Apparatus for checking the alignment state of an image sensor and method for checking the alignment state of an image sensor - Patents.com

Abstract

The present invention relates to a device (200) for checking the adjustment state of an image sensor (120) of a camera module (115), the device (200) having the following characteristics: a first optical device (205) illuminated by a first light source (210) and having a first optical element (220) movable along a first optical axis (215); a second optical device (235) that can be illuminated by a second light source (240) and has a second optical element (250) that can be moved along a second optical axis (245), the second optical device (235) being positioned at a distance from the first optical device (205), the first optical axis having an intersection point (260) with the second optical axis (245), and the camera module (115) to be identified being positionable in the area of ​​the intersection point (260); an evaluation device (270) designed to read position information (275) representative of the positions of the first and second optical elements (220, 250) detected at a specific time and to read image signals (285) representative of image information items detected by the image sensor (120) at a specific time, and to assign an image information item to each detected position using the image signals (285) and / or the position signals (275) in order to determine an adjustment state of the camera module (115).

Description

[Technical field]

[0001] The present invention relates to an apparatus for checking the alignment state of an image sensor and to a method for checking the alignment state of an image sensor.

[0002] From the prior art, various approaches are known for the active alignment of camera modules. In this case, the active alignment is carried out within the scope of the manufacturing process. After the completion of the manufacturing process, the quality of the alignment of the camera system needs to be checked. The alignment can be adversely affected by manufacturing steps, for example uneven hardening of the glue that fixes the optics and the sensor to one another, but also by mechanical or temperature effects. Often, the finished camera modules are checked using simple test image structures to determine whether they meet the defined sharpness criteria. Summary of the Invention

[0003] Disclosure of the Invention Against this background, the present approach presents an apparatus for checking the alignment state of an image sensor and a method for checking the alignment state of an image sensor according to the main claims. Advantageous embodiments result from the respective dependent claims and the following description.

[0004] The apparatus and methods presented herein advantageously improve the checking of alignment of a camera's image sensor with respect to its associated optics, where the degree of mechanical tilt or sensor misalignment that may lead to reduced sharpness can be quantitatively determined.

[0005] An apparatus for checking the alignment state of an image sensor of a camera module is presented, the apparatus having the following characteristics: a first optical device having a first optical element illuminable by a first light source and movable along a first optical axis; a second optical device that can be illuminated by a second light source and has a second optical element that can be moved along a second optical axis, the second optical device being arranged at a distance (e.g. radially) from the first optical device, the first optical axis having an intersection with the second optical axis, and the camera module to be identified being positionable in the area of ​​the intersection; an evaluation device designed to read position information representative of the positions of the first and second optical elements detected at a particular time and to read image signals representative of image information items detected by the image sensor at a particular time, the evaluation device being designed to use the image signals to assign an image information item to each detection position and additionally or alternatively to the position information in order to determine an alignment state of the camera module.

[0006] For example, the device presented here can be used to check the image sensor of a camera with respect to the associated optical system, for example at the end of the camera manufacturing process. An important measurement parameter during the check of the camera alignment after assembly can be the degree of inclination between the image plane of the optical system and the sensor plane, which affects the sharpness or contrast distribution in the image field. In this case, the camera module to be checked, which can consist of, for example, an optical system and a sensor, can be illuminated by an optical device, for example with collimated light. The illumination can be performed both in an axial position parallel to the optical axis of the test object and in one or more off-axis positions. To advantageously obtain a quantitative statement regarding the degree of tilt or defocus of the mechanical sensor in the fully assembled camera system, the device presented here can use a focusable optical device, which can also be called a collimator. For a purely axial focusing, one optical device is already sufficient. If it is desired to determine the tilt of the image plane in one direction, an off-axis optical device is additionally required. At least one further off-axis optical device is required, which does not have to be arranged along a line with the axial optical device and the first off-axis optical device, in order to determine the tilt of the image plane of the optical system to be checked in two directions. Further off-axis optical devices can be added to increase the number of measurement positions and to make additional statements regarding the curvature of the image plane. The determination of the spatial position of the image plane of the test object represents an advantageous application of the invention. To improve readability, in the further course of this description, reference is made to the first and second optical devices. By displacing or moving the optical elements in the optical device, the test object can be imaged at different apparent object distances. For this purpose, the optical element can be designed, for example, as a reticle plate (reticle) that can be moved along the optical axis of the optical device of interest, so that a focusing operation can be performed.

