THIN-LAYER TRANSISTOR AND ELECTRONIC DEVICE

Abstract

A thin-film transistor comprises a substrate, a metal oxide layer arranged over the substrate, an oxide semiconductor layer with a plurality of crystal grains arranged in contact with the metal oxide layer, a gate electrode arranged over the oxide semiconductor layer, and a gate insulating layer arranged between the oxide semiconductor layer and the gate electrode. If a crystal orientation is determined at each of a plurality of measurement points of the oxide semiconductor layer based on an electron diffraction pattern obtained by transmitting an electron beam from a direction intersecting a thickness direction of the oxide semiconductor layer, an average KAM value calculated at the plurality of measurement points is greater than or equal to 0.6 degrees.

Description

TECHNICAL AREA

[0001] One embodiment of the present invention relates to a thin-film transistor comprising an oxide semiconductor film with a polycrystalline structure (Poly-OS). Furthermore, one embodiment of the present invention relates to an electronic device comprising the thin-film transistor. TECHNICAL BACKGROUND

[0002] In recent years, instead of a silicon semiconductor film made of amorphous silicon, low-temperature polysilicon, and single-crystal silicon, a thin-film transistor has been developed that uses an oxide semiconductor film for one channel (see, for example, patent literature 1 to 6). This thin-film transistor containing the oxide semiconductor film can be fabricated with a simple structure and using a low-temperature process, similar to a thin-film transistor with an amorphous silicon film. Furthermore, it is known that the thin-film transistor with an oxide semiconductor film exhibits a higher field-effect mobility than a thin-film transistor with an amorphous silicon film. LITERATURE LIST PATENT LITERATURE Patent literature 1: Japanese publication no. 2021-141338 Patent Literature 2: Japanese Patent Publication No. 2014-099601 Patent Literature 3: Japanese Patent Publication No. 2021-153196 Patent Literature 4: Japanese Patent Publication No. 2018-006730 Patent Literature 5: Japanese Patent Publication No. 2016-184771 Patent Literature 6: Japanese Patent Publication No. 2021-108405 SUMMARY OF THE INVENTIONAL PROBLEM

[0003] The field-effect mobility of a thin-film transistor with a conventional oxide semiconductor film is not very high, even when a crystalline oxide semiconductor film is used in the thin-film transistor. Therefore, there is a desire to improve the crystal structure of the oxide semiconductor film used in the thin-film transistor and thereby improve its field-effect mobility.

[0004] In view of the problems mentioned above, one object of an embodiment of the present invention is to provide a thin-film transistor comprising an oxide semiconductor film with a novel crystal structure. Furthermore, another object of an embodiment of the present invention is to provide an electronic device comprising the thin-film transistor. SOLUTION TO THE PROBLEM

[0005] A thin-film transistor according to one embodiment of the present invention comprises a substrate, a metal oxide layer provided above the substrate, an oxide semiconductor layer with multiple crystal grains in contact with the metal oxide layer, a gate electrode provided above the oxide semiconductor layer, and a gate insulating layer provided between the oxide semiconductor layer and the gate electrode. If a crystal orientation is determined at each of a plurality of measurement points of the oxide semiconductor layer based on an electron diffraction pattern obtained by transmitting an electron beam from a direction intersecting a thickness direction of the oxide semiconductor layer, an average KAM value calculated at the plurality of measurement points is greater than or equal to 0.6 degrees.

[0006] An electronic device according to an embodiment of the present invention comprises the thin-film transistor. BRIEF DESCRIPTION OF THE DRAWINGS Fig. Figure 1 is a schematic cross-sectional view showing a configuration of a thin-film transistor according to an embodiment of the present invention. Fig. Figure 2 is a schematic top view showing a configuration of a thin-film transistor according to an embodiment of the present invention. Fig. Figure 3 is a schematic diagram illustrating a TEM-ED mapping procedure. Fig. Figure 4 is a flowchart showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 5 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 6 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 7 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 8 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 9 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 10 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 11 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 12 is a schematic cross-sectional view showing a method for manufacturing a thin-film transistor according to an embodiment of the present invention. Fig. Figure 13 is a schematic diagram showing an electronic device according to an embodiment of the present invention. Fig. Figure 14 is an inverse pole figure of an oxide semiconductor layer (poly-OS film) of an example sample. Fig. Figure 15 is an IPF map of an oxide semiconductor layer (poly-OS film) of a sample. Fig. Figure 16 is a KAM map of an oxide semiconductor layer (poly-OS film) of a sample. Fig. Figure 17 is a diagram showing a distribution of the KAM values ​​of oxide semiconductor layers (poly-OS films) of example samples. Fig. Figure 18 is a diagram showing a depth-averaged KAM value in oxide semiconductor layers (poly-OS films) of example samples. DESCRIPTION OF EXECUTION FORMS

[0007] Embodiments of the present invention are described below with reference to the drawings. The following invention is to be understood merely as an example. Furthermore, a configuration that can be easily provided by a person skilled in the art by appropriately modifying the exemplary embodiment while maintaining the basic concept of the invention is, of course, included within the scope of the present invention. To make the description clearer, the drawings may only schematically illustrate widths, thicknesses, shapes, and the like of components in comparison with the actual embodiments. Moreover, the shapes shown are to be understood merely as examples and are not intended to further restrict the interpretation of the present invention.Furthermore, in the present description and drawings, components similar to those previously described in relation to the drawings described above have been given the same reference numerals, although a detailed description of these may have been omitted below.

[0008] In the present description, a direction from a substrate to an oxide semiconductor layer is referred to as "on" or "above" in each embodiment of the present invention. Conversely, a direction from the oxide semiconductor layer to the substrate is referred to as "below" or "below." For the sake of simplicity, the terms "above" or "below" are used for description purposes; however, the substrate and the oxide semiconductor layer may also be arranged, for example, such that the vertical relationship is reversed compared to that shown in the drawings. Furthermore, the expression "an oxide semiconductor layer on a substrate" describes only the vertical relationship between the substrate and the oxide semiconductor layer, as described above, whereby another element may also be arranged between the substrate and the oxide semiconductor layer.The terms "above" or "below" also denote a stacking sequence in which multiple layers are stacked on top of each other, and can further describe a positional relationship where a thin-film transistor and a pixel electrode do not overlap in a top view, as described as "a pixel electrode above a thin-film transistor." Conversely, the expression "a pixel electrode vertically above a thin-film transistor" denotes a positional relationship where the thin-film transistor and the pixel electrode overlap in a top view. Furthermore, a top view refers to a perspective from a direction perpendicular to a surface of the substrate.

[0009] In the present description, the terms "film" and "layer" can be interchanged as desired.

[0010] In this description, a "display device" refers to a structure that displays an image using an electro-optic layer. For example, the term "display device" may refer to a display field containing the electro-optic layer, or to a structure with other optical elements (such as a polarized element, a backlight, a touch panel, and the like) attached to a display cell. The "electro-optic layer" may include a liquid crystal layer, an electroluminescent (EL) layer, an electrochromic (EC) layer, or an electrophoretic layer, provided there is no technical contradiction.Although the following embodiments also mention, by way of example, a liquid crystal display device with a liquid crystal layer and an organic EL display device with an organic EL layer as display devices, the structure according to the present embodiment can also be applied to a display device that includes the other electro-optical layers described above.

[0011] In the present description, the expressions “α includes A, B, or C”, “α includes any of A, B, or C”, or “α includes one selected from a group consisting of A, B, and C”, and the like, do not exclude the case in which α includes multiple combinations of A to C, unless otherwise specified. Furthermore, these expressions do not exclude the case in which α also includes other components.

