Microelectromechanical structure and microelectromechanical component

Abstract

The invention relates to a microelectromechanical structure comprising a substrate and at least one operating section and one excitation section. The operating section and the excitation section are each connected to the substrate. The operating section includes a sensor and / or an actuator. The excitation section is configured to generate a linear vibration and / or a rotational vibration of the microelectromechanical structure.

Description

[0001] The invention relates to a microelectromechanical structure (MEMS) and a microelectromechanical component. Furthermore, the invention relates to a calibration method for a micromechanical structure and / or a micromechanical component.

[0002] Microelectromechanical structures (MEMS) are known from the prior art. These can be, for example, gyroscopes and / or accelerometers. For safety-critical applications, such as airbag sensors or sensors for electronic stability programs (ESP) in vehicles, but also in electronics such as mobile phones and headphones, it may be necessary for the microelectromechanical structures to be as robust as possible against disruptive vibrations. MEMS gyroscopes and / or accelerometers are subject to stringent vibration requirements, both linear and rotational, in frequency ranges exceeding 100 kHz.

[0003] To test such microelectromechanical structures for their behavior under linear or rotational vibrations, they are glued to a vibrating element, and then the effects of the vibration on a sensor signal are evaluated. However, a problem can arise when removing the microelectromechanical structures from the vibrating element without damaging them. Disclosure of the invention

[0004] One object of the invention is to provide an improved microelectromechanical structure and a microelectromechanical component. A further object of the invention is to provide a calibration method for such a micromechanical structure and / or such a micromechanical component. These objects are achieved by the subject matter of the independent claims. Advantageous embodiments are specified in the dependent claims.

[0005] According to a first aspect, the invention relates to a microelectromechanical structure comprising a substrate and at least one functional section and one excitation section. The functional section and the excitation section are each connected to the substrate. The functional section includes a sensor and / or an actuator. The excitation section is configured to generate a linear vibration and / or a rotational vibration of the microelectromechanical structure.

[0006] The excitation section thus makes it possible to excite vibrations, both linear and rotational, within the microelectromechanical structure itself. This significantly simplifies the determination of the structure's behavior under linear or rotational vibrations during testing. If necessary, calibration can even partially or completely eliminate the influence of linear or rotational vibrations.

[0007] In one embodiment of the microelectromechanical structure, the excitation section comprises a mass connected to the substrate via a spring element and excitation electrodes for the mass. The mass can be set into linear and / or rotational oscillation by means of the excitation electrodes. The influence of the oscillation on a sensor signal can be determined via sensor electrodes.

[0008] In one embodiment of the microelectromechanical structure, the excitation section comprises a mass connected to the substrate by several spring elements. Multiple excitation electrode systems can generate a rotational oscillation of the mass.

[0009] In one embodiment of the microelectromechanical structure, it has at least two excitation sections, each with a mass connected to the substrate via a spring element and excitation electrodes for each mass. Two such excitation sections can be configured, in particular, to excite both linear and rotational oscillations.

[0010] In one embodiment of the microelectromechanical structure, the excitation sections are arranged point-symmetrically with respect to a center of gravity of the microelectromechanical structure. This also enables the excitation of both linear and rotational oscillations with the excitation sections.

[0011] In one embodiment of the microelectromechanical structure, four excitation sections are arranged. Each excitation section can excite a linear oscillation, wherein any two of the four excitation sections can excite a oscillation that is linearly independent of the excitable oscillations of the other excitation sections. The excitable oscillations can, in particular, be perpendicular to each other.

[0012] In one embodiment of the microelectromechanical structure, it further includes a memory. A calibration function can be stored in the memory. The operation of the functional section can be adjusted using this calibration function. In particular, sensor data can be adjusted based on the calibration function.

[0013] According to a second aspect, the invention relates to a microelectromechanical component with a microelectromechanical structure according to the invention.

[0014] In one embodiment of the microelectromechanical component, it further comprises a memory. A calibration function can be stored in the memory. The operation of the functional section can be adjusted using this calibration function. In particular, sensor data can be adjusted based on the calibration function. The memory can, in particular, be located outside the microelectromechanical structure.

