Sensor device having a plurality of optical channels

Abstract

The invention relates to a sensor device (1) comprising a detection surface (4) having a plurality of mutually adjacent detection areas (40) for absorbing radiation, and an optical unit (2) which covers the detection surface (4) as viewed in a vertical direction running perpendicularly to the detection surface (4), wherein - the optical unit (2) has a plurality of mutually adjacent optical channels (20); - each optical channel (20) is assigned an optical input unit (21), an optical output unit (22), and an aperture opening (30), wherein the optical output unit (22) is located between the optical input unit (21) and the detection surface (4); - each of the optical input units (21) image at least a portion of a measuring field into an image plane (29); - the aperture openings (30) are located in the image plane (29); and - each of the optical output units (22) image the radiation transmitted by the associated aperture opening (30) onto the detection surface (4).

Description

[0001] Description

[0002] SENSOR DEVICE WITH A PLURALITY OF OPTICAL CHANNELS

[0003] The present application relates to a sensor device having a plurality of optical channels.

[0004] With multi-channel sensors, which, for example, determine the color coordinates of radiation from a measurement field or a defined angular range, measurement errors can occur if color structures or color gradients of the measurement field are spatially resolved into the sensor plane, which is divided into several detection areas. When using color filters in the form of interference filters, precise measurement is further complicated by the fact that their spectral transmission depends comparatively strongly on the angle of incidence, so the angle of incidence must not exceed the acceptance angle of the color filter.

[0005] One task is to provide a sensor device which allows reliable, multi-channel measurement with a high degree of accuracy in a compact design.

[0006] This object is achieved, inter alia, by a sensor device having the features of patent claim 1. Further embodiments and advantages are the subject of the dependent patent claims.

[0007] A sensor device is specified.

[0008] According to at least one embodiment of the sensor device, the sensor device has a detection surface with a plurality of detection regions arranged next to one another and provided for absorbing radiation. All active regions of the sensor device provided for detecting radiation are located in particular within the detection surface. The radiation to be detected can be in the infrared, visible and / or ultraviolet spectral range. In particular, the sensor device is configured to deliver signals from a plurality of detection channels during operation. Exactly one detection region or a plurality of detection regions can be assigned to each detection channel. For example, the detection channels can differ from one another with regard to their spectral sensitivity distribution.

[0009] According to at least one embodiment of the sensor device, the sensor device has an optical system that covers the detection surface when viewed along a vertical direction perpendicular to the detection surface. The optical system is configured to focus radiation from a measuring field onto the detection surface.

[0010] According to at least one embodiment of the sensor device, the optics comprise a plurality of optical channels arranged side by side. In particular, each optical channel is configured to focus radiation from at least part of the measurement field onto the detection surface and, in particular, to illuminate the entire detection surface.

[0011] According to at least one embodiment of the sensor device, each optical channel is assigned an input optical unit, in particular precisely one input optical unit. The input optical unit is, in particular, the first imaging element onto which the radiation to be detected impinges. The input optical unit can form a radiation entrance surface of the sensor device. For example, the input optical unit is designed as a lens, in particular a plano-convex lens. The curved side of the lens is, for example, spherically, aspherically, or torically curved.

[0012] According to at least one embodiment of the sensor device, each optical channel is assigned an output optical unit, in particular exactly one output optical unit. The output optical unit is arranged between the input optical unit and the detection surface. The output optical unit is in particular the last imaging element in the beam path of the radiation to be detected before it strikes the detection surface. For example, the output optical unit is in each case designed as a lens, in particular a plano-convex lens. The curved side of the lens is, for example, spherically, aspherically, or torically curved. The output optical unit is in particular designed to focus the radiation onto the detection surface. For example, the output optical unit is designed to image an image generated by the input optical unit onto the detection surface.

[0013] According to at least one embodiment of the sensor device, each optical channel is assigned an aperture, in particular precisely one aperture. For example, the aperture is arranged in the beam path between the input optics and the output optics.

[0014] According to at least one embodiment of the sensor device, the input optics each image at least a portion of a measurement field into an image plane. According to at least one embodiment of the sensor device, the apertures are arranged in the image plane. The apertures allow the shape of the radiation spot of the radiation to be detected to be adapted to the shape of the detection surface.

[0015] According to at least one embodiment of the sensor device, the output optics each image the radiation transmitted by the associated aperture onto the detection surface. In particular, the radiation is expediently imaged onto the entire detection surface for each aperture.

