TEMPERATURE ROLLER, TRANSPORT ARRANGEMENT AND VACUUM ARRANGEMENT

Description

[0001] The invention relates to a temperature control roller, a transport arrangement and a vacuum arrangement.

[0002] In general, a substrate can be treated (processed), for example by coating, in such a way that its chemical and / or physical properties can be altered. Various coating processes can be used to coat a substrate, such as vapor deposition, e.g., chemical vapor deposition (CVD) or physical vapor deposition (PVD).

[0003] In general, flexible substrates in the form of a strip (e.g., metal strip, foil strip, or glass strip) can be processed in a continuous flow system, for example, coated (and / or otherwise treated) in a foil coating system. A strip substrate can be transported through a processing area by means of a transport system. The transport system can be configured, for example, to process the strip substrate from roll to roll (also known as R2R), whereby the strip substrate is unwound from a first substrate reel, transported through the coating area, and, after coating, rewound onto a second substrate reel (also known as rewinding). The coating system can include a vacuum chamber so that the strip substrate can be processed under vacuum.The substrate winding can, for example, be fed into or out of the vacuum chamber, so that the vacuum chamber must be cyclically ventilated to exchange the tape substrate.

[0004] For some transport devices, it may be necessary for the transport roller to provide particularly high thermal contact with the substrate in order to heat and / or cool it (more generally referred to as tempering). This thermal contact can be improved, for example, by introducing a gas between the substrate and the transport roller, which compensates for the lack of thermal conductivity in a vacuum. In essence, the gas fills any remaining gaps between the substrate and the transport roller, and the multiple interactions between the gas particles (e.g., gas molecules) improve heat transfer between them.

[0005] GB 2 326 647 A describes how a substrate can be stored without contact by blowing a gas cushion between a drum and the substrate using a separate injection nozzle. US 2014 / 057448 A1 describes a blow roller in which the gas exits from the blow roller itself. EP0 311 302A1 also describes an injection nozzle for introducing gas between a film and a cooling drum. JP2016088663A describes a drum with several external porous layers. The invention is defined by the suspended claims.

[0006] According to various embodiments, it has been clearly demonstrated that heat transfer requires a delicate balance. On the one hand, the gas should flow evenly from the transport roller (e.g., roller surface) in a quantity that also fills the cavities. On the other hand, the quantity of gas should be such that it does not cause the substrate to lift off the transport roller (e.g., roller surface).

[0007] According to various embodiments, a temperature-controlled transport roller (also called a temperature control roller) and a vacuum arrangement are provided, which make it possible to effectively temperature control a substrate during the coating process.

[0008] The temperature control roller can be visualized as having a gas distribution structure that distributes the gas more effectively across the surface of the transport roller.

[0009] According to various embodiments, a temperature control roller can comprise: a cylindrical roller shell having a plurality of gas outlet openings; a temperature control device (e.g., a cooling device) configured to supply and / or remove thermal energy from the cylindrical roller shell; several gas lines extending along the axis of rotation; a gas distribution structure that gas-conductively couples the multiple gas lines and the plurality of gas outlet openings, wherein the gas distribution structure has a lower structural density than the plurality of gas outlet openings.

[0010] It shows Figuren 1 , 2 , 3 , 10 , 11 , 12 Each transport arrangement according to different embodiments in different views; Figuren 4 , 6 , 7 , 8 , 9 , 13A, 13B, 13C , 14 and 15Each a temperature control roller according to different embodiments in different views; Figuren 16A, 16B, 16C and 17 Each a temperature control roller according to different embodiments in different views; Figur 5A, 5B und 5C each a porous solid body 113 according to different embodiments in a schematic cross-sectional view; and Figur 18 a vacuum arrangement according to various embodiments in a schematic side view or cross-sectional view.

[0011] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims.

[0012] Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), direct or indirect connections, and direct or indirect couplings. In the figures, identical or similar elements are designated with identical reference numerals where appropriate.

[0013] Depending on the specific embodiment, the term "coupled" or "coupling" can be understood as a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), whether direct or indirect. Several elements can be coupled along an interaction chain, along which the interaction (e.g., a signal) can be transmitted. For example, two coupled elements can exchange an interaction, such as a mechanical, hydrostatic, thermal, and / or electrical interaction. Depending on the specific embodiment, "coupled" can also be understood as a mechanical (e.g., physical) coupling, for example, by means of direct physical contact. A coupling can be configured to transmit a mechanical interaction (e.g., force, torque, etc.).

[0014] Control can be understood as the intentional influencing of a system. The system's state can be changed according to a predefined setting. Regulation can be understood as control, but with the additional benefit of counteracting changes in the system's state caused by disturbances. A control device can intuitively have a forward-directed control path, thus implementing a sequential control that converts an input variable into an output variable. However, the control path can also be part of a control loop, thus implementing regulation. In contrast to pure forward control, regulation involves a continuous influence of the output variable on the input variable, which is effected by the control loop (feedback). In other words, regulation can be used as an alternative or additional to a control device, or alternatively or additionally to control.In a control system, an actual value of the controlled variable (e.g., determined based on a measured value) is compared with a reference value (a setpoint or a target value) and accordingly the controlled variable can be influenced by means of a manipulated variable (using an actuator) in such a way that the deviation of the respective actual value of the controlled variable from the reference value is as small as possible.

[0015] A porous body or area can be understood as having a heterogeneous mixture of a solid material and a fluid (e.g., gaseous and / or liquid) material.

[0016] According to various embodiments, the term porous or porosity, when applied to a material, can be understood as meaning that the material forms a solid matrix (i.e., a solid body) in which a multitude of cavities are arranged. In other words, the material can be understood as the proportion of a porous body or porous region that exists in a solid state. According to various embodiments, the porosity of the body or region can be understood as a dimensionless quantity that denotes the ratio of cavity volume (volume of the cavities or the fluid material therein) to the total volume (cavity volume plus the volume of the solid material) that spans the solid matrix.

[0017] According to various interpretations, the term porous or porosity can be understood in relation to a region or body (e.g., the gas distribution structure or the roller casing) as meaning that the region or body contains both the solid matrix and the voids or fluid material within it. In other words, porosity can be understood as a dimensionless quantity that denotes the ratio of the volume of fluid material in the body or region to the total volume of the region or body. The mass density of the region or body can decrease with increasing porosity, as is intuitively understood since the voids are taken into account.

[0018] The porosity can then be defined as 1 minus the quotient of bulk density (of the body) and net density. Net density indicates the density of the solid material or solid matrix (i.e., excluding the voids), while bulk density refers to the volume of the body including the voids or the fluid material within it.

[0019] The pore density indicates the ratio of the number of pores to their area (also known as pore area density) or the ratio of the number of pores to their length (also known as pore length density or linear pore density). The physical quantity generalized for openings (e.g., channels, passages, pores, or other cavities) is the structure density, e.g., the structure area density or structure linear density. The linear structure density can, for example, indicate the number of boundaries between cavities along a section, analogous to the line section method. The physical quantity that refers to those openings that also penetrate the solid (e.g., a layer), i.e., those that contribute to gas conductivity (also known as permeability), can be called gas conductivity.

[0020] If the solid is open-pored, for example, its pore density can be equal to the gas pipe structural density. If the solid is perforated or penetrated by gas channels, the density of the perforations or gas channels can be equal to the gas pipe structural density.

[0021] Depending on their size, the openings in the solid can be described as pores, gas channels, perforations, or gas conduits. A perforation can be understood as a technically created and / or regularly arranged hole. The dimensions of the perforation(s) can be larger (e.g., along the axis of rotation) than approximately 1 mm, e.g., approximately 2 mm, e.g., approximately 5 mm, e.g., approximately 10 mm.

[0022] Permeability is a measure used to quantify the permeability of a solid to fluids (such as liquids or gases). Permeability can be defined, for example, according to Darcy's law. One physical unit for the gas permeability of a solid is the perimeter (in square meters). If there is no permeability, it is called impermeability.

[0023] A flexible substrate can be temperature-controlled during a coating process. This can be achieved using a liquid-cooled roller (also known as a transport roller) over which the substrate is guided. However, due to the inherently poor heat transfer between the substrate and the roller surface, temperature control is not always sufficient. Introducing a gas between the substrate and the roller surface can improve heat transfer.

[0024] In other words, the substrate can be in contact with the roller surface. Microscopically, the roller shell (also called the roller casing or outer shell) has a certain roughness on the substrate surface that contacts it, and this roughness is reflected at specific points on the roller surface. The spaces between these two surface roughnesses are filled with gas particles. These gas particles contribute to the heat transfer between the roller and the substrate. The number of gas particles is determined by the gas pressure.

[0025] The roller surface (also called the cooling surface) of the cooling roller can be made of an electrically non-conductive material (e.g., ceramic). To increase the contact pressure of the substrate against the cooling roller beyond that resulting from the belt tension, the cooling roller can be subjected to an electrical voltage. Due to the electrically insulating roller surface, a potential difference can be created between the cooling roller and the substrate, which, due to the resulting electrostatic attraction, can increase the contact pressure. The gas pressure can thus be increased without the substrate lifting off, thereby improving heat transfer.

[0026] The temperature control roller can have a double-walled body (also called a roller housing or simply a housing), for example, a cooling roller body. An additional thin outer layer made of micro-perforated sheet metal (e.g., stainless steel) can be shrunk onto the outer shell of the appropriately machined housing. A layered system of materials with varying porosities can be arranged on this sheet metal. The exposed end of the temperature control roller can be formed by a very fine-pored, electrically non-conductive top layer.

[0027] When gas is introduced between the roller housing and the perforated sheet metal, the special mechanical processing of the roller housing allows it to spread beneath the sheet metal and flow through the perforation slots (also called slots) into the porous layer system. This porous layer system distributes the gas very homogeneously across the entire temperature control surface, and it then flows out of the surface almost completely.

[0028] The outer shell of the (e.g., double-walled) housing can be provided with a thread-like groove structure, which is interrupted by grooves running lengthwise to the roller axis. The number and depth of the grooves and slots can be dimensioned to accommodate a certain volume of gas. The grooves can be connected to a gas supply via corresponding bores from the end face of the outer shell. The shrunk-on sheet metal (e.g., stainless steel sheet) can be provided with slots (e.g., 0.3 mm wide and 7 mm long) in the area from which gas is intended to flow.

[0029] Since the sheet metal covers the grooves and slots of the housing, the gas can only flow through the correspondingly overlapping slots. The sheet metal can be coated with a layered system of differently porous layers. The lower, open-porous layer ensures good lateral distribution of the gas within this layer. The overlying, very low-porosity (also referred to as fine-porous) layer of non-conductive material provides a pressure drop and / or ensures that the gas, in very small quantities, escapes very evenly and across the entire surface of the temperature control area from the numerous small pores.