[0015] According to a third aspect, the invention relates to a method for calibrating a microelectromechanical structure or a microelectromechanical component. By exciting the excitation section, a linear vibration and / or a rotational vibration of the microelectromechanical structure is generated, and a calibration function is calculated from this.

[0016] Exemplary embodiments of the invention are explained with reference to the following drawings. The schematic drawing shows: Fig. 1 an embodiment of a microelectromechanical structure; Fig. 2 a stimulation section; Fig. 3 a further suggestion section; Fig. 4 another embodiment of a microelectromechanical structure; Fig. 5 another embodiment of a microelectromechanical structure; Fig. 6 another embodiment of a microelectromechanical structure; Fig. 7 a microelectromechanical component with a microelectromechanical structure; and Fig. 8 a flowchart of a procedure for calibrating a microelectromechanical structure or microelectromechanical component.

[0017] Fig. Figure 1 shows a microelectromechanical structure 10 comprising a substrate 11 and at least one utilization section 20 and an excitation section 30. In particular, in Fig. Figure 1 shows two usage sections 20, a first usage section 21 and a second usage section 22. However, only one usage section 20 may also be provided. The usage section 20, or usage sections 20, and the excitation section 30 are each connected to the substrate 11. The usage section 20 includes a sensor and / or an actuator. In particular, the usage sections 20 can include cavities 12 of the substrate 11 and, for example, a rotation rate sensor can be arranged in the first usage section 21 and an acceleration sensor in the second usage section 22. The excitation section 30 is configured to generate a linear vibration and / or a rotational vibration of the microelectromechanical structure 10.

[0018] The excitation section 30 thus makes it possible to excite vibrations, linear and / or rotational, within the microelectromechanical structure 10 itself. This significantly simplifies the determination of the behavior under linear or rotational vibrations during testing of the microelectromechanical structure 10. If necessary, calibration can even partially or completely eliminate the influence of linear or rotational vibrations.

[0019] Fig. Figure 2 shows a detailed representation of an excitation section 30. The elements of the excitation section 30 are arranged within a frame 13 of a substrate. The excitation section 30 includes, in particular, a mass 31, which is connected to the frame 13 by means of a spring element 32. First electrodes 33 are connected to the mass 31. Second electrodes 14 are connected to the frame 13. By applying a suitable electrical voltage to the electrodes 33, 14, movement of the mass 31 can be generated, in particular a linear oscillation transverse to the spring element 32. Optionally, a stop element 34 is also shown, which is likewise connected to the frame 13 and which can limit movement of the mass 31. The linear oscillation can be excited, in particular, in the direction of oscillation 35. In addition to the Fig. In addition to the configuration of excitation section 30 shown in Figure 2, other configurations can also be chosen with which a linear oscillation can be excited. With analogously constructed electrodes 33, 14, which are, for example, configured as plate capacitors, a movement of the mass 31, in particular a vibration perpendicular to the plane of the drawing, can also be generated. Here, too, a corresponding stop element 34 can be provided.

[0020] Fig. Figure 3 shows a detailed representation of another excitation section 30. The elements of the excitation section 30 are also arranged within a frame 13 of the substrate 11. The excitation section 30 includes, in particular, a mass 31. The mass 31 encloses an anchor element 36 in a frame-like manner, which is also connected to the substrate 11. The mass 31 is connected to the anchor element 36 via four spring elements 32 and is otherwise not connected to the substrate 11. Four first electrodes 33 are arranged on the mass 31, and four second electrodes 14 are arranged on the frame 13. A rotational oscillation of the mass 31 in the direction of oscillation 35 can be generated by means of the electrodes 33, 14. Furthermore, it is also possible to generate a linear oscillation of the mass 31 using the electrodes 33, 14.With analogously constructed electrodes 33, 14, which are, for example, configured as plate capacitors, a movement of the mass 31, in particular a vibration perpendicular to the plane of the drawing, can also be generated. A corresponding stop element 34 can also be provided here.

[0021] The suggestion section 30 of the Fig. 1 can, for example, be like in the Fig. 2 or Fig. 3 shown to be set up.

