Positioning module, and positioning apparatus having such a positioning module

EP4476032A1Pending Publication Date: 2024-12-18PHYSIK INSTRUMENTE (PI) GMBH & CO KG
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Patent Information

Application Number
EP2023710202
Authority / Receiving Office
EP · EP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-02-07
Filing Date
2023-02-03
Publication Date
2024-12-18

AI Technical Summary

Technical Problem

Existing positioning devices occupy large installation spaces and are mechanically loaded by forces, restricting their area of use due to the need for variable leg elements and integrated drives.

Method used

A positioning module with constant-length leg elements and separate drive modules, utilizing sliding drive elements and force compensation devices to reduce mechanical loading and optimize space usage, allowing for modular expansion and six degrees of freedom movement.

Benefits of technology

The solution results in a lightweight, space-efficient positioning module that minimizes the introduction of external forces into the drive unit, enabling versatile applications and increased precision, while allowing for the creation of larger working spaces compared to traditional hexapods.

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Abstract

The invention relates to a positioning module (1) with a base (2) and a positioning element (3) which is movable relative to the base (2), wherein the positioning element (3) is coupled via a constant-length leg element (4) to the base (2), and the leg element (4) is connected via an articulated device (5) to the positioning element (3), and the leg element (4) is assigned a drive module (6) which is arranged on the base with a drive unit (62), with a drive element (64) which is displaceable along a movement direction by the drive unit (62) and is connected via an articulated device (5') to the leg element (4), and with a force compensation device (7) which is connected to the drive element (64), wherein a defined force can be exerted on the drive element (64) along the movement direction of the latter by means of the force compensation device (7).
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Description

Description Positioning module and positioning device with such a positioning module

[0001] The invention relates to a positioning module according to claim 1 and a positioning device with at least one such positioning module according to claim 10.

[0002] From the applicant's publication DE 102019 111 026 B4, a positioning device is known in which a positioning element can be positioned in six degrees of freedom relative to a base by means of length-variable and electrically driven leg elements.

[0003] A certain disadvantage of the positioning device known from DE 102019 111 026 B4 is the comparatively large installation space occupied by the leg elements, as well as the mechanical stress on the drives integrated in the leg elements caused by forces, in particular weight and load forces. Another certain disadvantage of the positioning device known from DE 102019 111 026 B4 is its limited range of applications.

[0004] The present invention is based on the objective of providing a versatile positioning module that occupies a small installation space and in which loads on the drive caused by external forces such as load or weight forces can be reduced.

[0005] This problem is solved by a positioning module according to claim 1, wherein the subsequent subclaims describe at least suitable further developments.

[0006] The positioning module according to the invention comprises a base and a positioning element that is movable relative to the base. The positioning element is coupled to the base via at least one leg element of constant or unchanging length, the leg element being connected to the positioning element via a joint. Each leg element is connected to a separate drive module, i.e., a drive module belonging to each leg element, arranged at the base. This drive module includes a drive unit and a movement along a direction of motion driven by the drive unit. The drive element is assigned to a movable component. This component is connected to the associated leg element via a further joint device, so that in the case of multiple leg elements, each leg element can be moved separately. The drive element is connected to a force compensation device, which allows a defined force to be exerted on the drive element along its direction of movement.

[0007] If the indefinite article is used for a feature in the text – as above and, where applicable, below – then a subsequent mention of the same feature using the definite article will explicitly refer to the quantity implied by the indefinite article, without this constituting a corresponding restriction to that specific quantity. In this context, the following should also be included with reference to the positioning module described above: - In the case of multiple leg elements, either only some of the leg elements or all leg elements are connected to the positioning element via a joint device. - In the case of multiple leg elements, each leg element is assigned a separate drive module located at the base. - In the case of multiple leg elements and correspondingly multiple drive elements, either only some of the drive elements are connected to the respective leg element via a joint mechanism, or all drive elements are connected to the leg elements via a joint mechanism. - In the case of multiple leg elements and a corresponding number of drive modules or drive elements, either only a portion of the drive elements are connected to a respective force compensation device, or all drive modules or drive elements are connected to a respective force compensation device.

