SILICON / PEROVSKIT-LAMINATED SOLAR CELL AND MANUFACTURING METHOD FOR IT

Description

Cross-References to Related Applications

[0001] The present disclosure claims the priority to the Chinese patent application with the application number of "CN 202110864717.0", and entitled "Silicon / Perovskite Tandem Solar Cell and Preparation Method Thereof" filed to the Chinese Patent Office on July 29, 2021.Technical Field

[0002] The present disclosure relates to the technical field of perovskite laminated cells, and in particular to a silicon / perovskite tandem solar cell and a preparation method thereof.Background Art

[0003] Perovskite laminated cells belong to the third-generation photovoltaic technology. As a novel semiconductor material that has attracted the most attention in recent years, perovskite laminated cells have broad application prospects in many fields such as photovoltaics, detection, display, and lighting. However, perovskite laminated cells in the prior art often have problems of low open circuit voltage and low conversion efficiency after prepared.

[0004] For example, LUANA MAZZARELLA ET AL: "Infrared Light Management Using a Nanocrystalline Silicon Oxide Interlayer in Monolithic Perovskite / Silicon Heterojunction Tandem Solar Cells with Efficiency above 25%", ADVANCED ENERGY MATERIALS, vol. 9, no. 14, 20 April 2019 (2019-04-20), page 1803241 page 1803241, XP055747166, DE, ISSN: 1614-6832, DOI: 10.1002 / aenm.201803241 disclose silicon / perovskite tandem solar cells according to the prior art which comprises a perovskite layer, a HTL layer, a ITO layer, a (n)nc-SiOx:H layer, a (i)a-Si:H layer, a (n)c-Si layer, a (p)a-Si:H layer and an AZO layer.

[0005] For example, AYDIN ERKAN ET AL: "Interplay between temperature and bandgap energies on the outdoor performance of perovskite / silicon tandem solar cells", NATURE ENERGY, NATURE PUBLISHING GROUP UK, LONDON, vol. 5, no. 11, 14 September 2020 (2020-09-14), pages 851-859 XP093102691, Bristol, GB, ISSN: 0022-3727, DOI: 10.1088 / 0022-3727 / 35 / 11 / 317 disclose silicon / perovskite tandem solar cells according to the prior art which comprises a perovskite layer, a Spiro-TTB layer, a nc-Si:H(p+) layer, nc-Si:H(n+) layer, an a-Si:H(n) layer, an a-Si:H(i) layer, a c-Si layer and an a-Si:H(p) layer.

[0006] For example, MAILOA JONATHAN P ET AL: "A 2-terminal perovskite / silicon multijunction solar cell enabled by a silicon tunnel junction", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 106, no. 12, 23 March 2015 (2015-03-23), XP012196129, ISSN: 0003-6951, DOI: 10.1063 / 1.4914179 & Mailoa Jonathan P ET AL: "Supplementary Online Materia) A 2-Terminal Perovskite / Silicon Multijunction Solar Cell Enabled by a Silicon Tunnel Junction", XP093102689, disclose silicon / perovskite tandem solar cells according to the prior art which comprises a LiF ARC layer, an Ag Nanowires layer, a Spiro-OMeTAD layer, a CH3NH3Pbl3 layer, a Mesoporous TiO2 layer, an ALD TiO2 layer, a n++ Si T-Junction layer, a p++ Si Emitter layer, a n-type Si Base layer and a n++Si BSF layer.

[0007] Nakanishi Akira ET AL: "Device simulation of CH 3 NH 3 Pbl 3 perovskite / heterojunction crystalline silicon monolithic tandem solar cells using an n-type a-Si:H / p-type c-Si 1- x O x :H tunnel junction : Device simulation of perovskite / heterojunction c-Si monolithic tandem solar cells", PHYSICA STATUS SOLIDI. A: APPLICATIONS AND MATERIALS SCIENCE, vol. 213, no. 7, 21 April 2016 (2016-04-21), pages 1997-2002, disclose a hydrogenated amorphous and microcrystalline silicon-based tunnel recombination junction applied to the tandem solar cells. To obtain excellent solar cell performance, the conduction band offset should be 0-0.6 eV, although the valence band offset does not affect the solar cell performance. Higher fill factor is expected when the n-type layer of the perovskite top cell is located on the tunnel recombination junction compared with the structure in which the hole conductor is located on the tunnel recombination junction.Summary

[0008] The present disclosure provides a silicon / perovskite tandem solar cell, including a silicon bottom cell and a perovskite top cell, wherein an amorphous silicon layer and a tunneling layer are sequentially arranged between a surface of the silicon bottom cell and a bottom surface of the perovskite top cell, the amorphous silicon layer being adjacent to the silicon bottom cell, and the tunneling layer being adjacent to the perovskite top cell; and wherein the tunneling layer is a doped microcrystalline silicon oxide layer, a doped carbonized microcrystalline silicon layer, or a doped carbonized microcrystalline silicon oxide layer.

[0009] In some embodiments, the amorphous silicon layer has a thickness of 1-3 nm; and the tunneling layer has a thickness of 10-30 nm.

[0010] The silicon bottom cell includes an N-type doped amorphous silicon layer, a first intrinsic amorphous silicon layer, an N-type silicon wafer, a second intrinsic amorphous silicon layer, and a P-type doped amorphous silicon layer arranged in sequence from top to bottom; and the tunneling layer is a P-type doped microcrystalline silicon oxide layer, a P-type doped carbonized microcrystalline silicon layer, or a P-type doped carbonized microcrystalline silicon oxide layer.

[0011] The silicon bottom cell includes a P-type doped amorphous silicon layer, a first intrinsic amorphous silicon layer, a P-type silicon wafer, a second intrinsic amorphous silicon layer, and an N-type doped amorphous silicon layer arranged in sequence from top to bottom; and the tunneling layer is an N-type doped microcrystalline silicon oxide layer, an N-type doped carbonized microcrystalline silicon layer, or an N-type doped carbonized microcrystalline silicon oxide layer.

[0012] The present disclosure also provides a preparation method of the silicon / perovskite tandem solar cell described above, including: forming the silicon bottom cell; depositing the amorphous silicon layer on an upper surface of the silicon bottom cell, and depositing the tunneling layer on a surface of the amorphous silicon layer, wherein the tunneling layer is a doped microcrystalline silicon oxide layer, a doped carbonized microcrystalline silicon layer, or a doped carbonized microcrystalline silicon oxide layer; and forming the perovskite top cell on a surface of the tunneling layer.

[0013] In some embodiments, a deposition condition for the amorphous silicon layer includes: a flow rate of a gas source SiH 4 in a range of 200-1000 sccm; a gas pressure in a range of 0.3-1 mbar, and a radio frequency power in a range of 300-800 W.

[0014] In some embodiments, the tunneling layer is a P-type doped microcrystalline silicon oxide layer, and a deposition condition for the tunneling layer includes: a flow ratio of H 2 , SiH 4 , CO 2 , and B 2 H 6 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is a P-type doped carbonized microcrystalline silicon layer, and a deposition condition for the tunneling layer includes: a flow ratio of H 2 , SiH 4 , CH 4 , and B 2 H 6 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is a P-type doped carbonized microcrystalline silicon oxide layer, and a deposition condition for the tunneling layer includes: a flow ratio of H 2 , SiH 4 , CO 2 , CH 4 , and B 2 H 6 of (200-500):(1-3):1:(1-3):(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.

[0015] In some embodiments, a method includes: texturing an N-type silicon wafer; depositing a first intrinsic amorphous silicon layer on a front surface of the N-type silicon wafer, and depositing a second intrinsic amorphous silicon layer on a back surface of the silicon wafer; and forming an N-type doped amorphous silicon layer on a surface of the first intrinsic amorphous silicon layer far away from the N-type silicon wafer, and forming a P-type doped amorphous silicon layer on a surface of the second intrinsic amorphous silicon layer far away from the N-type silicon wafer.

