Laser beam machine and method for controlling a laser beam machine

Abstract

Laser beam machine (1A; 1B), comprising: a laser oscillator (10) configured to emit laser light; a transmission optical fiber (12) through which the laser light emitted by the laser oscillator (10) is propagated; a first adaptor (11) configured to adapt a numerical dropout aperture of laser light emitted from a dropout end of the transmission optical fiber (12) by changing a numerical incident aperture of the laser light incident on an incident end of the transmission optical fiber (12), wherein the first adaptor (11) is arranged between the laser oscillator (10) and the incident end of the transmission optical fiber (12); a second adjuster (14) configured to converge the laser light and to change the zoom magnification of the laser light between a dropout end of the transmission optical fiber (12) and a workpiece (2); and a controller (17A; 17B) that is trained to: Adjusting the beam diameter of the laser light at an image-generating position of the laser light by controlling the second adjuster (14); and Adjusting a beam diameter change measure, which is the convergence angle at the image generation position, independently of the beam diameter adjustment, by adjusting the numerical dropout aperture by controlling the first adjuster (11) characterized in that the first adjuster (11) comprises several lenses, each with different focus lengths, wherein each lens is movable to a position in an optical axis and to a position spaced from the optical axis, and the control (17A; 17B) is designed to adjust the numerical failure aperture by controlling the first adjuster (11) by switching the lenses through which the laser light passes, by inserting one of the lenses into the optical axis and removing one of the lenses from the optical axis.

Description

Area

[0001] The present disclosure relates to a laser beam machine for machining a workpiece by irradiating laser light, and a method for controlling the laser beam machine. background

[0002] In laser processing and the use of laser light, it is expected that high-quality processing or high-efficiency processing can be performed on workpieces of different materials or thicknesses. To this end, it is necessary to adjust the irradiation conditions of the laser light, such as the beam diameter of the laser light at a condensing position or the convergence angle of the laser light at the condensing position, to a state suitable for processing the workpiece.

[0003] Document US 10 583 525 B2 discloses a laser processing machine that cuts a metal material plate using a laser beam. The laser processing machine includes a laser oscillator and a variable device connected to each other via a supply light guide. The supply light guide guides the laser beam generated by the laser oscillator to the variable device. The variable device includes a focusing lens arranged between an emission end of the supply light guide and an incidence end of a processing light guide, and a moving mechanism that changes the position of the emission end of the supply light guide. The processing light guide is formed such that the periphery of a core is covered with a cladding. The refractive index of the core is higher than that of the cladding. The supply light guide has the same structure.When the moving mechanism changes the position of the emission end of the feed optical fiber relative to the focusing lens, the position at which the laser beam is incident on the focusing lens changes, causing the focusing lens to change the angle of incidence of the laser beam incident on the core of the processing optical fiber. As a result, the beam parameter product of a laser beam emitted from the processing optical fiber changes. The Japanese translation JP 2015 - 500 571 A of the international

[0004] Patent application with the publication number WO 2013 / 086227 A1 discloses a laser system that continuously changes a beam diameter by changing a convergence angle of laser light incident on a transmission optical fiber. Brief description of the inventionProblem to be solved by the invention

[0005] According to the prior art disclosed in the Japanese translation JP 2015-500571 A of International Patent Application Laid-Open No. WO 2013 / 086227 A1, a beam diameter can be adjusted at a converging position, but a convergence angle of the laser light at the converging position is not adjusted. Therefore, the prior art has the problem of difficulty in making adjustments for laser light irradiation suitable for machining a workpiece.

[0006] The present disclosure has been made in view of the foregoing, and it is an object of the present disclosure to provide a laser beam machine that enables adaptation for irradiation with laser light suitable for machining a workpiece. Means to solve the problem

[0007] In order to solve the above problem and achieve the object, a laser beam machine comprises the combination of the features of claim 1. Preferred developments can be found in the dependent claims.