[0008] This is because the drive module and the corresponding drive unit of a leg element are arranged at the base and on the joint with the When the drive element acts on the joint device connected to it, i.e., when it moves, a so-called foot-point movement of the leg element results, which itself is length-invariant or constant. Thus, the joint device facing the base does not have to bear the weight of the drive and can therefore be lighter, i.e., less massive. Furthermore, the leg element(s) can be made significantly more delicate and also lighter, so that an overall weight-reduced and space-optimized design for the positioning module according to the invention is possible. Due to the additional force compensation device connected to the drive element, the introduction of forces, in particular load and weight forces, into the drive unit can either be completely prevented or at least significantly reduced.

[0009] A positioning module according to the invention, which can be used on its own as a 2D planar positioning device or 2D planar adjuster, can be supplemented by further positioning modules according to the invention in order to obtain a positioning device optimized for the respective application (modular design). For example, a 4D adjuster can be realized with two of the positioning modules according to the invention.

[0010] It can be advantageous for the force compensation device, or one of the force compensation devices, to comprise at least one force compensation module, and for at least one force compensation module to be connected to the base. This allows for a particularly space-saving or integrated design of the positioning module. The foregoing also encompasses a positioning module in which, in the case of multiple force compensation devices, only one, several, or all force compensation modules are connected to the base. It also encompasses situations where, in the case of multiple force compensation devices, each device has a different number of force compensation modules.

[0011] It can also be advantageous if the defined force acting on the respective drive element by means of the force compensation device, or one or more of the force compensation devices, or all of the force compensation devices, is generated by magnets, compressed air, or hydraulic fluid. Regarding the use of magnetic forces for force compensation, in addition to permanent magnets, electromagnets or a combination of permanent and electromagnets are also conceivable.

[0012] It can also be advantageous for the force compensation module, or one or more of the force compensation modules, or all of the force compensation modules, to have a sleeve made of a material that is at least partially magnetic or magnetizable, and a rod made of a material that is at least partially magnetic or magnetizable, projecting at least partially into the sleeve, with the sleeve and the rod being mounted so as to be rotatable relative to each other. It can be particularly advantageous for two shell segments or hollow cylinder segments made of a magnetic or magnetizable material to be inserted into the sleeve of the force compensation module, and for these shell or hollow cylinder segments to span an angle of essentially 90°. This allows for a comparatively simple implementation of adjustable or variable force compensation using magnetic forces.

[0013] It can also be advantageous for the force compensation device, or one or more of the force compensation devices, or even all of the force compensation devices, to have a lever transmission mechanism. A lever transmission allows even higher loads, which would otherwise act on or be introduced into the drive, to be compensated.

[0014] Furthermore, it can be advantageous for the drive unit, or one or more of the drive units, or even all drive units, to include an electromagnetic drive. This includes... Voice coil direct drives, for example, have the advantage of operating without friction and allowing for high dynamics. They also permit higher positioning precision and are more cost-effective than, for example, spindle drives.

[0015] Furthermore, it can be advantageous for at least one of the two joint devices associated with a leg element to be designed such that it allows the leg element to tilt about two mutually perpendicular tilting axes and to rotate about its own longitudinal axis. It can be advantageous for at least one of the joint devices to comprise a universal joint and a reversible joint, whereby the aforementioned joint types can be designed with surfaces of the corresponding joint elements or joint sections that are displaceable relative to each other or movable relative to each other and thereby rub or slide against each other, in the sense of conventional universal joints or reversible joints, or they can be formed by a solid-body joint or several cooperating solid-body joints, or by a combination of conventional and solid-body joints.The two tilting possibilities of a leg element provided by a cardan joint, coupled with the twisting or rotation possibility provided by a rotary joint, allow in particular the realization of a positioning element with six degrees of freedom.

[0016] The invention further relates to a positioning device for positioning an object with at least one positioning module as sketched above. It can be particularly advantageous for the positioning device to have three positioning modules, each of which has two leg elements forming a pair of legs, the positioning modules being arranged relative to each other such that each pair of legs projects through another pair of legs and each pair of legs is arranged perpendicular to the other pairs of legs, and the positioning element of each positioning module being connected to the positioning elements of the other two positioning modules, and the three positioning elements together forming a Form a positioning body which has six degrees of freedom of movement.