[0016] In some embodiments, the tunneling layer is an N-type doped microcrystalline silicon oxide layer, and a deposition condition for the tunneling layer includes: a flow ratio of H 2 , SiH 4 , CO 2 , and PH 3 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is an N-type doped carbonized microcrystalline silicon layer, and a deposition condition for the tunneling layer includes: a flow ratio of H 2 , SiH 4 , CH 4 , and PH 3 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is an N-type doped carbonized microcrystalline silicon oxide layer, and a deposition condition for the tunneling layer includes: a flow ratio of H 2 , SiH 4 , CO 2 , CH 4 , and PH 3 of (200-500):(1-3):1:(1-3):(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.

[0017] In some embodiments, a method of forming the silicon bottom cell includes: texturing a P-type silicon wafer; depositing a first intrinsic amorphous silicon layer on a front surface of the P-type silicon wafer, and depositing a second intrinsic amorphous silicon layer on a back surface of the silicon wafer; and forming a P-type doped amorphous silicon layer on a surface of the first intrinsic amorphous silicon layer far away from the P-type silicon wafer, and forming an N-type doped amorphous silicon layer on a surface of the second intrinsic amorphous silicon layer far away from the P-type silicon wafer.

[0018] In some embodiments, a deposition condition for the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer respectively includes: a flow ratio of H 2 to SiH 4 of (1-15):1, a gas pressure in a range of 0.3-1 mbar, and a radio frequency power in a range of 300-1200 W.

[0019] In some embodiments, a deposition condition for the P-type doped amorphous silicon layer 216 includes: a flow ratio of H 2 , SiH 4 , and B 2 H 6 of (5-10):1:(1-10), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.

[0020] In some embodiments, a deposition condition for the N-type doped amorphous silicon layer 212 includes: a flow ratio of H 2 , SiH 4 , and PH 3 of (5-10):1:(1-10), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.Brief Description of Drawings

[0021] In order to clarify the technical solutions of the examples of the present disclosure clearer, the accompanying drawings required to be used in the examples will be briefly introduced below. It should be understood that the following drawings only show some examples of the present disclosure, and therefore should not be construed as a limitation of the scope. Those of ordinary skill in the art can obtain other related drawings based on these drawings without creative work. FIG. 1 is a first structural schematic view of a silicon / perovskite tandem solar cell provided in an example of the present disclosure. FIG. 2 is a second structural schematic view of a silicon / perovskite tandem solar cell provided in an example of the present disclosure. FIG. 3 is a structural schematic view of a silicon / perovskite tandem solar cell provided in Comparative Example 1. FIG. 4 is a structural schematic view of a silicon / perovskite tandem solar cell provided in Comparative Example 2. FIG. 5 is a structural schematic view of a silicon / perovskite tandem solar cell provided in Comparative Example 3. FIG. 6 is a structural schematic view of a silicon / perovskite tandem solar cell provided in Comparative Example 4. FIG. 7 is a TEM image after step (6) of the preparation method of the silicon / perovskite tandem solar cell provided in Example 1 of the present disclosure. FIG. 8 is a diagram showing Raman spectra of the doped microcrystalline silicon oxide layers prepared by the respective preparation methods of the silicon / perovskite tandem solar cell provided in Example 1 and Example 2 of the present disclosure and Comparative Example 4.

[0022] Reference signs: 116, 212 - N-type doped amorphous silicon layer; 115, 215 - first intrinsic amorphous silicon layer; 114 - N-type silicon wafer; 113, 213 - second intrinsic amorphous silicon layer, 112, 216 - P-type doped amorphous silicon layer; 111, 211 - ITO conductive film layer; 134 - transparent conductive oxide layer; 133 - electron transport layer; 132 - perovskite layer; 131 - hole transport layer; 121, 221 - seed crystal silicon layer; 122 - P-type doped microcrystalline silicon oxide layer; 214 - P-type silicon wafer; 222 - N-type doped microcrystalline silicon oxide layer; 311 - silicon oxide layer; and 312 - aluminum oxide - silicon nitride layer.Detailed Description of Embodiments

[0023] In order to make the objects, technical solutions, and advantages of the examples of the present disclosure clearer, the technical solutions of the present disclosure are clearly and completely described below.

[0024] The general method of preparing a perovskite laminated cell includes: forming a P-type doped amorphous silicon layer on a back surface of an N-type silicon wafer, forming a silicon dioxide layer and an N-type doped amorphous silicon layer sequentially on a front surface of an N-type silicon wafer, then forming a perovskite cell on the N-type doped amorphous silicon layer as an illuminated face, with a hole transport layer of the perovskite cell being in contact with the N-type doped amorphous silicon layer, to obtain a perovskite laminated cell. After the perovskite laminated cell is prepared, its open circuit voltage and conversion efficiency are not high.

[0025] The applicant has studied and found that in the existing perovskite laminated cells, the N-type doped amorphous silicon layer has excessively high crystallinity and the hole transport layer is made of a P-type amorphous organic material, and therefore, the lattice mismatch between the N-type doped amorphous silicon layer and the hole transport layer after stacked leads to the problem of difficult tunneling, resulting in low open circuit voltage and low conversion efficiency of the perovskite laminated cells.

[0026] To address the shortcomings in the prior art, in some embodiments, the present disclosure provides a silicon / perovskite tandem solar cell and a preparation method thereof, which can improve the open circuit voltage and conversion efficiency of the cell.

[0027] In some embodiments, the present disclosure provides two silicon / perovskite tandem solar cells.

[0028] In some embodiments, the present disclosure provides a silicon / perovskite tandem solar cell, of which a silicon bottom cell is a silicon cell formed on an N-type silicon wafer. The schematic structural diagram of the solar cell is shown in FIG. 1.

[0029] The silicon cell includes an N-type doped amorphous silicon layer 116, a first intrinsic amorphous silicon layer 115, an N-type silicon wafer 114, a second intrinsic amorphous silicon layer 113, a P-type doped amorphous silicon layer 112, an ITO conductive film layer 111, and a silver electrode in ohmic contact with the ITO conductive film layer 111, which are arranged in sequence from top to bottom.

[0030] The perovskite top cell includes a transparent conductive oxide layer 134, an electron transport layer 133, a perovskite layer 132, and a hole transport layer 131 arranged in sequence from top to bottom. Here, the transparent conductive oxide layer 134 may be an IZO transparent conductive thin film layer, and a silver electrode in ohmic contact therewith is provided on an upper surface of the IZO transparent conductive thin film layer. The electron transport layer 133 may include a SnO 2 layer, a C60 layer, and a LiF layer that are stacked from top to bottom. The material of the hole transport layer 131 is Spiro-TTB or PTAA.

[0031] If the perovskite top cell is directly stacked on the silicon bottom cell, the N-type doped amorphous silicon layer is in direct contact with the hole transport layer. Since the N-type doped amorphous silicon layer has excessively high crystallinity and the hole transport layer is made of a P-type amorphous organic material, the lattice mismatch between the N-type doped amorphous silicon layer and the hole transport layer that are directly stacked leads to the problem of difficult tunneling, resulting in lower open circuit voltage and conversion efficiency of perovskite laminated cells.

[0032] In order to solve the above problems, in the present disclosure, a seed crystal silicon layer 121 and a tunneling layer are sequentially arranged between a surface of the silicon bottom cell and a bottom surface of the perovskite top cell, the seed crystal silicon layer is adjacent to the silicon bottom cell, and the tunneling layer is adjacent to the perovskite top cell. Here, the seed crystal silicon layer 121 is an amorphous silicon layer, and the tunneling layer is a P-type doped microcrystalline silicon oxide layer 122, a P-type doped carbonized microcrystalline silicon layer, or a P-type doped carbonized microcrystalline silicon oxide layer (an example in which the tunneling layer is a P-type doped microcrystalline silicon oxide layer 122 is illustrated in FIG. 1).