[0016] In at least one embodiment of the sensor device, the sensor device comprises a detection surface with a plurality of detection regions arranged side by side and provided for absorbing radiation, and an optical system, which covers the detection surface when viewed along a vertical direction running perpendicular to the detection surface. The optical system comprises a plurality of optical channels arranged side by side. Each optical channel is assigned an input optical system, an output optical system, and an aperture, the output optical system being arranged between the input optical system and the detection surface. The input optical systems each image at least part of a measurement field into an image plane. The apertures are arranged in the image plane, and the output optical systems each image the radiation transmitted by the associated aperture onto the detection surface.

[0017] This results in an overlay of the radiation transmitted through the individual optical channels on the detection surface, particularly at every point on the detection surface. Consequently, spatial modulations of the radiation, such as color gradients or color structures within the measurement field, are not sharply imaged in the detection surface. This allows a particularly high level of homogeneity of the radiation originating from the measurement field to be achieved in the detection surface. In other words, the radiation emitted from the measurement field is delivered to the individual detection areas in the detection surface with a high level of homogeneity. Detection errors caused by such spatial modulations in the measurement field can thus be prevented or at least greatly reduced.

[0018] The output optics represent field lenses that combine the divergent beams passing through the respective aperture on the detection surface. The aperture defines the field of view (FOV) for each optical channel.

[0019] There is no need to arrange a diffuser in the beam path to avoid a sharp image of the spatial modulations. The use of a diffuser arranged a sufficiently large distance in front of the detection surface would require a comparatively large overall length of the optics and thus a comparatively large overall height of the sensor device along the vertical direction. Furthermore, a diffuser reduces the overall system transmission, which impairs the signal-to-noise ratio of the sensor device. In contrast to this, the described arrangement can achieve a high accuracy of the measurement signal with a particularly compact design, in particular in the vertical direction. According to at least one embodiment of the sensor device, an axis of the output optics for at least one of the optical channels has an offset relative to an axis of the associated input optics.The offset refers to a lateral direction perpendicular to the vertical direction. For example, the axes each run through the geometric centers of the corresponding optics. In particular, all optical channels whose channel axes are spaced from the optical axis of the optics can exhibit such an offset.

[0020] According to at least one embodiment of the sensor device, an offset between the input optics and the output optics of a first optical channel of the optical channels is smaller than an offset of a second optical channel between the input optics and the output optics of the optical channels, wherein the second optical channel is arranged at a greater distance from an optical axis of the optics than the first optical channel. In other words, the offset of the optical channels increases with increasing distance of the respective optical channel from the optical axis of the optics.

[0021] According to at least one embodiment of the sensor device, the offset for the optical channels is adjusted such that the beam centers of gravity of the radiation passing through the respective apertures intersect at a centroid of the detection area. This criterion applies, for example, with a tolerance of 10% of a diagonal of the detection area.

[0022] According to at least one embodiment of the sensor device, the optical channels each image the entire measurement field onto the detection surface. In this case, the entire detection surface is expediently illuminated. Thus, the optics simultaneously image a common field of view through multiple optical channels.

[0023] According to at least one embodiment of the sensor device, the optical channels each image only a portion of the measurement field onto the detection surface. In this case, the entire detection surface is expediently illuminated for each optical channel. However, the overall field of view of the optics is divided between the individual optical channels. In other words, at least two optical channels of the optics have different viewing directions. This makes it possible to enlarge the measurement field. In particular, the size of the measurement field is not limited by aberrations of an optical channel. To adapt the viewing direction, for example, the apertures for the corresponding optical channels can be arranged individually, decentered—i.e., offset—relative to the respective axis of the optical channel.Optionally, the input optics for the corresponding optical channels can also be arranged decentered relative to the respective axis of the optical channel.

[0024] According to at least one embodiment of the sensor device, the diaphragm openings are each offset along a common direction relative to an axis of the associated input optics, such that a main detection direction of the sensor device runs obliquely to the vertical direction. The measuring field is therefore observed at an angle other than 0° to the vertical direction. This can be advantageous, for example, for suppressing disruptive illumination reflections (also referred to as highlights) when the measuring field is illuminated. By means of the described offset of the diaphragm openings, such an obliquely running main detection direction can be achieved independently of the orientation of the optics and the detection surface, in particular while maintaining the parallelism of the optics and the detection surface and / or perpendicular incidence on the sensor chip.In particular, the main detection direction is also inclined with respect to a surface normal of the optics. During manufacture of the sensor device, a change in angle can be achieved solely by changing the decentration, i.e., without significant changes to the basic structure of the sensor device.