[0017] In this context, it can be advantageous that each of the positioning elements corresponds to a platform with a substantially flat platform surface, wherein the respective platform assigned to a pair of legs is arranged substantially perpendicular to its leg elements, and the three interconnected platforms together form a positioning body in which each of the platform surfaces is arranged substantially perpendicular to the two other platform surfaces and thereby forms part of a cube or a subcube.

[0018] Furthermore, it can be advantageous for the three positioning modules to be arranged such that their bases together form a cube-like base body with an essentially cube-shaped recess. Within this cube-shaped recess, the partially cube-shaped positioning body is positioned such that the corresponding edges of the base body and the positioning body are parallel to each other, and the positioning body essentially completes the base body into a full cube. By placing the positioning body in a corner of the cube-shaped base body, a working point is analogously created in the same corner of the base body, resulting in a maximized workspace. This contrasts with conventional hexapods, where the working point is located at the center of a work platform. This working point can be moved symmetrically in all spatial directions and rotated around all spatial axes.If translational and rotational movements are to be performed around a different operating point, a reverse transformation to the original operating point is necessary (mathematically, back-calculation). This means that the full travel or angle is not possible at the new operating point. However, since many applications have an operating point that is not in the center of the work platform but at an edge, their working range is severely limited with conventional hexapods.

[0019] The advantages and expediencies of the invention will become clearer from the following description of preferred embodiments with reference to the figures. These show:

[0020] Fig. 1: Perspective view of a positioning module according to the invention with two leg elements

[0021] Fig. 2: Illustration of the positioning module according to Fig. 1 without positioning element

[0022] Fig. 3: Perspective view of a single drive module of the positioning module according to Fig. 1 and Fig. 2

[0023] Fig. 4: Perspective view of a single drive module for a positioning module according to the invention with an alternative embodiment for the force compensation device

[0024] Fig. 5: Perspective view of the drive module according to Fig. 3 from different viewing directions

[0025] Fig. 6: Perspective view of a leg element of a positioning module with joint elements arranged on it.

[0026] Fig. 7: Perspective view of a leg element of a positioning module with joint devices arranged on it in the form of solid joints.

[0027] Fig. 8: Positioning device with a total of three positioning modules according to Fig. 1 in the form of a hexapod or hexapod cube

[0028] Fig. 1 shows a perspective view of an embodiment of a positioning module 1 according to the invention. Two drive modules 6, each with a drive unit 62 in the form of a linear direct drive implemented by a single-phase voice coil motor (VCM), are arranged side-by-side or one behind the other in a recess or cutout of a base 2. Each drive module 62 is indirectly connected to the base 2 via a base plate not visible in Fig. 1. In its most general form, the positioning module 1 can have only one drive module 6. The drive unit 62 is not limited to direct drives or to VCMs or single-phase VCMs. The alternative use of a three-phase linear motor, which allows for larger travel distances, is conceivable. Furthermore, it is conceivable that the The drive unit 62 is implemented via a spindle driven by an electric motor, enabling high drive forces and also possessing effective self-locking properties. Self-locking, in general, refers to the friction-induced resistance to slipping or twisting of two adjacent bodies, and, in the context of drives, the corresponding resistance to unintentional adjustment or movement of the drive element, particularly when the drive unit is de-energized.

[0029] Furthermore, piezoelectric motors in the form of stepping drives, ultrasonic drives, or stick-slip / inertial drives, which also possess self-locking properties, are possible for the drive unit. In addition, drive units in the form of actuators based on various actuator principles are also conceivable, such as hydraulic or pneumatic actuators, electromechanical actuators, shape memory alloy actuators, etc. It is conceivable that the positioning movement of the actuators could be amplified via lever transmission devices.

[0030] Each of the two drive units 62 has a drive element 64, which represents the (linearly) movable part of the respective drive unit 62. The drive element 64 is guided linearly by a guide device located outside the drive unit 62 and laterally to it, which is concealed in Fig. 1 and therefore not visible or only partially visible. However, it is also conceivable to use a centrally arranged guide device in the form of a guide sleeve. Furthermore, it is possible to equip or connect the corresponding guide device with a lever mechanism.

