Sheet attaching device and method for attaching sheet

Abstract

To provide a sheet attaching device and a method for attaching a sheet which can surely attach an adhesive sheet and an adhesion target body to each other.SOLUTION: A sheet attaching device EA is a sheet attaching device EA including pressing means 10 for bringing a pressing member 13 into contact with an adhesive sheet AS and pressing the adhesive sheet AS against an adhesion target body WK and forming an integrated object UP in which the adhesive sheet AS is attached to the adhesion target body WK; and reversion means 20 for reversing the integrated object UP. The pressing means 10 brings the pressing member 13 into contact with the adhesion target body WK for the integrated object UP reversed by the reversion means 20 and pressing the adhesion target body WK against the adhesive sheet AS again.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] 2. Description of the Related Art A sheet application device that forms a unitary object in which an adhesive sheet is applied to an adherend is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2014-183169 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the sheet application device 1 (sheet application device) described in Patent Document 1, a holding member 21 (pressing member) is brought into contact with an adhesive sheet AS (adhesive sheet) to press the adhesive sheet against a wafer WF (adherend). Therefore, depending on, for example, the characteristics, properties, qualities, material, composition, configuration, shape, dimensions, and atmospheric conditions of the adhesive sheet and adherend, the adhesive strength of the adhesive sheet to the adherend may fall below the desired adhesive strength, and reliable adhesion may not be achieved.

[0005] An object of the present invention is to provide a sheet application device and a sheet application method that can reliably bond an adhesive sheet to an adherend. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, not only is a pressing member brought into contact with the adhesive sheet to press the adhesive sheet against the adherend, but a pressing member is also brought into contact with the adherend to press the adherend against the adhesive sheet, thereby ensuring reliable adhesion between the adhesive sheet and the adherend. [Brief description of the drawings]

[0008] [Figure 1] 1A to 1D are explanatory views of a sheet sticking device according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the front direction of Fig. 1(A) parallel to the Y-axis is used as a reference, and when indicating directions, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction toward the front of Fig. 1(A) parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet attachment device EA includes a pressing means 10 that performs a pressing step in which a pressing member 13 is brought into contact with an adhesive sheet AS to press the adhesive sheet AS against an adherend WK to form an integrated object UP in which the adhesive sheet AS is attached to the adherend WK, and an inversion means 20 that performs an inversion step in which the integrated object UP is inverted.

[0011] The pressing means 10 includes a linear motor 11 as a driving device, an upper case 12 that is supported by an output shaft 11A of the linear motor 11 and has a box shape with an open bottom, a pressing member 13 that is made of an elastic material such as rubber or resin and that forms a first sealed space SP1 (see FIG. 1(B)) together with the upper case 12, an electrostatic chuck 14 that is provided inside the pressing member 13 and serves as a sheet holding means that enables electrostatic holding on the lower surface of the pressing member 13, and a sheet conveying means that conveys the sheet to the first sealed space SP1 through a pipe 15A. The apparatus is equipped with a first pressure control means 15 such as a pressurizing / depressurizing pump, vacuum ejector, turbine, or the like capable of pressurizing or depressurizing the pressure within the second sealed space SP2, a lower case 16 that is box-shaped with an open top and can form a second sealed space SP2 (see Figure 1 (B)) together with the upper case 12, a second pressure control means 17 such as a pressurizing / depressurizing pump, vacuum ejector, turbine, or the like capable of pressurizing or depressurizing the pressure within the second sealed space SP2 via piping 17A, and a support table 18 that supports the adherend WK on a support surface 18A. The pressing means 10 is also configured to carry out a re-pressing step in which the pressing member 13 is brought into contact with the adherend WK of the integrated object UP that has been inverted by the inversion means 20, thereby re-pressing the adherend WK against the adhesive sheet AS (see FIG. 1(D)). The first pressure control means 15 and the second pressure control means 17 are capable of controlling the pressure in the first sealed space SP1 and the second sealed space SP2 to a predetermined pressure based on the detection results of a first pressure detection means and a second pressure detection means (not shown), such as a pressure sensor or a load cell, respectively.

[0012] The inversion means 20 is composed of multiple arms and includes a so-called articulated robot 21 as a driving device that can displace what is supported by the tip arm 21A, which is the working part, to any position and any angle within its working range, a transport arm 22 supported by the tip arm 21A and having a holding surface 22A that can be adsorbed and held by a pressure reduction means (holding means) not shown, such as a pressure reduction pump or vacuum ejector, a linear motor 23 as a driving device arranged inside the support table 18, and a lift table 24 supported by the output shaft 23A of the linear motor 23 and supporting the adherend WK on its supporting surface 24A.