[0012] Furthermore, the following embodiments can be combined with each other, provided there is no technical contradiction. <Erste Ausführungsform>

[0013] A thin-film transistor 10 according to an embodiment of the present invention is described with reference to the Fig. described. For example, the thin-film transistor 10 can be used not only as a transistor in a display device, but also in an integrated circuit (IC) such as a microprocessing unit (MPU) or a memory circuit. [1. Configuration of the thin-film transistor 10]

[0014] A configuration of a thin-film transistor 10 according to an embodiment of the present invention is described with reference to the Fig. described. Fig. Figure 1 is a schematic cross-sectional view showing the configuration of the thin-film transistor 10 according to an embodiment of the present invention. Fig. Figure 2 is also a schematic top view showing the configuration of the thin-film transistor according to one embodiment of the present invention. In particular, Fig. 1 a cross-sectional view along line AA' in Fig. 2.

[0015] As in Fig. As shown in Figure 1, the thin-film transistor 10 comprises a substrate 100, a light-shielding layer 105, a first insulating layer 110, a second insulating layer 120, a metal oxide layer 130, an oxide semiconductor layer 140, a gate insulating layer 150, a gate electrode 160, a third insulating layer 170, a fourth insulating layer 180, a source electrode 201, and a drain electrode 203. The light-shielding layer 105 is located on the substrate 100. The first insulating layer 110 is located on the substrate 100 such that it covers a top surface and an edge surface of the light-shielding layer 105. The second insulating layer 120 is located on the first insulating layer 110. The metal oxide layer 130 is located on the second insulating layer 120. The oxide semiconductor layer 140 is provided on the metal oxide layer 130. Furthermore, the oxide semiconductor layer 140 is in contact with the metal oxide layer 130.The gate insulating layer 150 is provided on the second insulating layer 120 to cover a top surface and a boundary surface of the oxide semiconductor layer 140 and a boundary surface of the metal oxide layer 130. The gate electrode 160 is provided on the gate insulating layer 150 such that it overlaps the oxide semiconductor layer 140. The third insulating layer 170 is provided on the gate insulating layer 150 to cover a top surface and a boundary surface of the gate electrode 160. The fourth insulating layer 180 is provided on the third insulating layer 170. The gate insulating layer 150, the third insulating layer 170, and the fourth insulating layer 180 are further provided with opening sections 171 and 173 through which a portion of the top surface of the oxide semiconductor layer 140 is exposed. The source electrode 201 is provided on the fourth insulating layer 180 and within an opening area 171 and is in contact with the oxide semiconductor layer 140.Similarly, the drain electrode 203 is located on the fourth insulating layer 180 and within an opening area 173, and is in contact with the oxide semiconductor layer 140. Furthermore, if the source electrode 201 and the drain electrode 203 are not specifically distinguished from one another in the following description, they can also be referred to collectively as the source-drain electrode 200.

[0016] The oxide semiconductor layer 140 is subdivided into a source region S, a drain region D, and a channel region CH based on the gate electrode 160. That is, the oxide semiconductor layer comprises the channel region CH, which overlaps the gate electrode 160, as well as the source region S and the drain region D, which do not overlap the gate electrode 160. In the thickness direction of the oxide semiconductor layer 140, an edge section of the channel region CH is aligned with an edge section of the gate electrode 160. The channel region CH exhibits semiconductor properties. Both the source region S and the drain region D also exhibit conductor properties. Therefore, the electrical conductivities of the source region S and the drain region D are greater than the electrical conductivity of the channel region CH. Furthermore, the source electrode 201 and the drain electrode 203 are connected to the source region S and the drain region D, respectively.The drain region D is in contact with the oxide semiconductor layer 140 and is electrically connected to it. Furthermore, the oxide semiconductor layer 140 can have a single-layer or a laminated structure.

[0017] As in Fig. As shown in Figure 2, both the light-shielding layer 105 and the gate electrode 160 have a defined width in direction D1 and extend in direction D2, which is orthogonal to direction D1. The width of the light-shielding layer 105 is greater than the width of the gate electrode 160 in direction D1. The channel region CH completely overlaps the light-shielding layer 105. In the semiconductor device 10, direction D1 corresponds to the direction in which a current flows from the source electrode 201 through the oxide semiconductor layer 140 to the drain electrode 203. Therefore, the length of the channel region CH in direction D1 is a channel length L, and the width of the channel region CH in direction D2 is a channel width W.

[0018] The substrate 100 can support any layer in the thin-film transistor 10. For example, a rigid, translucent substrate, such as a glass substrate, a quartz substrate, or a sapphire substrate, can be used as substrate 100. Alternatively, a rigid, non-translucent substrate, such as a silicon substrate, can be used. Furthermore, a flexible, translucent substrate, such as a polyimide resin substrate, an acrylic resin substrate, a siloxane resin substrate, or a fluorinated resin substrate, can also be used. To improve the heat resistance of substrate 100, impurities can be introduced into the resin substrate. Finally, a substrate 100 can also be used in which a silicon oxide film or a silicon nitride film is formed over the rigid substrate or the flexible substrate described above.

[0019] The light-shielding layer 105 can reflect or absorb external light. Since the light-shielding layer 105, as described above, has a larger area than the channel region CH of the oxide semiconductor layer 140, the light-shielding layer 105 can block external light penetrating the channel region CH. For example, aluminum (Al), copper (Cu), titanium (Ti), molybdenum (Mo), tungsten (W), or alloys or compounds of the latter can be used for the light-shielding layer 105. However, the light-shielding layer 105 does not necessarily have to contain a metal if a conductive property of the light-shielding layer 105 is not required. For example, a black resin matrix can be used for the light-shielding layer 105. Furthermore, the light-shielding layer 105 can have a single-layer structure or a laminated structure.For example, the light-shielding layer 105 can have a laminated structure consisting of a red color filter, a green color filter and a blue color filter.

[0020] The first insulating layer 110, the second insulating layer 120, the third insulating layer 170, and the fourth insulating layer 180 can prevent impurities from diffusing into the oxide semiconductor layer 140. In particular, the first insulating layer 110 and the second insulating layer 120 can prevent the diffusion of impurities contained in the substrate 100, and the third insulating layer 170 and the fourth insulating layer 180 can prevent the diffusion of impurities (e.g., water) that penetrate from the outside. For example, silicon dioxide (SiO₂) x ), silicon oxynitride (SiO₂) x N y ), silicon nitride (SiN x ), silicon nitride oxide (SiN x O y ), aluminum oxide (AlO x ), Aluminum oxynitride (AlO x Ny ), aluminum nitride oxide (AlN x O y ), Aluminum nitride (AlN x ) and the like for the first insulating layer 110, the second insulating layer 120, the third insulating layer 170 and the fourth insulating layer 180. These are silicon oxynitride (SiO₂). x N y ) and aluminium oxynitride (AlO₂) x N y ) a silicon or aluminum compound that contains a lower proportion (x > y) of nitrogen (N) than of oxygen (O). Silicon nitride oxide (SiN) x O y ) and aluminium nitride oxide (AlN x O y) furthermore represent a silicon or an aluminum compound containing a lower proportion (x > y) of oxygen than of nitrogen. In addition, each of the first insulating layers 110, the second insulating layer 120, the third insulating layer 170 and the fourth insulating layer 180 can have a single-layer structure or a laminated structure.

[0021] Furthermore, each of the first insulating layers 110, the second insulating layer 120, the third insulating layer 170, and the fourth insulating layer 180 can have a planarization function or a function for releasing oxygen by performing a heat treatment. For example, if the second insulating layer 120 has the function of releasing oxygen by means of a heat treatment, then, through the heat treatment performed in the manufacturing process of the thin-film transistor 10, oxygen is released from the second insulating layer 120, and the released oxygen can be supplied to the oxide semiconductor layer 140.

