METHOD AND DEVICE FOR EXAMINATION OF A SAMPLE

Description

[0001] The present invention relates to a method for examining a test specimen, in particular a non-destructive testing method using sound, and a corresponding device.

[0002] The use of energetic sound pulses to detect structures, processes, and parameters is widespread in both research and industry. They are used particularly, but not exclusively, in non-destructive testing and medical technology. When a defined, time-controlled signal, particularly pulses or vibrations, encounters an internal or external phase boundary of a sample under investigation (hereinafter also referred to as the test object), e.g., a test piece, energetic interactions occur. Part of the applied energy can be reflected back and registered by a receiver. Based on the received signals, conclusions can be drawn about the properties of the object under investigation.

[0003] It is advantageous to introduce as much energy from the transmitter as possible into the object under investigation and to keep losses due to boundary conditions and / or environmental effects to a minimum.

[0004] Various technical methods already exist for sound excitation of samples or test objects. Transducers operating according to various basic physical principles have been used as transmitters. Examples include transducers with vibrating membranes, piezoelectric transducers, and thermoacoustic transducers. However, transducers operating on these principles are generally limited in terms of their transmission power and / or suffer from significant losses at phase boundaries. This means that the energy of the signals coupled into the test object is very small compared to the excitation energy, which requires considerable technical effort, particularly when recording the signals required for analysis. Furthermore, these transducers have a limited lifespan, which depends heavily on the intensity of use.

[0005] DE 10 2007 030 270 B3 describes, by way of example, a technical method for sound excitation according to the state of the art.

[0006] US 2011 / 122727 A1 describes a method and apparatus for investigating a borehole system and a subterranean formation according to the prior art.

[0007] In view of the above, the present invention proposes a method according to claim 1, a device according to claim 10 and a use according to claim 14.

[0008] According to one embodiment, a method for examining a test object comprises exciting a propagating mechanical deformation in the test object by means of an excitation signal which is transported by a free jet emanating from a fluidic oscillator and has a frequency of at least 16 kHz, and determining a characteristic of the mechanical deformation.

[0009] Mechanical deformation is typically elastic deformation.

[0010] Fluidic oscillators can have various designs (see, for example, US 3902367 A and US 3247861 A). However, when maintaining the oscillation of a fluid flowing through them, i.e., a material or substance that cannot absorb shear stresses at rest, especially a gas or liquid, they do not require mechanically vibrating components or even completely eliminate mechanically moving components. Fluidic oscillators are therefore very robust, durable, easily scalable, and controllable.

[0011] The term "fluidic oscillator," as used herein, is intended to describe a device for generating an oscillation of a fluid, which device has a main channel for the fluid and which has no moving parts or components arranged in the main channel and / or which exert a force on the fluid that acts in a flow direction of the fluid when the fluid flows through the main channel. In particular, the term "fluidic oscillator," as used herein, is intended to encompass a device for generating a self-excited and self-sustained oscillation of a fluid, which device does not require and / or has no moving parts or components, in particular no mechanically oscillating parts or components, to maintain the oscillation of the fluid.

[0012] Fluidic oscillators can be operated via a connected pressure reservoir for the fluid. The fluid flows, driven by pressure, from the pressure reservoir into a chamber of the fluidic oscillator. In one design, the free jet of fluid formed in the chamber initially rests on one side of the chamber due to the chamber geometry. Through one or more feedback channels, the pressure signal of the free jet can be fed back to the location before entering the chamber. This deflects the jet and then rests on the other side of the chamber. This results in an oscillation that is caused by a natural fluid-mechanical instability (self-excited oscillation), but can also be influenced externally if necessary. Depending on the geometry of the chamber and / or an outlet nozzle for the free jet from the chamber, a wide variety of oscillations can be generated both spatially and temporally.In addition to the component size and geometry, the frequency of the oscillations depends on the pressure ratio between the pressure of the incoming pressure reservoir and the ambient pressure. Thus, the excitation frequency can be easily controlled in the Hz range and / or the kHz and MHz range, which are typically particularly suitable for non-destructive (non-damaging) testing of samples such as test specimens, by changing the pressure ratio.

[0013] Fluidic oscillators can also be easily scaled in terms of component size while retaining their characteristics.