[0030] Optionally, this outermost and exposed layer (also called the finishing layer) of the temperature control roller can be made of an electrically non-conductive material. By applying an electrical voltage to the electrically conductive layer beneath this finishing layer, a potential difference to the substrate can be created as needed, thereby inducing electrostatic attraction between the temperature control roller and the substrate.

[0031] According to various embodiments, the provided temperature control roller can improve heat transfer between the roller and the substrate. This allows for significantly more favorable process conditions.

[0032] According to various embodiments, the substrate (e.g., the ribbon substrate) can comprise or be formed from at least one of the following: a ceramic, a glass, a semiconductor (e.g., an amorphous, polycrystalline, or monocrystalline semiconductor, e.g., silicon), a metal (e.g., aluminum, copper, iron, steel, platinum, gold, etc.), a polymer (e.g., plastic), and / or a mixture of different materials, such as a composite material (e.g., carbon fiber-reinforced carbon or carbon fiber-reinforced plastic). For example, the substrate (e.g., the ribbon substrate) can comprise or be formed from a plastic film, a semiconductor film, a metal film, and / or a glass film, and may optionally be coated. Alternatively or additionally, the substrate can, for example, comprise fibers, e.g., glass fibers, carbon fibers, metal fibers, and / or plastic fibers.in the form of a woven fabric, a net, a knitted fabric, a knitted fabric or as felt or fleece.

[0033] According to various embodiments, a substrate can be transported as a strip (also called a strip substrate) from roll to roll (i.e., wound between the winding rollers). The strip substrate can, for example, have a width (extent perpendicular to the transport direction) ranging from approximately 1 cm (e.g., 30 cm) to approximately 500 cm, or a width (also called substrate width) greater than approximately 500 cm. Furthermore, the strip substrate can be flexible. In essence, a strip substrate can be any substrate that can be wound onto a roll and / or processed, for example, from roll to roll. Depending on the elasticity of the material used, the strip substrate can have a thickness (also called substrate thickness) ranging from approximately a few micrometers (e.g., approximately 1 µm) to approximately a few millimeters (e.g., up to approximately 10 mm), for example, from approximately 0.01 mm to approximately 3 mm.The transport rollers of the transport arrangement can be axially longer than the width of the belt substrate.

[0034] Within the context of this description, the term "metallic" can be understood as containing or being formed from a metal. Within this context, a metal (also referred to as a metallic material) can contain (or be formed from) at least one metallic element (i.e., one or more metallic elements), for example, at least one element from the following group of elements: copper (Cu), iron (Fe), titanium (Ti), nickel (Ni), silver (Ag), chromium (Cr), platinum (Pt), gold (Au), magnesium (Mg), aluminum (Al), zirconium (Zr), tantalum (Ta), molybdenum (Mo), tungsten (W), vanadium (V), barium (Ba), indium (In), calcium (Ca), hafnium (Hf), samarium (Sm), silver (Ag), and / or lithium (Li). Furthermore, a metal can contain or be formed from a metallic compound (e.g., an intermetallic compound or an alloy), for example, a compound of at least two metallic elements (e.g., from the group of elements), such as bronze or brass, or, for example,a compound consisting of at least one metallic element (e.g. from the group of elements) and at least one non-metallic element (e.g. carbon), such as steel.

[0035] Depending on its application and configuration, a transport roller can be designed in various ways. For example, a transport roller can serve as a guide and / or deflector (e.g., active or passive) for the transport path, for temperature control (e.g., cooling), or for driving the substrate transport. Such a temperature control roller (also called a cooling roller), for example, a cooling roller, can be driven, and its rotation can drive the substrate transport. The temperature control roller can, for example, have a ceramic surface (e.g., a steel roller), which may be sprayed on.

[0036] According to various embodiments, a controlled gas supply to a temperature control roller (in which case also referred to as a gas temperature control roller or gas temperature control roller), e.g., a cooling roller (in which case also referred to as a gas cooling roller or gas cooling roller), is provided by means of gas exchange openings in the temperature control roller. Such a temperature control roller can be used, for example, in a vacuum system for coating metal strips and / or film strips. The (e.g., controlled) gas supply to a temperature control roller prevents the substrate from lifting off the roller and ensures that sufficient gas is supplied to maintain the substrate's temperature.

[0037] According to various embodiments, a temperature control roller (e.g., as a process roller for film coating systems) is provided, by means of which a gas (e.g., argon, nitrogen, or another inert gas) can be introduced between the temperature control surface (also referred to as the outer surface, outer surface, or circumferential surface of the temperature control roller 112) of the temperature control roller (e.g., process roller) and the substrate. For this purpose, the temperature control surface of the temperature control roller has radial gas exchange openings. The gas exchange openings can be interconnected by means of a network of interconnected pores and / or supplied with gas, e.g., by means of several gas lines. Optionally, a connection piece for each gas line can be arranged on the end face of the process roller and screwed into the housing of the temperature control roller. Each connection piece can, for example, be connected by means of a pipe structure.

[0038] The lateral surface (also called the outer surface) of a body can be understood as the (e.g., circumferential) surface that is created by rotating a line around an axis of rotation. The outermost lateral surface of the temperature control roller, which is exposed and on which the substrate is intended to rest, can also be referred to as the temperature control surface. Thermal energy can be supplied to and / or removed from the substrate via the temperature control surface.

[0039] For the sake of clarity, the following description refers to the cooling process, i.e., the removal of thermal energy. However, the same principles apply analogously to the heating process, i.e., the addition of thermal energy. Cooling and / or heating can also be more generally referred to as tempering.

[0040] Fig.1 Illustrates a transport arrangement 100 according to various embodiments in a schematic perspective view.

[0041] The transport arrangement 100 can include: a temperature control roller 112 (e.g., a gas cooling roller 112), which has a (e.g., cylindrical) roller casing 112m and a supply device 114. The supply device 114 and the temperature control roller 112 can be provided together, e.g., mounted on top of each other, or separately, e.g., independently of each other.

[0042] The roller casing 112m can provide the substrate support surface 1604o (also referred to as the tempering surface 1604o of the tempering roller 112), on which the substrate is to rest.

[0043] The roll casing 112m (also referred to as roll shell or outer shell) can have a multitude of gas outlet openings 112o (also referred to as openings 112o). The gas outlet openings 112o can, for example, be arranged statistically and / or irregularly on the outer, exposed substrate contact surface 1604o of the roll casing 112m and / or be spatially distributed. The gas outlet openings 112o can be formed or created in the substrate contact surface and / or extend into the roll casing 112m.

[0044] The 112m roller shell can, for example, contain or be composed of a dielectric (e.g., an oxide). Alternatively or additionally, the 112m roller shell can contain or be composed of aluminum and / or zirconium (Zr), e.g., an oxide thereof. The oxide of the 112m roller shell can also be an oxide of another metal, e.g., chromium (chromium oxide), titanium (titanium oxide), and / or yttrium (yttrium oxide). For example, the 112m roller shell can contain or be composed of approximately 15% (or less) zirconium oxide (ZrO₂) by mass, with the remainder being, for example, aluminum oxide (Al₂O₃).

[0045] The supply device 114 can have one connection 114e (e.g. a temperature control fluid connection, e.g. coolant connection) and a second connection 124b (e.g. a temperature control gas connection, e.g. coolant gas connection).

[0046] In an assembled state and / or during operation, the first connection 114e can be fluidly connected (e.g., liquid-conducting) to a coolant supply 116. The coolant supply 116 can, for example, include a pump and / or a heat exchanger. Alternatively or additionally, the coolant supply 116 can include a pipe 116r, which, for example, fluidly connects the pump to the first connection 114e.

[0047] In an assembled state and / or during operation, the second port 124b can be fluidly (e.g., gas-conducting) connected to a cooling gas supply. The cooling gas supply can, for example, include a gas source such as a gas tank, a gas cylinder, or similar. Optionally, the cooling gas supply can include a pipe 126 that fluidly connects the gas source to the second port 124b and / or is equipped to control (and / or regulate) a gas flow within it (e.g., by means of a valve), for example, based on a gas pressure in the vacuum chamber and / or a substrate temperature.

[0048] The transport arrangement 100 can further comprise a shaft 118 by means of which the temperature control roller 112 is mounted (e.g. rotatably). The shaft 118 can extend into the supply device 114 and / or be rotatably supported in it.

[0049] In an assembled state and / or in operation, the transport arrangement 100 may optionally have a drive (not shown) which is coupled to the shaft 118, for example on the side of the shaft 118 opposite the supply device 114.

[0050] The transport arrangement 100 can further include a conduit structure 120 which fluidly connects the first connection 114e to a cooling device (not shown) and / or the second connection 124b to the gas outlet openings 112o.

[0051] Optionally, the temperature control surface of the roller casing 112m can be electrically insulating (e.g., dielectric) or at least comprise or be formed from an electrically insulating material (e.g., a dielectric). For example, the roller casing 112m can comprise or be formed from a ceramic, such as an oxide ceramic or a carbide ceramic. This prevents an electrical voltage applied to the gas distribution structure 402 from short-circuiting with the substrate. For example, the breakdown voltage of the roller casing 112m can be more than 1000 volts (V), e.g., more than approximately 2000 volts (V), or more than 3000 volts (V).

[0052] Fig.2 illustrates a transport arrangement 200, e.g. transport arrangement 100, according to various embodiments in a schematic perspective cross-sectional view and Fig.3 these in a schematic lateral cross-sectional view 300 (both cut along the axis of rotation 111d of the transport arrangement 200).

[0053] The transport arrangement 200 can include at least one cooling device 1124, which can, for example, provide a heat sink (e.g., electrical), e.g., by means of a heat exchanger. The cooling device 1124 and / or at least one of its components can, for example, be arranged inside the temperature control roller 112. Alternatively or additionally, the cooling device 1124 (and / or another of its components) can be arranged outside the temperature control roller 112.

[0054] The (e.g. rotationally symmetrical) roller shell 112m or its tempering surface 1604o can vividly provide the outer, exposed surface of the tempering roller 112.

[0055] The roller housing 112h (e.g. provided in the form of a hollow cylinder) can have a chamber (e.g. cylindrical shell-shaped), e.g. a double hollow cylinder, which is closed off and / or sealed by means of end walls 112s (frontally and / or vacuum-tight).

[0056] The cooling device 1124 can have one or more cavities 112v (also referred to as cooling lines 112v) in the roller housing 112h (also referred to as roller body 112h or roller outer tube 112h).

