System for analyzing a sample by means of a laser beam, comprising a device for capturing a profile of the laser beam, and method for adjusting a system of said type

Abstract

The invention relates to a system (1) for elementary analysis of a sample (2) to be examined, characterized in that the analysis system (1) also comprises a device (11) for capturing characteristics of the laser beam (5) emitted by a generation module (4), said capturing device (11) to be inserted between a shaping module and optical focusing means (8) and comprising: - a deflection mirror (111); - a photosensitive cell (112); - optical magnification means, and - means (114) for transmitting the image acquired by the photosensitive cell (112) to a display device (12).

Description

System for analyzing a sample by laser beam, comprising a device for capturing a profile of the laser beam, and method for adjusting such a system

[0001] The present invention relates to the field of high-resolution mapping and analysis of elements in solids.

[0002] More particularly, the invention relates, in particular but not exclusively, to a high-resolution analysis device for mapping elements in metallic solids.

[0003] The invention can be applied in particular to the elemental analysis of hydrogen and oxygen by optical emission spectrometry on plasma produced by laser, in the field of the nuclear industry, or even the aeronautical or space industry.

[0004] In applications such as the characterization of devices subjected to radioactive sources, or the characterization of the aging capacity of devices used in particularly harsh environments, for example in aircraft or spacecraft, it may prove essential to carry out elementary analysis of samples, for example metallic samples.

[0005] More specifically, it may be necessary to be able to draw up a map of these elements within the sample analyzed. By mapping, we mean an identification of the elements making up the sample analyzed and, possibly, the distribution and the link between the different elements.

[0006] Such an analysis can be particularly useful in studies of metal embrittlement by hydrogen, or in studies of aging of fuel cladding in the presence of oxygen, or in studies of embrittlement of fuel cladding caused by the formation of hydrides, the latter promoting the propagation of cracks.

[0007] There are various known methods for mapping elements present in samples.

[0008] One of these methods is elemental analysis by "SEOPPL", an acronym for Laser-Produced Plasma Optical Emission Spectrometry, a technique which is practiced in a natural atmosphere.

[0009] This method applies in particular to the in situ control and characterization of samples of parts to be analyzed.

[0010] A method of elemental analysis by optical emission spectrometry on plasma produced by laser in the presence of argon is described by the patent document published under number EP 0 654 663.

[0011] In practice, an analysis system is used to emit a laser beam onto a part to be analyzed. The laser beam is emitted by a laser source and then passes through various lenses and diaphragms before impacting the part to be analyzed.

[0012] The impact of the laser beam on the part to be analyzed creates a plasma, close to which an optical fiber is positioned to acquire an image that is analyzed by ad hoc software to determine the elementary mapping of the material constituting the part to be analyzed, i.e. to establish a precise identification of the constituent components of the material of the analyzed sample.

[0013] When using the system, external parameters such as vibrations or even temperature can influence the beam emission and reduce the quality of the analysis.

[0014] This is because temperature and / or vibrations can shift the position of the diaphragms, lenses and / or laser source.

[0015] The result is that when it impacts the part to be analyzed, the beam is not homogeneous and has a different power at each point of its contour.

[0016] In other words, the laser beam presents, in a cross section, a variation in power on its contour whereas it should present an equal power at all points of its contour.

[0017] Therefore, when the laser beam is not homogeneous and does not have a desired profile (corresponding to an ideal alignment of the generation module, the lens(es) and the diaphragm(s), its impact on the part to be analyzed creates a crater (due to the ablation of the part by the laser beam) which has, depending on its depth, a substantially truncated cone shape. On the contrary, in the case of a homogeneous beam with a desired profile, the crater has an optimal shape which is substantially cylindrical with a circular section. A homogeneous laser beam is commonly referred to by the English term "top hat".

[0018] This then requires a system calibration step, i.e. repositioning the laser source, the diaphragm(s) and / or the lens(es) so that the beam is correctly aligned and the crater has an optimal shape.