[0014] Excitation of a sample with the fluidic oscillator allows for a very robust and versatile measurement setup.

[0015] Furthermore, excitation losses can be significantly reduced compared to previously used transducers, as the excitation signals are generated in the fluid and transmitted to the sample via the fluid without the need for an additional interface. This is particularly important for air-coupled (ultra)sound testing, as the excitation signal can be attenuated by 35 dB or more due to different acoustic impedances at air-solid interfaces (e.g., a piezoelectric transducer).

[0016] If a fluid, such as air or water, is used as a medium that is free of shear stress at rest, the risk of damaging sensitive sample surfaces or samples through contact is significantly reduced. This also enables the gentle examination of soft samples. Continuous, non-contact excitation of the signals can also significantly reduce the measurement duration compared to point-contact measurements. This allows the measured samples to be reused undamaged and / or repeat measurements to be performed, thereby improving the reliability of the results.

[0017] The term "sample" as used herein shall include the terms test body and test item.

[0018] The term "ultrasound", as used here, is intended to describe sound with frequencies above the human hearing frequency range, i.e. sound with frequencies above approximately 16 kHz.

[0019] Excitation of the mechanical deformation typically involves generating an excitation signal with the fluidic oscillator and interacting the excitation signal with the sample. For this purpose, an oscillating free jet (self-excited) can be generated in the fluidic oscillator and directed at the sample.

[0020] The fluid used in the fluidic oscillator, e.g., air or water, can exit the fluidic oscillator toward the sample, e.g., via the fluidic oscillator's outlet nozzle. This enables particularly efficient excitation.

[0021] Typically, the excitation signal contains several (longitudinal) pressure fluctuations, e.g. several separated pulses (pulsed excitation) or one excitation wave (continuous excitation in a time window).

[0022] In addition, it is possible to generate an excitation signal that is particularly favorable for a particular measurement for a fluid used by means of the geometry and / or extension of the fluidic oscillator used, in particular the chamber geometry, and / or the pressure conditions, e.g. a signal with pulses of a predetermined pulse shape and / or a predetermined ratio of pulse width to pulse spacing with a pulse spacing that can be easily adjusted via the pressure conditions.

[0023] For this purpose, the chamber geometry, feedback channels and their geometry and / or the outlet geometry of the fluidic oscillator can be adapted to a desired pulse shape by means of simulations before the measurement, and a correspondingly manufactured fluidic oscillator can then be selected for the measurement.

[0024] When the excitation signal hits the sample, an energetic interaction occurs. As a result, an elastic wave or a sequence of elastic waves, particularly sound waves or sound pulses, is generated within the sample. These waves pass through the sample, are possibly reflected internally, and exit again as a secondary signal.

[0025] The elastic wave or the secondary signal can be detected by one or more suitable detectors, also referred to as sensors.

[0026] The detected signal allows conclusions to be drawn about structures, processes, and / or parameters of the sample. In simple cases, such conclusions can be drawn directly from the detected signal or a characteristic of the mechanical deformation derived from it. Typically, however, one or more suitable signal processing steps are provided to calculate characteristics such as signal propagation times, signal velocities, mode conversions, signal attenuation, and / or phase shifts based on model assumptions.

[0027] It may also be useful to carry out the evaluation in the frequency domain, e.g. to determine mode conversions using an impact echo method.

[0028] Signal processing processes can be provided in particular when several detectors and / or several fluidic oscillators are used, when measurements are carried out for different positional relationships between the sample and the fluidic oscillator, e.g. the sample is scanned, when measurements are carried out with excitation signals of different (carrier) frequencies (e.g. a frequency sweep is carried out), and / or when measurements are carried out with different pulse amplitudes in the excitation signal.

[0029] It is also possible to use several fluidic oscillators to examine the sample.

[0030] From the characteristics of the mechanical deformation, a material property of the sample can be determined, a feature of the sample, a phase boundary in the sample, a material defect and / or damage to the sample can be identified or even localized.

[0031] A visual representation of the determined material property(ies) of the sample can be provided, for example a false color or grayscale representation as is often used in ultrasonic testing procedures.