[0057] The temperature control roller 112 can have one or more additional axially extending cavities 112g (also referred to as gas lines 112g), each of which is fluidly (gas-conducting) connected to the plurality of gas outlet openings 112o, e.g. by means of the gas distribution structure as will be described in more detail later. The multiple gas lines 112g can, for example, be extended parallel to each other and / or arranged side by side, e.g. surrounding the axis of rotation 111d.

[0058] The pipe structure 120 can be fluid-conducting (gas-conducting) connected to one or more gas lines 112g, e.g., at the end face of the temperature control roller 112. Optionally, the pipe structure 120 can have several pipes 120r (e.g., hoses) extending away from the axis of rotation 111d and / or radially, which run at least partially outside the temperature control roller 112.

[0059] Fig.4 Figure 1 illustrates the temperature control roller 112 according to various embodiments in a schematic cross-sectional view 400 (e.g. with a view along the axis of rotation 111d).

[0060] The temperature control roller 112 can have a cylindrical (e.g., hollow cylindrical) roller shell 112m, which has a plurality of gas outlet openings 112o. The cooling device 1124 can be configured to supply and / or remove thermal energy (also referred to as heat) from the roller shell 112m. For example, the cooling device 1124 can be configured to transport heat away from the roller shell 112m to the outside of the temperature control roller 112, or vice versa.

[0061] The temperature control roller 112 can also have several gas lines 112g extending along the axis of rotation 111d, which are formed, for example, in the roller housing 112h and / or extend into it.

[0062] The temperature control roller 112 can further have a gas distribution structure 402 which gas-conductingly couples the several gas lines 112g and the plurality of gas outlet openings 112o together, so that gas 412 can flow from the gas lines 112g through the gas distribution structure 402 to the plurality of gas outlet openings 112o, at which it can exit the temperature control roller 112.

[0063] In general, the gas distribution structure 402 can have a lower structural density (e.g., structural area density) than the multitude of gas outlet openings 112o. In other words, the gas channels of the temperature control roller 112 can branch out increasingly in a radial direction 111r.

[0064] The structural density can refer to gas-conducting cavities. For example, the gas distribution structure 402 may have a lower cavity area density than the roller casing 112m. Similarly, the area density of the gas outlet openings 112o may be greater than the area density of cavities in the gas distribution structure 402. Alternatively or additionally to the structural area density, e.g., the cavity area density, the same relationship can also apply to a linear structural density.

[0065] An area density, e.g., the structural area density (e.g., cavity area density), can be related to a cylindrical surface along the axis of rotation 111d. The linear density, e.g., linear structure density, can be related to a circumferential (closed) path perpendicular to the axis of rotation 111d or a path parallel to the axis of rotation 111d.

[0066] For example, the gas distribution structure 402 can be penetrated by a multitude of gas channels (e.g., openings or pores) extending (e.g., away from the axis of rotation 111d), to which the structural area density is related.

[0067] According to various embodiments, the gas distribution structure 402 can have one or more than one gas distribution layer, as described in more detail below, e.g. one or more than one of the following gas distribution layers: a first gas distribution layer 602, a second gas distribution layer 702 and / or a third gas distribution layer 802.

[0068] Optionally, the roll casing can be 112m porous, as described in more detail below.

[0069] Optionally, a heat distribution layer 451 can be arranged between the gas distribution structure 402 and the roller housing 112h. The heat distribution layer 451 can, for example, be made of or consist of copper. More generally, the heat distribution layer 451 can have a higher thermal conductivity than the gas distribution structure 402 and / or the roller housing 112h. For example, the roller housing 112h can be made of or consist of steel.

[0070] Optionally, the heat distribution layer 451 can be electroplated onto the roller housing 112h.

[0071] Using the heat distribution layer 451 (e.g., made of copper) can improve the dissipation of process heat. For example, with a power density of approximately 70 kW / m² applied to the temperature control roller 112 and / or the substrate transported over it, an excessively low thermal conductivity of the roller housing 112h (e.g., a stainless steel jacket) can lead to a temperature gradient of approximately 50 K. Using the heat distribution layer 451 (e.g., made of highly thermally conductive copper) results in a gradient of only a few Kelvin (K) at the same power density.

[0072] According to various embodiments, a roller body 112h made of stainless steel or structural steel can be provided with a copper sheath 451. The copper sheath 451 can, for example, be electroplated.

[0073] Fig.5A bis 5C Figure 1 illustrates a porous body 113 according to various embodiments in a schematic cross-sectional view (e.g. with a view along the axis of rotation 111d), e.g. the roller casing 112m and / or the first gas distribution layer 602.

[0074] Fig.5A Figure 1 shows a network of interconnected pores 704 (also referred to as a pore network), wherein the pore network is formed in a composite (also referred to as a structure or aggregate) of solid particles 502 (for example, a bed and / or sintering of solid particles). The pores 704 of the pore network may be formed by the spaces between the particles 502. The solid particles 502 of the composite may be in physical contact with one another, e.g., at least in pairs. The solid particles 502 may be connected to one another, e.g., sintered together, bonded, and / or fused. The pores 704 of the pore network may be interconnected and thus form a plurality of gas-conducting paths 502p (also referred to as gas channels) extending through the body 113. In other words, the pores 704 of the pore network may be interconnected along each path of the plurality of paths 502p (i.e.,(to vividly form a pore network).

[0075] The pore network can thus provide a large number of gas channels, which form openings on the surface of the body 113 (e.g. the gas outlet openings 112o) and / or extend through the body 113.

[0076] Fig.5B Figure 1 shows a pore network that may be formed in a partially eroded material 706 of body 113. The partially eroded material 706 may have a plurality of pores 704, e.g., partially elongated pores, which may be interconnected.

[0077] Fig.5C shows a pore network that can be formed in a solid foam 708 of the body 113. The solid foam 708 can enclose a multitude of pores 704.

[0078] According to various embodiments, the pore network can have at least one of the following pore types: micropores, i.e., pores 704 with an extent 704e (e.g., pore diameter) of less than about 2 nm; mesopores, i.e., pores 704 with an extent 704e in the range of about 2 nm to about 50 nm; and / or macropores, i.e., pores 704 with an extent 704e greater than about 50 nm. The extent of a pore can be understood as the diameter of a sphere that has the same volume as the pore.

[0079] Fig.6 The temperature control roller 112 is illustrated according to various embodiments in a schematic perspective cross-sectional view 600 (e.g. with a view along the axis of rotation 111d).

[0080] The gas distribution structure can have a first gas distribution layer 602, which is a porous layer. In other words, the gas distribution layer 602 can have a multitude of gas channels 602g or pores 602g connected to gas channels, to which the structural density is related.

[0081] The first gas distribution layer 602 can have a lower spatial pore density or pore area density than the roll casing 112m. Optionally, the first gas distribution layer 602 can have a larger spatial pore size than the roll casing 112m. Optionally, the first gas distribution layer 602 can have a higher porosity than the roll casing 112m.

[0082] Optionally, the first gas distribution layer 602 can be electrically conductive or at least comprise or be formed from an electrically conductive material. Electrically conductive in this context can be understood as having an electrical conductivity of more than approximately 1 Siemens per meter (S / m), e.g., more than approximately 10³ S / m or approximately 10⁵ S / m. Alternatively or additionally, the first gas distribution layer 602 can comprise or be formed from a metal, e.g., aluminum.

[0083] Alternatively or additionally, the first gas distribution layer 602 can have an electrical conductivity more than several times (e.g. more than 10 times, 100 times or 1000 times) than the roller casing 112m.

[0084] Optionally, the roll casing 112m can have a gradient in pore density, as will be described in more detail later. In that case, the first gas distribution layer 602 can optionally be omitted.

[0085] Fig.7 The temperature control roller 112 is illustrated according to various embodiments in a schematic perspective cross-sectional view 700 (e.g. cut along the cylindrical cross-sectional surface 101, 103).

[0086] The cylindrical cross-sectional area 101, 103 can surround the axis of rotation 111d and be perpendicular to the radial direction 111r, which is transverse to the axis of rotation 111d.

[0087] The gas distribution structure can have a second gas distribution layer 702 as an alternative or in addition to the first gas distribution layer 602.

[0088] For example, the second gas distribution layer 702 can be arranged between the first gas distribution layer 602 and the gas lines 112g.

[0089] Optionally, the second gas distribution layer 702 can have a lower structural area density than the first gas distribution layer 602 and / or than the roll sheath 112m. Alternatively or additionally, the second gas distribution layer 702 can have a higher structural area density than the multitude of gas lines 112g.

[0090] The second gas distribution layer 702 can have one or more gas channels (also referred to as circumferential channels 702g), which, for example, extend transversely to the multiple gas lines 112g. Alternatively or additionally, each circumferential channel 702g can connect several or all of the gas lines 112g to each other in a gas-conducting manner.

[0091] The circumferential channel 702g can, for example, be formed in the roller housing and / or extend into it.

[0092] Optionally, each circumferential channel 702g can extend longitudinally around the axis of rotation, e.g., along a helix (more generally helical) or along a circular arc. Optionally, each helical circumferential channel 702g can extend longitudinally multiple times around the axis of rotation. Alternatively, each circular arc-shaped circumferential channel 702g can span approximately 360°, e.g., along a closed path.

[0093] Optionally, two immediately adjacent circumferential channels 702g can be connected to each other, e.g. to form a common helix.

[0094] The second gas distribution layer 702 or its circumferential channels 702g can generally also be omitted in various embodiments.

[0095] Fig.8 The temperature control roller 112 is illustrated according to various embodiments in a schematic perspective cross-sectional view 800 (e.g. cut along the cylindrical cross-sectional surface 101, 103).

[0096] The gas distribution structure can have a third gas distribution layer 802 as an alternative or in addition to the first gas distribution layer 602 or the second gas distribution layer 702.

[0097] For example, the third gas distribution layer 802 can be arranged between the coil sheath 112m (e.g., of the first gas distribution layer 602) and the gas lines 112g. For example, the third gas distribution layer 802 can be arranged between the coil sheath 112m (e.g., of the first gas distribution layer 602) and the second gas distribution layer 702.

[0098] Optionally, the third gas distribution layer 802 can have a lower structural area density than the first gas distribution layer 702 and / or the roll casing 112m. Alternatively or additionally, the third gas distribution layer 802 can have a higher structural area density than the multitude of gas lines 112g or the second gas distribution layer 702.

[0099] The third gas distribution layer 802 can have one or more perforations 802g (e.g., punched holes), which, for example, extend longitudinally along the axis of rotation 111d. For example, the third gas distribution layer 802 can have several groups of perforations 802g, all of which are adjacent to the same circumferential channel 702g.

[0100] Each perforation 802g can extend along a linear path through the third gas distribution layer 802.

