Drive unit, lithography device, article manufacturing method, processor, program and detection method

Abstract

To provide a technology which is advantageous for detecting wear with high accuracy while reducing restrictions for detecting the wear of a direct-acting bearing guide.SOLUTION: A drive unit comprises: a direct-acting bearing guide; a mobile object which is guided by the direct-acting bearing guide; a driving unit which drives the mobile object; and a detection unit which detects wear of the direct-acting bearing guide. The driving unit comprises:a first component which moves with the mobile object, and a second component which applies power to the first component, and the detection unit detects the wear of the direct-acting bearing guide on the basis of vibration which is caused by change of a gap between the first component and the second component.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a drive apparatus, a lithographic apparatus, an article manufacturing method, a processor, a program and a detection method. [Background technology]

[0002] There are two methods for detecting wear in a linear bearing guide: one is to monitor the change in the intensity of vibration generated from the linear bearing guide, and the other is to monitor the change in the frequency of vibration generated from the linear bearing guide. The former method is described in Patent Document 1, and the latter method is described in Patent Document 2. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-196742 A [Patent Document 2] JP 2009-020090 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the method described in Patent Document 1, the moving body guided by the linear bearing guide for which wear detection is to be performed must always be driven under the same conditions. Therefore, the method described in Patent Document 1 is a wear detection method that is difficult to apply to linear bearing guides whose driving conditions are constantly changing. This is because the peak value of the amplitude of the vibration generated from the linear bearing guide varies depending on the driving speed V of the moving body supported by the block of the linear bearing guide. For example, if the moving body (block) is moved at high speed, the peak value becomes large, and if it is moved at low speed, the peak value becomes small. Therefore, unless the moving body is always driven under the same conditions, accurate wear detection is not possible.

[0005] In the method described in Patent Document 2, the peak frequency of the vibration generated from the linear bearing guide may become unstable due to vibration caused by collision between the parts inside the block of the linear bearing guide and the rolling elements. Therefore, the method may not be able to accurately detect wear. For example, inside the linear bearing guide, there is a path through which the rolling elements circulate, and the rolling elements collide with each other when they circulate along the path. In addition, the end caps at both ends of the block have return guides that make the rolling elements make U-turns, and these return guides collide with the rolling elements. Such collisions may prevent smooth circulation of the rolling elements, and the peak frequency of the vibration generated from the linear bearing guide may become unstable.

[0006] An object of the present invention is to provide an advantageous technique for detecting wear with high accuracy while reducing restrictions on detection of wear in linear bearing guides. [Means for solving the problem]

[0007] One aspect of the present invention relates to a drive device comprising a linear bearing guide, a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a detection unit that detects wear of the linear bearing guide, the drive unit including a first part that moves with the moving body and a second part that applies force to the first part, and the detection unit detects wear of the linear bearing guide based on vibrations caused by changes in the gap between the first part and the second part. Effect of the Invention

[0008] According to the present invention, an advantageous technique is provided for detecting wear with high accuracy while reducing the constraints on detection of wear in linear bearing guides. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a diagram illustrating the configuration of a drive device according to the first embodiment. [Diagram 2] FIG. 4 is a cross-sectional view illustrating an internal structure of a linear bearing guide. [Diagram 3]FIG. 13 is a diagram illustrating the configuration of a drive device according to a second embodiment. [Figure 4] FIG. 1 is a cross-sectional view showing a schematic configuration of an iron-core linear motor. [Diagram 5] FIG. 13 is a diagram illustrating the configuration of a drive device according to a third embodiment. [Figure 6] FIG. 2 is a diagram illustrating the configuration of a driving device for a linear pulse motor. [Figure 7] FIG. 4 is a diagram for explaining the attractive force of a linear pulse motor. [Figure 8] FIG. 1 is a diagram illustrating the configuration of a lithography apparatus. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0011] FIG. 1 shows a schematic configuration of a drive device DA according to a first embodiment of the present disclosure. The drive device DA may include one or more linear bearing guides 2, a moving body 5 guided by the linear bearing guide 2, a drive unit DR that drives the moving body 5, and a detection unit 30 that detects wear of the linear bearing guide 2. The drive unit DR may include a rack and pinion 6 and a power source 29 that drives the rack and pinion 6. The rack and pinion 6 may include a rack gear 7 as a first component that moves together with the moving body 5, and a pinion gear 8 as a second component that applies force to the rack gear 7 as the first component. The detection unit 30 may detect wear of the linear bearing guide 2 based on vibration caused by a change in the gap (backlash) between the rack gear 7 as the first component and the pinion gear 8 as the second component.

