Online adjustment method and system of spectrometer grating and spectrometer

Abstract

The invention relates to an online adjustment method and system for a spectrometer grating and a spectrometer. The on-line adjusting method comprises the following steps: pre-installing a grating in a spectrograph, and connecting the grating with a driving mechanism; acquiring a first theoretical pixel position and a second theoretical pixel position respectively corresponding to the first optical signal and the second optical signal with different wavelengths; the first optical signal is controlled to be incident to the grating, first calibration is carried out, and the fixed position of the grating is determined; controlling the driving mechanism to drive the grating to be positioned at a fixed position of the grating, performing secondary calibration, namely controlling a second optical signal to be incident to the grating, identifying a second real-time pixel position corresponding to an intensity peak value of the second optical signal by the control system, and judging whether the second real-time pixel position meets a preset requirement or not; if yes, fixing operation of the grating is executed; and if the judgment is not satisfied, executing the replacement operation of the grating. The position of the grating can be automatically adjusted, and the consistency of spectrograph production is improved.

Description

Technical Field

[0001] This application relates to the field of spectrometer technology, specifically to an online adjustment method, system, and spectrometer for a spectrometer grating. Background Technology

[0002] Optical emission spectrometry (OES) is a detection technology that uses the characteristic emission spectra of atoms / ions in glow discharge plasma to identify elements and analyze their concentration. In semiconductor front-end processes, such as dry etching (ETCH), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), and ion implantation, OES glow discharge detection systems are widely used for real-time in-situ monitoring of the plasma state within the process chamber. By analyzing the intensity of specific spectral lines, it enables crucial functions such as determining the etching endpoint, monitoring the composition of process gases, and identifying impurities. An OES glow discharge detection system consists of three independent modules: an optical probe, a transmission fiber, and an OES spectrometer.

[0003] The core internal structure of an OES spectrometer mainly integrates a grating, an optical mirror assembly, and a photodetector. After the detection beam enters the spectrometer, it is detected by the photodetector through an optical path arrangement, i.e., after passing through the grating and optical mirror assembly, in order to achieve the purpose of spectral detection.

[0004] As the core dispersive element of an OES spectrometer, the installation and positioning accuracy of the grating directly determines the spectrometer's resolution, wavelength accuracy, and overall optical performance. Traditional installation methods rely on a multi-dimensional manual adjustment frame, adjusting the grating's rotation angle (to set the incident angle / center wavelength) and elevation angle (to optimize the perpendicularity of the grating plane to the optical path, i.e., the "Litterow condition") to achieve optimal spectral signal. However, this method is complex and has limited accuracy. During adjustment, rotation and elevation movements interfere with each other, leading to difficulties in debugging, low efficiency, and impacting the spectrometer's production consistency, making it difficult to meet the requirements of large-scale production.

[0005] Therefore, there is a need for a method and system in spectrometer manufacturing that can automate the adjustment of positioning gratings to improve the consistency of spectrometer production. Summary of the Invention

[0006] The technical problem to be solved by this application is to provide an online adjustment method, system and spectrometer for a spectrometer grating, which can automatically adjust the grating position and improve the consistency of spectrometer production.

[0007] According to a first aspect of the embodiments of this application, an online adjustment method for a spectrometer grating is provided, comprising: A grating is pre-installed in the spectrometer and the grating is connected to the drive mechanism. The spectrometer is equipped with optical elements and a photodetector. The optical elements are used to transmit the light signal passing through the grating to the photodetector, and the photodetector is used to receive and detect the light signal. After acquiring first and second optical signals of different wavelengths, they enter the spectrometer and are respectively located at the first theoretical pixel position and the second theoretical pixel position on the photodetector. The wavelengths of the first and second optical signals are determined by the optical design of the spectrometer. The first optical signal is controlled to be incident on the grating for the first calibration to determine the fixed position of the grating. The first calibration includes: controlling the driving mechanism to rotate the grating within a preset angle range, while the photodetector collects the first optical signal in real time and transmits it to the control system; the control system identifies the first real-time pixel position corresponding to the intensity peak of the first optical signal and determines whether the first real-time pixel position coincides with the first theoretical pixel position. When it is determined that they coincide, the position information of the driving mechanism at this time is recorded, and the grating position corresponding to the position information is the fixed position of the grating. Controlling the driving mechanism to position the grating at a fixed position for a second calibration includes: controlling the second light signal to be incident on the grating; the photodetector acquiring the second light signal in real time and transmitting it to the control system; the control system identifying the second real-time pixel position corresponding to the intensity peak of the second light signal and determining whether the second real-time pixel position meets a preset requirement, wherein the preset requirement includes the difference between the second real-time pixel position and the second theoretical pixel position being within a preset range; When it is determined that the position of the second real-time pixel meets the preset requirements, the grating fixing operation is performed; When it is determined that the position of the second real-time pixel does not meet the preset requirements, the grating replacement operation is performed.