[0101] For example, each perforation 802g can have an extent along the axis of rotation 111d (longitudinal extent) that is greater than a parallel extent of each circumferential channel 702g. Alternatively or additionally, the distance between immediately adjacent perforations 802g along the axis of rotation 111d can be smaller than the parallel distance between immediately adjacent circumferential channels 702g.

[0102] For example, the distance between immediately adjacent perforations 802g transverse to the axis of rotation 111d can be smaller than the parallel extension of the gas lines 112g.

[0103] For example, each perforation 802g can be designed as an elongated hole.

[0104] The third gas distribution layer 802 can generally also be omitted in various embodiments.

[0105] If the third gas distribution layer 802 is present, it may, for example, be or be shrunk on. In this case, the underlying second gas distribution layer 702 or the underlying bottom layer 1402 may be or be machined smooth and / or polished, e.g., finely finished.

[0106] If the third gas distribution layer 802 is omitted, a porous (e.g., thermally sprayed) adhesion promoter layer 802 can be used as an alternative or in addition to it. The adhesion promoter layer 802 can, for example, contain nickel (Ni), molybdenum (Mo), chromium (Cr), yttrium (Y), and / or aluminum (Al), e.g., an alloy thereof, such as a NiAl layer, a NiCr layer, a NiCrAlY layer, and / or a Mo layer. The adhesion promoter layer can also adhere well to the smooth substrate.

[0107] Fig.9 The temperature control roller 112 is illustrated according to various embodiments in a schematic perspective cross-sectional view 900 (e.g. with a view along the axis of rotation 111d).

[0108] According to various embodiments, the structural density of the gas distribution structure 402 can increase in a direction 111r away from the axis of rotation 111d (e.g. in radial direction 111r).

[0109] For example, the multiple gas distribution layers 602, 702, 802 of the gas distribution structure 402 can differ from one another in their structural density (for example, in pairs). Alternatively or additionally, the gas distribution layer that is at a greater distance from the axis of rotation 111d than another gas distribution layer can have a higher structural density than the other gas distribution layer.

[0110] Alternatively or additionally, the roller shell 112m can have a gradient (e.g., along a direction away from the axis of rotation) in its structural density, for example, a gradient in pore density. The gradient can, for instance, have a direction parallel to the radial direction 111r. For example, the pores on the temperature control surface 1604o of the roller shell 112m, which provide the numerous gas outlet openings, can have the highest pore area density of the temperature control roller 112. Alternatively or additionally, the pore area density of the roller shell 112m can decrease in the direction towards the axis of rotation 111d.

[0111] The gradient of a parameter can be understood here as the parameter exhibiting a slope (or increase). For example, the parameter can change continuously and / or steadily along a path, such as by taking on each value between the values ​​at the ends of the path exactly once. This differs from the case where the parameter takes on a multitude of discrete values. The direction of the gradient refers to the direction of the steepest slope.

[0112] Fig.10 illustrates a transport arrangement 1000 according to various embodiments in a schematic perspective view, e.g. the transport arrangement 100 or 200, and Fig.11 these in a cropped perspective view 1100.

[0113] According to various embodiments, the temperature control roller 112 can have several gas connections 1002, each of which is gas-conductingly coupled to exactly one gas line 112g of the several gas lines 112g. The several gas connections 1002 can, for example, be or be gas-conductingly coupled to the pipes 120r.

[0114] Fig.12 Illustrates a transport arrangement 1200, e.g. the transport arrangement 100, 200 or 1000, according to different embodiments in a schematic perspective view.

[0115] The perforations 802g can be provided as described above, e.g., by openings in a plate, e.g., in a sheet. The third gas distribution layer 802 has a plurality of filaments between which the perforations 802g are formed. The plurality of filaments form, for example, meshes, each surrounding a perforation 802g. The filaments can, for example, be made of wire or be formed therefrom. The multiple filaments form a mesh, e.g., in the form of a grid, knitted fabric, braid, woven fabric, or net. Alternatively or additionally, the multiple filaments can be made of or formed therefrom, e.g., steel and / or copper. For example, the gas distribution layer 802 can have or be formed therefrom, a metal woven fabric, knitted fabric, and / or a metal braid, e.g., a copper woven fabric.

[0116] For example, the mesh (e.g., a grid) can be provided by means of a sieve fabric. The mesh (e.g., its filaments) can be made of stainless steel. For a copper surface (e.g., the heat distribution layer 451), the mesh can also be provided by means of a copper mesh. Alternatively or additionally, the mesh (e.g., its filaments) can be made of aluminum. This improves the thermal coupling.

[0117] The mesh size of the mesh can be, for example, in a range of approximately 0.5 mm to approximately 1.5 mm, e.g., approximately 1.2 mm. Alternatively or additionally, the thickness of the filaments (e.g., wire diameter) can be in a range of approximately 0.1 mm to approximately 0.5 mm, e.g., approximately 0.2 mm. The thickness of the filaments can be their dimension perpendicular to their longitudinal direction.

[0118] The larger the mesh size, the better the gas conductivity can be, i.e., the penetration and bonding of the sprayed coating (general roller shell 112m) to the roller body, and / or the worse the groove bridging can be. The smaller the mesh size, the better the groove bridging can be and / or the worse the bonding of the sprayed coating to the roller body 112h and / or the bottom layer 1402 can be. A better bond between the roller body 112h or the bottom layer 1402 and the sprayed coating can provide greater mechanical stability and heat dissipation.

[0119] A balance between these two states can be achieved, for example, with mesh sizes ranging from approximately 0.8 mm to approximately 1.2 mm. The wire diameter can be chosen to be as small as possible to minimize disruption caused by the mesh (e.g., screen fabric) in the layer structure and to ensure good adhesion to the substrate.

[0120] The application of the mesh (e.g., screen fabric) to the roller body 112h and / or the bottom layer 1402 can be carried out in various ways. For example, the mesh can simply be laid over the grooves 112g, 702g. Alternatively or additionally, the mesh can be arranged at least partially in the grooves 112g, 702g (also referred to as a reinforcement).

[0121] For example, the roller body 112h or the bottom layer 1402 can be radially covered completely with the mesh (e.g., as a sieve insert), since the mesh adheres better to the surface there, resulting in a homogeneous disruption in the roller shell 112m (e.g., sprayed layer). Partial covering (e.g., only over or in the grooves 112g, 702g) can result in greater inhomogeneity, as the transition between the mesh and the exposed shell surface is an additional factor.

[0122] Furthermore, the mesh may then have less contact with the roller base body, thereby increasing the risk of inadequate layer bonding to the base body 112h or the lowest layer 1402.

[0123] The second gas distribution layer 702 or its circumferential channels 702g can, for example, also be omitted.

[0124] Attaching the mesh to a copper surface (e.g., the heat distribution layer 451) can be difficult, for example, using spot welding technology. Therefore, in this case, an alternative material-bonded connection can be created, e.g., using an adhesive, such as a polymer adhesive, an epoxy resin, or a two-component adhesive.

[0125] More generally, the gas distribution layer 802 can, for example, prevent the first gas distribution layer 602 and / or the roll sheath 112m from penetrating the gas distribution layer 702 or its circumferential channels 702g or the gas lines 112g during application. This risk of penetration may be increased, for example, if the first gas distribution layer 602 and / or the roll sheath 112m are applied by means of a spraying process.

[0126] In that case, the gas distribution layer 802 can also be provided or made available in a different way, e.g. by means of an insertion of micro-slotted and micro-bent sheet metal strips into the circumferential channels 702g and / or into the gas lines 112g, by means of an insertion of fine spring strands and / or metal braided hoses into the circumferential channels 702g and / or into the gas lines 112g.

[0127] In other words, the gas distribution layer 802 can be arranged at least partially in the circumferential channels 702g and / or in the gas lines 112g.

[0128] If the gas distribution layer 802 contains multiple filaments, e.g., the mesh made of them, the underlying surface (e.g., of the second gas distribution layer 702) may be or be gently roughened, e.g., before the mesh (e.g., the screen fabric) is applied. Alternatively or additionally, tangential rotary grooves may be formed by means of a rotary process. More generally, the underlying surface may be roughened or finished.

[0129] When the gas distribution layer 802 is shrunk onto a sheet, it may be necessary for the underlying surface to be particularly smooth (e.g., finely finished), as a high surface quality improves the results of the shrunk-on application of the gas distribution layer 802 (e.g., to a sheet). If the gas distribution layer 802 contains multiple filaments, the surface can be rougher, e.g., roughened or finished.

[0130] A roughened surface can have a roughness ranging from approximately 3.2 µm (micrometers) to approximately 25 µm, for example, grooves that are both perceptible and visible to the naked eye. A finished surface can have a roughness ranging from approximately 1.6 µm to approximately 3.2 µm, for example, grooves that are still visible to the naked eye and / or not perceptible to the touch. A finely finished surface can have a roughness ranging from approximately 0.8 µm to approximately 1.6 µm, for example, no grooves that are visible to the naked eye.

[0131] Fig.13A bis 13B Each figure illustrates a temperature control roller 112 in different views according to different embodiments.

[0132] Figure 1300a illustrates the plurality of gas lines 112g. Each gas line 112g of the plurality of gas lines 112g can, for example, be provided by means of a recess in the roller housing 112h. Figure 1300b illustrates the plurality of circumferential channels 702g. Each circumferential channel 702g of the plurality of circumferential channels 702g can, for example, be provided by means of a recess in the roller housing 112h and / or cross the gas lines 112g.

[0133] Figure 1300c illustrates the plurality of perforations 802g. Each perforation 802g of the plurality of perforations 802g can, for example, be provided by means of a hollow cylinder above the roller housing 112h and / or be extended parallel to the gas lines 112g, e.g. crossing the circumferential channels 702g.

[0134] Fig.14 A temperature control roller 112 according to various embodiments is illustrated in a schematic layer structure diagram 1400a and a structure density diagram 1400b, in which the structure density 1041 (e.g., the pore density) is plotted against the radius 111r. The layers can be understood, for example, as hollow cylindrical layers which can be arranged one above the other with respect to the axis of rotation 111d, i.e., have an increasing radius 111r. The layers can, for example, be in contact with each other in pairs.

[0135] The cooling device 1124 can be arranged inside the temperature control roller 112. The lowermost layer 1402 above it can have a plurality of gas lines 112g. The second gas distribution layer 702 above it can be penetrated by a plurality of circumferential channels 702g and optionally by a plurality of gas lines 112g. The third gas distribution layer 802 above it can be penetrated by a plurality of perforations 802g. The first gas distribution layer 602 above it can be penetrated by a plurality of pores connected to form gas channels 602g. The temperature control surface of the roller casing 112m above it can have a plurality of gas outlet openings 112o, which optionally penetrate the roller casing 112m in the form of a plurality of pores connected to form gas channels. The multitude of gas outlet openings 112o can optionally be formed by means of the multitude of pores connected to gas channels 602g.

