Microscope raman device

Abstract

To provide a microscope Raman device with which it is possible to shield laser light from one of a first and a second laser light source without having to turn one of the first and second light sources off, and to reduce a device size while enabling fine adjustment of laser light intensity.SOLUTION: A microscope Raman device comprises a first laser light source, a second laser light source, a first holder, a second holder, a first ND filter, and a second ND filter. The first and second laser light sources generate first laser light in a first wavelength and second laser light in a second wavelength, respectively. The second wavelength is different from the first wavelength. The first laser light and second laser light proceed along a second direction that is orthogonal to a first direction, in a state of being spaced from each other in the first direction. The first and second holders are arranged one on top of another in the second direction.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a Raman microscope. [Background technology]

[0002] For example, Japanese Patent Laid-Open Publication No. 10-90064 (Patent Document 1) describes a Raman microscope. The Raman microscope described in Patent Document 1 has an excitation laser, a spectroscope, and a detector. In the Raman microscope described in Patent Document 1, a sample is irradiated with laser light from the excitation laser, thereby generating Raman scattered light from the sample. This Raman scattered light is dispersed in the spectroscope, and the intensity distribution of the dispersed Raman scattered light is detected in the detector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 10-90064 Summary of the Invention [Problem to be solved by the invention]

[0004] The Raman microscope may have a plurality of laser light sources (a first laser light source and a second laser light source) as excitation lasers. When the Raman microscope has the first laser light source and the second laser light source, it is necessary to block the laser light from one of the first laser light source and the second laser light source using a shutter so that the laser light from the first laser light source and the second laser light source is not irradiated onto the sample, or to turn off one of the first laser light source and the second laser light source.

[0005] When a shutter is used to block the laser light from one of the first laser light source and the second laser light source, the Raman microscope apparatus becomes large. When one of the first laser light source and the second laser light source is turned off, it takes time for the output of the first laser light source and the second laser light source that has been turned off to be turned on again.

[0006] In addition, the intensity of the laser light irradiated onto the sample needs to be finely adjusted in a Raman microscope, which requires many ND filters, making the Raman microscope larger.

[0007] The Raman microscope apparatus of the present disclosure has been made in consideration of the above points. More specifically, the present disclosure provides a Raman microscope apparatus that can block the laser light from one of the first laser light source and the second laser light source without turning off one of the first laser light source and the second laser light source, and can finely adjust the intensity of the laser light while miniaturizing the apparatus. [Means for solving the problem]

[0008] The Raman microscope apparatus of the present disclosure includes a first laser light source, a second laser light source, a first holder, a second holder, a first ND filter, and a second ND filter. The first laser light source and the second laser light source generate a first laser light of a first wavelength and a second laser light of a second wavelength, respectively. The second wavelength is different from the first wavelength. The first laser light and the second laser light travel along a second direction perpendicular to the first direction while being spaced apart from each other in the first direction. The first holder and the second holder are arranged overlapping in the second direction. The first holder is rotatable around a first rotation axis parallel to the second direction. The second holder is rotatable around a second rotation axis parallel to the second direction. The first holder has a first through hole, a second through hole, a third through hole, and a fourth through hole penetrating the first holder in the second direction. The first through hole and the second through hole are on an arc having a center on the first rotation axis and a radius equal to the distance between the first rotation axis and the first laser light when viewed along the second direction. The third through hole and the fourth through hole are on an arc having a center on the first rotation axis and a radius equal to the distance between the first rotation axis and the second laser light when viewed along the second direction. The distance between the second through hole and the fourth through hole is smaller than the distance between the second through hole and the third through hole. When the first holder is rotated around the first rotation axis so that either the first through hole or the second through hole overlaps with the first laser light, both the third through hole and the fourth through hole are offset from the second laser light. When the first holder is rotated around the first rotation axis so that either the third through hole or the fourth through hole overlaps with the second laser light, both the first through hole and the second through hole are offset from the first laser light. The second holder is formed with a fifth through hole, a sixth through hole, a seventh through hole, and an eighth through hole penetrating the second holder in the second direction. The fifth through hole and the sixth through hole are on an arc having a center on the second rotation axis and a radius equal to the distance between the second rotation axis and the first laser light when viewed along the second direction. The seventh through hole and the eighth through hole are on an arc having a center on the second rotation axis and a radius equal to the distance between the second rotation axis and the second laser light when viewed along the second direction. The distance between the sixth through hole and the eighth through hole is smaller than the distance between the sixth through hole and the seventh through hole.When the second holder is rotated around the second rotation axis so that either the fifth through hole or the sixth through hole overlaps with the first laser light, both the seventh through hole and the eighth through hole are offset from the second laser light. When the second holder is rotated around the second rotation axis so that either the seventh through hole or the eighth through hole overlaps with the second laser light, both the fifth through hole and the sixth through hole are offset from the first laser light. The first ND filter is disposed on the first holder so as to straddle the second through hole and the fourth through hole. The second ND filter is disposed on the second holder so as to straddle the sixth through hole and the eighth through hole. Effect of the Invention