[0008] In one implementation, determining whether the first real-time pixel position coincides with the first theoretical pixel position includes: the absolute value of the deviation between the first real-time pixel position and the first theoretical pixel position is less than or equal to a preset pixel tolerance threshold.

[0009] In one embodiment, controlling the drive mechanism to drive the grating to rotate within a preset angle range, while the photodetector collects the first optical signal in real time and transmits it to the control system, includes: the drive mechanism driving the grating to rotate in steps according to a preset step size; At each step position, the photodetector collects a frame of light signal and transmits it to the control system. The control system identifies the first real-time pixel position corresponding to the frame of light signal and compares it with the first theoretical pixel position until the first real-time pixel position and the first theoretical pixel position are found to coincide.

[0010] In one embodiment, the fixing operation of the grating includes: applying adhesive to fix the grating, and simultaneously controlling the second light signal to be incident on the grating, wherein the control system monitors the position of the second real-time pixel to ensure that it meets a preset requirement.

[0011] In one embodiment, obtaining the first theoretical pixel position and the second theoretical pixel position includes: querying a pre-stored position database to obtain the first theoretical pixel position and the second theoretical pixel position based on the wavelength of the first optical signal, the wavelength of the second optical signal, and the optical design parameters of the spectrometer; or, directly obtaining the corresponding first optical signal, second optical signal, first theoretical pixel position, and second theoretical pixel position from a pre-stored model-position mapping table based on the model of the spectrometer.

[0012] In one implementation, obtaining the first theoretical pixel position and the second theoretical pixel position includes: The wavelengths of the first and second optical signals are input into the optical imaging model for calculation, and the first and second theoretical pixel positions are output. The optical imaging model is a model that is pre-stored in the control system and is established by measuring a prototype of the same model as the spectrometer that has been assembled and calibrated.

[0013] According to a second aspect of the embodiments of this application, a grating adjustment system is provided for implementing the online adjustment method as described in any of the preceding claims, the adjustment system comprising: A drive mechanism is used to connect to a grating platform in the spectrometer, the grating platform having a grating pre-installed on it. The light source module is used to output a first optical signal and a second optical signal of different wavelengths to the grating; The control system includes a first processing module connected to the drive mechanism and a second processing module connected to the photodetector in the spectrometer. The first processing module is used to control the drive mechanism to drive the grating to rotate; the second processing module is used to perform the first calibration and the second calibration.

[0014] In one embodiment, the light source module includes a first laser, a second laser, and a transmission optical fiber. The first laser is used to output a first optical signal, the second laser is used to output a second optical signal, and the transmission optical fiber has two input ends and one output end. One input end is connected to the first laser, the other input end is connected to the second laser, and the output end is connected to the spectrometer.

[0015] In one embodiment, the drive mechanism is connected to the grating platform via a speed reduction transmission mechanism.

[0016] According to a third aspect of the embodiments of this application, a spectrometer is provided, comprising: a grating fixed using an online adjustment method as described in any of the preceding claims.