[0032] According to one embodiment, a device for examining a sample comprises a fluidic oscillator for generating an excitation signal for the sample, a detector for detecting an excitation of the sample that can be generated by the excitation signal, and an evaluation unit, typically designed as a control and evaluation unit, which can be coupled to the detector and is configured to obtain data generated by the detector upon detection of the excitation, hereinafter also referred to as the measurement signal.

[0033] The device can be an ultrasonic measuring device, in particular an ultrasonic testing device for the non-destructive examination of a test specimen, e.g. a workpiece, but also an ultrasonic diagnostic device for examining a test subject as a test specimen or object of investigation.

[0034] The device may be a sound testing device, in particular an ultrasonic testing device. Accordingly, the fluidic oscillator may be part of a sound head and / or a sound probe.

[0035] According to one embodiment, a sound probe and / or a sound probe comprises a fluidic oscillator. This can be an ultrasonic probe or an ultrasonic probe.

[0036] Typically, the control and evaluation unit is configured to determine a characteristic of the excitation using the data and / or to carry out the methods described herein.

[0037] The detector can be, for example, a strain sensor, a vibration sensor, a piezoelectric, or an electrostatic detector. However, the detector can also be formed by and / or comprise a laser vibrometer.

[0038] In addition, the device may comprise several typically similar detectors and / or several fluidic oscillators.

[0039] Typically, the fluidic oscillator has a chamber with an inlet and an outlet, which can be designed as a nozzle (outlet nozzle).

[0040] In addition, the inlet is typically fluidically connected to a pressure reservoir for the fluid.

[0041] The chamber may have a main channel arranged between the inlet and the outlet and one or more feedback channels fluidically coupled to the main channel.

[0042] The pressure reservoir can also be fluidically connected to a pressure pump that is typically controlled by the control and evaluation unit.

[0043] A respective valve can be arranged between the pressure pump and the pressure reservoir and / or between the pressure reservoir and the inlet of the chamber, which valve can typically be controlled by the control and evaluation unit.

[0044] Typically, the control and evaluation unit is configured to trigger the generation of the excitation signal, e.g. via the valve and / or the pressure pump.

[0045] In addition, the fluidic oscillator may be fluidically connected to or comprise a pressure sensor for controlling the generated oscillation.

[0046] The pressure sensor is typically connected to the control and evaluation unit.

[0047] According to one embodiment, a fluidic oscillator is used during an examination of a sample to excite a mechanical deformation propagating in the sample, in particular an elastic wave and / or a sound wave.

[0048] According to another embodiment, a computer program product, in particular a computer-readable data carrier, for example a magnetically, electrically or optically readable data carrier, has program instructions that are suitable for causing a processor of a control and evaluation unit, e.g. a computer, to execute and / or control the methods described herein.

[0049] The embodiments described above can be combined with each other as desired.

[0050] Further advantageous embodiments, details, aspects and features of the present invention emerge from the subclaims, the description and the accompanying drawings. Fig. 1A a schematic representation of a device for examining a sample according to an embodiment; Fig. 1B a schematic representation of a section of the Fig. 1A illustrated device for examining a sample according to an embodiment; Fig. 2A a schematic representation of a device for examining a sample according to an embodiment; Fig. 2B a schematic representation of a device for examining a sample according to an embodiment; Fig. 2C typical signals, as they are associated with the Figuren 1A bis 2B devices shown can be generated and measured; and Fig. 2D Steps of a method for examining a sample according to an embodiment.

[0051] In the figures, like reference numerals designate similar parts.

[0052] Fig. 1A shows a schematic representation of a device 100 for examining a sample 50, for example, a solid test specimen. Since the device 100 is typically a testing device, it will also be referred to below as testing device 100. Fig. 2A shows a central section of the test device 100. The Figuren 1A und 1B show the test device 100 during the examination or testing of the sample 50.

[0053] The test device 100 has a fluidic oscillator 10 for generating an excitation signal 1 with a fluid such as air or water.

[0054] In the exemplary embodiment, the fluidic oscillator 10 is supplied with fluid from a pressure reservoir 19. As indicated by the solid arrow, the fluid flows from the pressure reservoir 19 into an inlet 12 of a chamber 11 of the fluidic oscillator 10 and forms a free jet shown as a dotted curve. No moving parts are arranged in the chamber 11 of the fluidic oscillator 10.