[0012] The linear bearing guide 2 may include a rail 3 and a block 4. The linear bearing guide 2 may include, for example, one rail 3 and one or more blocks 4. The block 4 may mount a moving body 5. In other words, the moving body 5 may be supported by the block 4. From another perspective, the moving body 5 may be supported by the linear bearing guide 2. A rack gear 7 may be fixed to or engaged with the moving body 5. A stage (not shown) or the like may be mounted on the moving body 5, or the moving body 5 may constitute a stage. In the example shown in FIG. 1, the moving body 5 is driven in one axis (X-axis direction). The driving device DA may be combined with one or more other driving devices to constitute a driving system that drives a driven object about two or more axes.

[0013] The drive device DA may further include a base 1 that supports the linear bearing guide 2 (or the rail 3). The detection unit 30 may include a vibration sensor 9 and a processor 10. The vibration sensor 9 may be fixed to the base 1, for example. The processor 10 may be configured to extract a component of vibration caused by a change in the gap (backlash) between the rack gear 7 (first component) and the pinion gear 8 (second component) from the output of the vibration sensor 9, and to detect wear of the linear bearing guide 2 based on this component.

[0014] The processor 10 may be, for example, a general-purpose or dedicated computer with an embedded program, or a combination of all or part of these. Alternatively, the processor 10 may be a PLD (abbreviation for Programmable Logic Device) such as an FPGA (abbreviation for Field Programmable Gate Array), or an ASIC (abbreviation for Application Specific Integrated Circuit).

[0015] The vibration sensor 9 may be fixed to the base 1. Alternatively, the vibration sensor 9 may be fixed to the rail 3 at a position where the block 4 and the moving body 5 do not interfere with each other. Fixing the vibration sensor 9 to a member that does not move (for example, the base 1, the rail 3) is advantageous in order to eliminate the influence of friction of a cable connected to the vibration sensor 9 and disturbances caused by the cable. The vibration sensor 9 may detect acceleration, speed, or displacement. The vibration sensor 9 and the processor 10 are connected by a transmission line 36, and information including a signal or data related to vibration may be supplied from the vibration sensor 9 to the processor 10 via the transmission line 36. The transmission line 36 may be an analog signal line. Alternatively, the transmission line 36 may be configured to include at least one of a wired communication line and a wireless communication line. In another aspect, the transmission line 36 may be configured to include at least one of a LAN and the Internet. Some of the components of the processor 10 may be incorporated in the vibration sensor 9.

[0016] In one example, the transmission path 36 is configured as an analog signal path that transmits an analog signal as information including a signal or data, and the processor 10 may include, for example, a filter 31, an ADC (analog-to-digital converter) 32, a calculation unit 33, an output unit 34, and a memory 35. The filter 31 is a circuit that filters the output of the vibration sensor 9, and is, for example, a low-pass filter. The ADC 32 converts the output (analog signal) of the filter 31 into a digital signal. The ADC 32 may be incorporated in the calculation unit 33. The calculation unit 33 may include a microprocessor. The calculation unit 33 may further include a DSP (digital signal processor). The calculation unit 33 may perform, for example, an FFT (discrete Fourier transform) calculation by the DSP. The calculation unit 33 may operate according to a program stored in the memory 35. The program may be understood as an element that characterizes the operation of the processor 10 or the calculation unit 33.

[0017] The calculation unit 33 processes the output of the ADC 32 to extract a vibration component caused by a change in the gap (backlash) between the rack gear 7 as the first component and the pinion gear 8 as the second component, and detects wear of the linear bearing guide 2 based on the component. The calculation unit 33 performs an FFT operation on the output of the ADC 32 to detect a plurality of peak frequencies included in the vibration detected by the vibration sensor 9. The vibration detected by the vibration sensor 9 may have a peak at a frequency obtained by dividing the meshing frequency of the rack and pinion 6 by an integer. Therefore, the calculation unit 33 may detect wear of the linear bearing guide 2 based on the vibration component of the frequency (peak frequency) obtained by dividing the meshing frequency of the rack and pinion 6 by an integer. The calculation unit 33 may output a warning or the like to the output unit 34 based on the detection of wear of the linear bearing guide 2. The output unit 34 may include, for example, a display.