[0007] In this case, the movement Δz of the optical element in the optical device to be confirmed OE and camera system Δz K The following relationship between the z-positions of the measurement points in the image plane can be approximately taken into account:

[0008] Δz K =f K 2 / f OE 2 xΔz OE where f k is the focal length of the optical system of the camera system being examined, and f OE is the focal length of the optical element.

[0009] Here, it is important to have a unique relationship between the z-position, which can be defined by the position of the reticle plate in the optical device, and the respective value of, for example, the image contrast, for example as a modulation transfer function (MTF value) of the individual projected images. This relationship can advantageously be ensured quickly and with high precision by the device presented herein. In this case, the device is designed in such a way that a comparison can be processed between image information acquired from a test object, i.e., between detail contrast, for example, at the edge of the object and detail contrast of an image representation of the same object, which can be described by an MTF value. For this purpose, the device comprises an evaluation device designed to assign an item of image information, for example an MTF value, to each detected item of position information of the optical element using the image signal and additionally or alternatively to the position signal in order to determine the adjustment state of the camera module. As a result, a synchronization of the recorded image information with the position of the optical element in the optical device can be advantageously achieved.

[0010] According to an embodiment, the device may comprise an image capture circuit, which may be designed to control or read out the image sensor depending on the position of the optical element and may be designed to provide an image signal. For example, the image capture circuit, also called a frame grabber, may be an electronic circuit for digitizing an analog image signal or for reading out digital image data. In this case, the image capture circuit may additionally or alternatively be designed to connect the camera module to a wide variety of systems. Thus, the device may be designed, for example, such that image information captured by the image sensor may be processed using the image capture circuit. In this case, the image capture circuit may be designed, for example, to provide an image signal via an interface to an evaluation device. Additionally or alternatively, the image capture circuit may be connected or connectable, for example for signal transmission, to a control device for controlling the optical device. In other words, the image capture circuit (frame grabber) serves for electronic further processing or transfer of the image information detected by the sensor.

[0011] According to a further embodiment, the device can comprise a control device for controlling the first and second optical elements. In this case, the control device can be designed to provide position information. For example, all optical devices, more precisely their motor controllers or their movement drives, can be electronically connected in parallel to a control unit. Each optical device can in turn have a position encoder with which the exact position of the respective optical element can be determined. Advantageously, the movement of the individual optical elements by the control device can be optimally adapted to the other optical elements. Furthermore, the control device can be designed to provide the respective position using the position information. This advantageously allows the synchronization of the position information with the image information to be optimized.

[0012] According to a further embodiment, the device can be designed to position the first and second optical elements at a certain time such that the intermediate images of the optical elements are located in the same plane (intermediate image plane). These intermediate images are imaged in the image plane of the optical system to be checked. For example, the first optical element of the first optical device can be movable from a first start position to a first end position. Correspondingly, the second optical element of the second optical device can be movable from a second start position to a second end position. In this case, the intermediate images of the optical elements move from a first common apparent object plane to a second common apparent object plane. The first apparent object plane correlates with the first and second start positions, and the second apparent object plane correlates with the first and second end positions. In this case, it may be possible for a variable number of predetermined further object planes to be traversed between the first object plane and the second object plane. Of course, this relationship also applies to all possible planes along the trajectory of the optical elements. In this case, the velocity profiles of the first and second optical elements can be matched to one another such that the intermediate images of all optical elements can always be located simultaneously in a predetermined object plane, and thus advantageously a trajectory can be specified along which the optical elements can be displaced or moved.

