SUBMERSIBLE ENVIRONMENTAL SENSOR WITH INTEGRATED ANTI-FOULING MEANS

Abstract

An environmental sensor intended for immersion comprising a support (2) one face of which has a sensitive area (8) configured to receive species of interest, anti-fouling means (4) configured to vibrate at least the sensitive area (8), and means for detecting the presence (6) of at least one species of interest on the sensitive area (8). Figure for the abstract: 1

Description

Title of the invention: IMMERSED ENVIRONMENTAL SENSOR INCORPORATING ANTI-FOULING MEANS TECHNICAL FIELD AND STATE OF THE PRIOR ART

[0001] The present invention relates to an environmental sensor in a liquid medium integrating anti-fouling means.

[0002] An environmental sensor in a liquid medium may be intended to control the properties of the medium, for example its pH, its density, etc., or to measure various characteristics such as turbidity, the presence of chemical species or certain strains of bacteria, etc.

[0003] These sensors can be used in industrial environments, for example they can be immersed in tanks, conduits or in natural environments, such as seas, oceans, rivers and canals. A large number of submerged environmental sensors are used. These sensors are often implemented on already existing structures, such as offshore platforms or ships, but can also be part of dedicated oceanographic stations. They are also used for the control of drinking water supply networks and for the control of river water.

[0004] The document "Design and simulation of a Love wave micro-sensor by finite elements", Hallili et al. J3eA, January 2015 available on the site http: / / dx.doi.org / 10.1051 / j3ea / 2015018 describes a Love wave sensor for the detection of gaseous species in a liquid medium. Comprising a piezoelectric substrate and two pairs of interdigitated combs, one pair of combs forming an emitter and one pair of combs forming a receiver. Between the two pairs of combs, a zone for collecting gaseous species is provided, this zone is called a "gap". The emitter generates a Love wave thanks to the piezoelectric effect. The wave travels through the gap towards the receiver, a maximum of energy is confined in the guiding layer. After a certain time (delay time), the acoustic wave reaches the receiver and is converted into an electrical signal. The propagation speed or amplitude varies depending on the species deposited on the gap.The surface of the gap is generally covered with a sensitive layer adapted to the specific attachment of a chemical or biological target.

[0005] Now any surface immersed in a liquid, such as sea water and fresh water, is subject to the deposit and adhesion of organisms which can be bacteria, algae or even molluscs. This phenomenon is known as biofouling. When the environmental conditions When the mental factors are combined, the adhesion of microorganisms to the materials and their multiplication leads to the formation of a film on the surface of the materials. The formation of this film takes place in several stages and can be particularly rapid, for example a few minutes.

[0006] The quality of measurements made by submerged sensors can be affected by biofouling forming on their sensitive surface after only a few days. The gap of the Love wave sensor will quickly be covered by a biofilm which will modify the propagation of the Love waves.

[0007] This is why anti-fouling solutions are necessary to achieve consistent data quality and reduce the maintenance required for cleaning them. Anti-fouling systems are either chemical or mechanical. Chemical systems consist of applying a coating loaded with biocides to the surface to be protected. The toxicity of the biocides contained in the coating allows them to repel and destroy microorganisms. These systems are polluting, and they release biocides until they are exhausted, thus becoming ineffective.

[0008] Mechanical systems use, for example, a windshield wiper to remove microorganisms deposited on the sensitive surface. However, the windshield wiper itself is subject to biofouling. In addition, it requires a certain amount of maintenance to remain effective. Description of the invention

[0009] It is therefore an object of the present invention to provide a submerged environmental sensor having improved protection against biofouling.

[0010] The aim stated above is achieved by an environmental sensor comprising a support carrying a surface, a part of which forms a measurement zone, first means for vibrating at least said measurement surface in order to avoid or at least limit the formation of a biofouling film and second means for carrying out a measurement in the measurement zone by means of generating a wave.

[0011] The measurement consists, for example, of measuring chemical or biological species contained in the liquid in which the sensor is immersed.

[0012] Thanks to the invention, the development of microorganisms on the measurement zone is prevented or the microorganisms already deposited are removed; and the measurement of the species of interest, for example by propagation of a wave, is not distorted by the presence of a biofilm.

[0013] The waves that can be used for the measurement are, for example, Love or Rayleigh waves.

