Contact device

Abstract

Title: Contacting device The contacting device (100) has: • a housing (102), which has a flange (108); • a through opening (109) for receiving a shaft (200) in the housing (102), wherein the through opening (109) extends through the housing (102) from the flange (108) along an axis of rotation of the shaft (200); • an electrical sliding contact (110) for contacting the shaft (200), wherein the housing (102) has a cavity for receiving the sliding contact (110), wherein the cavity opens into the through opening (109); • a gas-permeable dust separator (114), wherein the dust separator (114) is disposed between the flange (108) and the cavity or wherein the cavity is disposed between the dust separator (114) and the flange (108);a drive device, which is adapted to cause movement of the housing (102) and the shaft (200) relative to each other Figure for abstract: 1;

Description

Title of the invention: Contacting device

[0001] Different examples of embodiment relate to a contacting device.

[0002] In general, a workpiece, for example a tube or other elongated workpiece, can be treated (subjected to treatment), for example coated, so that the chemical and / or physical properties of the workpiece can be modified. Different coating methods can be used to coat a workpiece. For example, a vacuum deposition plant can be used to deposit one or more layers on a workpiece or workpieces by means of chemical and / or physical vapor deposition.

[0003] If the part is to be coated around the perimeter, it is traditionally coated from several sides and retains its position and orientation. Under certain conditions, several tubes are also fixed together on a support, which is arranged in the vacuum deposition installation and rotates the tubes continuously during their coating.

[0004] A throughput of elongated workpieces is increased during processing by rotating them about their longitudinal axis during transport along their longitudinal extent (in this case the length). For example, during translation along their longitudinal extent, the workpieces are additionally driven into a rotary motion (also called rotation). This allows, for example, supportless transport (also called carrier-free transport) of elongated workpieces (e.g. substrate tubes) along the longitudinal direction (direction of the longitudinal extent) with simultaneous rotation of the elongated workpieces.

[0005] For various machining processes, it may be necessary to establish electrical contact under vacuum with the transported (elongated) workpieces, for example during a high-intensity magnetic sputter coating (HiPIMS) process, during sputter etching, generally for polarization applications, etc. For example, it may be necessary for the electrical contacting to be suitable for relatively large pulsed currents. This contacting is carried out, for example, by means of a transport device, by means of which a transport of the workpiece is carried out.

[0006] According to various embodiments, a contacting device is provided, which allows both a translational movement of the transport device and a rotary movement (rotational movement) of the transport device and thus provides electrical contacting of the workpiece by means of the transport device. The transport device may for example be designed to stimulate, by means of the rotary movement, a transport of the workpiece along a transport direction and, at by means of translational movement, a rotation of the part around an axis which is parallel to the direction of transport.

[0007] Various examples are described below, which relate to what is described herein and shown in the figures.

[0008] Example 1 is a contacting device, having: a housing, which has a flange; a through opening for receiving a shaft in the housing, the through opening extending through the housing from the flange along an axis of rotation of the shaft; an electrical sliding contact for contacting the shaft, the housing having a cavity for receiving the sliding contact, the cavity opening into the through opening; a gas-permeable dust separator, which is adapted to separate dust (e.g. having abrasion from the sliding contact) upon discharge from the cavity through the dust separator, the dust separator being arranged between the flange and the cavity or the cavity being arranged between the dust separator and the flange;a drive device (e.g. having a transmission), which is designed to cause a movement of the housing and the shaft relative to each other and along the axis of rotation of the shaft, preferably when the shaft is brought into a rotary movement about the axis of rotation (e.g., on the base thereof).;

[0009] Example 2 is designed according to Example 1, the sliding contact being designed to slide on the shaft.

[0010] Example 3 is designed according to Example 1 or 2, in which the sliding contact has a contact surface for contacting the shaft, at least one edge of the sliding contact adjacent to the contact surface having a rounding (e.g. is rounded), preferably with a larger rounding radius than an adjacent edge of the sliding contact, which delimits a surface of the sliding contact opposite the contact surface.

[0011] Example 4 is designed according to one of Examples 1 to 3, the sliding contact having electric carbon.

[0012] In example 5, the contacting device according to one of examples 1 to 4 may optionally also have: an electrical connection outside the housing for electrically coupling the sliding contact.

[0013] Example 6 is designed according to one of examples 1 to 5, the dust separator surrounding (for example entirely) the passage opening along a path closed on itself (for example annular).

