Processing data display image

Abstract

As shown in Reference Image Figure 2, search conditions for search items (7) are set in the search condition setting window (1), search for past processes performed on wafers, etc., select desired processes from the search result list (2), and display data for the selected processes on a graph (3) or map (4). The graph (3), for example, displays the temperature change of the wafer over processing time, and may display data for a specific time (8). The map (4), for example, displays a color-coded temperature map on the wafer together with a color sample (5).

Images