Sample holder and charged particle wire apparatus

Abstract

To provide a sample holder that allows for easily detaching and attaching a sample.SOLUTION: A sample holder 100 is a sample holder for a charged particle wire apparatus, comprises: a holder base 110 having a sample support part 12 that supports a sample; a sample pressing member 120 that presses the sample arranged in the sample support part 12; a shaft member 130 that rotatably fixes the sample pressing member 120 to the holder base 110; and at least one of elastic members 140 and 150 that applies a force in a first direction in order to press the sample against the sample pressing member 120. By rotating the sample pressing member 120, a state where the sample is pressed by the sample pressing member 120 and a state where the sample supporting part 12 is open can be switched. The sample pressing member 120 includes a shaft bearing hole through which the shaft member 130 passes, and in the state where the sample is pressed by the sample pressing member 120, the shaft member 130 can be moved in the shaft bearing hole in a first direction.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sample holder and a charged particle beam device. [Background technology]

[0002] In a transmission electron microscope, a sample is supported by a sample holder. For example, Patent Document 1 discloses a sample holder that includes a holder base on which a pedestal for placing a sample is formed, a sample pressing ring, and two rod-shaped springs that press the sample pressing ring to press the sample against the pedestal. In the sample holder disclosed in Patent Document 1, the sample is placed on the pedestal, the sample pressing ring is placed on the sample placed on the pedestal, and the two rod-shaped springs press the sample pressing ring to fix the sample to the sample holder. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Utility Model Application Publication No. 6-60050 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the sample holder disclosed in Patent Document 1, when a sample is attached to the sample holder, a sample pressing ring must be placed on the sample using an instrument such as tweezers. In addition, in the sample holder disclosed in Patent Document 1, when a sample is removed from the sample holder, a sample pressing ring placed on the sample must be removed from above the sample using an instrument such as tweezers. In this way, in the sample holder disclosed in Patent Document 1, a sample pressing ring must be placed on the sample and removed from above the sample using an instrument such as tweezers, which may damage the sample. [Means for solving the problem]

[0005] One aspect of the sample holder according to the present invention is A sample holder for a charged particle beam device, comprising: a holder base having a sample support portion for supporting a sample; a sample pressing member that presses the sample and is disposed on the sample support; a shaft member for rotatably fixing the sample holding member to the holder base; at least one elastic member that applies a force in a first direction to the sample pressing member to press the sample; Including, By rotating the sample pressing member, it is possible to switch between a state in which the sample pressing member presses the sample and a state in which the sample support portion is released, the sample pressing member has a bearing hole through which the shaft member passes, In a state in which the sample is pressed by the sample pressing member, the shaft member is movable in the first direction within the bearing hole.

[0006] In such a sample holder, the sample pressing member can be rotated to switch between a state in which the sample is pressed by the sample pressing member and a state in which the sample support portion is released, so that the sample pressing member can be placed on the sample or removed from the sample without using tools such as tweezers. Therefore, in such a sample holder, the possibility of damaging the sample can be reduced and the sample can be easily attached and detached.

[0007] One aspect of the charged particle beam device according to the present invention is to The sample holder is as described above. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic perspective view of a sample holder according to a first embodiment. [Diagram 2] FIG. 1 is a schematic perspective view of a sample holder according to a first embodiment. [Diagram 3] FIG. 4 is a perspective view illustrating a holder base. [Figure 4] FIG. 4 is a perspective view showing a sample holding member; [Diagram 5] FIG. 3 is a cross-sectional view showing a sample pressing member. [Figure 6] FIG. 4 is a perspective view illustrating a first elastic member. [Figure 7] FIG. 4 is a perspective view illustrating a second elastic member. [Figure 8] FIG. 2 is a cross-sectional view showing a schematic view of the sample holder according to the first embodiment. [Figure 9] FIG. 11 is a perspective view showing a sample holder according to a second embodiment. [Figure 10] FIG. 11 is a perspective view showing a sample holder according to a second embodiment. [Figure 11] FIG. 11 is a diagram showing a schematic view of a tip portion of a sample holder according to a second embodiment. [Figure 12] FIG. 11 is a perspective view showing a sample holder according to a third embodiment. [Figure 13] FIG. 11 is a perspective view showing a sample holder according to a third embodiment. [Figure 14] FIG. 13 is a perspective view showing a sample holder according to a fourth embodiment. [Figure 15] FIG. 13 is a perspective view showing a sample holder according to a fourth embodiment. [Figure 16] FIG. 13 is a perspective view showing a sample holder according to a fifth embodiment. [Figure 17] FIG. 13 is a perspective view showing a sample holder according to a fifth embodiment. [Figure 18] FIG. 4 is a perspective view illustrating a second elastic member. [Figure 19] FIG. 13 is a perspective view showing a sample holder according to a sixth embodiment. [Figure 20] FIG. 13 is a perspective view showing a sample holder according to a sixth embodiment. [Figure 21] FIG. 13 is a diagram showing the configuration of a transmission electron microscope according to a seventh embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are necessarily essential components of the present invention.

[0010] 1. First embodiment 1.1. Sample holder First, the sample holder according to the first embodiment will be described with reference to the drawings. Figures 1 and 2 are schematic perspective views of a sample holder 100 according to the first embodiment.

[0011] 1 and 2 show an X-axis, a Y-axis, and a Z-axis as three mutually orthogonal axes. The X-direction includes a +X direction that is one direction along the X-axis, and a -X direction that is the other direction along the X-axis. The Y-direction includes a +Y direction that is one direction along the Y-axis, and a -Y direction that is the other direction along the Y-axis. The Z-direction includes a +Z direction that is one direction along the Z-axis, and a -Z direction that is the other direction along the Z-axis.

[0012] The sample holder 100 is a sample holder for a transmission electron microscope. In a transmission electron microscope, an electron beam is irradiated onto the sample held by the sample holder 100, and the electrons that have passed through the sample are detected to obtain an image. A sample for a transmission electron microscope is thinned to a thickness that allows the electron beam to pass through it, and is attached to a grid, which is, for example, a ring-shaped metal plate with a diameter of about 3 mm.

[0013] 1 and 2, the sample holder 100 includes a holder base 110, a sample pressing member 120, an axis member 130, a first elastic member 140, a second elastic member 150, and a pin 160. Fig. 1 illustrates the sample pressing member 120 in an upright position, and Fig. 2 illustrates the sample pressing member 120 in a laid-down position.

[0014] 3 is a perspective view showing a schematic view of the holder base 110. The holder base 110 is a plate-like member having a thickness in the Z direction. Although not shown, the sample holder 100 includes a shaft having a length capable of introducing a sample into a sample chamber in a transmission electron microscope, and the holder base 110 is connected to the shaft.