[0018] 2 shows an example of the internal structure of the linear bearing guide 2. A plurality of rolling elements 11 are arranged inside the block 4 of the linear bearing guide 2, and the plurality of rolling elements 11 circulate through an internal path of the block 4 while rolling on a rolling surface 12 of the rail 3. The rolling elements 11 and the rolling surface 12 may be made of metal. A lubricating film may be formed between the rolling elements 11 and the rolling surface 12 using lubricating oil or grease.

[0019] When the linear bearing guide 2 is used for a long period of time, the lubricating film formed between the rolling elements 11 and the rolling surfaces 12 disappears, resulting in poor lubrication. This causes the rolling elements 11 and the rolling surfaces 12 to come into contact with each other, and the rolling elements 11 and the rolling surfaces 12 may wear away while generating metal powder. This wear reduces the gap between the rail 3 and the block 4. This means that the height of the block 4 decreases. This also reduces the height of the rack gear 7 fixed to the moving body 5 supported by the block 4, and the gap (called backlash) between the rack gear 7 as the first component and the pinion gear 8 as the second component increases.

[0020] Usually, the gap between the rack gear 7 and the pinion gear 8 is adjusted to an appropriate value or within an appropriate range. However, as described above, the gap (backlash) between the rack gear 7 and the pinion gear 8 can increase due to wear of the rolling element 11 and the rolling surface 12. When the vibration sensor 9 acquires the vibration when the moving body 5 is driven in a state where the backlash is larger than the appropriate value and performs FFT processing, a peak can be confirmed at a frequency obtained by dividing the frequency of the vibration (meshing frequency) generated by the meshing of the rack and pinion 6 by an integer. The calculation unit 33 can detect wear of the linear bearing guide 2 by detecting the peak at the frequency obtained by dividing the meshing frequency by an integer. The integer is, for example, an even number. The integer is preferably, for example, 2 or 4, and more preferably, 2.

[0021] The meshing frequency is the product of the rotation speed of the pinion gear 8 and the number of teeth of the pinion gear 8, and the calculation unit 33 can obtain the meshing frequency based on the rotation speed of the pinion gear 8 and the number of teeth of the pinion gear 8. The calculation unit 33 can obtain the rotation speed of the pinion gear 8 based on, for example, control data for controlling the power source 29 that drives the rack and pinion 6 (pinion gear 8), or the output of an encoder or a sensor that detects the output rotation speed of the power source 29. Therefore, the calculation unit 33 can detect the wear of the linear bearing guide 2 even if the driving conditions of the drive unit DR change. That is, the first embodiment is advantageous in reducing constraints for detecting the wear of the linear bearing guide 2 because it is not necessary to keep the driving conditions of the drive unit DR constant.

[0022] Detecting a peak at a frequency that depends on the meshing frequency means detecting vibrations generated from the drive unit DR or the rack and pinion 6. Therefore, the first embodiment is advantageous for detecting wear of the linear bearing guide 2 without being affected by vibrations generated in the linear bearing guide 2 (for example, vibrations caused by collisions of parts such as the rolling elements 11). Furthermore, the intensity of vibrations generated by the drive unit DR or the rack and pinion 6 tends to be greater than the intensity of vibrations generated by the linear bearing guide 2, since this is caused by changes in backlash. Therefore, the first embodiment is advantageous for detecting wear of the linear bearing guide 2 with high accuracy.

[0023] Hereinafter, a driving device DA according to a second embodiment of the present disclosure will be described with reference to FIG. 3 and FIG. 4. Matters not mentioned as the second embodiment may follow the first embodiment. FIG. 3 shows a schematic cross-sectional structure of the driving device DA according to the second embodiment. The driving device DA may include one or more (two in the example of FIG. 3) linear bearing guides 2, a moving body 14 guided by the one or more linear bearing guides 2, a driving unit DR that drives the moving body 14, and a detection unit 30 that detects wear of the one or more linear bearing guides 2. The moving body 14 is supported by a block 4 of the linear bearing guide 2. In the example of FIG. 3, the rail 3 of the linear bearing guide 2 extends along the X-axis direction. An object to be driven may be placed on the moving body 14. Alternatively, a chuck that holds the object to be driven may be placed on the moving body 14.