[0009] According to the micro-Raman device of the present disclosure, it is possible to block the laser light from one of the first laser light source and the second laser light source without turning off one of the first laser light source and the second laser light source, and it is possible to finely adjust the intensity of the laser light while miniaturizing the device. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram of a Raman microscope apparatus 100. [Diagram 2] 2 is a schematic side view of a light source adjustment unit 20 included in the Raman microscope apparatus 100. FIG. [Diagram 3] 2 is a plan view of the first holder 24 of the Raman microscope apparatus 100 as viewed along the second direction DR2. [Figure 4] 2 is a plan view of the second holder 25 of the Raman microscope apparatus 100 as viewed along the second direction DR2. [Diagram 5] 13 is a plan view of a first holder 24 included in a Raman microscope 100 according to a modified example, as viewed along a second direction. FIG. [Figure 6] 13 is a plan view of a second holder 25 included in a Raman microscope apparatus 100 according to a modified example, as viewed in a second direction. FIG. [Figure 7] FIG. 2 is a schematic diagram of a Raman microscope apparatus 200. [Figure 8]2 is a plan view of the first holder 24 of the Raman microscope apparatus 200 as viewed along the second direction DR2. [Figure 9] 2 is a plan view of the second holder 25 of the Raman microscope apparatus 200 as viewed along the second direction DR2. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The details of the embodiments of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are designated by the same reference numerals, and redundant description will not be repeated.

[0012] (First embodiment) The Raman microscope according to the first embodiment will be described below. The Raman microscope according to the first embodiment is designated as a Raman microscope 100.

[0013] <Configuration of the Raman microscope 100> The configuration of the Raman microscope 100 will be described below.

[0014] Fig. 1 is a schematic diagram of a Raman microscopy apparatus 100. As shown in Fig. 1, the Raman microscopy apparatus 100 includes a first laser light source 11, a second laser light source 12, a light source adjustment unit 20, a long-pass filter 41, a long-pass filter 42, a dichroic mirror 43, a dichroic mirror 44, a mirror 45, an objective lens 46, and a Raman spectrometer 50.

[0015] The first laser light source 11 generates a first laser light L1. The second laser light source 12 generates a second laser light L2. The light source adjustment unit 20 passes either the first laser light L1 or the second laser light L2. When passing through the light source adjustment unit 20, the intensity of either the first laser light L1 or the second laser light L2 may be adjusted. Details of the light source adjustment unit 20 will be described later.

[0016] The first laser light L1 that has passed through the light source adjustment unit 20 is reflected by the long-pass filter 41 and passes through the dichroic mirror 43. The first laser light L1 that has passed through the dichroic mirror 43 is reflected by the mirror 45 and passes through the objective lens 46. As a result, the first laser light L1 is irradiated onto the sample S. When the sample S is irradiated with the first laser light, a first Raman light L3 is generated from the sample S.

[0017] The first Raman light L3 generated in the sample S passes through the objective lens 46 and is reflected by the mirror 45. The first Raman light L3 reflected by the mirror 45 passes sequentially through the dichroic mirror 43 and the long-pass filter 41. The first Raman light L3 that passes through the long-pass filter 41 is incident on the Raman spectrometer 50. This results in Raman measurement using the first laser light L1.

[0018] The second laser light L2 that has passed through the light source adjustment unit 20 is reflected by the long pass filter 42 and passes through the dichroic mirror 44. The second laser light L2 that has passed through the dichroic mirror 44 is reflected by the mirror 45 and passes through the objective lens 46. As a result, the second laser light L2 is irradiated onto the sample S. As a result of the irradiation of the second laser light, second Raman light L4 is generated from the sample S.

[0019] The second Raman light L4 generated in the sample S passes through the objective lens 46 and is reflected by the mirror 45. The second Raman light L4 reflected by the mirror 45 passes sequentially through the dichroic mirror 44 and the long-pass filter 42. The second Raman light L4 that passes through the long-pass filter 42 is incident on the Raman spectrometer 50. This results in Raman measurement using the second laser light L2.

[0020] Fig. 2 is a schematic side view of the light source adjustment unit 20 included in the Raman microscopy apparatus 100. As shown in Fig. 2, the light source adjustment unit 20 has a base 21, a first shaft member 22, a second shaft member 23, a first holder 24, a second holder 25, an ND filter 26, and an ND filter 27.

[0021] The first laser light source 11 and the second laser light source 12 are arranged on a base 21 with a gap therebetween in a first direction DR1. The first laser light L1 generated by the first laser light source 11 and the second laser light L2 generated by the second laser light source 12 travel along a second direction DR2 perpendicular to the first direction DR1. That is, the first laser light L1 and the second laser light L2 travel along the second direction DR2 while being spaced apart in the first direction DR1.

[0022] The first shaft member 22 is attached to the base 21. The first shaft member 22 extends along the second direction DR2. The second shaft member 23 is attached to the base 21. The second shaft member 23 extends along the second direction DR2.