[0022] The gate electrode 160, the source electrode 201, and the drain electrode 203 are conductive. For example, copper (Cu), aluminum (Al), titanium (Ti), chromium (Cr), cobalt (Co), nickel (Ni), molybdenum (Mo), hafnium (Hf), tantalum (Ta), tungsten (W), or bismuth (Bi), or alloys or compounds thereof, can be used for the gate electrode 160, the source electrode 201, and the drain electrode 203. The gate electrode 160, the source electrode 201, and the drain electrode 203 can each have a single-layer or a laminated structure.

[0023] The gate insulating layer 150 comprises an oxide with insulating properties. In particular, silicon dioxide (SiO₂) is used. x ), silicon oxynitride (SiO₂) x N y ), aluminum oxide (AlO × ), Aluminum oxynitride (AlOxN y) or the like for the gate insulating layer 150. The gate insulating layer 150 further preferably has a composition that is close to the stoichiometric ratio. In addition, the gate insulating layer 150 preferably has few defects. For example, an oxide can be used for the gate insulating layer 150 in which only a few defects are observed when evaluated by means of electron spin resonance (ESR).

[0024] The metal oxide layer 130 also comprises a metal oxide with insulating properties. Specifically, a metal oxide with a band gap of ≥ 4 eV and ≤ 10 eV is used as the metal oxide layer 130. Furthermore, for example, a metal oxide containing one or more metal elements selected from aluminum (Al), magnesium (Mg), calcium (Ca), scandium (Sc), gallium (Ga), germanium (Ge), strontium (Sr), nickel (Ni), tantalum (Ta), yttrium (Y), zirconium (Zr), barium (Ba), hafnium (Hf), cobalt (Co), and lanthanide elements is used for the metal oxide layer 130. In particular, it is preferable to use an aluminum-containing metal oxide (e.g., aluminum oxide, etc.) for the metal oxide layer 130. An aluminum-containing metal oxide exhibits high barrier properties against gases such as oxygen or hydrogen.

[0025] The metal oxide layer 130 can also act as a buffer layer for the oxide semiconductor layer 140. For example, if heat treatment is carried out on the oxide semiconductor layer 140 in contact with the metal oxide layer 130, the crystallinity of the oxide semiconductor layer 140 can be improved.

[0026] Next, an oxide semiconductor film with a novel crystal structure is described, which is used for the oxide semiconductor layer 140. [2. Configuration of the oxide semiconductor film][2-1. Composition of the oxide semiconductor film]

[0027] The oxide semiconductor film contains indium (In) and at least one or more other metallic elements (M) besides indium. It is preferable that the composition of the oxide semiconductor film has an atomic ratio of indium to at least one or more metallic elements that satisfies formula (1). In other words, it is preferable that the ratio of indium to all metallic elements in the oxide semiconductor film is greater than or equal to 50%. If the indium content in the oxide semiconductor film increases, a crystallinity can be achieved. Furthermore, it is preferable that the crystal structure of the oxide semiconductor film is bixbyite. 0.01<[M][In]+[M]<0.5

[0028] Furthermore, the non-indium metal element is not limited to one type of metal element. The non-indium metal element can encompass a wide variety of metal elements.

[0029] Although details of a process for producing the oxide semiconductor film will be described later, the oxide semiconductor film can be formed by a sputtering process. The composition of the oxide semiconductor film formed by the sputtering process depends on the composition of the sputtering target. If the sputtering target has the composition described above, the oxide semiconductor film can be formed by the sputtering process without any changes in the composition of the metallic elements. Therefore, the composition of the metallic elements (e.g., indium or other metallic elements) in the oxide semiconductor film can correspond to the composition of the metallic elements in the sputtering target. For example, the composition of the metallic elements in the oxide semiconductor film can be determined based on the composition of the metallic elements in the sputtering target.Furthermore, the oxygen contained in the oxide semiconductor film is not limited to the above-mentioned content, as it changes depending on the process conditions of the sputtering process.

[0030] Furthermore, the composition of the metal elements in the oxide semiconductor film can be determined by X-ray fluorescence analysis, electron probe microanalysis (EPMA), or similar methods. Since the oxide semiconductor film has a polycrystalline structure, its composition can also be determined by X-ray diffraction (XRD). In particular, the composition of the metal elements in the oxide semiconductor film can be specified based on the crystal structure and lattice constant of the oxide semiconductor film obtained by XRD. [2-2. Crystal structure of the oxide semiconductor film]

[0031] The oxide semiconductor film exhibits a polycrystalline structure with a multitude of crystal grains. Although details of the process for fabricating the oxide semiconductor film are described later, the oxide semiconductor film with a novel polycrystalline structure, distinct from a conventional oxide semiconductor film, can be formed using a polycrystalline oxide semiconductor (Poly-OS) technique. Therefore, the oxide semiconductor film with a polycrystalline structure according to the present embodiment may be referred to below as the Poly-OS film to distinguish it from the conventional oxide semiconductor film with a polycrystalline structure.

[0032] The crystal grain contained in the oxide semiconductor layer 140 can consist of a multitude of crystallites. Although the crystallite size is not limited to a specific size, it is preferably greater than or equal to 1 nm, more preferably greater than or equal to 10 nm, and even more preferably greater than or equal to 15 nm. The crystallite size can be determined by an electron beam diffraction method, an XRD method, or the like.

[0033] Although the crystal structure of the poly-OS film is not restricted to a specific structure, it is preferable for the poly-OS film to exhibit a bixbyite structure. The crystal structure of the poly-OS film can be determined by an XRD method or an electron beam diffraction method.

[0034] Furthermore, several crystal grains can exhibit a single type of crystal structure, or multiple types of crystal structures can be present in the poly-OS film. If the poly-OS film exhibits multiple types of crystal structures, it is still preferable that one of these multiple types of crystal structures be a bixbyite structure.

[0035] The crystal structure of the poly-OS film differs from that of conventional oxide semiconductor films with a polycrystalline structure. In particular, the inventors of the present invention discovered that the crystal grains contained in the poly-OS film exhibit different properties than those contained in a conventional oxide semiconductor film. These properties of the poly-OS film can be measured using transmission electron microscopy and electron diffraction mapping (TEM-ED mapping). Furthermore, the TEM-ED mapping method can be described as automated crystal orientation mapping (ACOM-TEM) for imaging the crystal orientation. The following section describes the measurement of an oxide semiconductor film using the TEM-ED mapping method. [2-2-1. TEM-ED mapping method]

[0036] Fig. Figure 3 is a schematic diagram illustrating the TEM-ED mapping method. The TEM-ED mapping method is an analytical technique in which an electron beam is directed onto a measurement area of ​​the object being measured. The electron diffraction pattern observed after passing through the object is analyzed, and the crystal orientation within the measurement area is measured. Because the electron diffraction pattern is continuously analyzed at numerous measurement points within the measurement area, information about the crystal orientation within or between crystal grains can be obtained. The TEM-ED mapping method uses a TEM Probe 500 as the object being measured. Therefore, the TEM-ED mapping method is capable of obtaining information about the crystal orientation in a smaller measurement area than an EBSD (Electron Back Scattered Diffraction) method using a SEM probe.

[0037] Furthermore, when the TEM-ED mapping method is applied to the oxide semiconductor layer 140 of the thin-film transistor 10, a thin-film sample comprising a cross-section of the oxide semiconductor layer 140 of the thin-film transistor 10 is used as the TEM probe 500. The TEM-ED mapping method involves measuring a microregion using a TEM probe. Although the step interval of the measurement points at which the electron beam diffraction pattern is observed is, for example, greater than or equal to 1 nm, the step interval need not be limited to this. However, when measuring the crystal orientation, it is preferable to have a large number of measurement points in the thickness direction of the oxide semiconductor layer 140. For example, the step interval is less than or equal to 1 / 5, preferably less than or equal to 1 / 10, and even better, less than or equal to 1 / 30 of the thickness of the oxide semiconductor layer.