[0024] The driving unit DR may include a linear motor 15. The linear motor 15 may be a linear motor with an iron core. FIGS. 3 and 4 are schematic diagrams showing the configuration of a linear motor with an iron core as an example of the linear motor 15. The linear motor 15 includes a mover 16 (first part) having a coil 18 wound around an iron core 17, and a stator 19 (second part) to which permanent magnets 20 and 21 are attached. The mover 16 (first part) may be fixed or engaged with the moving body 14 so as to move together with the moving body 14. The stator 19 (second part) may be fixed to the base 13. The permanent magnets 20 and 21 may be arranged to have gaps δ1 and δ2 above and below the iron core 17. The permanent magnets 20 and 21 may be arranged to alternately appear as N poles and S poles in the X-axis direction. The gap δ1 may be understood as the gap between the iron core 17 and the permanent magnet 20, or may be understood as the gap between the mover 16 and a first portion of the stator 19. The gap δ2 may be understood as the gap between the iron core 17 and the permanent magnet 21, or may be understood as the gap between the mover 16 and a second portion of the stator 19.

[0025] In the linear motor 15, an attractive force parallel to the Z-axis direction acts between the permanent magnets 20, 21 attached to the stator 19 and the iron core 17 of the mover 16. More specifically, an attractive force that attracts the mover 16 in the + direction of the Z-axis acts between the permanent magnet 20 on the upper side of the stator 19 and the iron core 17 of the mover 16. Also, an attractive force that attracts the mover 16 in the - direction of the Z-axis acts between the permanent magnet 21 on the lower side of the stator 19 and the iron core 17 of the mover 16. These attractive forces depend on the size of the gap δ1 between the iron core 17 and the permanent magnet 20 and the gap δ2 between the iron core 17 and the permanent magnet 21. Therefore, when assembling the linear motor 15, the gaps δ1 and δ2 can be adjusted to be equal. As a result, the permanent magnets 20, 21 apply attractive forces of the same magnitude to the mover 16 (iron core 17) in opposite directions, and the resultant force becomes zero.

[0026] Generally, linear motors with iron cores have the characteristic of having a high thrust constant, but on the other hand, they generate periodic vibrations called cogging when driven. As mentioned above, the N and S poles of the permanent magnets are arranged alternately, so that the attractive force acting between the permanent magnets and the iron core fluctuates as the iron core approaches from the N pole to the S pole (or from the S pole to the N pole). The periodic fluctuation of the attractive force due to the arrangement of the permanent magnets and the positional relationship of the iron core is called cogging. This cogging induces vibrations in the moving body to which the linear motor with iron core is fixed. The frequency of the vibrations caused by cogging depends on the driving speed V of the mover 16. For example, when the mover 16 moves at high speed, the positional relationship between the permanent magnets and the iron core fluctuates in a short time, so that high-frequency vibrations are generated. In addition, the magnitude of the force that induces vibrations by cogging is related to the magnitude of the attractive force acting between the iron core and the permanent magnet. Usually, as mentioned above, the gaps δ1 and δ2 in FIG. 4 are equal, so the attractive forces acting between the permanent magnets 20, 21 and the iron core 17 are offset. Therefore, the force that induces vibration due to cogging is small. However, if the gaps δ1 and δ2 are not equal, the attractive forces acting between the permanent magnets 20, 21 and the iron core 17 become unbalanced, and the attractive forces act in the + or - direction of the Z axis. This increases the force that induces vibration due to cogging. In the second embodiment, this tendency is utilized to detect wear of the linear bearing guide 2.

