Processing data display image

Abstract

As shown in Reference Image Figure 2, the user expands the search condition setting window (1) to set search conditions for the search items, searches for processes previously performed on wafers, etc., selects multiple desired processes from the search result list (2), and displays the data of the selected multiple processes on a graph (3) or map (4) so ​​that they can be compared. The graph (3), for example, displays the temperature change of the wafer over the processing time, and may display data for a specific time (8). The map (4), for example, displays a color-coded temperature map on the wafer together with a color sample (5).

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