[0038] The TEM-ED imaging method uses a coordinate system based on the TEM probe 500 (ND ("Normal Direction"), TD ("Transverse Direction") and RD ("Reference Direction")), as shown in Fig. Figure 3 shows that in the coordinate system based on the TEM probe 500, the normal direction to the surface of the TEM probe 500 is defined as the ND. The ND, TD, and RD are also orthogonal to each other. The electron beam is directed from the ND onto the TEM 500.

[0039] Fig. Figure 3 shows a coordinate system (x-axis, y-axis, and z-axis) based on the thin-film transistor 10 (or the oxide semiconductor layer 140) as well as the coordinate system based on the TEM probe 500. In the coordinate system based on the thin-film transistor 10, the thickness direction of the oxide semiconductor layer 140 is the z-axis. The x-axis, y-axis, and z-axis are orthogonal to each other. Therefore, the x-axis and y-axis are directions in the plane of the oxide semiconductor layer 140.

[0040] Accordingly, ND, TD and RD correspond to the y-axis, the x-axis and the z-axis respectively of the thin-film transistor in the TEM-ED imaging method 10. [2-2-2. Inverse pole figure]

[0041] An inverse pole figure (IPF) is a diagram that illustrates crystal orientations in a specific direction of the coordinate system based on the TEM probe 500. The inverse pole figure represents the proportion of crystal orientations in each direction of the TEM probe 500's coordinate system according to a predefined index. Generally, the proportion of crystal orientations in a particular direction is color-coded according to a color key. [2-2-3. IPF card]

[0042] An IPF map is a representation showing the crystal orientation in a specific direction of the coordinate system, based on the TEM probe 500, as a distribution of crystal orientations on the probe's surface. The IPF map classifies the crystal orientations at multiple measurement points according to a predefined index that indicates the crystal orientation in each direction of the TEM probe 500's coordinate system. Generally, the crystal orientations are color-coded according to a color key. [2-2-4. Crystal grain]

[0043] A crystal grain is a crystalline region surrounded by a grain boundary. Since the TEM-ED mapping method provides information about the crystal orientation, the grain boundary can be defined based on the crystal orientations. If the difference in crystal orientation between two adjacent measurement points exceeds 5 degrees, a grain boundary is generally assumed to exist between them. Therefore, the above definition also applies to the oxide semiconductor film.

[0044] The TEM-ED mapping method is a measurement performed over a small measurement range. Since the surface of the TEM sample 500 is a thin-film sample with a cross-section along the layer thickness direction, it is also difficult to determine the crystal grain size of the crystal grains distributed in the plane of the oxide semiconductor layer 140. Therefore, in the present embodiment, the length of the crystal grain, determined based on the cross-section of the oxide semiconductor layer 140 in the measurement range, is defined as the crystal grain length and not as the crystal grain size. In particular, the distance between two crystal grain boundaries obtained in the cross-section of the oxide semiconductor layer 140 is defined as the crystal grain length. The crystal grain length defined in this way can be determined to be smaller than the crystal grain size.However, the crystal grain size of the crystal grains contained in the poly-OS film is significantly larger than that of the crystal grains contained in a conventional oxide semiconductor film. That is, the crystal grain length of the poly-OS film, as defined above, can be obtained as a value larger than that of the crystal grains contained in the conventional oxide semiconductor film. Therefore, it is possible to compare the poly-OS film with the conventional oxide semiconductor film using the crystal grain length defined above. In the poly-OS film, the crystal grain length is greater than or equal to 100 nm, preferably greater than or equal to 300 nm, and even better, greater than or equal to 500 nm. Although the upper limit of the crystal grain length is not restricted to a specific dimension, the crystal grain length can be less than or equal to 50 µm.Furthermore, the crystal grain length is preferably measured in a middle section of the thickness.

[0045] As described above, the crystal grain length of the crystal grain contained in the poly-OS film is large, and a single crystal grain can constitute part of the upper surface and part of the lower surface of the poly-OS film. Although in this case the crystal grain boundary between two adjacent crystal grains extends from the upper surface to the lower surface (or from the lower surface to the upper surface), the grain boundary does not run along the thickness direction, and the positions of the upper and lower surfaces of the crystal grain boundary can be offset from each other. In other words, two adjacent crystal grains with an intervening crystal grain boundary overlap each other in the thickness direction of the poly-OS film. Furthermore, the distance between the position of the upper surface and the position of the lower surface of the crystal grain boundary, i.e.,the overlap distance of two adjacent crystal grains, in the direction perpendicular to the thickness direction of the poly-OS film, for example more than or equal to 10 nm, preferably more than or equal to 20 nm and even better more than or equal to 30 nm. [2-2-5. KAM value]

[0046] A KAM value (Kernel Average Misorientation) is the average crystal orientation difference between a measurement point within a crystal grain and all measurement points adjacent to that single measurement point. However, the difference in crystal orientation between two adjacent measurement points with a grain boundary in between is not taken into account when calculating the KAM value.

[0047] The KAM value represents the change in crystal orientation within a crystal grain. As described above, if the difference in crystal orientation between one measurement point and another adjacent measurement point exceeds 5 degrees, it is considered a grain boundary. Therefore, the range of the KAM value, calculated based on adjacent measurement points within a crystal grain, is greater than or equal to 0 degrees and less than or equal to 5 degrees. A large KAM value indicates that the local change in crystal orientation within the crystal grain is significant and the crystal grain is highly distorted.

[0048] The KAM value is calculated at each of the multiple measurement points. Accordingly, a distribution diagram of the KAM value within the crystal grains can be generated. Furthermore, an average KAM value and a standard deviation of the KAM value can be calculated. The average KAM value represents one of the properties of the crystal grains contained in the poly-OS film. Because the poly-OS film exhibits a large change in crystal orientation and contains many crystal grains with significant distortion, the average KAM value of the poly-OS film is higher than that of a conventional oxide semiconductor film with a polycrystalline structure. The average KAM value in the poly-OS film is greater than or equal to 0.6 degrees, preferably greater than or equal to 0.7 degrees, and even better, greater than or equal to 0.8 degrees. Similarly, the standard deviation of the KAM value also represents one of the properties of the crystal grains contained in the poly-OS film.In the Poly-OS, the standard deviation of the KAM value is greater than or equal to 0.3 degrees, preferably greater than or equal to 0.35 degrees and particularly preferably greater than or equal to 0.4 degrees.

[0049] Furthermore, the average KAM value in the poly-OS film increases with increasing step distance between measurement points. This is due to the significant change in crystal orientation within the crystal grain contained in the poly-OS film. One of the properties of the poly-OS film is the tendency for the average KAM value to increase with increasing step interval.

[0050] Furthermore, the average KAM value described above is an overall average KAM value (KAM). AVE(total) ) which is calculated based on the KAM values ​​of all measurement points in the measurement range. Unless otherwise specified in this description, the average KAM value refers to the overall average KAM value (KAM).AVE(gesamt) On the other hand, it is also possible to calculate the average KAM value based on some measurement points within the measurement area. For example, the thickness of the poly-OS film can be divided, and the average KAM values ​​of the measurement points contained within the divided areas can be calculated. The average KAM values ​​calculated based on some measurement points will differ from the overall average KAM value (KAM). AVE(total) The average KAM values ​​calculated by dividing the thickness of the poly-OS film depend on the distance (depth) of the thickness of the poly-OS film. Therefore, the average value in this specification is sometimes also referred to as the depth-average KAM value (KAM). AVE(Tiefe) ) is designated to differentiate it from the overall average KAM value (KAM). AVE(Gesamt) ) to distinguish.