[0014] The measurement area is for example vibrated according to an out-of-plane mode or a Lamb mode. Advantageously, several modes are excited at different frequencies in order to avoid immobile zones, which would allow the biofouling to de- envelop.

[0015] In an exemplary embodiment, a single actuator provides both the anti-fouling function and the measurement function, the control signal exciting the actuator at several frequencies.

[0016] In an exemplary embodiment, the first means also ensure the guidance of the species to be measured in the measurement zone.

[0017] In other words, the environmental sensor according to the invention integrates on the same support means for limiting, or even avoiding, the biofilm and means for measuring the species of interest in the liquid in which the sensor is immersed. Thus it is possible to maintain an optimal measuring support for the measurement, in a reduced footprint.

[0018] One of the objects of the present application is an environmental sensor intended to be immersed comprising a support, one face of which comprises a sensitive zone configured to receive species of interest, anti-fouling means configured to vibrate at least the sensitive zone, said anti-fouling means being carried by the support, and means for detecting the presence of at least one species of interest on the sensitive zone, said detection means being carried by the support.

[0019] Preferably, the anti-fouling means are configured to vibrate at least the sensitive zone in an out-of-plane vibration mode.

[0020] The anti-fouling means are advantageously configured to vibrate at least the sensitive zone in a plate mode, for example a Lamb mode.

[0021] The detection means are preferably configured to implement surface waves.

[0022] In one example, the detection means comprise a transmitter of propagating surface waves arranged on one side of the sensitive zone and a receiver of propagating surface waves emitted by the transmitter arranged on another side of the sensitive zone.

[0023] In another example, the detection means comprise means for generating a standing wave in the sensitive zone and for measuring a variation in the resonant frequency of the standing wave.

[0024] According to an additional characteristic, the detection means also comprise on the sensitive zone a graphene sensor, and / or a field effect transistor type sensor sensitive to variations in ion concentration, and / or an electrochemical sensor.

[0025] The sensor may comprise means forming both the anti-fouling means and the detection means.

[0026] According to an additional characteristic, the anti-fouling means are configured to locate at least one species of interest in the sensitive area.

[0027] In an advantageous example, the sensitive area comprises a functionalization layer configured to capture the at least one species of interest.

[0028] Another subject of the present application is a detection system intended to be at least partially submerged comprising at least one environmental sensor according to the invention and a control unit configured to send a first control signal to the anti-fouling means so as to remove microorganisms from the sensitive area and / or prevent their proliferation on the sensitive area, and a second control signal to the detection means to carry out a detection of the at least one species of interest.

[0029] The control unit may be configured to apply to the anti-fouling means a frequency sweep in a frequency range exciting the support according to different Lamb modes.

[0030] In an exemplary embodiment, the control unit is configured to activate the anti-fouling means before each activation of the detection means.

[0031] The control unit may be configured to collect a signal emitted by the second means.

[0032] According to another example, the control unit is configured to activate the anti-fouling means so as to locate said at least one species of interest in the sensitive area.

[0033] Another object of the present application is a method for controlling an environmental sensor according to the present application, comprising: -Activation of anti-fouling means. -Stopping anti-fouling measures. -Activation of detection means. -Stopping detection means.

[0034] The activation of the anti-fouling means can take place prior to each activation of the measuring means.

[0035] The control method may provide for the activation of the anti-fouling means to locate the at least one species of interest in the sensitive area.

[0036] For example, the control method applies to the anti-fouling means a frequency sweep in a frequency range exciting the support according to different Lamb modes. Brief description of the drawings

[0037] The present invention will be better understood on the basis of the following description and the attached drawings in which:

[0038] [Fig. 1] is a schematic representation of an example of an environmental sensor, in which the detection means implement a propagating wave.

[0039] [Fig.2A]

[0040] [Fig.2B]

[0041] [Fig.2C] are schematic representations of rectangular plates excited according to a Lamb mode at different frequencies.

[0042] [Fig.3] is a schematic representation of another example of a sensor approximately nemental, in which the detection means implement a propagating wave.

[0043] [Fig.4] is a schematic representation of an example of an environmental sensor, in which the detection means implementing a propagating wave comprise interdigital combs.

[0044] [Fig.5] is a schematic representation of another example of a sensor approximately nemental, in which the detection means implement a standing wave.

[0045] [Fig.6] represents a localization of particles of interest on a rectangular support excited in a Lamb mode at 100 kHz.