[0008] According to the present disclosure, the laser beam machine thus comprises, among other things: a laser oscillator configured to output laser light; a transmission fiber through which the laser light output from the laser oscillator propagates; a first adapter configured to adjust a numerical aperture (NIA) of the laser beam.incidence numerical aperture) of the laser light incident on an incident end of the transmission light guide, wherein the first adjuster is arranged between the laser oscillator and the incident end of the transmission light guide; a second adjuster configured to converge the laser light and change a zoom magnification of the laser light between an exit end of the transmission light guide and a workpiece; and a controller configured to adjust a beam diameter of the laser light at an image formation position of the laser light by changing the incidence numerical aperture by controlling the first adjuster and changing the zoom magnification by controlling the second adjuster independently of each other, and to adjust an emission numerical aperture of the laser light emitted from the exit end of the transmission light guide. Effects of the invention

[0009] The laser beam machine according to the present disclosure has an effect of enabling adaptation for irradiation with laser light suitable for machining a workpiece. Short description of the drawings Fig. 1 is a view illustrating a structural example of a laser beam machine according to a first embodiment. Fig. 2 is a view for explaining a change in divergence angle by a first adjuster included in the laser beam machine according to the first embodiment. Fig. 3 is a flowchart illustrating a procedure of operation of the laser beam machine according to the first embodiment. Fig. 4 is a view illustrating a structural example of a laser beam machine according to a second embodiment. Fig. 5 is a first view for explaining switching of a beam profile by a third adjuster included in the laser beam machine according to the second embodiment. Fig. 6 is a second view for explaining switching of a beam profile by the third adjuster included in the laser beam machine according to the second embodiment. Fig. 7 is a diagram illustrating a configuration example of a control circuit according to the first or second embodiment. Fig. 8 is a diagram illustrating a configuration example of a dedicated hardware circuit according to the first or second embodiment. Description of embodiments

[0010] Hereinafter, a laser beam machine according to an embodiment and a method for controlling the laser beam machine will be described in detail with reference to the drawings. First embodiment

[0011] Fig. 1 is a view illustrating a structural example of a laser beam machine 1A according to a first embodiment. The laser beam machine 1A is configured to process a workpiece 2 by irradiating it with laser light.

[0012] The laser beam machine 1A includes: a laser oscillator 10, which is a light source; a first adjuster 11, which is an incidence numerical aperture (NA) switching device; a transmission light guide 12 through which laser light propagates; a processing head 13; a second adjuster 14, which is a zoom magnification adjuster; a nozzle 15; a worktable 16, which is configured to support the workpiece 2; and a controller 17A, which is configured to control the entire laser beam machine 1A.

[0013] The laser oscillator 10 is configured to output laser light, which is a laser beam. The laser light output by the laser oscillator 10 passes through the first adjuster 11 and is incident on the transmission optical fiber 12. The first adjuster 11 is arranged between the laser oscillator 10 and an incident end of the transmission optical fiber 12, and changes an incident NA of the laser light incident on the incident end of the transmission optical fiber 12. Note that in the following description, the incident NA of the laser light incident on the incident end of the transmission optical fiber 12 is referred to as the incident NA of the transmission optical fiber 12. Fig. 1 schematically shows the first adapter 11. In Fig. 1, a dashed line arrow between the laser oscillator 10 and the incident end of the transmission optical fiber 12 represents a state in which the laser light passes through the first adapter 11.

[0014] An output end of the transmission light guide 12 is connected to the processing head 13. The laser light propagated through the transmission light guide 12 is incident on the processing head 13. The second adjuster 14 is provided inside the processing head 13. The second adjuster 14 converges the laser light. In addition, the second adjuster 14 changes the zoom magnification of the laser light incident on the workpiece 2 from the output end of the transmission light guide 12. Fig. Figure 1 schematically illustrates the second adapter 14. The nozzle 15 is attached to the processing head 13. The nozzle 15 causes the laser light to be emitted toward the workpiece 2 and discharges a processing gas.

[0015] The laser light, which has passed through the second adapter 14 inside the processing head 13, is emitted from the nozzle 14 to the outside of the processing head 13. The laser light emitted from the processing head 13 is incident on the workpiece 2. In Fig. In FIG. 1, a dashed arrow between the exit end of the transmission optical fiber 12 and the workpiece 2 indicates a state in which the laser light emitted from the exit end of the transmission optical fiber 12 passes through the second adapter 14 and reaches the workpiece 2 via the nozzle 15. Further, the laser beam machine 1A blows the processing gas from the nozzle 15 onto the workpiece 2. A member for blowing the processing gas is not shown.

[0016] The laser beam machine 1A moves the laser light and the workpiece 2 relative to each other by moving the worktable 16 with respect to the processing head 13. Note that the laser beam machine 1A can move the laser light and the workpiece 2 relative to each other without moving the worktable 16. The laser beam machine 1A can fix a position of the worktable 16 and control an incident position of the laser light on the workpiece 2.

