Device and method for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks
The device integrates inspection means to ensure the functionality and alignment of pot-shaped hollow bodies during cleaning, addressing damage detection and contamination issues, enhancing the efficiency and reliability of the cleaning process.
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- GSEC GERMAN SEMICON EQUIP CO GMBH
- Filing Date
- 2025-03-05
- Publication Date
- 2026-06-03
AI Technical Summary
Existing devices for cleaning pot-shaped hollow bodies, such as FOUPs for semiconductor wafers and EUV lithography masks, fail to adequately inspect and ensure the functionality of the hollow bodies during the cleaning process, leading to potential damage and contamination issues.
A device with integrated inspection means, including tactile and non-contact sensors, is used to check the functionality, dimensions, and alignment of the hollow bodies before and during cleaning, allowing for immediate detection of damage and ensuring proper operation.
The integrated inspection ensures a controlled and efficient cleaning process by detecting and addressing damage in real-time, reducing downtime and improving the effectiveness of the cleaning process.
Smart Images
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Abstract
Description
[0001] The present invention relates to a device for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks. The present invention further relates to a method for operating such a device and a computer program for carrying out such a method.
[0002] The production of highly integrated electronic circuits and other sensitive semiconductor components now takes place in factories where semiconductor wafers undergo a multitude of processing steps. A large portion of these steps are carried out in cleanrooms, which are meticulously kept free of contaminants, especially particles. Such elaborate processing is necessary because particles that come into contact with the semiconductor material of the wafers can affect the material properties of the wafers to such an extent that an entire production batch becomes defective and unusable and must be rejected.
[0003] Since cleanliness becomes increasingly important with the increasing integration density of semiconductor circuits, and the effort required for cleanliness rises exponentially with the size of cleanrooms, semiconductor wafers are not transported "openly" from one processing station to the next. Instead, special transport containers (so-called FOUPs, Front Opening Unified Pods) are used. These are box-shaped hollow bodies into which a large number of semiconductor wafers are inserted. The FOUPs are usually closed with a removable lid. Without the lid, the FOUPs have a pot-shaped base with a rectangular footprint. When the FOUPs are closed with their lids, the inserted semiconductor wafers can be transported from one cleanroom to another, protected from the environment. When the FOUPs reach a processing station, they are opened, the semiconductor wafers are removed, and the processing is carried out accordingly.After processing, the semiconductor wafers are transported back into the FOUPs and then moved to the next processing station.
[0004] Due to the high production downtime caused by semiconductor wafer contamination, it is necessary to clean the FOUPs periodically. The FOUPs are particularly susceptible to contamination from semiconductor wafer abrasion during insertion into and removal from the FOUPs.
[0005] The same principle applies to transport containers for lithography masks, especially for EUV lithography masks (extreme ultraviolet radiation). EUV lithography masks are used to manufacture very small integrated circuits. Like semiconductors, lithography masks also need to be transported, resulting in a similar situation. Therefore, when FOUPs are mentioned below, the statements regarding them apply equally to transport containers for lithography masks.
[0006] Devices for cleaning FOUPs are known, for example, from US 5,238,503 A, DE 10 2020 129 470 A1, WO 2005 / 001888 A2, and EP 1 899 084 B1. It is particularly evident from EP 1 899 084 B1 and DE 10 2020 129 470 A1 that such devices have several treatment units in which various treatment steps for cleaning the FOUPs are carried out. The FOUPs are transported from one treatment unit to the next by means of a gripping and moving device, which may, for example, be designed as a gripping robot.
[0007] To ensure that FOUPs can be cleaned properly, it is essential that the FOUPs themselves are fully functional. FOUPs typically have special gripping sections where the gripping and moving device engages. If these gripping sections are damaged, the gripping and moving device may be unable to grip the FOUPs at all, or it may not grip them in the intended orientation. Consequently, the cleaning process is interrupted, delayed, or does not achieve the desired result. EP 4 002 008 A1 describes a device and a method for inspecting an FOUP used for lithography masks. The inspection takes place at a distance from the device in which the FOUP is cleaned. Damage to the FOUP that occurs between inspection and cleaning remains undetected.
[0008] DE 11 2020 004 552 T5 discloses a device for cleaning pot-shaped hollow bodies, which has a recognition sensor that can identify the model of the hollow body, thereby ensuring that it is compatible with the cleaning station of the device that receives the hollow body.
[0009] The object of one embodiment of the present invention is to propose a device for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for lithography masks, which makes it possible to remedy the aforementioned disadvantages and, in particular, to test the functionality of the hollow bodies during the cleaning process. Furthermore, one embodiment of the present invention aims to provide a method for operating such a device. In addition, one embodiment of the invention aims to provide a computer program for carrying out this method.
[0010] This problem is solved by the features specified in claims 1, 12 and 13. Advantageous embodiments are the subject of the dependent claims.
[0011] One embodiment of the invention relates to a device for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks, comprising - a device wall that encloses an interior space, - a gripping and moving device arranged inside the interior for moving the hollow body within the interior space, - an interior cleaning unit with which the hollow body can be cleaned, and - an inspection device located inside the building, with tactile or non-contact inspection means for checking the functionality, dimensions and / or alignment of the hollow body.
[0012] The proposed device makes it possible to test the functionality of the hollow body within the device used to clean it. Functionality refers specifically to the hollow body's ability to transport semiconductor wafers and be cleaned by the device. Unlike the device disclosed in EP 4 002 008 A1, it is not necessary to provide a separate, spatially isolated device. This reduces the footprint and allows the functionality of the hollow body to be tested immediately before and during the cleaning process. Damage to the hollow body that occurs on its way to the proposed device and during the cleaning process can be detected, enabling appropriate countermeasures, such as removing the affected hollow body, to be initiated.If the device is designed so that the lid can be separated from the rest of the hollow body, it is also possible to determine whether a semiconductor wafer or remnants thereof are still present inside the hollow body. In this case, the hollow body can be removed in its closed state to prevent the semiconductor or its remnants from entering the interior of the device. Furthermore, the proposed device makes it possible to integrate the inspection of the hollow body into its cleaning process. Compared to the device disclosed in EP 4 002 008 A1, this saves time, thereby improving the cost-effectiveness of the hollow body cleaning process.