[0046] [Fig.7] represents a localization of particles of interest on a support in the form of disk excited in an out-of-plane mode at different frequencies.

[0047] [Fig.8] is an example of a support provided with anti-fouling means allowing the vibration of the support in several modes.

[0048] [Fig.9A] is a representation of the support of [Fig.8] excited in a Lamb mode.

[0049] [Fig.9B] is a representation of the support of [Fig.8] excited in a 1st out-of-plane mode.

[0050] [Fig.lOA]

[0051] [Fig.lOB]

[0052] [Fig.lOC]

[0053] [Fig.lOD]

[0054] [Fig.lOE]

[0055] [Fig. 10F] are schematic representations of the elements obtained during dif different steps of an example of a method for manufacturing an environmental sensor according to the invention.

[0056] DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS

[0057] The present application relates to an environmental sensor having improved protection against biofouling or fouling.

[0058] In the present application, the term “environmental sensor” means a sensor intended to detect species of interest contained in the liquid environment in which it is immersed (chemical or biological).

[0059] The species of interest or targets are in the form of particles which will attach to a sensitive area of ​​the sensor.

[0060] Biofouling can occur in sea water, fresh water contained in lakes, rivers, streams, natural and artificial reserves of urban networks. The measuring system is suitable for use in such environments.

[0061] The environmental sensor is intended to be immersed in water, either sea water, fresh water, or another liquid.

[0062] The terms “fouling” and “biofouling” will be considered synonymous in the present application.

[0063] The terms “biofilm” and “biofouling” will be considered synonymous in the present application.

[0064] The term "anti-fouling action" or "anti-fouling action" means preventing the formation of a biofilm and / or removing the biofilm that has formed.

[0065] The sensor can be of different types. It can be intended to monitor parameters such as dissolved oxygen level, turbidity, conductivity, pH or even fluorescence, the presence or even the concentration of certain chemical or biological species. The pH is for example determined by direct measurement of H30+ ions which attach to the sensitive zone.

[0066] In [Fig. 1], we can see a schematic representation of an example of an environmental sensor comprising a support 2, in the example shown it is a rectangular plate, first means 4 designated anti-fouling means and second means 6 designated detection means.

[0067] The anti-fouling means 4 are preferably arranged relative to the detection means 6 so that the entire sensitive area is subjected to the action of the anti-fouling means. The anti-fouling means can be positioned either on the same face as the detection means, or on the opposite face.

[0068] The sensor comprises at least one sensitive zone 8 carried by one face of the support. The sensitive zone 8 is the surface which allows the sensor to collect the particles of the species of interest to be detected.

[0069] In the example shown, the sensitive zone 8 is in the center of the support and the anti-fouling means and the detection means surround the sensitive zone 8.

[0070] In an exemplary embodiment, the sensitive zone 8 comprises a sensitive layer (not shown) suitable for the detection of species of interest, this layer is called a “biological functionalization layer”. For example, it comprises biological macromolecules having the property of specifically attaching to a chemical or biological target.

[0071] The macromolecules can be strands of DNA, RNA or proteins with a specific recognition function, such as lectins, enzymes, immunoglobulins. The functionalization layer makes it possible to have bio-receptors on the surface of the support, which are specific to one or more targeted species. These bioreceptors have a high affinity with this target, which is called specific recognition. Particles and / or microorganisms, in particular those at the origin of biofouling, other than those that we wish to detect, can graft themselves onto the functionalization layer in a non-specific manner, mainly via electrostatic interactions. However, the affinity of these non-specific bonds is much lower, for example by several orders of magnitude, than the affinity characterizing the specific recognition reaction. The rate of attachment of these non-specific organisms to the functionalization zone would be of the same characteristic as the attachment to the other parts of the support (outside the sensitive zone), this is much less favored than the attachment of the specific species targeted by the functionalization.

[0072] According to one example, the functionalization layer comprises single-chain variable fragments or scFVs (Single Chain Variable Fragments in English terminology), which are fusion proteins making it possible to have a particular recognition site, offering a high affinity with the peptide having the antigen corresponding to the scFV fragment (e.g. AR-GCN4), as described in the document “A label-free immunosensor array using single-chain antibody fragments” Natalija Backmann et al. inPNAS, October 11, 2005, vol. 102, no. 41, 14587-14592.