[0019] Such calibration is performed empirically, which is tedious and time-consuming, so it is generally performed approximately, until the beam is in an alignment deemed suitable, i.e. an alignment close to an optimal theoretical alignment.

[0020] In fact, to achieve this adjustment, a laser beam is emitted to impact a test part so that the shape of the impact is analyzed.

[0021] By analyzing the shape of the impact, it is possible to determine whether the beam is properly aligned or not and to proceed with adjusting the position of the diaphragms, lenses and / or the laser source.

[0022] However, identifying each misaligned element (diaphragm, lens or laser source) is not simple and can further complicate system adjustment.

[0023] Indeed, it is possible that the position of an initially correctly positioned element is changed by mistake. This then results in a worsening of the alignment defect, which lengthens the time required to calibrate the system.

[0024] The invention aims in particular to overcome the drawbacks of the prior art.

[0025] More specifically, the invention aims to propose a laser beam analyzer making it possible to simplify and accelerate the adjustment of the laser beam of an analysis system.

[0026] The invention also aims to provide such a laser beam analyzer which ensures an instant reading of the homogeneity of the laser beam.

[0027] The invention further aims to provide such a beam analyzer which ensures an accurate reading of the homogeneity of the laser beam.

[0028] These objectives, as well as others which will appear subsequently, are achieved thanks to the invention which relates to a system for elementary analysis of a sample to be studied, including an analysis device comprising a frame on which are mounted: a module for generating a laser beam, a module for shaping the laser beam integrating at least one shaping lens and a diaphragm for selecting a part of the laser beam emitted by the generation module, optical means for focusing the laser beam on the sample to be studied, characterized in that the analysis system also comprises a device for capturing characteristics of the laser beam emitted by the generation module, intended to be inserted between the shaping module and the optical focusing means,

[0029] the capture device comprising: a laser beam deflection mirror, capable of adopting a deflection position in which the mirror generates a deflected laser beam; a photosensitive cell intended to acquire an image of the deflected laser beam; optical means for magnifying the deflected laser beam, interposed between the deflection mirror and the photosensitive cell, and means for transmitting the image acquired by the photosensitive cell to a display device.

[0030] The capture device allows the analysis device to be adjusted quickly and non-destructively compared to the prior art.

[0031] In fact, thanks to the capture device, an image of the laser beam can be obtained, which allows the analysis device to be adjusted instantly, or almost instantly, since it is not necessary to obtain an in-depth analysis of a crater in a room.

[0032] In other words, from a two- or three-dimensional digital image, it is possible to determine a defect in the profile and / or homogeneity of the laser beam and, iteratively and quickly, to correct the position of the generation module, the lens and / or the selection diaphragm to modify the profile of the laser beam and / or its homogeneity.

[0033] Therefore, the adjustment time is considerably reduced and can be carried out visually, benefiting the speed of adjustment of the analysis device, and therefore the quality of analysis.

[0034] As an indication, it is recalled that magnification corresponds to a ratio of dimensions between an image of an object and the object itself, at determined distances.

[0035] Note that the deflection mirror can be totally reflective or only partially reflective.

[0036] According to an advantageous aspect, the optical means for magnifying the deflected laser beam comprise: a first enlarging lens having a first focal length f1, and a second enlarging lens having a second focal length f2, the first focal length f1 and the second focal length f2 being chosen so that the ratio f2 / f1 is greater than or equal to 2.

[0037] Such a ratio makes it possible to enlarge the image of the laser beam to enable the analysis of its profile and its homogeneity, in a rapid and optimal manner.

[0038] This frees us from the characteristics of the selection diaphragm in particular, so that the capture device can be used on different analysis devices.

[0039] According to another advantageous aspect, the capture device is removably mounted on the frame.

[0040] This allows a single capture device to be used on several different analysis devices.