[0017] The controller 17A transmits a control signal to each of the laser oscillator 10, the first adjuster 11, the second adjuster 14, and the work table 16. The laser oscillator 10 outputs the laser light in response to the control signal. The first adjuster 11 operates in response to the control signal. The second adjuster 14 operates in response to the control signal. The work table 16 operates in response to the control signal. In this way, the controller 17A controls each of the laser oscillator 10, the first adjuster 11, the second adjuster 14, and the work table 16.

[0018] The controller 17A adjusts a beam diameter of the laser light at an image formation position of the laser light by changing a zoom magnification by controlling the second adjuster 14. The controller 17A adjusts an outgoing NA of the laser light emitted from the outgoing end of the transmission light guide 12 by changing the incident NA of the transmission light guide 12 by controlling the first adjuster 11. Note that in the following description, the outgoing NA of the laser light emitted from the outgoing end of the transmission light guide 12 is referred to as an outgoing NA of the transmission light guide 12.The controller 17A changes the incident NA of the transmission light guide 12 by controlling the first adjuster 11, and changes the zoom magnification by controlling the second adjuster 14 to independently perform adjustment of a beam diameter of the laser light at the image formation position of the laser light and adjustment of the emission NA of the transmission light guide 12.

[0019] Next, details of the first adjuster 11 and the second adjuster 14 will be described. The first adjuster 11 includes an optical element that diffuses the laser light. The first adjuster 11 changes a divergence angle by operating the optical element. A divergence angle of the laser light emitted from the output end of the transmission light guide 12 is changed by changing a divergence angle of the laser light incident on the incident end of the transmission light guide 12 using the first adjuster 11.

[0020] Fig. 2 is a view for explaining a change in the divergence angle by the first adjuster 11 included in the laser beam machine 1A according to the first embodiment. Fig. 2 is a graph showing a relationship between the incident NA, which represents the divergence angle of the laser light incident on the incident end of the transmission optical fiber 12, and the outgoing NA, which represents the divergence angle of the laser light emitted from the outgoing end of the transmission optical fiber 12. According to the Fig. 2, the outgoing NA increases as the incident NA increases. That is, by changing the divergence angle of the laser light incident on the incident end of the transmission light guide 12, the divergence angle of the laser light emitted from the outgoing end of the transmission light guide 12 changes. In the graph shown in Fig. In the example shown in Figure 2, the failure NA is proportional to the incident NA.

[0021] For example, the first adjuster 11 includes a plurality of lenses, each with different focal lengths. Each lens is movable to a position along an optical axis and a position away from the optical axis. The first adjuster 11 switches the lenses through which the laser light passes by inserting the respective lens into the optical axis and removing the respective lens from the optical axis. The first adjuster 11 changes the divergence angle by switching the lenses through which the laser light passes. It should be noted that the first adjuster 11 can also change the divergence angle by appropriately moving each lens along a direction of the optical axis.The first adjuster 11 can change the divergence angle by shifting a center position of the lens from the optical axis to a state where the lens is offset to the left of an optical path of the laser light, rather than completely removing the lens from the optical path. The structure of the first adjuster 11 is not limited to the structure described above and may be optional.

[0022] The second adjuster 14 includes an optical element that forms an image of the output end of the transmission optical fiber 12. The second adjuster 14 changes the zoom magnification by operating the optical element. The second adjuster 14 changes a beam diameter at the image formation position by changing the zoom magnification. For example, the second adjuster 14 includes a plurality of lenses arranged along an optical axis. The second adjuster 14 changes the zoom magnification by appropriately moving each lens along a direction of the optical axis. A structure of the second adjuster 14 is not limited to the structure described above and may be optional.

[0023] Where the reference character "d1" denotes a beam diameter at the output end of the transmission light guide 12, the abbreviation "d2" denotes a beam diameter at the image formation position, and the abbreviation "M" denotes a zoom magnification of the second adjuster 14, d2 = M × d1 is satisfied. Further, where the abbreviation "r1" denotes an aperture angle of the laser light at the output end of the transmission light guide 12, and the abbreviation "r2" denotes a convergence angle of the laser light at the image formation position, r2 = (1 / M) × r1 is satisfied. Note that "d2" can be controlled by "M" because "d1" is roughly determined by a core diameter of the transmission light guide 12. "r2" corresponds to a beam diameter change amount. The beam diameter change rate is a change rate of the beam diameter with respect to a distance from the imaging position.