[0023] The first holder 24 is attached to the first shaft member 22 so as to be rotatable around the first rotation axis A1. The first rotation axis A1 is parallel to the second direction DR2. The second holder 25 is attached to the second shaft member 23 so as to be rotatable around the second rotation axis A2. The second rotation axis A2 is parallel to the second direction DR2. The distance between the first rotation axis A1 and the first laser light L1 is set to distance DIS1. The distance between the first rotation axis A1 and the second laser light L2 is set to distance DIS2. The distance between the second rotation axis A2 and the first laser light L1 is set to distance DIS3. The distance between the second rotation axis A2 and the second laser light L2 is set to distance DIS4. The distance DIS2 is greater than the distance DIS1. The distance DIS3 is greater than the distance DIS4.

[0024] The first holder 24 and the second holder 25 are made of a material that does not transmit the first laser light L1 and the second laser light L2. For example, the first holder 24 and the second holder 25 are made of a metal material.

[0025] Fig. 3 is a plan view of the first holder 24 of the Raman microscopy apparatus 100 as viewed along the second direction DR2. As shown in Fig. 3, the planar shape of the first holder 24 is, for example, semicircular. However, the planar shape of the first holder 24 is not limited to this. The first holder 24 is formed with a through hole 24a, a through hole 24b, a through hole 24c, and a through hole 24d. The through hole 24a, the through hole 24b, the through hole 24c, and the through hole 24d penetrate the first holder 24 along the second direction DR2.

[0026] When viewed along the second direction DR2, the through holes 24a and 24b are arranged on a first arc. The first arc is an arc centered on the first rotation axis A1 and has a radius equal to the distance DIS1. When viewed along the second direction DR2, the through holes 24c and 24d are arranged on a second arc. The second arc is an arc centered on the first rotation axis A1 and has a radius equal to the distance DIS2. The distance between the through holes 24b and 24d is equal to or less than the distance between the through holes 24b and 24c.

[0027] The through holes 24c and 24d are offset from the second laser light L2 when the first holder 24 is rotated around the first rotation axis A1 so that the first laser light L1 overlaps with the through hole 24a or the through hole 24b. The through holes 24a and 24b are offset from the first laser light L1 when the first holder 24 is rotated around the first rotation axis A1 so that the second laser light L2 overlaps with the through hole 24c or the through hole 24d. That is, when viewed along the second direction DR2, the through holes 24a and 24b are not on an imaginary line connecting the through hole 24c and the first rotation axis A1, and are not on an imaginary line connecting the through hole 24d and the first rotation axis A1.

[0028] From another perspective, when the first holder 24 is rotated around the first rotation axis A1 so that the first laser light L1 overlaps with either the through hole 24a or the through hole 24b, the second laser light L2 is blocked by the first holder 24, and when the first holder 24 is rotated around the first rotation axis A1 so that the second laser light L2 overlaps with either the through hole 24c or the through hole 24d, the first laser light L1 is blocked by the first holder 24.

[0029] Fig. 4 is a plan view of the second holder 25 of the Raman microscope apparatus 100 as viewed along the second direction DR2. As shown in Fig. 4, the planar shape of the second holder 25 is, for example, a semicircle. However, the planar shape of the second holder 25 is not limited to this. The second holder 25 is formed with a through hole 25a, a through hole 25b, a through hole 25c, and a through hole 25d. The through hole 25a, the through hole 25b, the through hole 25c, and the through hole 25d penetrate the second holder 25 along the second direction DR2.

[0030] When viewed along the second direction DR2, the through holes 25a and 25b are arranged on a third arc. The third arc is an arc centered on the second rotation axis A2 and has a radius equal to the distance DIS3. When viewed along the second direction DR2, the through holes 25c and 25d are arranged on a fourth arc. The fourth arc is an arc centered on the second rotation axis A2 and has a radius equal to the distance DIS4. The distance between the through holes 25b and 25d is equal to or less than the distance between the through holes 25b and 25c.

[0031] The through holes 25c and 25d are offset from the second laser light L2 when the second holder 25 is rotated around the second rotation axis A2 so that the first laser light L1 overlaps with the through hole 25a or the through hole 25b. The through holes 25a and 25b are offset from the first laser light L1 when the second holder 25 is rotated around the second rotation axis A2 so that the second laser light L2 overlaps with the through hole 25c or the through hole 25d. That is, when viewed along the second direction DR2, the through holes 25c and 25d are not on an imaginary line connecting the through hole 25a and the second rotation axis A2, and are not on an imaginary line connecting the through hole 25b and the second rotation axis A2.

[0032] From another perspective, when the second holder 25 is rotated around the second rotation axis A2 so that the first laser light L1 overlaps with either through hole 25a or through hole 25b, the second laser light L2 is blocked by the second holder 25, and when the second holder 25 is rotated around the second rotation axis A2 so that the second laser light L2 overlaps with either through hole 25c or through hole 25d, the first laser light L1 is blocked by the second holder 25.