[0136] For example, the roll casing 112m can be microporous and the first gas distribution layer 602 can be mesoporous. Alternatively, the roll casing 112m can be mesoporous and the first gas distribution layer 602 can be macroporous.

[0137] Fig.15 illustrate a temperature control roller 112 according to various embodiments in a schematic layer structure diagram 1500a and a structure density diagram 1500b, similar to Fig.14 The difference is that the roller shell 112m has a gradient in pore density 1041 and the first gas distribution layer 602 is optionally omitted. Unlike the underlying layers, the roller shell 112m can have a gradient in structural density, while the structural density of the underlying layers, for example, assumes discrete values.

[0138] Fig.16A Figure 1600a illustrates a temperature control roller 112 according to various embodiments. The temperature control roller 112 can have one or more electrically conductive (hollow cylindrical) layers 1602 (also referred to as conductive layers 1602). The one or more conductive layers 1602 can comprise or be formed from the bottom layer 1402 and / or the second gas distribution layer 702 and / or the third gas distribution layer 802 and / or the first gas distribution layer 602.

[0139] The one or more conductive layer 1602 can, for example, have several helical circumferential channels 702g.

[0140] In a first operating mode (also referred to as neutral mode), a reference potential can be applied to one or more conductive layers 1602. The reference potential can be, for example, electrical ground or the electrical potential of the substrate. The reference potential can be applied to the substrate either alternatively or additionally. In the first operating mode, for example, no electrostatic attraction can be provided between the substrate and the temperature control roller 112.

[0141] Fig.16B illustrate a temperature control roller 112 according to various embodiments in a schematic layer structure diagram 1600b.

[0142] The temperature control roller 112 can have one or more electrically insulating (cylindrical) layers 1604 (also referred to as insulating layer 1604). The insulating layer 1604 can be an outermost and exposed layer (also referred to as a finishing layer) of the temperature control roller and / or form the temperature control surface, e.g., the roller casing 112m.

[0143] For example, the breakdown voltage of the insulating layer 1604 can be more than 1000 volts (V), e.g. more than approximately 2000 V, or more than 3000 volts (V).

[0144] One or more insulating layers 1604 can be arranged above one or more conductive layers 1602. The one or more insulating layers 1604 can be configured to electrically (e.g., galvanically) isolate a substrate transported by means of the temperature control roller 112 from the one or more conductive layers 1602.

[0145] One or more insulating layers 1604 can comprise or be formed from the temperature control surface 1604o of the temperature control roller 112. For example, one or more insulating layers 1604 can comprise the roller casing 112m and optionally the third gas distribution layer 802 and / or optionally the first gas distribution layer 602.

[0146] In a second operating mode (also called attraction mode), an electrical potential different from the reference potential can be applied to one or more conductive layers 1602, for example, more than 10 volts (V), more than 20 V, more than 50 V, or more than 100 V. The voltage specification can be referenced to the reference potential.

[0147] The reference potential can be applied to the substrate either as an alternative or in addition.

[0148] In the second operating mode, for example, an electrostatic attraction between the substrate and the temperature control roller 112 can be provided or at least a greater electrostatic attraction than in the first operating mode.

[0149] Fig.16C illustrate a temperature control roller 112 according to various embodiments in a schematic layer structure diagram 1600c.

[0150] The temperature control roller 112 can be configured as in 1600b, with the difference that the conductive layer 1602 has several galvanically isolated segments. The segments of the conductive layer 1602 can, for example, be arranged side by side along the circumference of the temperature control roller 112 and / or extend longitudinally along the axis of rotation of the temperature control roller 112.

[0151] The temperature control roller 112 can further have a first electrical contact 1606, which electrically contacts at least a first segment of the conductive layer 1602. The temperature control roller 112 can further have a second electrical contact 1608, which has a distance along its circumference from the first electrical contact 1606 and / or electrically contacts at least a second segment of the conductive layer 1602.

[0152] For example, the first electrical contact 1606 and / or the second electrical contact 1608 can physically contact the conductive layer 1602 and / or be located on opposite sides.

[0153] In a third operating mode (also called alternating mode), an electrical potential 1603 different from the reference potential can be applied to the first electrical contact 1606, for example, more than 10 volts (V), more than 20 V, more than 50 V, or more than 100 V. Furthermore, in this third operating mode, the reference potential 1601, or at least the electrical potential of the substrate, can be applied to the second electrical contact 1606. In other words, the first electrical contact 1606 can be controlled according to the attraction mode, and the second electrical contact 1608 according to the neutral mode.

[0154] More generally speaking, several electrical contacts 1606, 1608 can be provided or made available, each of which is electrically conductively connected to a segment of the temperature control roller.

[0155] Optionally, the transport arrangement can include a control device that can control and / or regulate the electrical potential applied to each of the multiple electrical contacts 1606, 1608, e.g., independently of one another. This allows the spatial distribution of the electrostatic attraction of the substrate to be controlled and / or regulated. The control and / or regulation can, for example, be based on a parameter representing a gas pressure between the substrate and the temperature control roller 112.

[0156] The switching mode can, for example, include: applying a reference potential to a substrate; transporting the substrate by means of the temperature control roller 112, wherein the substrate is in complete physical contact with a first section of the temperature control roller 112 and is in partial physical contact with a second section of the temperature control roller 112 (e.g., is detached); applying the reference potential to the second section and applying an electrical potential different from the reference potential to the first section, wherein the reference potential has a smaller potential difference to the substrate than the electrical potential different from the reference potential.

[0157] For example, the first electrical contact 1606 and / or the second electrical contact 1608 may have a sliding contact, e.g. a brush contact.

[0158] A flexible substrate, such as a film or tape, can be cooled by means of physical contact with the temperature control roller 112 (also referred to as a cooling roller). The heat transfer between the substrate and the temperature control roller 112 (also referred to as a cooling drum) can increase the dissipable heat output. For example, the heat transfer can be particularly high due to heat transport in a gas cushion between the substrate and the temperature control roller 112, reaching values ​​of over 100 W / m² / K up to 1000 W / m² / K. The heat transfer increases with increasing gas pressure in the gas cushion between the substrate and the temperature control roller 112 and / or with decreasing distance between the substrate and the temperature control roller 112. A high gas pressure between the substrate and the temperature control roller 112 can be maintained by supplying the substrate (either from the substrate itself or by appropriate accumulation on the substrate surface).For example, the gas can be introduced through the temperature control roller 112 itself into the space between the substrate and the roller 112. The gas pressure between the substrate and the roller 112 can be so high, for instance, that it does not lift the substrate from the roller 112, with the contact pressure, generated, for example, by the belt tension, counteracting any lifting of the substrate. Alternatively or additionally, a substrate (e.g., a plastic film) can be attracted to the roller 112 by electrostatic attraction, which can be particularly useful in electron beam evaporation. However, if this electrostatic attraction is set too high, it can make it difficult for the substrate to detach from the roller 112.Particularly when using electron beams for evaporation, various devices for discharging the substrate (also called discharge devices) can be used to counteract any charge buildup on the substrate resulting from the coating process using the electron beam. The discharge device can be used to remove the electrical charge introduced into the substrate, for example, to bring and / or maintain the substrate at a reference potential.

[0159] For example, a temperature control roller 112, which has a metallic temperature control surface 1604o (e.g., made of chrome-plated steel), may not provide sufficient electrostatic attraction, e.g., to a metal foil or a metallically coated foil (if, for example, the coated side is in contact with the temperature control roller 112), since the electrical charge can then be dissipated and / or shielded. An electrostatic force can be exerted on the substrate by means of the conductive layer 1602, which presses the substrate against the temperature control roller 112. The electrostatic force can be visualized as being transmitted by means of an electrode (the conductive layer 1602) that is insulated from the substrate.

[0160] According to various embodiments, a temperature control roller 112 can be provided or made available for applications in a vacuum, which combines gas cooling and electrostatic attraction, wherein the strength of the electrostatic attraction and / or the location of the electrostatic attraction can optionally be controlled and / or regulated.

[0161] According to various embodiments, the temperature control roller 112 can be perforated or diffusion-open at its temperature control surface 1604o, so that gas can escape from the temperature control roller 112 into the space between the substrate and the temperature control roller 112. The temperature control surface 1604o of the temperature control roller 112 (e.g., an outer surface 1604o) can be made of an electrically insulating material. The conductive layer 1602 can be arranged beneath the electrically insulated temperature control surface 1604o of the temperature control roller 112. The conductive layer 1602 can be brought directly to a predetermined electrical potential by means of the shaft 118 of the temperature control roller 112 (e.g., if the temperature control roller 112 is mounted with electrical insulation). In other words, the electrical potential can be coupled to the shaft 118 of the temperature control roller 112.Alternatively, the conductive layer 1602 can be or become electrically insulated from the shaft 118 of the temperature control roller 112, so that the electrical potential can be coupled directly to the conductive layer 1602.

[0162] Optionally, the structure of the conductive layer 1602 and the coupling of the electrical potential into the conductive layer 1602 can be arranged such that the highest attractive force is transferred to the substrate in the area of ​​heat input (e.g. at the coating window) and a lower attractive force is transferred to the substrate in the area of ​​detachment of the substrate from the temperature control roller 112.

[0163] This makes it possible to provide a high gas pressure with a narrow gap between the substrate and the temperature control roller 112, while simultaneously providing reduced attraction in the substrate supply and discharge areas, which impairs substrate guidance less.

[0164] The electrostatic attraction is provided, for example, by applying a voltage between the substrate and the conductive layer 1602. The gas-permeable and electrically insulating outer layer 1604 of the temperature control roller 112 can, for example, have a thickness of less than approximately 5 millimeters (mm), e.g., less than approximately 2.5 mm, e.g., less than approximately 1 mm.

[0165] In a first configuration, in the attraction mode, for example, the coupling of the electrical voltage (e.g. with respect to the reference potential) into the conductive layer 1602 can be carried out by means of the roller housing 112h and / or the shaft 118.

[0166] For example, the coupling can be controlled and / or regulated, so that a compromise is provided between the highest possible attraction force in the area of ​​the coating window and a sufficient release force for the substrate to detach from the temperature control roller 112.

[0167] For example, the coupling (e.g., the voltage value) can be controlled and / or regulated based on a parameter that represents an operating point at which the substrate is processed. The operating point can, for example, be defined by the detachment force.

[0168] For example, the detachment force can be measured, and thus the maximum possible attractive force for the substrate can be determined. This attractive force intuitively limits the maximum possible gas pressure that can be built up in the space between the substrate and the temperature control roller 112.