[0013] According to a further embodiment, the device may comprise a third optical device having a third optical element illuminated by a third light source and movable along a third optical axis. In this case, the third optical device may be arranged at a distance (for example radially) from the first and second optical devices, and it is possible to check that the third optical axis may have an intersection with the first and second optical axes and that the camera module may be arranged in the area of ​​the intersection. For example, the illumination of the optical element may be performed both in the axial position of the first optical device parallel to the optical axis of the test object and in several off-axis positions. Ideally, the three optical elements are not arranged in one plane, so that the image points projected in the camera module are spread in the image plane and their angular positions can be determined. In this case, the contrast (MTF) values ​​for a fixed spatial frequency at each of the three field positions can be determined at each z position of the optical element. The result of the measurement may be a focusing curve, which is a representation of the image contrast as a function of the z position. The degree of inclination of the image plane relative to the sensor plane can be advantageously concluded from the positions of the maxima of the three curves along the z direction and the defocus can also be optimally determined. For camera systems that are not yet permanently installed, active alignment between the optics and the sensor can be used to determine the best focus position.

[0014] The use of three optical elements that do not have their optical axis in one plane is particularly advantageous for determining the tilt of the image plane of the camera module. Further optical elements can be used to specify the determination and obtain a statement regarding the field curvature of the test object.

[0015] Additionally, a method is presented for checking the alignment status of an image sensor of a camera module (e.g., using a variation of the apparatus presented herein), the method comprising the steps of: moving a first optical element, which can be illuminated by a first light source, along a first optical axis of a first optical device that substantially corresponds to an optical axis of the identified camera module; and moving a second optical element, which can be illuminated by a second light source, along a second optical axis of a second optical device that is disposed at a distance (e.g., radially) from the first optical device, the first optical axis having an intersection with the second optical axis within an entrance pupil of the camera module; - reading an item of position information representative of the position of the first optical element, the second optical element, the third optical element and / or each further optical element detected at a particular point in time and reading an image signal representative of an item of image information detected by the image sensor at a particular point in time; and using the image signal and additionally or alternatively the position information to associate a position with the image information to determine an alignment state of the camera module.

[0016] For example, the method can be carried out using a variant of the device described above in order to check the adjustment state of the image sensor of the camera with respect to the associated optics. Such a check can be useful, for example, at the end of the manufacturing process of the camera. After the completion of the manufacturing process, it is necessary to check the quality of the alignment of the camera system. The alignment can be adversely affected, for example, by manufacturing steps such as uneven hardening of the glue that fixes the optics and the sensor to each other, but also by mechanical or temperature effects. In the case of a fully assembled camera system, the method presented here can be advantageously carried out in order to obtain a quantitative description of the degree of sensor tilt or defocus of the image sensor. The aim of the method described here is generally to be able to directly assign each position of the optical elements to the corresponding image signal very accurately, i.e. with the smallest possible time offset (latency) and time inaccuracy, or to be able to detect the image information and the associated positions of the optical elements quasi-simultaneously. This is necessary to be able to determine the position of the highest image contrast with the highest possible accuracy (in the μm range).

[0017] According to an embodiment, the method may comprise a step of outputting a position trigger signal in order to determine the time point for detecting the position of the first optical element and additionally or alternatively the second optical element, and in response to the position trigger signal it is possible to provide position information. For example, the illuminated optical element of the optical device may be moved continuously from a start position towards an end position. At the same time, images of the optical elements following one another in time may be recorded by the test subject using an image sensor. The individual image information, which may also be referred to as frames, may be processed for example by an image capture circuit or frame grabber. This image capture circuit may for example output a position trigger signal as soon as an image has been completely recorded. Alternatively, the position trigger signal may be output at the start of the image recording. Simultaneously with the position trigger signal, an image signal representative of the image information may be supplied, for example to an evaluation device. The position trigger signal may for example be output to a control device for controlling the optical elements. The position of the optical elements present at this time may be provided to the evaluation device using the position information in response to the position trigger signal. Thus, the image information may advantageously be evaluated as a function of the position of the optical elements. In other words, by direct synchronization between the frame grabber and the control device, the measurement process can be improved in that, on the one hand, continuous focusing movements can be traversed at high speed, and, on the other hand, no indirect link between image position and encoder position is made via time stamps, which necessarily requires a movement process that is linear in time. Position-controlled triggering of image recording also allows for non-linear (accelerated) movement profiles.