[0014] Example 7 is designed according to one of Examples 1 to 6, wherein the dust separator has a plurality (e.g. connected in a network) of fibers (e.g. in the form of felt, steel wool, paper, non-woven or fabric, e.g. textile fabric), having a plurality of solid particles (e.g. in the form of a granular and / or sintered material, and / or a plurality of pores (e.g. connected together in a network) (e.g. in the form of a spongy material and / or a foam-like material).

[0015] Example 8 is designed according to one of Examples 1 to 7, the dust separator (e.g. a material thereof) having a porosity greater than or equal to 40%, preferably greater than or equal to 80%, and / or an average pore size less than or equal to 100 pm (e.g., etc.).

[0016] Example 9 is designed according to one of Examples 1 to 8, the dust separator being a first dust separator which is arranged between the flange and the cavity; and the contacting device further having a second gas-permeable dust separator, which is designed to separate dust (e.g. having sliding contact abrasion) when discharging from the cavity through the second dust separator, the cavity being arranged between the second dust separator and the flange.

[0017] Example 10 is designed according to example 9, the second dust separator surrounding (for example entirely) the passage opening along a path closed on itself (for example annular).

[0018] Example 11 is a vacuum assembly, having: a vacuum chamber; and the contacting device according to one of Examples 1 to 10; at least the housing, the dust separator and the sliding contact of the contacting device being arranged in the vacuum chamber; and preferably the shaft, which is rotatably mounted and received in the passage opening.

[0019] In example 12, the vacuum assembly according to example 11 may further optionally have: a transport device, which has the shaft and optionally one or more additional shafts, for transporting a workpiece (for example in the form of a bar).

[0020] In Example 13, the vacuum assembly according to Example 12 may optionally further have: a coating device, which is arranged between two of the plurality of shafts.

[0021] Example 14 is designed according to example 12 or 13, the transport device having at least one stimulation member, which is mounted so as to be able to be moved along the axis of rotation of the shaft by means of the contacting device and designed to stimulate a movement (for example a rotation) of the workpiece when the latter rests on the shaft.

[0022] Example 15 is designed according to Example 14, the housing being coupled to the stimulation member by means of the flange, so that movement of the housing along the axis of rotation of the shaft causes movement of the workpiece.

[0023] Example 16 is designed according to example 14 or 15, the stimulation member being in contact with the part when the latter rests on the shaft.

[0024] Example 17 is designed according to one of Examples 14 to 16, the stimulation member having a groove for receiving the part, the groove preferably being extended along a helix.

[0025] We can see that

[0026] [Fig-1] [Fig.l] shows a device for contacting with an opening of passage according to different embodiments in a schematic cross-sectional view;

[0027] [Fig.2] [Fig.3] Figures 2 and 3 respectively the device for contacting a shaft received in the passage opening according to different embodiments in a schematic cross-sectional view;

[0028] [Fig.4A] [Fig.4A] a cross-section of an electrical sliding contact perpendicular to an axis of rotation of the shaft according to different embodiments;

[0029] [Fig.4B] [Fig.4B] a cross-section of the electrical sliding contact parallel to the axis of rotation of the shaft according to different embodiments; and

[0030] [Fig.5] [Fig.5] a transport device according to different embodiments.

[0031] In the following detailed description, reference is made to the accompanying drawings which are part thereof and in which are shown, by way of illustration, specific embodiments in which the invention may be implemented. In this regard, directional terminology such as "top", "bottom", "front", "rear", "front", "rear", etc. is used with reference to the orientation of the figure(s) depicted. Since the components of the embodiments may be positioned in a number of different orientations, the directional terminology is used for illustrative purposes and is in no way restrictive. It is understood that other embodiments may be used and that structural or logical modifications may be made without departing from the scope of protection of the present invention.It is understood that the features of the various embodiments described herein by way of example may be combined with each other, unless specifically indicated otherwise. The following detailed description should therefore not be interpreted in a restrictive sense, and the scope of protection of the present invention is defined by the appended claims.

[0032] In the context of this description, the terms "connected", "connected" and "coupled" are used to describe both a direct and indirect connection (e.g., ohmic and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection as well as a direct or indirect coupling. In the figures, identical or similar elements are designated by identical reference signs, where appropriate.