[0015] The holder base 110 is equipped with a sample support portion 12 that supports a sample. A recess 14 having a depth in the Z direction is formed in the sample support portion 12. The recess 14 has a depth and diameter that can accommodate a sample. A groove 15 connected to the recess 14 is formed in the sample support portion 12. The bottom surface of the groove 15 is deeper than the bottom surface of the recess 14. By inserting a tool for grasping the sample, such as tweezers, into the groove 15, the sample placed in the recess 14 can be easily grasped. A through hole 16 is formed in the bottom surface of the recess 14. The through hole 16 is a hole for passing an electron beam.

[0016] An opening 18 is formed in the holder base 110, and the sample support part 12 is provided within the opening 18. The thickness of the sample support part 12 is smaller than the thickness of a portion of the holder base 110 surrounding the opening 18. The opening 18 has a first space 18a located on the -X direction side of the sample support part 12, a second space 18b located on the +X direction side of the sample support part 12, and a third space 18c above the sample support part 12.

[0017] FIG. 4 is a perspective view showing the sample pressing member 120. FIG. 5 is a cross-sectional view showing the sample pressing member 120. The sample pressing member 120 presses the sample placed in the recess 14 of the sample support section 12. The sample pressing member 120 is a rigid part, not made of a leaf spring, a rod-shaped elastic body, rubber, or the like. The sample pressing member 120 is made by processing a metal material, such as stainless steel, copper, or aluminum. A force for pressing the sample is applied to the sample pressing member 120 by a first elastic member 140 and a second elastic member 150.

[0018] The sample pressing member 120 has a base portion 21a, a tip portion 21b, and a pressing portion 21c between the base portion 21a and the tip portion 21b. The thickness of the pressing portion 21c is smaller than the thickness of the base portion 21a and is smaller than the thickness of the tip portion 21b. A screw hole 28a for fixing the first elastic member 140 is formed in the base portion 21a. A screw hole 28b for fixing the second elastic member 150 is formed in the tip portion 21b.

[0019] The sample holding member 120 has a bearing hole 22. The bearing hole 22 is provided in the base 21a of the sample holding member 120. An axis member 130 for rotatably fixing the sample holding member 120 to the holder base 110 is inserted into the bearing hole 22. The axis member 130 is inserted into the bearing hole 22 in the Y direction. That is, the axis member 130 is arranged in the Y direction perpendicular to the -Z direction, which is the direction of the force for holding the sample. Therefore, the rotation axis of the sample holding member 120 is an axis parallel to the Y axis.

[0020] By rotating the sample pressing member 120 around the shaft member 130 as a rotation axis, the sample pressing member 120 can be tilted as shown in Fig. 2, or raised as shown in Fig. 1. In the sample holder 100, by tilting the sample pressing member 120, the sample can be pressed by the sample pressing member 120, and by raising the sample pressing member 120, the sample support section 12 can be released. That is, in the sample holder 100, by rotating the sample pressing member 120, it is possible to switch between a state in which the sample pressing member 120 presses the sample and a state in which the sample support section 12 is released.

[0021] As shown in Fig. 2, when the sample holding member 120 is in the laid-down state, the upper surface 2a of the holder base 110 and the upper surface 4a of the sample holding member 120 are parallel to each other. When the sample holding member 120 is in the raised state, the upper surfaces 2a and 4a form a predetermined angle. When the sample holding member 120 is in the laid-down state shown in Fig. 2, the upper surfaces 2a and 4a face the +Z direction.

[0022] When the sample holding member 120 is in the laid-down state, the base 21a of the sample holding member 120 is disposed in the first space 18a, the tip 21b is disposed in the second space 18b, and the holding portion 21c is disposed in the third space 18c. Thus, when the sample holding member 120 is in the laid-down state, the opening 18 of the holder base 110 is blocked by the sample holding member 120.

[0023] The bearing hole 22 provided in the sample holding member 120 is an elongated hole as shown in Fig. 5. When the sample holding member 120 is in a tilted state, the bearing hole 22 is an elongated hole that is long in the Z direction. That is, the length Lz of the bearing hole 22 in the Z direction is greater than the length Lx of the bearing hole 22 in the X direction. Therefore, when the sample holding member 120 is in a tilted state, the shaft member 130 can move in the Z direction inside the bearing hole 22. Therefore, when the sample holding member 120 is in a tilted state, the sample holding member 120 can move in the Z direction while keeping the upper surface 2a and the upper surface 4a parallel to each other.

[0024] The sample holding member 120 has a protrusion 24. When the sample holding member 120 is laid down, the protrusion 24 fits into the recess 14. This allows the sample placed in the recess 14 to be held down by the protrusion 24. The height of the protrusion 24 is equal to the depth of the recess 14, for example. The height of the protrusion 24 may be greater than the depth of the recess 14. A through hole 26 is formed in the protrusion 24 to allow the electron beam to pass through. The upper surface of the protrusion 24 is annular and surrounds the through hole 26. When the sample holding member 120 is laid down, the through hole 26 and the through hole 16 overlap.

[0025] 3, the shaft member 130 is inserted into a fixing hole 19 formed in the holder base 110. The shaft member 130 is fixed to the holder base 110 by, for example, caulking, welding, or adhesive. The shaft member 130 functions as a rotation shaft of the sample holder member 120.

[0026] FIG. 6 is a perspective view showing a schematic diagram of the first elastic member 140. The first elastic member 140 is a leaf spring fixed to the base 21a of the sample pressing member 120. The first elastic member 140 has a fixed part 40 fixed to the holder base 110 and a tip part 42 which is a free end connected to the fixed part 40. The fixed part 40 is fixed by screwing a screw 102a into a screw hole 28a formed in the base 21a of the sample pressing member 120. Note that the method of fixing the first elastic member 140 to the sample pressing member 120 is not limited to screwing, and the first elastic member 140 may be fixed to the sample pressing member 120 by, for example, welding, adhesion, or the like.

[0027] FIG. 7 is a perspective view showing the second elastic member 150. The second elastic member 150 is a leaf spring fixed to the tip 21b of the sample pressing member 120. The second elastic member 150 has a fixed part 50 fixed to the holder base 110 and a tip 52 which is a free end connected to the fixed part 50. The fixed part 50 is fixed by screwing a screw 102b into a screw hole 28b formed in the tip 21b of the sample pressing member 120. Note that the method of fixing the second elastic member 150 to the sample pressing member 120 is not limited to screwing, and the second elastic member 150 may be fixed to the sample pressing member 120 by, for example, welding, adhesion, or the like.