[0033] In other words, the seed crystal silicon layer 121 (amorphous silicon layer) and the tunneling layer (P-type doped microcrystalline silicon oxide layer 122, P-type doped carbonized microcrystalline silicon layer, or P-type doped carbonized microcrystalline silicon oxide layer) are sequentially arranged on the N-type doped amorphous silicon layer 116 of the silicon bottom cell, and then the hole transport layer 131 of the perovskite top cell is stacked on the tunneling layer. On the one hand, the seed crystal silicon layer 121 can, as a seed crystal silicon layer, induce the growth of a nucleation layer, so as to subsequently grow a large-grain microcrystalline silicon oxide layer, carbonized microcrystalline silicon layer, or carbonized microcrystalline silicon oxide layer. Moreover, this layer has high crystallinity and can accommodate more doping elements to increase the doping concentration. On the other hand, compared to the N-type doped polycrystalline layer 116, the P-type doped microcrystalline silicon oxide layer 122, P-type doped carbonized microcrystalline silicon layer, or P-type doped carbonized microcrystalline silicon oxide layer has lower crystallinity and a high density of defect states, thereby facilitating the movement of carriers, which can be used as a good tunneling material to facilitate the tunneling between the silicon bottom cell and the perovskite top cell, thereby improving the open circuit voltage and conversion efficiency of the cell. Optionally, the amorphous silicon layer has a thickness of 1-3 nm; and the P-type doped microcrystalline silicon oxide layer 122, P-type doped carbonized microcrystalline silicon layer, or P-type doped carbonized microcrystalline silicon oxide layer has a thickness of 10-30 nm. The very thin amorphous silicon layer basically does not affect the thickness of the perovskite laminated cell, and can form a favorable tunneling layer, so that the open circuit voltage and conversion efficiency of the cell are higher.

[0034] As an example, the thickness of the amorphous silicon layer is, for example, 1.1-2.9 nm, 1.2-2.8 nm, or 1.3-2.7 nm, such as 1 nm, 2 nm, or 3 nm. The thickness of the P-type doped microcrystalline silicon oxide layer 122 is, for example, 12-28 nm, 15-25 nm, or 18-22 nm, such as 10 nm, 15 nm, 20 nm, 25 nm, or 30 nm; the thickness of the P-type doped carbonized microcrystalline silicon layer is, for example, 12-28 nm, 15-25 nm, or 18-22 nm, such as 10 nm, 15 nm, 20 nm, 25 nm, or 30 nm, or the thickness of the P-type doped carbonized microcrystalline silicon oxide layer is, for example, 12-28 nm, 15-25 nm, or 18-22 nm, such as 10 nm, 15 nm, 20 nm, 25 nm, or 30 nm.

[0035] A preparation method of the silicon / perovskite tandem solar cell described above includes the following steps.

[0036] S110, forming the silicon bottom cell.

[0037] S111, texturing the N-type silicon wafer 114. Optionally, the N-type silicon wafer 114 with a size of 156.75 mm and a thickness of 180 µm is textured and cleaned.

[0038] S112, depositing the first intrinsic amorphous silicon layer 115 on a front surface of the N-type silicon wafer 114, and depositing the second intrinsic amorphous silicon layer 113 on a back surface of the N-type silicon wafer 114. Optionally, the first intrinsic amorphous silicon layer 115 and the second intrinsic amorphous silicon layer 113 are prepared by PECVD.

[0039] In some embodiments, a single-layer or laminated amorphous silicon films are deposited using SiH 4 diluted with H 2 or pure SiH 4 . Here, the deposition conditions for the intrinsic amorphous silicon layers include: a flow ratio of H 2 to SiH 4 of (1-15):1, for example, (2-14):1, (3-12):1, or (5-10):1; a gas pressure in a range of 0.3-1 mbar, for example, 0.4-0.9 mbar, 0.5-0.8 mbar, or 0.6-0.7 mbar; and a radio frequency power in a range of 300-1200 W, for example, 400-1100 W, 500-1000 W, or 600-800 W. The first intrinsic amorphous silicon layer 115 and the second intrinsic amorphous silicon layer 113 each having a thickness of 3-10 nm are thus obtained.

[0040] S113, forming, on a surface of the first intrinsic amorphous silicon layer 115 far away from the N-type silicon wafer 114, with the N-type doped amorphous silicon layer 116 being as an illuminated face. Optionally, the N-type doped amorphous silicon layer 116 is deposited on a surface of the first intrinsic amorphous silicon layer 115 far away from the N-type silicon wafer 114.

[0041] The deposition conditions for the N-type doped amorphous silicon layer 116 include: a flow ratio of H 2 , SiH 4 , and PH 3 of (5-10):1:(1-10), for example, (6-9):1:(2-8), (7-8):1:(3-7), or (7-8):1:(4-6); a gas pressure in a range of 0.5-2 mbar, for example, 0.6-1.9 mbar, 0.7-1.8 mbar, or 0.8-1.5 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W. The N-type doped amorphous silicon layer 116 with a thickness of 10-30 nm is thus obtained.

[0042] S114, forming the P-type doped amorphous silicon layer 112 on a surface of the second intrinsic amorphous silicon layer 113 far away from the N-type silicon wafer 114. Optionally, the P-type doped amorphous silicon layer 112 is deposited on a surface of the second intrinsic amorphous silicon layer 113 far away from the N-type silicon wafer 114.

[0043] The deposition conditions for the P-type doped amorphous silicon layer 112 include: a flow ratio of H 2 , SiH 4 , and B 2 H 6 of (5-10):1:(1-10), for example, (6-9):1:(2-8), (7-8):1:(3-7), or (7-8):1:(4-6); a gas pressure in a range of 0.5-2 mbar, for example, 0.6-1.9 mbar, 0.7-1.8 mbar, or 0.8-1.5 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W. The P-type doped amorphous silicon layer 112 with a thickness of 10-30 nm is thus obtained.

[0044] S115, depositing the ITO conductive film layer 111 with a thickness of 80-100 nm by a RPD or PVD method on a back surface of the P-type doped amorphous silicon layer 112.

[0045] S116, forming, as a backplate, Ag electrode by screen printing, and solidifying it to form a good ohmic contact between silver grid lines and the ITO conductive film layer 111. An HJT bottom cell is thus fabricated.

[0046] Here, the above-mentioned steps S115 and S116 may be performed in the described order, or may be performed after step S120, which is not limited in the present disclosure.

[0047] S120, depositing the seed crystal silicon layer 121 on an upper surface of the silicon bottom cell, and depositing the tunneling layer on a surface of the seed crystal silicon layer 121, in which the tunneling layer is the P-type doped microcrystalline silicon oxide layer 122, P-type doped carbonized microcrystalline silicon layer, or P-type doped carbonized microcrystalline silicon oxide layer. Optionally, an amorphous silicon layer is deposited on a surface of the N-type doped amorphous silicon layer 116, and the tunneling layer is deposited on a surface of the amorphous silicon layer.

[0048] Optionally, the deposition conditions for the amorphous silicon layer include: a flow rate of gas source SiH 4 in a range of 200-1000 sccm, for example, 300-900 sccm, 400-800 sccm, or 500-700 sccm, such as 200 sccm, 400 sccm, 500 sccm, 600 sccm, 800 sccm, or 1000 sccm; a gas pressure in a range of 0.3-1 mbar, for example, 0.4-0.9 mbar, 0.5-0.8 mbar, or 0.6-0.7 mbar, such as 0.3 mbar, 0.4 mbar, 0.5 mbar, 0.6 mbar, 0.7 mbar, 0.8 mbar, 0.9 mbar, or 1 mbar; and a radio frequency power in a range of 300-800 W, for example, 400- 700 W, 450-650 W or 500-600 W, such as 300 W, 400 W, 500 W, 600 W, 700 W, or 800 W. The amorphous silicon layer with a thickness of 1-3 nm is thus obtained.

[0049] In some embodiments, the tunneling layer is the P-type doped microcrystalline silicon oxide layer 122, and the deposition conditions therefor include: a flow ratio of H 2 , SiH 4 , CO 2 , and B 2 H 6 of (200-500):(1-3):1:(1-3), for example, (250-450):(1.2-2.8):1:(1.2-2.8), (280-420):(1.3-2.7):1:(1.3-2.7), or (320-380):(1.4-2.6):1:(1.4-2.6); a gas pressure in a range of 0.5-2 mbar, for example, 0.8-1.8 mbar, 1.0-1.6 mbar, or 1.2-1.4 mbar, such as 0.5 mbar, 1.0 mbar, 1.5 mbar, or 1.9 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W, such as 1100 W, 1300 W, 1500 W, 1700 W, 1900 W, 2100 W, 2300 W, 2500 W, 2700 W, or 2900 W. The P-type doped microcrystalline silicon oxide layer 122 with a thickness of 10-30 nm is thus obtained.