[0041] In addition, this avoids the risk of disrupting the analysis by removing the capture device when the analysis device is in use.

[0042] According to another advantageous aspect, the capture device comprises a plurality of deflecting mirrors interposed between the deflection mirror and the photosensitive cell, to enlarge the deflected beam by redirecting it in several directions to the photosensitive cell.

[0043] This directly benefits the compactness of the analysis system.

[0044] Indeed, by circulating the deflected beam along a predetermined path, it is possible to bypass certain elements of the analysis device, so as to integrate the capture device into the system without unjustifiably increasing its size.

[0045] According to another advantageous aspect, at least one of the deflecting mirrors, called the primary deflecting mirror, is positioned between the first lens and the second lens of the optical magnifying means.

[0046] This positioning ensures a spacing of the first lens relative to the second lens of the optical magnifying means, so that the magnification of the laser beam image is optimal.

[0047] In other words, this requires the deflected beam to be meandered to limit the size of the capture device on the one hand, and to increase the magnification of the laser beam image on the other hand, for the benefit of the exploitation of the image acquired by the photosensitive cell.

[0048] According to another advantageous aspect, the capture device also integrates an optical filter interposed between the photosensitive cell and the deflection mirror, to filter waves of the deflected laser beam according to a range of waves admissible by the photosensitive cell.

[0049] Thus, only a useful portion of the laser beam waves can be captured by the photosensitive cell, which directly benefits the ease of exploitation of the captured image since the noise due to the unexploited waves is eliminated, or at least limited, by the presence of the optical filter.

[0050] According to another advantageous aspect, the device for displaying the image acquired by the photosensitive cell, connected to the transmission means, is integrated into the system.

[0051] The display device allows an operator to obtain a two-dimensional or three-dimensional image of the laser beam, allowing adjustment of the beam quickly and easily.

[0052] According to another advantageous aspect: the selection diaphragm is configured to select a portion of the laser beam emitted by the generation module, and to delimit the shape of the impact of the laser beam on a sample to be analyzed, the lens(es) are configured to project to infinity the image of the laser beam at the output of the selection diaphragm, the optical focusing means are configured to receive the image of the selection diaphragm projected to infinity by the lens(es) and focus it on a sample to be studied so as to produce a plasma on a surface of this sample, and the system also comprises means for collecting an optical emission of the plasma and determination means configured to analyze a spectrum of the optical emission and define an elementary composition of the sample to be studied on which the laser beam is projected.

[0053] According to another advantageous aspect, the system also comprises a computer unit coupled to the photosensitive cell, the computer unit being configured to control actuators dedicated to adjusting the laser beam.

[0054] The servo-control allows the laser beam to be adjusted automatically based on the image of the laser beam captured by the photosensitive cell.

[0055] This makes adjusting the laser beam simpler and more reliable.

[0056] The invention also relates to a device for capturing a profile of the laser beam for an analysis system as previously described, characterized in that it comprises: a mirror for deflecting a laser beam, generating a deflected laser beam; a photosensitive cell intended to acquire an image of the deflected laser beam; optical means for magnifying the deflected laser beam, interposed between the deflection mirror and the photosensitive cell, and means for transmitting the image acquired by the photosensitive cell to a display device.

[0057] Such a device can be coupled to an analysis device in a simple and rapid manner to determine its correct setting, in a non-destructive manner.

[0058] This then results in savings in the operation of an analysis system since the adjustment of the analysis device is simplified and accelerated compared to the prior art, and it is not necessary to use a test part for the adjustment of the analysis device.

[0059] The invention further relates to a method for adjusting an analysis device of an analysis system as previously described, characterized in that it comprises the steps of:positioning the deflection mirror in its deflection position;generating a laser beam by the generation module;capturing an image of the deflected beam by the photosensitive cell;analyzing the image captured by the photosensitive cell to detect a profile defect of the laser beam with respect to a theoretical profile;correcting, if a profile defect is detected, an orientation of the generation module and / or of the shaping lens or of the selection diaphragm, andrecommencing the steps of capturing, analyzing and correcting until no profile defect is detected with respect to the theoretical profile.

