Focusing lens for wafer heating

JP1796578SActive Publication Date: 2025-04-18TOKYO ELECTRON LTD
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Patent Information

Application Number
JP2024021815D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2025-04-18
Estimated Expiration
2049-10-21

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Abstract

This product is a condenser lens used in a heater for heating a wafer to improve the heating efficiency of the wafer by giving directionality to the secondary light shielding, and is created as an integrated condenser lens for heating a wafer. As shown in the "Reference diagram showing the state of use", this product is used by being placed between the susceptor on which the wafer is placed and the heater wire.
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