[0024] "r1" is proportional to the outgoing NA of the transmission light guide 12. "r1" changes substantially proportionally to the incident NA of the transmission light guide 12. Therefore, "r2," which is the beam diameter change amount, can be controlled by the incident NA of the transmission light guide 12. As described above, controlling the beam diameter at the image formation position and controlling the beam diameter change amount can be performed using different adjusters. The controller 17A can independently adjust the beam diameter at the image formation position and adjust the outgoing NA of the transmission light guide 12 using the first adjuster 11 and the adjuster 14.The laser beam machine 1A can use two parameters as control parameters for changing an irradiation condition of the laser light, namely the beam diameter at the image formation position and the beam diameter change amount, which is the convergence angle.

[0025] Next, an operation for adjusting the beam diameter and for adjusting the dropout NA of the transmission optical fiber 12 by the laser beam machine 1A will be described. Fig. 3 is a flowchart illustrating a procedure of operation by the laser beam machine 1A according to the first embodiment. Fig. 3 illustrates a procedure of an operation for adjusting the beam diameter and for adjusting the outage NA of the transmission optical fiber 12. The operation according to the Fig. The procedure shown in Figure 3 is implemented by the controller using the controller 17A.

[0026] In step S1, the laser beam machine 1A adjusts the beam diameter at the image formation position of the laser light by changing the zoom magnification by controlling the second adjuster 14. In step S1, the beam diameter at the image formation position is determined.

[0027] Next, in step S2, the laser beam machine 1A adjusts the outgoing NA of the transmission optical fiber 12 by changing the incident NA of the transmission optical fiber 12 by controlling the first adjuster 11. The beam diameter change amount is adjusted by adjusting the outgoing NA of the transmission optical fiber 12 in step S2. Then, the laser beam machine 1A terminates the operation according to the Fig. 3 procedure shown.

[0028] According to the first embodiment, the laser beam machine 1A includes the first adjuster 11 and the second adjuster 14, and independently adjusts the beam diameter at the image formation position and the outgoing NA of the transmission light guide 12 by changing the incident NA of the transmission light guide 12 by controlling the first adjuster 11, and changes the zoom magnification by controlling the second adjuster 14. The laser beam machine 1A can adjust a beam diameter according to a thickness of the workpiece 2 or a material of the workpiece 2. In addition, the laser beam machine 1A can adjust a convergence angle according to the thickness of the workpiece 2 or the material of the workpiece 2. As described above, the laser beam machine 1A achieves an effect of enabling adjustment for laser light irradiation suitable for processing the workpiece 2.

[0029] The laser beam machine 1A can optimize the supply amount of irradiation energy in a thickness direction of the workpiece 2 by controlling the beam diameter change amount as a control parameter different from the beam diameter. As a result, the laser beam machine 1A can perform high-quality processing. In addition, the laser beam machine 1A can improve the processing speed and perform processing with high efficiency. The laser beam machine 1A can improve the processing quality and speed, particularly for a medium-thickness plate or a plate thicker than the medium-thickness plate. Second embodiment

[0030] In a second embodiment, an example will be described in which a control parameter for changing an irradiation condition of the laser light is added to the structure of the first embodiment. Fig. 4 is a view showing a structural example of a laser beam machine 1B according to the second embodiment.

[0031] The laser beam machine 1B differs from the one in Fig. 1 in that the laser beam machine 1B comprises a third adjuster 21, which is a beam profile switching device, a fourth adjuster 22, which is an image formation position adjuster, and a fifth adjuster 23, which is a nozzle position adjuster. The fifth adjuster 23 is provided instead of the Fig. 1. In addition, the laser beam machine 1B is provided with a nozzle 15 shown in Fig. 1A is provided with a different controller 17B. The controller 17B controls the entire laser beam machine 1B. In the second embodiment, components identical to those described above in the first embodiment are denoted by identical reference numerals, and different structures from the first embodiment will be described.

