Light source apparatus, lithography apparatus, and article manufacturing method

Abstract

To provide a light source apparatus that suppresses a rise in the temperature of a light source.SOLUTION: A light source apparatus includes a light source, and a first housing configured to store the light source. The planar surface of the first housing includes a plurality of openings communicating with the outside of the first housing. The first housing includes a plurality of portions, connected with the planar surface, each having an inclined plane sloping relative to the planar surface.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a light source apparatus, a lithography apparatus, and a method for manufacturing an article. [Background technology]

[0002] An exposure apparatus is used in a lithography process for manufacturing devices such as semiconductor devices or display devices. The exposure apparatus exposes a substrate to light from a light source apparatus having a light source such as a lamp. Furthermore, the light source apparatus has a higher output in accordance with the increase in size of substrates, and it is an important issue to suppress the influence of radiant heat due to long-wavelength light contained in the light from the light source apparatus.

[0003] Patent Document 1 discloses an invention relating to an exposure reflector that reflects light emitted from a light source to expose a substrate. The exposure reflector has a cooling member attached to its base, a light absorbing film formed on the surface of the base, and a short wavelength light reflecting film formed on the upper layer that selectively reflects only predetermined short wavelength light. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2004-354655 A Summary of the Invention [Problem to be solved by the invention]

[0005] In a light source device, a light source is sometimes disposed inside a housing, and light from the light source is sometimes reflected by the housing and irradiates the light source with the reflected light. When the light reflected by the housing irradiates the light source, the temperature of the light source increases due to radiant heat.

[0006] Patent document 1 describes how a cooling section cools the housing and expels heat that has reached the housing and heated air, but does not describe how the temperature of the light source is suppressed from rising when the light reflected by the housing irradiates the light source.

[0007] SUMMARY OF THE PRESENT DISCLOSURE In view of the above, an object of the present invention is to provide a light source device, a lithography apparatus, and a method for manufacturing an article, which are capable of suppressing an increase in temperature of the light source. [Means for solving the problem]

[0008] A light source device as one aspect of the present invention that solves the above problem comprises a light source and a first housing that houses the light source, wherein a plurality of openings leading to the outside of the first housing are formed in a plane of the first housing, and the first housing has a plurality of portions that are connected to the plane and have inclined surfaces inclined relative to the plane. Effect of the Invention

[0009] According to the present invention, it is possible to provide a light source device, a lithography apparatus, and a method for manufacturing an article, which suppress an increase in temperature of the light source. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a diagram showing a configuration of an exposure apparatus. [Diagram 2] 1 is a diagram showing a configuration of a light source device according to a first embodiment. [Diagram 3] 1 is a cross-sectional view of a light source device according to a first embodiment. [Figure 4] 2 is a perspective view of a first housing of the light source device according to the first embodiment. FIG. [Diagram 5] FIG. 2 is a diagram illustrating an example of an optical path of light emitted from a lamp. [Figure 6] FIG. 11 is a cross-sectional view of a light source device according to a second embodiment. [Figure 7] 13 is a side view of a part of a first housing of a light source device according to a second embodiment. [Figure 8] 13 is a diagram showing a configuration of a light source device according to a third embodiment. FIG. [Figure 9] FIG. 11 is a perspective view of a first housing of a light source device according to a third embodiment. [Figure 10] 1 is a flowchart for explaining the manufacture of a device using an exposure apparatus. [Figure 11] 11 is a detailed flowchart of the wafer process in step 4 of the flowchart shown in FIG. 10. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0012] First Embodiment First, an exposure apparatus 100 as a lithography apparatus will be described. FIG. 1 is a diagram showing the configuration of the exposure apparatus 100. The exposure apparatus 100 may include, for example, a light source device 110, a shutter device 120, an illumination optical system 130, an original holder 140, a projection optical system 150, and a substrate holder 160. In this specification and the attached drawings, the direction along the optical axis of a mirror 50 configured in the light source device 110 described later is defined as the Z-axis direction, and two directions perpendicular to each other along a plane perpendicular to the Z-axis direction are defined as the X-axis direction and the Y-axis direction.