[0025] According to at least one embodiment of the sensor device, the optics are a common, connected element that forms the optical channels with the respective input optics, the respective output optics, and the respective diaphragm opening. Different materials can be used for the different parts of the optics. For example, the input optics and the output optics can be formed as lenses that are applied to opposite main surfaces of a planar optics carrier. Depending on the wavelength of the radiation to be detected, a glass or a plastic, for example, is suitable as a transparent material. For the diaphragms, a radiation-opaque material that surrounds the diaphragm openings can be used. A metal, such as chromium, is suitable, for example.The shape and position of the input optics and the output optics as well as the apertures can be defined by lithographic processes, so that a highly accurate relative positioning of the input optics, the output optics and the apertures to each other can be achieved with high precision already during the manufacture of the optics.

[0026] According to at least one embodiment of the sensor device, a filter structure is arranged at least in places between the optics and the detection areas, so that at least two detection areas have different spectral sensitivity distributions. For example, the individual filters of the filter structure are interference filters, i.e. multi-layer filters in which the transmission properties are adjusted by utilizing interference effects at the interfaces of the individual layers. With the described arrangement, the optics can be specifically designed so that the radiation to be detected strikes the filter structure within an acceptance angle of the filter. For example, for determining the spectral components of the radiation to be detected, a particularly high level of measurement accuracy can be achieved in this way.

[0027] According to at least one embodiment of the sensor device, the optics extend, at least in places, to side surfaces that delimit the sensor device in the lateral direction. For example, the optics exhibit traces of a singulation process, such as sawing marks, at least in places on the side surfaces. During the manufacture of the sensor device, the respective detection surfaces are thus provided with the associated optics at the wafer level, i.e., before singulation into the individual sensor devices.

[0028] According to at least one embodiment of the sensor device, the sensor device is a component that has contact surfaces, preferably all contact surfaces, for external electrical contacting of the sensor device on a mounting side opposite the optics. The sensor device as a whole is therefore a surface-mounted device (SMD) component into which the optics are already integrated.

[0029] According to at least one embodiment of the sensor device, the sensor device has a height of at most 8 mm, or at most 5 mm, or at most 3 mm in the vertical direction. The lower the height in the vertical direction, the easier it is to integrate the sensor device into a mobile electronic device such as a smartphone.

[0030] According to at least one embodiment of the sensor device, the input optics each have a diameter between 50 pm and 1 mm inclusive. The input optics are thus micro-optics, but their diameter is preferably at least large enough that diffraction effects are non-existent or at least not significant.

[0031] The following effects in particular can be achieved with the sensor device described.

[0032] By using micro-optical elements, a particularly low installation height can be achieved for the sensor device in the vertical direction, for example of a maximum of 5 mm or a maximum of 3 mm.

[0033] During the manufacturing process of the sensor device, the optics can be flexibly adapted to different observation scenarios. This provides a high degree of flexibility for implementing different measurement fields, fields of view, or viewing angles through minimal structural changes to the optics.

[0034] In particular, the measuring field can be defined independently of the shape of the detection surface simply by the design of the apertures. Different fields of view or viewing angles can also be achieved by minimal changes to the installation space.

[0035] The size and shape of the transmitted radiation spot on the detection surface is independent of the shape of the measuring field. Rather, it depends solely on the distance between the optics and the detection surface, the f-number, and the shape of the apertures of the input optics.

[0036] A high system transmission can be achieved for the radiation to be detected, for example, compared to a system with a diffuser in the beam path. The input optics can be arranged with a high area fill factor, for example, in the form of a hexagonal grating with round or hexagonal input optics, or in the form of a rectangular or square grating with densely packed rectangular or square input optics.

[0037] The sensor device described is generally suitable for applications where a homogenized image of a defined spatial or angular range on a sensor is desired, for example with a controlled angle of incidence for measuring backscattered light or ambient light for color sensors, for distance measurements based on time-of-flight (TOF) measurements or generally for remission measurements for distance or angle measurement, particularly in conjunction with a minimal overall height of the sensor device. Due to the low achievable overall height, the sensor device is particularly suitable for use in mobile devices, for example in smartphones, tablets or notebooks.

