives the holding part 10. A holding operation for holding the transport object 2 and a holding releasing operation for releasing the holding of the transport object 2 are performed by driving the holding part 10 with the holding drive motor. In the example illustrated in FIG. 2, the holding drive motor is configured such that the pair of support members 11 are brought close to each other and separated from each other. Then, the holding operation by the holding part 10 is performed by bringing the pair of support members 11 close to each other, and the holding releasing operation by the holding part 10 is performed by separating the pair of support members 11 from each other. The holding operation and the holding releasing operation are performed when the holding member 10 is at the transfer height.Although not illustrated, the transport device 1 may include an adjustment device that adjusts at least one of the positions of the holding part 10 in a horizontal direction, the rotational position of the holding part 10 about a vertical axis along the Z direction, or the inclination angle of the holding part 10 with respect to the horizontal plane. For example, the adjusting device may be configured to include either a moving device that moves the holding part 10 in a width direction, or a rotating device that rotates the holding part 10 about the vertical axis, or both. The width direction is a horizontal direction that extends perpendicular to a travel direction of the transport device 1. In the examples illustrated in FIGS. 1 and 2, the X direction is the traveling direction, and the Y direction is the width direction.The moving device is configured to move the holding part 10 supported by the raising and lowering device 20 in the width direction by moving the raising and lowering device 20 in the width direction, for example. The rotating device is configured to rotate, for example, the raising and lowering device 20 about the vertical axis to rotate the holding part 10 supported by the raising and lowering device 20 about the vertical axis. In a case where the transfer target point 6 is disposed at a position deviating from the travel path of the transport device 1 in a plan view (as viewed in the Z direction), the transport device 1 moves the holding part 10 in the width direction with the moving device to a position overlapping the transfer target point 6 in the plan view, and then lowers the holding part 10 toward the transfer target point 6 to transfer the transport object 2 to the transfer target point 6.As illustrated in FIG. 2, the transport device 1 includes a control unit 30 that controls the operation of the transport device 1. The control unit 30 controls the travel drive motor 42 to cause the travel unit 41 to perform the travel operation along the travel path. In addition, the control unit 30 controls the raising and lowering drive motor 23 to cause the raising and lowering device 20 to perform the raising and lowering operation for raising and lowering the holding part 10. The raising and lowering operation includes a raising operation for raising the holding part 10 and a lowering operation for lowering the holding part 10. The control unit 30 includes, for example, a computing unit such as a CPU and peripheral circuits such as a memory. Each function of the control unit 30 is realized by cooperation of this hardware and a program executed on the hardware, e.g., the arithmetic unit.In a case where the transport object 2 is transferred between the holding part 10 and the transfer target point 6, the control unit 30 causes the travel unit 41 to execute the travel operation that causes the transport device 1 to travel to a target stop position corresponding to the transfer target point 6, with the holding part 10 being disposed at the travel height. The target stop position is set to the same position as the transfer target point 6 in the traveling direction (the X direction in the examples illustrated in FIGS. 1 and 2 ). In a case where the transport object 2 is transferred from the holding part 10 to the transfer destination 6, the control unit 30 causes the raising and lowering device 20 to lower the lowering operation of the holding part 10 holding the transport object 2 from the traveling height to the transfer height, then causes the holding part 10 to perform the holding releasing operation of the transport object 2, and then causes the raising and lowering device 20 to raise the raising operation of the holding part 10 not holding the transport object 2 from the transfer height to the traveling height. Moreover, in a case where the transport object 2 is transferred from the transfer destination 6 to the holding part 10, the control unit 30 causes the raising and lowering device 20 to perform the lowering operation of lowering the holding part 10 that does not hold the transport object 2 from the travel height to the transfer height, then causes the holding part 10 to perform the holding operation of the transport object 2, and then causes the raising and lowering device 20 to perform the raising operation of raising the holding part 10 that holds the transport object 2 from the transfer height to the travel height.The target stop position at which the transport device 1 is stopped in a case where the transport object 2 is transferred between the holding part 10 and the transfer destination 6, and a target operation amount for operating the holding part 10 in a case where the transport object 2 is transferred between the holding part 10 and the transfer destination 6 are set so that the transport object 2 can be transferred appropriately. The control unit 30 obtains setting values for the target stop position and the target operation amount by referring to a storage device (for example, a storage device provided in the transport device 1) or the like, and causes the transport device 1 to perform the transfer operation of the transport object 2. The target operation amount of the holding part 10 includes, for example, the target raising and lowering amount of the holding part 10 by the raising and lowering device 20 or the adjustment amount (for example, the target moving amount of the holding part 10 by the moving device or the target rotating amount of the holding part 10 by the rotating device) of the holding part 10 by the above-described adjustment device.The above-mentioned target stop position and the target operation amount are set upon the insertion of the transport device 100. In order to prevent the transport object 2 from being unable to be transported adequately