[0032] The second adjuster 14, the third adjuster 21, and the fourth adjuster 22 are provided inside the processing head 13. The second adjuster 14, the third adjuster 21, and the fourth adjuster 22 are arranged between the output end of the transmission light guide 12 and the workpiece 2. The third adjuster 21 changes a beam profile of the laser light between the output end of the transmission light guide 12 and the workpiece 2. The fourth adjuster 22 changes a distance between the image formation position and a surface of the workpiece 2. Fig. 4 schematically illustrates each of the third adjuster 21 and the fourth adjuster 22. The laser light passes through the second adjuster 14, the third adjuster 21, and the fourth adjuster 22 in sequence inside the processing head 13, and is emitted from the fifth adjuster 23 to the outside of the processing head 13.

[0033] The fifth adaptor 23 corresponds to an adaptor who is trained to Fig. 1 in a direction of an optical axis. The fifth adjuster 23 changes a distance from the nozzle 15 to a surface of the workpiece 2. In the Fig. 4, the fifth adapter 23 comprises the nozzle 15 and an adapter which actuates the nozzle 15. In Fig. 4, the fifth adapter 23 is in a form similar to that in Fig. 1. It is assumed that the nozzle 15 is moved separately from the processing head 13 in an optical axis direction. The fifth adjuster 23 is not limited to an adjuster that moves the nozzle 15 separately from the processing head 13. The fifth adjuster 23 can move the nozzle 15 integrated in the processing head 13 in the optical axis direction by moving the processing head 13 in the optical axis direction.

[0034] The controller 17B transmits a control signal to each of the laser oscillator 10, the first adjuster 11, the second adjuster 14, the third adjuster 21, the fourth adjuster 22, the fifth adjuster 23, and the work table 16. Each of the third adjuster 21, the fourth adjuster 22, and the fifth adjuster 23 operates in response to the control signal. The controller 17B controls each of the laser oscillator 10, the first adjuster 11, the second adjuster 14, the third adjuster 21, the fourth adjuster 22, the fifth adjuster 23, and the work table 16.

[0035] The controller 17B switches a beam profile independently of each adjustment of a beam diameter at the image formation position and an adjustment of the dropout NA of the transmission light guide 12 by controlling the third adjuster 21. By controlling the fourth adjuster 12, the controller 17B adjusts the distance from the image formation position to the surface of the workpiece 2 independently of both the adjustment of the beam diameter at the image formation position and the adjustment of the dropout NA of the transmission light guide 12. By controlling the fifth adjuster 23, the controller 17B adjusts the distance from the nozzle 15 to the surface of the workpiece 2 independently of both the adjustment of the beam diameter at the image formation position and the adjustment of the dropout NA of the transmission light guide 12.Further, the controller 17B performs switching of the beam profile by controlling the third adjuster, adjustment of the distance from the image forming position to the surface of the workpiece 2 by controlling the fourth adjuster, and adjustment of the distance from the nozzle 15 to the surface of the workpiece 2 by controlling the fifth adjuster 23, independently of each other.

[0036] Next, details of the third adjuster 21, the fourth adjuster 22, and the fifth adjuster 23 will be described. The third adjuster 21 includes an optical element that converts a beam profile. The third adjuster 21 switches the beam profile by operating the optical element. The optical element of the third adjuster 21 is, for example, an axicon lens. The third adjuster 21 inserts the axicon lens into the optical axis and extracts the axicon lens from the optical axis. The third adjuster 21 switches the beam profile between a mode in which the axicon lens is inserted into the optical axis and a mode in which the axicon lens is extracted outside the optical axis. A structure of the third adjuster 21 is not limited to the above structure and may be optional.

[0037] Fig. 5 is a first view for explaining switching of a beam profile by the third adjuster 21 included in the laser beam machine 1B according to the second embodiment.

[0038] Fig. Figure 5 is a graph showing a relationship between a beam diameter and a position in the direction of the optical axis. In Fig. 5, a vertical axis represents a beam diameter. A horizontal axis represents a position in the direction of the optical axis. A direction of an arrow of the horizontal axis is a direction toward the workpiece 2. A direction in the opposite direction of the arrow is a direction toward the laser oscillator 10. A slope of the Fig. The graph shown in Figure 5 represents a beam diameter change rate. Mode A is a mode in which the axicon lens is inserted into the optical axis. Mode B is a mode in which the axicon lens is extended from the optical axis. In Fig. 5, a plurality of the graphs of mode A represent a relationship between the beam diameter and the position in the direction of the optical axis for each of the cases in which the divergence angle is changed by the first adjuster 11 in mode A. In Fig. 5, a plurality of mode B graphs represent a relationship between the beam diameter and the position in the optical axis direction for each of the cases in which the divergence angle is changed by the first adjuster 11 in mode B.