[0038] Features described in connection with at least one embodiment may also be combined with other features described in connection with at least one embodiment, as long as these features do not exclude each other.

[0039] Further embodiments and expediencies will become apparent from the following description of the embodiments in conjunction with the figures.

[0040] It shows :

[0041] Figures 1A and 1B show an exemplary embodiment of a sensor device based on a schematic representation of an illumination beam path in Figure 1A and a schematic representation in a sectional view in Figure 1B; Figure 2 shows an exemplary embodiment of a sensor device based on a schematic representation of an illumination beam path; and Figure 3 shows an exemplary embodiment of a

[0042] Sensor device based on a schematic representation of an illumination beam path. The figures are schematic representations and therefore not necessarily to scale. In particular, comparatively small elements or layer thicknesses may be exaggerated for improved illustration and / or better understanding.

[0043] Identical, similar or equivalent elements are provided with the same reference symbols in the figures.

[0044] An exemplary embodiment of a sensor device 1 is described with reference to Figures 1A and 1B, wherein Figure 1A serves in particular to explain the functional principle of an optics system of the sensor device 1 using an illumination beam path. For improved clarity, not all structural details of the sensor device 1 are explicitly shown in Figure 1A. Figure 1B schematically illustrates a sensor device in which a detection surface 4 is illuminated as described in connection with Figure 1A.

[0045] The illumination beam path is shown schematically in the further embodiments of Figures 2 and 3. The structural features for these embodiments can be designed as described in connection with Figure 1B.

[0046] In the embodiment according to Figures 1A and 1B, the sensor device 1 comprises a detection surface 4 with a plurality of detection regions 40 arranged next to one another and provided for absorbing radiation. The sensor device 1 further comprises an optics 2 which covers the detection surface when viewed along a vertical direction running perpendicular to the detection surface 4. The optics 2 comprises a plurality of optics channels 20 arranged next to one another, with each optics channel being assigned an input optics 21 of an array of input optics, an output optics 22 of an array of output optics, and an aperture 30 of an aperture array 3.

[0047] The input optics 21 each image a measuring field located outside the sensor device into an image plane 29. The apertures 30 are arranged in the image plane 29. The output optics 22 each image the radiation transmitted by the associated aperture 30 onto the entire detection surface 4.

[0048] For simplified explanation, it is assumed below that the measuring field is located at a distance from the sensor device 1 which is large compared to a focal length F of the input optics 21. The image plane 29 is thus located in the focal plane of the input optics 21. The diaphragm field 3 is arranged in the image plane 29 and defines a field of view 7 for each optical channel 20. A full angle of the field of view FOV results for a diameter d of the diaphragm opening 30 and the focal length F of the input optics 21 from the relationship FOV = 2 • arctan (d / 2 F).

[0049] However, the aperture openings 30 are not limited to a circular shape, but can also be rectangular, for example, so that the measuring field can be determined during the manufacture of the sensor device 1, in particular independently of the shape of the detection surface 4.

[0050] The output optics 22 downstream of the input optics 21 images the apertures of the associated input optics 21 onto the detection surface 4. For a distance s between the output optics 22 and the detection surface 4, the focal length f of the output optics 22 results from the imaging equation 1 / f = 1 / F + 1 / s.

[0051] For each optical channel, the radiation transmitted by the aperture 30 is imaged in the form of a divergent light beam through the associated output optics 22 onto the entire detection surface 4. For this purpose, apertures 30, which are arranged offset laterally relative to an optical axis 91 of the optics 2, are individually arranged off-center. Thus, there is an offset 93 between an axis 92 of the associated input optics 21 and an axis 94 of the output optics 22.

[0052] The offset 93 is designed for each of the optical channels 20 such that the beam centers of gravity of the radiation passing through the respective optical channels 20 intersect at the center of the detection surface 4. This is illustrated in Figures 2 and 3 using beam center lines 95. For this purpose, the center of the detection surface 4 and the vertices of the input optics 21 and the output optics 22 are arranged in a line.

[0053] The offset 93 increases for the optical channels 20 with increasing distance from the optical axis 91. In the illustrated embodiment, a first optical channel runs along the optical axis 91 and thus has no offset. A second optical channel 20B is spaced from the optical axis 91 and accordingly has a greater offset.