[0033] As shown in FIG. 3, the ND filter 26 is disposed on the first holder 24 so as to straddle the through-holes 24b and 24d. As shown in FIG. 4, the ND filter 27 is disposed on the second holder 25 so as to straddle the through-holes 25b and 25d. The OD value of the ND filter 26 is preferably different from the OD value of the ND filter 27. An ND (Neutral Density) filter is an optical filter that reduces the intensity of light passing through it. An OD (Optical Density) value is a value that indicates the light transmission rate of an ND filter. When the OD value is X, the value obtained by dividing the intensity of light after passing through the ND filter by the intensity of light before passing through the ND filter is 1×10 -X It becomes.

[0034] <Effects of the Raman Microscope 100> In the Raman microscopy apparatus 100, when the first holder 24 is rotated around the first rotation axis A1 so that the through hole 24a or the through hole 24b overlaps with the first laser light L1, and the second holder 25 is rotated around the second rotation axis A2 so that the through hole 25a or the through hole 25b overlaps with the first laser light L1, the through holes 24c and 24d are shifted from the second laser light L2, and the second laser light L2 is blocked by the first holder 24.

[0035] Similarly, in the Raman microscopy device 100, if the first holder 24 is rotated about the first rotation axis A1 so that the through hole 24c or the through hole 24d overlaps with the second laser light L2, and the second holder 25 is rotated about the second rotation axis A2 so that the through hole 25c or the through hole 25d overlaps with the second laser light L2, the through holes 24a and 24b are shifted from the first laser light L1, and the first laser light L1 is blocked by the first holder 24. In this way, in the Raman microscopy device 100, in order to selectively pass the first laser light L1 and the second laser light L2 through the light source adjustment unit 20, it is not necessary to turn off one of the first laser light source 11 and the second laser light source 12 and to provide a shutter.

[0036] The first laser light L1 has a first pattern in which it passes through the through hole 24a and the through hole 25a in sequence, a second pattern in which it passes through the through hole 24b and the through hole 25a, a third pattern in which it passes through the through hole 24b and the through hole 25b, and a fourth pattern in which it passes through the through hole 24b and the through hole 25b. In the first pattern, the first laser light L1 passes through the light source adjustment unit 20 without being adjusted in intensity, and in the second pattern, the first laser light L1 passes through the light source adjustment unit 20 after being adjusted in intensity only by the ND filter 26. In the third pattern, the first laser light L1 passes through the light source adjustment unit 20 after being adjusted in intensity only by the ND filter 27, and in the fourth pattern, the first laser light L1 passes through the light source adjustment unit 20 after being adjusted in intensity by the ND filter 26 and the ND filter 27. That is, in the microscopic Raman device 100, the light source adjustment unit 20 can adjust the intensity of the first laser light L1 in four patterns.

[0037] Similarly, in the Raman microscopy apparatus 100, the second laser light L2 can be subjected to four intensity adjustment patterns by the light source adjustment unit 20. In this manner, the Raman microscopy apparatus 100 can perform fine intensity adjustment patterns for the first laser light L1 and the second laser light L2, the number of which is greater than the number of ND filters (two), while enabling the Raman microscopy apparatus 100 to be miniaturized.

[0038] <Modification> FIG. 5 is a plan view of the first holder 24 of the Raman microscopy apparatus 100 according to the modified example, seen along the second direction. As shown in FIG. 5, the first holder 24 may further include a through hole 24e and a through hole 24f. The through hole 24e is on a first arc, and the through hole 24f is on a second arc. When the first holder 24 is rotated around the first rotation axis A1 so that the through hole 24e overlaps with the first laser light L1, none of the through hole 24b, the through hole 24d, and the through hole 24f overlaps with the second laser light L2. When the first holder 24 is rotated around the first rotation axis A1 so that the through hole 24f overlaps with the second laser light L2, none of the through hole 24a, the through hole 24c, and the through hole 24e overlaps with the first laser light L1.

[0039] In this example, the distance between through hole 24b and through hole 24d is less than the distance between through hole 24b and through hole 24c and the distance between through hole 24b and through hole 24f, and the distance between through hole 24e and through hole 24f is less than the distance between through hole 24e and through hole 24c and the distance between through hole 24e and through hole 24d.

[0040] FIG. 6 is a plan view of the second holder 25 of the Raman microscopy apparatus 100 according to the modified example, seen along the second direction. As shown in FIG. 6, the second holder 25 may further include a through hole 25e and a through hole 25f. The through hole 25e is on the third arc, and the through hole 25f is on the fourth arc. When the second holder 25 is rotated around the second rotation axis A2 so that the through hole 25e overlaps with the first laser light L1, none of the through hole 25b, the through hole 25d, and the through hole 25f overlaps with the second laser light L2. When the second holder 25 is rotated around the second rotation axis A2 so that the through hole 25f overlaps with the second laser light L2, none of the through hole 25a, the through hole 25c, and the through hole 25e overlaps with the first laser light L1.