[0013] The original holding part 140 holds the original 142. The original holding part 140 is positioned by an original positioning mechanism (not shown), thereby enabling the original 142 to be positioned. The substrate holding part 160 holds a substrate 162. A substrate 162 coated with resist (photosensitive material) by a resist coating device is supplied to the exposure apparatus 100. The substrate holding part 160 is positioned by a substrate positioning mechanism (not shown), thereby enabling the substrate 162 to be positioned.

[0014] The shutter device 120 is disposed so as to be able to block a light beam in the optical path between the light source device 110 and the original holding unit 140. The illumination optical system 130 illuminates the original 142 using light from the light source device 110. The projection optical system 150 projects the pattern of the original 142 illuminated by the illumination optical system 130 onto the substrate 162, thereby exposing the substrate 162. As a result, a latent image pattern is formed in the resist applied to the substrate 162. The latent image pattern is developed by a developing device (not shown), thereby forming a resist pattern on the substrate 162.

[0015] Next, the light source device 110 will be described with reference to Fig. 2. Fig. 2 is a diagram showing the configuration of the light source device 110 according to this embodiment. The light source device 110 may include a lamp 10 as a light source, a mirror 50 that collects light generated by the lamp 10, a first housing 111 that houses the lamp 10, and a second housing 112 that houses the first housing 111.

[0016] The lamp 10 may be, for example, a short-arc type lamp such as a mercury lamp, a xenon lamp, or a metal halide lamp. The mirror 50 may be, for example, an elliptical mirror having a first focus FP1 and a second focus FP2 located on an optical axis OAX of the mirror 50. Here, the optical axis OAX of the mirror 50 is an axis line connecting the first focus FP1 and the second focus FP2.

[0017] The lamp 10 may be disposed on an optical axis OAX. The bright spot AP of the lamp 10 may be disposed at or near a first focal point FP1, and the mirror 50 may reflect the light emitted from the bright spot AP and focus it at a second focal point FP2. The mirror 50 may be, for example, a cold mirror with an optical thin film that transmits long wavelength light such as infrared light and reflects short wavelength light such as visible light and ultraviolet light. The diameter of the opening of the mirror 50 may depend on the size of the lamp 10, but is, for example, 300 to 400 mm. The mirror 50 may also be a parabolic mirror that irradiates the reflected light in a parallel manner.

[0018] Here, the light from lamp 10 may be reflected by a flat surface of first housing 111 facing lamp 10 and irradiate lamp 10. Since the light from lamp 10 contains long-wavelength light such as infrared light, the temperature of lamp 10 may rise due to being irradiated with the reflected light. Since the temperature rise of lamp 10 may be one of the factors shortening the life of lamp 10, it is important to suppress the temperature rise of lamp 10.

[0019] Therefore, in this embodiment, a plurality of portions are arranged which are connected to a flat surface of the first housing 111 facing the lamp 10 and have inclined surfaces inclined relative to the flat surface.

[0020] FIG. 3 is a cross-sectional view of the light source device 110 of this embodiment. FIG. 3 is a view of the cross section AA′ in FIG. 2 seen from above. FIG. 4 is a perspective view of the first housing of the light source device 110 according to this embodiment. As shown in FIG. 3(a) and FIG. 4, the first housing 111 has a flat surface 111a facing the lamp 10. The first housing 111 has a plurality of parts 111b (a group of parts 111b) connected to the flat surface 111a and having a surface (inclined surface) inclined with respect to the flat surface 111a. The plurality of parts 111b are arranged on the flat surface 111a in the X-axis direction. Note that the plurality of parts 111b shown in FIG. 4 are arranged in the X-axis direction, but the plurality of parts 111b on the other surfaces can be arranged on the flat surface 111a in the Y-axis direction.

[0021] Each of the multiple portions 111b is connected to the plane 111a, has an inclined surface inclined with respect to the plane 111a, and is disposed at a position where the lamp 10 does not exist in the normal direction of the inclined surface. In other words, the inclined surface of each of the multiple portions 111b does not face the lamp 10. Moreover, each of the multiple portions 111b in this embodiment has a plate-like shape.