[0054] The shape of a pattern generated on the detection surface 4

[0055] The shape of the radiation spot corresponds to the shape of the aperture of the input optics 21 of an optical channel 20 and can therefore be selected largely freely during manufacture of the sensor device 1. However, the apertures are preferably designed and arranged such that a high area fill factor can be achieved for the input optics 21. The higher the area fill factor, the higher the overall system transmission can be. For example, input optics 21 can be arranged in a round or hexagonal shape in a hexagonal grid. Alternatively, rectangular or square apertures in a rectangular or square grid are suitable.

[0056] The diameter DD of a radiation spot on the detection surface 4 results from the relationship DD = D • S / F according to the ray theorem.

[0057] The angle of incidence range on the detection surface 4 results from the summation of the divergence in the image space of an individual input optics 21, which corresponds to its numerical aperture NA = D / F, and the inclination of the chief ray of the optical channel 20 furthest away from the optical axis 91 of the optics through the field of output optics 22. In order to avoid measurement errors, the size of the field of input optics 21 perpendicular to the optical axis 91 of the optics 2 is therefore only so large that the angle of incidence range on the detection surface 4 is at most as large as the acceptance angle of the detection areas 40, in particular at most as large as the smallest acceptance angle for different acceptance angles for the individual detection areas 40.

[0058] In the optics 2 shown in Figure 1A, an image of a common field of view 7 on the detection surface 4 is simultaneously realized by a plurality of optical channels 20. This allows for homogeneous illumination of the detection surface 4.

[0059] As shown in Figure 1B, the input optics 21 and the output optics 22 of the optical channels 20 as well as the respectively associated diaphragm openings 30 can be formed by a common, connected optical element. For example, the optics 2 has an optics carrier 25, wherein the input optics 21 and the output optics 22 are arranged on opposite main surfaces of the optics carrier 25. The diaphragm field 3 with the diaphragm openings 30 can be applied to the optics carrier 25 in a manner buried in places beneath the output optics 22, for example in the form of a metal layer, for example made of chromium.

[0060] Such optics can be manufactured using lithographic processes with high precision and over a large area, so that during the manufacture of the sensor device 1, the optics 2 for several sensor devices 1 can be provided in a composite and connected to the remaining parts of the sensor devices 1 at the wafer level. The application of the optics 2 can therefore take place before the individual sensor devices 1 are separated. In this case, the optics 2 extends at least in places to a side surface 15 of the sensor device 1 and can have separation marks, for example saw marks, on the side surface of the optics 2.

[0061] The input optics 21 and the output optics 22 can be formed by structuring the main surfaces of the optics carrier 25 itself or by applying additional material, for example a plastic, to the optics carrier 25. Suitable methods for this are described, for example, in the article "Wafer-Level Hybrid Integration of Complex Micro-Optical Modules," published in Micromachines 2014, 5, 325-340, or in the article "Generation of Complex Micro-Optics by Lithography and UV Molding" in the 2005 annual report of the Fraunhofer Institute for Applied Optics and Precision Engineering IOF, the disclosure content of which is incorporated by reference into the present application.

[0062] The input optics 21 and the output optics 22 can each be spherical or aspherical, for example, toric. Toric input optics can be used, for example, to achieve simple aberration correction, such as with regard to astigmatism or coma.

[0063] Furthermore, the input optics 21 and / or the output optics 22 can be at least partially different from one another.

[0064] The input optics 21 and / or the output optics 22 can also be designed as lens segments. In particular, for the output optics 22, the axes of adjacent output optics 22 can thus be positioned closer to one another.

[0065] The input optics 21 and / or the output optics 22 are, for example, microlenses with a diameter of between 50 pm and 1 mm inclusive. A focal length of the input optics 21 and / or the output optics 22 is, for example, between 0.5 mm and 3 mm inclusive. The smaller these focal lengths are, the lower the overall height of the sensor device can be. The number of input optics 21 is, for example, between 2 and 500 inclusive. However, these values ​​depend heavily on the requirements with regard to the overall size of the sensor device 1 to be manufactured in the lateral direction and the overall height in the vertical direction and can, in principle, be varied within wide limits.

[0066] The arrangement of the input optics 21 and the output optics 22 in a common, connected optical element is particularly advantageous because the input optics 21 and the output optics 22 can thus be aligned with each other with high precision during the manufacture of the optics 2. However, the input optics 21 and the output optics 22 can also be designed as separate optical elements.

