Processing data display image

JP1811088SActive Publication Date: 2025-10-22APPLIED MATERIALS INC
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Patent Information

Application Number
JP2025009663D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-11-19
Filing Date
2025-05-16
Publication Date
2025-10-22
Estimated Expiration
2050-05-16

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Abstract

As shown in the reference image Fig. 2, search conditions for search items (7) are set in the search condition setting window (1), search for processing performed on wafers etc. in the past, select the desired processing from the search result list (2), and display the data of the selected processing in graphs (3) and (4). Graphs (3) and (4) may, for example, display the change in wafer temperature over processing time, or display data for a specific time.
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