[0028] The holder base 110 is provided with a pin 160. The tip portion 52 of the second elastic member 150 is provided with a hole 54 into which the pin 160 fits. A groove 56 connected to the hole 54 is formed in the second elastic member 150, and the pin 160 fits into the hole 54 through the groove 56. A knob 58 serving as a handle for the second elastic member 150 is formed in the tip 52 of the second elastic member 150. In the state in which the sample pressing member 120 is laid down as shown in FIG. 2, the tip 52 has a portion extending in the +X direction from the fixed portion 50 and a portion extending in the -Z direction connected to the portion extending in the +X direction. The hole 54, the groove 56, and the knob 58 are formed in the portion of the tip 52 extending in the -Z direction.

[0029] Fig. 8 is a cross-sectional view showing a schematic view of the sample holder 100. Fig. 8 shows a state in which the sample pressing member 120 is laid down.

[0030] With the sample pressing member 120 in the tilted state, the first elastic member 140 applies a force to one end of the sample pressing member 120 to press the sample. By tilting the sample pressing member 120, the tip 42 of the first elastic member 140 is pressed against the lower surface 2b of the holder base 110 and elastically deforms, applying a force in the -Z direction to the base 21a. By raising the sample pressing member 120, the tip 42 of the first elastic member 140 moves away from the lower surface 2b of the holder base 110 and does not apply a force to the sample pressing member 120.

[0031] With the sample pressing member 120 in the tilted state, the second elastic member 150 applies a force for pressing the sample to the other end of the sample pressing member 120. By tilting the sample pressing member 120 and fitting the pin 160 into the hole 54, the tip 52 of the second elastic member 150 is curved and elastically deformed, applying a force in the -Z direction to the tip 21b. By removing the pin 160 from the hole 54, the tip 52 of the second elastic member 150 is released from the curved state and does not apply a force to the sample pressing member 120.

[0032] 1.2. Attaching and detaching the sample 1.2.1. Mounting the sample First, the sample pressing member 120 is rotated about the shaft member 130 as a rotation axis to raise the sample pressing member 120 as shown in Fig. 1. This releases the sample support portion 12. Next, the sample is placed in the recess 14 of the sample support portion 12 using a tool for grasping the sample, such as tweezers.

[0033] Next, the sample holding member 120 is rotated about the shaft member 130 as a rotation axis to lay the sample holding member 120 down as shown in Fig. 2, and the pin 160 is hooked into the hole 54 of the second elastic member 150. This fixes the sample holding member 120 to the holder base 110.

[0034] At this time, as shown in Fig. 8, the tip 42 of the first elastic member 140 is pressed against the lower surface 2b of the holder base 110 and elastically deforms, applying a force in the -Z direction to the base 21a of the sample pressing member 120. Also, by hooking the pin 160 into the hole 54 of the second elastic member 150, the tip 52 of the second elastic member 150 is curved and elastically deformed, applying a force in the -Z direction to the tip 21b of the sample pressing member 120. As a result, a force in the -Z direction is applied to both ends of the sample pressing member 120, and the convex portion 24 of the sample pressing member 120 can press the sample placed in the concave portion 14 of the sample support portion 12. Therefore, the sample can be fixed to the sample support portion 12.

[0035] Here, as shown in FIG. 5, when the sample holding member 120 is in the laid-down state, the bearing hole 22 of the sample holding member 120 is an oblong hole that is long in the Z direction. Therefore, the sample holding member 120 can move in the Z direction while maintaining the parallel state of the top surface 2a and the top surface 4a. Therefore, when a force in the -Z direction is applied to both ends of the sample holding member 120 by the first elastic member 140 and the second elastic member 150, the sample holding member 120 can maintain the parallel state of the top surface 2a and the top surface 4a without tilting. This allows the convex portion 24 of the sample holding member 120 to be moved in the Z direction. The surface of the sample can be brought into contact with the sample, which reduces damage to the sample. Furthermore, the gap between the sample pressing member 120 and the holder base 110 changes depending on the thickness of the sample, so that the surface of the protrusion 24 can be brought into contact with samples of various thicknesses.

[0036] Through the above steps, the sample can be mounted on the sample holder 100.

[0037] 1.2.2. Removal of the sample First, the pin 160 is removed from the hole 54 of the second elastic member 150 by pinching the pin 160 and the knob 58 of the second elastic member 150 with tweezers or the like. This releases the tip 52 of the second elastic member 150 from its curved state. Also, the first elastic member 140 moves away from the holder base 110. Therefore, the first elastic member 140 and the second elastic member 150 do not apply force to the sample pressing member 120 to press the sample.

[0038] 1, the sample pressing member 120 is raised to release the sample support portion 12. Next, a tool for grasping a sample, such as tweezers, is inserted into the groove 15 of the sample support portion 12 to grasp the sample placed in the recess 14. This makes it possible to remove the sample from the recess 14.

[0039] Through the above steps, the sample can be removed from the sample holder 100.

[0040] Effects The sample holder 100 includes a holder base 110 having a sample support section 12 that supports a sample, a sample pressing member 120 that presses down a sample placed on the sample support section 12, an axis member 130 that rotatably fixes the sample pressing member 120 to the holder base 110, and a first elastic member 140 and a second elastic member 150 that apply a force in the -Z direction to the sample pressing member 120 to press down the sample. In the sample holder 100, the sample pressing member 120 can be switched between a state in which the sample pressing member 120 presses down the sample and a state in which the sample support section 12 is released, by rotating the sample pressing member 120. In the sample holder 100, the sample pressing member 120 has a bearing hole 22 through which the axis member 130 passes, and when the sample pressing member 120 presses down the sample, the axis member 130 can move in the Z direction within the bearing hole 22.

[0041] In the sample holder 100, by rotating the sample holding member 120, it is possible to switch between a state in which the sample is held down by the sample holding member 120 and a state in which the sample support portion 12 is released, thereby reducing the possibility of damaging the sample and making it easy to attach and detach the sample.

[0042] For example, when holding a sample with a sample holding ring, a small sample holding ring with a diameter of about 3 mm must be placed on the sample or removed from the sample using an instrument such as tweezers, which may damage the sample. In contrast, the sample holder 100 can switch between a state in which the sample is held by the sample holding member 120 and a state in which the sample support section 12 is released by rotating the sample holding member 120. Therefore, the sample holder 100 can place the sample holding member 120 on the sample or remove it from the sample without using an instrument such as tweezers. Therefore, the sample holder 100 can reduce the possibility of damaging the sample and can easily attach and detach the sample.