[0033] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a connection and / or an interaction (e.g. mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect. Several elements can for example be coupled to each other along an interaction chain along which the interaction can be exchanged, for example a fluid (this is also referred to as fluidic coupling). For example, two elements coupled to each other can exchange an interaction with each other, for example a mechanical, hydrostatic, thermal and / or electrical interaction. A coupling of several vacuum components (e.g. valves, pumps, chambers, etc.) with each other can have the fact that these are coupled to each other fluidically.According to various embodiments, "coupled" may be understood to mean a mechanical (e.g., physical or bodily) coupling, for example by means of direct physical contact. A coupling may be configured to transmit a mechanical interaction (e.g., force, torque, etc.).

[0034] In the context of vacuum components (e.g., a pump, a chamber, a pipe, a valve, etc.), the term "coupled" or "coupling" may be understood to mean a connection to a common vacuum system. The components of the vacuum system may be configured to exchange gas with each other by means of the coupling, where the coupling may be separate from gas outside the vacuum system.

[0035] [Fig.l] illustrates a cross-section of a contacting device 100 according to different embodiments.

[0036] The contacting device 100 may have a housing 102. The housing 102 may be in one or more parts. For example, the housing 102 may have a housing body 104 and a housing cover 106. The housing 102 may have a flange 108, for example a front flange. The flange 108 may for example be used to couple a stimulation member (for example the stimulation member of [Fig. 5]) to the contacting device 100 (i.e. to fix the stimulation member to the contacting device 100).

[0037] According to various aspects, the housing 102 may have a through opening 109. The through opening 109 may be configured to receive a shaft in the housing 102. [Fig. 2] and [Fig. 3] each show a cross-section of the contacting device 100 with a shaft 200 received in the through opening 109 according to various embodiments. The shaft 202 may for example have a shaft flange 202 for attachment to another element and / or by means of which torque may be applied to the shaft 202. The through opening 109 of the housing 102 may extend through the housing 102 from the flange 108 (e.g. the front face) along an axis of rotation of the shaft 200.

[0038] The housing 102 can be designed such that the shaft 200 can be moved relative to the housing 102 (e.g., rotated about its axis of rotation). This relative movement between the shaft 200 and the housing 102 is explained here from the point of view of a reference system, which is fixed relative to the axis of rotation and the direction of gravitation and is therefore easy to understand. It can be understood that what is described in this regard can be applied by analogy to a reference system which is fixed relative to the housing 102 or to the shaft 200. The housing 102 can be designed such that it can be moved along the axis of rotation of the shaft 200 (also referred to as translation of the housing 102). The housing 102 can, for example, have a bearing arrangement or be designed as such (e.g., which has a translation bearing, for example, a plain bearing).

[0039] According to various embodiments, the contacting device 100 or a system (e.g., a vacuum assembly), which has the contacting device 100, may have a drive device. The drive device may be configured to drive the movement of the housing 102 and the shaft 200 relative to each other (i.e., the relative movement between the shaft 200 and the housing 102). The drive device may be configured to drive the movement of the housing 102 along the axis of rotation of the shaft 200. For example, the drive device may be configured to drive the movement (translation) of the housing 102 along the axis of rotation of the shaft 200 when the shaft 200 is brought into a rotary movement about the axis of rotation (i.e., rotation).

[0040] The drive device may be any type of device capable of driving a movement of the shaft 200 and / or the housing 102, for example by generating or at least transmitting a corresponding force to the shaft 200 and / or the housing 102. Examples of components of the drive device have: a motor (for example electric and / or pneumatic), a reciprocating piston, and / or a transmission (for example a coupling transmission).

[0041] According to various embodiments, the contacting device 100 may have one or more electrical sliding contacts 110 (n = 1 to N). The one or more electrical sliding contacts 110 (n = 1 to N) may be configured to contact the shaft 200 (N may be any integer greater than or equal to one). According to various aspects, the one or more electrical sliding contacts 110 (n = 1 to N) may provide electrically conductive contact between the housing 102 and the shaft 200. In the exemplary configuration shown in [Fig. 1] to [Fig. 3], the contacting device 100 has four electrical sliding contacts (a first electrical sliding contact 110 (1), a second electrical sliding contact 110 (2), a third electrical sliding contact 110 (3), and a fourth electrical sliding contact 110 (4)). It is understood that this is for illustration purposes and that the device of contacting 100 may also have any other number of sliding electrical contacts 110.