[0022] Since the first housing 111 has a plurality of portions 111b, it is possible to prevent the light irradiated from the lamp 10 from being reflected by the first housing 111 and irradiating the lamp 10. FIG. 5 is a diagram illustrating an example of an optical path of the light irradiated from the lamp 10. Note that FIG. 5 is the same as FIG. 3(a), and therefore some reference numerals such as the plane 111a are omitted. In FIG. 5, the light F1 irradiated from the lamp 10 passes through the mirror 50 or passes over the mirror 50 and reaches the first housing 111. Since the light F1 is reflected by one of the inclined surfaces of the plurality of portions 111b, it is not reflected in a direction toward the lamp 10 and does not irradiate the lamp 10. In addition, the reflected light is attenuated by diffuse reflection. In addition, the reflected light is also attenuated by repeated reflection inside the first housing 111. Therefore, the light irradiated from the lamp 10 is reduced from returning to the lamp 10 and irradiating the lamp 10. In other words, the multiple portions 111b reduce the amount of light irradiated from the lamp 10 returning to the lamp 10 and irradiating the lamp 10. Therefore, by having the multiple portions 111b in the first housing 111, it is possible to suppress an increase in the temperature of the lamp 10.

[0023] Moreover, the plurality of portions 111b are preferably arranged so that the inclined surfaces form an angle of 10° to 80° with respect to the plane 111a in order to reduce the amount of light reflected by the inclined surfaces irradiating the lamp 10. Moreover, the plurality of portions 111b are more preferably arranged so that the inclined surfaces form an angle of 30° to 60° with respect to the plane 111a.

[0024] Also, it is preferable that some of the multiple parts 111b are arranged at a different angle from the other multiple parts 111b. As shown in FIG. 3(b), it is preferable that the multiple parts 111b are arranged such that the inclined surfaces of the multiple parts 111b are different from the plane 111a, such as the multiple parts 111b1 and the multiple parts 111b2. By arranging in this manner, it is possible to avoid arranging the inclined surfaces of some of the multiple parts 111b so as to face the lamp 10. Also, it is preferable that the position of the boundary between the multiple parts 111b1 and the multiple parts 111b2 is shifted from the position on the line P1 that is perpendicular to a plane parallel to the plane 111a and passes through the center of the lamp 10. This is to prevent the light emitted from the opening 111c located at the boundary between the multiple parts 111b1 and the multiple parts 111b2 from being reflected by the second housing 112 and irradiating the lamp 10.

[0025] Further, a plurality of openings 111c are formed in the plane 111a of the first housing 111. The plurality of openings 111c communicate with a space (first space) inside the first housing 111 and a space (second space) outside the first housing 111 and inside the second housing 112. Here, the second space may be a space between the first housing and the second housing. For example, the light F2 irradiated from the lamp 10 passes through the mirror 50 or passes over the mirror 50 and reaches the first housing 111. Then, when the angle of incidence of the light F2 with respect to the plane 111a is greater than 0, the light F2 is attenuated while being reflected between the first housing 111 and the second housing 112. Therefore, the light irradiated from the lamp 10 is reduced from returning to the lamp 10 and irradiating the lamp 10. Therefore, the first housing 111 has a plurality of openings 111c, so that the temperature of the lamp 10 can be suppressed from increasing.

[0026] Moreover, each of the plurality of openings 111c is preferably disposed between the plurality of portions 111b. As shown in Fig. 5, for example, light F3 reflected by an inclined surface of one of the plurality of portions 111b is emitted to the outside of the first housing 111 from the opening 111c disposed between the plurality of portions 111b, and does not irradiate the lamp 10. Thus, by disposing each of the plurality of openings 111c between the plurality of portions 111b, it is possible to suppress an increase in the temperature of the lamp 10.

[0027] Here, in the first housing 111 illustrated in FIG. 3 and the like, the multiple portions 111b and the multiple openings 111c are arranged on the four side surfaces facing the lamp 10, but this is not limited to the above. It is sufficient that the multiple portions 111b and the multiple openings 111c are arranged on at least one of the multiple side surfaces facing the lamp 10. In addition, in the first housing 111 illustrated in FIG. 3 and the like, the multiple portions 111b and the multiple openings 111c are arranged on the side surfaces facing the lamp 10, but this is not limited to the above. The multiple portions 111b and the multiple openings 111c may be arranged on the upper surface facing the lamp 10, the lower surface facing the lamp 10, or the upper surface and the lower surface.