[0043] In the sample holder 100, when the sample pressing member 120 is pressing the sample, the shaft member 130 can move in the Z direction within the bearing hole 22, so that when a force in the -Z direction is applied to the sample pressing member 120 by the first elastic member 140 and the second elastic member 150, the sample pressing member 120 can move in the Z direction in a horizontal state without tilting. Therefore, in the sample holder 100, the sample pressing member 120 can be brought into surface contact with the sample, reducing damage to the sample.

[0044] In the sample holder 100, when the sample pressing member 120 presses the sample, the bearing hole 22 is an elongated hole that is long in the Z direction. Therefore, in the sample holder 100, when a force in the -Z direction is applied to both ends of the sample pressing member 120, the sample pressing member 120 can move in the Z direction while keeping the upper surface 2a and the upper surface 4a parallel to each other. Therefore, the sample holder 100 can fix samples of various thicknesses without damaging them. For example, if the shaft member 130 cannot move in the bearing hole 22, the sample pressing member 120 will press the sample in a tilted state with respect to the sample surface depending on the thickness of the sample. Therefore, the corners of the convex parts 24 of the sample pressing member 120 may come into contact with the sample, possibly damaging the sample.

[0045] The sample holder 100 includes a first elastic member 140 that applies a force for pressing the sample to one end of the sample pressing member 120, and a second elastic member 150 that applies a force for pressing the sample to the other end of the sample pressing member 120. Therefore, in the sample holder 100, a force for pressing the sample can be applied to both ends of the sample pressing member 120. Therefore, in the sample holder 100, the sample pressing member 120 can press the sample over a surface.

[0046] In the sample holder 100, the first elastic member 140 is a leaf spring fixed to one end of the sample pressing member 120. In addition, in the sample holder 100, when the sample pressing member 120 presses the sample, the first elastic member 140 is pressed against the holder base 110 and elastically deforms, applying a force in the -Z direction to the sample pressing member 120. In this way, in the sample holder 100, the first elastic member 140 can easily apply a force for pressing the sample to the sample pressing member 120.

[0047] In the sample holder 100, the second elastic member 150 is a leaf spring fixed to the other end of the sample pressing member 120. In addition, a pin 160 is provided on the holder base 110, and a hole 54 into which the pin 160 fits is provided on the second elastic member 150. By fitting the pin 160 into the hole 54, the second elastic member 150 is elastically deformed, and the second elastic member 150 applies a force in the -Z direction to the sample pressing member 120. In this way, in the sample holder 100, the second elastic member 150 can easily apply a force for pressing the sample to the sample pressing member 120.

[0048] In the sample holder 100, the shaft member 130 is disposed along the Y direction perpendicular to the -Z direction, which is the direction of the force for pressing the sample with the sample pressing member 120. Therefore, in the sample holder 100, it is possible to switch between a state in which the sample is pressed by the sample pressing member 120 and a state in which the sample support section 12 is released, by tilting or raising the sample pressing member 120.

[0049] In the sample holder 100, the sample support section 12 has a recess 14 in which the sample is placed, and the sample pressing member 120 has a protrusion 24 that fits into the recess 14. Therefore, in the sample holder 100, the sample can be reliably fixed to the sample support section 12. Furthermore, in the sample holder 100, the protrusion 24 fits into the recess 14 by rotating the sample pressing member 120 about the shaft member 130 as the rotation axis, so that the sample can be easily fixed to the sample support section 12.

[0050] In the sample holder 100, a through hole 16 serving as a first through hole for passing an electron beam is provided in the bottom surface of the recess 14, and a through hole 26 serving as a second through hole for passing an electron beam is provided in the protrusion 24. Therefore, the sample holder 100 can be used as a sample holder for a transmission electron microscope.

[0051] 2. Second embodiment 2.1. Sample holder Next, a sample holder according to a second embodiment will be described with reference to the drawings. 9 and 10 are perspective views showing a sample holder 200 according to the second embodiment. FIG. 9 shows the sample pressing member 120 in an upright position, and FIG. 10 shows the sample pressing member 120 in a laid-down position. FIG. 11 is a diagram showing a tip of the sample holder 200 according to the second embodiment. In the sample holder 200 according to the second embodiment, members having the same functions as those of the sample holder 100 according to the first embodiment are denoted by the same reference numerals below, and detailed description thereof will be omitted.

[0052] In the sample holder 200, the configuration for fixing the sample pressing member 120 to the holder base 110 is different from that of the above-mentioned sample holder 100.

[0053] A first protrusion 210 protruding in the +X direction and a second protrusion 212 protruding in the +X direction are formed at the tip of the holder base 110. The first protrusion 210 has an inclined surface 211a inclined with respect to the upper surface 2a of the holder base 110. The angle of the corner where the upper surface 2a and the inclined surface 211a are connected is an acute angle. The second protrusion 212 has an inclined surface 213a inclined with respect to the upper surface 2a of the holder base 110. The angle of the corner where the upper surface 2a and the inclined surface 213a are connected is equal to, for example, the angle of the corner where the upper surface 2a and the inclined surface 211a are connected. The inclined surface 211a and the inclined surface 213a are formed on the side surface facing inward of the holder base 110.

[0054] A second elastic member 150 is fixed to the tip 21b of the sample pressing member 120. The second elastic member 150 is a leaf spring formed by bending a metal plate. The second elastic member 150 includes a fixing portion 50 fixed to the sample pressing member 120, a first bent portion 252 which is a free end connected to the end of the fixing portion 50 in the -Y direction, and a second bent portion 254 which is a free end connected to the end of the fixing portion 50 in the +Y direction. The fixing portion 50 is fixed to the sample pressing member 120 by, for example, screwing, welding, or bonding.

[0055] The first bent portion 252 and the second bent portion 254 are bent from the fixed portion 50. The angle formed between the first bent portion 252 and the fixed portion 50 is an obtuse angle. The angle formed between the second bent portion 254 and the fixed portion 50 is, for example, equal to the angle formed between the first bent portion 252 and the fixed portion 50. The tip of the first bent portion 252 and the tip of the second bent portion 254 are bent inward.

[0056] When the sample pressing member 120 is in the tilted state, the first bent portion 252 is pressed against the inclined surface 211a and elastically deforms so that the bending angle of the first bent portion 252 becomes larger. When the sample pressing member 120 is in the tilted state, the second bent portion 254 is pressed against the inclined surface 213a and elastically deforms so that the bending angle of the second bent portion 254 becomes larger. The direction of the resultant force of the force generated by the elastic deformation of the first elastic member 140 and the force generated by the elastic deformation of the second elastic member 150 is the -Z direction. Therefore, the second elastic member 150 can apply a force in the -Z direction to the tip portion 21b of the sample pressing member 120.