[0017] Compared with the prior art, the beneficial effects of this application are as follows: This application utilizes the optical design of the spectrometer itself, where a specific wavelength of light signal corresponds to a pixel position. Based on this, two calibrations are performed by inputting two different wavelengths of light signals into the spectrometer sequentially. During the calibration process, the position of the grating is adjusted using a drive mechanism. The first calibration is performed using a light signal of one wavelength (i.e., the first light signal). The grating position is determined as the fixed position of the grating only if the real-time pixel position corresponding to the first light signal coincides with its theoretical pixel position. Then, by maintaining the grating at this fixed position, a second calibration is performed using a light signal of another wavelength (i.e., the second light signal). This involves determining whether the real-time pixel position corresponding to the second light signal meets the preset requirements. If they do, the grating can be fixed; otherwise, the grating is defective and needs to be replaced. This achieves automatic online adjustment of the grating, improving the consistency of the spectrometer during mass production and enhancing product quality. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a spectrometer according to an exemplary embodiment; Figure 2 This is a schematic diagram illustrating a grating adjustment system according to an exemplary embodiment; Figure 3 This is a flowchart illustrating an online adjustment method for a spectrometer grating according to an exemplary embodiment.

[0019] In the picture, 1. Spectrometer; 11. Photodetector; 12. Optical element; 13. Grating; 2. Laser; 3. Transmission fiber; 31. Input end; 32. Output end; 4. Drive mechanism. Detailed Implementation

[0020] Unless otherwise defined, the technical or scientific terms used in this specification and claims shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. Specific embodiments of this application will be described below in conjunction with the accompanying drawings. It should be noted that, in order to provide a concise description, this specification cannot exhaustively describe all features of the actual embodiments. Without departing from the spirit and scope of this application, those skilled in the art can modify and substitute the embodiments of this application, and the resulting embodiments are also within the protection scope of this application.

[0021] The OES glow discharge detection system consists of three independent modules: an optical probe, a transmission optical fiber, and an OES spectrometer. Figure 1 The OES spectrometer (spectrometer 1 for short) includes a grating 13, an optical element 12, and a photodetector 11. The optical element 12 is used to transmit the light signal through the grating 13 to the photodetector 12. The optical element includes a reflector that changes the light path transmission and a lens that shapes the light signal. The photodetector 12 is used to receive and detect the light signal. It mainly acquires the spectral data of the light signal and transmits it to a processor for spectral analysis.

[0022] To solve the above technical problems, such as Figure 2 , Figure 3 As shown, this application provides an online adjustment method for a spectrometer grating, including: pre-installing a grating 13 in a spectrometer 1, and connecting the grating 13 to a drive mechanism 4, wherein the spectrometer has integrated optical elements 12 and a photodetector 11; After the first and second optical signals of different wavelengths are acquired and enter the spectrometer 1, they correspond to the first theoretical pixel position P1 and the second theoretical pixel position P2 on the photodetector 11, respectively. The wavelength λ1 of the first optical signal and the wavelength λ2 of the second optical signal are determined by the optical design of the spectrometer 1. The first light signal is controlled to be incident on the grating 13 for the first calibration to determine the fixed position of the grating 13. The first calibration includes: controlling the drive mechanism 4 to drive the grating 13 to rotate within a preset angle range. At the same time, the photodetector 11 collects the first light signal in real time and transmits it to the control system. Understandably, the photodetector 11 acquires the first spectral data corresponding to the first light signal in real time. The control system identifies the first real-time pixel position T1 corresponding to the intensity peak of the first light signal (i.e., the first spectral data) and determines whether the first real-time pixel position T1 coincides with the first theoretical pixel position P1. When it is determined that they coincide, the position information of the drive mechanism 4 is recorded at this time. The grating position corresponding to the position information is the fixed position of the grating 13. The control drive mechanism 4 drives the grating 13 to a fixed position for a second calibration, including: controlling the second light signal to be incident on the grating 13; the photodetector 11 collects the second light signal in real time and transmits it to the control system. Understandably, the photodetector 11 acquires the second spectral data corresponding to the second light signal in real time; the control system identifies the second real-time pixel position T2 corresponding to the intensity peak of the second light signal (i.e., the second spectral data) and determines whether the second real-time pixel position T2 meets the preset requirements. The preset requirements include that the difference between the second real-time pixel position T2 and the second theoretical pixel position P2 is within a preset range, i.e., P2-△≤T2≤P2+△, where △ is the error value determined according to the spectrometer design requirements. When it is determined that the second real-time pixel position T2 meets the preset requirements, the fixing operation of the grating 13 is executed; When it is determined that the second real-time pixel position T2 does not meet the preset requirements, the grating 13 is replaced. After replacing the grating, the first calibration and second calibration steps are performed again until the grating is qualified and the grating 13 is fixed.