[0031] The respective drive element 64 is connected to a force compensation device 7, which is described in more detail below, via a connecting section 64-1 projecting laterally from it. The force compensation device 7 is particularly suitable for compensating for load forces, and especially weight forces, acting on the The aim is to minimize, completely eliminate, or even overcompensate for the force acting on the drive unit 62 by the drive element 64, particularly in one direction, i.e., to generate a greater force than the load forces acting on the drive element 64, essentially in a direction opposite to the direction of the load forces. In this way, adverse effects due to the mounting orientation of the positioning module 1 (e.g., standing, suspended from a ceiling, or mounted on a wall) can be reduced or even eliminated. This is particularly advantageous for positioning modules whose drive unit or... The drive units exhibit little or no self-locking capability, meaning that energy must be supplied to maintain a specific position of the drive element 64 when external forces are applied to it. This results in power loss, which can lead to undesirable heating of the positioning module 1. Self-locking is particularly important when the energy source powering the drive element 64 is lost.

[0032] A first joint assembly 5' is arranged on each of the two drive elements 64. This assembly is a combination of a universal joint 52' and a rotary joint 54', with both joints being designed such that, during joint movement, bearing surfaces or corresponding sections of the joints move relative to each other, thus constituting classic or conventional joint elements. It is also conceivable to provide only a universal joint for each joint assembly 5'. Furthermore, each joint assembly 5' can also comprise other joint types, for example, a ball joint, or combinations of different joint types.

[0033] Each of the joint devices 5' is connected to a substantially cylindrical leg element 4, which is purely passive and of constant length. The two leg elements 4 together form a leg pair 40, and a corresponding leg pair plane is defined by the two central axes of the leg elements 4.

[0034] At the end of each leg element 4 furthest from the base, a second joint device 5 is attached, each configured as a universal joint 52, which is identical to the universal joint 52' of the joint device 5' of the same leg element 4. In contrast to the first joint device 5', the second joint device 5 of the same leg element 4 does not have a pivot joint.

[0035] The joint devices 5 in Fig. 1 are partially or completely obscured by the positioning element 3 attached to them and are therefore difficult or impossible to see. For better visibility, please refer to Fig. 2. While, as explained above, the joint devices 5, 5' of a leg element differ in that joint device 5' has both a universal joint and a pivot joint, whereas joint device 5 has only a universal joint, it is conceivable that the joint devices 5, 5' of a leg element 4 are completely identical. It is also conceivable that joint devices 5 and 5' differ not only in type but also in shape, size, and material. Furthermore, it is conceivable to use other types of joints, such as a ball joint, for joint devices 5, 5'.

[0036] By means of the joint devices 5 and 5' arranged at both end sections of each leg element 4, each leg element 4 can perform both tilting about two rotation axes arranged perpendicular to each other, as well as rotations about its longitudinal axis arranged perpendicular to the two rotation axes responsible for tilting.

[0037] A substantially plate-shaped and flat positioning element 3 is connected to the two joint devices 5. This positioning element is provided with bores or threaded holes for attaching an element to be positioned by means of the positioning module. For positioning or adjusting the positioning element 3, either one or the other drive unit 62, or both drive units 62 together, are controlled, so that either only one of the two drive elements 64 performs a linear movement, or both The drive elements 64 jointly perform a linear movement, the directions of which can be the same or opposite to each other. The linear movements of the drive elements 64 cause corresponding movements of the associated joint devices 5, so that the respective end sections of the leg elements connected to the joint devices 5 are moved. This is also referred to as a foot-point movement of the leg elements 4. Since the leg elements 4 are of constant length, the distance between the joint elements 5, 5' arranged at both end sections of the leg elements 4 also remains constant during the resulting movement of the leg elements 4.

[0038] Fig. 2 is almost identical to Fig. 1; the only difference is that in Fig. 2, the positioning element 3 of the positioning module has been omitted to allow a better view of the joint devices 5. Because Figs. 1 and 2 are otherwise identical, the description of the features in Fig. 2 is omitted, and reference is made to the description of Fig. 1.