[0073] According to another example, the functionalization layer comprises a polyclonal antibody PAb against ochratoxin A, making it possible to detect ochratoxin A, called mycotoxin, as described in the document “An electrochemical immunosensor for ochratoxin A based on immobilization of antibodies on diazonium-functionalized gold electrode” Abd-Elgawad Radia et al. in Electrochimica Acta 54 (2009) 2180-2184.

[0074] According to another example, the functionalization layer comprises lectin (group of proteins) and in particular Concanavalin A making it possible to detect Escherichia Coli, as described in the document “Detection of Escherichia coli with a label-free impedimetric biosensorbased on lectin functionalized mixed self-assembled monolayer” Haiying Yanga et al, in Sensors and Actuators B 229 (2016) 297-304.

[0075] The anti-fouling means are such that they cause the support to vibrate so that it accelerates the adhering microorganisms and causes them to detach.

[0076] The support 2 has a thickness that is sufficiently small to exhibit significant vibrations. The thickness of the support 2 depends on the material of the support and its mechanical properties. For example, for a polymer or glass support, the thickness of the support may be several mm, or even several tens of mm. In the case of a silicon support, its thickness is advantageously less than mm or a few mm.

[0077] In the example shown, the anti-fouling means comprise two electromechanical actuators 10 in the form of a strip, arranged on the face of the support 2 carrying the sensitive zone, and each extending along an edge of the support 2. The actuators 10 are advantageously piezoelectric or ferroelectric, for example made of PZT, AIN, ZnO. The implementation of piezoelectric or ferroelectric actuators allows good integration of the system and ensures good coupling between the actuators and the support. The actuators 10 each comprise electrodes and an element made of piezoelectric or ferroelectric material arranged between and in electrical contact with the two electrodes.

[0078] Alternatively, the electromechanical actuators may be magnetic, electroactive, or shape memory.

[0079] Alternatively, each actuator is replaced by several actuators arranged parallel to an edge of the support.

[0080] Alternatively, the actuators 10 are located on the face of the support opposite that carrying the sensitive zone 8.

[0081] The anti-fouling means 4 and the detection means 6 are intended to be connected to an energy source and to a control unit UC. The environmental sensor, control unit and energy source assembly forms a detection system.

[0082] The electrodes of the actuators 10 are intended to be connected to an alternating voltage source controlled by the control unit UC. The application of a potential difference between the electrodes induces an electric field in an out-of-plane direction, i.e. normal to the plate. By inverse piezoelectric effect, the electric field causes the deformation of the piezoelectric material in the out-of-plane direction, and in the plane of the plate. This deformation in the plane induces a mechanical torque which will deform the plate by bimetallic effect. By applying an alternating voltage, the plate is made to vibrate. Preferably, the actuators are sized and arranged on the support 2, so as to generate a vibration mode of the plate capable of ensuring an anti-fouling action.

[0083] For example, the actuators 10 excite the support 2 in its first out-of-plane vibration mode or in a plate mode, for example a Lamb mode.

[0084] In Figures 2A to 2C, we can see represented supports excited according to Lamb modes at three different frequencies with antinodes V and nodes N. The actuators 10 are in the form of a strip and are parallel to the antinodes and the nodes. For a plate of 30 mm x 20 mm. In [Fig.2A], the excitation frequency is 175.4 kHz, in [Fig.2B], the excitation frequency is 64 kHz and in [Fig.2C], the excitation frequency is 132 kHz.

[0085] Preferably, the frequency of the supply voltage of the actuators 10 is chosen so that the plate vibrates at a resonant frequency of the first out-of-plane vibration mode or Lamb mode, thereby maximizing the vibration of the plate. A sensor in which the plate does not vibrate at its resonant frequency is not outside the scope of the present invention.

[0086] Since the Lamb mode is a stationary mode, it is advantageous to excite the plate according to Lamb modes at different frequencies whose antinodes and nodes are at different locations, making it possible to obtain a uniform anti-fouling action on the plate.

[0087] In this example, the detection means implement surface waves, for example Love waves or Rayleigh waves, which are emitted in the sensitive zone 8, and the characteristics of which depend on the state of the sensitive zone.

[0088] In the example shown in [Fig.l], the detection means comprise a transmitter 12 for generating a propagating wave on one side of the sensitive zone, and a receiver 14 for receiving the wave on the other side of the sensitive wave.