[0013] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet sticking apparatus EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation via an operation means such as an operation panel or a personal computer (not shown) to the sheet sticking apparatus EA in which each member is arranged at the initial position shown by the solid line in Fig. 1(A). Next, when the user or the transport means (not shown) brings the adhesive sheet AS into contact with the lower surface of the pressing member 13 as shown in Fig. 1(A), the pressing means 10 drives the electrostatic chuck 14 to start electrostatic holding by the pressing member 13. After that, the reversing means 20 drives the articulated robot 21 and the pressure reducing means (not shown), and places the adherend WK held by suction on the holding surface 22A on the support surfaces 18A and 24A as shown by the two-dot chain line in Fig. 1(A), the driving of the pressure reducing means (not shown) is stopped, and the suction holding on the holding surface 22A is released, and then the articulated robot 21 is driven to return the transport arm 22 to the initial position.

[0014] Next, the pressing means 10 drives the linear motor 11, and as shown in Fig. 1(B), the upper case 12 is lowered to form the second sealed space SP2 with the lower case 16, and then the first and second pressure control means 15 and 17 are driven to reduce the pressure of the sealed spaces SP1 and SP2 while making the first and second sealed spaces SP1 and SP2 have the same pressure based on the detection results of the first and second pressure detection means (not shown). Then, when the first sealed space SP1 and the second sealed space SP2 are reduced in pressure to a predetermined pressure, the pressing means 10 stops driving the first and second pressure control means 15 and 17, and then drives the first pressure control means 15 to increase the pressure of the first sealed space SP1 relative to the pressure of the second sealed space SP2. This causes the pressing member 13 to deform, and as shown by the dashed double-dashed line in FIG. 1(B), the pressing member 13 comes into contact with the adhesive sheet AS, pressing the adhesive sheet AS against the adherend WK, and adhering the adhesive sheet AS to the adherend WK.

[0015] 1(B), when the entire adhesive sheet AS is attached to the adherend WK, the initial pressing between the adhesive sheet AS and the adherend WK in a reduced pressure atmosphere is completed, an integrated object UP in which the adhesive sheet AS is attached to the adherend WK is formed, and the pressing means 10 stops driving the electrostatic chuck 14 and releases the electrostatic holding by the pressing member 13. After that, the pressing means 10 drives the second pressure control means 17, and based on the detection result of the second pressure detection means (not shown), increases the pressure in the second sealed space SP2 until the pressure difference with the first sealed space SP1 disappears, and returns the pressing member 13 to the initial position. Next, the pressing means 10 drives the first and second pressure control means 15 and 17, and based on the detection result of the first and second pressure detection means (not shown), increases the pressure in the first and second sealed spaces SP1 and SP2 to atmospheric pressure while maintaining the pressure difference between the first and second sealed spaces SP1 and SP2.

[0016] Then, when the pressing means 10 drives the linear motor 11 to return the upper case 12 to its initial position, the reversing means 20 drives the linear motor 23 to raise the lift table 24 to separate the integrated object UP from the support surface 18A as shown in Fig. 1(C). Next, the reversing means 20 drives the articulated robot 21 to bring the holding surface 22A into contact with the lower surface of the integrated object UP (the adherend WK) as shown in Fig. 1(C), and then drives the pressure reducing means (not shown) to start suction and holding on the holding surface 22A. Thereafter, the reversing means 20 drives the articulated robot 21 to rotate the tip arm 21A 180 degrees as shown by the two-dot chain line in Fig. 1(C) to turn the integrated object UP upside down, and then place the integrated object UP on the support surface 24A with the adhesive sheet AS facing the lift table 24 side. Next, the inversion means 20 stops driving the pressure reducing means (not shown) and releases the suction and holding on the holding surface 22A, and then drives the articulated robot 21 to return the transfer arm 22 to its initial position.

[0017] Then, the reversing means 20 drives the linear motor 23, and as shown in Fig. 1(D), the lift table 24 is returned to the initial position to support the integrated object UP on the support surface 18A. Next, in the same manner as above, after forming the second sealed space SP2, the pressing member 13 is deformed, and the pressing member 13 is brought into contact with the adherend WK for the inverted integrated object UP to press the adherend WK against the adhesive sheet AS again, completing the re-pressing of the adhesive sheet AS and the adherend WK in a reduced pressure atmosphere. After that, the pressure in the first and second sealed spaces SP1 and SP2 is returned to atmospheric pressure in the same manner as above, and the upper case 12 is returned to the initial position, and the integrated object UP is transported to the next process by a user or a transporting means (not shown), and the same operations as above are repeated thereafter.