[0042] The housing 102 may have, for each sliding contact 110 (n) of one or more electrical sliding contacts 110 (n = 1 to N) (for example segmented), a cavity respectively associated for receiving the sliding contact 110 (n). The cavity respectively associated may open into the passage opening 109. Thus, the shaft 200 may be brought into contact by means of the sliding contact 110 (n). Each of the one or more electrical sliding contacts 110 (n = 1 to N) may be designed to slide on the shaft 200.

[0043] Optionally, the contacting device 100 may have for each electrical sliding contact 110 (n) a respectively associated fixing element (having for example a screw and / or a spring), which makes it possible to press the electrical sliding contact 110 (n) against the shaft 200, for example with a force (also called pressing force), and / or to modify the pressing force.

[0044] According to various embodiments, at least one (e.g. each) electrical sliding contact 110 (n) of one or more electrical sliding contacts 110 (n = 1 to N) may have or be made of electrical carbon. Electrical carbon has comparatively good contact properties, even when the contact surfaces are in motion (e.g. movement of the shaft 200 relative to the contacting device 100 and / or translation of the contacting device 100 along the axis of rotation of the shaft 200). The use of electrical carbon for the electrical sliding contact 110 (n) may be advantageous compared to a contact spring, for example during branching. Indeed, electrical carbon makes it possible to dissipate higher currents compared to a contact spring.Thus, contact springs can cause significant local heating (or even sparks) due to the reduced contact surface. This can lead to damage and therefore a reduction in the service life of the installation in which the contacting device is used.

[0045] The electric carbon certainly improves the electrical contact of the shaft 200, but it presents a greater abrasion than the contact springs. This abrasion is disadvantageous in vacuum applications. All the more so since this abrasion is electrically conductive and can spread everywhere and cause damage during the evacuation and / or ventilation of the installation due to the high flow speeds.

[0046] According to various embodiments, an encapsulation of the electrical sliding contacts is provided which, on the one hand, reduces (for example, prevents) abrasion damage to the electrical sliding contacts and, on the other hand, ensures vacuum conditions in the installation (for example, vacuum chamber). In this way, better electrical contact is obtained (for example by using electric carbon) while ensuring vacuum conditions.

[0047] For this purpose, the contacting device 100 may have at least one gas-permeable (or gas-permeable) dust separator 114, the at least one gas-permeable dust separator 114 having, for example, two gas-permeable dust separators 114 (also called first dust separator and second dust separator).

[0048] The at least one gas-permeable dust separator 114 may be configured to separate dust (e.g., having abrasion from one or more electrical sliding contacts), for example, upon evacuation from the cavity through the gas-permeable dust separator 114. The term "gas-permeable," as used herein, may be understood to mean that matter in a gaseous state (also referred to as gas) may move through the at least one gas-permeable dust separator 114, while movement of the matter in a solid state (e.g., dust) through the gas-permeable dust separator 114 is at least partially prevented, for example, by the fact that the matter in a solid state is separated (i.e., separated from the gas). For this purpose, the at least one gas-permeable dust separator 114 may, for example, have or be made of a porous material.The porous material may have an average pore size of less than or equal to 100 pm (for example, less than or equal to 50 pm). The porous material may, for example, have a porosity of greater than or equal to 40%, (for example, a porosity of greater than or equal to 60%, for example, a porosity of greater than or equal to 80%, etc.).

[0049] This allows an area between the shaft 200 and the contacting device 100 and / or at least a portion of the one or more cavities to be evacuated through the at least one gas-permeable dust separator 114. This is an advantage over a vacuum-tight encapsulation, which can cause leaks that are very difficult to identify.

[0050] The at least one gas-permeable dust separator 114 may, for example, comprise felt, steel wool, paper, non-woven fabric, textile fabric, granular material, sponge material and / or foam-like material.

[0051] The at least one gas-permeable dust separator 114 may be configured to surround (e.g., entirely) the passage opening 109 along a self-enclosed (e.g., annular) path.

[0052] In the exemplary configuration shown in [Fig.l] to [Fig.3], the contacting device 100 has the first gas-permeable dust separator 114 (1) and the second gas-permeable dust separator 114 (2). It will be understood that this is an exemplary configuration and that, in other configurations, the contacting device 100 may have only one of the first gas-permeable dust separator 114 (1) or second gas-permeable dust separator 114 (2).

[0053] The first gas-permeable dust separator 114(1) may be disposed between the flange 108 and one or more cavities (associated with the electrical sliding contacts). The one or more cavities (associated with the electrical sliding contacts) may be located between the second gas-permeable dust separator 114(2) and the flange 108.