due to aging or the like, the target stop position and the target operation amount are generally adjusted and updated by periodic inspection or the like. The target stop position and the target operation amount may be set or updated based on the detection results of the relative positional relationship between the holding part 10 and the delivery target point 6 by the positional relationship recognition system 50. That is, the positional relationship recognition system 50 is capable of detecting the amount of deviation of the position of the holding part 10 from the target position (the ideal position for transferring the transport object 2 to the transfer target point 6), and is capable of teaching the setting of the target stop position and the target operation amount so that the amount of deviation is reduced. Next, the configuration of the positional relationship recognition system 50 according to the present embodiment will be described.As described above, the positional relationship recognition system 50 includes the measurement unit 51, the recording unit 52, and the calculation unit 53. The recording unit 52 includes a storage medium (e.g., a flash memory) capable of storing and rewriting information. The recording of the measurement data in the recording unit 52 is performed by the calculation unit 53. The arithmetic unit 53 includes, for example, an arithmetic unit such as a CPU and peripheral circuits such as a memory. Each function of the arithmetic unit 53 is realized by cooperation of this hardware and a program executed on the hardware, e.g., the arithmetic unit.The measurement unit 51 measures the relative positional relationship (hereinafter, simply referred to as a "positional relationship") between the holding part 10 and the transfer target point 6. the position where the holding part 10 is disposed between the holding part 10 and the transfer target point 6 during transfer of the transport object 2 (in the present embodiment, the position where the holding operation or the holding release operation is performed by the holding part 10) is referred to as a "transfer position", and the measurement of the positional relationship by the measurement unit 51 is performed, for example, when the holding part 10 is disposed at a position (either the transfer position or a position that is fixed with respect to the transfer position but is different from the transfer position) corresponding to the transfer position. In the present embodiment, the positional relationship is measured by the measurement unit 51 with the transport device 1 positioned at the above-mentioned target stop position and the holding part 10 positioned at a target height (either the above-described transfer height or a height set with respect to the transfer height but different from the transfer height) set according to the height of the transfer target point 6. The target height is set to, for example, a height above (Z 1) a certain height with respect to the transfer height.As illustrated in FIGS. 4 and 5, the positional relationship recognition system 50 in the present embodiment includes a detection unit 60 and a detected unit 70. the measurement unit 51, the recording unit 52, and the calculation unit 53 are accommodated in the detection unit 60. One of the detection unit 60 and the detected unit 70 is held by the holding part 10 instead of the transport object 2, while the other of the detection unit 60 and the detected unit 70 is disposed at the transfer target point 6. One of the detection unit 60 and the detected unit 70 held by the holding part 10 is configured such that, for example, the weight and the gravity center position correspond to those of the transport object 2. The term "equivalent" herein means that it suffices to perform the same function, and does not need to mean completely identical.As illustrated in FIGS. 4 and 5, in the present embodiment, the detection unit 60 is held by the holding part 10, and the detected unit 70 is disposed at the transfer target point 6. Specifically, the holding part 10 holds the detection unit 60 by supporting a supported portion 60 aformed at the upper portion of the detection unit 60 with the support member 11. The detected unit 70 is disposed at the transfer target point 6 and is positioned by the positioning mechanism 7. In the examples illustrated in FIGS. 4 and 5, the kinematic pin provided in the positioning mechanism 7 engages with a recessed portion (not illustrated) formed in the lower part of the detected unit 70, and thereby positions the detected unit 70 with respect to the transfer target point 6.The measurement unit 51 measures the relative positional relationship between the detection unit 60 and the detected unit 70, thereby measuring the relative positional relationship between the holding part 10 holding the detection unit 60 and the transfer target point 6 where the detected unit 70 is disposed. FIG. 4 shows a state in which the holding member 10 holding the detection unit 60 is lowered with the detected unit 70 being disposed at the transfer target point 6. FIG. 5 shows a state in which the holding member 10 holding the detection unit 60 is lowered to the aforementioned target height. In this state, the measurement unit 51 measures the positional relationship. The target height is set to a height at which the detection unit 60 and the detected unit 70 do not come into contact with each other, as illustrated in FIG. 5.As illustrated in FIG. 6, the detected unit 70 includes a plate-shaped portion 73 formed in a plate shape, and two wall portions (a first wall portion 71 and a second wall portion 72) provided on an upper surface (a surface above (Z 1)) of the plate-shaped portion 73. The recessed portion engaged by the above-described kinematic pin is formed on a lower surface (a surface below (Z 2)) of the plate-shaped portion 73. The first wall portion 71 is disposed on the first X 1 side in the X direction of the plate-shaped portion 73, and the second wall portion 72 is disposed on the second X 2 side in the X direction of the plate-shaped portion 73.A reference surface of the transfer target point 6 is referred to herein as a "target reference surface S 2". The target reference area S 2 is an area (plane) set with respect to the handover target point 6. For example, the upper surface of the transfer target point 6, which is a placement surface on which the transport object 2 is placed, may be the target reference surface S 2. As long as an area is provided with respect to the transfer target point 6, an area distant from the transfer