[0039] Fig. 6 is a second view for explaining switching of a beam profile by the third adjuster 21 included in the laser beam machine 1B according to the second embodiment. Fig. Figure 6 shows a beam profile at the imaging position for each of Mode A and Mode B. In Fig. 6, a vertical axis represents beam intensity. A horizontal axis represents position in a direction of beam diameter. Mode A is a ring-shaped beam profile. Mode B is a top-hat-shaped beam profile.

[0040] As in Fig. 5, when the beam profile is Mode A, a beam diameter at a position away from the image formation position in the optical axis direction is changed by changing the divergence angle using the first adjuster 11. That is, the beam diameter change amount changes due to a change in the divergence angle. The beam diameter at the image formation position is constant even if the divergence angle changes. When the beam profile is Mode B, a beam diameter at a position away from the image formation position in the optical axis direction further changes. That is, the beam diameter change amount is changed by changing the divergence angle using the first adjuster 11. The beam diameter at the image formation position is constant even if the divergence angle changes.Furthermore, the beam diameter change rate changes when the beam profile is switched between mode A and mode B. Switching the beam profile between mode A and mode B changes the beam diameter at the image formation position.

[0041] By using the third adjuster 21, the laser beam machine 1B can switch the beam profile of the laser light with which the workpiece 2 is irradiated. It should be noted that the third adjuster 21 only needs to be able to switch the beam profile between several modes, and it is not limited to switching the beam profile between mode A and mode B, as in Fig. 6 is limited.

[0042] The fourth adjuster 22 includes one or more lenses. The fourth adjuster 22 moves the image formation position in the direction of the optical axis by operating the lenses in the direction of the optical axis. The fourth adjuster 22 changes a distance from the image formation position to the surface of the workpiece 2 by moving the image formation position. A structure of the fourth adjuster 22 is not limited to the above structure and may be optional.

[0043] The laser beam machine 1B can change a beam diameter on the workpiece 2 by changing the distance from the image formation position to the surface of the workpiece 2 using the fourth adjuster 22. In addition, the laser beam machine 1B can switch the beam diameter change amount by changing the distance from the image formation position to the surface of the workpiece 2 using the fourth adjuster 22.

[0044] The fifth adjuster 23 includes an adjuster that moves the nozzle 15 in the optical axis direction or an adjuster that moves the processing head 13 in the optical axis direction. Either adjuster can be used for the adjuster that moves the nozzle 15 or for the adjuster that moves the processing head 13.

[0045] The laser beam machine 1B can switch a relative positional dependency between a flow of processing gas supplied via the nozzle 15 and the laser light by changing a distance from the nozzle 15 to the surface of the workpiece 2 using the fifth adjuster 23.

[0046] Similar to the controller 17A of the first embodiment, the controller 17B independently adjusts the beam diameter at the image formation position and adjusts the outgoing NA of the transmission optical fiber 12 by using the first adjuster 11 and the second adjuster 14. Further, the controller 17B switches the beam profile by using the third adjuster 21. The controller 17B adjusts a distance from the image formation position to the surface of the workpiece 2 using the fourth adjuster 22. The laser beam machine 1B can use the following four parameters as control parameters for changing an irradiation condition for the laser light: the beam diameter at the image formation position; a beam diameter change amount, which is the convergence angle; the beam profile; and the distance from the image formation position to the surface of the workpiece 2.

[0047] Additionally, the controller 17B adjusts the distance from the nozzle 15 to the surface of the workpiece 2 using the fifth adjuster 23. The laser beam machine 1B can use the distance from the nozzle 15 to the surface of the workpiece 2 as a control parameter for the relative positional dependency between the flow of the processing gas and the laser light. The laser beam machine 1B can switch the relative positional dependency between the flow of the processing gas and the laser light.

[0048] According to the second embodiment, the laser beam machine 1B, similar to the case in the first embodiment, can adjust a beam diameter according to a thickness of the workpiece 2 or a material of the workpiece 2, and can adjust the convergence angle according to the thickness of the workpiece 2 or the material of the workpiece 2. Further, the laser beam machine 1B can switch the beam profile according to the thickness of the workpiece 2 or the material of the workpiece 2. The laser beam machine 1B can adjust a distance from the image formation position to the surface of the workpiece 2 according to the thickness of the workpiece 2 or the material of the workpiece 2. As described above, the laser beam machine 1B achieves the effect of enabling laser light irradiation adjustment suitable for machining the workpiece 2.