[0054] Optionally, the housing 102 may have one or more ventilation orifices (e.g., a vent hole), which open into at least one of the cavities. In this way, a portion of the cavity, in which there is no abrasion, can be evacuated.

[0055] According to different embodiments, the contacting device 100 may have an electrical connection outside the housing 102 for the electrical coupling of the sliding contact.

[0056] [Fig.4A] shows a cross-section of an electrical sliding contact 110(n) perpendicular to the axis of rotation of the shaft 200 according to different embodiments. The electrical sliding contact 110(n) may have a contact surface 402 for contacting the shaft 200, which slides on the shaft in operation. According to different aspects, this contact surface 402 may have a contour (for example a curvature) (for example concave), which substantially corresponds to that of the shaft 200.

[0057] The contour may for example have a radius, which corresponds substantially to the radius of the tree.

[0058] [Fig.4B] shows a cross-section of the electrical sliding contact parallel to the axis of rotation of the shaft 200 according to different embodiments. Optionally, at least one edge of the electrical sliding contact 110 (n) delimiting the contact surface 402 may have a rounding 404 (for example, this edge may be rounded). This may reduce abrasion of the electrical sliding contact 110 (n) during translation (in the direction 103) of the contacting device 100 along the axis of rotation of the shaft 200. The rounding 404 may have a radius that is smaller than the radius of the shaft and / or larger than a radius of an adjacent edge of the contact surface 402 or at least of the sliding contact.

[0059] According to different embodiments, a vacuum assembly may have a transport device with a contacting device 100. An example of a transport device 500 is shown in [Fig.5].

[0060] The vacuum assembly may have a vacuum chamber. A vacuum chamber may or is intended to be provided, for example, by means of a chamber housing, in which one or more vacuum chambers may be provided. The housing chamber may, for example, be coupled to a pump assembly, for example a vacuum pump assembly, for providing negative pressure or vacuum (vacuum chamber housing) and be stably designed such that it resists the action of air pressure in the pumped state. The pump assembly (having at least one vacuum pump, for example a high vacuum pump, for example a turbomolecular pump) may be capable of pumping a portion of the gas into the interior of the vacuum chamber. The or each vacuum chamber may optionally have a chamber cover, which closes the interior of the vacuum chamber in a vacuum-tight manner.

[0061] The chamber housing, for example a vacuum chamber provided therein, may be designed such that a negative pressure (i.e., a pressure below atmospheric pressure) can be provided therein, for example a vacuum (i.e., a pressure below 0.3 bar), for example a pressure in a range of about 10 mbar to about 1 mbar (in other words, a coarse vacuum) or less, for example a pressure in a range of about 1 mbar to about 10-3 mbar (in other words, a fine vacuum) or less, for example a pressure in a range of about 10-3 mbar to about 10 7 mbar (in other words, a high vacuum) or less, for example a pressure below high vacuum, for example, below about 10-7 mbar. The atmospheric pressure (e.g., 1 bar) may be the pressure that acts from the outside on the chamber housing.

[0062] According to various aspects, at least a portion of the contacting device 100 (e.g., the elements of the contacting device 100 except the drive device) may be disposed in the vacuum chamber.

[0063] The transport device 500 may have the shaft 200 and, optionally, one or more additional shafts for transporting a workpiece 504 (e.g., rod-shaped or elongated). The vacuum assembly may, for example, have a coating device, which is arranged between two of the several shafts. The shaft 200 may have or form a transport roller 502. The drive device may be designed to stimulate a rotation of the shaft 200 and thus a transport of the workpiece 504.

[0064] The transport device 500 may have a stimulation member 506. The stimulation member 506 may be coupled to the contacting device 100 by means of the flange 108. The stimulation member 506 may come into contact with the workpiece during operation, so that the translation of the contacting device 100 may cause a translation of the stimulation member 506 and therefore a rotation of the workpiece.

[0065] Optionally, the stimulation member 506 may be implemented in the form of a so-called comb roller. The comb roller may have a plurality of peripheral projections (called teeth, for example in the form of discs) serving as track boundaries, each tooth extending across the conveying surface. This allows the workpieces to be guided laterally by means of the teeth. The teeth may each delimit a peripheral groove, with a groove 506n being arranged between two teeth each time. Each of the grooves 506n may extend across the conveying surface in the comb roller. Thus, the workpieces 504 do not necessarily rest on the bottom of the grooves 506n, which allows for particularly gentle (at least with low abrasion) conveying of the workpieces, for example by sparing their surface or coating. The curvature of the grooves 506n may facilitate rotation of the workpiece.