[0013] A cleaning unit can be understood as any unit capable of removing dirt and contamination, particularly particles, from a hollow body. For this purpose, the cleaning unit can include appropriate components that act upon the hollow body. The number of cleaning units can, in principle, be arbitrary, so that two, three, or more than three cleaning units can be provided within the interior. The cleaning units can act upon the hollow body in various ways: the entire hollow body can be cleaned, or only the outer surface, or only the inner surface. Furthermore, cleaning can be carried out with different fluids, for example, liquid-based or gaseous.
[0014] Tactile inspection means can, for example, include styluses, such as those described in DE 10 2016 103 379 B4, which are able to determine, regardless of the lighting conditions in the device, whether a particular object is in the intended position or not.
[0015] The hollow body has a wall that forms an inner surface and an outer surface, enclosing the interior of the hollow body, and a first gripping section on the outer surface. According to the invention, the inspection means are designed and arranged for inspecting the outer surface of the hollow body. While the inner surface of the hollow body is largely protected by the wall, the outer surface is largely exposed to external influences such as collisions with other hollow bodies or with the gripping and moving device. Therefore, the probability of damage occurring on the outer surface of the hollow body is higher than on the inner surface. Consequently, inspecting the outer surface of the hollow body significantly contributes to ensuring a trouble-free cleaning process.
[0016] The gripping and movement device for moving the hollow body within the interior can interact with the first gripping section. According to the invention, the inspection means comprise a first group of cameras with which the position and orientation of the first gripping section can be determined and damage to the first gripping section can be detected. The number of cameras in the first group can be chosen arbitrarily, and the first group can also explicitly consist of only one camera. The cameras are arranged so that they can capture the first gripping section.
[0017] Hollow bodies designed as FOUPs (Folded Out Units) typically feature a standardized first gripping section that can be grasped by the gripping and moving device to move the hollow body. This first gripping section can be damaged, preventing the gripping and moving device from gripping the hollow body or from gripping it in the correct orientation. Depending on the hollow body design, the first gripping section may be a separate component connected to the hollow body via a screw or snap-fit connection. This connection can loosen during operation, potentially disrupting the cleaning process. Therefore, the functionality of the first gripping section is of particular importance for the cleaning process.The first group of cameras can be specifically designed to check the functionality of the first gripping section, enabling highly reliable verification of its functionality. Furthermore, the correct alignment of the first gripping section can also be checked, for example, before it is grasped by the gripping and moving device. Even if the first gripping section is undamaged, an alignment that deviates from the intended orientation during gripping can lead to damage to the hollow body. Moreover, incorrect alignment can make gripping impossible, preventing the hollow body from being moved by the gripping and moving device and interrupting the cleaning process.
[0018] It has been found that using cameras allows for particularly reliable and relatively quick verification of the functionality and alignment of the first gripping section. The cameras also enable verification of the alignment of the entire hollow body within the device, which is also of great importance for the trouble-free execution of the cleaning process.
[0019] According to a further embodiment, the non-contact inspection means can be designed to use electromagnetic waves and / or mechanical vibrations. Electromagnetic waves can be used in the form of radar radiation or visible light radiation. Mechanical vibrations can be used in the form of ultrasonic waves. While a tactile inspection means can essentially only determine whether an object is in the desired position, non-contact inspection means can examine more complex structures, such as the contour of a hollow body, to check for damage, which is noticeable, among other things, in deviations in dimensions, for example, if a piece of the hollow body has been broken off. The orientation of the hollow body, particularly in its interior, can also be checked using the non-contact inspection means.Furthermore, contact during inspection can be avoided, which could otherwise lead to damage to the hollow body. In summary, the inspection device helps to ensure that the cleaning process is carried out in a controlled manner and that the process can be stopped in case of deviations without causing significant delays. Secondly, the hollow body can be tested for its functionality, i.e., whether it can continue to be used for storing and transporting semiconductor wafers or whether it must be discarded.
[0020] In another embodiment, the inspection means can include a second group of laser scanners and / or lidar scanners and / or photoelectric sensors with which the inner surface and / or the interior of the hollow body can be inspected. The inner surface of the hollow body has shelf-like sections into which the semiconductor wafers are placed. Support elements, also known as "bumpers," are arranged on these sections and come into contact with the wafers. The support elements provide defined contact points for the semiconductor wafers. However, during operation of the device, the support elements may develop sharp edges that can scratch the semiconductor wafers. Such scratches can be detected particularly well with laser scanners or lidar scanners, although it is possible that such scratches could also be identified with appropriately configured cameras.Furthermore, objects such as particles from broken wafers or semiconductor wafers that were mistakenly left inside the unit can be detected. In the case of particles, a decision can be made as to whether they can be removed by cleaning or whether they are so large that the entire unit must be discarded. In the case of a semiconductor wafer that was left inside, the entire unit must be discarded.
[0021] The laser scanners and / or lidar scanners and / or photoelectric sensors are arranged in the device in such a way that they can capture the inner surface and / or the interior of the hollow body. While cameras can also be used for this purpose, most cameras have a limited depth of field. This can be remedied with line-scan cameras, which trace a specific, typically linear path that, in this case, points towards or even extends into the interior of the hollow body. This at least partially overcomes the disadvantage of limited depth of field, but it involves additional equipment complexity compared to using laser scanners, lidar scanners, and / or photoelectric sensors. Nevertheless, the second group can also include cameras in addition to or as an alternative to laser scanners, lidar scanners, and / or photoelectric sensors.
[0022] A further developed embodiment, in which the wall forms an opening that can be closed with a lid, is characterized by the fact that the inspection means for checking the functionality, dimensions, and / or alignment of the lid are set up and arranged. The lid can also be damaged during operation, so that it cannot fulfill its function of protecting the interior of the hollow body, particularly from the ingress of particles. Depending on the design, the lid has a locking unit with which it can be connected to the hollow body. The functionality of the locking unit can be checked in this embodiment. Furthermore, it can be checked whether the locking unit is in the correct position to be connected to the hollow body, which is also possible in principle with inspection means that are not specifically designed for checking the lid.Nevertheless, in this embodiment, the inspection means can be adapted to the specific properties of the lid, making the inspection more reliable and accurate. During operation of the device, the lid may become damaged or subject to wear. In this case, the dimensions of the lid change, which can be detected by the inspection means.
[0023] According to a further embodiment, in which the lid comprises an outer surface and an inner surface, the inspection means can include a third group of cameras with which the inner or outer surface of the lid can be inspected. Inspection of the inner or outer surface of the lid provides information as to whether the lid is correctly oriented and, in particular, whether the inner surface of the lid actually faces into the interior of the hollow body or not. Furthermore, the inspection means can be used to check whether the locking unit can be opened.