[0023] This application utilizes the optical design of the spectrometer itself, where there is a correspondence between light signals of a specific wavelength and pixel positions, which can be determined by the grating equation mλ = d(sinα ± sinβ), where α is the incident angle, β is the diffraction angle and it corresponds to the pixel position, λ is the wavelength of the light signal, and d is the grating constant. Based on this, two calibrations are performed by inputting two different wavelength light signals into the spectrometer 1 one after the other. During the calibration process, the position of the grating 13 is adjusted by the drive mechanism 4, that is, the incident angle of the light signal to the grating is adjusted. The first calibration is performed by the first light signal with the first wavelength to determine the fixed position of the grating 13. Then, by keeping the grating 13 in the fixed position, the second calibration is performed by the second light signal with the second wavelength. It is determined whether the real-time pixel position corresponding to the second light signal meets the preset requirements with its theoretical pixel position. If it does, the grating fixing operation can be performed. If it does not meet the requirements, it means that the grating is unqualified and needs to be replaced. In this way, the automatic online adjustment of the grating is realized. By ensuring that light signals of the same wavelength are incident on different spectrometers and obtain the same pixel position on the photodetector, it is effectively ensured that the light signals enter the grating at the same incident angle, thereby improving the consistency of the spectrometer in mass production and improving product quality.

[0024] In one embodiment, the wavelength of the first light signal is determined to be 532 nm and the wavelength of the second light signal is 633 nm by the optical design of the spectrometer 1. Therefore, the first theoretical pixel position P1 corresponding to the first light signal is the 1000th pixel, and the second theoretical pixel position P2 corresponding to the second light signal is the 2000th pixel. Based on this, the first light signal is incident into the spectrometer, and the drive mechanism 4 is controlled to rotate the grating 13 to change the incident angle α of the light signal. Simultaneously, the photodetector 12 acquires the first spectral data corresponding to the first light signal and feeds it back to the control system. In this embodiment, the control system is a spectrometer automated production and debugging system. The control system identifies the first real-time pixel position T1 and records the position information of the drive mechanism when T1 is the 1000th pixel, such as recording the encoder reading or step count of the drive mechanism, to determine the fixed position of the grating, i.e., the incident angle of the grating. The control system controls the drive mechanism 4 to position the grating 13 to this fixed position, and the second light signal is incident into the spectrometer. The control system obtains the corresponding second real-time pixel position T2 and judges whether the absolute difference between T2 and P2 is within a preset range, such as a difference of 3 pixels. If it is within the preset range, it means that the grating and its fixed position are qualified, and the grating fixing operation can be completed. In this embodiment, by making the incident angle α of the gratings of each spectrometer consistent, the diffraction efficiency and diffraction angle of light signals of different wavelengths entering each spectrometer tend to be consistent, thereby improving the consistency of the spectra acquired by each spectrometer in mass production.

[0025] Specifically, the grating 13 is pre-installed in the grating platform of the spectrometer 1, and its adjustable rotation angle is generally within the range of ±5°. Based on this, the control drive mechanism 4 can be connected to the grating platform to drive the grating 13 to rotate within a preset angle range of ±5°, that is, the drive mechanism 4 can drive the grating 13 to rotate 5° clockwise and 5° counterclockwise respectively. The error value Δ determined according to the spectrometer design requirements is calculated as follows: Δ = N / |λ2 - λ1|, where N is the total number of pixels between P1 and P2 on the photodetector, determined according to the optical design. The drive mechanism 4 can be a rotary motor, a stepper motor, or other power source capable of driving the grating to rotate.

[0026] In one implementation, determining whether the first real-time pixel position T1 coincides with the first theoretical pixel position P1 includes: the absolute value of the deviation between the first real-time pixel position T1 and the first theoretical pixel position P1 is less than or equal to a preset pixel tolerance threshold. Specifically, the pixel tolerance threshold can be determined by the optical design of the spectrometer, and is generally 0.5 pixels.