[0049] In addition, the laser beam machine 1B can switch the relative positional dependence between the flow of the processing gas and the laser light according to the thickness of the workpiece 2 or the material of the workpiece 2. The laser beam machine 1B can optimize the chemical interaction between the flow of the processing gas and the irradiation with the laser light by switching the relative positional dependence between the flow of the processing gas and the laser light. As a result, the laser beam machine 1B can improve the processing quality and speed.

[0050] It should be noted that although the example in which the third adjuster 21, the fourth adjuster 22, and the fifth adjuster 23 are provided in addition to the first adjuster 11 and the second adjuster 14 was described in the second embodiment, the present disclosure is not limited to this. The laser beam machine 1B only needs to include at least one of the third adjuster 21, the fourth adjuster 22, and the fifth adjuster 23. The laser beam machine 1B can improve the processing quality and the processing speed by including at least one of the third adjuster 21, the fourth adjuster 22, and the fifth adjuster 23.

[0051] Next, a hardware configuration for implementing the controller 17A according to the first embodiment or the controller 17B according to the second embodiment will be described. The controllers 17A and 17B are implemented by a processing circuit. The processing circuit may be a circuit in which a processor executes software or may be a dedicated circuit.

[0052] In a case where the processing circuit is implemented by software, the processing circuit is, for example, a Fig. Control circuit 30 shown in Figure 7. Fig. Figure 7 is a diagram illustrating a configuration example of the control circuit 30 according to the first or second embodiment. The control circuit 30 includes an input unit 31, a processor 32, a memory 33, and an output unit 34.

[0053] The input unit 31 is an interface circuit that receives data input from outside the control circuit 30 and forwards the data to the processor 32. The output unit 34 is an interface circuit that outputs data from the processor 32 or the memory 33 to outside the control circuit 30. In a case where the processing circuit Fig. 7, the functions of the controllers 17A and 17B are implemented by the processor 32, which reads and executes a program stored in the memory 33. The memory 33 is also used as temporary storage in each process performed by the processor 32.

[0054] The processor 32 is a central processing unit (CPU, which may also be referred to as a central processing unit, arithmetic unit, microprocessor, microcomputer, processor, or digital signal processor (DSP). The memory 33 corresponds, for example, to a non-volatile or volatile semiconductor memory such as a random access memory (RAM), a read-only memory (ROM), a flash memory, an erasable programmable read-only memory (EPROM), or an electrically erasable programmable read-only memory (EEPROM) (registered trademark), a magnetic disk, a flexible disk / floppy disk, an optical disk, a compact disk, a minidisk, a digital versatile disk (DVD), or the like.

[0055] Fig. 7 is an example of hardware in a case where the controllers 17A and 17B are implemented by the general-purpose processor 32 and the memory 33, but the controllers 17A and 17B may also be implemented by dedicated hardware circuits. Fig. 8 is a diagram illustrating a configuration example of a dedicated hardware circuit 35 according to the first or second embodiment.

[0056] The dedicated hardware circuit 35 includes the input unit 31, the output unit 34, and the processing circuit 36. The processing circuit 36 ​​is a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or a circuit obtained by combining them. Note that the controllers 17A and 17B can be implemented by combining the control circuit 30 and the hardware circuit 35.

[0057] The structures described in each of the above embodiments represent examples of the content of the present disclosure. The structures of each embodiment can be combined with other known techniques. The structures of the individual embodiments can be combined as appropriate. Part of the structures of each embodiment can be omitted or changed without departing from the gist of the present disclosure. List of reference symbols 1A, 1B laser beam machine; 2 workpiece; 10 laser oscillator; 11 first adjuster; 12 transmission optical fibers; 13 machining head; 14 second adjuster; 15 nozzle; 16 work table; 17A, 17BControl; 21 third adjuster; 22 fourth adjuster; 23 fifth adjuster; 30 control circuit; 31 input unit; 32 processor; 33 storage; 34 output unit; 35 hardware circuit; 36 processing circuit.