[0024] Depending on the design, the lid can be connected to the hollow body in two or four rotational positions. The lid typically has markings that indicate whether it is in the desired rotational position. These markings can be identified using the third group of cameras. This ensures that the lid is connected to the hollow body in the correct rotational position. Additionally, the lid has seals that can be inspected for damage.
[0025] The third group of cameras is arranged in the device in such a way that they can capture the inner surface of the lid and / or the outer surface of the lid.
[0026] In another embodiment, it may be advantageous for the cleaning unit to - has a process chamber into which the hollow body can be inserted for cleaning, wherein the process chamber is accessible through a process chamber opening, and - comprising a lid handling unit which is movably mounted between an open position in which the lid handling unit releases the process chamber opening and a closed position in which the lid handling unit closes the process chamber opening, wherein - the lid is detachably connectable to the lid handling unit, and - the lid can be inspected using the third group when the lid handling unit is in the open position and the lid is connected to the lid handling unit.
[0027] In this embodiment, for cleaning, the lid is placed on the lid handling unit before the process chamber is closed. In this embodiment, the lid is then inspected by the third group of cameras when it is placed on the lid handling unit. Therefore, the lid handling unit used for cleaning the lid is simultaneously integrated into the lid inspection, so that, apart from the cameras, no other components are required for inspection. Furthermore, the cleaning process is not delayed, or only minimally.
[0028] It is also possible to use the third group of cameras to inspect the interior of the hollow body. This can be achieved by first moving the hollow body, separated from its lid, out of the detection field of the cameras of the third group using the gripping and handling device, in order to inspect the lid. Once the lid inspection is complete, the hollow body can be moved back into the detection field so that the interior of the hollow body can be inspected by the cameras of the third group. Therefore, the cameras of the third group can be used for both the lid inspection and the interior of the hollow body. It is also possible to inspect one or more of the outer surfaces of the hollow body with the cameras of the third group.
[0029] According to a further embodiment, the inspection means may include a fourth group of cameras, which is arranged in the lid handling unit and with which the lid can be inspected when the lid is connected to the gripping and moving device. While the third group of cameras can be used in particular to inspect the inner surface of the lid, the fourth group of cameras can primarily be used to check the outer surface of the lid. As mentioned, the outer surface of the lid typically has markings that can be used to determine the orientation of the lid. Checking the outer surface of the lid therefore serves in particular to ensure the correct orientation of the lid.
[0030] In a further developed embodiment, in which the hollow body has a second gripping section on the outer surface of the hollow body, with which the hollow body can be detachably connected to an adjacently arranged object, the device can have a wall opening formed by the device wall. - through which the interior is accessible and - which can be closed by a closure body, wherein the closure body - is movably mounted in the device by means of a fastening unit, and - has a receiving section with which the hollow body can be detachably connected to the second gripping section of the closure body, and - a fifth group of cameras is arranged in the locking body, which can be used to determine the position and orientation of the second gripping section and to detect damage to the second gripping section.
[0031] The sealing element allows the hollow body to be inserted into the interior of the device quickly and easily. In this design, the hollow body can be inspected before being inserted. If damage is detected, the hollow body can be rejected before being placed inside. Unnecessary processing steps are avoided.
[0032] In a further developed embodiment, a sixth group of non-contact inspection means can be arranged on the gripping and moving device. In this embodiment, the gripping and moving device can be integrated into the inspection of the hollow body. Furthermore, the non-contact inspection means can be used as an orientation aid for the gripping and moving device within the interior, enabling the gripping and moving device to calibrate itself. Additionally, the gripping and moving device can abort the gripping of a hollow body if the inspection means arranged on it detect that the gripping cannot be successfully carried out due to incorrect positioning of the hollow body and / or the gripping and moving device.If possible, the gripping and movement device can correct the movement sequence so that the grasping can still be carried out successfully.
[0033] In general, the number of inspection devices in each group can be freely chosen, and in particular, a single inspection device can be used. It is not excluded that inspection devices based on different operating principles, such as ultrasound, light, and lidar, may be included within a single group. The inspection devices are arranged within the device in such a way that they can detect the section of the hollow body to be inspected. Furthermore, one or more cameras can be included in each group.
[0034] A further developed embodiment can be characterized by the fact that lighting means for illuminating the hollow body are arranged in the device. Lighting means are to be understood as including not only light sources but also directional devices such as mirrors and reflectors, with which a light beam can be deflected in a targeted manner. Depending on the design of the hollow body, it is sometimes made of a dark and opaque material. Particularly when using cameras, it can therefore happen that areas of the hollow body can only be inspected poorly or not at all because these areas are too dark. By using lighting means, even such dark areas can be illuminated so that they can be reliably inspected with cameras.The lighting fixtures can be shaped to suit the specific conditions of the inspection site, ensuring optimal illumination. For example, bar lights and / or ring lights can be used.
[0035] According to a further embodiment, the cleaning unit can have at least one cleaning device for cleaning the hollow body and / or the lid and / or at least one evacuation device for applying a vacuum to the hollow body and / or the lid. A cleaning fluid can be directed to the hollow body and / or the lid within the cleaning device. The cleaning fluid loosens and removes particles from the hollow body and the lid. For example, highly purified water, also known as ultrapure water, can be used as the cleaning fluid. After the cleaning process, a vacuum can be applied using the evacuation device. Applying a vacuum serves to remove any remaining cleaning fluid residue from the surface of the hollow body and the lid as a result of cleaning within the cleaning device.Due to capillary action, moisture diffuses even into microscopically small pores on the surface of the hollow body and the lid. This moisture can also be removed by the negative pressure, thus enabling drying even at a microscopic level.
[0036] One embodiment of the invention relates to a method for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks, using a device according to one of the preceding claims, comprising the following steps: - Checking the functionality, dimensions and / or alignment of the hollow body with the inspection device using tactile or non-contact inspection means and generating signals containing actual values, using the first group of cameras ◯ the outer surface of the hollow body, inspected, ◯ determines the position and orientation of the first gripping section as well as ◯ Damage to the first gripping section is detected, - Comparing actual values with target values using a control unit and calculating a difference value, - in the event that the difference value falls below a predefined threshold, output an OK signal or output no signal, or - In the event that the difference value exceeds the threshold, an error signal is output.