[0060] Such a method is faster and simpler than the adjustment of the analysis device according to the prior art. If the adjustment is always done iteratively, it is however not subject to ablation of a test part, that is to say to destruction of at least part of a test part, said ablation being analyzed to determine a fault in the adjustment of the analysis device.

[0061] According to an advantageous aspect, the step of analyzing the image also comprises a sub-step of checking the homogeneity of the intensity of the laser beam, and the step of correcting is carried out when an inhomogeneity of the intensity of the laser beam is observed.

[0062] This control sub-step further increases the quality of the analysis device adjustment. Indeed, if the laser beam profile is good, it is not excluded that the intensity of the laser beam is inhomogeneous, which then harms the operation of the analysis system and therefore the quality of the elemental analysis of a sample to be studied.

[0063] According to another advantageous aspect, the method also comprises a step of controlling actuators dedicated to adjusting the laser beam.

[0064] This control step allows the laser beam to be adjusted automatically based on the image of the laser beam captured by the photosensitive cell.

[0065] This makes adjusting the laser beam simpler and more reliable.

[0066] Other characteristics and advantages of the invention will appear more clearly on reading the following description of a preferred embodiment of the invention, given by way of illustrative and non-limiting example, and the appended drawings described below.

[0067] This is a schematic representation of a laser beam elemental analysis system according to the invention.

[0068] This is a schematic representation of the device for capturing laser beam characteristics.

[0069] This is a schematic representation of a first type of image obtained using the feature capture device.

[0070] This is a schematic representation of a second type of image obtained using the feature capture device.

[0071] Illustrates a system 1 of elementary analysis of a sample 2 to be studied.

[0072] The system 1 includes an analysis device 3 as described below, this analysis device 3 comprising a base 31 for receiving the sample 2.

[0073] The analysis device 3 also comprises a frame on which are mounted: a module 4 for generating a laser beam 5, a module for shaping the laser beam 5 incorporating at least one shaping lens 61 and a diaphragm 7 for selecting a portion of the laser beam 5 emitted by the generation module 4, optical means 8 for focusing the laser beam 5 onto the sample 2 to be studied.

[0074] As illustrated by the, the analysis device 3 comprises, according to the direction of emission of the laser beam 5 from the generation module 4 towards the sample 4, a plurality of lenses including the shaping lens 61 and an auxiliary lens 62 and a single selection diaphragm 7.

[0075] The analysis device 3 also comprises a plurality of mirrors 32 making it possible to deflect the laser beam 5 from the generation module 4 to the focusing means 8, in order to limit the size of the analysis device 3. At least one of the mirrors 32 is an adjustment mirror 320 positioned between the positioning lens 61 and the selection diaphragm 7.

[0076] At the output of the optical focusing means 8, the laser beam 5 becomes a focusing beam 51. In this case, the focusing beam 51 has a conical shape which tapers towards the sample 2.

[0077] Furthermore, the system 1 comprises collection means 9 and determination means 10 whose roles will be described below.

[0078] The diaphragm 7 is configured to select a portion of the laser beam 5 emitted by the generation module 4, and to delimit the shape of the impact of the laser beam 5 on a sample 2 to be analyzed.

[0079] The optical focusing means 8 are configured to receive the image of the selection diaphragm 7 projected to infinity by the lens 6 directly upstream and focus it on a sample 2 to be studied so as to produce a plasma on a surface of this sample 2.

[0080] The collection means 9 are configured to acquire an optical emission of the plasma generated by the impact of the laser beam 5 on the surface of the sample 2 to be analyzed.

[0081] Finally, the determination means 10 are configured to analyze a spectrum of the optical emission collected by the collection means 9, and define an elementary composition of the sample 2 to be studied onto which the laser beam 5 is projected.