[0018] According to the embodiment described above, not only is the adhesive sheet AS pressed against the adherend WK by abutting the pressing member 13 against the adhesive sheet AS, but the pressing member 13 is also pressed against the adherend WK to press the adherend WK against the adhesive sheet AS, so that the adhesive sheet AS and the adherend WK can be reliably bonded to each other.

[0019] As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is mainly illustrated and described with respect to a specific embodiment, but a person skilled in the art can make various modifications to the above-described embodiment in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. In addition, the description of the shape, material, etc. disclosed above, which is limited, is illustratively described to facilitate understanding of the present invention, and does not limit the present invention, so that the description of the names of the members from which some or all of the limitations of the shape, material, etc. are removed is included in the present invention. Furthermore, the means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are not limited at all to the components and steps of a mere embodiment shown in the above embodiment. For example, the reversing means may be anything that can reverse an integrated object, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0020] The sheet attachment device EA may be configured to include a pressing means 10 that performs a pressing step of pressing the adherend WK against the adhesive sheet AS by bringing the pressing member 13 into contact with the adherend WK to form an integrated object UP in which the adherend WK is attached to the adhesive sheet AS, and an inversion means 20 that performs an inversion step of inverting the integrated object UP, and the pressing means 10 performs a re-pressing step of bringing the pressing member 13 into contact with the adhesive sheet AS of the integrated object UP inverted by the inversion means 20 to re-press the adhesive sheet AS against the adherend WK. In this case, the adherend WK may be held by the lower surface of the pressing member 13, and the adhesive sheet AS may be supported on the support surfaces 18A and 24A, and the same operations as in the above embodiment may be performed.

[0021] The pressing means 10 may be provided with an annular member between the upper case 12 and the pressing member 13 to support the outer edge of the pressing member 13, the pressing member 13 may have any shape such as a polygon having more than one side, a circle, an ellipse, etc., the pressure in the second sealed space SP2 relative to the pressure in the first sealed space SP1 may be gradually reduced to press the adhesive sheet AS and the adherend WK together to form an integrated object UP, or the adhesive sheet AS and the adherend WK may be pressed again, or after the initial pressing or re-pressing of the adhesive sheet AS and the adherend WK in a reduced pressure atmosphere, the second sealed space Alternatively, the pressure in the first sealed space SP1 may be reduced until the pressure in the first sealed space SP2 is equal to the pressure in the first sealed space SP2, and the pressing member 13 may be returned to the initial position, or the initial pressing and re-pressing of the adhesive sheet AS and the adherend WK may be performed in a pressurized atmosphere or in an atmospheric pressure atmosphere, or the initial pressing of the adhesive sheet AS and the adherend WK may be performed in a reduced pressure atmosphere, a pressurized atmosphere, or an atmospheric pressure atmosphere, and the re-pressing may be performed in a reduced pressure atmosphere, a pressurized atmosphere, or an atmospheric pressure atmosphere, or the support table 18 may be raised by a driving device, and the adhesive sheet AS and the adherend WK may be pressed together to form a The lower part of the upper case 12 and the upper part of the lower case 16 may not be open, the first sealed space SP1 and the second sealed space SP2 may not be formed, the integral object UP may not be formed by the pressure difference between the first sealed space SP1 and the second sealed space SP2, the upper case 12 and the lower case 16 may not be provided, the first pressure detection means and the second pressure detection means (not shown) may not be provided, a pressure roller or a pressure plate may be used as the pressing member, or a means for blowing air or gas may be used, and the pressing member may not deform. A pressing member may be employed, or the support table 18 may be provided with a holding device that adsorbs and holds or electrostatically holds an object placed on the support surface 18A, or a strip-shaped adhesive sheet may be placed at a distance from both the pressing member 13 and the adherend WK placed on the support surface 18A, and the pressing member 13 may be brought into contact with the adhesive sheet AS to press the adhesive sheet AS and the adherend WK to form an integrated object UP, or the adherend WK may be placed at a distance from both the pressing member 13 and the adhesive sheet AS placed on the support surface 18A,The pressing member 13 may be brought into contact with the adherend WK to press the adherend WK and the adhesive sheet AS together to form an integrated object UP, or a heating means such as a coil heater or the heating side of a heat pipe for heating at least one of the adhesive sheet AS and the adherend WK may be provided.