[0037] Dimensions can indicate, for example, increased wear or damage to the hollow body. Correct alignment of the hollow body within the device is essential for the cleaning process to proceed as intended.
[0038] One implementation of the invention relates to a computer program product with program code stored on a computer-readable medium for carrying out the method according to the previously described design.
[0039] The technical effects and advantages that can be achieved with the proposed method and computer program correspond to those discussed for the present device. In summary, it should be noted that the method and computer program make it possible to test the functionality of the hollow body within the device used for cleaning it. In contrast to the device disclosed in EP 4 002 008 A1, it is not necessary to provide a separate, spatially isolated device. This reduces the space required and allows the functionality of the hollow body to be tested immediately before and during the cleaning process.
[0040] Depending on the design of the procedure, the OK signal can also be issued when the threshold is exceeded and the error signal when it is not reached.
[0041] Exemplary embodiments of the invention are explained in more detail below with reference to the accompanying drawings. These show Fig. 1A a first perspective view of an embodiment of a device for cleaning pot-shaped hollow bodies, Fig. 1B a second perspective view of the in Fig. Device shown in 1A, Fig. 1C is a non-scale and not detailed enlarged view of the in Fig. 1A defined section A in a first operating state, wherein the section A is designed according to a first embodiment, Fig. 1D den in Fig. Section A shown in 1C in a second operating state, Fig. 1E a basic representation of a cleaning unit for cleaning the hollow body and / or the lid, wherein the cleaning unit is designed according to a first embodiment, Fig. 1F an isolated reproduction of the in Fig. 1E defined section B in a first operating state, Fig. 1G den in Fig. Section B shown in 1F in a second operating state, Fig. 1H den in Fig. Section B shown in 1F in a third operating state, Fig. 1I a view of a hollow body, which is connected to the in the Fig. The device shown in 1A to 1H can be cleaned. Fig. 1J an enlarged representation of the in Fig. 1I marked section C, Fig. 2A a view of the in Fig. 1A defined section A in a second operating state, wherein the section A is designed according to a second embodiment, Fig. 2B an enlarged and detailed view of the in Fig. 1A defined section D, Fig. 2C an enlarged and detailed view of the in Fig. 1A defined section B in a first operating state, wherein section B is designed according to a second embodiment, and Fig. 2D an enlarged and detailed view of section B in a second operating state.
[0042] In the Fig. 1A and Fig. Figure 1B shows a device 12 for cleaning pot-shaped hollow bodies 10 from two different perspectives. The device 12 according to the invention comprises a device wall 14 (see Figure 1B). Fig. 1C, which is in Fig. (View A, marked 1A, is enlarged and shows in principle), which encloses an interior space 16. A gripping and moving device 17 is provided in the interior space 16, with which the hollow bodies 10 to be treated can be moved within the interior space 16. In addition, a cleaning unit 18 is located in the interior space 16, which contains a number of cleaning devices 20, one of which is located in the Fig. 1E is shown in detail, and a number of evacuation facilities 22 are trained.
[0043] Furthermore, the device 12 interacts with another gripping and moving device 24, with which the hollow bodies 10 can be moved outside the interior. The other gripping and moving device 24 is designed in the manner of an overhead transport system (OHT), in which the hollow bodies 10 are transported near the ceiling (see in particular Fig. 1C).
[0044] The device wall 14 forms a wall opening 26, which can be closed by a locking element 28 and through which the interior 16 is accessible. The locking element 28 is movably mounted in the device 12 by means of a fastening unit 30. In this case, the fastening unit 30 is designed as a hinge 32, with which the locking element 28 is rotatably attached to the device wall 14 in the manner of a flap. The locking element 28 is positioned between a first position ( Fig. 1C) and a second position ( Fig. 1D) movable.
[0045] Furthermore, the locking body 28 has a receiving section 34 with which the hollow body 10 can be detachably attached to the locking body 28. In the illustrated embodiment, suitably designed locking means 36 are provided in the receiving section 34 for this purpose. In the illustrated embodiment, the locking body 28 is L-shaped (see Fig. 1C and Fig. 1D) and has a first leg 33 and a second leg 35, which form an angle of 90° to each other and are each connected at the hinge 32. The receiving section 34 is arranged on the first leg 33, which in the first position is located outside the interior 16. The second leg 35 closes the opening 26 when the locking body 28 is in the first position.
[0046] To move the locking body 28 into the second position, it is rotated by 90° (see Fig. 1D). In the second position, the opening 26 is closed by the first leg 33. Consequently, the opening 26 is only open when the locking element 26 is moved between the first and second positions.
[0047] The hollow body 10 is essentially cuboid in shape and comprises a wall 37 with a bottom wall 38 and four side walls 40, an opening 42 opposite the bottom wall 38, and a lid 44 with which the opening 42 can be closed. The hollow body 10 has an inner surface 60, an outer surface 62, and an interior space 64. The lid 44 has an inner surface 66 and an outer surface 67.
[0048] Furthermore, the hollow body 10 is provided with a first gripping section 46 and a second gripping section 48, each arranged on one of the side walls 40 on the outer surface 62 of the hollow body. The first gripping section 46 is T-shaped in section and is therefore also referred to as a "mushroom". The first gripping section 46 is designed to interact with the gripping and movement device 17. The second gripping section 48 is designed to interact with the locking means 36 of the receiving section 34 of the closure body 28, thereby allowing the hollow body 10 to be detachably connected to the closure body 28.
[0049] In Fig. Figure 1E shows the cleaning device 20 in detail, with which a cleaning process can be carried out. The cleaning device 20 has a housing 68, which forms a housing opening 70 that can be closed with a cover 72 that can be removed from the housing 68. In addition, a support wall 62 is arranged in the housing 68, onto which the hollow body 10 can be placed. The cleaning device 20 forms a process chamber 73, which is bounded by the housing 68 itself and by the cover 72.
[0050] The cleaning device 20 has a first cleaning head 80. The cleaning device 20 also includes a second cleaning head 82, which is essentially U-shaped. The second cleaning head 82 is rotatable about a second axis of rotation D2, the drive mechanism used for this purpose not shown.
[0051] The housing 68 further forms a process chamber opening 84 through which the process chamber 73 is accessible. The process chamber opening 84 can be closed with a cover handling unit 54, which is rotatably attached to the device wall 14 about a first axis of rotation D1 by a further fastening device 57. The cover handling unit 54 can be moved by a drive unit (not shown) between an open position, in which the cover handling unit 54 releases the process chamber opening 84, and a closed position, in which the cover handling unit 54 closes the process chamber opening 84. Fig. 1E is located in the open position of the lid handling unit 54.