[0041] In this example, the distance between through hole 25b and through hole 25d is less than the distance between through hole 25b and through hole 25c and the distance between through hole 25b and through hole 25f, and the distance between through hole 25e and through hole 25f is less than the distance between through hole 25e and through hole 25c and the distance between through hole 25e and through hole 25d.

[0042] The light source adjustment unit 20 may further include an ND filter 28 and an ND filter 29. The ND filter 28 is disposed on the first holder 24 so as to straddle the through holes 24e and 24f. The ND filter 29 is disposed on the second holder 25 so as to straddle the through holes 25e and 25f. The OD value of the ND filter 28 is preferably different from the OD value of the ND filter 26. The OD value of the ND filter 29 is preferably different from the OD value of the ND filter 27 and different from the OD value of the ND filter 28.

[0043] The OD value of the ND filter 26 is preferably different from the sum of the OD value of the ND filter 27 and the OD value of the ND filter 28 or the OD value of the ND filter 29. The OD value of the ND filter 27 is preferably different from the sum of the OD value of the ND filter 26 and the OD value of the ND filter 28 or the OD value of the ND filter 29. The OD value of the ND filter 28 is preferably different from the sum of the OD value of the ND filter 26 or the OD value of the ND filter 27 and the OD value of the ND filter 29. The OD value of the ND filter 29 is preferably different from the OD value of the ND filter 26 or the sum of the OD value of the ND filter 27 and the OD value of the ND filter 28.

[0044] In this example, the intensity of the first laser light L1 can be adjusted to nine patterns (a pattern that is not subjected to intensity adjustment, a pattern that is subjected to intensity adjustment only by ND filter 26, a pattern that is subjected to intensity adjustment only by ND filter 27, a pattern that is subjected to intensity adjustment only by ND filter 28, a pattern that is subjected to intensity adjustment only by ND filter 29, a pattern that is subjected to intensity adjustment by ND filter 26 and ND filter 27, a pattern that is subjected to intensity adjustment by ND filter 26 and ND filter 29, a pattern that is subjected to intensity adjustment by ND filter 28 and ND filter 27, and a pattern that is subjected to intensity adjustment by ND filter 28 and ND filter 29), and similarly the pattern of the second laser light L2 can be adjusted to nine patterns.

[0045] As described above, in the Raman microscopy apparatus 100, the number of through holes (referred to as first through holes) on the first arc, the number of through holes (referred to as second through holes) on the second arc, the number of through holes (referred to as third through holes) on the third arc, and the number of through holes (referred to as fourth through holes) on the fourth arc are not particularly limited. If the number of the first through holes, the number of the second through holes, the number of the third through holes, and the number of the fourth through holes is k (k is a natural number of 2 or more), the number of the ND filters (referred to as first ND filters) arranged on the first holder 24 and the number of the ND filters (referred to as second ND filters) arranged on the second holder 25 is (k-1).

[0046] When the first holder 24 is rotated around the first rotation axis A1 so that any one of the multiple first through holes overlaps with the first laser light L1, all of the multiple second through holes are offset from the second laser light L2, and when the first holder 24 is rotated around the first rotation axis A1 so that any one of the multiple second through holes overlaps with the second laser light L2, all of the multiple first through holes are offset from the first laser light L1. When the second holder 25 is rotated around the second rotation axis A2 so that any one of the multiple third through holes overlaps with the first laser light L1, all of the multiple fourth through holes are offset from the second laser light L2, and when the second holder 25 is rotated around the second rotation axis A2 so that any one of the multiple fourth through holes overlaps with the second laser light L2, all of the multiple third through holes are offset from the first laser light L1.

[0047] Each of the multiple first ND filters is positioned on the first holder 24 so as to straddle one of the first through holes and one of the second through holes that is located closest to the one of the first through holes, and each of the multiple second ND filters is positioned on the second holder 25 so as to straddle one of the third through holes and one of the fourth through holes that is located closest to the one of the third through holes.

[0048] Second embodiment A Raman microscope apparatus according to the second embodiment will be described. The Raman microscope apparatus according to the second embodiment is designated as a Raman microscope apparatus 200. Here, differences from the Raman microscope apparatus 100 will be mainly described, and overlapping descriptions will not be repeated.

[0049] <Configuration of the Raman microscope apparatus 200> The configuration of the Raman microscope 200 will be described below.

[0050] Fig. 7 is a schematic diagram of a Raman microscope apparatus 200. As shown in Fig. 7, the Raman microscope apparatus 200 includes a first laser light source 11, a second laser light source 12, a light source adjustment unit 20, a long-pass filter 41, a long-pass filter 42, a dichroic mirror 43, a dichroic mirror 44, a mirror 45, an objective lens 46, and a Raman spectrometer 50. In this respect, the configuration of the Raman microscope apparatus 200 is common to the configuration of the Raman microscope apparatus 100.