[0027] As in the first embodiment, when the linear bearing guide 2 is used for a long period of time, the rolling elements and rolling surfaces may become insufficiently lubricated, and may wear while generating metal powder. Then, the gap between the rail 3 and the block 4 in the linear bearing guide 2 becomes smaller, and the height of the block 4 decreases. As a result, in the linear motor 15, the gaps δ1 and δ2 between the iron core 17 (first part) and the permanent magnets 20 and 21 (second parts) become different from each other. When the gaps δ1 and δ2 are different from each other, the force that induces vibration due to cogging increases, and vibration is induced in the base 13 to which the stator 19 of the linear motor 15 is fixed. This vibration is detected by the detection unit 30. In other words, the detection unit 30 can detect the wear of the linear bearing guide 2 based on the vibration caused by the change in the gaps δ1 and δ2 between the mover 16 as the first part and the stator 19 as the second part. The detection unit 30 can include a vibration sensor 9 and a processor 10. The vibration sensor 9 may be fixed to, for example, the base 13. The processor 10 may be configured to extract a component of a vibration caused by a change in the gaps δ1, δ2 between the mover 16 (first part) and the stator 19 (second part) from the output of the vibration sensor 9, and to detect wear of the linear bearing guide 2 based on this component.

[0028] When the vibration sensor 9 acquires the vibration when the moving body 14 is driven with the gaps δ1 and δ2 out of the appropriate values ​​and performs FFT processing, the peak in the cogging frequency can be confirmed. The calculation unit 33 can detect wear of the linear bearing guide 2 by detecting the peak in the cogging frequency. The cogging frequency has a value obtained by dividing the driving speed V of the moving body 14 by the pitch P of the permanent magnets 20 and 21 constituting the stator 19 of the linear motor 15. The calculation unit 33 can obtain the speed of the moving body 14 based on, for example, control data for controlling a driver that drives the linear motor 15, or the output of an encoder or sensor that detects the position of the mover 16 or the moving body 14. Therefore, the calculation unit 33 can detect wear of the linear bearing guide 2 even if the driving conditions of the drive unit DR change. That is, the second embodiment is advantageous in reducing constraints for detecting wear of the linear bearing guide 2 because it is not necessary to keep the driving conditions of the drive unit DR constant.

[0029] Hereinafter, a driving device DA according to a third embodiment of the present disclosure will be described with reference to FIG. 5 and FIG. 6. Matters not mentioned as the third embodiment may follow the first or second embodiment. FIG. 5 shows a schematic structure of the driving device DA according to the third embodiment. The driving device DA may include one or more (two in the example of FIG. 5) linear motion bearing guides 2, a moving body 23 (stage) guided by one or more linear motion bearing guides 2, a driving unit DR that drives the moving body 23, and a detection unit 30 that detects wear of one or more linear motion bearing guides 2. The moving body 23 is supported by a block 4 of the linear motion bearing guide 2. In the example of FIG. 5, the rail 3 of the linear motion bearing guide 2 extends along the X-axis direction. An object to be driven may be placed on the moving body 23. Alternatively, a chuck that holds the object to be driven may be placed on the moving body 23.

[0030] The driving unit DR may include a linear motor 24. The linear motor 24 may be a linear pulse motor (Sawyer's linear motor). The linear motor 24 may include a mover 25 as a first component and a stator 26 as a second component. The mover 25 and the stator 26 are disposed facing each other. The mover 25 may be fixed to or engaged with the moving body 23. The stator 26 may be fixed to the base 22.

[0031] 6 shows a schematic configuration of a linear pulse motor as an example of the linear motor 24. The linear motor 24 includes a stator 26 made of comb-tooth laminated electromagnetic steel sheets, and a mover 25 having a coil 28 wound around an iron core 27 made of comb-tooth laminated electromagnetic steel sheets. The stator 26 and the mover 25 are disposed opposite each other across a gap δ. In the linear motor 24 configured as a linear pulse motor, the attractive force acting between the comb teeth of the mover 25 and the comb teeth of the stator 26 is controlled by switching the excitation of the coil 28, and the mover 25 is driven in the X-axis direction using this attractive force as a thrust.