[0052] The cleaning device 20 is also equipped with a further first cleaning head 86, which is located near the lid handling unit 54 when it is in the closed position.
[0053] The cleaning device 20 further comprises a fluid guidance unit 88, by which a first cleaning fluid can be guided, in a manner not shown in detail, to the first cleaning head 80 and to the second first cleaning head 86, and a second cleaning fluid to the second cleaning head 82. The fluid guidance unit 88 further comprises a first discharge channel 90, by which the first cleaning fluid dispensed by the first cleaning head 80 and by the second first cleaning head 86 can be discharged from the process chamber 73. In addition, the fluid guidance unit 88 has a second discharge channel 92, by which the second cleaning fluid is guided separately from the first cleaning fluid within the cleaning device 20.
[0054] Evacuation facility 22 (see Fig. 1A and Fig. 1B) is essentially constructed like the cleaning device 20, however, it does not have a fluid guidance unit or cleaning heads. Instead, the evacuation device 22 has a vacuum connection (not shown here) to which a vacuum pump can be connected, so that a negative pressure can be applied in the process chamber 73 of the evacuation device 22.
[0055] The device 12 comprises an inspection unit 50 arranged in the interior 16, with inspection means 52 that operate using tactile or non-contact methods for checking the functionality and / or the alignment of the hollow body 10. The inspection unit 50 has a number of inspection means 52 that are arranged at different locations within the device 12 and can operate with different principles. In the illustrated embodiment, the inspection unit 50 comprises a first group 56 of cameras with which the position and alignment of the first gripping section 46 can be determined and damage to the first gripping section 46 can be detected (see in particular...). Fig. 1A, Fig. 1B and Fig. 1D). Furthermore, the inspection device 50 comprises a second group 58 of laser scanners and / or lidar scanners and / or photoelectric sensors, with which the inner surface 60 of the hollow body and / or the interior of the hollow body 64 can be inspected. The second group 58 may also include cameras. The inspection device 50 also comprises a third group 74 of cameras, with which the inner surface 66 of the lid and / or the outer surface 67 of the lid can be inspected. In addition, a fourth group 76 of cameras is provided, which is arranged in the lid handling unit 54 and with which the lid 44 can be inspected when the lid 44 is connected to the gripping and movement device 17. Furthermore, the inspection device 50 comprises a fifth group 78 of cameras, with which the position and orientation of the second gripping section 48 can be determined and damage to the second gripping section 48 can be detected.The fifth group 78 can also be designed to detect damage to the first gripping section 46. A sixth group 79 of inspection means 52, for example in the form of at least one camera, is attached to the gripping and movement device 17.
[0056] The device 12 is equipped with a control unit 94, which communicates with the inspection means 52. The signals generated by the inspection means 52 are evaluated by the control unit 94, which initiates countermeasures depending on the content of the signals.
[0057] The device 12 is operated in the following manner: The locking body 28 is inserted into the Fig. 1C shows the first position moved (section A in Fig. 1A). As mentioned, the receiving section 34 is then located outside the interior 16. A hollow body 10 to be cleaned is positioned with the further gripping and moving device 24, which interacts with the first gripping section 46, so that it can be placed on the first leg 33 and connected to the receiving section 34 using the locking means 36 and the second gripping section 48. As can be seen from the Fig. 1C and Fig. As shown in Figure 1D, the fifth group 78 of cameras is arranged in the locking body 28. Two cameras are located in the first leg 33 and one camera in the second leg. Additionally, an illumination device 96, for example an LED, is located in the second leg. The two cameras located in the first leg 33 can determine the position and orientation of the second gripping section 48 and detect any damage to the second gripping section 48. The camera located in the second leg 35 can be used to check whether the locking means 36 are functioning correctly and are in the correct position to connect the hollow body 10 to the locking body 28. The illumination devices 96 provide sufficient illumination for the fifth group 78 of cameras. The inspection of the second gripping section 48 and the locking means 36 is performed while the hollow body 10 is still not connected to the locking body 28.The hollow body 10 is held by the further gripping and moving device 24 in a position relative to the first leg 33 which is optimal for inspection with the cameras.
[0058] If the second gripping section 48, the locking means 36, and, depending on the configuration of the fifth group 78, also the first gripping section 46, show no abnormalities, the hollow body 10 is connected to the closure body 28 using the second gripping section 48 and the locking means 36. The further gripping and movement device 24 is detached from the hollow body 10 and removed. Subsequently, the closure body 28 is rotated 90° into the second position using the fastening unit 30, which is in Fig. It is represented in 1D.
[0059] However, if the fifth group 78 of cameras shows abnormalities at the first gripping section, at the second gripping section 48 and / or at the locking means 36, the control unit 94 checks which countermeasures must be taken. If the hollow body 10 is damaged, it can be discarded. The locking means 36 may require repair.
[0060] After the locking body 28 is inserted into the Fig. Once the second position shown in Figure 1D has been moved, the first group 56 of cameras checks the orientation and position of the first gripping section 46. The first group 56 of cameras also checks whether the first gripping section 46 is damaged. If no abnormalities are found, the gripping and movement device 17 grasps the hollow body 10 on the first gripping section 46. As mentioned, the gripping and movement device 17 has a sixth group 79 of inspection means 52, which can also be used to check the first gripping section 46 for orientation, position, and damage. In addition, the sixth group 79 of inspection means 52 serves to orient the gripping and movement device 17 within the interior 16.
[0061] After the gripping and moving device 17 has grasped the hollow body 10, the gripping and moving device 17 transports the hollow body 10 to the cleaning device 20, as shown in the figure. Fig. 1E is evident. Before the hollow body 10 is transported to the cleaning device 10, the outer surface 62 of the hollow body can be cleaned in a blow-off device 108 provided for this purpose (see Fig. 2B) are carried out (in the Fig. 1A and Fig. 1B not shown).