[0051] Since the crystal grain length of the poly-OS film is large, the poly-OS film can, as described above, consist of a single crystal grain from top to bottom. Furthermore, the crystal orientation in the poly-OS film also changes considerably in the thickness direction. In particular, the depth average value (KAM) AVE(Tiefe) The depth average (KAM) value differs between the upper and lower end sections (located near the interface, for example, within 3 nm of the interface) and a middle section (located near a center, for example, within 5 nm, equidistant from the upper and lower end sections) of the poly-OS film. AVE(Tiefe)The KAM value at the upper and lower end sections of the poly-OS film is greater than or equal to 0.6 degrees and less than 5.0 degrees, and preferably greater than or equal to 0.7 degrees and less than 5.0 degrees. On the other hand, the depth-average KAM value (KAM) is AVE(Tiefe) ) in the central area of ​​the Poly-OS film less than 0.6 degrees. The difference in the depth-average KAM value (KAM) AVE(Tiefe) ) between the upper end section or the lower end section and the middle section of the Poly-OS film is greater than or equal to 0.1 degrees, preferably greater than or equal to 0.15 degrees and even better greater than or equal to 0.2 degrees.

[0052] The top and bottom surfaces of the Poly-OS film may have irregularities. In this case, the number of measurement points at the top and bottom edges is reduced, thus minimizing the error in the depth-averaged KAM values ​​(KAM). AVE(Tiefe)The depth at the upper and lower end sections is likely to be large. Therefore, the depth-average KAM values ​​(KAM) can be AVE(Tiefe) ) at the upper end section and at the lower end section by using an area as the effective area in which the number of measurement points contained in the subdivided area is greater than or equal to 90% of the number of measurement points in the middle section (or an area in which the number of measurement points is greater than or equal to 90% of the maximum number of measurement points). For an effective poly-OS film, the depth-average KAM values ​​(KAM) AVE(Tiefe) ) insofar as they are calculated at the upper and lower end sections without being affected by the unevenness formed on the top and bottom surfaces.

[0053] As described above, the TEM-ED mapping method can provide information about the crystal orientation in the crystal grains of the poly-OS film. For example, if the poly-OS film exhibits a bixbyite structure, the TEM-ED mapping method can further reveal that the poly-OS film contains a crystal grain with a crystal orientation of <001> , <101> or <111> contains.

[0054] This involves a <001> -Crystal orientation for

[001] and its equivalents for

[100] and

[010] . The <101> -Crystal orientation is represented by

[101] and its equivalents

[110] and

[011] . <111> Crystal orientation is represented by

[111] . Furthermore, “1” in any orientation can also be a “-1” and is considered an axis corresponding to any orientation.

[0055] Other crystal orientations include <hk0>(h ≠ k, h and k are natural numbers), <hhl>(h ≠ I, h and l are natural numbers) and <hkl>(h ≠ k ≠ l, h, k and l are natural numbers) except <001> , <101> and <111> .

[0056] The crystal grains in the poly-OS film exhibit a characteristic where the crystal orientation changes significantly within the grain. When the properties of the poly-OS film are quantified using a TEM-ED method, the average KAM value of the poly-OS film is at least 0.6 degrees. In contrast, with conventional oxide semiconductor films, large changes in crystal orientation within the grain are likely to result in crystal dislocations, and the crystal grain size is small. However, in the poly-OS film, as described above, the crystal grain length (or crystal grain size) is large, even though the change in crystal orientation within the grain is also large. This property of the poly-OS film is completely different from that of conventional oxide semiconductor films. Through trial and error, the inventors discovered that the poly-OS film possesses a novel crystal structure.The poly-OS film is less susceptible to the influence of crystal grain boundaries because it contains crystal grains with a large grain length (or grain size). Therefore, in the thin-film transistor 10 with the poly-OS layer as the channel, the channel is less likely to be affected by grain boundaries, grain boundary scattering is suppressed, and the field-effect mobility is improved.

[0057] Furthermore, the crystal orientation of the crystal grain in the poly-OS film will be described in detail later, along with examples.

[0058] Although the configuration of the thin-film transistor 10 has been described previously, the thin-film transistor 10 mentioned above is a so-called top-gate transistor. The thin-film transistor 10 can be modified in various ways. For example, if the light-shielding layer 105 is conductive, the thin-film transistor 10 can have a structure in which the light-shielding layer 105 acts as the gate electrode and the first insulating layer 110 and the second insulating layer 120 act as gate insulating layers. In this case, the thin-film transistor 10 is a so-called dual-gate transistor. Furthermore, if the light-shielding layer 105 is conductive, it can be a floating electrode and connected to the source electrode 201. Furthermore, the thin-film transistor 10 can be a so-called bottom-gate transistor, in which the light-shielding layer 105 acts as the main gate electrode. [2. Method for manufacturing the thin-film transistor 10]

[0059] A method for manufacturing the thin-film transistor 10 according to an embodiment of the present invention is described with reference to the Fig. described. Fig. Figure 4 is a flowchart illustrating the process for manufacturing the thin-film transistor 10 according to an embodiment of the present invention. Fig. Figures 5 to 12 are schematic cross-sectional views showing the method for manufacturing the thin-film transistor 10 according to an embodiment of the present invention.

[0060] As in Fig. As shown in Figure 4, the process for fabricating the thin-film transistor 10 comprises steps S1010 to S1110. Although the following description presents steps S1010 to S1110 sequentially, the order of the steps in the process for fabricating the thin-film transistor 10 can also be reversed. Furthermore, the process for fabricating the thin-film transistor 10 can also include additional steps.

[0061] In step S1010, the light-shielding layer 105 is formed on the substrate 100 with a predefined pattern. The structuring of the light-shielding layer 105 is carried out using a photolithography process. The first insulating layer 110 and the second insulating layer 120 are formed on the light-shielding layer 105 (see Fig. 5) The first insulating layer 110 and the second insulating layer 120 are deposited using a CVD process. For example, silicon nitride and silicon oxide are deposited as the first insulating layer 110 and the second insulating layer 120, respectively. If silicon nitride is used for the first insulating layer 110, the first insulating layer 110 can block impurities that diffuse from the substrate 100 into the oxide semiconductor layer 140. If silicon oxide is used for the second insulating layer 120, the second insulating layer 120 can release oxygen through heat treatment.

[0062] In step S1015, the metal oxide film 135 is deposited on the second insulating layer 120 (see Fig. 6) Here, the metal oxide film 135 is deposited by a sputtering process. The thickness of the metal oxide film 135 is, for example, more than or equal to 2 nm and less than or equal to 51 nm, preferably more than or equal to 2 nm and less than or equal to 31 nm, more preferably more than or equal to 2 nm and less than or equal to 21 nm, and particularly preferably more than or equal to 2 nm and less than or equal to 11 nm.

[0063] In step S1020, an oxide semiconductor film 145 is deposited on the metal oxide film 135 (see Fig. 6) The oxide semiconductor film 145 is deposited more precisely by a sputtering process. The thickness of the oxide semiconductor film 145 is, for example, more than or equal to 10 nm and less than or equal to 100 nm, preferably more than or equal to 15 nm and less than or equal to 70 nm, and even better more than or equal to 15 nm and less than or equal to 40 nm.