target point 6 or an imaginary area may be used as the target reference area S 2. Although the transfer target point 6 is not illustrated in FIGS. 6 to 9, in the present embodiment, as shown in FIGS. 6 to 9, the upper surface of the detected unit 70 disposed on the transfer target point 6 (an example of a surface distant from the transfer target point 6) is used as the target reference surface S 2. The target reference surface S 2 is formed as a horizontal plane.Moreover, the reference surface of the holding part 10 is referred to as "holding reference surface S 1.". The holding reference surface S 1 is a surface (plane) fixed with respect to the holding member 10. As long as a surface is provided with respect to the holding part 10, a surface away from the holding part 10 or an imaginary surface may also be used as the holding reference surface S 1. Although the holding part 10 is omitted in FIGS. 8 and 9, in the present embodiment, as illustrated in FIGS. 8 and 9, the upper surface of the support portion 60 a(an example of the surface away from the holding part 10) held by the holding part 10 is used as the holding reference surface S 1. The holding reference surface S 1 is formed as a horizontal plane.Moreover, a reference position of the holding part 10 is referred to as "holding reference position C 1" and a reference position of the transfer target point 6 is referred to as "target reference position C 2". The holding reference position C 1 is a position that is set with respect to the holding part 10. As long as a position is provided with respect to the holding member 10, a position away from the holding member 10 or an imaginary position may also be used as the holding reference position C 1. The target reference position C 2 is a position set with respect to the handover target point 6. As long as a position with respect to the delivery target point 6 is provided, a position away from the delivery target point 6 or an imaginary position may be used as the target reference position C 2. In the present embodiment, as illustrated in FIGS. 8 and 9, a position on the holding reference surface S 1 is defined as the holding reference position C 1, and a position on the target reference surface S 2 is defined as the target reference position C 2.The holding reference surface S 1 and the target reference surface S 2 are set such that the holding reference surface S 1 and the target reference surface S 2 are parallel to each other while the relative positional relationship between the holding part 10 and the transfer target point 6 is in an ideal state. Moreover, the holding reference position C 1 and the target reference position C 2 are set such that the holding reference position C 1 and the target reference position C 2 overlap each other in a plan view while the relative positional relationship between the holding part 10 and the transfer target point 6 is in an ideal state.As illustrated in FIGS. 4 and 5, the detection unit 60 (specifically, the measurement unit 51) in the present embodiment includes a distance sensor (e.g., a laser distance meter) that measures the distance to the measurement object, as a sensor that measures the relative positional relationship between the holding part 10 and the transfer target point 6. Specifically, the detection unit 60 includes six distance sensors: a first sensor 61, a second sensor 62, a third sensor 63, a fourth sensor 64, a fifth sensor 65, and a sixth sensor 66.FIG. 6 schematically shows a measurement target of each of the distance sensors ( 61 to 66). As illustrated in FIG. 6, the first sensor 61 measures a distance in the X direction from a surface of the second wall portion 72 that is perpendicular to the X direction. The second sensor 62 measures a distance in the Y direction to a surface of the first wall portion 71 perpendicular to the Y direction, and the third sensor 63 measures a distance in the Y direction to a surface of the second wall portion 72 perpendicular to the Y direction. The second sensor 62 and the third sensor 63 are disposed at different positions in the X direction. The fourth sensor 64, the fifth sensor 65, and the sixth sensor 66 measure a distance in the Z direction from the upper surface of the plate-shaped portion 73 that is the target reference surface S 2. The fourth sensor 64, the fifth sensor 65, and the sixth sensor 66 are disposed at different positions on a surface perpendicular to the Z direction.FIG. 6 shows an ideal state in which the holding part 10 and the transfer target point 6 maintain a relative positional relationship. In this ideal state, a distance measured by the second sensor 62 and a distance measured by the third sensor 63 are equal. Moreover, in this ideal state, a distance measured by the fourth sensor 64, a distance measured by the fifth sensor 65, and a distance measured by the sixth sensor 66 are the same.The calculation unit 53 obtains an index indicating the relative positional relationship between the holding part 10 and the transfer target point 6 on the basis of the measurement result of each of the distance sensors ( 61 to 66), specifically, by calculation (geometric calculation) on the basis of the measurement result of each of the distance sensors ( 61 to 66). Specifically, the calculation unit 53 acquires at least one of a distance ΔX in the X direction, a distance ΔY in the Y direction, a distance ΔZ in the Z direction, a rotation angle θZ of the Z axis, an inclination angle θX in the X direction, and an inclination angle θY in the Y direction as the index indicating the relative positional relationship between the holding part 10 and the transfer target point 6. Since the calculation methods for determining the index are clear to those skilled in the art, detailed description will be omitted.In FIGS. 7 to 9, there are shown cases where the relative positional relationship between the holding member 10 and the transfer target point 6 is deviated from the ideal state. As illustrated in FIG. 7, the X-direction distance ΔX is a X-direction distance between the holding reference position C 1 and the target reference position C 2, the Y-direction distance ΔY is a Y-direction distance between the holding reference position C 1 and the target reference position C 2, and the Z-axis rotation angle θZ is a rotation angle about a reference axis A along the Z-direction between the holding part 10 and the transfer target point 6. In addition, as illustrated in FIGS. 8 and 9, the Z-direction distance ΔZ is a Z-direction distance between the holding reference position C 1 and the target