[0022] In one embodiment of the microelectromechanical structure 10, the excitation section 30 thus comprises a mass 31 connected to the substrate 11 via a spring element 32 and excitation electrodes 33, 14 for the mass. The mass 31 can be set into a linear oscillation and / or a rotational oscillation by means of the excitation electrodes 33, 14. Such excitation sections 30 are particularly exemplary in the Fig. 2 and Fig. Figure 3 shows that the influence of vibration on a sensor signal can be determined via sensor electrodes. These sensor electrodes can, in particular, be part of sensors arranged in the caverns 12.

[0023] In one embodiment of the microelectromechanical structure 10, the excitation section 30 has a mass 31 which is connected to the substrate 11 by several spring elements 32. Several excitation electrode systems 33, 14 can generate a rotational oscillation of the mass 31. Such an excitation section 30 is exemplified in particular in Fig. 3 shown.

[0024] Fig. Figure 4 shows a microelectromechanical structure 10 with at least two excitation sections 30, each with a mass 31 connected to the substrate 11 via a spring element 32, and excitation electrodes 33, 14 for each mass 31. The excitation sections 30 can be configured in particular as shown in Fig. 2 shown in the diagram. The vibration directions 35 of the excitation sections 30 can be configured as shown in the diagram. Fig. 4 shown, arranged parallel to each other. The excitation sections 30 can be designed in such a way that a linear oscillation can be excited by simultaneously exciting the excitation sections 30 and a rotational oscillation can be excited by oppositely exciting the excitation sections 30. The excitation sections 30 can be arranged as shown in the Fig. 2 and Fig. 3 shown in the design.

[0025] In one embodiment of the microelectromechanical structure 10, the excitation sections 30 are arranged point-symmetrically with respect to a center of gravity of the microelectromechanical structure 10. This also enables the excitation of both linear and rotational vibrations with the excitation sections 30. This is, for example, the case in Fig. 4 microelectromechanical structure shown 10 is the case.

[0026] Fig. Figure 5 shows a microelectromechanical structure 10 in which four excitation sections 30 are arranged. Each excitation section 30 can excite a linear vibration, wherein any two of the four excitation sections 30 can excite a vibration that is linearly independent of the excitable vibrations of the other excitation sections. The excitable vibrations can, in particular, be perpendicular to each other. Fig. 5. Two of the excitation sections 30 can excite a vertical vibration relative to the plane of the drawing, and two of the excitation sections 30 can excite a horizontal vibration relative to the plane of the drawing. With such an arrangement of the excitation sections 30, a linear vibration in the horizontal direction relative to the plane of the drawing of the microelectromechanical structure 10, a linear vibration in the vertical direction relative to the plane of the drawing of the microelectromechanical structure 10, and a rotational vibration of the microelectromechanical structure 10 can be excited.

[0027] Fig. Figure 6 shows a microelectromechanical structure 10, which is similar to the microelectromechanical structure of the Fig. 1 corresponds to and furthermore has a memory 18. A calibration function can be stored in memory 18. The operation of the utilization section 30 can be adjusted using the calibration function. In particular, sensor data can be adjusted using the calibration function. Such a memory 18 can also be incorporated into the microelectromechanical structures 10 of the Fig. 4 or Fig. 5 will be provided.

[0028] Fig. Figure 7 shows a microelectromechanical component 1 with a microelectromechanical structure 10 according to the invention.

[0029] In one embodiment of the microelectromechanical component 1, it further comprises a memory 2. A calibration function can be stored in the memory 2. The operation of the functional section can be adjusted using the calibration function. In particular, sensor data can be adjusted based on the calibration function. The memory 2 can, in particular, be arranged outside the microelectromechanical structure 10. The microelectromechanical structure 10 can additionally include the memory 18 as shown in Fig. 6 shown, but also without the memory 18 as in the Fig. 1, Fig. 4 or Fig. 5 shown in the design.

[0030] Fig.Figure 8 shows a flowchart 100 of a method for calibrating a microelectromechanical structure 10 or a microelectromechanical component 1. In an excitation step 101, a linear vibration and / or a rotational vibration of the microelectromechanical structure 10 is generated by excitation of the excitation section 30, and a calibration function is calculated from this in a calibration step 102. The calibration function can then be stored, for example, in memory 2 or memory 18. Further optional process steps can include operating the microelectromechanical structure 10 or the microelectromechanical component 1 in an output step 103 prior to the excitation step 101.A readout step 104 can be provided between the excitation step 101 and the calibration step 102, wherein a sensor of the microelectromechanical structure 10 or the microelectromechanical component 1 can be read out in the readout step 104. Furthermore, a compensation step 105 can be performed after the calibration step 102, in which the interference signals generated by the linear and / or rotational vibration are eliminated or compensated.