[0062] For presentation purposes, the gripping and movement device 17 is shown in Fig. 1E not shown. Fig. However, 1F shows the one in Fig. 1E marked area B in an isolated form with part of the lid handling unit 54. The lid handling unit 54 is in the open position, so that, as shown Fig. As shown in Figure 1F, the fourth group 76 of cameras can inspect the cover 44, particularly for damage. The inspection is also carried out when the hollow body 10 is at a certain distance from the cover handling unit 54. The cover handling unit 54 is also equipped with a lighting device 96. If no abnormalities are detected, the hollow body 10 with the cover 44 is placed onto the cover handling unit 54 and connected to it by means not shown. The gripping and moving device 17 then moves the hollow body 10 slightly away from the cover handling unit 54, thereby detaching the cover 44 from the hollow body 10.
[0063] In the Fig. 1I and Fig. Figure 1J shows a semiconductor wafer 98 located inside the hollow body 64. However, the hollow body 64 must be completely empty during the cleaning process. The semiconductor wafer 98 was unintentionally not removed from the hollow body 10. Specifically, from the Fig. It is evident that the hollow body 10 has support elements 104 on which the semiconductor wafers 98 are placed. To prevent the semiconductor wafer 98 from falling uncontrollably out of the hollow body 10 and breaking inside 16, the gripping and moving device 17 moves the hollow body 10 away from the lid 44 only to the extent that the semiconductor wafer 98 is still guided by the support elements 104, but protrudes slightly from the hollow body 10. Now, the second group 58 is activated by laser scanners and / or lidar scanners and / or photoelectric sensors and / or cameras, as can be seen from a comparison of the Fig. 1F and Fig. 1G is evident. As can be seen from the Fig. As can be seen from Figure 1A, the second group 58 is arranged in the base of the gripping and moving device 17. As mentioned, a sixth group 79 of inspection means 52 can be arranged on the gripping and moving device 17, with which, in particular, the first gripping section 46 can be inspected.
[0064] The base is in the Fig. 1F, Fig. 1G and Fig. 1H not shown. The second group 58 comprises reflectors 102 with which the laser or light beam can be directed into the interior of the hollow body 64. The reflectors 102 can be movable so that the laser or light beam can scan the entire interior of the hollow body 64. The in Fig. The beam path shown in Figure 1G does not, as one might assume, pass through the lid 44 and the lid handling unit, but is guided around them by the reflector 102 into the interior of the hollow body 64. This is particularly due to the residues 99 originating from the semiconductor wafer 98 or from the residues 99 originating from the semiconductor wafer 98 (see Figure 1G). Fig. The reflection caused by 1H) allows the second group 58 to determine whether a semiconductor wafer 98 and / or remnants thereof are present in the hollow body 10. While the hollow body 10 can be weighed to determine whether it is empty or contains a semiconductor wafer 98, the weight of any remaining semiconductor wafer remnants may be too imprecise to reliably ascertain whether the hollow body 10 is empty. The use of the inspection means 52 enables a significantly higher degree of reliability in this regard.
[0065] To determine whether one or more semiconductor wafers 98 are still present in the hollow body 10, determining the weight of the hollow body 10 is an alternative or additional method to the procedure described above.
[0066] If at least one semiconductor wafer 98 is still present in the hollow body 10, the hollow body 10 in question is sorted out. For this purpose, the lid 44 is reattached to the hollow body 10 and removed from the interior 16 using the closure body 28.
[0067] If no semiconductor wafer 98 is present in the hollow body 10, but some remnants 99 originating from it are discovered, the control unit 94 decides, in particular based on the number and size of the remnants 99, whether the hollow body 10 is to be sorted out in the manner mentioned above or whether it is to be cleaned.
[0068] In addition to the presence of semiconductor wafers 98 and remnants 99 derived from them, the hollow body 10 can also be tested for other criteria. As shown from Fig. As can be seen from Figure 1I, the hollow body 10 has a sealing surface 100, which seals the interior of the hollow body 64 against the cover 44. The cover 44 has a correspondingly designed seal for this purpose (not shown). Objects lying on the sealing surface 100 can be detected by the second group 58. Other elements of the hollow body 10, such as a diffuser, which can be used to introduce a flushing fluid such as nitrogen into the interior of the hollow body 64, or the previously mentioned support elements 104, can also be checked for damage. If damage is present or sharp edges have formed on the support elements 104, the hollow body 10 can be discarded.
[0069] In the event that the hollow body 10 is to be cleaned, it is moved separately from the lid 44 from the gripping and moving device 17 into the cleaning device 20 (see Fig. 1E). The hollow body 10 arranged in the cleaning device 20 is shown only for the sake of completeness and, for illustrative reasons, does not correspond to the hollow body 10 located above the lid handling unit 54. The inner surface 60 of the hollow body is cleaned using the first cleaning head 80 with a first cleaning fluid, and the outer surface 62 of the hollow body is cleaned using the second cleaning head 82 with a second cleaning fluid.
[0070] The inner surface 66 of the lid 44, which rests on the lid handling unit 54, will now be inspected by the third group 74 of cameras. For example, the previously mentioned but not shown seal or retainers, which fix the semiconductor wafers 98 in the hollow body 10, can be checked for damage.
[0071] If the lid 44 is free of damage, the lid handling unit 54 is rotated 90° so that the process chamber opening 84 is closed. The inner surface of the lid 66 can now be cleaned with another cleaning fluid, in particular with the first cleaning fluid, using cleaning nozzles.
[0072] After completion of the cleaning process, the hollow body 10 is removed from the cleaning unit 20 by the gripping and handling device 17, reattached to the lid 44, and fed into the evacuation unit 22. The procedure for this is largely analogous to that used in the cleaning unit 20. In particular, the lid 44 is first separated from the hollow body 10. Here, too, the hollow body 10 and the lid 44 can be inspected with appropriate inspection tools 52, if deemed necessary. A vacuum is applied in the evacuation unit 22 to the lid 44 and the hollow body 10, causing any residual cleaning fluids 99 used in the cleaning unit 20 to evaporate.Once this process is complete, the lid 44 is reattached to the hollow body 10 and placed onto the closure body 28 by the gripping and moving device 17. From there, the cleaned hollow body 10, together with the lid 44, is removed from the interior 16 of the device 12 and transported further by the gripping and moving device 24. If desired, the inspection of the hollow body 10 performed on the closure body 28 can be repeated. The hollow body 10, removed from the interior 16, can now be used for transporting and storing semiconductor wafers 98.