reference position C 2, the inclination angle θX in the X direction is an inclination (in other words, a rotation angle about the axis along the Y direction) in the X direction between the holding reference surface S 1 and the target reference surface S 2, and the Y-direction inclination angle θY is an inclination (in other words, a rotation angle about the axis along the X direction) in the Y direction between the holding reference surface S 1 and the target reference surface S 2.The above teaching can be performed based on the index indicating the relative positional relationship between the holding part 10 and the transfer destination 6 thus obtained. For example, a detection result (calculation result) of the index indicating the relative positional relationship between the holding part 10 and the transfer target point 6 is transmitted from the detection unit 60 to the transport device 1 (specifically, the control unit 30), and teaching is performed.Incidentally, there may be a vibration of the index indicating the relative positional relationship between the holding part 10 and the transfer target point 6. In the present embodiment, measurement is performed by the measurement unit 51 while lowering the holding part 10 holding the detection unit 60 to the aforementioned target height by unwinding the windable member 22. Therefore, the detection result of the detection unit 60 may fluctuate due to the vibration of the holding member 10 during the measurement by the measurement unit 51. The positional relationship recognition system 50 according to the present embodiment includes the configuration described below. This makes it possible to accurately obtain the average value (i.e., the value after the vibration is ended) of the vibration amplitude even when vibration occurs in the index indicating the relative positional relationship between the holding part 10 and the transfer target point 6.Hereinafter, the index for which an average value between the first peak P 1 and the second peak P 2 is calculated as described below among the indices indicating the relative positional relationship between the holding part 10 and the transfer target point 6 is referred to as a "detection target amount". In the present embodiment, the detection target amount is at least one of the following: the distance ΔX in the X direction, the distance ΔY in the Y direction, the distance ΔZ in the Z direction, the rotation angle θZ of the Z axis, the inclination angle θX in the X direction, and the inclination angle θY in the Y direction. For indices other than the acquisition target amount, the average values may be obtained by other methods, for example, calculating the average value over the entire period from the start of measurement to the end of measurement. Moreover, in a case where the measurement is performed by the measurement unit 51 while the detection unit 60 is not shaking, for example, in a case where the measurement unit 51 is calibrated with the detection unit 60 and the detected unit 70 is placed on a calibration cart, the average value over the entire period from the start of the measurement to the end of the measurement can also be obtained for the detection target amount.In FIG. 10, the time series data from the start of measurement to the end of measurement for a detection target amount is illustrated. The recording unit 52 records the measurement data (e.g., a plurality of measurement data acquired at regular time intervals) acquired by the measurement unit 51 in a time series. In the present embodiment, the recording unit 52 records the measurement data continuously (e.g., continuously at regular time intervals) for a predetermined setting period. For example, all the measurement data during the adjustment period is recorded in the recording unit 52. The setting period is, for example, a period (in the example illustrated in FIG. 10, the period from the start of measurement to the end of measurement) until a predetermined measurement time has elapsed from the start of measurement.The calculation unit 53 acquires target time series data, i.e., the time series data of a certain acquisition target amount indicating the positional relationship, on the basis of the measurement data recorded by the recording unit 52. In the present embodiment, the calculation unit 53 acquires the target time series data as illustrated in FIG. 10 by performing calculation (geometric calculation) based on the measurement data recorded by the recording unit 52. The calculation unit 53 performs real-time calculation based on the measurement data recorded in the recording unit 52, and displays the detected value of the detection target amount on a display unit 67 (see FIGS. 4 and 5 ) provided in the detection unit 60, for example. In the example illustrated in FIG. 10, the detection target amount oscillates to reach valley peaks at times t 1, t 3, t 5, and t 7, and peaks at times t 2, t 4, and t 6.The calculation unit 53 identifies a first peak P 1 and a second peak P 2 that are two of a plurality of peaks of the target vibration, i.e., the vibration of the detection target amount that appears in the target time series data. Both the first peak P 1 and the second peak P 2 may be either mountain peaks or valley peaks. In the example illustrated in FIG. 10, both the first peak P 1 and the second peak P 2 are valley peaks. Then, the calculation unit 53 acquires the average value of the detection target amounts between the first peak P 1 and the second peak P 2 included in the target time series data as the static detection target amount, i.e., the detection target amount after completion of the target vibration. For example, the calculation unit 53 acquires the average value of all the detection target amounts included in the target time series data between the first peak value P 1 and the second peak value P 2 as the static detection target amount. The static detection target amount acquired by the calculation unit 53 is displayed on the display unit 67, for example. In the example illustrated in FIG. 10, the period between the time t 1 corresponding to the first peak value P 1 and the time t 7 corresponding to the second peak value P 2 is set as an average calculation period for obtaining the average value of the detection target amounts. The average value of the detection target amounts is obtained by dividing the sum of N values of the detection target amounts included in the target time series data by N, for example.In the example illustrated in FIG. 10, the number of valley peaks is larger than the number of