Hanging Lift Pin
JP1817493SActive Publication Date: 2026-01-21APPLIED MATERIALS INC
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Patent Information
- Application Number
- JP2025018229D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2025-03-14
- Filing Date
- 2025-09-11
- Publication Date
- 2026-01-21
- Estimated Expiration
- 2050-09-11
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Abstract
This article is a gravity-assisted hanging lift pin that is used to lift a wafer from a substrate support.
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