[0050] In some embodiments, the tunneling layer is the P-type doped carbonized microcrystalline silicon layer, and the deposition conditions therefor include: a flow ratio of H 2 , SiH 4 , CH 4 , and B 2 H 6 of (200-500):(1-3):1:(1-3), for example, (250-450):(1.2-2.8):1:(1.2-2.8), (280-420):(1.3-2.7):1:(1.3-2.7) or (320-380):(1.4-2.6):1:(1.4-2.6); a gas pressure in a range of 0.5-2 mbar, for example, 0.7-1.9 mbar, 1.0-1.6 mbar, or 1.2-1.4 mbar, such as 0.5 mbar, 1.0 mbar, 1.5 mbar, or 1.9 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W, such as 1100 W, 1300 W, 1500 W, 1700 W, 1900 W, 2100 W, 2300 W, 2500 W, 2700 W, or 2900 W. In other embodiments, the carbon source is not limited to methane, but may also be ethane or propane.

[0051] In some embodiments, the tunneling layer is the P-type doped carbonized microcrystalline silicon oxide layer, and the deposition conditions therefor include: a flow ratio of H 2 , SiH 4 , CO 2 , CH 4 , and B 2 H 6 of (200-500):(1-3):1:(1-3):(1-3), for example, (250-450):(1.2-2.8):1:(1.2-2.8): (1.2-2.8), (280-420):(1.3-2.7):1:(1.3-2.7):(1.3-2.7), or (320-380):(1.4-2.6):1: (1.4-2.6):(1.4-2.6); a gas pressure in a range of 0.5-2 mbar, for example, 0.7-1.9 mbar, 1.0-1.6 mbar, or 1.2-1.4 mbar, such as 0.5 mbar, 1.0 mbar, 1.5 mbar, or 1.9 mbar; a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W, such as 1100 W, 1300 W, 1500 W, 1700 W, 1900 W, 2100 W, 2300 W, 2500 W, 2700 W, or 2900 W. In other embodiments, the carbon source is not limited to methane, but may also be ethane or propane.

[0052] S130, forming the perovskite top cell on a surface of the tunneling layer.

[0053] Optionally, the hole transport layer 131, the perovskite layer 132, the electron transport layer 133, and the transparent conductive oxide layer 134 are sequentially deposited on the surface of the tunneling layer.

[0054] For example, a Spiro-TTB layer, Perovskite layer, a LiF layer, a C60 layer, a SnO 2 layer, a TCO layer, and a silver electrode are sequentially deposited on the surface of the tunneling layer.

[0055] In some embodiments, the present disclosure also provides another silicon / perovskite tandem solar cell, of which a silicon bottom cell is a silicon cell formed on a P-type silicon wafer 214. The schematic structural diagram of the solar cell is shown in FIG. 2.

[0056] The silicon cell includes a P-type doped amorphous silicon layer 216, a first intrinsic amorphous silicon layer 215, a P-type silicon wafer 214, a second intrinsic amorphous silicon layer 213, an N-type doped amorphous silicon layer 212, an ITO conductive film layer 211, and a silver electrode in ohmic contact with the ITO conductive film layer 211, which are arranged in sequence from top to bottom.

[0057] The structure of the perovskite top cell is the same as that of the perovskite top cell of the silicon bottom cell of the first kind of silicon / perovskite tandem solar cell, which will not be repeated here.

[0058] If the perovskite top cell is directly stacked on the silicon bottom cell, the P-type doped amorphous silicon layer is in direct contact with the electron transport layer. Since the P-type doped amorphous silicon layer has excessively high crystallinity and the electron transport layer is made of an N-type amorphous material, the lattice mismatch between the P-type doped amorphous silicon layer and the electron transport layer that are directly stacked leads to the problem of difficult tunneling, resulting in lower open circuit voltage and conversion efficiency of perovskite laminated cells.

[0059] In order to solve the above problems, in the present disclosure, a seed crystal silicon layer 221 and a tunneling layer are sequentially arranged between a surface of the silicon bottom cell and a bottom surface of the perovskite top cell, the seed crystal silicon layer is adjacent to the silicon bottom cell, and the tunneling layer is adjacent to the perovskite top cell. Here, the seed crystal silicon layer 221 is an amorphous silicon layer, and the tunneling layer is an N-type doped microcrystalline silicon oxide layer 222, an N-type doped carbonized microcrystalline silicon layer, or an N-type doped carbonized microcrystalline silicon oxide layer (an example in which the tunneling layer is an N-type doped microcrystalline silicon oxide layer 222 is illustrated in FIG. 2).

[0060] In other words, the seed crystal silicon layer 221 (amorphous silicon layer) and the tunneling layer (N-type doped microcrystalline silicon oxide layer 222, N-type doped carbonized microcrystalline silicon layer, or N-type doped carbonized microcrystalline silicon oxide layer) are sequentially arranged on the P-type doped amorphous silicon layer 216 of the silicon bottom cell, and then the hole transport layer 131 of the perovskite top cell is stacked on the tunneling layer. On the one hand, the seed crystal silicon layer 221 can, as a seed crystal silicon layer, induce the growth of a nucleation layer, so as to subsequently grow a large-grain microcrystalline silicon oxide layer, carbonized microcrystalline silicon layer, or carbonized microcrystalline silicon oxide layer. Moreover, this layer has high crystallinity and can accommodate more doping elements to increase the doping concentration. On the other hand, compared to the P-type doped polycrystalline layer 216, the N-type doped microcrystalline silicon oxide layer 222, N-type doped carbonized microcrystalline silicon layer, or N-type doped carbonized microcrystalline silicon oxide layer has low crystallinity and a high density of defect states, thereby facilitating the movement of carriers. They can be used as a good tunneling material to facilitate the tunneling between the silicon bottom cell and the perovskite top cell, thereby improving the open circuit voltage and conversion efficiency of the cell.

[0061] Optionally, the amorphous silicon layer has a thickness of 1-3 nm; and the N-type doped microcrystalline silicon oxide layer 222, N-type doped carbonized microcrystalline silicon layer, or N-type doped carbonized microcrystalline silicon oxide layer has a thickness of 10-30 nm. The very thin amorphous silicon layer basically does not affect the thickness of the perovskite laminated cell, and can form a favorable tunneling layer, so that the open circuit voltage and conversion efficiency of the cell are higher.

[0062] As an example, the thickness of the amorphous silicon layer is, for example, 1.1-2.9 nm, 1.2-2.8 nm, or 1.3-2.7 nm, such as 1 nm, 2 nm, or 3 nm. The thickness of the N-type doped microcrystalline silicon oxide layer 222 is, for example, 12-28 nm, 15-25 nm, or 18-22 nm, such as 10 nm, 15 nm, 20 nm, 25 nm, or 30 nm; the thickness of the N-type doped carbonized microcrystalline silicon layer is, for example, 12-28 nm, 15-25 nm, or 18-22 nm, such as 10 nm, 15 nm, 20 nm, 25 nm, or 30 nm, or the thickness of the N-type doped carbonized microcrystalline silicon oxide layer is, for example, 12-28 nm, 15-25 nm, or 18-22 nm, such as 10 nm, 15 nm, 20 nm, 25 nm, or 30 nm.

[0063] A preparation method of the silicon / perovskite tandem solar cell described above includes the following steps.

[0064] S210, forming the silicon bottom cell.

[0065] S211, texturing the P-type silicon wafer 214. Optionally, the P-type silicon wafer 214 with a size of 156.75 mm and a thickness of 180 µm is textured and cleaned.