mountain peaks. Therefore, in the example illustrated in FIG. 10, in a case where the average value of the detection target amounts included in the target time series data is obtained for the entire period from the start of the measurement to the end of the measurement, the average value of the detection target amounts is distorted toward a negative side with respect to the average value of the amplitude of the detection target amount. In contrast, by obtaining the average value of the detection target amounts included in the target time series data between the first peak value P 1 and the second peak value P 2 described above, the number of data points distorted toward a positive side with respect to the average value of the amplitude and the number of data points distorted toward a negative side with respect to the average value of the amplitude can be made equal (equal to or about equal to). Accordingly, it is easier to minimize the distortion of the average value of the detection target amounts toward the positive or negative side with respect to the average value of the amplitude. As a result, the accuracy of the static detection target amount derived from the calculation unit 53 is easily improved.Meanwhile, there is a case where measurement of the positional relationship by the measurement unit 51 cannot be normally performed, as in a case where the distance from a distance sensor provided in the measurement unit 51 to a measurement object is outside the measurable range of the distance sensor. In this case, the value of the detection target amount derived by the calculation unit 53 may be outside an assumed detection range (i.e., may be an abnormal value). In view of this point, for example, the calculation unit 53 may be configured to use, for the calculation of the average value, all the values except values determined as abnormal values based on a predetermined determination condition, among the values of the detection target amounts included in the target time series data between the first peak value P 1 and the second peak value P 2. The determination condition is, for example, a condition in which a value inside the assumed detection range is determined to be a normal value and a value outside the detection range is determined to be an abnormal value. A configuration may be adopted in which the calculation of the average value is performed using an upper limit value of the detection range as a value of a detection target amount exceeding the assumed detection range and using a lower limit value of the detection range as a value of a detection target amount below the assumed detection range. Moreover, it is also possible to adopt a configuration in which the calculation of the average value is performed using an estimated value obtained by interpolation or the like as a value of a detection target amount determined as an abnormal value.In order to increase the accuracy of the static detection target amount derived by the calculation unit 53, it is preferable that one or more peaks (five peaks in the example of FIG. 10 ) are included between the first peak P 1 and the second peak P 2. In order to ensure a large number of peaks between the first peak P 1 and the second peak P 2, for example, a configuration may be adopted in which the calculation unit 53 identifies the earliest peak in the target time series data for the setting period (e.g., the period from the start of measurement to the end of measurement) as the first peak P 1 and identifies the latest peak as the second peak P 2 (see FIG. 10 ). The first peak P 1 and the second peak P 2 may be adjacent peaks. In this case, one of the two peaks P 1 and P 2 is a mountain peak and the other is a valley peak.In the present embodiment, the holding part 10 is lowered from the travel height to the target height set corresponding to the height of the transfer target point 6, and then measurement is performed by the measurement unit 51. In this case, generally, the vibration cycle of the holding part 10 is shortened when the transfer target point 6 is a measurement target because the lowering amount of the transport object 2 to the transfer target point 6 is reduced. In a case where the cycle of vibration of the holding part 10 is shortened, the cycle of vibration of the detection target is also shortened. Therefore, the measurement time of the positional relationship by the measurement unit 51 can be kept short while the number of peaks included in the vibration of the detection target amount is adequately secured. In view of this point, for example, a configuration may be adopted in which the measurement time of the positional relationship by the measurement unit 51 is set to be shorter in accordance with a decrease in the lowering amount of the transport object 2 to the transfer target point 6 by the raising and lowering device 20 (in other words, in accordance with a decrease in the lowering amount of the holding part 10 to the transfer target point 6 by the raising and lowering device 20). In this case, for example, the measurement time in a case where the storage shelf (another example of the transfer destination 6) disposed above (Z 1) the loading port is a measurement destination is set to be shorter than the measurement time in a case where the loading port (an example of the transfer destination 6) of the processing device 5 is a measurement destination. The measurement time of the positional relationship by the measurement unit 51 is set to be continuously or stepwise shortened, for example, when the above-mentioned lowering amount is reduced.In FIG. 11, the target time series data in which the oscillation cycle of the detection target amount is shorter than the target time series data illustrated in FIG. 10 is indicated by a solid line. In FIG. 11, the target time series data shown in FIG. 10 is indicated by a broken line. In the example shown in FIG. 11, the vibration cycle of the detection target amount indicated by the solid line is half as large as the vibration cycle of the detection target amount indicated by the broken line. In this case, although the measurement time (the time from the start of measurement to the end of measurement) of the positional relationship by the measurement unit 51 is set to half the measurement time in FIG. 10, the number of peaks included in the vibration of the detection target amount can be secured to the same extent as in FIG. 10.Further embodiments of the present invention will be described below.In the above-described embodiment, a configuration in which the measurement unit 51 includes