[0027] In one embodiment, the control drive mechanism 4 drives the grating 13 to rotate within a preset angle range. Simultaneously, the photodetector 11 collects the first optical signal in real time and transmits it to the control system. This includes: the drive mechanism 4 is a motor, which drives the grating 13 to rotate in steps according to a preset step size, such as a minimum step angle of 1.8°. The motor is connected to the grating platform via a reduction gear transmission device. The reduction ratio of the reduction gear transmission device can be designed to achieve an adjustment accuracy of 0.072° for the grating rotation. At each step position, the photodetector 11 collects spectral data corresponding to one frame of optical signal and transmits it to the control system. The control system identifies the first real-time pixel position corresponding to that frame of optical signal and compares it with the first theoretical pixel position until the first real-time pixel position coincides with the first theoretical pixel position. This embodiment, by controlling the drive mechanism in steps and having the photodetector collect spectral data corresponding to each frame of optical signal in real time and transmit it to the control system, allows for real-time judgment and improves the efficiency of the first calibration.

[0028] In one embodiment, the fixing operation of the grating includes: applying adhesive to fix the grating, and simultaneously controlling the second light signal to be incident on the grating, wherein the control system monitors that the position of the second real-time pixel meets a preset requirement. In this embodiment, grating fixing may include: applying adhesive followed by screw fixing. This embodiment continuously inputs the second light signal during the grating fixing process and monitors in real-time whether the position of the second real-time pixel meets the preset requirement. Screws are only tightened when the preset requirement is met; otherwise, the grating needs to be finely adjusted until the preset requirement is met. This further improves the fixing accuracy and avoids slight grating shifts during fixing that could affect the consistency of the spectrometer.

[0029] In one embodiment, obtaining the first theoretical pixel position P1 and the second theoretical pixel position P2 includes: querying a pre-stored position database to obtain the first and second theoretical pixel positions based on the wavelengths of the first and second optical signals and the optical design parameters of the spectrometer; or, directly obtaining the corresponding first optical signal, second optical signal, first theoretical pixel position P1, and second theoretical pixel position P2 from a pre-stored model-position mapping table based on the model of the spectrometer. This embodiment can pre-store a position database or model-position mapping table in the control system, and improve production efficiency by finding the theoretical pixel positions corresponding to each optical signal.

[0030] In another embodiment, obtaining the first theoretical pixel position P1 and the second theoretical pixel position P2 includes: inputting the wavelengths of the first and second optical signals into an optical imaging model for calculation, and outputting the first and second theoretical pixel positions. The optical imaging model is pre-stored in the control system and is established by measuring a prototype of the same model as the spectrometer that has been assembled and calibrated. This embodiment establishes an optical imaging model and stores it in the control system for easy retrieval. Since this optical imaging model is based on a calibrated prototype of the same model of spectrometer, the obtained theoretical pixel positions are more accurate and consistent, improving production quality.

[0031] Specifically, the optical imaging model can be obtained based on polynomial fitting, and its establishment process can be as follows: 1) Assemble a prototype spectrometer and calibrate it to meet the optical design requirements of the corresponding model; 2) The spectrometer collects the spectrum of the standard light source to obtain a set of known wavelengths λi (i=1, 2, ..., N) and their corresponding measured pixel positions P_i on the photodetector; 3) Use the least squares method to fit the data pair (λi, P_i) to a cubic polynomial; 4) The coefficients of each term of the fitted polynomial, the incident angle α of the grating, the grating constant d, and other basic parameters are used as the optical imaging model parameters of the spectrometer and stored in the automated production and debugging system of the spectrometer.

[0032] According to a second aspect of the embodiments of this application, such as Figure 2 As shown, a raster adjustment system is provided for implementing the online adjustment method as described in any of the preceding claims, the adjustment system comprising: Drive mechanism 4 is used to connect to the grating platform in the spectrometer 1, the grating platform being pre-installed with grating 13; The light source module is used to output first and second optical signals of different wavelengths to the grating. The control system includes a first processing module connected to the drive mechanism 4 and a second processing module connected to the photodetector in the spectrometer 1. The first processing module is used to control the drive mechanism 4 to drive the grating 13 to rotate. The second processing module is used to perform the first calibration and the second calibration, and can output the calibration results. After the first calibration is completed, it outputs the fixed position of the grating, that is, the position information of the drive mechanism 4 when the first real-time pixel position T1 and the first theoretical pixel position P1 coincide. After the second calibration is completed, it outputs the operation prompts for performing the fixing operation of the grating 13 or the replacement operation of the grating 13, so that the operator can complete the corresponding operation.