[0089] The transmitter 12 receives a pulsed or sinusoidal electrical signal from the control unit UC, and generates a surface wave, for example a Love wave in the sensitive area. The receiver 14 converts the wave into an electrical signal which is collected by the control unit UC. The presence of the target particles on the sensitive layer which is located on the acoustic path generates a mass effect, which disturbs the wave. The measurement of these disturbances makes it possible to detect target particles and to trace their concentration linked to the percentage of the mass effect.

[0090] For example, the sensitive zone 8 comprises a base made of piezoelectric material, in which the surface wave is generated by the piezoelectric effect. Alternatively, the wave propagates directly in the support.

[0091] Preferably, the transmitter 12 and the receiver 14 each comprise, for example, a pair of interdigitated combs as shown in [Fig.4].

[0092] In another example, the transmitter and the receiver are in the form of piezoelectric strips and their impedance is measured. This measurement makes it possible to obtain the resonance frequency of the system and / or its quality factor at resonance. A shift of these quantities makes it possible to determine the particles adhering to the area of ​​interest. The measurement of the quality factor is for example carried out by measuring the thickness of the peak at half height of the maximum amplitude or FWHM (full width at half maximum in English terminology), the quality factor Q = Resonance frequency / FWHM. Thus, when acquiring the resonance curve, it is possible to obtain the resonance frequency but also the quality factor. The quality factor is also a measure of the energy dissipated by the resonator during each vibration cycle.If a layer of matter (e.g. biological) clings to the surface of the resonator, this layer will increase the energy that is dissipated by the resonator at each cycle. vibration, which reduces the quality factor.

[0093] In another example, the sensor comprises piezoresistors on the surface of the support, these generate a periodic electrical signal synchronized with the generated wave.

[0094] In [Fig. 3], another embodiment can be seen in which the anti-fouling means and the detection means are formed by the same actuators. The actuators are for example each of the rectangles or a series of squares or rectangles, by which the support can be actuated, but also the measurements can be carried out, for example by monitoring the impedance as described above.

[0095] In the example shown, two actuators are arranged on either side of the sensitive area, and the control unit sends signals at different frequencies to obtain the anti-fouling action and the detection action. For example, the actuators are actuated at low frequency for the anti-fouling action and one of the actuators is excited at high frequency to generate a propagating wave in the sensitive area. Alternatively, pairs of interdigital combs form both anti-fouling means and the detection means.

[0096] In another example shown in [Fig.5], the detection means 6' operate in resonator mode, i.e. they generate standing waves in the sensitive zone 8 and measure the variation in resonance frequency.

[0097] In this example, the sensor comprises actuators forming the anti-fouling means 4 similar to those of [Fig. 1], and detection means 6' comprising a pair of interdigital combs 15 arranged directly above the sensitive zone 8, which generates, in the sensitive zone 8, a standing surface wave, and which also measures the variation in resonant frequency of the emitted wave. As a variant, monitoring of the quality factor can be carried out in addition to or instead of monitoring the resonant frequency. Monitoring the quality factor also offers the advantage of accessing other characteristics, such as the Young's modulus of the detected particles or their degree of hydration.

[0098] In the examples described, the support and the sensitive area are rectangular in shape, but it will be understood that a support and / or a sensitive area of ​​any other shape does not depart from the scope of the present invention. For example, the support may be disc-shaped and a disc-shaped sensitive area is defined, using disc-, ring-, or circular arc-shaped actuators.

[0099] An example of operation of the environmental sensor of [Fig.l] will now be described.

[0100] The environmental sensor is immersed and the anti-fouling means 4 and the detection means 6 are stopped. The support 2 is stationary.

[0101] A defouling phase is ordered. The control unit UC applies an electrical signal on the pair of actuators, for example an alternating electrical signal, preferably at the resonant frequency of the desired mode, for example the Lamb mode. Alternatively, a frequency sweep in a frequency range involving the different desired modes is applied to achieve uniform defouling of the sensitive area. The support is then made to vibrate, imparting acceleration to the microorganisms present on the sensitive area, which are then ejected, and preventing the development of microorganisms. The anti-fouling means can be actuated to carry out a preventive or curative action.

[0102] The anti-fouling means are activated discontinuously, for example periodically. For example, they can be activated once per hour, or once per day. The activation frequency, the activation duration as well as the amplitude and / or the frequency of the vibrations are chosen according to the ability of the liquid to form a biofilm and / or the ability of the sensitive surface to be covered by microorganisms. The anti-fouling means can be activated only during a measurement cycle, prior to the measurement phase, or periodically with a higher frequency than the measurement phases.