[0039] Fig. 3 shows a single drive module 6 of the positioning module according to Fig. 1 or Fig. 2. Here, the drive unit 62 of the drive module 6 is fixedly connected to a base plate 22 by means of screws (not visible in Fig. 3), which in turn is fixedly connected to the base 2 by means of screws. The drive element 64, which is linearly moved by the drive unit 62 in the form of a single-phase VCM, is coupled via a connecting section 64-1 to a force compensation module 72 of a force compensation device 7, wherein the force compensation module 72 is fixedly connected to the base plate 22. The force compensation module 72 comprises a hollow cylindrical sleeve 722 made of a magnetically conductive metal, on the inner circumferential surface or inner wall of which two permanent magnets 726 in the form of shell segments are arranged offset from each other along the circumferential direction and opposite each other.Hollow cylinder segments are provided, each hollow cylinder segment essentially spanning a circular angle of 90°. It is conceivable to use shell or hollow cylinder segments. to use those that span a circular angle other than 90°. It is also conceivable to use more than two shell or hollow cylinder segments made of a permanent magnetic material.

[0040] A cylindrical rod 724 made of a permanent magnetic material, flattened on two opposite sides, partially dips into the essentially cylindrical cavity formed by the shell segments within the sleeve 722, the rod 724 being firmly connected to and moved with the connecting section 64-1 of the drive element 64.

[0041] Due to the magnetic interaction between the permanent magnets 726 and the rod 724, which is partially immersed in them or sectionally arranged between them, a force is generated that, depending on the orientation of the permanent magnets 726 and the rod 724 relative to each other, points either towards the base plate 22 or away from the base plate. The aforementioned orientation of the permanent magnets 726 and the rod 724 relative to each other, which is adjustable and whose adjustability will be discussed in more detail below, allows, depending on the application and thus on the spatial orientation of the respective drive module 6 or the drive unit 62, for the reduction, elimination, or even overcompensation of, for example, weight forces acting on the drive unit 62 via the drive element 64.

[0042] It is not absolutely necessary to use permanent magnets 726 for the elements inserted into the sleeve 722; elements made of magnetizable materials are also conceivable. Conversely, if permanent magnets 726 are used inside the sleeve 722, the rod 724 can be made of a magnetizable material.

[0043] The drive element 64 is connected on the side opposite the connecting section 64-1 to a guide slide 82 of a guide device 8 in the form of a ball-bearing linear guide. The stationary part of the guide device 8 is attached to The guide base 84 is attached to the base plate 22 and is oriented substantially perpendicular to it. Similarly, the guide device 8 is arranged substantially perpendicular to the base plate 22, so that the guide carriage 82 is movably mounted and linearly guided along a direction that is substantially perpendicular to the base plate 22. Thus, the drive element 64 connected to the guide carriage 82 is also linearly guided.

[0044] It is conceivable to use other types of linear guides instead of a guide device 8 in the form of a ball-revolving linear guide; these include, for example, cross-roller guided linear guides, sliding guides, hydrodynamic guides, air-bearing guides or magnetically supported guides.

[0045] The position of the drive element 64 can be determined indirectly, for example, by measuring the position of the guide carriage 82 using suitable sensors, but a direct measurement of the drive element's position is also possible. Incremental or absolute encoders are conceivable for these direct or indirect position measurements. The position of the positioning element 3 can then be determined from the position of the drive element(s) measured in this way. However, it is also possible to determine the position and orientation of the positioning element by direct measurement at the positioning element itself, for example, using an interferometer.

[0046] Part of the sensor system can be arranged on a printed circuit board 9, which is positioned opposite the guide base 84 and the guide carriage 82. The printed circuit board 9 can also contain power electronics, such as the driver for the drive device 62, as well as other electronic components or modules, such as the controller for the drive unit or communication elements. By arranging the printed circuit board on the guide base 84, an integrated and space-saving design of the drive module 6, and thus also of the positioning module 1, is achieved.

