Electrostatic chuck

Abstract

To provide an electrostatic chuck with an excellent removal responsivity.SOLUTION: An electrostatic chuck 10 includes: a dielectric substrate 100 having a surface 110 on which a substrate W is placed; an adsorption electrode 130 stored in the dielectric substrate 100; and a seal ring 111 as a ring-shaped protrusion formed in the dielectric substrate 100, the top end surface of the seal ring being a part of the surface 110. The seal ring 111 has a first part P1 and a second part P2 formed in a different position from the position in which the first part P1 is formed when the seal ring is viewed from a direction perpendicular to the surface 110. The ratio of the region which overlaps with the adsorption electrode 130 of the first part P1 is smaller than the ratio of the region which overlaps with the adsorption electrode 130 of the second part P2.SELECTED DRAWING: Figure 4

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