[0051] FIG. 8 is a plan view of the first holder 24 of the Raman microscopy device 200 as viewed along the second direction DR2. As shown in FIG. 8, in the Raman microscopy device 200, the first holder 24 is further formed with a through hole 24g and a through hole 24h. The through hole 24g is on a first arc, and the through hole 24h is on a second arc. The through hole 24g and the through hole 24h penetrate the first holder 24 along the second direction DR2. When the first holder 24 is rotated around the first rotation axis A1 so that the through hole 24g overlaps with the first laser light L1, the through hole 24h overlaps with the second laser light L2. That is, when viewed along the second direction DR2, the through hole 24g, the through hole 24h, and the first rotation axis A1 are on the same virtual straight line.

[0052] FIG. 9 is a plan view of the second holder 25 of the Raman microscopy device 200 as viewed along the second direction DR2. As shown in FIG. 9, in the Raman microscopy device 200, the second holder 25 is further formed with a through hole 25g and a through hole 25h. The through hole 25g is on a third arc, and the through hole 25h is on a fourth arc. The through hole 25g and the through hole 25h penetrate the second holder 25 along the second direction DR2. When the second holder 25 is rotated around the second rotation axis A2 so that the through hole 25g overlaps with the first laser light L1, the through hole 25h overlaps with the second laser light L2. That is, when viewed along the second direction DR2, the through hole 25g, the through hole 25h, and the second rotation axis A2 are on the same virtual straight line.

[0053] In the Raman microscopy apparatus 200, the light source adjustment unit 20 further includes an ND filter 30 and an ND filter 31. The ND filter 30 is disposed on the first holder 24 so as to straddle the through-holes 24g and 24h. The ND filter 31 is disposed on the second holder 25 so as to straddle the through-holes 25g and 25h. The OD value of the ND filter 30 is preferably different from the OD value of the ND filter 26. The OD value of the ND filter 31 is preferably different from the OD value of the ND filter 27 and different from the OD value of the ND filter 30.

[0054] The OD value of the ND filter 26 is preferably different from the sum of the OD value of the ND filter 27 and the OD value of the ND filter 30 or the OD value of the ND filter 31. The OD value of the ND filter 27 is preferably different from the sum of the OD value of the ND filter 26 and the OD value of the ND filter 30 or the OD value of the ND filter 31. The OD value of the ND filter 30 is preferably different from the sum of the OD value of the ND filter 26 or the OD value of the ND filter 27 and the OD value of the ND filter 31. The OD value of the ND filter 31 is preferably different from the sum of the OD value of the ND filter 26 or the OD value of the ND filter 27 and the OD value of the ND filter 30. In these respects, the configuration of the Raman microscope apparatus 200 differs from the configuration of the Raman microscope apparatus 100.

[0055] <Effects of the Raman Microscope 200> The effects of the Raman microscope 200 will be described below.

[0056] In the micro-Raman device 200, the intensity of the first laser light L1 can be adjusted into eight patterns (a pattern that is not intensity adjusted, a pattern that is intensity adjusted only by the ND filter 26, a pattern that is intensity adjusted only by the ND filter 27, a pattern that is intensity adjusted only by the ND filter 30, a pattern that is intensity adjusted only by the ND filter 31, a pattern that is intensity adjusted by the ND filter 26 and the ND filter 27, a pattern that is intensity adjusted by the ND filter 26 and the ND filter 30, and a pattern that is intensity adjusted by the ND filter 30 and the ND filter 27), and similarly the pattern of the second laser light L2 can be adjusted into eight patterns.

[0057] <Modification> In the Raman microscope apparatus 200, the number of through holes (referred to as first through holes) on the first arc, the number of through holes (referred to as second through holes) on the second arc, the number of through holes (referred to as third through holes) on the third arc, and the number of through holes (referred to as fourth through holes) on the fourth arc are not particularly limited. If the number of the first through holes, the number of the second through holes, the number of the third through holes, and the number of the fourth through holes is k (k is a natural number of 2 or more), the number of the ND filters (referred to as first ND filters) arranged on the first holder 24 and the number of the ND filters (referred to as second ND filters) arranged on the second holder 25 is (k-1).

[0058] One of the plurality of first through holes is a fifth through hole. One of the plurality of second through holes is a sixth through hole. One of the plurality of third through holes is a seventh through hole. One of the plurality of fourth through holes is an eighth through hole. When the first holder 24 is rotated around the first rotation axis A1 so that the fifth through hole overlaps with the first laser light L1, the sixth through hole overlaps with the second laser light L2, and when the second holder 25 is rotated around the second rotation axis A2 so that the seventh through hole overlaps with the first laser light L1, the eighth through hole overlaps with the second laser light L2.