[0047] It is conceivable to arrange the circuit board 9 at a different location than the guide base 84 of the drive module 6, for example, in the recess or cutout provided in the base 2 for accommodating the drive modules 6. It is also conceivable to house only the power electronics on the circuit board 9, while communication electronics are housed on a separate circuit board, and this separate circuit board is also located at a different location on the positioning module. Generally, it is preferred to arrange the power electronics as far away as possible from the drive unit(s) 62 on or in the base 2. This has the advantage that heat generated in the power electronics can be dissipated via the base 2 and thus is not introduced into the drive unit(s) 62, which has a positive effect on positioning accuracy.

[0048] Fig. 4 shows a perspective view of a single drive module 6 for a positioning module according to the invention with an alternative embodiment for the force compensation device 7. Since the drive module 6 shown in Fig. 4 is very similar to the one shown in Fig. 3, only the specific differences in comparison with Fig. 3 will be discussed below.

[0049] The force compensation device 7 here—in contrast to the drive module according to Fig. 3—has two force compensation modules 72, which are spaced apart and arranged parallel to each other, with each sleeve 722 having a square outer contour in cross-section and being column-shaped overall. The use of two force compensation modules 7 allows for the compensation of larger forces compared to the use of only one identically designed force compensation module. The use of two or more force compensation modules can also be advantageous for space reasons, as each force compensation module can then be made smaller. When using more than one force compensation module 7, it is conceivable that only one force compensation module or only a portion of the force compensation modules 7 are adjustable with respect to the Compensation force is, while the other force compensation module(s) exerts a constant and non-variable compensation force.

[0050] Inside, each sleeve 722 has two offset and oppositely arranged permanent magnets 726 in the form of shell or hollow cylinder segments, each spanning a circular angle of essentially 90° or extending over a circular angle of 90°. The two permanent magnets 726 of one force compensation module 72 are arranged offset by essentially 90° from the permanent magnets 726 of the other force compensation module 72.

[0051] The essentially plate-shaped drive element 64 is firmly connected to the rod 724 of the respective force compensation module 72 via a screw connection.

[0052] Fig. 5 shows a perspective view of the drive module according to Fig. 3, but from a different angle, so that the underside of the base plate 22 with corresponding details is visible, which are not visible in Fig. 3. In the following, only these differences will be discussed, and for the remaining features, reference is made to the description of Fig. 3.

[0053] The force compensation module 72 has an adjustment device 728, which essentially comprises two semicircular and mirror-image recesses 222 in the base plate 22. The head of a screw 728-1 is arranged in one of the two recesses, bearing against and supported by a web section within the corresponding recess 222. The screw 728-1, which interacts with the sleeve 722, serves to fix it in its desired orientation or position. With the screw connection loosened, the head of the screw 728-1 can be moved along and through the respective recess, thereby simultaneously moving or rotating the sleeve 722. Once the desired rotational adjustment or orientation of the sleeve 722 and the permanent magnets arranged in the sleeve is achieved, the screw 728-1 is tightened. Tightening the screw 728-1 fixes the sleeve 722 and thus fixes the position of the permanent magnets relative to the rod 724 which is inserted into the sleeve 722. A defined tensile or compressive force can be set via the relative position of the permanent magnets and the rod 724, which acts on the drive element 64 due to the fixed connection of the rod 724 with the drive element 64 and, depending on the set force direction, pulls the drive element 64 – in the case of a tensile force – in one direction towards the drive unit 62 or in one direction towards the base plate 22, or pushes the drive element 64 – in the case of a compressive force – in a direction pointing away from the drive unit 62 or from the base plate 22.

[0054] Other methods for adjusting the compensation force of a force compensation module 7 are conceivable. The adjustment can be made from the rear, as shown in Fig. 5, or from the front, as shown in Fig. 4. Furthermore, the sleeve 722 can be rotated, as shown in Fig. 5, or the rod 724, as shown in Fig. 4. It is also conceivable to integrate a rotary motor that can move the rod 724 or the sleeve 722. The rotary motor could then, for example, receive the motor current of a VCM as its input and thus rotate the rod or the sleeve until the motor current of the VCM is minimized.