[0028] Furthermore, although the multiple portions 111b are arranged so that the inclined surfaces are inclined toward the inside of the first housing 111, the multiple portions 111b may be arranged so that the inclined surfaces are inclined toward the outside of the first housing 111.

[0029] Moreover, it is preferable that flat surface 111a of first housing 111, a surface including the inclined surfaces of multiple portions 111b, and the inner surface of second housing 112 are black in order to absorb the light irradiated from lamp 10. It is preferable that flat surface 111a of first housing 111, a surface including the inclined surfaces of multiple portions 111b, and the inner surface of second housing 112 are rough surfaces with unevenness and low flatness in order to diffusely reflect the light irradiated from lamp 10.

[0030] Furthermore, exposure apparatus 100 may have a supply device (not shown) that is connected to light source device 110 via piping and supplies gas at a temperature lower than the temperature inside light source device 110 to light source device 110. Furthermore, exposure apparatus 100 may have an exhaust device (not shown) that is connected to light source device 110 via piping and exhausts gas heated by light irradiated from lamp 10 from inside light source device 110. With these configurations, it is possible to further suppress the temperature of lamp 10 from increasing.

[0031] As described above, according to the light source device of this embodiment, the housing has multiple plate-shaped parts with surfaces that are inclined relative to the surface facing the light source, which reduces the light from the light source being reflected by the housing and irradiating the light source, thereby suppressing the temperature rise of the light source.

[0032] <Second embodiment> Next, a light source device 110 according to a second embodiment will be described. Matters not mentioned as the second embodiment may follow the first embodiment. In the light source device according to the second embodiment, each of the (aggregate of) a plurality of parts 111b having an inclined surface inclined with respect to a plane facing the lamp 10 has a convex shape toward the lamp 10 side (a convex shape protruding toward the inside of the first housing 111). FIG. 6 is a cross-sectional view of the light source device 110 of this embodiment. In FIG. 6(a), each of the plurality of parts 111b has a convex shape whose cross section is a triangle. That is, each of the plurality of parts 111b has a convex shape such as a cone, a triangular pyramid, or a square pyramid. Also, in FIG. 6(b), each of the plurality of parts 111b has a convex shape whose cross section is a part of a circle or an ellipse. That is, each of the plurality of parts 111b has a partial shape such as a sphere, an ellipsoid, or the like. Also, each of the plurality of parts 111b has a shape such as a hemisphere, a hemispheroid, or the like. 6(b) shows an example in which the cross-sectional shape of the multiple portions 111b is a convex shape that is a part of a circle or an ellipse, but the cross-sectional shape of the multiple portions 111b may be a convex shape made up of a curve. In other words, the multiple portions 111b may have a convex shape made up of a curved surface.

[0033] Furthermore, the multiple portions 111b may be arranged so that the multiple portions 111b are lined up not only in the X-axis direction or the Y-axis direction but also in the Z-axis direction. Fig. 7 shows a side view of a part of the first housing 111 of the light source device 110 of this embodiment. As the multiple portions 111b, multiple portions each having a convex shape are arranged lined up in the X-axis direction and the Y-axis direction.

[0034] Here, an example has been described in which the multiple portions 111b have a convex shape protruding toward the inside of the first housing 111, but the multiple portions 111b may also have a concave shape toward the lamp 10 side (a concave shape recessed toward the outside of the first housing 111).

[0035] Further, a plurality of openings 111c are formed in the flat surface 111a of the first housing 111. The plurality of openings 111c communicate with a space inside the first housing 111 and a space outside the first housing 111 and inside the second housing 112. Each of the plurality of openings 111c is disposed between the plurality of portions 111b, and although one opening 111c is disposed between four portions 111b in the example of Fig. 7, one opening 111c may be disposed between two portions 111b in the X- and Z-axis directions.