[0059] When the first holder 24 is rotated around the first rotation axis A1 so that any of the first through holes other than the fifth through hole overlaps with the first laser light L1, all of the second through holes are offset from the second laser light L2, and when the first holder 24 is rotated around the first rotation axis A1 so that any of the second through holes other than the sixth through hole overlaps with the second laser light L2, all of the first through holes are offset from the second laser light L2. When the second holder 25 is rotated around the second rotation axis A2 so that any of the third through holes other than the seventh through hole overlaps with the first laser light L1, all of the fourth through holes are offset from the second laser light L2, and when the second holder 25 is rotated around the second rotation axis A2 so that any of the fourth through holes other than the eighth through hole overlaps with the second laser light L2, all of the third through holes are offset from the first laser light L1.

[0060] One of the plurality of first ND filters is a third ND filter. The third ND filter is disposed on the first holder 24 so as to straddle the fifth through hole and the sixth through hole. One of the plurality of second ND filters is a fourth ND filter. The fourth ND filter is disposed on the second holder 25 so as to straddle the seventh through hole and the eighth through hole. Each of the plurality of first ND filters other than the third ND filter is disposed on the first holder 24 so as to straddle one of the first through holes other than the fifth through hole and one of the second through holes other than the sixth through hole located closest to the one of the first through holes. Each of the plurality of second ND filters other than the fourth ND filter is disposed on the second holder 25 so as to straddle one of the third through holes other than the seventh through hole and one of the fourth through holes other than the eighth through hole located closest to the one of the third through holes.

[0061] (Additional Note) The above embodiment includes the following configurations.

[0062] <Appendix 1> A first laser light source; A second laser light source; A first holder; A second holder; A first ND filter; and a second ND filter. the first laser light source and the second laser light source generate a first laser light having a first wavelength and a second laser light having a second wavelength, respectively; the second wavelength is different from the first wavelength, the first laser light and the second laser light travel along a second direction perpendicular to the first direction while being spaced apart from each other in the first direction; the first holder and the second holder are arranged to overlap in the second direction, the first holder is rotatable about a first rotation axis parallel to the second direction; the second holder is rotatable about a second rotation axis parallel to the second direction, a first through hole, a second through hole, a third through hole, and a fourth through hole penetrating the first holder in the second direction are formed in the first holder; the first through hole and the second through hole, when viewed along the second direction, are on an arc having a center on the first rotation axis and a radius equal to a distance between the first rotation axis and the first laser light, the third through hole and the fourth through hole, when viewed along the second direction, are on an arc that has a center on the first rotation axis and has a radius equal to a distance between the first rotation axis and the second laser light, a distance between the second through hole and the fourth through hole is smaller than a distance between the second through hole and the third through hole; when the first holder is rotated around the first rotation axis so that either the first through hole or the second through hole overlaps with the first laser beam, both the third through hole and the fourth through hole are shifted from the second laser beam, when the first holder is rotated around the first rotation axis so that either the third through hole or the fourth through hole overlaps with the second laser beam, both the first through hole and the second through hole are shifted from the first laser beam, the second holder is formed with a fifth through hole, a sixth through hole, a seventh through hole, and an eighth through hole penetrating the second holder in the second direction; the fifth through hole and the sixth through hole are located on an arc having a center on the second rotation axis and a radius equal to a distance between the second rotation axis and the first laser light, when viewed along the second direction; the seventh through hole and the eighth through hole are located on an arc having a center on the second rotation axis and a radius equal to a distance between the second rotation axis and the second laser light, when viewed along the second direction; a distance between the sixth through hole and the eighth through hole is smaller than a distance between the sixth through hole and the seventh through hole; when the second holder is rotated around the second rotation axis so that either the fifth through hole or the sixth through hole overlaps with the first laser beam, both the seventh through hole and the eighth through hole are shifted from the second laser beam, when the second holder is rotated around the second rotation axis so that either the seventh through hole or the eighth through hole overlaps with the second laser beam, both the fifth through hole and the sixth through hole are shifted from the first laser beam, the first ND filter is disposed on the first holder so as to straddle the second through hole and the fourth through hole, The Raman microscope apparatus, wherein the second ND filter is disposed on the second holder so as to straddle the sixth through-hole and the eighth through-hole.

[0063] <Appendix 2> 2. The Raman microscope apparatus of claim 1, wherein the second ND filter has an OD value different from the OD value of the first ND filter.

[0064] <Appendix 3> A third ND filter; and a fourth ND filter. The first holder further includes a ninth through hole and a tenth through hole penetrating the first holder in the second direction, when the first holder is rotated around the first rotation axis so that the ninth through hole overlaps with the first laser beam, the tenth through hole overlaps with the second laser beam, The second holder further includes an eleventh through hole and a twelfth through hole penetrating the second holder in the second direction, when the second holder is rotated around the first rotation axis so that the eleventh through hole is overlapped with the first laser beam, the twelfth through hole is overlapped with the second laser beam, the third ND filter is disposed on the first holder so as to straddle the ninth through hole and the tenth through hole, The Raman microscope apparatus according to claim 1 or 2, wherein the fourth ND filter is arranged on the second holder so as to straddle the eleventh through hole and the twelfth through hole.