[0057] Furthermore, since the second elastic member 150 is caught between the first protruding portion 210 and the second protruding portion 212 , the sample pressing member 120 can be fixed to the holder base 110 .

[0058] A tip 216 of the first protrusion 210 is thinner than the other parts of the first protrusion 210. A tip 218 of the second protrusion 212 is thinner than the other parts of the second protrusion 212. A knob 220 is provided at the tip of the sample holding member 120. When the sample is held down by the sample holding member 120, the knob 220 is located below the tip 216 of the first protrusion 210 and the tip 218 of the second protrusion 212, i.e., in the -Z direction.

[0059] 2.2. Attaching and detaching the sample 2.2.1. Mounting the sample 9, the sample pressing member 120 is raised to release the sample support portion 12. Next, the sample is placed in the recess 14 of the sample support portion 12 using a tool for grasping the sample, such as tweezers.

[0060] Next, as shown in FIG. 10, the sample pressing member 120 is tilted, and the second elastic member 150 is pressed between the first protruding portion 210 and the second protruding portion 212. As a result, as shown in FIG. 11, the first bent portion 252 of the second elastic member 150 is pressed against the inclined surface 211a, and the second bent portion 254 is pressed against the inclined surface 213a. As a result, the direction of the resultant force of the force generated by the elastic deformation of the first bent portion 252 and the force generated by the elastic deformation of the second bent portion 254 becomes the -Z direction, and a force in the -Z direction can be applied to the tip portion 21b of the sample pressing member 120. In addition, the tip portion 42 of the first elastic member 140 is pressed against the lower surface 2b of the holder base 110 and elastically deforms, applying a force in the -Z direction to the base portion 21a of the sample pressing member 120. This allows a force in the −Z direction to be applied to both ends of the sample pressing member 120, making it possible for the sample pressing member 120 to press the sample.

[0061] Moreover, by pushing the second elastic member 150 between the first protruding portion 210 and the second protruding portion 212, the second elastic member 150 is caught between the first protruding portion 210 and the second protruding portion 212, and the sample pressing member 120 can be fixed to the holder base 110. Here, when the sample pressing member 120 is in the fallen state, the bearing hole 22 of the sample pressing member 120 is an oblong hole that is long in the Z direction. Therefore, the gap between the sample pressing member 120 and the holder base 110 changes depending on the thickness of the sample, and the convex portion 24 can be brought into surface contact with samples of various thicknesses.

[0062] Through the above steps, the sample can be mounted on the sample holder 200.

[0063] 2.2.2. Removal of the sample First, in a state where the sample pressing member 120 shown in FIG. 10 is laid down and fixed to the holder base 110, the knob 220 of the sample pressing member 120, the tip 216 of the first protruding portion 210, and the tip 218 of the second protruding portion 212 are pinched with tweezers or the like, and the second elastic member 150 is removed from between the first protruding portion 210 and the second protruding portion 212. As a result, the first bent portion 252 and the second bent portion 254 of the second elastic member 150 are released from the elastically deformed state. In addition, the first elastic member 140 is separated from the holder base 110. Therefore, the first elastic member 140 and the second elastic member 150 do not apply a force to the sample pressing member 120 to press the sample.

[0064] Next, the sample pressing member 120 is rotated about the shaft member 130 as a rotation axis to raise the sample pressing member 120, as shown in Fig. 9. This releases the sample support portion 12. Next, the sample placed in the recess 14 is grasped with a tool for grasping a sample, such as tweezers, and the sample is removed from the recess 14.

[0065] Through the above steps, the sample can be removed from the sample holder 200.

[0066] 2.3. Effects Like the sample holder 100, the sample holder 200 reduces the possibility of damaging the sample and allows the sample to be easily attached and detached.

[0067] 3. Third embodiment 3.1. Sample holder Next, a sample holder according to a third embodiment will be described with reference to the drawings. Fig. 12 and Fig. 13 are perspective views that show a sample holder 300 according to the third embodiment. Fig. 12 shows a state in which the sample pressing member 120 is raised, and Fig. 13 shows a state in which the sample pressing member 120 is laid down. Hereinafter, in the sample holder 300 according to the third embodiment, members having the same functions as the constituent members of the above-mentioned sample holder 100 and sample holder 200 are given the same reference numerals, and detailed description thereof will be omitted.

[0068] In the sample holder 300, the configuration for fixing the sample pressing member 120 to the holder base 110 is different from that of the above-mentioned sample holder 100 and sample holder 200. Specifically, in the sample holder 200, the sample pressing member 120 is fixed to the holder base 110 by hooking the second elastic member 150 between the first protruding portion 210 and the second protruding portion 212 of the holder base 110. In contrast, in the sample holder 300, the sample pressing member 120 is fixed to the holder base 110 by sandwiching the first protruding portion 210 and the second protruding portion 212 with the first bent portion 252 and the second bent portion 254 of the second elastic member 150.

[0069] The first protrusion 210 has an inclined surface 211b inclined with respect to the upper surface 2a of the holder base 110. The angle of the corner where the upper surface 2a and the inclined surface 211b are connected is an acute angle. The second protrusion 212 has an inclined surface 213b inclined with respect to the upper surface 2a of the holder base 110. The angle of the corner where the upper surface 2a and the inclined surface 213b are connected is equal to the angle of the corner where the upper surface 2a and the inclined surface 211b are connected, for example. The inclined surface 211b and the inclined surface 213b are formed on the side surface of the holder base 110 facing outward.

[0070] The angle between the first bent portion 252 and the fixed portion 50 is an acute angle. The angle between the fixed portion 50 and the second bent portion 254 is, for example, equal to the angle between the first bent portion 252 and the fixed portion 50. When the sample pressing member 120 is in the tilted state, the first bent portion 252 is pressed against the inclined surface 211b of the holder base 110 and elastically deforms so that the bending angle of the first bent portion 252 becomes smaller. The second bent portion 254 is pressed against the inclined surface 213b of the holder base 110 and elastically deforms so that the bending angle of the second bent portion 254 becomes smaller. As a result, the direction of the resultant force of the force generated by the elastic deformation of the first bent portion 252 and the force generated by the elastic deformation of the second bent portion 254 is the -Z direction, and a force in the -Z direction can be applied to the sample pressing member 120.

[0071] Furthermore, the first bent portion 252 is hooked onto the first protruding portion 210 and the second bent portion 254 is hooked onto the second protruding portion 212 , whereby the sample pressing member 120 can be fixed to the holder base 110 .

