Hazardous gas dilution

Abstract

A controller, dilution and abatement system is set out where he controller dynamically controlling an amount of a dilution gas to be added to an exhaust stream from a process tool. The controller comprises: an input for receiving a signal indicative of at least one of: a current or future amount of hazardous gas that the process tool exhausts; processing circuitry configured to determine an amount of dilution gas required to dilute the indicated amount of hazardous gas to a required level; output circuitry configured to output a control signal to dynamically control a flow rate of the dilution gas to be added to the exhaust stream to provide the required dilution level.

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