[0055] Fig. 6 shows a perspective view of the isolated leg element 4 of the positioning module 1 according to Fig. 1 or Fig. 2 with the joint devices 5 and 5' arranged on it. While the joint device 5' intended for arrangement on the drive element has a combination of a universal joint 52' and a swivel joint 54', the joint device 5 intended for connection with the positioning element 3 comprises only a universal joint 52. However, it is conceivable that the joint device 5 also additionally has a swivel joint, so that the joint devices 5 and 5' on the leg element 4 are a mirror image. As already mentioned, other joint types, for example ball joints, can be used for one of the joint devices 5, 5' or for both joint devices 5, 5' of a leg element 4.

[0056] Fig. 7 shows a perspective view of a leg element 4 for a positioning module according to the invention, in which the joint devices arranged thereon are in the form of solid joints. The joint device 5 is designed as a universal joint 52 and comprises two solid rotary joints 522, whose axes intersect at a right angle. The joint device 5', on the other hand, comprises, in addition to a universal joint 52', which is identical in construction to the universal joint 52, a rotary joint 54' designed as a solid joint, which connects to the universal joint 52' in one direction towards the universal joint 52.

[0057] A positioning device 100 with a total of three positioning modules 1 according to Fig. 1 in the form of a hexapod or a hexapod cube is shown in Fig. 8. Each of the three positioning modules 1 has two leg elements 4 forming a pair of legs. The positioning modules 1 are arranged relative to each other such that each pair of legs projects through another pair of legs and each pair of legs is arranged perpendicular to the other pairs of legs.

[0058] The positioning element 3 assigned to each pair of legs corresponds to a platform with a substantially flat platform surface, wherein the platform or the platform surface is arranged substantially perpendicular to the leg elements 4 of the respective positioning module 1.

[0059] Each of the three positioning elements 3 is connected to the other two positioning elements 3 in such a way that the three positioning elements 3 together form a positioning body 110, in which each of the platform surfaces is arranged essentially perpendicular to the other two platform surfaces and thus forms part of a cube or hollow cube. Due to the arrangement of the positioning modules 1 relative to each other and the structure of each individual positioning module 1, the positioning body 110 has six degrees of freedom.

[0060] The three positioning modules 1 are arranged relative to each other such that they or their bases 2 together form a cube-like base body 120, which has an essentially cube-shaped recess 130 in one of its corners. within this recess 130, the partially cube-shaped positioning body 110 is arranged such that the partially cube-shaped positioning body 110 fills the recess 130 in such a way that it almost completes the cube-like base body 120 to form a complete cube or hexapod cube, wherein the respective edges of the base body 120 and the positioning body 110 run parallel to each other or the respective edges of the positioning body 110 correspond to an extension of the respective edges of the base body 120.

[0061] In other words, the positioning body 110 forms a smaller cube, or rather the contours of a smaller cube, located at a vertex of the larger, cube-like base body 120. The resulting identical edge lengths of the cube, or hexapod cube, formed by the combination of the positioning body 110 and the base body 120 create absolute symmetry. This ensures that the range of motion of the positioning body 110, which begins at an edge of the cube, is the same in all directions. The operating point, also called the pivot point, is thus located at a vertex of the hexapod cube. This offers numerous advantages over a hexapod where the operating point is located in the center of the work platform, as described above.

[0062] The symmetrical design of the hexapod cube allows for any mounting position, such as hanging or standing, without restrictions on access, work area, etc. For example, it is possible to screw several hexapod cubes together or place them so close together that all of them can work on the same workpiece. Furthermore, due to its symmetry, the hexapod has three identical work surfaces, offset by 90° to each other, to which any tools can be mounted.