[0036] In addition, since the light irradiated from the lamp 10 is reflected by the inclined surfaces of the plurality of portions 111b, it is not reflected toward the lamp 10 and does not irradiate the lamp 10. The reflected light is attenuated by diffuse reflection. The reflected light is also attenuated by repeated reflection inside the first housing 111. A part of the light reflected by the plurality of portions 111b is emitted to the outside of the first housing 111 through the plurality of openings 111c. When the incident angle of the emitted light with respect to the plane 111a is greater than 0, the emitted light is attenuated while being reflected between the first housing 111 and the second housing 112. Therefore, the light irradiated from the lamp 10 is reduced from returning to the lamp 10 and irradiating the lamp 10.

[0037] As described above, in the light source device according to this embodiment, each of the multiple portions 111b has an inclined surface inclined with respect to a plane, and each inclined surface of the multiple portions 111b does not face the lamp 10. This reduces the occurrence of light irradiated from the lamp 10 returning to the lamp 10 and irradiating the lamp 10. In other words, the multiple portions 111b reduce the occurrence of light irradiated from the lamp 10 returning to the lamp 10 and irradiating the lamp 10. Since the first housing 111 has the multiple portions 111b, it is possible to prevent the light irradiated from the lamp 10 from being reflected by the first housing 111 and irradiating the lamp 10.

[0038] As described above, according to the light source device of this embodiment, the housing has multiple parts with a convex shape having a surface that is inclined relative to the surface facing the light source, which reduces the light from the light source being reflected by the housing and irradiating the light source, thereby suppressing the temperature rise of the light source.

[0039] <Third embodiment> Next, a light source device 110 according to a third embodiment will be described. Matters not mentioned in the second embodiment may follow the first embodiment. In the light source device according to the third embodiment, a plurality of portions 111b are arranged side by side in the Z-axis direction.

[0040] Fig. 8 is a diagram showing the configuration of light source device 110 according to this embodiment. Fig. 9 is a perspective view of a first housing of light source device 110 according to this embodiment. In light source device 110 according to the first embodiment, multiple portions 111b are arranged side by side in the X-axis direction or the Y-axis direction as shown in Fig. 3 etc., but in light source device 110 according to this embodiment, multiple portions 111b are arranged side by side in the Z-axis direction.

[0041] Each of the multiple portions 111b has an inclined surface, and is disposed at a position where no lamp 10 is present in the normal direction of the inclined surface. That is, the inclined surface of each of the multiple portions 111b does not face the lamp 10. Moreover, each of the multiple portions 111b in this embodiment has a plate-like shape.

[0042] The first housing 111 may have a plurality of openings 111c. In the light source device 110 according to the first embodiment, the plurality of openings 111c are arranged side by side in the X-axis direction or the Y-axis direction as shown in Fig. 3 and other figures, but in the light source device 110 according to the present embodiment, the plurality of openings 111c are arranged side by side in the Z-axis direction.

[0043] As described above, according to the light source device of this embodiment, the housing has multiple plate-shaped parts with surfaces that are inclined relative to the surface facing the light source, which reduces the light from the light source being reflected by the housing and irradiating the light source, thereby suppressing the temperature rise of the light source.

[0044] <Production method> As an example of an article, a method for manufacturing a device (semiconductor device, magnetic storage medium, liquid crystal display element, etc.), a color filter, or a hard disk will be described. The manufacturing method includes a step of forming a pattern on a substrate (wafer, glass plate, film-like substrate, etc.) by irradiating light from a light source device to the substrate using a lithography apparatus (for example, an exposure apparatus, an imprint apparatus, a drawing apparatus, etc.) having a light source device. The manufacturing method further includes a step (processing step) of processing the substrate on which the pattern is formed. The processing step may include a step of removing a residual film of the pattern. The processing step may also include a step of etching the substrate using the pattern as a mask. The processing step may also include other well-known steps such as dicing, bonding, and packaging. The manufacturing method of the article in this embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article compared to the conventional method.

[0045] Next, as an example of a method for manufacturing an article, an embodiment of a device manufacturing method using the above-mentioned exposure apparatus will be described with reference to Figures 10 and 11. Figure 10 is a flow chart for explaining the manufacture of devices (semiconductor chips such as ICs and LSIs, LCDs, CCDs, etc.). Here, a method for manufacturing semiconductor chips will be described as an example.