Claims

[1] Laser beam machine (1A; 1B), comprising: a laser oscillator (10) configured to output laser light; a transmission optical fiber (12) through which the laser light output from the laser oscillator (10) propagates; a first adapter (11) configured to adjust a numerical output aperture of a laser light emitted from an output end of the transmission optical fiber (12) by changing a numerical incidence aperture of the laser light incident on an incident end of the transmission optical fiber (12), the first adapter (11) being arranged between the laser oscillator (10) and the incident end of the transmission optical fiber (12); a second adapter (14) configured to converge the laser light and change a zoom magnification of the laser light between an output end of the transmission light guide (12) and a workpiece (2); and a controller (17A; 17B) designed to: Adjusting a beam diameter of the laser light at an image forming position of the laser light by controlling the second adjuster (14); and Adjusting a beam diameter change amount, which is the convergence angle at the image formation position, independently of adjusting the beam diameter, by adjusting the numerical aperture by controlling the first adjuster (11) characterized by , that the first adjuster (11) comprises a plurality of lenses each having different focal lengths, each lens being movable into a position in an optical axis and into a position spaced from the optical axis, and the controller (17A; 17B) is configured to adjust the numerical aperture by controlling the first adjuster (11) by switching the lenses through which the laser light passes, inserting a respective one of the lenses into the optical axis and removing a respective one of the lenses from the optical axis. [2] Laser beam machine (1A; 1B) according to claim 1, further comprising: a third adapter (21) configured to change a beam profile of the laser light between the output end of the transmission light guide (12) and the workpiece (2), wherein the controller (17A; 17B) is configured to switch the beam profile independently to both an adjustment of the beam diameter and an adjustment of the numerical aperture by controlling the third adjuster (21). [3] Laser beam machine (1A; 1B) according to claim 1 or 2, further comprising: a fourth adjuster (22) configured to change a distance between an image forming position and a surface of the workpiece (2), wherein the controller (17A; 17B) is configured to adjust a distance between the image forming position and a surface of the workpiece (2) independently of both an adjustment of the beam diameter and an adjustment of the numerical aperture by controlling the fourth adjuster (22). [4] Laser beam machine (1A; 1B) according to one of claims 1 or 2, further comprising: a nozzle (15) configured to emit the laser light toward the workpiece (2) and discharge processing gas; and a fifth adapter (23) configured to change a distance from the nozzle (15) to a surface of the workpiece (2), wherein the controller (17A; 17B) is designed to adjust a distance from the nozzle (15) to a surface of the workpiece (2) independently of both an adjustment of the beam diameter and an adjustment of a numerical aperture by controlling the fifth adjuster (23). [5] Laser beam machine (1A; 1B) according to claim 3, further comprising: a nozzle (15) configured to emit the laser light toward the workpiece (2) and to discharge processing gas; and a fifth adjuster (23) configured to change a distance from the nozzle (15) to a surface of the workpiece (2), wherein the controller (17A; 17B) is designed to adjust a distance from the nozzle (15) to a surface of the workpiece (2) independently of both an adjustment of the beam diameter and an adjustment of a numerical aperture by controlling the fifth adjuster (23). [6] A method for controlling a laser beam machine (1A; 1B) comprising: a laser oscillator (10) configured to output laser light; a transmission optical fiber (12) through which the laser light output from the laser oscillator (10) propagates; a first adapter (11) configured to change a numerical aperture of the laser light incident on an incident end of the transmission optical fiber (12), wherein the first adapter (11) is arranged between the laser oscillator (10) and the incident end of the transmission optical fiber (12), wherein the first adapter (11) comprises a plurality of lenses each having different focal lengths, each lens being movable into a position in an optical axis and into a position spaced from the optical axis; and a second adapter (14) configured to converge the laser light and change a zoom magnification of the laser light between an output end of the transmission light guide (12) and a workpiece (2), the method comprising: a step of adjusting a beam diameter of the laser light at an image forming position of the laser light by changing the zoom magnification by controlling the second adjuster (14); and a step of adjusting an output numerical aperture of the laser light emitted from the output end of the transmission optical fiber (12) by changing the incident numerical aperture by controlling the first adjuster (11) by switching the lenses through which the laser light passes by inserting a respective one of the lenses into the optical axis and removing a respective one of the lenses from the optical axis, wherein a beam diameter change amount, which is the convergence angle at the image forming position, is adjusted independently of adjusting the beam diameter by controlling the second adjuster (14), by adjusting the numerical aperture of failure by controlling the first adjuster (11).

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