[0065] <Appendix 4> The OD value of the third ND filter is different from the OD value of the first ND filter, 4. The Raman microscope apparatus of claim 3, wherein the OD value of the fourth ND filter is different from the OD value of the second ND filter and different from the OD value of the third ND filter.

[0066] Although the embodiment of the present disclosure has been described above, the above-mentioned embodiment can be modified in various ways. The scope of the present invention is not limited to the above-mentioned embodiment. The scope of the present invention is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0067] A1 first rotation axis, A2 second rotation axis, DIS1, DIS2, DIS3, DIS4 distance, DR1 first direction, DR2 second direction, L1 first laser light, L2 second laser light, L3 first Raman light, L4 second Raman light, S sample, 100 Raman microscope, 11 first laser light source, 12 second laser light source, 20 light source adjustment unit, 21 base, 22 first shaft member, 23 second shaft member, 24 first holder, 24a, 24b, 24c, 24d, 24e, 24f, 24g, 24h through hole, 25 second holder, 25a, 25b, 25c, 25d, 25e, 25f, 25g, 25h through hole, 26, 27, 28, 29, 30, 31 ND filter, 41, 42 Long pass filter, 43, 44 dichroic mirror, 45 mirror, 46 objective lens, 50 Raman spectrometer, 200 Raman microscope.

Claims

1. a first laser light source; a second laser light source; a first holder; A second holder; a first ND filter; a second ND filter; the first laser light source and the second laser light source generate a first laser light having a first wavelength and a second laser light having a second wavelength, respectively; the second wavelength is different from the first wavelength; the first laser light and the second laser light travel along a second direction perpendicular to the first direction while being spaced apart from each other in the first direction; the first holder and the second holder are arranged to overlap in the second direction, the first holder is rotatable about a first rotation axis parallel to the second direction, the second holder is rotatable about a second rotation axis parallel to the second direction, a first through hole, a second through hole, a third through hole, and a fourth through hole penetrating the first holder in the second direction are formed in the first holder; the first through hole and the second through hole, when viewed along the second direction, are located on an arc having a center on the first rotation axis and a radius equal to a distance between the first rotation axis and the first laser light, the third through hole and the fourth through hole, when viewed along the second direction, are located on an arc having a center on the first rotation axis and a radius equal to a distance between the first rotation axis and the second laser light, a distance between the second through hole and the fourth through hole is smaller than a distance between the second through hole and the third through hole; when the first holder is rotated around the first rotation axis so that either the first through hole or the second through hole overlaps with the first laser beam, both the third through hole and the fourth through hole are deviated from the second laser beam, when the first holder is rotated around the first rotation axis so that either the third through hole or the fourth through hole overlaps with the second laser beam, both the first through hole and the second through hole are deviated from the first laser beam, the second holder is formed with a fifth through hole, a sixth through hole, a seventh through hole, and an eighth through hole penetrating the second holder in the second direction, the fifth through hole and the sixth through hole are located on an arc having a center on the second rotation axis and a radius equal to a distance between the second rotation axis and the first laser light, when viewed along the second direction; the seventh through hole and the eighth through hole, when viewed along the second direction, are located on an arc having a center on the second rotation axis and a radius equal to a distance between the second rotation axis and the second laser light, a distance between the sixth through hole and the eighth through hole is smaller than a distance between the sixth through hole and the seventh through hole; when the second holder is rotated around the second rotation axis so that either the fifth through hole or the sixth through hole overlaps with the first laser beam, both the seventh through hole and the eighth through hole are deviated from the second laser beam, when the second holder is rotated around the second rotation axis so that either the seventh through hole or the eighth through hole overlaps with the second laser beam, both the fifth through hole and the sixth through hole are deviated from the first laser beam, the first ND filter is disposed on the first holder so as to straddle the second through-hole and the fourth through-hole; The Raman microscope apparatus, wherein the second ND filter is disposed on the second holder so as to straddle the sixth through-hole and the eighth through-hole.

2. 2. The Raman microscope according to claim 1, wherein the second ND filter has an OD value different from that of the first ND filter.

3. a third ND filter; a fourth ND filter; The first holder is further formed with a ninth through hole and a tenth through hole penetrating the first holder in the second direction, when the first holder is rotated around the first rotation axis so that the ninth through hole overlaps with the first laser beam, the tenth through hole overlaps with the second laser beam; The second holder is further formed with an eleventh through-hole and a twelfth through-hole penetrating the second holder in the second direction, when the second holder is rotated around the second rotation axis so that the eleventh through hole overlaps with the first laser beam, the twelfth through hole overlaps with the second laser beam; the third ND filter is disposed on the first holder so as to straddle the ninth through-hole and the tenth through-hole, 3. The Raman microscope according to claim 1, wherein the fourth ND filter is disposed on the second holder so as to straddle the eleventh through-hole and the twelfth through-hole.

4. the OD value of the third ND filter is different from the OD value of the first ND filter, 4. The Raman microscope according to claim 3, wherein the OD value of the fourth ND filter is different from the OD value of the second ND filter and different from the OD value of the third ND filter.

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