[0031] The invention is not limited to the embodiments described above, but can instead be used for a wide variety of applications in inertial sensor-based navigation, orientation, and stabilization of objects. A processing unit within the sensor can control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), validate sensor signals and check them for tolerances (e.g., for internal sensor monitoring), process signals (e.g., calculate position or orientation, filter data), and select communication protocols. Various algorithms, including self-learning AI-based ones, can be used in the processing unit for evaluating and processing the data from the inertial sensors, temperature sensors, and external data (e.g., GPS data, odometer data).

[0032] Examples of applications can be found in: • Automotive applications (e.g. ESP, Roll Over Sensing, Airbag, Road Noise Suppression, Anti-Theft Alarm System, Parking Bump Detection, Road Condition Monitoring). • in two-wheeled vehicles such as motorcycles, bicycles, and scooters (e.g., in ESP / AirBag, tilt detection, balancing) • in the case of three-wheeled vehicles such as tuk-tuks • in the avionics field (e.g. in flight stabilization and flight control) • in industrial robot applications (e.g. in position control of excavator buckets, drilling, image stabilization, flight control, alignment of satellite antennas, fine motor skills when gripping robots) • in applications for home and garden (e.g. in navigation of lawnmowers, position monitoring of doors, etc.) • in medical applications (e.g. fall detection, movement and posture tracking,...) • in sports and leisure applications (e.g. motion detection, posture detection (in golf clubs, tennis rackets, skis, ...) • in numerous consumer applications, e.g., in smartphones, tablets, wearables, herables, drones, gaming toys

[0033] Furthermore, numerous designs, changes, modifications, deviations, variations and embodiments are possible, all of which fall within the scope of the invention.

Claims

[1] Microelectromechanical structure (10) comprising a substrate (11) and at least one utilization section (20) and one excitation section (30), each connected to the substrate (11), wherein the utilization section (20) includes a sensor and / or an actuator, wherein the excitation section (30) is configured to generate a linear vibration and / or a rotational vibration of the microelectromechanical structure (10). [2] Microelectromechanical structure (10) according to claim 1, wherein the excitation section (30) has a mass (31) connected to the substrate (11) via a spring element (32) and excitation electrodes (33, 14) for the mass (31). [3] Microelectromechanical structure (10) according to claim 1 or 2, wherein the excitation section has a stop element (34). [4] Microelectromechanical structure (10) according to one of claims 1 to 3, wherein the excitation section (30) has a mass (31) which is connected to the substrate (11) by several spring elements (32), wherein several excitation electrode systems (33, 14) can generate a rotational oscillation of the mass (31). [5] Microelectromechanical structure (10) according to one of claims 1 to 4, comprising at least two excitation sections (30) each with a mass (31) connected to the substrate (11) via a spring element (32) and excitation electrodes (33, 14) for each mass (31). [6] Microelectromechanical structure (10) according to claim 5, wherein the excitation sections (30) are arranged in a point-symmetric manner with respect to a center of gravity of the microelectromechanical structure (10). [7] Microelectromechanical structure (10) according to claim 5 or 6, wherein four excitation sections (30) are arranged, wherein the excitation sections (30) can each excite a linear vibration, wherein by means of any two of the four excitation sections (30) a vibration that is linearly independent of the excitable vibrations of the other excitation sections (30) can be excited. [8] Microelectromechanical device (1) with a microelectromechanical structure (10) according to any one of claims 1 to 7. [9] Microelectromechanical component (1) according to claim 8, further comprising a memory (2) wherein a calibration function can be stored in the memory (2) wherein the operation of the usage section (20) can be adapted by means of the calibration function. [10] Method for calibrating a microelectromechanical structure (10) or a microelectromechanical component (1), wherein a linear vibration and / or a rotational vibration of the microelectromechanical structure (10) is generated by excitation of the excitation section (30) and a calibration function is calculated from it.

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