[0055] The free jet moves through a central main channel, which is separated from two feedback channels 15, 16 in a central chamber area by two typically mirror-symmetrically arranged partition walls 16, 17. However, the feedback channels 15, 16 are connected to the main channel upstream and downstream. The main channel opens into an outlet nozzle 13 of the fluidic oscillator 10, through which the free jet can exit the fluidic oscillator 10.

[0056] As shown by the branching of the dotted curve, the free jet oscillates self-excited in the fluidic oscillator 10. Since the outlet nozzle 13 is directed towards a surface, for example a front side of the sample 50, the sample 50 is exposed to an excitation signal 1 transported by the oscillating free jet.

[0057] In the exemplary embodiment, this leads to an excitation of the sample in the form of an elastic deformation or wave 2 of the sample 50, which can be detected with a detector 20.

[0058] The fluidic oscillator 10 is as in Figur 1A Typically shown spaced apart from the sample 50. For example, the device 100 may have respective holders (not shown) for the fluidic oscillator 10 and the sample 50. The holders may be arranged so as to be displaceable and / or orientable relative to one another.

[0059] The detector 20 can be as in Figur 1A shown as a sound or strain detector on a back or on another surface of the sample 50. A coupling agent can be arranged between the detector 20 and the surface of the sample 50.

[0060] If the detector 20 is arranged on the back, non-reflected primary excitations 2 in the sample 50 can be detected particularly well.

[0061] Depending on the sample 50, it is also possible to detect the excitation(s) 2 contactlessly, for example with a laser vibrometer, an (air-coupled) microphone or an (air-coupled) piezo detector.

[0062] Figur 1B shows in the lower part the amplitude A of a deflection or a sound pressure as a function of time t of three sound pulses of an exemplary excitation signal 1 that can be generated with the fluidic oscillator 10. The shape of the pulses but also the ratio of pulse width l to pulse interval Tare largely determined by the size and geometry of the chamber 11 and the outlet nozzle 13. The pulse spacing T and the pulse width l can be easily controlled via the pressure conditions and the component size. For a given fluid, the height of the pulses h depends on both the size and geometry of the fluidic oscillator and the pressure conditions.

[0063] Fig. 2A shows a schematic representation of a central section of a device 101 for examining a sample 50. The device 101 is similar to the one described above with reference to the Figuren 1A und 1B explained device 100.

[0064] In the Figur 2A However, in the exemplary embodiment shown, the detector 20 is arranged in front of the front side of the sample 50, which is exposed to the excitation signal 1. Accordingly, the detector 20 can sensitively detect (secondary) signals of the excitations 2', particularly those reflected in the sample 50 and emitted from the front side.

[0065] In addition, Figur 2A in the respective dashed boxes an exemplary excitation pulse of the excitation signal 1 and a corresponding, phase-shifted pulse of the measurement signal 2'.

[0066] As from Figur 2B which schematically represents a variant of the above-mentioned Figuren 1A bis 2A As can be seen from the device 102 for examining samples which is similar to the devices 100, 101 explained above, the measurement signals determined by the detector 20, hereinafter also referred to as data, are typically transmitted to an evaluation unit 30.

[0067] Typically, the evaluation unit 30 is a control and evaluation unit 30, for example a computer provided with appropriate communication interfaces and software or another electronic data processing system that can trigger the generation of the excitation signal (1), for example by switching a valve (not shown) or a pump (not shown) for supplying a pressure reservoir for the fluidic oscillator 10.

[0068] Figur 2C shows three pulses of a typical excitation signal 1 and three pulses of a typical corresponding measurement signal 2, 2', each as the amplitude A of a displacement or sound pressure dependent on time t, as measured with one of the Figuren 1A bis 2B can be generated or measured by the device 100-102 shown and which can be used to determine a characteristic of the mechanical deformation of the sample excited by the excitation signal 1.

[0069] Fig. 2D shows a block diagram of a method 500 for examining a sample. In a block 510, a propagating mechanical deformation in the sample is excited by means of a fluidic oscillator.

[0070] For this purpose, an excitation signal is typically generated using the fluidic oscillator and brought into interaction with the sample.

[0071] In a block 520, the characteristic of the mechanical deformation can then be determined.

[0072] For this purpose, a detector is typically used to detect a measurement signal correlated with the mechanical excitation of the sample.