[0064] The oxide semiconductor film 145 in step S1020 is amorphous. In the poly-OS technology, the oxide semiconductor film 145 is preferably amorphous after deposition and before heat treatment, such that the oxide semiconductor layer 140 has a uniform polycrystalline structure in the substrate plane. Therefore, the deposition conditions of the oxide semiconductor film 145 are preferably conditions under which the oxide semiconductor film 145 does not crystallize immediately after deposition. If the oxide semiconductor film 145 is deposited by a sputtering process, the oxide semiconductor film 145 is deposited while the temperature of the object to be deposited (the substrate 100 and the layers formed on the substrate 100) is controlled to less than or equal to 100 °C, preferably less than or equal to 80 °C, and even better less than or equal to 50 °C. Furthermore, the oxide semiconductor film 145 is deposited under the condition of a low oxygen partial pressure.The partial pressure of oxygen is greater than or equal to 2% and less than or equal to 20%, preferably greater than or equal to 3% and less than or equal to 15%, and particularly preferably greater than or equal to 3% and less than 10%.

[0065] In step S1030, the oxide semiconductor film 145 is structured (see Fig. 7) The structuring of the oxide semiconductor film 145 is carried out using a photolithography process. Wet or dry etching can be used to etch the oxide semiconductor film 145. Wet etching can be performed with an acidic etchant. Examples of suitable etchants include oxalic acid, PAN, sulfuric acid, a hydrogen peroxide solution, hydrofluoric acid, or similar substances.

[0066] In step S1040, a heat treatment is performed on the oxide semiconductor layer 145. Hereinafter, the heat treatment performed in step S1040 is referred to as "OS annealing." During the OS annealing process, the oxide semiconductor film 145 is held at a predetermined target temperature for a predetermined time. The predetermined target temperature is higher than or equal to 300°C and lower than or equal to 500°C, and preferably higher than or equal to 350°C and lower than or equal to 450°C. Furthermore, the predetermined time (holding time) at the achieved temperature is more than or equal to 15 minutes and less than or equal to 120 minutes, and preferably more than or equal to 30 minutes and less than or equal to 60 minutes. The oxide semiconductor film 145 is crystallized by the OS annealing process to form the oxide semiconductor layer 140 with a polycrystalline structure (i.e., the oxide semiconductor layer 145 comprises the poly-OS film).

[0067] In step S1045, the metal oxide film 135 is structured to form the metal oxide layer 130 ( Fig. The metal oxide film 135 is etched using the oxide semiconductor layer 140 as a mask. When the structured oxide semiconductor layer 140 is used as a mask, a photolithography process can be omitted. The metal oxide film 135 can be etched by wet etching or dry etching. For example, diluted hydrofluoric acid (DHF) is used in wet etching.

[0068] In step S1050, the gate insulating layer 150 is formed on the oxide semiconductor layer 140 (see Fig. 9) The gate insulating layer 150 is deposited using a CVD process. For example, silicon oxide is deposited for the gate insulating layer 150. To reduce defects in the gate insulating layer 150, it can be deposited at a deposition temperature of 350°C or higher. The thickness of the gate insulating layer 150 is also greater than or equal to 50 nm and less than or equal to 300 nm, preferably greater than or equal to 60 nm and less than or equal to 200 nm, and even more preferably greater than or equal to 70 nm and less than or equal to 150 nm.

[0069] In step S1060, a heat treatment is performed on the oxide semiconductor layer 140. Hereinafter, the heat treatment performed in step S1060 is referred to as "oxidation annealing." When the gate insulating layer 150 forms on the oxide semiconductor layer 140, numerous oxygen vacancies are created on the top and side surfaces of the oxide semiconductor layer 140. During oxidation annealing, oxygen is supplied from the second insulating layer 120 and the gate insulating layer 150 to the oxide semiconductor layer 140, thus repairing the oxygen vacancies.

[0070] In step S1070, the gate electrode 160 is formed with a predefined pattern on the gate insulating layer 150 (see Fig. 10). The gate electrode 160 is deposited by a sputtering process or an atomic layer volume process and the structuring of the gate electrode 160 is carried out using a photolithography process.

[0071] In step S1080, the source region S and the drain region D are formed in the oxide semiconductor layer 140 (see Fig. 10) The source region S and the drain region D are formed by ion implantation. Specifically, impurities are implanted through the gate insulating layer 150 into the oxide semiconductor layer 140, with the gate electrode 160 acting as a mask. Impurities used include, for example, argon (Ar), phosphorus (P), boron (B), or similar elements. The ion implantation creates oxygen deficiencies in the source region S and the drain region D that do not overlap the gate electrode 160, and hydrogen is trapped in these oxygen deficiencies. This reduces the resistance of the source region S and the drain region D. Since, on the other hand, no impurities are implanted into the channel region CH that overlaps the gate electrode 160, the resistance of the channel region CH is not reduced.

[0072] Since impurities are implanted into the oxide semiconductor layer 140 through the gate insulating layer 150 in the thin-film transistor 10, impurities such as argon (Ar), phosphorus (P), boron (B) or the like are also contained in the gate insulating layer 150.

[0073] In step S1090, the third insulating layer 170 and the fourth insulating layer 180 are formed over the gate insulating layer 150 and the gate electrode 160 (see Fig. 11) The third insulating layer 170 and the fourth insulating layer 180 are deposited using a CVD process. For example, silicon oxide and silicon nitride are deposited for the third insulating layer 170 and the fourth insulating layer 180, respectively. The thickness of the third insulating layer 170 is greater than or equal to 50 nm and less than or equal to 500 nm. The thickness of the fourth insulating layer 180 is also greater than or equal to 50 nm and less than or equal to 500 nm.

[0074] In step S1100, the opening sections 171 and 173 are formed in the gate insulating layer 150, the third insulating layer 170 and the fourth insulating layer 180 (see Fig. 12). The source region S and the drain region D of the oxide semiconductor layer 140 are exposed by the formation of the opening sections 171 and 173.

[0075] In step S1110, the source electrode 201 is formed on the fourth insulating layer 180 and within the opening region 171, and the drain electrode 203 is formed on the fourth insulating layer 180 and within the opening region 173. The source electrode 201 and the drain electrode 203 are formed as the same layer. In particular, the source electrode 201 and the drain electrode 203 are formed by structuring a deposited conductive film. Accordingly, the Fig. 1 Thin-film transistor 10 shown was produced by the steps mentioned above.

[0076] Although the method for manufacturing the thin-film transistor 10 has been described above, the method for manufacturing the thin-film transistor 10 is not limited to this method alone.

[0077] In the thin-film transistor 10 according to the present embodiment, the oxide semiconductor layer 140 contains the poly-OS film with a novel crystal structure. The poly-OS film contains crystal grains with a large change in crystal orientation and a large crystal grain length (or crystal grain size). Therefore, in the thin-film transistor 10, which incorporates the poly-OS layer as a channel, the channel as a whole is less likely to be affected by crystal grain boundaries. Furthermore, it is assumed that the crystal orientation in the crystal grains changes to improve the lattice matching at the crystal grain boundaries, and that, as a result, crystal grain boundaries with fewer defects are formed. For these reasons, in the thin-film transistor 10 with the poly-OS layer as a channel, grain boundary scattering is suppressed and the field-effect mobility is improved. <Zweite Ausführungsform>

[0078] An electronic device according to an embodiment of the present invention is described with reference to Fig. 13 described.

[0079] Fig. Figure 13 is a schematic diagram showing an electronic device 1000 according to an embodiment of the present invention. In particular, it shows Fig. 13. A smartphone, which is an example of the electronic device 1000. The electronic device 1000 comprises a display device 1100 with curved sides. The display device 1100 comprises a plurality of pixels for displaying an image. The plurality of pixels is controlled by a pixel circuit, a driver circuit, and the like. The pixel circuit and the driver circuit comprise the thin-film transistor 10 described in the first embodiment. Since the thin-film transistor 10 has a high field-effect mobility, the responsiveness of the pixel circuit and the driver circuit, and consequently the performance of the electronic device 1000, can be improved.