[0072] 3.2. Attaching and detaching the sample As described above, the sample holder 300 differs from the above-described example of the sample holder 200 in the method of fixing the sample pressing member 120 to the holder base 110. In the following, the differences from the above-described example of the sample holder 200 will be described, and the description of the similarities will be omitted.

[0073] In the sample holder 300, the sample pressing member 120 can be fixed to the holder base 110 by sandwiching the first protruding portion 210 and the second protruding portion 212 with the second elastic member 150. Specifically, the sample pressing member 120 can be fixed to the holder base 110 by hooking the first bent portion 252 to the first protruding portion 210 and the second bent portion 254 to the second protruding portion 212. At this time, the first bent portion 252 is pressed against the inclined surface 211b of the holder base 110 and elastically deformed, and the second bent portion 254 is pressed against the inclined surface 213b of the holder base 110 and elastically deformed. As a result, a force in the -Z direction can be applied to the sample pressing member 120 by the second elastic member 150.

[0074] Effect Like the sample holder 100, the sample holder 300 reduces the possibility of damaging the sample and allows the sample to be easily attached and detached.

[0075] 4. Fourth embodiment 4.1. Sample holder Next, a sample holder according to a fourth embodiment will be described with reference to the drawings. Fig. 14 and Fig. 15 are perspective views showing a sample holder 400 according to the fourth embodiment. Fig. 14 shows a state in which the sample pressing member 120 is raised, and Fig. 15 shows a state in which the sample pressing member 120 is laid down. In the sample holder 400 according to the fourth embodiment, members having the same functions as the constituent members of the above-mentioned sample holder 100 are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0076] In the sample holder 400, the configuration for fixing the sample pressing member 120 to the holder base 110 is different from that of the above-mentioned sample holder 100.

[0077] An inclined surface 410 is formed at the tip of the holder base 110. The second elastic member 150 includes a fixed portion 50 and a tip portion 52. The tip portion 52 has a first bent portion 452, a second bent portion 454, and a knob 456.

[0078] The first bent portion 452 and the second bent portion 454 are bent at a predetermined angle with respect to the fixed portion 50. In the state in which the sample pressing member 120 is laid down as shown in Fig. 15, the first bent portion 452 and the second bent portion 454 are bent in the -Z direction. A knob 456 is provided between the first bent portion 452 and the second bent portion 454.

[0079] 15, when the sample holding member 120 is laid down, the first bent portion 452 and the second bent portion 454 are caught on the inclined surface 410. The first bent portion 452 and the second bent portion 454 are caught on the inclined surface 410, whereby the sample holding member 120 is fixed to the holder base 110. At this time, the tip portion 52 of the second elastic member 150 is curved and elastically deformed, and applies a force in the -Z direction to the tip portion 21b of the sample holding member 120.

[0080] 4.2. Attaching and detaching the sample In the sample holder 400, the method of fixing the sample pressing member 120 to the holder base 110 is different from that of the above-mentioned sample holder 100. Below, the differences from the above-mentioned sample holder 100 will be described, and the description of the similarities will be omitted.

[0081] 15, in the sample holder 400, the sample pressing member 120 can be fixed to the holder base 110 by laying the sample pressing member 120 down and hooking the first bent portion 452 and the second bent portion 454 on the inclined surface 410. Also, by lifting the knob 456 and raising the sample pressing member 120, the sample support portion 12 can be opened as shown in FIG.

[0082] Effect Like the sample holder 100, the sample holder 400 reduces the possibility of damaging the sample and allows the sample to be easily attached and detached.

[0083] 5. Fifth embodiment 5.1. Sample holder Next, a sample holder according to a fifth embodiment will be described with reference to the drawings. Fig. 16 and Fig. 17 are perspective views showing a sample holder 500 according to the fifth embodiment. Fig. 16 shows a state in which the sample pressing member 120 is raised, and Fig. 17 shows a state in which the sample pressing member 120 is laid down. In the sample holder 500 according to the fifth embodiment, members having the same functions as the constituent members of the above-mentioned sample holder 100 are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0084] The sample holder 500 differs from the above-described sample holder 100 in the configuration of the second elastic member 150. In the sample holder 500, the second elastic member 150 is not fixed to the sample pressing member 120.

[0085] Two screw holes are formed in the upper surface 2a of the holder base 110, one of which has a screw 502 inserted therein, and the other of which has a screw 504 inserted therein. Also, the holder base 110 has a notch 506 formed therein.

[0086] FIG. 18 is a perspective view showing the second elastic member 150. The second elastic member 150 includes an axial hole 550, a screw receiver 552, a pressing portion 554, and a spring hook 556. The second elastic member 150 is rotatably fixed to the holder base 110 by a screw 502 passing through the axial hole 550. That is, the second elastic member 150 is rotatable around the screw 502 as a rotation axis. In the example shown in FIG. 16 and FIG. 17, the second elastic member 150 rotates around an axis parallel to the Z axis as a rotation axis. The second elastic member 150 can be fixed to the holder base 110 by rotating the second elastic member 150 and hooking the spring hook 556 into the notch 506. At this time, the screw 504 is hooked into the screw receiver 552. This makes it possible to restrict the movement of the second elastic member 150 in the Z direction, and to prevent the second elastic member 150 from coming off the holder base 110.

[0087] With the sample pressing member 120 in the laid-down state, the second elastic member 150 is fixed to the holder base 110, thereby fixing the sample pressing member 120 to the holder base 110. At this time, the pressing portion 554 of the second elastic member 150 is pressed against the tip portion 21b of the sample pressing member 120, and a force in the -Z direction can be applied to the tip portion 21b. The pressing portion 554 is a portion that protrudes in the -Z direction more than other portions of the second elastic member 150. The pressing portion 554 is made to protrude more than other portions of the pressing portion 554 by, for example, bending a metal plate.

[0088] 5.2. Attaching and detaching the sample In the sample holder 500, the method of fixing the sample pressing member 120 to the holder base 110 is different from that of the above-mentioned sample holder 100. Below, the differences from the above-mentioned sample holder 100 will be described, and the description of the similarities will be omitted.

[0089] 17, in the sample holder 500, after the sample pressing member 120 is laid down, the second elastic member 150 is rotated around the screw 502 to press the pressing part 554 against the upper surface 4a of the sample pressing member 120. In this state, the spring hook 556 is hooked into the notch 506 and the screw 504 is hooked into the screw receiver 552, thereby fixing the second elastic member 150 to the holder base 110. This allows the sample pressing member 120 to be fixed to the holder base 110.

[0090] In the sample holder 500, as shown in FIG. 16, the sample pressing member 120 can be released by removing the spring hook 556 from the notch 506 and rotating the second elastic member 150.