[0067] As shown in Figure 1B, the sensor device 1 has a plurality of detection regions 40 in the detection area 4. The detection regions 40 are each formed, for example, by photodiodes, for example with an active region based on silicon or another semiconductor material suitable for radiation absorption. The photodiodes can be separate components or individually controllable segments of a photodiode array.

[0068] A filter structure 8 is arranged between the optics 2 and the detection regions 40. The filters are formed, for example, by an interference filter structure. The spectral sensitivity distribution of the respective detection regions 40 can be adjusted via the filter structure 8. In the exemplary embodiment shown, the filters of the filter structure 8 are each formed directly as a coating on the detection regions 40. Alternatively, the filter structure 8 can also be formed by a separate element in which, for example, the filters for the individual detection regions 40 are arranged on a common filter carrier which extends over several or all of the detection regions 40.

[0069] The number of detection regions 40 is, for example, between two and 100 inclusive. Two or more detection regions 40 can also be assigned to a common detection channel. For example, during operation of the sensor device, the sensor device 1 delivers a signal from several detection channels in the visible spectral range and, alternatively or additionally, from further detection channels in the infrared and / or ultraviolet spectral range.

[0070] The detection areas 40 are arranged on a mounting support 5, for example, a printed circuit board or another support with electrical conductor structures. The sensor device 1 can also have further passive or active electronic components, such as a driver circuit for controlling the detection areas 40. This is not shown in Figure 1B for the sake of simplicity.

[0071] The optics 2 is attached to the mounting support 5, for example via a frame body 6, for example made of a plastic.

[0072] On the mounting side 50 opposite the optics 2, the mounting support 5 has contacts 55 for external electrical contacting of the sensor device. The sensor device 1 is thus designed as a surface-mountable, multi-channel component with the optics 2 already integrated.

[0073] The embodiment shown in Figure 2 essentially corresponds to the embodiment described in connection with Figures 1A and 1B.

[0074] In contrast, the field of view of the optics 2 is divided into individual optical channels 20. In the illustration shown, the central optical channel 20 remains aligned parallel to the optical axis, while the viewing direction of the optical channel 20 arranged above it is directed upwards in the plane of the drawing and the optical channel 20 arranged below it is directed downwards. For this purpose, the diaphragm openings 30 are arranged individually decentered relative to the optical channel axes. Optionally, the input optics 21 of the respective optical channel 20 can also be arranged individually decentered.

[0075] Figure 2 also shows the beam center of gravity lines 25, which intersect in the region of the detection surface 4, for the upper and lower optical channels. In this embodiment, too, each optical channel 20 individually illuminates the entire detection surface 4.

[0076] By dividing the field of view in this way, it is possible to ensure that the size of the field of view is no longer limited by the aberrations of a single optical channel 20, in contrast to the embodiment shown in Figures 1A and 1B. A high degree of measurement signal reliability can thus be achieved even for larger fields of view.

[0077] A main detection direction 9 runs as in the

[0078] In connection with the embodiment described in Figures 1A to 1B, parallel to the optical axis of the optics 2 and parallel to the vertical direction.

[0079] The embodiment shown in Figure 3 essentially corresponds to the embodiment described in connection with Figures 1A and 1B.

[0080] In contrast to this, the main detection direction 9 runs obliquely to the vertical direction. This is achieved in that the diaphragm field 3 as a whole is arranged decentered relative to the field of the input optics 21. There is therefore an offset 97 between the axis 92 of the input optics 21 and the geometric center of the associated diaphragm opening. The main detection direction 9 can thus run obliquely to the vertical direction, with the optics 2 continuing to run parallel to the detection surface 4 and the radiation continuing to impinge on the detection surface 4 essentially perpendicularly. By observing the measurement field at an angle in this way, measurement errors caused by highlights can be suppressed. When manufacturing such a sensor device 1, in order to achieve such an oblique main detection direction, only the diaphragm field 3 as a whole needs to be offset compared to the exemplary embodiment in Figures 1A and 1B.

[0081] Overall, the described sensor device 1 can achieve high measurement accuracy with a simultaneously low overall height due to the homogeneous illumination of the detection area 4. For example, the overall height of the sensor device 1 in the vertical direction is at most 5 mm or at most 3 mm. During manufacture, the sensor device 1 can be adapted to different requirements regarding the desired measuring field and / or different requirements due to a changed acceptance angle of the detection areas by minor modifications of the optics 2.