[0169] For the alternating mode, in a second configuration the conductive layer 1602 can be electrically insulated from the roller housing 112h and / or the shaft 118. For example, the conductive layer 1602 can be applied in such a way that it can be contacted on the outside of the temperature control roller 112 (e.g., with graphite brushes or other sliding contacts). An electrical charge immediately before / in the coating window and an electrical discharge at the substrate detachment area can provide a spatial distribution of the attractive force. The spatial distribution of the corresponding electrical potential coupled into the conductive layer 1602 can be provided, for example, by means of the multiple electrical contacts 1606, 1608.

[0170] For the switching mode, the conductive layer 1602 can optionally be configured to exhibit anisotropic electrical conductivity. For example, the electrical conductivity parallel to the axis of rotation 111d (also referred to as transverse conductivity) can be greater than that perpendicular to the axis of rotation 111d, e.g., along the transport direction. The anisotropic electrical conductivity can be achieved, for example, by separating the conductive layer into strip segments.

[0171] In this way, a first attractive force can be transferred to the substrate in a first angular range of the temperature control roller 112, and a second attractive force, which is less than the first, can be transferred to the substrate in a second angular range. The maximum achievable first attractive force, and thus, for example, the maximum possible gas pressure in the space between the temperature control roller 112 and the substrate, can be limited, for example, only by the breakdown voltage (also referred to as dielectric strength) of the insulating layer 1604. The detachment behavior is independent of the value used for the first attractive force in this case.

[0172] Fig.17 Illustrating a temperature control roller 112 according to various embodiments in a schematic layer structure diagram 1700, which is set up, for example, as in the layer structure diagram 1600c.

[0173] For the alternating mode, different electrical potentials can be coupled alternately in a third configuration of the conductive layer 1602, e.g. alternating.

[0174] For example, the first and second configurations may reach their limits if the substrate is not sufficiently grounded or if substrate grounding has a negative impact on the process result. To overcome this limit, the temperature control roller 112 can be contacted in such a way that its segments are contacted alternately on opposite sides when the temperature control roller 112 rotates, e.g., by means of several contacts 1606, 1608, 1706, 1708, of which one or more first contacts 1606, 1608 are arranged on a first side of the temperature control roller 112 and one or more second contacts 1706, 1708 are arranged on a second side of the temperature control roller 112 opposite the first side (along the axis of rotation 111d).For example, a first segment of the conductive layer 1602 on the first side and a second segment of the conductive layer 1602 immediately adjacent to the first segment on the second side can be or become electrically contacted.

[0175] The segments (e.g., strips) of the conductive layer 1602 can be electrically isolated from each other, e.g., galvanically isolated. For example, they can be separated from each other in the same plane or in different planes by means of an insulating separating layer.

[0176] In addition to a strip shape, one or more than one (e.g., each) segment of the conductive layer 1602 can also be shaped differently, e.g., meander-shaped, wedge-shaped and / or in such a way that the temperature control surface 1604o is filled to the maximum extent.

[0177] Analogous to the second configuration, the conductive layer 1602 can be contacted on the outer sides of the temperature control roller 112, e.g. in the area of ​​the coating window, and in the same way the charge equalization (i.e. the discharge of the conductive layer 1602) can take place in the area of ​​the substrate supply or discharge.

[0178] In a fourth configuration, the insulating layer 1604 (e.g., an outer insulating layer) can be made of a material that allows for easy replacement. For example, the insulating layer 1604 can consist of perforated shrink film, a vapor-permeable varnish, or another vapor-permeable coating, such as vapor-deposited ZrO₂ (zirconium oxide). For maintenance of the temperature control roller 112, a maintenance device can be provided that enables (e.g., uniform) removal and subsequent reapplication of the insulating layer 1604.

[0179] By means of the temperature control roller 112 provided herein, an increase and / or enabling of the heat transfer at the temperature control roller 112 can be provided by defined pressing by means of electrostatic forces and simultaneous gas flow from the temperature control roller 112 out into the gap between substrate and temperature control roller 112.

[0180] Fig.18 Figure 1 illustrates a vacuum arrangement 1800 according to various embodiments in a schematic side view or cross-sectional view (with viewing direction along the axis of rotation 111d), wherein the vacuum arrangement 1800 comprises the transport arrangement 1200 or alternatively one of the transport arrangements 100, 200, 300 or 1000, which includes the temperature control roller 112.

[0181] The wrapping and / or processing (e.g. coating) of the substrate 102 can be carried out in a vacuum according to various embodiments, e.g. in a vacuum arrangement 1800.

[0182] According to various embodiments, the vacuum arrangement 1800 can include a vacuum chamber housing 802k in which a vacuum can be generated and / or maintained. The vacuum chamber housing 802k can, for example, be configured to be airtight, dustproof, and / or vacuum-tight. The vacuum chamber housing 802k can have one or more vacuum chambers. Each vacuum chamber can provide one or more vacuum zones 306b, 308b, e.g., processing zones 306b, 308b. The multiple vacuum chambers and / or the multiple vacuum zones 306b, 308b of the vacuum chamber housing 802k can optionally be at least partially gas-separated from one another.

[0183] Furthermore, the vacuum chamber housing 802k can be coupled to a pump system 804 (comprising at least one rough vacuum pump and optionally at least one high vacuum pump). The pump system 804 can be configured to extract a gas (e.g., the process gas) from the vacuum chamber housing 802k, so that a vacuum (i.e., a pressure less than 0.3 bar) and / or a pressure in the range of approximately 1 mbar to approximately 10⁻³ < mbar (in other words, fine vacuum) and / or a pressure in the range of approximately 10⁻³ < mbar to approximately 10⁻⁷ < mbar (in other words, high vacuum) or a pressure less than high vacuum, e.g., less than approximately 10⁻⁷ < mbar (in other words, ultra-high vacuum), can be provided or made available within the vacuum chamber housing 802k.

[0184] The pump system 804 can, for example, include or be formed from the pump assembly 1716. Alternatively or additionally, the vacuum assembly 1800 can include a gas supply assembly 1716. A process gas can be supplied to the vacuum chamber housing 802k by means of the gas supply assembly 1716 to form a process atmosphere within the vacuum chamber housing 802k. The process gas can, for example, be an inert gas or be formed from one. Alternatively or additionally, the process gas can be a reactive gas or be formed from one, such as oxygen, nitrogen, hydrogen, argon, and / or carbon. The process pressure can be established by an equilibrium of process gas, which is supplied by means of the gas supply assembly 1716 and extracted by means of the pump system 804.

[0185] Furthermore, the vacuum chamber housing 802k can be configured such that the operating point (e.g., the vacuum conditions or, more generally, the process conditions) at which the substrate is processed (e.g., process pressure, process temperature, chemical process gas composition, electrostatic attraction, etc.) can be set or controlled (e.g., locally), for example, by means of a control device 508. For instance, the vacuum chamber housing 802k can provide or establish several vacuum zones 306b, 308b with different operating points. For example, the control device 508 can be configured to control and / or regulate a power supply 806, the gas supply arrangement 1716, and / or the pump system 804. The power supply 806 can, for example, provide or establish an electrical potential to the temperature control roller 112 (e.g., gas distribution structure 402).For example, the control device 508 can be configured to control and / or regulate the electrical potential coupled to the temperature control roller 112 (e.g., the gas distribution structure 402) and / or the resulting attractive force transmitted to the substrate 102. Alternatively or additionally, the control device 508 can be configured to control and / or regulate a standard volume flow rate of process gas, which is supplied by means of the gas supply arrangement 1716 and / or the temperature control roller 112 and / or extracted by means of the pump system 804.

[0186] According to various embodiments, the control device 508 can be configured to control and / or regulate an optional temperature control device 1124 (e.g., comprising a heating device and / or a cooling device) so that a process temperature (e.g., of the substrate 102 and / or the process gas), for example during processing (e.g., during coating), can be controlled and / or regulated. For example, the control device 508 can be configured to control and / or regulate a thermal power that is supplied to and / or removed by means of the substrate temperature control device 1124.

[0187] Optionally, the vacuum arrangement 1800 can include a supply device for the temperature control device 1124, e.g., for supplying it with a temperature-controlled fluid (e.g., a cooling liquid) or with electrical energy. For example, the supply device can be located outside the processing chamber 802k. For example, a heating or cooling medium can be supplied to and discharged from the temperature control device 1124 (e.g., the temperature control roller 112).

[0188] In the vacuum chamber housing 802k (e.g., in a first vacuum chamber), at least one vacuum region 306b, 308b, e.g., a first vacuum region 306b, can be arranged. Furthermore, a first processing source 306, e.g., a coating material source 306, can be arranged in the vacuum chamber housing 802k (e.g., in the first vacuum chamber). The coating material source 306 can be configured to emit a gaseous coating material into the first vacuum region 306b. The substrate 102 can be coated with the coating material. In other words, the coating of the substrate 102 can take place in the first vacuum region 306b. The first vacuum region 306b can be a coating region 306b.

[0189] In the vacuum chamber housing 802k (e.g., in a second vacuum chamber or in the first vacuum chamber), at least one second vacuum chamber 308b can optionally be arranged. Furthermore, a second processing source 308, e.g., an exposure device 308, can be arranged in the vacuum chamber housing 802k (e.g., in the second vacuum chamber). The second processing source 308 can, for example, be configured for processing and / or coating the coating material with which the substrate 102 is or will be coated.

[0190] According to various embodiments, the vacuum chamber housing 802k can have a chamber opening for exposing the interior of the vacuum chamber housing 802k. The chamber opening can, for example, expose the interior of the vacuum chamber housing 802k in the direction of rotation axis 111d. To close the chamber opening, the vacuum chamber housing 802k can have a chamber cover.

[0191] According to various embodiments, the control device 508 can be configured to control and / or regulate the first processing source 306 and / or the second processing source 308, e.g. by controlling and / or regulating a quantity of material and / or thermal energy (e.g. radiation energy) which is emitted per unit of time in the direction 105 of the substrate 102.

[0192] Furthermore, the vacuum arrangement 1800 can have one or more temperature control rollers 112 (e.g., gas cooling rollers 112) and optionally one or more guide rollers 122, which define a transport path 111 along which the substrate 102 (e.g., a ribbon-shaped substrate) is transported between the unwind rollers 112a, 112b and the wind-up rollers 112b through the at least one vacuum region 306b, 308b, e.g., in a transport direction 111w (which can be perpendicular to the axis of rotation 111d). The guide roller 122 can be configured to redirect the transport path.

[0193] Optionally, the temperature control roller 112 can be cleaned by removing contaminants (e.g., parasitically deposited metal) from the roller shell 112m (by atomization), for example, using a sputtering device. Optionally, the sputtering device can be provided or configured by setting up the temperature control roller 112 as a sputtering cathode. For this purpose, an electrical sputtering potential can be applied to the temperature control roller 112, e.g., its conductive layer 1602, by means of which a plasma can be generated. In other words, the plasma can be supplied with electrical energy, which is supplied via the temperature control roller 112. If the vacuum arrangement 1800 does not have a sputtering device, one of the processing sources (e.g., its evaporation crucible) can be replaced with the sputtering device.