[0103] It should be noted that the sedimentation of the particles of interest on the sensitive zone 8 is faster than the formation of the biofouling film on this zone.

[0104] Then, the control unit UC stops the anti-fouling means and starts a detection phase. In particular, the anti-fouling means are stopped during the measurement phases so as not to disturb the measurements, in particular so as not to eject the particles of interest during the measurement.

[0105] The control unit UC then launches a measurement phase, it then sends a signal to the detection means to generate a surface wave in the sensitive zone. Beforehand, a sedimentation phase can be provided to allow the species of interest suspended in the liquid to sediment on the sensitive zone 8. This sedimentation can be passive, the sensor is dormant or, as will be described below, the sedimentation can be active, the actuators of the anti-fouling means being controlled to guide the sedimentation.

[0106] The control unit sends an electrical signal into the transmitter 12 which generates a propagating wave P, for example a Love or Rayleigh wave. The wave propagates in the sensitive zone 8 towards the receiver 14, this wave is impacted by the environment, that is to say impacted by the presence or absence of the chemical species or bacteria to be detected on the sensitive zone 8. The reading of the signal by the receiver 14, resulting from the arrival of Fonde generated and impacted by the environment, makes it possible to characterize the mass of biological objects which has grafted itself to the sensitive zone of the sensor during the time of sedimentation and measurement.

[0107] The duration of the measurement is less than the time required for the formation of a biofilm capable of distorting the detection measurement of the particles of interest. For example, the measurement phase lasts about fifteen minutes, and the duration of formation of a biofouling film capable of disrupting the measurement would be of the order of several hours or tens of hours...

[0108] In the example of [Fig.5], in which the generated wave is a standing wave, it is kept excited throughout the measurement time and the frequency of this wave is measured. When grafting biological species onto the sensitive area, the resonance frequency varies, generally decreases due to this additional grafted mass, which constitutes the useful detection signal.

[0109] The control unit stops the detection means. These can be activated periodically. For example, they can be activated once an hour, or once a day, to monitor the quality of the liquid in which the sensor is immersed.

[0110] The anti-fouling means can be activated at the end of the measurement to eject the cells of interest or these will be ejected during the next phase of removal of the biofilm.

[0111] In another exemplary embodiment, the detection of chemical or biological objects in a liquid medium can be obtained by another type of biological sensor, which is fixed on the support in the sensitive zone 8. For example, a graphene sensor can be used; this is capable of detecting the grafting of biological species via their charge. For example, the graphene is on the sensitive zone.

[0112] Alternatively, it is possible to envisage implementing several sensors of different types, for example a surface wave sensor and a graphene sensor, each occupying a part of the sensitive area, and / or a field effect transistor type sensor sensitive to variations in ion concentration or ISFET (Ion selective field effect transistor) as described in the document “A Scalable ISFET Sensing and Memory Array With Sensor Auto-Calibration for On-Chip Real-Time DNA Detection”, Nicolas Moser et al. in IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 12, NO. 2, APRIL 2018, and / or an electrochemical sensor, as described in the document “Aptamer-Based Electrochemical Biosensor for Interferon Gamma Detection”, Ying Liu et al. in Anal. Chem. 2010, 82, 8131-8136.

[0113] The sensor can also be used to measure the density and / or viscosity of the liquid by measuring the resonance frequency and the quality factor of the vibrating plate in interaction with the liquid medium, in particular when Lamb waves are used. The sensitive zone is formed by the vibrating plate itself. Equations are used to determine density / viscosity as a function of the vibration measurement. This determination is for example described in the document Neffet al. “Piezoelectric Actuated Glas s Plate for Liquid Density and Viscosity Measurement”, Micromachines Journal, 11, 248, doi:10.3390 / mil 1040348.

[0114] In one operating mode of the sensor, it can be provided to be able to guide the species found in the liquid so as to locate their attachment to the sensitive area. For example, the cells of interest are guided towards the vibration antinodes, i.e. the areas of highest amplitude of the plate, according to the mode of the vibrating structure. This localization can be in the form of a band as shown in [Fig.6] on a 40 mm x 30 mm glass plate, the plate being excited in the Lamb mode at a frequency of the order of 100 kHz, and the localization can be of any other form on a membrane in the form of a disk of radius 800 pm, as shown in the images of [Fig.7] excited in the 1st out-of-plane mode, the excitation frequencies being indicated next to each image.