[0066] S212, depositing the first intrinsic amorphous silicon layer 215 on a front surface of the P-type silicon wafer 214, and depositing the second intrinsic amorphous silicon layer 213 on a back surface of the P-type silicon wafer 214. Optionally, the first intrinsic amorphous silicon layer 215 and the second intrinsic amorphous silicon layer 213 are prepared by PECVD.

[0067] In some embodiments, a single-layer or laminated amorphous silicon films are deposited using SiH 4 diluted with H 2 or pure SiH 4 . Here, the deposition conditions for the intrinsic amorphous silicon layers include: a flow ratio of H 2 to SiH 4 of (1-15):1, for example, (2-14):1, (3-12):1, or (5-10):1; a gas pressure in a range of 0.3-1 mbar, for example, 0.4-0.9 mbar, 0.5-0.8 mbar, or 0.6-0.7 mbar; and a radio frequency power in a range of 300-1200 W, for example, 400-1100 W, 500-1000 W, or 600-800 W. The first intrinsic amorphous silicon layer 215 and the second intrinsic amorphous silicon layer 213 each having a thickness of 3-10 nm are thus obtained.

[0068] S213, forming, on a surface of the first intrinsic amorphous silicon layer 215 far away from the P-type silicon wafer 214, the P-type doped amorphous silicon layer 216 as an illuminated face. Optionally, the P-type doped amorphous silicon layer 216 is deposited on a surface of the first intrinsic amorphous silicon layer 215 far away from the P-type silicon wafer 214.

[0069] The deposition conditions for the P-type doped amorphous silicon layer 216 include: a flow ratio of H 2 , SiH 4 , and B 2 H 6 of (5-10):1:(1-10), for example, (6-9):1:(2-8), (7-8):1:(3-7), or (7-8):1:(4-6); a gas pressure in a range of 0.5-2 mbar, for example, 0.6-1.9 mbar, 0.7-1.8 mbar, or 0.8-1.5 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W. The P-type doped amorphous silicon layer 216 with a thickness of 10-30 nm is thus obtained.

[0070] S214, forming the N-type doped amorphous silicon layer 212 on a surface of the second intrinsic amorphous silicon layer 213 far away from the P-type silicon wafer 214. Optionally, the N-type doped amorphous silicon layer 212 is deposited on a surface of the second intrinsic amorphous silicon layer 213 far away from the P-type silicon wafer 214.

[0071] The deposition conditions for the N-type doped amorphous silicon layer 212 include: a flow ratio of H 2 , SiH 4 , and PH 3 of (5-10):1:(1-10), for example, (6-9):1:(2-8), (7-8):1:(3-7), or (7-8):1:(4-6); a gas pressure in a range of 0.5-2 mbar, for example, 0.6-1.9 mbar, 0.7-1.8 mbar, or 0.8-1.5 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W. The N-type doped amorphous silicon layer 212 with a thickness of 10-30 nm is thus obtained.

[0072] S215, depositing the ITO conductive film layer 211 with a thickness of 80-100 nm by a RPD or PVD method on a back surface of the N-type doped amorphous silicon layer 212.

[0073] S216, forming, as a backplate, Ag electrode by screen printing, and solidifying it to form a good ohmic contact between silver grid lines and the ITO conductive film layer 211. An HJT bottom cell is thus fabricated.

[0074] Here, the above-mentioned steps S215 and S216 may be performed in the described order, or may be performed after step S220, which is not limited in the present disclosure.

[0075] S220, depositing the seed crystal silicon layer 221 on an upper surface of the silicon bottom cell, and depositing the tunneling layer on a surface of the seed crystal silicon layer 221, in which the tunneling layer is the N-type doped microcrystalline silicon oxide layer 222, N-type doped carbonized microcrystalline silicon layer, or N-type doped carbonized microcrystalline silicon oxide layer. Optionally, an amorphous silicon layer is deposited on a surface of the P-type doped amorphous silicon layer 216, and the tunneling layer is deposited on a surface of the amorphous silicon layer.

[0076] Optionally, the deposition conditions for the amorphous silicon layer include: a flow rate of gas source SiH 4 in a range of 200-1000 sccm, for example, 300-900 sccm, 400-800 sccm, or 500-700 sccm, such as 200 sccm, 400 sccm, 500 sccm, 600 sccm, 800 sccm, or 1000 sccm; a gas pressure in a range of 0.3-1 mbar, for example, 0.4-0.9 mbar, 0.5-0.8 mbar, or 0.6-0.7 mbar, such as 0.3 mbar, 0.4 mbar, 0.5 mbar, 0.6 mbar, 0.7 mbar, 0.8 mbar, 0.9 mbar, or 1 mbar; and a radio frequency power in a range of 300-800 W, for example, 400- 700 W, 450-650 W, or 500-600 W, such as 300 W, 400 W, 500 W, 600 W, 700 W, or 800 W. The amorphous silicon layer with a thickness of 1-3 nm is thus obtained.

[0077] In some embodiments, the tunneling layer is the N-type doped microcrystalline silicon oxide layer 222, and the deposition conditions therefor include: a flow ratio of H 2 , SiH 4 , CO 2 , and PH 3 of (200-500):(1-3):1:(1-3), for example, (250-450):(1.2-2.8):1:(1.2-2.8), (280-420):(1.3-2.7):1:(1.3-2.7), or (320-380):(1.4-2.6):1:(1.4-2.6); a gas pressure in a range of 0.5-2 mbar, for example, 0.8-1.8 mbar, 1.0-1.6 mbar, or 1.2-1.4 mbar, such as 0.5 mbar, 1.0 mbar, 1.5 mbar, or 1.9 mbar; and a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W, such as 1100 W, 1300 W, 1500 W, 1700 W, 1900 W, 2100 W, 2300 W, 2500 W, 2700 W, or 2900 W. The N-type doped microcrystalline silicon oxide layer 222 with a thickness of 10-30 nm is thus obtained.

[0078] In some embodiments, the tunneling layer is an N-type doped carbonized microcrystalline silicon layer, and the deposition conditions therefor include: a flow ratio of H 2 , SiH 4 , CH 2 , and PH 3 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; In other embodiments, the carbon source is not limited to methane, but may also be ethane or propane.

[0079] In some embodiments, the tunneling layer is the N-type doped carbonized microcrystalline silicon oxide layer, and the deposition conditions therefor include: a flow ratio of H 2 , SiH 4 , CO 2 , CH 4 , and PH 3 of (200-500):(1-3):1:(1-3):(1-3), for example, (250-450):(1.2-2.8):1:(1.2-2.8):(1.2-2.8), (280-420):(1.3-2.7):1:(1.3-2.7):(1.3-2.7), or (320-380):(1.4-2.6):1:(1.4-2.6):(1.4-2.6); a gas pressure in a range of 0.5-2 mbar, for example, 0.7-1.9 mbar, 1.0-1.6 mbar, or 1.2-1.4 mbar, such as 0.5 mbar, 1.0 mbar, 1.5 mbar, or 1.9 mbar; a radio frequency power in a range of 1000-3000 W, for example, 1200-2800 W, 1500-2500 W, or 1800-2200 W, such as 1100 W, 1300 W, 1500 W, 1700 W, 1900 W, 2100 W, 2300 W, 2500 W, 2700 W, or 2900 W. In other embodiments, the carbon source is not limited to methane, but may also be ethane or propane.

[0080] S230, forming the perovskite top cell on a surface of the tunneling layer.

[0081] Optionally, the hole transport layer 131, the perovskite layer 132, the electron transport layer 133, and the transparent conductive oxide layer 134 are sequentially deposited on the surface of the tunneling layer.

[0082] For example, a Spiro-TTB layer, Perovskite layer, a LiF layer, a C60 layer, a SnO 2 layer, a TCO layer, and a silver electrode are sequentially deposited on the surface of the tunneling layer.