[0082] As described previously, system 1 allows a sample 2 to be analyzed to map its elemental composition.

[0083] For this purpose, the laser beam 5 is emitted by the generation module 4 to be directed towards the sample 2 to impact its surface.

[0084] When the laser beam 5 impacts the sample 2 to be studied, a plasma P is created, generating an optical emission to be analyzed to map the elements making up the sample 2.

[0085] The collection of the optical emission of the plasma is carried out by the collection means 9.

[0086] The collection means 9 comprise first communication means 95 intended to establish, with second communication means 101 of the determination means 10, a communication path.

[0087] The first communication means 95 and the second communication means 101 may be of the wireless type.

[0088] Alternatively, the first communication means 95 and the second communication means 101 may be in the form of connectors intended to receive the plug of a wired connection cable.

[0089] To enable the emission of the laser beam 5 to be adjusted, the system 1 also includes a device 11 for capturing characteristics of the laser beam 5.

[0090] With reference to Figures 1 and 2, the capture device 11 is now described.

[0091] The capture device 11 is advantageously removably mounted on the frame of the analysis device 3.

[0092] As illustrated by figures 1 and 2, the capture device 11 comprises: a deflection mirror 111 of the laser beam 5; a photosensitive cell 112 intended to acquire an image of the deflected laser beam 500; optical means 113 for magnifying the deflected laser beam 500, interposed between the deflection mirror 111 and the photosensitive cell 112, and means 114 for transmitting the image acquired by the photosensitive cell 112 to a display device 12.

[0093] The display device 12 of the image acquired by the photosensitive cell 112, connected to the transmission means 114, is integrated into the system 1.

[0094] The display device 12 may, for example, take the form of a screen enabling data from the determination means 10 to be viewed, be a dedicated mobile screen such as a digital tablet for example, or even take the form of a monitor integrated into the capture device 11.

[0095] The deflection mirror 111, which in this case is a sampling blade, is capable of adopting a deflection position in which it generates a deflected laser beam 500.

[0096] For this, the deflection mirror 111 is mounted movably on a displacement member 115 between said deflection position in which it generates the deflected laser beam 500, and a release position in which the deflection mirror 111 is moved away from the laser beam 5.

[0097] The displacement member 115 may for example take the form of a support sliding on a rail. Other displacement members may in particular be envisaged such as, for example, members allowing the rotation of the deflection mirror 111 between its deflection position and its release position.

[0098] As can be seen in the figure, the optical means 113 for magnifying the deflected laser beam 500 comprise: a first magnifying lens 1131 having a first focal length f1, and a second magnifying lens 1132 having a second focal length f2.

[0099] The first focal length f1 and the second focal length f2 are different from each other.

[0100] More particularly, the first focal length f1 and the second focal length f2 are chosen so that the ratio f2 / f1 is greater than or equal to 2.

[0101] Such a focal length ratio makes it easier to acquire an image of the laser beam deflected 500 by the photosensitive cell 112.

[0102] Still with reference to the, the capture device 11 comprises a plurality of deflecting mirrors 116 interposed between the deflection mirror 111 and the photosensitive cell 112.

[0103] The plurality of deflecting mirrors 116 makes it possible to enlarge the deflected beam 500 by redirecting it in several directions to the photosensitive cell 112.

[0104] This can then make it possible to make the capture device 11 compact while ensuring the magnification of the deflected laser beam to promote the acquisition of images by the photosensitive cell 112.

[0105] Preferably, at least one of the deflecting mirrors 116, called the primary deflecting mirror 1161, is positioned between the first enlarging lens 1131 and the second enlarging lens 1132.

[0106] Furthermore, the capture device 11 also integrates an optical filter 117 interposed between the photosensitive cell 112 and the deflection mirror 111. This optical filter 117 makes it possible to filter waves from the deflected laser beam 500 according to a range of waves admissible by the photosensitive cell 112.