[0046] In step S1 (circuit design), the circuit of the semiconductor device is designed. In step S2 (mask production), a mask (master) is produced based on the designed circuit pattern. In step S3 (wafer production), a wafer (substrate) is produced using materials such as silicon. Step S4 (wafer process) is called the front-end process, in which the mask and wafer are used to form the actual circuit on the wafer using lithography technology with the exposure device described above. Step S5 (assembly) is called the back-end process, in which the wafer produced in step S4 is used to make semiconductor chips, and includes assembly processes such as assembly processes (dicing, bonding) and packaging processes (chip encapsulation). In step S6 (inspection), the semiconductor device produced in step S5 is inspected, such as an operation check test and a durability test. After going through these processes, the semiconductor device is completed and shipped (step S7).

[0047] FIG. 11 is a detailed flowchart of the wafer process in step 4. In step S11 (oxidation), the surface of the wafer is oxidized. In step S12 (CVD), an insulating film is formed on the surface of the wafer. In step S13 (electrode formation), electrodes are formed on the wafer by deposition. In step S14 (ion implantation), ions are implanted into the wafer. In step S15 (resist processing), a photosensitive agent is applied to the wafer. In step S16 (exposure), the circuit pattern of the mask is exposed onto the wafer by an exposure device. In step S17 (development), the exposed wafer is developed. In step S18 (etching), the parts other than the developed resist image are scraped off. In step S19 (resist stripping), the resist that is no longer needed after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer.

[0048] Although the preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist of the present invention.

[0049] In addition, an exposure apparatus has been described as an example of a lithography apparatus, but the present invention is not limited thereto. An example of a lithography apparatus may be an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold (template) having a concave-convex pattern. An example of a lithography apparatus may be a planarization apparatus that uses a mold (flat template) having a flat portion without a concave-convex pattern to mold a composition on a substrate so as to flatten it. An example of a lithography apparatus may be a drawing apparatus that draws on a substrate with a charged particle beam (such as an electron beam or an ion beam) via a charged particle optical system to form a pattern on the substrate.

[0050] Moreover, each of the first to third embodiments can be implemented not only alone, but also in combination with any of the first to third embodiments.

Claims

1. A light source; A first housing that houses the light source, A plurality of openings communicating with the outside of the first housing are formed in a plane of the first housing, the first housing has a plurality of portions connected to the plane and having inclined surfaces inclined with respect to the plane; A light source device, characterized in that at least one of the plurality of portions reflects light from the light source and emits it to the outside of the first housing through one of the plurality of openings.

2. The light source device according to claim 1 , wherein each of the plurality of portions has a plate-like shape.

3. The light source device according to claim 2 , wherein at least two of the plurality of portions are disposed on the plane such that the inclined surfaces are parallel to each other.

4. The light source device according to claim 1 , wherein each of the plurality of portions has a convex or concave shape facing the light source side.

5. 5. The light source device according to claim 4, wherein each of the plurality of portions has a convex or concave shape of a pyramid.

6. 5. The light source device according to claim 4, wherein each of the plurality of portions has a convex or concave shape formed of a curved surface.

7. 7. The light source device according to claim 1, wherein the flat surface of the first housing and a surface including the inclined surfaces of the plurality of portions are rough surfaces.

8. 7. The light source device according to claim 1, wherein the flat surface of the first housing and a surface including the inclined surfaces of the plurality of portions are black.

9. The light source device according to claim 1 , wherein each of the plurality of openings is disposed between at least two of the plurality of portions.

10. A second housing is provided outside the first housing, The light source device according to claim 1 , wherein the plurality of openings communicate from a first space inside the first housing to a second space between the first housing and the second housing.

11. The light source device according to claim 10, wherein an inner surface of the second housing is rough.

12. The light source device according to claim 10 , wherein an inner surface of the second housing is black.

13. 2. The light source device according to claim 1, further comprising a mirror for collecting light from the light source.

14. 14. The light source device according to claim 13, wherein the mirror is a cold mirror.

15. 1. A lithographic apparatus for forming a pattern on a substrate, comprising: A lithography apparatus comprising the light source device according to claim 1.

16. forming a pattern on a substrate using a light source device of a lithography apparatus according to claim 15; and producing an article from the substrate on which the pattern is formed.

Images