Information display image for wafer processing equipment

JP1825455SActive Publication Date: 2026-04-27SCREEN HOLDINGS CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
SCREEN HOLDINGS CO LTD
Filing Date
2025-07-15
Publication Date
2026-04-27

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Abstract

This image is used to display and configure information such as the layout and lighting output of the heating light source in a wafer processing device. The multiple elongated rectangular shapes on the left side of the image indicate the layout of the heating light source.
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