[0091] Effect Like the sample holder 100, the sample holder 500 reduces the possibility of damaging the sample and allows the sample to be easily attached and detached.

[0092] 6. Sixth embodiment 6.1. Sample holder Next, a sample holder according to a sixth embodiment will be described with reference to the drawings. Figures 19 and 20 are perspective views that show a sample holder 600 according to the sixth embodiment. Figure 19 shows a state in which the sample pressing member 120 is raised, and Figure 20 shows a state in which the sample pressing member 120 is laid down. In the sample holder 600 according to the sixth embodiment, members having the same functions as the constituent members of the above-mentioned sample holder 100 are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.

[0093] The sample holder 600 differs from the above-described sample holder 100 in the configuration of the elastic member that imparts force to the sample pressing member 120 to press the sample.

[0094] The holder base 110 has an inclined surface 612 and an inclined surface 614 that are inclined with respect to the upper surface 2a of the holder base 110. The inclined surface 612 is formed on a side surface of the holder base 110 that faces outward, and in the illustrated example, is formed on a side surface that faces in the -Y direction. The inclined surface 614 is formed on a side surface of the holder base 110 that faces outward, and in the illustrated example, is formed on a side surface that faces in the +Y direction.

[0095] The elastic member 640 applies a force to the sample holding member 120 to hold down the sample. The elastic member 640 is rotatably fixed to the holder base 110 by the shaft member 130. In the illustrated example, the elastic member 640 and the sample holding member 120 are rotatably fixed by the common shaft member 130, but the shaft member for rotatably fixing the elastic member 640 and the shaft member for rotatably fixing the sample holding member 120 may be separate. As shown in FIG. 20, the elastic member 640 is rotated about the shaft member 130 as a rotation axis to tilt the elastic member 640, thereby applying a force in the -Z direction to the sample holding member 120.

[0096] The elastic member 640 includes a window portion 642, a first pressing portion 644, a second pressing portion 646, a first spring hook 648a, and a second spring hook 648b.

[0097] The window 642 is an opening for passing the electron beam. In the sample holder 600, the electron beam passes through the window 642, the through-hole 26, and the through-hole 16 when the elastic member 640 and the sample pressing member 120 are in the laid-down state.

[0098] The first pressing portion 644 applies a force to one end of the sample pressing member 120 to press the sample. The second pressing portion 646 applies a force to the other end of the sample pressing member 120 to press the sample. The first pressing portion 644 extends from a side that defines the window portion 642 toward the center of the window portion 642. The second pressing portion 646 extends from a side that defines the window portion 642, which is opposite to the side on which the first pressing portion 644 is provided, toward the center of the window portion 642.

[0099] 20, in the state where the elastic member 640 is laid down, the first pressing portion 644 extends in the -Z direction from the side that defines the window portion 642 and presses one end of the sample holding member 120. In the state where the elastic member 640 is laid down, the second pressing portion 646 extends in the -Z direction from the side that defines the window portion 642 and presses the other end of the sample holding member 120. This allows a force in the -Z direction to be applied to both ends of the sample holding member 120.

[0100] The first spring hook 648a is hooked on the inclined surface 612 of the holder base 110 when the elastic member 640 is folded down. The second spring hook 648b is hooked on the inclined surface 612 of the holder base 110 when the elastic member 640 is folded down. , and is caught by the inclined surface 614 of the holder base 110. This allows the elastic member 640 to be fixed to the holder base 110.

[0101] 6.2. Attaching and detaching the sample 6.2.1. Mounting the sample 19, the elastic member 640 and the sample pressing member 120 are rotated around the shaft member 130 as a rotation axis to raise the elastic member 640 and the sample pressing member 120. This releases the sample support portion 12. Next, the sample is placed in the recess 14 of the sample support portion 12.

[0102] 20, the sample pressing member 120 is laid down, whereby the convex portion 24 of the sample pressing member 120 is placed on the sample placed in the concave portion 14.

[0103] Next, the elastic member 640 is laid down, and the first spring hook 648a is hooked on the inclined surface 612, and the second spring hook 648b is hooked on the inclined surface 614. This allows the elastic member 640 to be fixed to the holder base 110. At this time, the first pressing portion 644 presses one end of the sample pressing member 120, and the second pressing portion 646 presses the other end of the sample pressing member 120. This allows a force in the -Z direction to be applied to both ends of the sample pressing member 120, and the sample can be pressed by the sample pressing member 120. In addition, since the bearing hole 22 of the sample pressing member 120 is an elongated hole, the convex portion 24 can be brought into surface contact with samples of various thicknesses.

[0104] 6.2.2. Removal of the sample First, the first spring hook 648a is removed from the inclined surface 612, and the second spring hook 648b is removed from the inclined surface 614, and the elastic member 640 is raised as shown in Fig. 19. Next, the sample pressing member 120 is raised. This releases the sample support portion 12, and the sample can be removed from the recess 14.

[0105] Effect The sample holder 600 can reduce the possibility of damaging the sample and can easily attach and detach the sample, similar to the sample holder 100. Furthermore, the sample holder 600 can hold both ends of the sample holding member 120 with one elastic member, which allows for miniaturization and a reduction in the number of parts.

[0106] 7. Seventh embodiment Next, a transmission electron microscope according to a seventh embodiment will be described with reference to the drawings. Fig. 21 is a diagram showing the configuration of a transmission electron microscope 700 according to the seventh embodiment.

[0107] In the transmission electron microscope 700, a transmission electron microscope image (TEM image) of the sample S can be obtained by irradiating the sample S held in the sample holder 100 with an electron beam (one example of a charged particle beam) EB and forming an image of the electrons transmitted through the sample S. In addition, in the transmission electron microscope 700, a scanning electron microscope image (STEM image) can be obtained by scanning the sample S with a finely focused electron beam EB.

[0108] 21, the transmission electron microscope 700 includes a sample holder 100. The transmission electron microscope 700 further includes an electron gun 710, an illumination lens 711, a deflector 712, a goniometer (stage) 714, an objective lens 716, an intermediate lens 717, a projection lens 718, and a detector 720.

[0109] The electron gun 710 emits an electron beam EB. For example, the electron gun 710 accelerates electrons emitted from a cathode at an anode to emit the electron beam EB. The projection lens 711 focuses the electrons emitted from the electron gun 710. The emitted electron beam EB is focused and irradiated onto a sample S. The deflector 712 deflects the electron beam EB that is irradiated onto the sample S. The deflector 712 deflects the electron beam EB that is converged by the irradiation lens 711, so that the sample S can be scanned with the electron beam EB. This makes it possible to obtain a STEM image.

