Wind speed measurement jig

JP1816790SActive Publication Date: 2026-01-15SCREEN HOLDINGS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
JP2025014030D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-07-14
Publication Date
2026-01-15
Estimated Expiration
2050-07-14

Smart Images

  • Figure 0001816790000001
    Figure 0001816790000001
  • Figure 0001816790000002
    Figure 0001816790000002
  • Figure 0001816790000003
    Figure 0001816790000003
Patent Text Reader

Abstract

This product is used to measure the air velocity inside wafer processing equipment. As shown in the reference diagram showing the usage state, it is attached to the wafer processing equipment and used by inserting the anemometer through the hole in the top center when viewed from the front.
Need to check novelty before this filing date? Find Prior Art