[0107] Thanks to the capture device 11, the adjustment of the laser beam 5, and therefore of the analysis device 3, is simple and rapid compared to the methods of the prior art.

[0108] In fact, a technician positions the deflection mirror 111 in its deflection position, that is to say across the laser beam 5, so as to generate the deflected laser beam 5 which is directed towards the photosensitive cell 112.

[0109] From the deflection mirror 111 to the photosensitive cell 112, the deflected laser beam is enlarged by the presence of the first enlarging lens 1131 and the second enlarging lens 1132.

[0110] Once the deflected laser beam 500 has reached the photosensitive cell 112, an image of said deflected beam can then be analyzed by the technician, this image being displayed on the display device using the transmission means 114.

[0111] Figures 3 and 4 respectively illustrate a first type and a second type of images obtained using the photosensitive cell 112.

[0112] From an image I of the laser beam 5, different profiles P of the laser beam 5 can be obtained.

[0113] With reference to the, a first profile P1 can be defined in a first plane, and a second profile P2 can be defined in a second plane.

[0114] As illustrated by the, image I shows that the laser beam 5 has a plurality of substantially concentric intensity zones which define the profile of the laser beam 5.

[0115] With reference to the, the position adjustment of the generation module 4, of the shaping lens 61, of the selection diaphragm 7, or of the adjustment mirror 320 aims to bring the profile P of the laser beam 5 closer to a theoretical profile T which takes a substantially cylindrical shape.

[0116] By having a profile P close to the theoretical profile T, the laser beam 5 allows a controlled impact on the sample, promoting a noise-free plasma, and therefore an improved analysis.

[0117] From the images obtained, the technician can modify the positioning of the generation module 4, the positioning lens 61, the selection diaphragm 7, or the adjustment mirror 320 so that the laser beam 5 has the desired characteristics, that is to say characteristics identical, or at least as close as possible, to those of a theoretical laser beam. This modification can for example be done manually.

[0118] The photosensitive cell 112 can, moreover, be coupled to a computer unit 118 making it possible to control the positioning of the generation module 4, the positioning lens 61, the selection diaphragm 7, or the adjustment mirror 320 so that the laser beam 5 has the desired characteristics. Actuators can then be provided to allow the positioning of the generation module 4, the positioning lens 61, the selection diaphragm 7, or the adjustment mirror 320.

[0119] In other words, the computer unit is configured to drive actuators dedicated to adjusting the laser beam 5.

[0120] For information purposes, the theoretical laser beam has a substantially cylindrical shape and uniform intensity in section.

[0121] When the laser beam 5 is poorly centered, it does not have a homogeneity of intensity or a desired profile, which causes a partial ablation of the sample 2 and, consequently, a poor quality of plasma and therefore a difficulty, or even an impossibility, of properly mapping the sample 2. In other words, a non-circular crater geometry of a size larger than that desired and presenting an extended HAZ (Heat Affected Zone) disturbing the measurements.

[0122] Thanks to the capture device 11, the adjustment time of the system 1 is considerably reduced and can be carried out visually, to the benefit and speed of adjustment of the analysis device 3, and therefore of the analysis quality.