[0033] This embodiment can automatically adjust the grating online, ensuring consistency in the production of each spectrometer.

[0034] In one implementation, such as Figure 2 As shown, the light source module includes two lasers 2 (i.e., a first laser and a second laser) and a transmission fiber 3. The first laser outputs the aforementioned first optical signal, and the second laser outputs the aforementioned second optical signal. The transmission fiber 3 has two input ends 31 and one output end 32. One input end 31 is connected to the first laser, and the other input end 31 is connected to the second laser. The output end 32 is connected to the spectrometer 1, guiding the optical signal output by the lasers 2 to the grating 13 for easy calibration. In this embodiment, the two lasers provide the first and second optical signals respectively, making the optical signals stable and facilitating detection and analysis at the photodetector, thus improving detection accuracy. The two lasers can be connected to the control system, allowing control of its activation.

[0035] Specifically, the control system can obtain the spectrometer model of the grating to be fixed, thereby determining the optical design of the spectrometer and the wavelengths of its corresponding first and second optical signals, and obtaining the first theoretical pixel position P1 corresponding to the first optical signal and the second theoretical pixel position P2 corresponding to the second optical signal. The control system performs the first calibration by controlling the activation of the first laser to output the first optical signal and controlling the drive mechanism 4 to rotate the grating 13. The second processing module receives the spectral data fed back by the photodetector 12 in real time and performs real-time pixel analysis, that is, it identifies the first real-time pixel position T1 corresponding to the intensity peak of the first optical signal (i.e., the first spectral data) and determines whether the first real-time pixel position T1 coincides with the first theoretical pixel position P1. When the second processing module identifies that the first real-time pixel position T1 coincides with the first theoretical pixel position P1, it records the current position of the drive mechanism 4. The position information, i.e., the fixed position of the grating, is obtained and fed back to the first processing module. The first processing module rotates and positions the drive mechanism 4 to the position corresponding to the position information, i.e., positions the grating 13 at the fixed position of the grating. The control system performs a second calibration and controls the second laser to start to output the second light signal. At this time, the first laser has stopped outputting light signals. The second processing module receives the spectral data fed back by the photodetector 12 in real time and performs real-time pixel analysis, i.e., identifies the second real-time pixel position T2 corresponding to the intensity peak of the second light signal (i.e., the second spectral data), and determines whether the second real-time pixel position T2 meets the preset requirements. When the second processing module identifies that the second real-time pixel position T2 meets the preset requirements, it outputs an operation prompt that the grating fixing operation can be performed; otherwise, it outputs an operation prompt that the grating 13 replacement operation can be performed. Based on this, the fixed installation of the grating can be completed.

[0036] In one embodiment, the drive mechanism 4 can be a motor, which is connected to the grating platform through a reduction gear transmission mechanism. The reduction ratio of the reduction gear transmission mechanism can be designed to improve the adjustment accuracy of the drive mechanism in controlling the rotation of the grating.

[0037] According to a third aspect of the embodiments of this application, a spectrometer is provided, comprising: a grating fixed by an online adjustment method as described in any of the preceding claims or a grating adjustment system.

[0038] The above description of the embodiments is intended to enable those skilled in the art to understand and apply this application. It will be apparent to those skilled in the art that various modifications can be easily made to these embodiments, and the general principles described herein can be applied to other embodiments without creative effort. Therefore, this application is not limited to the embodiments described herein, and any improvements and modifications made by those skilled in the art based on the disclosure of this application without departing from the scope and spirit of this application are within the scope of this application.