a distance sensor as a sensor that measures the positional relationship has been described as an example. However, the present disclosure is not limited to such a configuration, and it is also possible to adopt a configuration in which the measurement unit 51 includes a sensor (e.g., a camera) other than the distance sensor than the sensor that measures the positional relationship.In the above-described embodiment, a configuration in which the positioning mechanism 7 engaged with the lower part of the transport object 2 to position the transport object 2 is provided at the transfer destination 6 has been described as an example. However, the present disclosure is not limited to such a configuration, and it is also possible to adopt a configuration in which the positioning mechanism 7 is not provided at the transfer target point 6. A configuration may be adopted in which a mechanism for positioning the transport object 2 different from the positioning mechanism 7 is provided at the transfer destination 6.In the above-described embodiment, a configuration in which the holding part 10 holds the transport object 2 from above (Z 1) has been described as an example. However, the present disclosure is not limited to such a configuration. For example, it is also possible to adopt a configuration in which the holding part 10 supports the transport object 2 from below (Z 2) to hold the transport object 2. In this case, for example, it is also possible to adopt a configuration in which the transport device 1 includes an extending and retracting device that extends or retracts the holding part 10 in the horizontal direction, and the holding part 10 is lowered toward the transfer destination 6 in the extended state to transport the transport object 2 to the transfer destination 6.In the above-described embodiment, a configuration in which the transport device 1 is a ceiling transport vehicle traveling along the travel path formed on the ceiling 3 has been described as an example. However, the present disclosure is not limited to such a configuration. The transport device 1 can be a storage and retrieval machine or another track-guided transport vehicle or a track-less transport vehicle such as a keyless transport vehicle (AGC) or an autonomous mobile robot (AMR). When the transport device 1 is a trackless transport vehicle, the transport device 1 travels along a virtually formed travel path instead of a physically formed travel path using a rail or the like. For example, a plurality of detectable objects such as two-dimensional codes or radio frequency (RF) tags are installed on a ground surface, and the travel path is virtually formed to connect the detectable objects. It is also possible to adopt a configuration in which the detectable objects are not provided on the ground surface and the travel path is virtually formed from a route calculated based on the detection result of the environment.It is also possible to apply the configuration disclosed in the above-described embodiment in combination with the configurations disclosed in other embodiments as long as no contradiction arises (including combinations of the embodiments described as other embodiments). As for other configurations, all embodiments disclosed in the present specification are merely examples in all respects. Accordingly, it is possible to make various changes as long as the changes do not deviate from the spirit of the present disclosure.Next, a summary of the embodiment of the above-described positional relationship recognition system will be given.The positional relationship recognition system is a positional relationship recognition system that detects a relative positional relationship between a holding part and a transfer target point in a transport device including a transport device configured to hold a transport object with the holding part to transport the transport object and the transfer target point to which the transport object is transferred by the transport device, wherein the positional relationship recognition system includes a measurement unit configured to measure the positional relationship, a recording unit configured to record measurement data obtained by the measurement unit in a time series, and a calculation unit, wherein the calculation unit includes target time series data that is time series data of specific detection target amounts indicating the positional relationship, based on the measurement data recorded in the recording unit, identifies a first peak and a second peak that are two of a plurality of peaks of a target vibration that is a vibration of the detection target amounts appearing in the target time series data, and calculates an average value of detection target amounts included in the target time series data between the first peak and the second peak as a static detection target amount that is a detection target amount after the target vibration has ceased.According to the present configuration, when the temporal average value of the detection target amounts is obtained as a static detection target amount that is the detection target amount after the vibration of the detection target amount has ceased, the average value is obtained using the target time series data between the first peak and the second peak as a target. In this way, the number of data points distorted toward the positive side with respect to the average value of the amplitude and the number of data points distorted toward the negative side with respect to the average value of the amplitude included in the target time series data which is a target for obtaining the average value can be made equivalent (equal to or approximately equal). This facilitates suppression of distortion of the average value of the detection target amounts on the positive or negative side with respect to the average value of the amplitude. Accordingly, it is easier to improve the accuracy of the static detection target amount derived from the calculation unit.Here, it is preferable that the transport device is configured to lower the holding part toward the transfer target point and transport the transport object to the transfer target point, wherein a direction along an up-down direction is defined as a Z direction, one of the directions perpendicular to the Z direction is defined as an X direction, and a direction perpendicular to both the Z direction and the X direction is defined as a Y direction, and the detection target amounts are each at least one of a distance in the X direction that is a distance in the X direction between a holding reference