Claims

System (1) for elementary analysis of a sample (2) to be studied, including an analysis device (3) comprising a frame on which are mounted: a module (4) for generating a laser beam (5), a module for shaping the laser beam (5) integrating at least one shaping lens (61) and a diaphragm (7) for selecting a part of the laser beam (5) emitted by the generation module (4), optical focusing means (8) for focusing the laser beam (5) on the sample (2) to be studied, characterized in that the analysis system (1) also comprises a device (11) for capturing characteristics of the laser beam (5) emitted by the generation module (4), intended to be interposed between the shaping module and the optical focusing means (8), the capturing device (11) comprising: a deflection mirror (111) for the laser beam (5), capable of adopting a deflection position in which the mirror generates a beam deflected laser (500);a photosensitive cell (112) intended to acquire an image of the deflected laser beam (500); optical means (113) for magnifying the deflected laser beam (500), interposed between the deflection mirror (111) and the photosensitive cell (112), and means (114) for transmitting the image acquired by the photosensitive cell (112) to a display device (12).; System (1) according to claim 1, characterized in that the optical means (13) for magnifying the deflected laser beam (500) comprise: a first enlarging lens (1131) having a first focal length f1, and a second enlarging lens (1132) having a second focal length f2, the first focal length f1 and the second focal length f2 being chosen so that the ratio f2 / f1 is greater than or equal to 2. System (1) according to any one of the preceding claims, characterized in that the capture device (11) is removably mounted on the frame. System (1) according to any one of the preceding claims, characterized in that the capture device (11) comprises a plurality of deflecting mirrors (116) interposed between the deflection mirror (111) and the photosensitive cell (112), to enlarge the deflected beam (500) by redirecting it in several directions to the photosensitive cell (112). System (1) according to any one of the preceding claims, characterized in that the capture device (11) also integrates an optical filter (117) interposed between the photosensitive cell (112) and the deflection mirror (111), to filter waves of the deflected laser beam (500) according to a range of waves admissible by the photosensitive cell (112). System (1) according to any one of the preceding claims, characterized in that the display device (12) of the image acquired by the photosensitive cell (112), connected to the transmission means (114) is integrated into the system. System (1) according to any one of the preceding claims, characterized in that: the selection diaphragm (7) is configured to select a part of the laser beam (5) emitted by the generation module (4), and to delimit the shape of the impact of the laser beam (5) on a sample (2) to be analyzed, the lens(es) are configured to project to infinity the image of the laser beam (5) at the output of the selection diaphragm (7), the optical focusing means (8) are configured to receive the image of the selection diaphragm (7) projected to infinity by the lens(es) and focus it on a sample (2) to be studied so as to produce a plasma on a surface of this sample (2),and in that the system (1) also comprises means (9) for collecting an optical emission from the plasma and determination means (10) configured to analyze a spectrum of the optical emission and define an elementary composition of the sample (2) to be studied onto which the laser beam (5) is projected., System (1) according to any one of the preceding claims, characterized in that it also comprises a computer unit (118) coupled to the photosensitive cell (112), the computer unit (118) being configured to control actuators dedicated to adjusting the laser beam (5). Device (11) for capturing a profile of the laser beam (5) for an analysis system (1) according to any one of the preceding claims, characterized in that it comprises: a deflection mirror (111) for a laser beam (5), generating a deflected laser beam (500); a photosensitive cell (112) intended to acquire an image of the deflected laser beam (500); optical means (113) for magnifying the deflected laser beam (500), interposed between the deflection mirror (111) and the photosensitive cell (112), and means (114) for transmitting the image acquired by the photosensitive cell (112) to a display device (12). Method for adjusting an analysis device (3) of an analysis system (1) according to any one of claims 1 to 8, characterized in that it comprises the steps of:positioning the deflection mirror (111) in its deflection position;generating a laser beam (5) by the generation module (4);capturing an image of the deflected beam (500) by the photosensitive cell (112);analyzing the image captured by the photosensitive cell (112) to detect a profile defect of the laser beam (5) with respect to a theoretical profile;correcting, if a profile defect is detected, an orientation of the generation module (4) and / or of the shaping lens (6) or of the selection diaphragm (7), andrecommencing the steps of capturing, analyzing and correcting until no profile defect is detected with respect to the theoretical profile. Adjustment method according to the preceding claim, characterized in that the step of analyzing the image also comprises a sub-step of checking the homogeneity of the intensity of the laser beam (5), and in that the step of correcting is carried out when an inhomogeneity of the intensity of the laser beam (5) is observed. Method according to claim 10 or 11, characterized in that it also comprises a step of controlling actuators dedicated to adjusting the laser beam (5).

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