Claims

1. A method for online adjustment of a spectrometer grating, comprising: A grating is pre-installed in the spectrometer and the grating is connected to the drive mechanism. The spectrometer is equipped with optical elements and a photodetector. The optical elements are used to transmit the light signal passing through the grating to the photodetector, and the photodetector is used to receive and detect the light signal. After acquiring first and second optical signals of different wavelengths, they enter the spectrometer and are respectively located at the first theoretical pixel position and the second theoretical pixel position on the photodetector. The wavelengths of the first and second optical signals are determined by the optical design of the spectrometer. The first optical signal is controlled to be incident on the grating for the first calibration to determine the fixed position of the grating. The first calibration includes: controlling the driving mechanism to rotate the grating within a preset angle range, while the photodetector collects the first optical signal in real time and transmits it to the control system; the control system identifies the first real-time pixel position corresponding to the intensity peak of the first optical signal and determines whether the first real-time pixel position coincides with the first theoretical pixel position. When it is determined that they coincide, the position information of the driving mechanism at this time is recorded, and the grating position corresponding to the position information is the fixed position of the grating. Controlling the drive mechanism to position the grating at the fixed position for a second calibration includes: controlling the second light signal to be incident on the grating; the photodetector acquiring the second light signal in real time and transmitting it to the control system; the control system identifying the second real-time pixel position corresponding to the intensity peak of the second light signal and determining whether the second real-time pixel position meets a preset requirement, wherein the preset requirement includes the difference between the second real-time pixel position and the second theoretical pixel position being within a preset range; When it is determined that the position of the second real-time pixel meets the preset requirements, the grating fixing operation is performed; When it is determined that the position of the second real-time pixel does not meet the preset requirements, the grating replacement operation is performed.

2. The online adjustment method as described in claim 1, characterized in that, Determining whether the first real-time pixel position coincides with the first theoretical pixel position includes: the absolute value of the deviation between the first real-time pixel position and the first theoretical pixel position is less than or equal to a preset pixel tolerance threshold.

3. The online adjustment method as described in claim 1, characterized in that, Controlling the drive mechanism to rotate the grating within a preset angle range, while the photodetector collects the first optical signal in real time and transmits it to the control system, includes: The driving mechanism drives the grating to rotate in a preset step size; At each step position, the photodetector collects a frame of light signal and transmits it to the control system. The control system identifies the first real-time pixel position corresponding to the frame of light signal and compares it with the first theoretical pixel position until the first real-time pixel position and the first theoretical pixel position are found to coincide.

4. The online adjustment method as described in claim 1, characterized in that, The fixing operation of the grating includes: applying adhesive to fix the grating, and simultaneously controlling the second light signal to be incident on the grating, and the control system monitoring the position of the second real-time pixel to meet the preset requirements.

5. The online adjustment method as described in claim 1, characterized in that, Obtaining the first theoretical pixel position and the second theoretical pixel position includes: querying a pre-stored position database to obtain the first theoretical pixel position and the second theoretical pixel position based on the wavelength of the first optical signal, the wavelength of the second optical signal, and the optical design parameters of the spectrometer; or, directly obtaining the corresponding first optical signal, second optical signal, first theoretical pixel position, and second theoretical pixel position from a pre-stored model-position mapping table based on the model of the spectrometer.

6. The online adjustment method as described in claim 1, characterized in that, Obtaining the first theoretical pixel position and the second theoretical pixel position includes: The wavelengths of the first and second optical signals are input into the optical imaging model for calculation, and the first and second theoretical pixel positions are output. The optical imaging model is a model that is pre-stored in the control system and is established by measuring a prototype of the same model as the spectrometer that has been assembled and calibrated.

7. A grating adjustment system for implementing the online adjustment method according to any one of claims 1-6, the adjustment system comprising: A drive mechanism is used to connect to a grating platform in the spectrometer, the grating platform having a grating pre-installed on it. The light source module is used to output a first optical signal and a second optical signal of different wavelengths to the grating; The control system includes a first processing module connected to the drive mechanism and a second processing module connected to the photodetector in the spectrometer. The first processing module is used to control the drive mechanism to drive the grating to rotate; the second processing module is used to perform the first calibration and the second calibration.

8. The grating adjustment system as described in claim 7, characterized in that, The light source module includes a first laser, a second laser, and a transmission optical fiber. The first laser is used to output a first optical signal, and the second laser is used to output a second optical signal. The transmission optical fiber has two input ends and one output end. One input end is connected to the first laser, the other input end is connected to the second laser, and the output end is connected to the spectrometer.

9. The grating adjustment system as described in claim 7, characterized in that, The drive mechanism is connected to the grating platform via a speed reduction transmission mechanism.

10. A spectrometer, comprising: The grating is fixed using the online adjustment method as described in any one of claims 1-6.

Images