[0063] Reference symbol list 1 positioning module 2 Basic 22 Base plate 222 recesses (of the base plate 22) 3 Positioning element 4 leg element 5.5' Articulated joint 52, 52* Cardan joint (of the joint device 5, 5') 522, 522' Solid-state swivel joint (of the cardan joint 5, 5') 54, 54* Swivel joint (of the joint device 5, 5') 6 Drive module 62 Drive unit (of drive module 6) 64 Drive element (of the drive unit 62) 64-1 Connecting section (of the drive element 64) 7 Force compensation device 72 Force compensation module (of the force compensation device 7 722 Sleeve (of the force compensation module 72) 724 Rod (of the force compensation module 72) 726 permanent magnets (of the force compensation module 72) 728 Adjustment device (of the force compensation module 72) 728-1 Screw (of the adjusting device 728) 8 Guide device 82 Guide carriage (of the guide device 8) 84 Guide base (of the guide device 8) 9 printed circuit board 100 Positioning device 110 Positioning bodies (of the positioning device 100) 120 base bodies (of the positioning device 100) 130 Recess (of the base body 120)

Claims

Claims Claim 1 Positioning module (1) with a base (2) and a positioning element (3) that is movable relative to the base (2), wherein the positioning element (3) is coupled to the base (2) via a leg element (4) of constant length, and the leg element (4) is connected to the positioning element (3) via a joint device (5), and the leg element (4) is associated with a drive module (6) arranged on the base, comprising a drive unit (62), a drive element (64) which is displaceable by the drive unit (62) along a direction of movement and which is connected to the leg element (4) via a joint device (5'), and a force compensation device (7) connected to the drive element (64), wherein a defined force can be exerted on the drive element (64) along the direction of movement by means of the force compensation device (7). Claim 2 Positioning module according to claim 1 , characterized in that the force compensation device (7) comprises a force compensation module (72) which is directly or indirectly connected to the base (2). Claim 3 Positioning module according to claim 1 or 2, characterized in that the defined force acting on the drive element (64) by means of the force compensation device (7) is generated by magnets or by compressed air or by hydraulic fluid. Claim 4 Positioning module according to claim 3, characterized in that the force compensation module (72) has a sleeve (722) made of a magnetic or magnetizable material, and a rod (724) made of a magnetic or magnetizable material projecting at least partially into the sleeve (722), wherein the sleeve (722) and the rod (724) are each mounted so as to be rotatable relative to each other. Claim 5 Positioning module according to one of the preceding claims, characterized in that the force compensation device (7) has a lever transmission device. Claim 6 Positioning module according to one of the preceding claims, characterized in that the drive unit (62) comprises an electromagnetic drive. Claim 7 Positioning module according to one of the preceding claims, characterized in that at least one of the joint devices (5, 5') is designed such that a tilting of the leg element (4) about two tilting axes arranged perpendicular to each other and a rotation of the same leg element (4) about its own longitudinal axis is enabled. Claim 8 Positioning module according to claim 7, characterized in that the at least one joint device (5, 5') comprises a cardan joint (52, 52') and a rotary joint (54, 54'). Claim 9 Positioning module according to claim 7 or 8, characterized in that the at least one joint device (5, 5') is designed as a solid body joint. Claim 10 Positioning device (100) for positioning an object with at least one positioning module (1) according to one of the preceding claims. Claim 11 Positioning device (100) according to claim 10 with three positioning modules (1), wherein each of the positioning modules (1) has two leg elements (4) forming a pair of legs, wherein the positioning modules (1) are arranged relative to each other such that each pair of legs projects through another pair of legs and each pair of legs is arranged perpendicular to the other pairs of legs, and the positioning element (3) of each positioning module (1) is connected to the positioning elements (3) of the two other positioning modules (1) and the three positioning elements (3) together form a positioning body (110) which has six degrees of freedom. Claim 12 Positioning device (100) according to claim 11, characterized in that each of the positioning elements (3) corresponds to a platform with a substantially flat platform surface, wherein the respective platform associated with a pair of legs is arranged substantially perpendicular to its leg elements (4), and the three interconnected platforms together form a positioning body (110), in which each of the The platform surfaces are arranged essentially perpendicular to each other platform surface, thus forming part of a cube. Claim 13 Positioning device (100) according to claim 12, characterized in that the three positioning modules (1) are arranged such that their bases (2) together form a cube-like base body (120) with a recess (130), and within this recess (130) the partially cube-shaped positioning body (110) is arranged such that the respective corresponding edges of the base body (120) and the positioning body (110) run parallel to each other.