[0080] Furthermore, the electronic device 1000 according to the present embodiment is not limited to a smartphone. For example, the electronic device 1000 also includes an electronic device with a display device, such as a watch, a tablet, a notebook, a car navigation system, or a television. Moreover, the thin-film transistor 10 described in the first embodiment can be applied to any electronic device, regardless of whether the electronic device has a display device or not. [EXAMPLES]

[0081] An oxide semiconductor layer (especially a poly-OS film) is described in more detail using the fabricated thin-film transistor as an example. [1. Production of thin-film transistors]

[0082] A thin-film transistor was fabricated using the manufacturing process described in the first embodiment. In the sputtering process for depositing the oxide semiconductor layer, a sputtering target was used in which indium constituted 70% of all metal elements contained in the sintered body to deposit an oxide semiconductor layer 30 nm thick. The oxygen partial pressure during film deposition was 5%, and the substrate temperature was controlled to less than or equal to 100 °C. In the OS annealing process, the target temperature was controlled in an air atmosphere between 350 °C and 450 °C and maintained for 60 minutes. The chemical composition of the oxide semiconductor layer after the OS annealing process was the same as that of the sputtering target. [2. Crystal orientation analysis using the TEM-ED mapping method]

[0083] A TEM sample (hereinafter referred to as the "sample sample") was prepared by extracting a cross-section from a region containing an oxide semiconductor layer of a thin-film transistor using FIB processing. A crystal orientation analysis of a poly-OS film contained within the oxide semiconductor layer was then performed using TEM-ED mapping. The measurement conditions for the TEM-ED mapping are listed in Table 1. An ASTAR from NanoMegas Corporation was used for the crystal orientation analysis. Additionally, a powder diffraction file (PDF) from IC DD (International Centre for Diffraction Date) 04-024-4517 was used for the crystal structure orientation. [Table 1] Vorrichtung JEM-ARM200F, hergestellt von JEOL Ltd. BeschleunigungStromspannung 200 kV MessungRegion 60 nm × 1200 nm Schrittintervall 1 nm [2-1. Inverse Pole Figure]

[0084] Fig. 14 is an inverse pole figure of the oxide semiconductor layer (poly-OS film) of the example sample. Fig. shows inverse pole figures with respect to ND, TD, and RD. In the inverse pole figures of ND, TD, and RD, the contribution of the crystal orientation increases according to the value of the in Fig. The index shown (for example, the index can be a color key, and the contribution of the crystal orientation increases as the color changes from blue to red (the wavelength of visible light increases)). Here, there are regions (regions A1, A2, and A3) with large values ​​in all ND, TD, and RD regions, and it could be deduced that certain crystal orientations are present with a large contribution. For example, in the RD, which corresponds to the thickness direction of the oxide semiconductor layer, the contribution of <111> -Crystal orientation greater than that of the <001> -Crystal orientation and the <101> -Crystal orientation. [2-2. IPF card]

[0085] Fig. Figure 15 is an IPF map of the oxide semiconductor layer (poly-OS film) of the example sample. Fig. shows IPF maps in relation to ND, TD, and RD. In Fig. are the <001> -Crystal orientation, which <101> -Crystal orientation, which <111> -Crystal orientation and the <011> -Crystal orientation classified according to the indices in the figure.

[0086] In the Fig. In the areas shown, B1 and B2, the crystal orientation changes significantly and discontinuously. This discontinuous change in crystal orientation corresponds to a grain boundary, and it is confirmed that a grain boundary forms in areas B1 and B2 from the top to the bottom (or from the bottom to the top) of the oxide semiconductor layer. The grain length of a crystal grain between the grain boundaries defined by areas B1 and B2 was 1080 nm. Furthermore, each crystal grain comprised part of the upper surface and part of the lower surface of the oxide semiconductor layer. This means that the grain length is greater than or equal to 10 times the thickness of the oxide semiconductor layer.

[0087] The crystal orientations within the grains in the IPF maps corresponded to the proportions of the crystal orientations in the inverse pole figures described above. For example, the main crystal orientation of the grain in RD is the <111> -Crystal orientation.

[0088] Furthermore, the grain boundary in region B2 is not aligned with the thickness direction of the oxide semiconductor layer and is significantly shifted from it. This means that two adjacent crystal grains enclosing the grain boundary in the intervening region B2 overlap in the thickness direction of the oxide semiconductor layer. The overlap distance between the two adjacent crystal grains, perpendicular to the thickness direction of the oxide semiconductor layer, was 34 nm.

[0089] Furthermore, although not shown in the figures, the crystal grain boundaries could also be confirmed in a TEM image in areas B1 and B2. [2-3. KAM value]

[0090] Fig. Figure 16 is a KAM map of the oxide semiconductor layer (poly-OS film) of the example sample. In particular, in Fig. 16 the KAM values ​​of the measuring points in the measuring range according to the values ​​of the in Fig. The 16 indices shown are used to classify the crystals (the indices can, for example, be a color key, and the KAM value increases from 0 degrees to 5 degrees as the color changes from blue to red (the wavelength of visible light increases)). Furthermore, if the difference in crystal orientation between two adjacent measurement points exceeds 5 degrees, this is considered a grain boundary, thus setting the upper limit of the KAM value at 5 degrees. Fig. Figure 17 is also a diagram showing the distribution of the KAM values ​​of the oxide semiconductor layer (poly-OS film) of the example sample.

[0091] As in Fig. As shown in Figure 16, the oxide semiconductor layer exhibits not only a region with a KAM value close to 0 degrees (corresponding to the area shown in blue in the color key, which will be referred to as the "blue region" for simplicity), but also a region with a KAM value other than close to 0 degrees (corresponding to the area shown in green in the color key, which will be referred to as the "green region" for simplicity). Overall, it can be observed that the blue region extends across the central portion of the oxide semiconductor layer, and the green region extends near the surface (near the upper and lower end regions) of the oxide semiconductor layer. As shown in Figure 16, the oxide semiconductor layer has a KAM value close to 0 degrees. Fig. As can be seen in section 17, it can therefore be confirmed that not only are there measuring points with a KAM value close to 0 degrees, but also many measuring points with a KAM value other than 0 degrees. The overall average KAM value (KAM AVE(total) The KAM value, calculated from the KAM values ​​of all measurement points, is 0.646 degrees. Furthermore, the standard deviation (σ) of the KAM value is 0.396 degrees. With a step interval of 2 nm, the overall average KAM value (KAM) is... AVE(total) ) 0.670 degrees. That is, as the step interval increases, the overall average KAM values ​​(KAM) decrease. AVE(total) ) to.

[0092] Although the TEM-ED mapping method is a measurement on the microscopic scale, the overall mean and standard deviation of the KAM value for the poly-OS film are large, even on this microscopic scale. This indicates a large change in crystal orientation within the crystal grain of the poly-OS film. Despite the large grain length (or grain size) of the crystal grain in the poly-OS film, there is a large local change in crystal orientation. This is one of the properties of the poly-OS film that is not observed in conventional polycrystalline oxide semiconductor films.