[0032] The attractive force in the linear motor 24 varies depending on the positional relationship between the comb teeth of the mover 25 and the comb teeth of the stator 26 in the X-axis direction. In Fig. 7(a) and (b), the attractive force acting between the mover 25 and the stator 26 in the linear motor 24 is explained. Fig. 7(a) shows a state in which the distance in the X-axis direction between the iron core 27 of the comb teeth (only partly shown) of the mover 25 and the comb teeth (only partly shown) of the stator 26 is distance D. Fig. 7(b) shows a state in which the distance in the X-axis direction between the iron core 27 of the comb teeth (only partly shown) of the mover 25 and the comb teeth (only partly shown) of the stator 26 is zero, that is, a state in which the positions of both are aligned. The dashed arrow indicates the attractive force acting between the two comb teeth. When the iron core 27 of the mover 25 and the comb teeth of the stator 26 are separated in the X-axis direction as in Fig. 7(a), a thrust F is generated in the X-axis direction. As shown in FIG. 7(b), when the position of the comb teeth of the iron core 27 of the mover 25 and the position of the comb teeth of the stator 26 match in the X-axis direction, the thrust in the X-axis direction becomes zero (referred to as a stable point). In other words, when the mover 25 moves in the X-axis direction, the thrust fluctuates according to the distance between the comb teeth. The fluctuation in the attractive force due to the positional relationship between the comb teeth of the mover 25 and the comb teeth of the stator 26 becomes a force that induces vibration of the base 22 to which the stator 26 of the linear motor 24 is fixed. This force fluctuates according to the driving speed V of the mover 25. For example, when the mover 25 moves at high speed, the positional relationship between the comb teeth of the mover 25 and the comb teeth of the stator 26 fluctuates in a short time, so that high-frequency vibration is generated. The attractive force changes depending on the gap δ between the mover 25 and the stator 26. When the gap δ becomes smaller, the attractive force becomes larger, and the force that induces vibration of the base 22 also becomes larger. This vibration is detected by the detection unit 30. In other words, the detector 30 can detect wear of the linear bearing guide 2 based on vibrations caused by changes in the gap δ between the mover 25 as the first component and the stator 26 as the second component.

[0033] As in the first embodiment, when the linear bearing guide 2 is used for a long period of time, the rolling elements and the rolling surfaces may become insufficiently lubricated, and may wear away while generating metal powder. Then, the gap between the rail 3 and the block 4 in the linear bearing guide 2 becomes smaller, and the height of the block 4 decreases. As a result, the gap δ between the stator 26 and the mover 25 in the linear motor 24 becomes smaller. When the gap δ becomes smaller, the suction force of the linear motor 24 increases, and the force inducing vibration of the base 22 also increases, inducing vibration of the base 22 to which the stator 26 of the linear motor 15 is fixed. This vibration is detected by the detection unit 30. That is, the detection unit 30 may detect wear of the linear bearing guide 2 based on the vibration caused by the change in the gap δ between the mover 25 as the first component and the stator 26 as the second component. The detection unit 30 may include a vibration sensor 9 and a processor 10. The vibration sensor 9 may be fixed to the base 22, for example. The processor 10 can be configured to extract the component of vibration caused by changes in the gap δ between the mover 25 (first part) and the stator 26 (second part) from the output of the vibration sensor 9, and detect wear of the linear bearing guide 2 based on this component.

[0034] When the vibration sensor 9 acquires the vibration when the moving body 23 is driven with the gap δ being out of the appropriate value or range and performs FFT processing, a peak may occur at a frequency corresponding to the driving speed V of the moving element 25 or the moving element 23. The calculation unit 33 can detect wear of the linear bearing guide 2 by detecting this peak. The frequency of the peak occurring according to the driving speed V has a value obtained by dividing the driving speed V of the moving element 25 (moving element 23) by the pitch P of the comb teeth of the stator 26. The calculation unit 33 can obtain the speed of the moving element 25 or the moving element 23 based on, for example, control data for controlling a driver that drives the linear motor 15, or the output of an encoder or a sensor that detects the position of the moving element 25 or the moving element 23. Therefore, the calculation unit 33 can detect wear of the linear bearing guide 2 even if the driving conditions of the driving unit DR change. That is, the third embodiment is advantageous in reducing constraints for detecting wear of the linear bearing guide 2 because it is not necessary to keep the driving conditions of the driving unit DR constant.

[0035] FIG. 8 shows a schematic configuration of a lithography apparatus TR according to a fourth embodiment of the present disclosure. The lithography apparatus TR may be configured to include a driving device typified by any of the first to third embodiments, and to transfer a pattern onto a substrate 111. The lithography apparatus TR may include, for example, an original driving device 102 that drives an original 110, a substrate driving device 104 that drives the substrate 111, an illumination optical system 101 that illuminates the original 110, and a projection optical system 103 that projects a pattern of the original 110 onto the substrate 111. The substrate 111 has a photosensitive material, and a latent image pattern is formed on the photosensitive material by an optical image of the original 110 projected by the projection optical system 103. That is, the pattern of the original 110 may be transferred onto the substrate 111 as a latent image pattern. The substrate driving device 104 may include a driving device DR typified by any of the first to third embodiments. The original driving device 102 can include the driving device DR represented by the first to third embodiments.