[0073] Fig. 2A shows a view of the in Fig. 1A defined section A in a second operating state, wherein section A is designed according to a second embodiment. In Fig. Section A according to a first embodiment has already been shown in Figure 1C; however, the hollow body 10 is not yet firmly connected to the receiving section 34, which is shown in Figure 1C. Fig. However, the second operating state shown in Figure 2A is the case. Again, the hollow body 10 can be inspected for damage and correct positioning using the first group 56 of inspection devices 52. In particular, the first gripping section 46 can be inspected. In many cases, the first gripping section 46 is clipped into the hollow body 10, which is why it can detach from the hollow body 10 or become tilted. If this occurs, the hollow body 10 is rejected.
[0074] A tag (not shown), for example a barcode or an RF tag (radio frequency tag), can be attached to a narrowly defined area of the outer surface 62 of the hollow body. This tag can be read by the device 12 using appropriate reading means. This tag can contain information about the hollow body 10, such as its exact type and how it should be cleaned (for example, only the outer surface 62, only the inner surface 60, or both, and for how long). The inspection means 52 can check the outer surface 62 of the hollow body to determine whether such a tag is present. If no tag is present, the hollow body 10 is rejected before it is even placed in the interior 16 to prevent unnecessary or incorrectly performed cleaning processes.
[0075] Some manufacturers and / or operators of the hollow bodies 10 affix stickers to them containing information that is not relevant for cleaning. These stickers should therefore not be confused with the tags. These stickers must be completely removed, as they represent a source of contamination. The presence of such stickers or any residue thereof can be checked using the first group 56 of inspection agents 52.
[0076] In this embodiment, the first group 56 of inspection means 52 comprises only one camera, which is arranged above the wall opening 26. To achieve good illumination for inspection, lighting means 96, designed as bar lights 106, are provided between the inspection means 52 and the wall opening 26. An embodiment in which the lighting means 96 are designed as ring lights arranged around the inspection means 52 is not shown.
[0077] Fig. 2B shows an enlarged and detailed view of the in Fig. 1A defined section D. While in section D the in Fig. In the device shown in 1A, a base for the gripping and moving device 17 is shown, there according to the Fig. In the embodiment shown in 2B, a blow-off device 108 can be seen, with which the outer surfaces of the hollow bodies 62 can be blown off with air or another fluid for cleaning purposes. The nozzles used for this purpose are shown in Fig. 2B not shown. For blow-off, the hollow body 10, closed with the lid 44, is inserted by the gripping and moving device 17 into a blow-off chamber 110, which is bounded by side walls 114 and a bottom grid 112. In the blow-off chamber 110 is a Fig. 2B A concealed and therefore invisible, rotatable storage structure is arranged, onto which the hollow body 10 can be placed by the gripping and moving device 17. Consequently, the hollow body 10 does not rest on the base grid 112. One of the side walls 114 has an opening 118 that can be closed by means of a flap 116, through which the inspection means 52 of the second group 58, which also include a camera, can inspect the outer surface 62 of the hollow body and the outer surface 67 of the lid. For this purpose, the hollow body 10 is rotated with the storage structure, for example, by 90° each time. While the inspection means 52 of the first group 56 (see Fig. 2A) Inspecting the hollow body outer surface 62 on which the first gripping section 46 is arranged, the inspection means 52 of the second group 58 inspect the adjacent hollow body outer surfaces 62 and the lid outer surface 67.
[0078] As mentioned, the hollow body 10 is placed on the support structure for blow-off. However, it is also possible to omit the support structure and, during blow-off and inspection, to move and hold the hollow body 10 in the desired position using the gripping and moving device 17. The gripping and moving device 17 therefore remains connected to the hollow body 10.
[0079] In order to be able to adjust a targeted flow of the fluid within the blow-off chamber 110, the opening 118 is closed with the flap 116 after completion of the inspection.
[0080] Fig. 2C shows an enlarged and detailed view of the in Fig. 1A defined section B in a first operating state, wherein section B is configured according to a second embodiment. The in Fig. The first operating state shown in 2C largely corresponds to that in Fig. Figure 1H shows the operating state in which the lid 44 is separated from the hollow body 10 and placed on the lid handling device 54, to which it is connected. The third group 74 of inspection means 52, which includes a camera, allows viewing of the inner surface 66 of the lid, which can be checked for defects and its correct positioning on the lid handling device 54. Lighting means 96, designed as bar lights 106, are arranged at the level of the inspection means 52. In the illustrated embodiment, two bar lights 106 are provided, which run parallel to each other and are aligned so that they can illuminate the inner surface 66 of the lid. The bar lights 106 are attached, inclined slightly inwards, to a support structure 120, on which the inspection means 52 are also suspended.
[0081] Lighting devices 96 are also provided at the level of the lid handling device 54. These are also designed as bar lights 106 and are arranged in a U-shape around the lid handling device 54. This illuminates the inner surface of the lid 66 in such a way that it can be easily inspected.
[0082] It is also conceivable that additional bar lights 106 are arranged to the side of the opening 46 and / or above the opening 46 in order to further improve the illumination.
[0083] Fig. 2D shows an enlarged and detailed view of the in Fig. 1A defined section B in a second operating state. As already mentioned in relation to the Fig. As described in 1F to 1H, the lid 44 is separated from the hollow body 10 using the lid handling device 54. This step is already performed before the step described in Fig. The operating condition shown in Figure 2C was carried out. The hollow body 10, separated from the cover 44, is first removed from the detection field of the inspection means 52 of the third group 74 by means of the gripping and moving device 17 (not shown), as shown in Figure 2C. Fig. Figure 2C illustrates this. Once the inspection of the inner surface of the cover 66 is complete, the hollow body 10 is held within the detection field of the inspection elements 52 of the third group 74 by means of the gripping and movement device 17, with its opening 42 pointing towards them, so that the interior of the hollow body 64 can be inspected. The hollow body 10 is positioned between the cover 44 and the inspection elements 52 of the third group 74. If desired, the hollow body 10 can be held within the detection field of the third group 74 in a different orientation using the gripping and movement device 17 to perform further inspections.