[0083] In the present disclosure, the amorphous silicon layer can, as a seed crystal silicon layer, induce the growth of a nucleation layer, so as to subsequently grow a large-grain microcrystalline silicon oxide layer, carbonized microcrystalline silicon layer, or carbonized microcrystalline silicon oxide layer. Moreover, this layer has high crystallinity and can accommodate more doping elements to increase the doping concentration. In addition, compared to a doped polycrystalline layer, the doped microcrystalline silicon oxide layer, doped carbonized microcrystalline silicon layer, or doped carbonized microcrystalline silicon oxide layer has low crystallinity and a high density of defect states, facilitating the movement of carriers. They can be used as a good tunneling material to facilitate the tunneling between the silicon bottom cell and the perovskite top cell, thereby improving the open circuit voltage and conversion efficiency of the cell.

[0084] When the amorphous silicon layer is used as a seed layer of the P-type doped microcrystalline silicon oxide layer, P-type doped carbonized microcrystalline silicon layer, or P-type doped carbonized microcrystalline silicon oxide layer, in the formation process of the P-type doped microcrystalline silicon oxide layer, P-type doped carbonized microcrystalline silicon layer, or P-type doped carbonized microcrystalline silicon oxide layer, the amorphous silicon layer may first induce the growth of a nucleation layer, which then continues to deposit to allow the formation of a large-grain microcrystalline silicon layer. Moreover, the P-type doping concentration therein is relatively high, and thus a tunneling layer with a high density of defect states and multiple carrier recombination centers is formed, which facilitates the tunneling between the N-type silicon bottom cell and the perovskite top cell.

[0085] When the amorphous silicon layer is used as a seed layer of the N-type doped microcrystalline silicon oxide layer, N-type doped carbonized microcrystalline silicon layer, or N-type doped carbonized microcrystalline silicon oxide layer, in the formation process of the N-type doped microcrystalline silicon oxide layer, N-type doped carbonized microcrystalline silicon layer, or N-type doped carbonized microcrystalline silicon oxide layer, the amorphous silicon layer may first induce the growth of a nucleation layer, which then continues to deposit to allow the formation of a large-grain microcrystalline silicon layer. Moreover, the N-type doping concentration therein is relatively high, and thus a tunneling layer with a high density of defect states and multiple carrier recombination centers was formed, which facilitates the tunneling between the P-type silicon bottom cell and the perovskite top cell.

[0086] Furthermore, in the preparation method of the silicon / perovskite tandem solar cell of the present disclosure, the seed crystal silicon layer is first formed on the silicon bottom cell, and during the formation process of the tunneling layer, the seed crystal silicon layer may induce the growth of a nucleation layer, so as to subsequently grow a large-grain microcrystalline silicon oxide layer, carbonized microcrystalline silicon layer, or carbonized microcrystalline silicon oxide layer. Moreover, this layer has high crystallinity and can accommodate more doping elements to increase the doping concentration. In addition, compared to a doped polycrystalline layer, the doped microcrystalline silicon oxide layer, doped carbonized microcrystalline silicon layer, or doped carbonized microcrystalline silicon oxide layer has lower crystallinity and a high density of defect states, thereby facilitating the movement of carriers. They can be used as a good tunneling material to facilitate the tunneling between the silicon bottom cell and the perovskite top cell, thereby improving the open circuit voltage and conversion efficiency of the cell.

[0087] In order to make the objects, technical solutions, and advantages of the embodiments of the present disclosure clearer, the technical solutions of the examples of the present disclosure will be clearly and completely described below. Those without indication of the specific conditions in the examples are carried out according to the conventional conditions or the conditions recommendation by the manufacturer. The used reagents or instruments without indication of the manufacturer are all conventional products that can be purchased from the market.Example 1

[0088] As shown in FIG. 1, a preparation method of the silicon / perovskite tandem solar cell provided by the present disclosure included the following steps. (1) An N-type silicon wafer 114 with a size of 156.75 mm and a thickness of 180 µm was textured and cleaned. (2) A first intrinsic amorphous silicon layer 115 was deposited on a front surface of the N-type silicon wafer 114, and a second intrinsic amorphous silicon layer 113 was deposited on a back surface of the silicon wafer. Here, the deposition conditions for the intrinsic amorphous silicon layers included: a flow ratio of H 2 to SiH 4 of 5:1, a gas pressure of 0.6 mbar, and a radio frequency power of 800 W. Thereby, the first intrinsic amorphous silicon layer 115 and the second intrinsic amorphous silicon layer 113 each having a thickness of 8 nm were obtained. (3) The N-type doped amorphous silicon layer 116 was deposited on a surface of the first intrinsic amorphous silicon layer 115 far away from the N-type silicon wafer 114. The deposition conditions for the N-type doped amorphous silicon layer 116 included: a flow ratio of H 2 , SiH 4 , and PH 3 of 8:1:5, a gas pressure of 1 mbar, and a radio frequency power of 2000 W. Thereby, the N-type doped amorphous silicon layer 116 having a thickness of 20 nm was obtained. (4) A P-type doped amorphous silicon layer 112 was deposited on a surface of the second intrinsic amorphous silicon layer 113 far away from the N-type silicon wafer 114. The deposition conditions for the P-type doped amorphous silicon layer 112 included: a flow ratio of H 2 , SiH 4 , and B 2 H 6 of 8:1:5, a gas pressure of 1 mbar, and a radio frequency power of 12000 W. Thereby, the P-type doped amorphous silicon layer 112 having a thickness of 10-30 nm was obtained. (5) A seed crystal silicon layer 121, which was an amorphous silicon layer, was deposited on a surface of the N-type doped amorphous silicon layer 116, and the deposition conditions therefor included: a flow rate of gas source SiH 4 of 800 sccm; a gas pressure of 0.7 mbar, and a radio frequency power of 500 W. Thereby, a thin film of the amorphous silicon layer having a thickness of 2 nm was obtained. (6) A P-type doped microcrystalline silicon oxide layer 122 was deposited on a surface of the amorphous silicon layer. The deposition conditions for the P-type doped microcrystalline silicon oxide layer 122 included: a flow ratio of H 2 , SiH 4 , CO 2 , and B 2 H 6 of 400:2:1:2, a gas pressure of 1 mbar, and a radio frequency power of 2000 W. Thereby, the P-type doped microcrystalline silicon oxide layer 122 having a thickness of 20 nm was obtained. (7) An ITO conductive film layer 111 with a thickness of 90 nm was deposited by a PVD method on a back surface of the P-type doped amorphous silicon layer 112. (8) An Ag electrode was formed, as a backplate, by screen printing, and solidified to form a good ohmic contact between silver grid lines and the ITO conductive film layer 111. An HJT bottom cell was thus fabricated. (9) A Spiro-TTB layer, a Perovskite layer, a LiF layer, a C60 layer, a SnO 2 layer, a TCO layer, and a silver electrode were sequentially deposited on the surface of the P-type doped microcrystalline silicon oxide layer 122. Example 2