[0115] This possibility of particle localization is described in the document G. Vuillermet et al. “Inverse Chladni patterns in liquids at microscale”, Physical Review Letters 116(18) May 2016.

[0116] By way of example, we will describe examples of dimensioning of the actuators 10 of anti-fouling means.

[0117] The adhesion forces of organisms on the sensitive zone are variable depending on the organism considered. We consider adherent biological cells for which the adhesion forces are between 1 nN and 500 nN. By estimating the mass of a eukaryotic cell ~ 1 ng, we can evaluate the orders of magnitude of the necessary vibration frequencies of the vibrating plate from the formula: [Math 1] I mô With a vibration amplitude of 1 / rm, we obtain an order of magnitude of the minimum frequencies to be used of the order of 1kHz to the order of 10 kHz. The supports of figures 2A to 2C, present simulated frequencies in this range.

[0118] The dimensioning of the actuators in a Lamb mode operating mode is for example described in the document Casset et al, “Low voltage actuated plate for haptic applications with PZT thin-film”, Proceedings ofTransducers 2013, PRL 116, 184501 (2016), pages 1-5.

[0119] This actuator configuration allows for a vibration amplitude and therefore a homogeneous force map on the surface. The actuators will be positioned so as to favor the desired mode(s).

[0120] For example, two actuator columns 1500 pm wide, and positioned 2200 pm from the end of the plate make it possible to obtain the desired deformation amplitude for the indicative frequency of 175 kHz. Actuators 2000 pm wide, the first positioned 4250 pm from the end of the plate, and the second spaced from the first by 17350 pm, make it possible to obtain a mode at a frequency of 64 kHz.

[0121] The implementation of several actuators makes it possible to obtain greater vibration amplitudes. Nevertheless, anti-fouling means using a single actuator are conceivable.

[0122] In a non-limiting manner, the actuators can be positioned close to the outer edge(s) of the support, or be located on two consecutive vibration antinodes.

[0123] Furthermore, in order to excite the support according to several modes, a single actuator can be used, or several sets of actuators are used, each generating one or more modes. For example, in [Fig. 8], the anti-fouling means comprise a pair of first actuators 16 in the form of a strip extending on either side of the sensitive zone and parallel to two opposite edges and a second actuator 18 in the form of a ring surrounding the sensitive zone 8. The first actuators can excite the sensitive zone according to a Lamb mode ([Fig. 9A]) and the second actuator can excite the sensitive zone according to a first out-of-plane mode ([Fig. 9B]). It should be noted that the second actuator allows localization of the out-of-plane deformation to the zone surrounded by the second actuator.

[0124] Alternatively, the anti-fouling means and the detection means are carried by opposite faces of the support.

[0125] The invention makes it possible to produce sensors of large dimensions which are defined by the dimensions of the support. It is therefore possible to analyze large volumes of liquid.

[0126] An example of a manufacturing method for an environmental sensor shown in [Fig.l] will now be described.

[0127] On a substrate 100, for example made of a semiconductor such as silicon or glass, a piezoelectric stack is formed, for example comprising a layer of AIN 104 between two layers of Mo 102 and 106. This stack is formed for example by full-plate deposition using a sputtering technique. For example, the layer of AIN has a thickness of 2 μm and the layers of Mo have a thickness of 200 nm.

[0128] The element thus formed is shown in [Fig.10A].

[0129] During a following step, the layer 106 is structured, for example by etching, to form the electrodes 110 of the actuators 10 of the anti-fouling means 4 and the interdigital electrodes forming the emitter 12 and receiver 14 of the detection means 6. For this it is possible to use chemical etching or etching steps plasma.

[0130] The element thus formed is shown in [Fig.10B].

[0131] During a following step, the AIN layer 104 is structured in order to separate the piezoelectric elements 112 of anti-fouling means and the piezoelectric layer 114 forming the base of the sensitive zone 8. For example, the layer 104 is etched, for example by chemical etching.

[0132] The element thus formed is shown in [Fig.10].

[0133] In a following step, the layer 102 is structured, for example etched, in order to form the electrodes 116 of the anti-fouling means. The layer 116 is present under the detection means but is not used as an electrode.

[0134] The element thus formed is shown in [Fig.10D].