[0073] In addition, the measurement signal is typically transmitted to an evaluation unit and / or displayed graphically.

[0074] The characteristic can be a propagation time, a propagation velocity, a mode conversion, an attenuation, a phase shift to the excitation signal or a quantity derived from one or more of these quantities.

[0075] In a block 530, the characteristic can then be used to determine a material property of the sample, e.g., a density or a modulus of elasticity.

[0076] As indicated by the dash-dot arrow in Fig. 2D Alternatively or additionally, a further measuring cycle can be initiated with blocks 510, 520, whereby in an optional block 550 one or more measuring parameters are initially changed.

[0077] The measurement parameters that come into consideration are, in particular, the positional relationship between the sample and the fluidic oscillator, the positional relationship between the sample and the detector, the frequency of the excitation signal, the pulse width and shape and the amplitude(s) of the excitation signal (e.g. the amplitude(s) of the sound pulses of the excitation signal).

[0078] Furthermore, one (or more) further measurement cycles (510, 520) with modified measurement parameter(s) can be initiated following block 530. For example, the further measurement cycle (510, 520) can be performed with a modified positional relationship between the sample and the fluidic oscillator (in particular, scanning of the sample).

[0079] Finally, it may be provided in a block 540 to detect or even localize the presence of a phase boundary and / or a defect (or several defects) in the sample, in particular a material defect or damage to the sample.

[0080] While several measuring cycles (510, 520) are typically used to locate the error, in many cases the presence of an error can be determined based on one measuring cycle (510, 520), e.g. when checking serially produced parts in quality control.

[0081] For example, the characteristic of the mechanical deformation determined in block 520 can also be a deviation of the measurement signal from an expected measurement signal (of a standard part). In block 540, the deviation can then be compared, for example, with a threshold value.

[0082] In addition, before block 510, a fluidic oscillator that appears particularly suitable for the measurement, ie a fluidic oscillator that is well adapted to a desired pulse shape of the excitation signal, can be calculated, manufactured, selected and / or incorporated into the structure or test device.

[0083] According to one embodiment, a method for examining a sample comprises generating an excitation signal with a fluidic oscillator, interacting the excitation signal with the sample to generate a mechanical excitation of the sample, in particular an elastic excitation of the sample, and detecting a measurement signal correlated with the excitation of the sample with a detector.

[0084] According to one embodiment, a testing method for the non-destructive examination of a sample, typically a test body, comprises generating an excitation signal having a frequency in the kHz range or higher (frequency range from 16 kHz) with a fluidic oscillator and interacting the excitation signal with the sample, typically with a surface of the sample, to excite a mechanical deformation propagating in the sample, and determining a characteristic of the mechanical deformation propagating in the sample.

[0085] According to one embodiment, a sound measuring device, in particular an ultrasonic measuring device, has a fluidic oscillator for generating an excitation signal for an object under examination, and a detector for detecting an excitation of the object under examination that can be generated by the excitation signal.

[0086] The sound measuring device can be an ultrasonic diagnostic device or an ultrasonic testing device.

[0087] Typically, the sound measuring device further comprises an evaluation unit which can be coupled to the detector and is configured to obtain data generated by the detector when detecting the excitation.

[0088] According to one embodiment, a fluidic oscillator is used to excite a mechanical deformation propagating in a sample, typically a test body, in the kHz range, the MHz range, or even higher (frequency range from 16 kHz), typically a sound wave in the kHz range or MHz range, more typically an ultrasonic wave, during a non-destructive examination of the sample. For this purpose, the fluidic oscillator typically generates a free jet that transports an excitation signal in the kHz range and / or MHz range and typically transmits it to the sample. The present invention has been explained using exemplary embodiments. These exemplary embodiments should in no way be understood as limiting the present invention.

Claims

1. A method (500) for examining a test specimen (50), the method comprising: - exciting a propagating mechanical deformation (2) in the test specimen (50) by means of an excitation signal (1) transported by a free jet emanating from a fluidic oscillator (10) and having a frequency of at least 16 kHz; and - determining a characteristic of the mechanical deformation (2).

2. The method according to claim 1, wherein the exciting of the mechanical deformation (2) comprises: - generating the excitation signal (1) with the fluidic oscillator (10); and - interacting of the excitation signal (1) with the test specimen (50).