Claims

Claims

1. Contacting device (100), having: a housing (102), which has a flange (108); a through opening (109) for receiving a shaft (200) in the housing (102), wherein the through opening (109) extends through the housing (102) from the flange (108) along an axis of rotation of the shaft (200); an electrical sliding contact (110) for contacting the shaft (200), wherein the housing (102) has a cavity for receiving the sliding contact (110), wherein the cavity opens into the through opening (109); a gas-permeable dust separator (114), which is adapted to separate dust when discharging from the cavity through the dust separator (114), wherein the dust separator (114) is arranged between the flange (108) and the cavity or wherein the cavity is arranged between the dust separator (114) and the flange (108);a drive device, which is designed to cause a movement of the housing (102) and the shaft (200) relative to each other and along the axis of rotation of the shaft (200), preferably when the shaft (200) is brought into a rotational movement about the axis of rotation.;

2. The contacting device (100) of claim 1, wherein the sliding contact (110) is adapted to slide on the shaft (200).

3. Contacting device (100) according to claim 1 or 2, wherein the sliding contact (110) has a contact surface (402), preferably facing the cavity and / or concave, for contacting the shaft (200), wherein at least one edge of the sliding contact (110) adjacent to the contact surface (402) has a rounding (404), preferably with a rounding radius larger than that of an edge of the sliding contact adjacent to that, which delimits a surface of the sliding contact opposite the contact surface.

4. A contacting device (100) according to any one of claims 1 to 3, wherein the sliding contact (110) has electric carbon.

5. The contacting device (100) of any one of claims 1 to 4, further having: an electrical connection outside the housing (102) for electrically coupling the sliding contact (110).

6. A contacting device (100) according to any one of claims 1 to 5, wherein the dust separator (114) surrounds the passage opening (109) along a path closed on itself.

7. A contacting device (100) according to any one of claims 1 to 6, wherein the dust separator (114) has: a plurality of fibers; a plurality of solid particles; and / or a plurality of pores; wherein, preferably, the dust separator (114) has felt, steel wool, paper, non-woven fabric, textile fabric, granular material, sponge material and / or foam-like material.

8. Contacting device (100) according to any one of claims 1 to 7, wherein the dust separator (114) has a porosity greater than or equal to 40%, preferably greater than or equal to 80%, and / or an average pore size less than or equal to 100 pm.

9. Contacting device (100) according to any one of claims 1 to 8, wherein the dust separator (114) is a first dust separator (114 (1)), which is arranged between the flange (108) and the cavity; and wherein the contacting device (100) further has a second gas-permeable dust separator (114 (2)), which is adapted to separate dust when discharging from the cavity through the second dust separator, wherein the cavity is arranged between the second dust separator and the flange (108).

10. A contacting device (100) according to claim 9, wherein the second dust separator surrounds the passage opening (109) along a path closed on itself.

11. A vacuum assembly, comprising: a vacuum chamber; and the contacting device (100) according to any one of claims 1 to 10, wherein at least the housing (102), the dust separator (114) and the sliding contact (110) of the contacting device (100) are arranged in the vacuum chamber; preferably the shaft (200), which is rotatably mounted and received in the passage opening (109).

12. A vacuum assembly according to claim 11, further comprising: a transport device (500), which has the shaft (200) and, optionally, one or more additional shafts, for transporting a workpiece (504).

13. The vacuum assembly of claim 12, further comprising: a coating device, which is disposed between two of the plurality of shafts.

14. Vacuum assembly according to claim 12 or 13, wherein the transport device (500) has at least one stimulation member (506), which is mounted so as to be movable along the axis of rotation of the shaft (200) by means of the contacting device (100) and is designed to stimulate a movement of the workpiece (504) when the latter rests on the shaft (200).

15. A vacuum assembly according to claim 14, wherein the housing (102) is coupled to the stimulation member (506) by means of the flange (108), such that movement of the housing (102) along the axis of rotation of the shaft (200) stimulates movement of the workpiece (504).

16. A vacuum assembly according to claim 14 or 15, wherein the stimulation member (506) contacts the workpiece (504) when the workpiece rests on the shaft (200).

17. A vacuum assembly according to any one of claims 14 to 16, wherein the stimulation member (506) has a groove (506n) for receiving the workpiece (504), wherein the groove (506n) preferably extends along a helix.