[0135] In a following step, a passivation layer 118 is formed over the entire element of [Fig. 10D], in order to isolate the actuators from the external environment. The passivation material is for example SiO2. The passivation layer 118 has for example a thickness of 300 nm. The passivation layer 118 is open, for example by etching, at the level of the electrodes to allow their subsequent electrical connection. In this example, the passivation layer 118 has been etched on the sensitive area. Alternatively, the passivation layer 118 can be kept on the sensitive area.

[0136] The element thus formed is shown in [Fig.10E].

[0137] In a following step, the connection lines and pads 120 are produced in the open portions of the passivation layer, for example by depositing a gold layer and etching it. The gold layer has, for example, a thickness of 500 nm.

[0138] The element thus formed is shown in [Fig. 10F].

[0139] Preferably, several sensors are produced simultaneously on the same substrate, then are individualized, for example by cutting.

Claims

Claims

1. Environmental sensor intended to be immersed comprising a support (2), one face of which comprises a sensitive zone (8) configured to receive species of interest, anti-fouling means (4) configured to vibrate at least the sensitive zone (8), said anti-fouling means (4) being carried by the support (2), and means (6, 6') for detecting the presence of at least one species of interest on the sensitive zone (8), said detection means (6, 6') being carried by the support (4), in which the anti-fouling means are also configured to locate the at least one species of interest on the sensitive zone (8).

2. Sensor according to claim 1, in which the anti-fouling means (4) are configured to vibrate at least the sensitive zone (8) in an out-of-plane vibration mode.

3. Sensor according to claim 1 or 2, wherein the anti-fouling means (4) are configured to vibrate at least the sensitive zone (8) in a plate mode, for example a Lamb mode.

4. Sensor according to one of claims 1 to 3, in which the detection means (6) are configured to implement surface waves.

5. Sensor according to claim 4, in which the detection means (6) comprise an emitter (12) of propagating surface waves arranged on one side of the sensitive zone (8) and a receiver (14) of propagating surface waves emitted by the emitter (12) arranged on another side of the sensitive zone (8).

6. A sensor according to claim 4, wherein the detection means (6') comprise means for generating a standing wave in the sensitive area and for measuring a variation in the resonant frequency of the standing wave.

7. Sensor according to one of claims 1 to 6, in which the detection means also comprise on the sensitive zone a graphene sensor, and / or a field effect transistor type sensor sensitive to variations in ion concentration, and / or an electrochemical sensor.

8. Sensor according to one of the preceding claims, comprising means forming both the anti-fouling means and the detection means.

9. Sensor according to one of the preceding claims, in which the sensitive zone (8) comprises a functionalization layer configured to capture the at least one species of interest.

10. Detection system intended to be at least partially submerged comprising at least one environmental sensor according to one of the preceding claims and a control unit (UC) configured to send a first control signal to the anti-fouling means (4) so ​​as to remove microorganisms from the sensitive area (8) and / or prevent their proliferation on the sensitive area, and a second control signal to the detection means (6) to carry out a detection of the at least one species of interest.

11. 1 Detection system according to the preceding claim in combination with claim 3, in which the control unit (UC) is configured to apply to the anti-fouling means a frequency sweep in a frequency range exciting the support (2) according to different Lamb modes.

12. 2Detection system according to claim 10 or 11, wherein the control unit (UC) is configured to activate the anti-fouling means (4) before each activation of the detection means.

13. 3Detection system according to one of claims 10 to 12 in combination with claim 5, wherein said control unit is configured to collect a signal emitted by the second means.

14. 4 Detection system according to one of claims 10 to 13, wherein said control unit is configured to activate the anti-fouling means (4) so ​​as to locate said at least one species of interest on the sensitive area.

15. 15. Method for controlling an environmental sensor according to one of claims 1 to 9, comprising: -Activation of the anti-fouling means, -Stopping of the anti-fouling means, -Activation of the anti-fouling means to locate the at least one species of interest in the sensitive area, -Stopping of the anti-fouling means, -Activation of the detection means, -Stopping of the detection means.

16. 6Control method according to claim 15, in which the activation of the anti-fouling means takes place prior to each activation of the measuring means.

17. 7Control method according to claim 15 or 16, in combination with claim 5, comprising the application to the anti-fouling means of a frequency sweep in a frequency range exciting the support (2) according to different Lamb modes.

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