[0084] As mentioned, the inspection of the hollow body 10 can also be used to verify its correct positioning within the device 12. Furthermore, changes to the surfaces of the hollow body 10 that indicate wear can be detected. It can also be checked whether any parts of the hollow body 10 have broken off. The latter two criteria can be checked particularly well based on the dimensions of the hollow body 10, for which the use of cameras is recommended. The control unit 94 can be equipped with self-learning and AI-supported algorithms to, for example, recognize situations that led to errors in past cleaning processes. The data generated by the inspection equipment can be used for this purpose.If such situations are detected during the current cleaning process, effective countermeasures can be initiated, for example the controlled removal of the relevant hollow body 10 from the interior 16. Reference symbol list 10 hollow bodies 12 Device 14 Device wall 16 Interior 17 Gripping and movement device 18 cleaning units 20 Cleaning equipment 22 Evacuation facility 24 additional gripping and movement devices 26 Wall opening 28 locking bodies 30 fastening unit 32 hinge 33 first thigh 34 Recording section 35 second thigh 36 locking devices 37 Wall 38 Floor wall 40 side wall 42 Opening 44 lids 46 first gripping section 48 second gripping section 50 inspection equipment 52 inspection tools 54 Lid handling unit 56 first group 57 additional fastening devices 58 second group 60 Inner surface area of hollow bodies 62 Hollow body outer surface 64 Hollow body interior 66 Lid inner surface 67 Lid outer surface 68 cases 70 Case opening 72 Coverage 73 Process room 74 third group 76 fourth group 78 fifth group 79 sixth group 80 first cleaning head 82 second cleaning head 84 Process room opening 86 more first cleaning head 88 Fluid guidance unit 90 first drainage channel 92 second drainage channel 94 Control unit 96 lighting devices 98 semiconductor wafers 99 leftovers 100 sealing surface 102 Reflector 104 Damping element 106 bar lights 108 Blow-off device 110 Blow-off chamber 112 floor grates 114 side walls 116 flap 118 Breakthrough 120 supporting structure D1 first axis D2 second axis
Claims
Device (12) for cleaning pot-shaped hollow bodies (10), in particular transport containers for semiconductor wafers or for EUV lithography masks, wherein the hollow body (10) has a wall (37) forming an inner surface (60) and an outer surface (62) and enclosing an interior space (64), and has a first gripping section (46) on the outer surface (62) of the interior, the device comprising: a wall (14) enclosing an interior space (16), a gripping and moving device (17) arranged in the interior space (16) for moving the hollow body (10) within the interior space (16), wherein the gripping and moving device (17) can interact with the first gripping section (46) for moving the hollow body (10) within the interior space (16), and a cleaning unit (18) arranged in the interior space (16) with which the hollow body (10) can be cleaned,and- an inspection device (50) arranged in the interior (16) with tactile or non-contact inspection means (52) for checking the functionality, dimensions and / or orientation of the hollow body (10), characterized in that the inspection means (52) are designed and arranged for inspecting the outer surface (62) of the hollow body and comprise a first group (56) of cameras with which the position and orientation of the first gripping section (46) can be determined and damage to the first gripping section (46) can be detected. Device (12) according to claim 1, characterized in that the non-contact inspection means (52) are designed for the use of electromagnetic waves and / or mechanical vibrations. Device (12) according to one of claims 1 or 2, characterized in that the inspection means (52) comprises a second group (58) of laser scanners and / or lidar scanners and / or photoelectric sensors with which the inner surface (60) of the hollow body and / or the interior of the hollow body (64) can be inspected. Device (12) according to one of the preceding claims, wherein the wall (37) forms an opening (42) which can be closed with a cover (44), characterized in that the inspection means (52) are provided and arranged for checking the functionality and / or the alignment of the cover (44). Device (12) according to claim 4, wherein the lid (44) forms an outer lid surface (67) and an inner lid surface (66), characterized in that the inspection means (52) comprise a third group (74) of cameras with which the inner lid surface (66) and / or the outer lid surface (67) can be inspected. Device (12) according to claim 5, characterized in that the cleaning unit (18) has a process chamber (73) into which the hollow body (10) can be inserted for cleaning, wherein the process chamber (73) is accessible through a process chamber opening (84), and comprises a lid handling unit (54) which is movably mounted between an open position, in which the lid handling unit (54) releases the process chamber opening (84), and a closed position, in which the lid handling unit (54) closes the process chamber opening (84), wherein the lid (44) is detachably connectable to the lid handling unit (54), and the lid (44) can be inspected by cameras using the third group (74) when the lid handling unit (54) is in the open position and the lid (44) is connected to the lid handling unit (54). Device (12) according to claim 6, characterized in that the inspection means (52) comprise a fourth group (76) of cameras which is arranged in the lid handling unit (54) and with which the lid (44) can be inspected when the lid (44) is connected to the gripping and movement device (17). Device (12) according to one of claims 2 to 7, characterized in that: - the hollow body (10) has a second gripping section on the outer surface (62) of the hollow body, with which the hollow body (10) can be detachably connected to an adjacently arranged object; - the device (12) has a wall opening (26) formed by the device wall (14), through which the interior (16) is accessible and which can be closed by a closure body (28), wherein the closure body (28) is movably mounted in the device (12) by means of a fastening unit (30), and has a receiving section (34) with which the hollow body (10) can be detachably connected to the second gripping section of the closure body (28); and - a fifth group (78) of cameras is arranged in the closure body (28).with which the position and orientation of the second gripping section (48) can be determined and damage to the second gripping section (48) can be detected. Device (12) according to one of the preceding claims, characterized in that a sixth group (79) of non-contact inspection means (52) is arranged on the gripping and movement device (17). Device (12) according to one of the preceding claims, characterized in that lighting means (96) for illuminating the hollow body (10) are arranged in the device (12). Device (12) according to one of the preceding claims, characterized in that the cleaning unit (18) comprises at least one cleaning device (20) for cleaning the hollow body (10) and / or the lid (44) and / or at least one evacuation device (22) for applying a vacuum to the hollow body (10) and / or the lid (44). A method for cleaning pot-shaped hollow bodies (10), in particular transport containers for semiconductor wafers or for EUV lithography masks, wherein the method is carried out with a device (12) according to one of the preceding claims, comprising the following steps: - Checking the functionality, dimensions and / or orientation of the hollow body (10) with the inspection device (50) using tactile or non-contact inspection means (52) and generating signals containing actual values, wherein the first group (56) of cameras is used to: ◯ inspect the outer surface (62) of the hollow body, ◯ determine the position and orientation of the first gripping section (46), and ◯ detect damage to the first gripping section (46); - compare the actual values with target values using a control unit and calculate a difference value; - in the event that the difference value falls below a predefinable threshold value,Outputting an OK signal, outputting no signal, or – in the event that the difference value exceeds the threshold – outputting an error signal. Computer program product comprising program code stored on a computer-readable medium for performing the method according to claim 12.