[0194] For sputtering, a plasma-forming gas can be ionized using the sputtering cathode. The resulting plasma can then be used to remove (e.g., atomize) material (e.g., impurities) from the temperature control roller 112. The atomized material can then be removed from the vacuum chamber. Atomized material settles on substrates that may be present during cleaning or in the process environment (sheet metal components). Sputtering can be used, for example, to remove one or more layers from the temperature control roller 112. Alternatively or additionally, sputtering can be used to expose the roller shell 112m of the temperature control roller 112 (e.g., its pores). Alternatively or additionally, sputtering can be used to increase the structural density of the temperature control roller 112 (e.g., its roller shell 112m), for example, by opening blocked pores.

[0195] The following are various examples that refer to what has been described previously and depicted in the figures.

[0196] Example 1 is a temperature control roller comprising, among other things: a cylindrical (e.g., hollow cylindrical) roller shell having a plurality of gas outlet openings; a temperature control device (e.g., cooling device) configured to supply and / or remove thermal energy from the roller shell; several gas lines extending along the axis of rotation; a gas distribution structure that gas-conductively couples the multiple gas lines and the plurality of gas outlet openings, wherein the gas distribution structure has a lower structural density and / or higher electrical conductivity than the roller shell, wherein the gas distribution structure is optionally electrically insulated (e.g., galvanically isolated) by means of the roller shell (e.g.,in a radial direction and / or from a substrate resting on the temperature control roller), the temperature control roller optionally further comprising: a heat distribution layer which is arranged between the gas distribution structure and the multiple gas lines, wherein the heat distribution layer has a higher thermal conductivity than the gas distribution structure and / or a material of the temperature control roller in which the multiple gas lines are formed, wherein the heat distribution layer is, for example, made of or formed from copper.

[0197] Example 2 is the temperature control roller according to Example 1, wherein the gas distribution structure couples the plurality of gas outlet openings to each other in a gas-conducting manner, and / or wherein the gas distribution structure couples the multiple gas lines to each other in a gas-conducting manner.

[0198] Example 3 is the temperature control roller according to Example 1 or 2, where the structural density is related to a cylindrical (e.g., cylindrical shell-shaped) surface and / or to gas-conducting openings (i.e., the gas-conducting structural density), e.g., to gas-permeable openings.

[0199] Example 4 is the temperature control roller according to one of Examples 1 to 3, wherein the gas outlet openings are provided by means of a plurality of interconnected pores, to which the structural density is related.

[0200] Example 5 is the temperature control roller according to one of Examples 1 to 4, where the structural density of the roller shell is related to the area density of the gas outlet openings.

[0201] Example 6 is the temperature control roller according to one of Examples 1 to 5, wherein the gas distribution structure has a (e.g. hollow cylindrical) porous layer to which (e.g. its pore area density) the structural density of the gas distribution structure is related and / or which is in physical contact with the roller shell.

[0202] Example 7 is the temperature control roller according to Example 6, where the structural density is a pore area density.

[0203] Example 8 is the temperature control roller according to Example 6 or 7, wherein the porous layer and the plurality of gas outlet openings (e.g. the network of interconnected pores) differ in at least one of the following properties: a spatial pore density; a spatial pore size; and / or a porosity.

[0204] Example 9 is the temperature control roller according to one of Examples 6 to 8, wherein the porous layer is electrically conductive or at least has or is formed from an electrically conductive material.

[0205] Example 10 is the temperature control roller according to one of Examples 1 to 9, wherein the gas distribution structure (e.g. its porous layer) has a greater electrical conductivity than the roller shell.

[0206] Example 11 is the temperature control roller according to one of Examples 1 to 10, wherein the gas distribution structure has several (e.g. hollow cylindrical) layers which differ in their structural density.

[0207] Example 12 is the temperature control roller according to one of Examples 1 to 11, wherein the gas distribution structure has several circumferential channels, each of which couples the several gas lines to each other in a gas-conducting manner and / or to which the structure density is referred.

[0208] Example 13 is the temperature control roller according to Example 12, wherein of the multiple circumferential channels each circumferential channel is extended longitudinally around the axis of rotation.

[0209] Example 14 is the temperature control roller according to Example 12 or 13, wherein one or more of the multiple circumferential channels extends along a circular arc.

[0210] Example 15 is the temperature control roller according to one of Examples 12 to 14, wherein the several gas lines and the several circumferential channels cross each other and / or run obliquely to each other.

[0211] Example 16 is the temperature control roller according to one of Examples 12 to 15, wherein of the multiple circumferential channels each circumferential channel is gas-conductingly coupled to all gas lines of the multiple gas lines.

[0212] Example 17 is the temperature control roller according to one of Examples 12 to 16, wherein one or more of the circumferential channels extends along a helix.

[0213] Example 18 is the temperature control roller according to Example 17, wherein of the several circumferential channels adjacent to each other, the circumferential channels extend along a common helix.

[0214] Example 19 is the temperature control roller according to one of Examples 1 to 18, wherein the gas distribution structure comprises a gas distribution layer (e.g., a plate, e.g., a sheet and / or a perforated plate) which is penetrated by a plurality of perforations (e.g., elongated holes or slots) to which the structure density is related; wherein, for example, the gas distribution layer (e.g., a mesh) comprises a plurality of filaments between which the plurality of perforations is provided, wherein, for example, the gas distribution layer is at least partially (i.e.,(partially or completely) is arranged within the multiple circumferential channels and / or multiple gas lines, wherein the gas distribution structure has an adhesion promoter layer as an alternative or additional measure to the gas distribution layer, wherein, for example, the adhesion promoter layer is granular and / or porous, and wherein, for example, the adhesion promoter layer contains or is formed from nickel and / or aluminum.

[0215] Example 20 is the temperature control roller according to one of Examples 1 to 19, wherein the cylindrical roller shell has a network of interconnected pores which provides the plurality of gas outlet openings; wherein the gas distribution structure has a greater structural density than the network of interconnected pores.

[0216] Example 21 is the temperature control roller according to one of Examples 1 to 20, wherein the roller shell (e.g. along a direction transverse to the axis of rotation) has a gradient in structure density.

[0217] Example 22 is the temperature control roller according to one of Examples 1 to 21, wherein the roller shell (e.g. along a direction transverse to the axis of rotation) has a gradient in at least one of the following properties: a spatial pore density; a spatial pore size; and / or a porosity.

[0218] Example 23 is the temperature control roller according to one of Examples 1 to 22, wherein the gas distribution structure has a greater structural density than the multiple gas lines.

[0219] Example 24 is the temperature control roller according to one of Examples 1 to 23, wherein the gas distribution structure has a greater linear structure density along the axis of rotation than the multiple gas lines.

[0220] Example 25 is the temperature control roller according to one of Examples 1 to 24, wherein the gas distribution structure has a smaller linear structure density along the axis of rotation than the plurality of gas outlet openings.

[0221] Example 26 is the temperature control roller according to one of Examples 1 to 25, wherein the gas distribution structure has a larger linear structure density perpendicular to the axis of rotation (e.g. in a circumferential direction) than the plurality of gas outlet openings.

[0222] Example 27 is the temperature control roller according to one of Examples 1 to 26, further comprising: several gas connections, each of which is coupled to exactly one of the several gas lines in a gas-conducting manner.

[0223] Example 28 is the temperature control roller according to one of Examples 1 to 27, comprising the temperature control device: a cylindrical (and e.g. double-walled) housing which has a cavity (e.g. provided by means of a double-walled housing wall) for receiving a temperature control fluid (e.g. cooling fluid), wherein the gas distribution structure is arranged, for example, between the housing and the roller shell.

[0224] Example 29 is the temperature control roller according to one of Examples 1 to 28, the temperature control device further comprising: a temperature control fluid connection for connection to a temperature control fluid supply (e.g. cooling fluid supply).

[0225] Example 30 is the temperature control roller according to one of Examples 1 to 29, wherein the roller casing is electrically insulating or at least has or is formed from an electrically insulating material (e.g. a dielectric).

[0226] Example 31 is the temperature control roller according to one of Examples 1 to 30, wherein the roller casing provides an electrical breakdown voltage of more than 1000 volts (V).

[0227] Example 32 is the temperature control roller according to one of Examples 1 to 31, further comprising: a contacting arrangement which is electrically conductively connected to the gas distribution structure for coupling an electrical potential into the gas distribution structure.

[0228] Example 33 is the temperature control roller according to one of Examples 1 to 32, wherein the gas distribution structure has several electrically isolated segments which are electrically conductive.

[0229] Example 34 is the temperature control roller according to one of Examples 1 to 33, wherein the gas distribution structure has an anisotropic electrical conductivity.

[0230] Example 35 is the temperature control roller according to Example 34, wherein the contacting arrangement has multiple electrical contacts, wherein at least two contacts of the multiple electrical contacts are arranged on opposite sides of the temperature control roller; and / or wherein at least two contacts of the multiple electrical contacts have a distance from each other that is greater than a parallel extent of the segments of the gas distribution structure.

[0231] Example 36 is the temperature control roller according to Example 35, wherein the at least two contacts differ in the segment with which they are electrically coupled.

[0232] Example 37 is the temperature control roller according to one of Examples 1 to 36, further comprising: a voltage source which is configured to couple an electrical potential to the gas distribution structure.

[0233] Example 38 is the temperature control roller according to Example 37, wherein the voltage source has a control device configured to control and / or regulate the electrical potential, e.g. on the basis of a parameter representing an operating point at which a substrate is processed, wherein the control device is, for example, configured to control and / or regulate a spatial distribution of the electrical potential.

[0234] Example 39 is the temperature control roller according to Example 38, wherein the parameter has or represents at least one of the following operating point parameters: a gas pressure between the substrate and the temperature control roller; a force required to detach the substrate from the temperature control roller (also called the detachment force); a temperature of the substrate.

[0235] Example 40 is the temperature control roller according to one of Examples 1 to 39, wherein the roller shell and / or the gas distribution structure (e.g. its porous layer) comprises a variety of solid particles (e.g. a granular material).

[0236] Example 41 is the temperature control roller according to one of Examples 1 to 40, wherein the gas distribution structure (e.g. its porous layer and / or solid particles) has a metal (e.g. aluminium) or is formed from it.