[0082] This patent application claims priority from German patent application 10 2023 102 131 . 1, the disclosure of which is hereby incorporated by reference. The invention is not limited by the description based on the exemplary embodiments. Rather, the invention encompasses any novel feature and any combination of features, including in particular any combination of features in the patent claims, even if this feature or combination itself is not explicitly stated in the patent claims or the exemplary embodiments.

[0083] Reference symbol list

[0084] 1 sensor device

[0085] 15 side surface

[0086] 2 Optics

[0087] 20 optical channels

[0088] 21 Entrance optics

[0089] 22 Exit optics

[0090] 25 optics carriers

[0091] 29 Image plane

[0092] 3 aperture field

[0093] 30 aperture

[0094] 4 Detection area

[0095] 40 detection range

[0096] 5 mounting brackets

[0097] 50 Mounting side

[0098] 55 Contact

[0099] 6 frame body

[0100] 7 field of view

[0101] 8 Filter structure

[0102] 9 Main detection direction

[0103] 91 optical axis of optics

[0104] 92 Axis of the entrance optics

[0105] 93 Offset

[0106] 94 Axis of the exit optics

[0107] 95 bundle center of gravity line

[0108] 97 Offset of the aperture openings

Claims

Patent claims 1. Sensor device (1) comprising a detection surface (4) with a plurality of detection areas arranged next to one another and intended for the absorption of radiation (40) and an optic (2) which covers the detection surface (4) as seen along a vertical direction perpendicular to the detection surface (4), wherein - the optics (2) comprises a plurality of optical channels (20) arranged next to one another; - each optical channel (20) is assigned an input optical system (21), an output optical system (22) and a diaphragm opening (30), the output optical system (22) being arranged between the input optical system (21) and the detection surface (4); - the input optics (21) each image at least a part of a measuring field into an image plane (29); - the apertures (30) are arranged in the image plane (29); and - the output optics (22) each image the radiation transmitted by the associated aperture (30) onto the detection surface (4).

2. Sensor device according to claim 1, wherein for at least one of the optical channels (20) an axis (94) of the output optics (22) has an offset (93) relative to an axis (92) of the associated input optics (21).

3. Sensor device according to claim 2, wherein the offset (93) between input optics (21) and output optics (22) of a first optical channel (20A) of the optical channels (20) is smaller than an offset between input optics (21) and output optics (22) of a second optical channel (20B) of the optical channels, wherein the second Optical channel (20B) is arranged at a greater distance from an optical axis of the optics than the first optical channel.

4. Sensor device according to claim 2 or 3, wherein the offset (93) for the optical channels is set such that the beam centers of gravity of the radiation passing through the respective apertures intersect at a center of gravity of the detection surface.

5. Sensor device according to one of the preceding claims, wherein the optical channels (20) each image the entire measuring field onto the detection surface (4).

6. Sensor device according to one of claims 1 to 4, wherein the optical channels (20) each image only a part of the measuring field onto the detection surface (4).

7. Sensor device according to one of the preceding claims, wherein the apertures (30) are each offset along a common direction relative to an axis of the associated input optics, so that a main detection direction (9) of the sensor device (1) runs obliquely to the vertical direction.

8. Sensor device according to one of the preceding claims, wherein the optics (2) is a common connected element which connects the optical channels (20) with the respective Input optics (21), the respective output optics (22) and the respective aperture (30).

9. Sensor device according to one of the preceding claims, wherein a filter structure (8) is arranged at least in places between the optics (2) and the detection areas (40) so that at least two detection areas have different spectral sensitivity distributions.

10. Sensor device according to one of the preceding claims, wherein the optics (2) extends at least in places to side surfaces (15) which delimit the sensor device (1) in the lateral direction.

11. Sensor device according to one of the preceding claims, wherein the sensor device (1) is a surface-mountable component which has contact surfaces (55) for the external electrical contacting of the sensor device (1) on a mounting side (50) opposite the optics.

12. Sensor device according to one of the preceding claims, wherein the sensor device (1) has a height of at most 3 mm in the vertical direction.

13. Sensor device according to one of the preceding claims, wherein the input optics (21) each have a diameter between 50 pm and 1 mm inclusive.

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