[0036] The present disclosure further includes disclosure regarding an article manufacturing method for manufacturing an article using the above-mentioned lithography apparatus TR. The article manufacturing method may include a transfer step of transferring a pattern to a substrate 111 using the lithography apparatus TR, and a processing step of processing the substrate 111 so as to obtain an article from the substrate 111 to which the pattern has been transferred in the transfer step.

[0037] The present disclosure includes the following disclosures. (Item 1) A linear bearing guide; A moving body guided by the linear bearing guide; A drive unit that drives the moving body; A detection unit that detects wear of the linear bearing guide, the drive unit includes a first part that moves together with the movable body and a second part that applies a force to the first part, The detection unit detects wear of the linear bearing guide based on vibration caused by a change in a gap between the first component and the second component. A drive device characterized by: (Item 2) the first part and the second part form a rack and pinion; the vibration has a peak at a frequency obtained by dividing an engagement frequency of the rack and pinion by an integer. 2. The drive device according to item 1, (Item 3) The integer is an even number. 3. The drive device according to item 2, (Item 4) the integer is 2 or 4; 3. The drive device according to item 2, (Item 5) the integer is 2; 3. The drive device according to item 2, (Item 6) The meshing frequency is the product of the rotational speed of the pinion gear and the number of teeth of the pinion gear. 6. The drive device according to any one of items 2 to 5, (Item 7) The driving unit is a linear motor having the first component as a movable part and the second component as a stator. 2. The drive device according to item 1, (Item 8) The vibration is vibration due to cogging of the linear motor. 8. The drive device according to item 7, (Item 9) the cogging frequency has a value obtained by dividing the speed of the moving body by the pitch of a magnet constituting a stator of the linear motor; 9. The drive device according to item 8, characterized in that (Item 10) The linear motor is a linear pulse motor. 8. The drive device according to item 7, (Item 11) the vibration has a value obtained by dividing the speed of the moving body by the pitch of comb teeth constituting the stator of the linear motor; 11. The drive arrangement according to item 10, (Item 12) The detection unit is A vibration sensor; a processor that extracts a component of vibration caused by a change in the gap between the first component and the second component from an output of the vibration sensor and detects wear of the linear bearing guide based on the component. 2. The drive device according to item 1, (Item 13) A base supporting the linear bearing guide is further provided. The vibration sensor is fixed to the base. 13. The drive arrangement according to item 12, characterized in that (Item 14) The linear bearing guide includes a rail and a block that moves along the rail. The vibration sensor is fixed to the rail or the block. 14. The drive device according to claim 12 or 13, (Item 15) Item 15. A lithographic apparatus comprising a drive arrangement according to any one of items 1 to 14 and configured to transfer a pattern onto a substrate. (Item 16) A transfer step of transferring a pattern to a substrate using the lithography apparatus according to item 15; a processing step of processing the substrate to obtain an article from the substrate to which the pattern has been transferred in the transfer step; A method for manufacturing an article, comprising: (Item 17) A processor for processing information provided by a drive device, the drive device includes a linear bearing guide, a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a vibration sensor that detects vibrations in the drive device, the drive unit including a first part that moves together with the moving body and a second part that applies a force to the first part, The processor includes a calculation unit that extracts a component of a vibration caused by a change in the gap between the first part and the second part from an output of the vibration sensor and detects wear of the linear bearing guide based on the component. A processor comprising: (Item 18) A program for operating a computer to process a signal provided by a drive device, comprising: the drive device includes a linear bearing guide, a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a vibration sensor that detects vibrations in the drive device, the drive unit including a first part that moves together with the moving body and a second part that applies a force to the first part, The program causes the computer to extract a vibration component caused by a change in the gap between the first part and the second part from an output of the vibration sensor, and to detect wear of the linear bearing guide based on the extracted vibration component. A program characterized by: (Item 19) 1. A method for detecting wear of a linear bearing guide in a drive device having the linear bearing guide, comprising: the drive device includes a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a vibration sensor that detects vibration in the drive device, the drive unit including a first part that moves together with the moving body and a second part that applies a force to the first part, The detection method includes a step of extracting a vibration component caused by a change in the gap between the first part and the second part from an output of the vibration sensor, and detecting wear of the linear bearing guide based on the vibration component. A detection method comprising:

[0038] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted. [Explanation of symbols]

[0039] 2: Linear motion bearing guide, 3: Rail, 4: Block, 5, 14, 23: Moving body, 6: Rack and pinion, 7: Rack gear, 8: Pinion gear, 9: Vibration sensor, 10: Processor, 30: Detection unit, DR: Drive unit, DA: Drive device

Claims

1. A linear bearing guide; a moving body guided by the linear bearing guide; a drive unit that drives the moving body; a detector that detects wear of the linear bearing guide, the driving unit includes a first part that moves together with the moving body and a second part that applies a force to the first part, the detection unit detects wear of the linear bearing guide based on vibrations caused by changes in the gap between the first component and the second component. A drive device characterized by:

2. the first part and the second part constitute a rack and pinion; the vibration has a peak at a frequency obtained by dividing an engagement frequency of the rack and pinion by a positive integer; 2. The drive device according to claim 1.

3. the integer is an even number, 3. The drive device according to claim 2.

4. the integer is 2 or 4; 3. The drive device according to claim 2.

5. the integer is 2; 3. The drive device according to claim 2.

6. The meshing frequency is the product of the rotation speed of the pinion gear and the number of teeth of the pinion gear.

3. The drive device according to claim 2.

7. the driving unit is a linear motor having the first component as a mover and the second component as a stator; 2. The drive device according to claim 1.

8. the vibration is vibration due to cogging of the linear motor; 8. The drive device according to claim 7.

9. the cogging frequency has a value obtained by dividing the speed of the moving body by the pitch of a magnet constituting a stator of the linear motor; 9. The drive device according to claim 8.

10. The linear motor is a linear pulse motor.

8. The drive device according to claim 7.

11. the vibration has a value obtained by dividing the speed of the moving body by the pitch of comb teeth that constitute the stator of the linear motor; 11. The drive device according to claim 10.

12. The detection unit A vibration sensor; a processor that extracts a component of vibration caused by a change in the gap between the first component and the second component from the output of the vibration sensor and detects wear of the linear bearing guide based on the component.

2. The drive device according to claim 1.

13. Further provided is a base for supporting the linear bearing guide, The vibration sensor is fixed to the base.

13. The drive device according to claim 12.

14. The linear bearing guide includes a rail and a block that moves along the rail, The vibration sensor is fixed to the rail or the block.

13. The drive device according to claim 12.

15. A lithographic apparatus configured to transfer a pattern onto a substrate, comprising a drive device according to any one of claims 1 to 14.

16. a transfer step of transferring a pattern onto a substrate using the lithography apparatus of claim 15; a processing step of processing the substrate to which the pattern has been transferred in the transferring step so as to obtain an article from the substrate; A method for manufacturing an article, comprising:

17. a processor for processing information provided by the drive unit, the drive device includes a linear bearing guide, a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a vibration sensor that detects vibrations in the drive device, the drive unit including a first part that moves together with the moving body and a second part that applies force to the first part, the processor includes a calculation unit that extracts a component of vibration caused by a change in the gap between the first component and the second component from the output of the vibration sensor and detects wear of the linear bearing guide based on the component. A processor characterized by:

18. A program for operating a computer to process signals provided by a drive device, comprising: the drive device includes a linear bearing guide, a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a vibration sensor that detects vibrations in the drive device, the drive unit including a first part that moves together with the moving body and a second part that applies force to the first part, the program operates the computer to extract a component of vibration caused by a change in the gap between the first part and the second part from the output of the vibration sensor, and to detect wear of the linear bearing guide based on the component. A program characterized by:

19. 1. A detection method for detecting wear of a linear bearing guide in a drive device having the linear bearing guide, comprising: the drive device includes a moving body guided by the linear bearing guide, a drive unit that drives the moving body, and a vibration sensor that detects vibrations in the drive device, the drive unit including a first part that moves together with the moving body and a second part that applies force to the first part, The detection method includes a step of extracting a vibration component caused by a change in the gap between the first component and the second component from an output of the vibration sensor, and detecting wear of the linear bearing guide based on the extracted component. A detection method characterized by:

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