[0089] As shown in FIG. 2, a preparation method of the silicon / perovskite tandem solar cell provided by the present disclosure included the following steps. (1) A P-type silicon wafer 214 with a size of 156.75 mm and a thickness of 180 µm was textured and cleaned. (2) A first intrinsic amorphous silicon layer 215 was deposited on a front surface of the P-type silicon wafer 214, and a second intrinsic amorphous silicon layer 213 was deposited on a back surface of the P-type silicon wafer 214. Here, the deposition conditions for the intrinsic amorphous silicon layers included: a flow ratio of H 2 to SiH 4 of 5:1, a gas pressure of 0.6 mbar, and a radio frequency power of 800 W. Thereby, the first intrinsic amorphous silicon layer 215 and the second intrinsic amorphous silicon layer 213 each having a thickness of 8 nm were obtained. (3) A P-type doped amorphous silicon layer 216 was deposited on a surface of the first intrinsic amorphous silicon layer 215 far away from the P-type silicon wafer 214. The deposition conditions for the P-type doped amorphous silicon layer 216 included: a flow ratio of H 2 , SiH 4 , and B 2 H 6 of 8:1:5, a gas pressure of 1 mbar, and a radio frequency power of 2000 W. Thereby, the P-type doped amorphous silicon layer 216 having a thickness of 20 nm was obtained. (4) An N-type doped amorphous silicon layer 212 was deposited on a surface of the second intrinsic amorphous silicon layer 213 far away from the P-type silicon wafer 214. The deposition conditions for the N-type doped amorphous silicon layer 212 included: a flow ratio of H 2 , SiH 4 , and PH 3 of 8:1:5, a gas pressure of 1 mbar, and a radio frequency power of 12000 W. Thereby, the N-type doped amorphous silicon layer 212 having a thickness of 10-30 nm was obtained. (5) A seed crystal silicon layer 221, which was an amorphous silicon layer, was deposited on a surface of the P-type doped amorphous silicon layer 216, and the deposition conditions therefor included: a flow rate of gas source SiH 4 of 800 sccm; a gas pressure of 0.7 mbar, and a radio frequency power of 500 W. Thereby, a thin film of the amorphous silicon layer having a thickness of 2 nm was obtained. (6) An N-type doped microcrystalline silicon oxide layer 222 was deposited on a surface of the seed crystal silicon layer 221. The deposition conditions for the N-type doped microcrystalline silicon oxide layer 222 included: a flow ratio of H 2 , SiH 4 , CO 2 , and PH 3 of 400:2:1:2, a gas pressure of 1 mbar, and a radio frequency power of 2000 W. Thereby, the N-type doped microcrystalline silicon oxide layer 222 having a thickness of 20 nm was obtained. (7) An ITO conductive film layer 211 with a thickness of 90 nm was deposited by a PVD method on a back surface of the N-type doped amorphous silicon layer 212. (8) An Ag electrode was formed, as a backplate, by screen printing, and solidified to form a good ohmic contact between silver grid lines and the ITO conductive film layer 211. An HJT bottom cell was thus fabricated. (9) A Spiro-TTB layer, a Perovskite layer, a LiF layer, a C60 layer, a SnO 2 layer, a TCO layer, and a silver electrode were sequentially deposited on a surface of the N-type doped microcrystalline silicon oxide layer 222. Example 3

[0090] Example 3 is an example improved based on Example 1, and its difference from Example 1 lies in that in step (6), a P-type doped carbonized microcrystalline silicon layer was deposited on a surface of the amorphous silicon layer, and the deposition conditions for the P-type doped carbonized microcrystalline silicon layer included: a flow ratio of H 2 , SiH 4 , CH 4 , and B 2 H 6 of 400:2:1:2, a gas pressure of 1 mbar, and a radio frequency power of 2000 W. Thereby, the P-type doped carbonized microcrystalline silicon layer having a thickness of 20 nm was obtained.Example 4

[0091] Example 4 is an example improved based on Example 1, and its difference from Example 1 lies in that in step (6), a P-type doped carbonized microcrystalline silicon oxide layer was deposited on a surface of the amorphous silicon layer, and the deposition conditions for the P-type doped carbonized microcrystalline silicon oxide layer included: a flow ratio of H 2 , SiH 4 , CO 2 , CH 4 , and B 2 H 6 of 400:2:1:2:2, a gas pressure of 1 mbar, and a radio frequency power of 2000 W. Thereby, the P-type doped carbonized microcrystalline silicon oxide layer 122 having a thickness of 20 nm was obtained.Comparative Example 1

[0092] FIG. 3 is a schematic view of a layer structure of a silicon / perovskite tandem solar cell provided in Comparative Example 1. As shown in FIG. 3, the difference between Comparative Example 1 and Example 1 lies in that in Comparative Example 1, step (5) and step (6) in Example 1 were not carried out.Comparative Example 2

[0093] FIG. 4 is a schematic view of a layer structure of a silicon / perovskite tandem solar cell provided in Comparative Example 2. As shown in FIG. 4, the difference between Comparative Example 2 and Example 1 lies in that in Comparative Example 2, step (5) and step (6) in Example 1 were not carried out. The layer structure of the silicon bottom cell included, from top to bottom, an N-type doped amorphous silicon layer 116, a silicon oxide layer 311, an N-type silicon wafer 114, a P-type doped amorphous silicon layer 112, an aluminum oxide - silicon nitride layer 312, and a silver electrode disposed thereon.Comparative Example 3

[0094] FIG. 5 is a schematic view of a layer structure of a silicon / perovskite tandem solar cell provided in Comparative Example 3. As shown in FIG. 5, the difference between Comparative Example 3 and Example 1 lies in that in Comparative Example 3, step (5) in Example 1 was not carried out.Comparative Example 4

[0095] FIG. 6 is a schematic view of a layer structure of a silicon / perovskite tandem solar cell provided in Comparative Example 4. As shown in FIG. 6, the difference between Comparative Example 4 and Example 1 lies in that in Comparative Example 4, step (6) in Example 1 was not carried out.Comparative Example 5

[0096] The difference between Comparative Example 5 and Example 2 lies in that in Comparative Example 5, step (5) and step (6) in Example 2 were not carried out.Test Example

[0097] For the preparation method provided in Example 1, after step (6) was completed, the resultant was tested by TEM, and the test results are shown in FIG. 7. It can be seen from FIG. 7 that the lattice arrangement of the P-type doped microcrystalline silicon oxide layer was partly long-range ordered and partly disordered, the P-type doped microcrystalline silicon oxide layer and the N-type doped amorphous silicon layer under the amorphous silicon layer can form a PN junction, of which built-in electric field can promote hole tunneling. In addition, the PN junction can promote the Voc superposition of the bottom cell and the top cell, thereby increasing the open circuit voltage of the entire laminated cell and improving cell efficiency thereof.

[0098] FIG. 8 is a diagram showing Raman spectra of the doped microcrystalline silicon oxide layers prepared by the respective preparation methods of the silicon / perovskite tandem solar cells provided in Example 1 and Example 2 of the present disclosure and Comparative Example 4. In FIG. 8, the control group is a diagram of a Raman spectrum (Xc=8.49%) of the P-type doped microcrystalline silicon oxide layer provided in Comparative Example 4; the experimental group-1 is a diagram of a Raman spectrum (Xc=29.54%) of the P-type doped microcrystalline silicon oxide layer provided in Example 1; and the experimental group-2 is a diagram of a Raman spectrum (Xc=28.48%) of the N-type doped microcrystalline silicon oxide layer provided in Example 2. It can be seen from FIG. 8 that the seed crystal silicon layer (the amorphous silicon layer provided) can increase the crystallinity of the doped microcrystalline silicon oxide layer on the upper surface thereof.

[0099] The silicon / perovskite tandem solar cells provided in Examples 1 to 4 and Comparative Examples 1 to 5 were respectively tested for their performance, as shown in Table 1, according to the following detection method. Their electrical performance parameters such as the conversion efficiency (Eff), the open circuit voltage (Uoc), the short circuit current (Isc), and the fill factor (FF) of the silicon / perovskite tandem solar cells were tested at 25°C under the conditions of AM 1.5 and 1 standard sunlight, using BERGER online I-V test system. The test results are shown in Table 1. Table 1 Performance of silicon / perovskite tandem solar cellsEff (conversion efficiency)Uoc (open circuit voltage)Isc (short circuit current)FF (fill factor)Example 1105.16%243.09%47.30%91.46%Example 294.90%224.25%47.10%89.85%Example 3105.80%245.18%46.50%92.80%Example 4110.64%246.33%48.35%92.90%Comparative Example 1100.00%100.00%100.00%100.00%Comparative Example 285.22%205.52%47.55%87.20%Comparative Example 347.65%130.78%47.28%77.06%Comparative Example 4101.20%238.15%47.10%90.23%Comparative Example 543.80%80.23%90.33%60.45%

[0100] It can be seen from Table 1 that in the silicon / perovskite tandem solar cells provided by the present disclosure, the amorphous silicon layer and the doped microcrystalline silicon oxide layer are sequentially arranged between the silicon bottom cell and the perovskite cell, which can improve the conversion efficiency and the open circuit voltage of the cell.

[0101] Comparing Example 1 with Comparative Examples 1 and 2, it can be seen that the amorphous silicon layer and the P-type doped microcrystalline silicon oxide layer sequentially arranged between the silicon bottom cell and the perovskite cell can improve the conversion efficiency and the open circuit voltage of the cell.