3. The method according to claim 1 or 2, further comprising: - determining a material property of the test specimen (50) using the characteristic; - determining a phase boundary in the test specimen (50) using the characteristic; - determining a material defect of the test specimen (50) using the characteristic; - designing and / or selecting a fluidic oscillator (10) having a geometry and / or an extension so that the fluidic oscillator (10) can generate an excitation signal (1) with a predetermined pulse shape for a given fluid; - setting and / or varying a positional relationship between the test specimen (50) and the fluidic oscillator (10); - adjusting and / or varying a frequency of the excitation signal (1); and / or - setting and / or varying an amplitude of the excitation signal (1).

4. The method according to any one of the preceding claims, wherein determining the characteristic comprises detecting, with a detector (20), a measurement signal (2, 2') correlated with the mechanical excitation of the test specimen, measuring the mechanical deformation (2), and / or measuring a secondary signal (2') emitted by the test specimen (50) with a detector (20).

5. The method according to any one of the preceding claims, wherein the excitation signal (1) is a sound signal, wherein the excitation signal (1) comprises a plurality of pulses with a predetermined or adjustable pulse spacing (T), wherein the mechanical deformation (2) comprises a sound wave, and / or wherein the secondary signal (2') is a sound signal.

6. The method according to any of the preceding claims, wherein the characteristic is a propagation time, a propagation velocity, a mode conversion, an attenuation, a phase shift with respect to the excitation signal (1) or a quantity derived from one or more of these quantities.

7. The method according to any one of the preceding claims, wherein the method is a method for non-destructive testing of the test specimen (50), wherein the test specimen is a workpiece, wherein the method is a non-destructive testing method, wherein the method is an acoustic testing method, and / or wherein the method is a sonic testing method, in particular an ultrasonic testing method.

8. The method according to any of the preceding claims, wherein the propagating mechanical deformation (2) is an elastic wave, wherein the propagating mechanical deformation (2) is a sound wave, wherein the propagating mechanical deformation (2) has a frequency of at least 16 kHz, wherein the propagating mechanical deformation (2) has a frequency in the kHz range, and / or wherein the propagating mechanical deformation (2) has a frequency in the MHz range.

9. The method according to any one of claims 2 to 8, wherein the excitation signal (1) interacts with a surface of the test specimen (50), wherein the excitation signal (1) has a frequency in the kHz range, and / or wherein the excitation signal (1) has a frequency in the MHz range.

10. A device (100-102) for examining a test specimen (50), comprising: - a fluidic oscillator (10) for generating an excitation signal (1) for the test specimen (50), wherein the fluidic oscillator (10) is configured to generate the excitation signal (1) such that the excitation signal (1) is transported by a free jet emanating from the fluidic oscillator (10) and has a frequency of at least 16 kHz; - a detector (20) for detecting an excitation (2) of the test specimen (50) which can be generated by the excitation signal (1); and - an evaluation unit (30) which can be coupled to the detector (20) and is configured to obtain data generated by the detector when detecting the excitation (2).

11. The device according to claim 10, wherein the device is a sound testing device and / or an ultrasonic testing device, wherein the evaluation unit (30) is a control and evaluation unit (30) which is configured to trigger the generating of the excitation signal (1), and / or wherein the control and evaluation unit (30) is configured to determine a characteristic of the excitation (2) using the data and / or to carry out the method according to any of the claims 1 to 7.

12. The device according to claim 10 or 11, wherein the fluidic oscillator (10) is configured to generate the excitation signal (1) in such a way that the excitation signal (1) has a frequency in the kHz range, that the excitation signal (1) has a frequency in the MHz range, that the excitation signal (1) has a plurality of pulses with a predeterminable and / or adjustable pulse spacing (T), and / or that the excitation signal (1) is a sound signal.

13. The device according to any one of claims 10 to 12, wherein the device (100-102) is a testing device for non-destructive testing of the test specimen (50), and / or wherein the test specimen is a workpiece.

14. Use of a fluidic oscillator (10) for exciting a mechanical deformation (2) propagating in a test specimen (50), in particular a sound wave, by means of an oscillating free jet generated in the fluidic oscillator (10) and having a frequency of at least 16 kHz during an examination of the test specimen (50).