Processing data display image

Abstract

As shown in Reference Image Figure 2, search conditions for search items (7) are set in the search condition setting window (1), search for past processes performed on wafers, etc., select desired processes from the search result list (2), and display data for the selected processes on a graph (3) or map (4). Graph (3), for example, displays the temperature change of the wafer over processing time, and may also display data for a specific time. Map (4), for example, displays a color-coded temperature map on the wafer together with a color sample (5).

Images