[0237] Example 42 is the temperature control roller according to one of Examples 1 to 41, wherein the structural density of the roller shell (e.g., along the circumference and / or the axis of rotation) is approximately 200 mm to approximately 2000 mm (or more) in a range; and / or wherein the structural density of the first gas distribution layer (e.g., along the circumference and / or the axis of rotation) is approximately 10 mm to approximately 100 mm in a range; and / or wherein the structural density (e.g., along the axis of rotation) of the circumferential channels is approximately 0.1 mm to approximately 0.5 mm (e.g., 0.25 mm) in a range; and / or wherein the structural density of the perforations is approximately 0.05 mm to approximately 0.3 mm in a range; and / or wherein the structural density of the gas lines (e.g., along the circumference) is approximately 0.01 mm to approximately 0.05 mm in a range. For example, the outer tube of the roller can have a circumferential groove (e.g.similar to a threaded groove), which provides the circumferential channels, for example with a pitch of approximately 5 mm or more, a depth of approximately 1 mm, and / or a flank angle of approximately 60°. Alternatively or additionally, the outer roller tube can have several grooves extending axially (i.e., along the axis of rotation) which provide the gas channels, for example with a width (extension transverse to the axis of rotation along the circumference) of approximately 4 mm and / or a depth of approximately 6 mm, or approximately 40 (or between approximately 20 and approximately 80) distributed around the circumference of the temperature control roller, for example equidistant from each other and / or every 9°. For example, a perforated sleeve can be arranged on (e.g., slipped over) the outer roller tube, which has a multitude of slots (e.g.,a slot arrangement) providing the perforations, wherein each slot may, for example, have an axial length of approximately 10 mm and a transverse width of approximately 0.3 mm, adjacent slots may have an axial and / or circumferential spacing of approximately 7 mm, and / or adjacent slots (e.g., arranged in axially extended rows, i.e., immediately successive rows of slots) may be offset from one another, e.g., by approximately 8.5 mm (visually (10 mm length + 7 mm spacing) / 2 = 8.5 mm). For example, a microporous coating may be applied, which may be a base layer providing the first gas distribution layer and / or a top layer providing the roll casing.For example, the base layer may have a thickness of approximately 2 mm, contain or be composed of aluminum, and / or have a porosity in the range of approximately 5% to approximately 25% (e.g., approximately 10%). For example, the top layer may have a thickness of approximately 0.5 mm or at least less than the base layer. For example, the top layer may contain or be composed of one or more oxides (e.g., aluminum oxide (e.g., Al₂O₃), chromium oxide, titanium oxide, yttrium oxide, and / or zirconium oxide (e.g., ZrO₂)).

[0238] Example 43 is the temperature control roller according to one of Examples 1 to 42, wherein the roller shell (e.g. its porous layer and / or solid particles) has or is made of a ceramic (e.g. zirconium oxide or aluminum oxide).

[0239] Example 44 is a temperature control roller, e.g., the temperature control roller according to any one of Examples 1 to 43, comprising: a cylindrical roller shell which defines an axis of rotation and has a network of interconnected pores which provide a plurality of gas outlet openings; a gas distribution structure which has a gas connection for connecting a gas supply; a temperature control device (e.g.,Cooling device), which is configured to supply and / or extract thermal energy from the cylindrical roller shell; wherein the gas distribution structure has several circumferential channels extending transversely to the axis of rotation, which provide a gas-conducting connection between the multiple gas outlet openings and the gas connection, or are at least part of this connection, and of which each circumferential channel extends longitudinally around the axis of rotation; wherein the gas distribution structure further comprises a porous layer which provides a gas-conducting connection between the plurality of gas outlet openings and the gas connection, or is at least part of the gas-conducting connection; wherein the porous layer and the network of interconnected pores differ in at least one of the following properties: a spatial pore density; a spatial pore size; and / or a porosity.

[0240] Example 45 is the temperature control roller, e.g., the temperature control roller according to any one of Examples 1 to 44, comprising: a cylindrical roller shell which defines an axis of rotation and has a network of interconnected pores which provide a plurality of gas outlet openings; a gas distribution structure which has a gas connection for connecting a gas supply; a temperature control device (e.g.,Cooling device), which is configured to supply and / or extract thermal energy from the cylindrical roller shell; wherein the gas distribution structure has a porous layer which provides, or is at least part of, a gas-conducting connection between the plurality of gas outlet openings and the gas connection; wherein the porous layer and the network of interconnected pores differ in at least one of the following properties: a spatial pore density; a spatial pore size; and / or a porosity.

[0241] Example 46 is the temperature control roller, e.g., the temperature control roller according to any one of Examples 1 to 45, comprising: a cylindrical roller shell defining an axis of rotation and having a network of interconnected pores providing a plurality of gas outlet openings; a gas distribution structure having a gas connection for connecting a gas supply; a temperature control device (cooling device) configured to supply and / or remove thermal energy from the cylindrical roller shell; wherein the network of interconnected pores (e.g., along a direction transverse to the axis of rotation) has a gradient in at least one of the following properties: a spatial pore density; a spatial pore size; and / or a porosity.

[0242] Example 47 is the temperature control roller, e.g., the temperature control roller according to any one of Examples 1 to 46, comprising: a cylindrical roller shell which defines an axis of rotation and has a plurality of gas outlet openings; a gas distribution structure which has a gas connection for connecting a gas supply; a temperature control device (e.g., cooling device) which is configured to supply and / or remove thermal energy from the cylindrical roller shell; wherein the gas distribution structure further comprises several circumferential channels which provide, or at least form part of, a gas-conducting connection from the several gas outlet openings to the gas connection, and of which each circumferential channel extends longitudinally along a path (e.g., closed or helical) around the axis of rotation.

[0243] Example 48 is a transport arrangement comprising: a temperature control roller according to one of Examples 1 to 47, two rewind rollers (e.g. an unwind roller and a rewind roller) which are configured to rewind a substrate between them; several optional transport rollers 122 which together with the temperature control roller provide a transport path between the two rewind rollers for rewinding the substrate along the transport path.

[0244] Example 49 is a vacuum arrangement comprising: a transport arrangement according to Example 48, a processing source for processing (e.g. a coating material source for coating) a substrate transported by means of the temperature control roller.

[0245] Example 50 is the vacuum arrangement according to Example 49, further comprising: a vacuum chamber in which the temperature control roller is arranged.

[0246] Example 51 is a method comprising: wrapping a substrate by means of a temperature control roller, e.g., the temperature control roller according to any one of Examples 1 to 50; introducing a gas between the temperature control roller and the substrate; providing an electrical voltage between the temperature control roller and the substrate to transfer an electrostatic attraction to the substrate; optionally emitting a coating material towards the temperature control roller to coat the substrate with the coating material; optionally controlling and / or regulating the electrical voltage, e.g., based on a parameter representing an operating point at which a substrate is processed, optionally distributing the electrical voltage spatially inhomogeneously; and optionally extracting and / or supplying thermal energy to or from the substrate by means of the temperature control roller.

[0247] Example 52 is a method comprising, among other things: setting up the temperature control roller as a sputtering cathode, e.g. coupling an electric sputtering potential (e.g. to generate an alternating electric field) into the temperature control roller; generating a plasma by means of the sputtering cathode; and atomizing a material (e.g. a metallic material) from the temperature control roller by means of the plasma, e.g. to clean the temperature control roller; optionally replacing a processing device, wherein the replacement comprises, for example, replacing an evaporation crucible with a sputtering device, the sputtering device using the temperature control roller as a sputtering cathode.

Claims

1. A temperature control roll (112), comprising: • a cylindrical roll shell (112m), which includes a plurality of gas outlet openings (112o); • a temperature control device (1124) which is configured to supply and / or deplete thermal energy from the roll shell (112m); • multiple gas conduits (112g) extending along the axis of rotation; • a gas distribution structure (402) coupling the plurality of gas conduits (112g) and the plurality of gas outlets (112o) in a gas-conducting manner with each other; • wherein the gas distribution structure (402) includes a smaller to openings related structure density (1041) and / or greater electrical conductivity than the roll shell (112m), and • wherein the gas distribution structure (402) comprises a plurality of layers, characterized in that a layer is configured as a meshwork penetrated by a plurality of perforations to which the structure density is related and which are provided between a plurality of filaments of the meshwork.

2. Temperature control roll (112) according to claim 1, where the structure density (1041) is related to gas-conducting openings.

3. Temperature control roll (112) according to any of claims 1 or 2, wherein the gas distribution structure (402) comprises a porous layer to which the structure density (1041) of the gas distribution structure (402) is related.

4. Temperature control roll (112) according to any of claims 1 to 3, wherein the gas distribution structure (402) comprises multiple layers which differ from each other in their structure density (1041).

5. Temperature control roll (112) according to any of claims 1 to 4, wherein the gas distribution structure (402) comprises a plurality of peripheral channels, of which each peripheral channel couples the plurality of gas conduits (112g) with each other in a gas-conducting manner; whereby preferably each of the multiple peripheral channels extends lengthwise around the axis of rotation.

6. Temperature control roll (112) according to any of claims 1 to 5, wherein the gas distribution structure (402) comprises a gas distribution layer which is penetrated by a plurality of perforations to which the structure density (1041) is related.

7. Temperature control roll (112) according to any of claims 1 to 6, wherein the roll shell (112m) includes a gradient in the structure density (1041).

8. Temperature control roll (112) according to any of claims 1 to 7, wherein the roll shell (112m) is dielectric.

9. Temperature control roll (112) according to any of claims 1 to 8, the temperature control device (1124) comprising: a cylindrical housing which includes a cavity for receiving a temperature control fluid, the gas distribution structure (402) being arranged, for example, between the housing and the roll shell (112m).

10. A temperature control roll (112) according to any of claims 1 to 9, further comprising: a contacting arrangement which is electrically conductively connected to the gas distribution structure (402) for coupling an electrical potential into the gas distribution structure (402).

11. Temperature control roll (112) according to any of claims 1 to 10, wherein the gas distribution structure (402) comprises a plurality of segments which are electrically insulated from each other and which are electrically conductive.

12. Temperature control roll (112) according to any of claims 1 to 11, wherein the gas distribution structure (402) includes an anisotropic electrical conductivity.

13. Transport arrangement, comprising: • a temperature control roll (112) according to any of claims 1 to 12, • two reeling rolls (112a, 112b), which are configured to reel a substrate between them via the temperature control roll (112).

14. Vacuum arrangement, comprising: • a transport arrangement according to claim 13, • a processing source (306, 308) for processing a substrate (102) transported via the temperature control roll (112).

15. A method, comprising: • reeling a substrate (102) via a temperature control roll (112) according to any of claims 1 to 12; • introducing a gas between the temperature control roll (112) and the substrate (102); • providing an electrical voltage between the temperature control roll (112) and the substrate (102) for applying an electrostatic attraction force to the substrate.