[0102] Comparing Example 1 with Comparative Examples 3 and 4, it can be seen that when only the P-type doped microcrystalline silicon oxide layer is arranged between the silicon bottom cell and the perovskite cell, the conversion efficiency of the cell is not increased significantly; when only the amorphous silicon layer is arranged between the silicon bottom cell and the perovskite cell, the conversion efficiency of the cell is reduced; and the amorphous silicon layer and the P-type doped microcrystalline silicon oxide layer have a certain synergistic effect when sequentially arranged between the silicon bottom cell and the perovskite cell, and thus can improve the conversion efficiency and the open circuit voltage of the cell.

[0103] Comparing Example 2 and Comparative Example 5, it can be seen that the amorphous silicon layer and the N-type doped microcrystalline silicon oxide layer sequentially arranged between the silicon bottom cell and the perovskite cell can improve the conversion efficiency and the open circuit voltage of the cell.

[0104] From Examples 1, 3, and 4, it can be seen that the P-type doped microcrystalline silicon oxide layer, the P-type doped carbonized microcrystalline silicon layer, and the P-type doped carbonized microcrystalline silicon oxide layer, when each combined with the amorphous silicon layer, can improve the conversion efficiency and the open circuit voltage of the cell.

[0105] The examples described above are some, but not all, of the examples of the present disclosure. The detailed description of the examples of the present disclosure is not intended to limit the claimed scope of the present disclosure but to represent only selected examples of the present disclosure.Industrial Applicability

[0106] The present disclosure provides a silicon / perovskite tandem solar cell and a preparation method thereof. The cell of the present disclosure in which the seed crystal silicon layer is an amorphous silicon layer, and the tunneling layer is a doped microcrystalline silicon oxide layer facilitates the tunneling between the silicon bottom cell and the perovskite top cell, thereby improving the open circuit voltage and conversion efficiency of the cell. The cell has excellent application performance and broad market prospects.

Claims

1. A silicon / perovskite tandem solar cell, comprising a silicon bottom cell and a perovskite top cell, wherein an amorphous silicon layer (121, 221) and a tunneling layer are sequentially arranged between a surface of the silicon bottom cell and a bottom surface of the perovskite top cell, wherein the amorphous silicon layer (121, 221) is adjacent to the silicon bottom cell, and the tunneling layer is adjacent to the perovskite top cell; and wherein the tunneling layer is a doped microcrystalline silicon oxide layer, a doped carbonized microcrystalline silicon layer, or a doped carbonized microcrystalline silicon oxide layer, and - wherein the silicon bottom cell comprises an N-type doped amorphous silicon layer (116, 212), a first intrinsic amorphous silicon layer (115, 215), an N-type silicon wafer (114), a second intrinsic amorphous silicon layer (113, 213), and a P-type doped amorphous silicon layer (112, 216) arranged sequentially from top to bottom; and the tunneling layer is a P-type doped microcrystalline silicon oxide layer (122), a P-type doped carbonized microcrystalline silicon layer, or a P-type doped carbonized microcrystalline silicon oxide layer; or - wherein the silicon bottom cell comprises a P-type doped amorphous silicon layer (112, 216), a first intrinsic amorphous silicon layer (115, 215), a P-type silicon wafer (214), a second intrinsic amorphous silicon layer (113, 213), and an N-type doped amorphous silicon layer (116, 212) arranged sequentially from top to bottom; and the tunneling layer is an N-type doped microcrystalline silicon oxide layer (222), an N-type doped carbonized microcrystalline silicon layer, or an N-type doped carbonized microcrystalline silicon oxide layer.

2. The silicon / perovskite tandem solar cell according to claim 1, wherein the amorphous silicon layer has a thickness of 1-3 nm; and the tunneling layer has a thickness of 10-30 nm.

3. A preparation method of the silicon / perovskite tandem solar cell according to claim 1 or 2, comprising: forming the silicon bottom cell; depositing the amorphous silicon layer on an upper surface of the silicon bottom cell, and depositing the tunneling layer on a surface of the amorphous silicon layer, wherein the tunneling layer is the doped microcrystalline silicon oxide layer, the doped carbonized microcrystalline silicon layer, or the doped carbonized microcrystalline silicon oxide layer; and forming the perovskite top cell on a surface of the tunneling layer.

4. The preparation method according to claim 3, wherein a deposition condition for the amorphous silicon layer comprises: a flow rate of a gas source SiH4 in a range of 200-1000 sccm; a gas pressure in a range of 0.3-1 mbar, and a radio frequency power in a range of 300-800 W.

5. The preparation method according to claim 3, wherein the tunneling layer is a P-type doped microcrystalline silicon oxide layer (122), and a deposition condition for the tunneling layer comprises: a flow ratio of H2, SiH4, CO2, and B2H6 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is a P-type doped carbonized microcrystalline silicon layer, and a deposition condition for the tunneling layer comprises: a flow ratio of H2, SiH4, CH4, and B2H6 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is a P-type doped carbonized microcrystalline silicon oxide layer, and a deposition condition for the tunneling layer comprises: a flow ratio of H2, SiH4, CO2, CH4, and B2H6 of (200-500):(1-3):1:(1-3):(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.

6. The preparation method according to claim 5, wherein a method of forming the silicon bottom cell comprises: texturing an N-type silicon wafer (114); depositing a first intrinsic amorphous silicon layer (115, 215) on a front surface of the N-type silicon wafer (114), and depositing a second intrinsic amorphous silicon layer (113, 213) on a back surface of the silicon wafer; and forming an N-type doped amorphous silicon layer (116, 212) on a surface of the first intrinsic amorphous silicon layer (115, 215) far away from the N-type silicon wafer (114), and forming a P-type doped amorphous silicon layer (112, 216) on a surface of the second intrinsic amorphous silicon layer (113, 213) far away from the N-type silicon wafer (114).

7. The preparation method according to claim 3, wherein the tunneling layer is an N-type doped microcrystalline silicon oxide layer (222), and a deposition condition for the tunneling layer comprises: a flow ratio of H2, SiH4, CO2, and PH3 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is an N-type doped carbonized microcrystalline silicon layer, and a deposition condition for the tunneling layer comprises: a flow ratio of H2, SiH4, CH4, and PH3 of (200-500):(1-3):1:(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W; or the tunneling layer is an N-type doped carbonized microcrystalline silicon oxide layer, and a deposition condition for the tunneling layer comprises: a flow ratio of H2, SiH4, CO2, CH4, and PH3 of (200-500):(1-3):1:(1-3):(1-3), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.

8. The preparation method according to claim 7, wherein a method of forming the silicon bottom cell comprises: texturing a P-type silicon wafer (214); depositing a first intrinsic amorphous silicon layer (115, 215) on a front surface of the P-type silicon wafer (214), and depositing a second intrinsic amorphous silicon layer (113, 213) on a back surface of the silicon wafer; and forming a P-type doped amorphous silicon layer (112, 216) on a surface of the first intrinsic amorphous silicon layer (115, 215) far away from the P-type silicon wafer (214), and forming an N-type doped amorphous silicon layer (116, 212) on a surface of the second intrinsic amorphous silicon layer (113, 213) far away from the P-type silicon wafer (214).

9. The preparation method according to claim 6 or 8, wherein a deposition condition for the first intrinsic amorphous silicon layer (115, 215) and the second intrinsic amorphous silicon layer (113, 213) respectively comprises: a flow ratio of H2 to SiH4 of (1-15): 1, a gas pressure in a range of 0.3-1 mbar, and a radio frequency power in a range of 300-1200 W.

10. The preparation method according to claim 6 or 8, wherein a deposition condition for the P-type doped amorphous silicon layer (112, 216) comprises: a flow ratio of H2, SiH4, and B2H6 of (5-10):1:(1-10), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.

11. The preparation method according to claim 6 or 8, wherein a deposition condition for the N-type doped amorphous silicon layer (116, 212) comprises: a flow ratio of H2, SiH4, and PH3 of (5-10):1:(1-10), a gas pressure in a range of 0.5-2 mbar, and a radio frequency power in a range of 1000-3000 W.