[0022] The inversion means 20 may be used in place of or in combination with the linear motor 23 and the lift table 24, and may adopt a receiving means such as a chuck cylinder or a suction table that holds the one-piece UP, and the one-piece UP that the articulated robot 21 has held and transported while holding one side thereof is received by the receiving means, and the articulated robot 21 holds the other side of the one-piece UP and places the held one-piece UP on the support surface 18A, thereby inverting the one-piece UP; alternatively, the inversion means may be used in place of or in combination with the linear motor 23 and the lift table 24, and may adopt an inversion means that is a driving device that rotates the receiving means 180 degrees, and the one-piece UP that the articulated robot 21 has held and transported while holding one side thereof is received by the receiving means, and after the inversion means rotates the receiving means 180 degrees, the articulated robot 21 again ... 6, or a plurality of lift tables 24 may be provided, or a lift pin may be provided in place of or in combination with the lift table 24 to support the integrated object UP at its tip, the transport arm 22 may be linear or have a multi-pronged shape such as a bifurcated or trifurcated shape so as to be able to enter between the plurality of lift tables 24 or lift pins, the lift table 24 may be provided with a holding device that adsorbs and holds or electrostatically holds an object placed on the support surface 24A, after the initial pressing of the adhesive sheet AS and the adherend WK, the holding surface 22A may be abutted against the adhesive sheet AS side to hold and invert the integrated object UP, or the inverted integrated object UP may be held by the underside of the pressing member 13, or after re-pressing of the adhesive sheet AS and the adherend WK, the holding surface 22A may be abutted against the adherend WK side or the adhesive sheet AS side to hold the integrated object UP, and the integrated object UP may be transported to the next process.

[0023] The material, type, shape, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be circular, elliptical, polygonal such as a triangle or a rectangle, or other shapes, and the adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive forms. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS. In addition, such an adhesive sheet AS may be, for example, a single layer of only an adhesive layer, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer, or a cover layer is provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed of two or more of these, and may be any type of member or article, etc. The adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer-forming resin sheet, etc.

[0024] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0025] In the above embodiment, there is a certain object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A. In other words, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a pressing means or pressing member such as a pressing roller or a pressing head that presses an object to be pressed is used, it may be used instead of or in combination with the above examples. In addition to rollers, round bars, blade materials, and brush-like members, those that use a gas such as air or gas may be used, and the pressing member may be made of a deformable member such as rubber, resin, sponge, or the like, or may be made of an indeformable member such as metal or glass. When a supporting (holding) means or a supporting (holding) member that supports (holds) the supported member (held member) is used, a configuration in which the supported member is supported (held) may be used, using a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. [Explanation of symbols]

[0026] EA…Sheet attachment device 10...Pressing means 13...Pressing member 20...Reversal method AS…adhesive sheet WK...Adherend UP... one piece

Claims

1. 1. A sheet sticking device comprising a pressing means for pressing an adhesive sheet against an adherend by bringing a pressing member into contact with the adhesive sheet, thereby forming an integrated body in which the adhesive sheet is stuck to the adherend, a reversing means for reversing the integrated body, The pressing means is configured to press the adherend against the adhesive sheet again by bringing the pressing member into contact with the adherend of the integrated object inverted by the inverting means.

2. 1. A sheet sticking device comprising a pressing means for pressing an adherend against an adhesive sheet by bringing a pressing member into contact with the adherend, thereby forming an integrated product in which the adherend is stuck to the adhesive sheet, a reversing means for reversing the integrated body, The pressing means is characterized in that the pressing member is brought into contact with the adhesive sheet of the integrated body that has been inverted by the inverting means, thereby pressing the adhesive sheet against the adherend again.

3. 1. A sheet attachment method comprising a pressing step of contacting a pressing member with an adhesive sheet to press the adhesive sheet against an adherend to form an integrated article in which the adhesive sheet is attached to the adherend, an inversion step of inverting the integrated body; a re-pressing step of contacting the pressure member with the adherend to re-press the adherend against the adhesive sheet, the integrated body being inverted in the inversion step.

4. 1. A sheet attachment method comprising a pressing step of contacting a pressing member with an adherend to press the adherend against an adhesive sheet to form an integrated product in which the adherend is attached to the adhesive sheet, an inversion step of inverting the integrated body; a re-pressing step of contacting the adhesive sheet with the pressing member and re-pressing the adhesive sheet against the adherend, the integrated body being inverted in the inversion step, said sheet applying method comprising the steps of:

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