position that is a reference position of the holding part and a target reference position that is a reference position of the transfer target point, a distance in the Y direction, which is a distance in the Y direction between the holding reference position and the target reference position, a distance in the Z direction which is a distance in the Z direction between the holding reference position and the target reference position, a Z-axis rotation angle which is a rotation angle about a reference axis along the Z direction between the holding part and the transfer target point, an inclination angle in the X direction which is an inclination in the X direction between a holding reference surface which is a reference surface of the holding part and a target reference surface which is a reference surface of the transfer target point, or an inclination angle in the Y direction which is an inclination in the Y direction between the holding reference surface and the target reference surface.According to the present configuration, in a case where the transport device is configured to lower the holding part toward the transfer destination and transfer the transport object to the transfer destination, useful data indicating the relative positional relationship between the holding part and the transfer destination can be obtained easily and with high accuracy.In the above-described configuration, it is preferable that the transport device includes a raising and lowering device configured to raise and lower the holding part, the raising and lowering device includes a rotating body, a windable member wound around the rotating body and configured to be able to be wound around and unwound from the rotating body, and a raising and lowering drive motor configured to rotate the rotating body and configured to raise and lower the holding part by winding and unwinding the windable member by rotating the rotating body, the holding part being suspended from the windable member, and the positional relationship detection system further includes a positioning mechanism, which is disposed at the transfer target point and engageable with a lower part of the transport object to position the transport object.In a case where the holding part is raised and lowered while being suspended as in the present configuration, the vibration of the holding part tends to increase with the raising and lowering of the holding part. For example, in a case where the measurement unit performs measurement after the holding part is lowered to a target height set according to the height of the transfer target point, the vibration of the holding part tends to increase when the holding part reaches the target height. In such a case that the measurement by the measurement unit is tried after the vibration of the holding member has settled, the measurement takes a long time. Therefore, the detection efficiency of the relative positional relationship between the holding part and the transfer target point decreases. In this regard, with the technique of the present disclosure, it is possible to obtain the static detection target amount with high accuracy even when the detection target amount fluctuates due to the vibration of the holding part. Therefore, the technique of the present disclosure can be suitably applied to a configuration in which the holding part is raised and lowered while being suspended.In the configuration described above, it is preferable to set a shorter measurement time for the positional relationship by the measurement unit when the lowering amount of the transport object to the transfer target point by the raising and lowering device decreases.For example, in a case where the measurement unit performs measurement after the holding part is lowered to a target height set according to the height of the transfer target point, generally, the cycle of vibration of the holding part is shortened in a case where the transfer target point is a measurement target when the lowering amount of the transport object to the transfer target point decreases. In a case where the cycle of vibration of the holding part is shortened, the cycle of vibration of the detection target amount is also shortened. Therefore, the measurement time of the positional relationship by the measurement unit can be kept short while the number of peaks included in the target vibration is appropriately secured. In view of this point, according to the present configuration, the measurement time of the positional relationship is set by the measurement unit to be short as the lowering amount of the transport object to the delivery target point decreases. Therefore, the time required for measurement by the measurement unit can be kept short in a range in which the first peak and the second peak can be identified appropriately, and the time required to obtain the static detection target amount can be shortened.In the position relationship recognition system of each of the configurations, it is preferable that the recording unit continuously records the measurement data for a predetermined period, and the calculation unit identifies an earliest peak in the target time series data for the predetermined period as the first peak and a latest peak in the target time series data for the predetermined period as the second peak.According to the present configuration, the average value of the acquisition target amount can be obtained by maximum use of the measurement data recorded in the recording unit. Accordingly, it is easier to increase the accuracy of the static detection target amount derived from the calculation unit.Moreover, it is preferable that the average value calculation unit uses all corresponding values except all values determined as an abnormal value due to the determination condition among the values of the detection target amounts included in the target time series data between the first peak value and the second peak value.In the present configuration, abnormal values are removed from the values of the detection target amounts included in the target time series data between the first and second peak values, and all values other than the abnormal values are used for the calculation of the average value. In this way, the accuracy of the static detection target amount derived from the calculation unit can be further improved.The positional relationship recognition system according to the present disclosure may have at least one of the effects described above.REFERENCE NUMERALS1 Transport device 2 Transport object 2 a Flansch portion 3 Ceiling 4 Rail 5 