Processing data display image

JP1811089SActive Publication Date: 2025-10-22APPLIED MATERIALS INC
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Patent Information

Application Number
JP2025009664D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-11-19
Filing Date
2025-05-16
Publication Date
2025-10-22
Estimated Expiration
2050-05-16

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Abstract

As shown in Reference Image Figure 2, expand the search condition setting window (1) to set search conditions for the search item, search for processing that has been performed on wafers, etc. in the past, select the desired processing from the search result list (2), and display the data of the selected processing in graphs (3) and (4). Graphs (3) and (4) may, for example, display the change in wafer temperature over processing time, or display data for a specific time.
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