[0093] Fig. Figure 18 is a diagram showing a depth-averaged KAM value in the oxide semiconductor layer (poly-OS film) of the sample. As described above, a difference in the KAM value distribution is observed between the central portion of the oxide semiconductor layer and the area surrounding the surface (the area surrounding the top end and bottom end). Therefore, the KAM values ​​of the measurement points for each distance from the interface between the gate insulating layer and the oxide semiconductor layer (the depth of the oxide semiconductor layer) are recorded, and the depth-averaged KAM value (KAM) is calculated. AVE(Tiefe) ) calculated, which represents the average value of the recorded measurement points. The depth average KAM value (KAM) AVE(Tiefe) ) is the average KAM value of some measurement points, divided by the depth of the oxide semiconductor layer. Furthermore, a range in which the number of measurement points contained in the subdivided area is greater than or equal to 90% of the number of measurement points in the central section was defined as a valid range to exclude the influence of surface irregularity of the oxide semiconductor layer, and the depth-average KAM value {KAM AVE(Tiefe) The oxide semiconductor layer was calculated. Fig. The depth average KAM value (KAM) shown in graphic 18 is AVE(Tiefe) ) applied against the depth in the thickness direction of the oxide semiconductor layer.

[0094] As in Fig. Shown in 18 is the depth average KAM value (KAM). AVE(Tiefe) ) at the upper end section near the interface between the oxide semiconductor layer and the gate insulating layer, and at the lower end section near the interface between the oxide semiconductor layer and the metal oxide layer, are larger than in the middle section of the oxide semiconductor layer. The depth-average KAM values ​​(KAM) AVE(Tiefe) The values ​​in the middle section (depth 15 nm), the upper end section (depth 0 nm), and the lower end section (depth 32 nm) were 0.554 degrees, 0.828 degrees, and 0.802 degrees, respectively. The difference in the depth average KAM values ​​(KAM) AVE(Tiefe) The difference between the upper end section and the middle section, as well as the difference between the lower end section and the middle section, was greater than or equal to 0.2 degrees.

[0095] The results above show that the change in crystal orientation near the interface of the oxide semiconductor layer is large. In the poly-OS film, the change in local crystal orientation is even large in the thickness direction. In conventional polycrystalline oxide semiconductor films, it is difficult to form the oxide semiconductor film from the top to the bottom surface with a single crystal grain because the crystal grain length (or crystal grain size) is small, resulting in strain relief within the crystal grain. On the other hand, in the poly-OS film, it is possible to form the oxide semiconductor film from the top to the bottom surface with a crystal grain exhibiting a large change in crystal orientation. This is one of the properties of the poly-OS film that is not observed in conventional polycrystalline oxide semiconductor films. [3. Electrical properties]

[0096] The electrical properties of the fabricated thin-film transistor were measured. The field-effect mobility calculated from the electrical properties was 33.5 cm⁻¹. 2 / Vs. It has been confirmed that when using the Poly-OS film as a channel of a thin-film transistor, a field-effect mobility (field-effect mobility in a saturated region) of more than 30 cm is achieved. 2 / Vs can be achieved.

[0097] Each of the embodiments described above as embodiments of the present invention can be combined and implemented accordingly, provided that no contradiction arises. Furthermore, the addition, removal, or modification of the design of components or the addition, removal, or modification of process conditions, as appears appropriate to a person skilled in the art based on the individual embodiments, are included within the scope of the present invention, provided they are consistent with the core of the present invention.

[0098] It is understood that, even if the effect differs from the effect of the embodiments described above, the effect that emerges from the description in the specification or can be easily predicted by those skilled in the art can obviously be derived from the present invention. REFERENCE MARK LIST

[0099] 10: Thin-film transistor, 100: Substrate, 105: Light shielding layer, 110: First insulating layer, 120: Second insulating layer, 130: Metal oxide layer, 135: Metal oxide film, 140: Oxide semiconductor layer, 145: Oxide semiconductor film, 150: Gate insulating layer, 160: Gate electrode, 170: Third insulating layer, 171: Opening section, 173: Opening section, 180: Fourth insulating layer, 200: Source / drain electrode, 201: Source electrode, 203: Drain electrode, 500: TEM probe, 1000: Electronic device, 1100: Display device QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 2021-141338

[0002] JP 2014-099601

[0002] JP 2021-153196

[0002] JP 2018-006730

[0002] JP 2016-184771

[0002] JP 2021-108405

[0002] < / hkl> < / hhl>

Claims

[1] A thin-film transistor comprising: a substrate; a metal oxide layer that is provided over the substrate; an oxide semiconductor layer comprising a multitude of crystal grains and intended to be in contact with the metal oxide layer; a gate electrode that is provided above the oxide semiconductor layer; and a gate insulating layer provided between the oxide semiconductor layer and the gate electrode, where, if a crystal orientation is determined at each of a plurality of measurement points of the oxide semiconductor layer based on an electron diffraction pattern obtained by transmission of an electron beam incident from a direction intersecting a thickness direction of the oxide semiconductor layer, an average KAM value calculated at the plurality of measurement points is greater than or equal to 0.6 degrees. [2] The thin-film transistor according to claim 1, wherein the electron diffraction pattern is recorded at each of the multitude of measurement points in a predetermined step interval and where the specified step interval is greater than or equal to 1 nm. [3] The thin-film transistor according to claim 2, wherein the predetermined step interval is less than or equal to 1 / 5 of the thickness of the oxide semiconductor layer. [4] The thin-film transistor according to claim 3, wherein the average KAM value increases with increasing predetermined step interval. [5] The thin-film transistor according to claim 1, wherein at least one of two crystal grains adjacent to each other at a grain boundary forms part of an upper surface and part of a lower surface of the oxide semiconductor layer. [6] The thin-film transistor according to claim 1, wherein a gap between two adjacent measuring points is defined as a grain boundary if the difference in crystal orientation between the two adjacent measuring points exceeds 5 degrees. [7] The thin-film transistor according to claim 1, wherein two adjacent crystal grains with a grain boundary arranged between them overlap each other in the thickness direction of the oxide semiconductor layer and wherein an overlap distance between the two adjacent crystal grains in the direction that intersects the thickness direction of the oxide semiconductor layer is greater than or equal to 10 nm. [8] The thin-film transistor according to claim 7, wherein a gap between two adjacent measuring points is defined as a grain boundary if the difference in crystal orientation between the two adjacent measuring points exceeds 5 degrees. [9] The thin-film transistor according to claim 1, wherein a depth average value of the KAM values ​​at each upper end section and each lower end section of the oxide semiconductor layer is greater than or equal to 0.6 degrees. [10] The thin-film transistor according to claim 1, wherein the difference between a depth average of the KAM values ​​at an upper end section or a lower end section of the oxide semiconductor layer and a depth average of the KAM values ​​at a middle section of the oxide semiconductor layer is greater than or equal to 0.1 degrees. [11] The thin-film transistor according to claim 1, wherein in the thickness direction of the oxide semiconductor layer a proportion of <111> -Crystal orientation is greater than proportions of a <001> -Crystal orientation and a <101> -Crystal orientation. [12] The thin-film transistor according to claim 1, wherein at least one of the plurality of crystal grains has a crystal grain length greater than or equal to 100 nm in the direction that intersects the thickness direction of the oxide semiconductor layer. [13] The thin-film transistor according to claim 1, the oxide semiconductor layer comprises: Indium and at least one or more other metallic elements besides indium, and wherein the ratio of indium to indium and the at least one or more metallic elements is greater than or equal to 50%. [14] The thin-film transistor according to claim 1, wherein a band gap of a metal oxide contained in the metal oxide layer is greater than or equal to 4 eV. [15] The thin-film transistor according to claim 1, wherein the metal oxide layer comprises one or more metal elements selected from aluminium, magnesium, calcium, scandium, gallium, germanium, strontium, nickel, tantalum, yttrium, zirconium, barium, hafnium, cobalt and lanthanide elements. [16] The thin-film transistor according to claim 1, wherein a crystal structure of the oxide semiconductor layer is a bixbyite structure. [17] An electronic device comprising the thin-film transistor according to any one of claims 1 to 16.

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