[0110] The sample holder 100 holds a sample S. The sample holder 100 is inserted into a goniometer 714 to introduce the sample S into a sample chamber. The goniometer 714 has a drive mechanism for moving and tilting the sample holder 100.

[0111] The objective lens 716 is a first-stage lens that forms a TEM image with the electron beam EB that has transmitted through the sample S. The objective lens 716, intermediate lens 717, and projection lens 718 constitute an imaging lens system, which forms a TEM image on a detector 720 with the electron beam EB that has transmitted through the sample S.

[0112] The detector 720 captures the TEM image formed by the imaging lens system. The detector 720 is, for example, a digital camera such as a CCD (Charge Coupled Device) camera. Although not shown, the transmission electron microscope 700 also includes a STEM detector for detecting electrons transmitted through the sample S to obtain a STEM image.

[0113] Although the above description has been given of the case where the sample holder 100 is applied to a transmission electron microscope, the sample holder 100 can also be applied to a charged particle beam device that irradiates a sample with a charged particle beam such as an electron beam or an ion beam, such as a scanning electron microscope, a focused ion beam device, or an electron beam microanalyzer. In other words, the sample holder 100 may be used as a sample holder for a charged particle beam device.

[0114] 8. Variations The present invention is not limited to the above-described embodiment, and various modifications are possible within the scope of the present invention.

[0115] In the above-described first to sixth embodiments, the bearing hole 22 of the sample holding member 120 is an elongated hole in which the shaft member 130 is long in the Z direction when the sample holding member 120 is laid down, but the bearing hole 22 is not limited to an elongated hole as long as the shaft member 130 can move in the Z direction when the sample holding member 120 is laid down. For example, the bearing hole 22 may be a round hole having a diameter that allows the shaft member 130 to move in the Z direction when the sample holding member 120 is laid down.

[0116] In the first to fifth embodiments described above, the first elastic member 140 and the second elastic member 150 are leaf springs, but the first elastic member 140 and the second elastic member 150 may be elastic members other than leaf springs as long as they can apply a force for pressing the sample to both ends of the sample pressing member 120. In the sixth embodiment described above, the elastic member 640 is a leaf spring, but the elastic member 640 may be elastic members other than leaf springs as long as they can apply a force for pressing the sample to both ends of the sample pressing member 120.

[0117] The above-described embodiment and modifications are merely examples, and the present invention is not limited to these. For example, the embodiments and modifications can be appropriately combined.

[0118] The present invention is not limited to the above-described embodiment, and various modifications are possible. For example, the present invention includes a configuration that is substantially the same as the configuration described in the embodiment. A substantially identical configuration is, for example, a configuration that has the same function, method, and result, or a configuration that has the same purpose and effect. The present invention also includes a configuration in which non-essential parts of the configuration described in the embodiment are replaced. The present invention also includes a configuration that has the same action and effect as the configuration described in the embodiment. The present invention also includes configurations in which publicly known technology is added to the configurations described in the embodiments. [Explanation of symbols]

[0119] 2a...upper surface, 2b...lower surface, 4a...upper surface, 12...sample support portion, 14...recess, 15...groove, 16...through hole, 18...opening, 18a...first space, 18b...second space, 18c...third space, 19...fixing hole, 21a...base, 21b...tip, 21c...holding portion, 22...bearing hole, 24...projection, 26...through hole, 28a...screw hole, 28b...screw hole, 40...fixing portion, 42...tip, 50...fixing portion, 52...tip, 54...hole, 56...groove, 58...grip, 100...sample holder, 102a...screw, 102b...screw, 110...holder base, 120...sample pressing member, 130...shaft member, 140...first elastic member, 150...second elastic member, 160...pin, 200...sample holder, 210...first protrusion, 211a...inclined surface, 211b...inclined surface, 212...second protrusion, 213a...inclined surface, 213b...inclined surface, 216 ...tip portion, 218...tip portion, 220...knob, 252...first bent portion, 254...second bent portion, 300...sample holder, 400...sample holder, 410...inclined surface, 452...first bent portion, 454...second bent portion, 456...knob, 500...sample holder, 502...screw, 504...screw, 506...notch, 550...shaft hole, 552...screw receiver, 554...pressure portion, 556...spring hook, 600... sample holder, 612... inclined surface, 614... inclined surface, 640... elastic member, 642... window portion, 644... first pressing portion, 646... second pressing portion, 648a... first spring hook, 648b... second spring hook, 700... transmission electron microscope, 710... electron gun, 711... projection lens, 712... deflector, 714... goniometer, 716... objective lens, 717... intermediate lens, 718... projection lens, 720... detector

Claims

1. A sample holder for a charged particle beam device, comprising: a holder base having a sample support portion for supporting a sample; a sample pressing member that presses the sample and is disposed on the sample support; a shaft member for rotatably fixing the sample holding member to the holder base; at least one elastic member that applies a force in a first direction to the sample pressing member to press the sample; Including, By rotating the sample pressing member, it is possible to switch between a state in which the sample pressing member presses the sample and a state in which the sample support portion is released, the sample pressing member has a bearing hole through which the shaft member passes, A sample holder, wherein when the sample pressing member presses the sample, the shaft member is movable within the bearing hole in the first direction.

2. In claim 1, A sample holder, wherein when the sample pressing member presses down on the sample, the bearing hole is an elongated hole that is long in the first direction.

3. In claim 1, The elastic member includes: a first elastic member that applies a force to one end of the sample pressing member to press the sample; a second elastic member that applies a force to the other end of the sample pressing member to press down the sample.

4. In claim 3, The first elastic member is a leaf spring fixed to one end of the sample pressing member.

5. In claim 4, A sample holder, in a state where the sample pressing member presses down on the sample, the first elastic member is pressed against the holder base and elastically deformed, thereby applying a force in the first direction to the sample pressing member.

6. In claim 3, the second elastic member is a leaf spring fixed to the other end of the sample pressing member, The holder base is provided with a pin, The second elastic member is provided with a hole into which the pin fits, The sample holder, wherein the second elastic member is elastically deformed by fitting the pin into the hole, and the second elastic member applies a force in the first direction to the sample pressing member.

7. In claim 1, The shaft member is arranged along a second direction perpendicular to the first direction.

8. In claim 1, the sample support portion has a recess in which the sample is placed, The sample holder, wherein the sample pressing member has a protrusion that fits into the recess.

9. In claim 8, a first through hole for passing an electron beam is provided in a bottom surface of the recess; The convex portion is provided with a second through hole for passing an electron beam.

10. A charged particle beam device comprising the sample holder according to any one of claims 1 to 9.

Images