Processing device 6 Transfer target point 7 Positioning mechanism 10 Holding part 11 Support member 20 Raising and lowering device 21 Rotating body 22 Windable member 23 Raising and lowering drive motor 30 Control unit 41 Traveling unit 42 Traveling drive motor 43 Wheel 44 Body 45 Cover part 50 Positional relationship recognition system 51 Measurement unit 52 Recording unit 53 Calculation unit 60 Detection unit 60 a Abgestützt portion 61 First sensor 62 Second sensor 63 Third sensor 64 Fourth sensor 65 Fifth sensor 66 Sixth sensor 67 Display unit 70 Detected unit 71 First wall portion 72 Second wall portion 73 Plate-shaped portion 100 Transport device A Reference axis C 1 Holding reference position C 2 Target reference position P 1 First peak P 2 second peak S 1 holding reference surface S 2 target reference surface X x direction X 1 first side in X direction X 2 second side in X direction Y y direction Y 1 first sides in Y direction Y 2 second side in Y direction Z z direction ΔX distance in X direction ΔY distance in Y direction ΔZ distance in Z direction θX inclination angle in X direction θY inclination angle in Y direction θZ Z axis rotation angleReferences included in the specificationThis list of documents cited by the applicant has been produced in an automated manner and is only included for the better information of the reader. The list is not part of the German patent application or utility model application. The DPMA does not take any adhesion for any faults or omissions.Patent Literature citedJP 6 146 537 B1 [0002, 0003, 0004]

Claims

A positional relationship recognition system (50) that recognizes a relative positional relationship between a holding part (10) and a transfer target point (6) in a transport device (100) including a transport device (1) configured to hold a transport object (2) with the holding part (10) to transport the transport object (2) and the transfer target point (6) to which the transport object (2) is transferred by the transport device (1), the positional relationship recognition system (50) comprising: a measurement unit (51) configured to measure the positional relationship; a recording unit (52) configured to record the measurement data obtained from the measurement unit (51) in a time series; A computing unit (53), wherein the computing unit (53) acquires target time series data, which is time series data of specific detection target amounts indicating the positional relationship, based on the measurement data recorded by the recording unit (52), identifies a first peak (P 1) and a second peak (P 2) that are two of a plurality of peaks of a target vibration that is a vibration of the detection target amounts appearing in the target time series data, and computes an average value of the detection target amounts included in the target time series data between the first peak (P 1) and the second peak (P 2) as a static detection target amount that is a detection target amount after the target vibration has ceased.The positional relationship recognition system (50) according to claim 1, wherein the transport device (1) is configured to lower the holding part (10) toward the transfer target point (6) and transfer the transport object (2) to the transfer target point (6), a direction along an up-down direction is defined as a Z direction, one of the directions perpendicular to the Z direction is defined as an X direction, and a direction perpendicular to both the Z direction and the X direction is defined as a Y direction, and the detection target amounts of each of at least one of the following elements are an X-direction distance (ΔX) that is an X-direction distance between a holding reference position (C1) that is a reference position of the holding part (10), and a target reference position (C 2) that is a reference position of the transfer target point (6), a Y-direction distance (ΔY) that is a Y-direction distance between the holding reference position (C 1) and the target reference position (C 2), a Z-direction distance (ΔZ) that is a Z-direction distance between the holding reference position (C 1) and the target reference position (C 2), a Z-axis rotation angle (θZ) that is a rotation angle about a reference axis (A) along the Z-direction between the holding part (10) and the transfer target point (6), an X-direction inclination angle (θX), the inclination in the X direction is between a holding reference surface (S 1) which is a reference surface of the holding part (10) and a target reference surface (S 2) which is a reference surface of the transfer target point (6), or an inclination angle in the Y direction (θY) which is an inclination in the Y direction is between the holding reference surface (S 1) and the target reference surface (S 2).The positional relationship recognition system (50) according to claim 2, wherein the transport device (1) comprises a raising and lowering device (20) configured to raise and lower the holding part (10), the raising and lowering device (20) includes a rotating body (21), a windable member (22) wound around the rotating body (21) and configured to be wound around and unwound from the rotating body (21), and a raising and lowering drive motor (23) configured to rotationally drive the rotating body (21), and configured to raise and lower the holding part (10) by winding and unwinding the windable member (22) by rotating the rotating body (21), the holding part (10) being suspended from the windable member (22), and the positional relationship recognition system further comprises: a positioning mechanism (7) disposed at the transfer target point (6) and engageable with a lower part of the transport object (2) to position the transport object (2).The position relationship recognition system (50) according to any one of claims 1 to 3, wherein the recording unit (52) continuously records the measurement data for a predetermined duration, and the calculation unit (53) identifies an earliest peak in the target time series data for the predetermined period as the first peak (P1) and a latest peak in the target time series data for the predetermined period as the second peak (P2).The position relationship recognition system (50) according to any one of claims 1 to 3, wherein the average value calculation unit (53) uses all respective values except each value determined as an abnormal value based on the determination condition among the values of the detection target amounts included in the target time series data between the first peak (P1) and the second peak (P2).

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