[0018] According to a further embodiment, the method may comprise a step of outputting an image trigger signal to determine the time point for detecting the image information, the image signal being provided in response to the image trigger signal. For example, the optical element may be moved continuously from a start position to an end position. The image trigger signal may be output as soon as an optical element or an encoder of a corresponding optical device reaches a predefined position. The image trigger signal may be output when non-equidistant position marks are reached, such as, for example, positions 0 mm, 0.1 mm, 0.2 mm, 0.5 mm, 1.0 mm, 2.0 mm and 5.0 mm. For example, the image trigger signal may be output in each case at these or other predefined positions to the image capture circuit. At the same time, a position signal may be provided to the evaluation device. In response to the image trigger signal, the image capture circuit may control the start of the image recording process. The respective image information may then be read out and provided to the evaluation device by means of the image signal. Each item of image information may be assigned to a predefined position of the optical element by the evaluation device. Alternatively, for example, the image information may be temporarily stored and transmitted at the end of the focusing operation and assigned to a position. An evaluation of the image information as a function of the optical element encoder position can also advantageously be performed by this step.

[0019] According to a further embodiment, the method may comprise a step of storing the image information and additionally or alternatively the positions of the first and second optical elements. In a first variant, the respective positions of the first and second optical elements are stored after being detected at a predetermined time in response to a position trigger signal. In this variant, the image information is also stored approximately at the same time that the position trigger signal is output. In a second variant, the image information is stored after being detected at a predetermined time in response to an image trigger signal. In this variant, the respective positions of the first and second optical elements are also stored approximately at the same time that the image trigger signal is output.

[0020] According to a further embodiment, the first optical element can be moved at a first speed and the second and / or each further optical element can be moved at a second speed different from the first speed. For example, the control device for controlling the optical elements can be designed such that the intermediate images of the optical elements of all optical devices are advantageously located simultaneously in the same object plane. In this case, the first optical axis of the first optical device substantially corresponds to the optical axis of the camera module to be identified and the second and / or further optical device(s) is / are arranged at a radial distance from the first optical device. As a consequence, this means, for example, that the second optical element of the second optical device should be moved at a different speed than the first optical element. In this case, for example, the movement speed of what is known as the master optical device, for example the optical device corresponding to the optical axis of the camera module, can be defined as a guide value according to which the speeds of the remaining optical devices can be adjusted in terms of control technology. In this case, each individual optical device can be equipped with its own position encoder, which can be used, for example, in what is known as a closed-loop control for position and speed control. In this case, the signals of the individual optical devices can be transmitted electronically in parallel to the control device. Since the relationship between the position of the optical elements and the apparent object plane (intermediate image plane) is non-linear, it is further advantageous to move a corresponding velocity profile in order to achieve a uniform measurement point distribution in the image space.

[0021] According to further embodiments, the first and second velocities can always have values ​​greater than 0 m / s. Additionally or alternatively, the time profile of the first and second velocities and / or the further velocities can be mathematically described by a non-linear function. In this case, it is advantageously possible to move the continuous focusing movements at high speed and to omit the indirect association between the image information and the position of the optical element via the time stamp, which necessarily requires a linear movement process in time.

[0022] According to a further embodiment, the method may comprise a step of providing a movement signal, which may represent a specification of the positions to be approached by the optical element, in particular the specification may be stored as a position table. For example, one or more sets of optical element z positions may be stored in the control unit. The individual z positions may correspond to different object planes in which the images of the optical element appear to be projected relative to the camera module. These apparent object planes are also called intermediate image planes. In this case, the speed profiles of the first and second optical elements may advantageously be matched to one another such that all images of the optical elements are always located simultaneously in a given object plane. In this case, the transfer of the set of positions may be performed, for example, in the form of a position table, the positions may further be equidistant or not equidistant. Thus, advantageously, a trajectory along which the optical elements of the optical device move may be specified.

[0023] The method may be implemented, for example, in software or hardware, or in a mixed form of software and hardware, for example in a controller.

[0024] Also advantageous is a computer program product or computer program having a program code which can be stored on a machine-readable carrier or storage medium, such as a semiconductor memory, a hard disk memory or an optical memory, and which is used to execute, implement and / or control the steps of the method according to one of the above described embodiments, in particular when the program product or program is executed on a computer or device. [Brief description of the drawings]

[0025] Embodiments of the approach presented here are illustrated in the drawings and explained in more detail in the following description. [Figure 1] FIG. 2 is a schematic diagram of an embodiment of the measurement of the tilt between the image plane and the sensor plane of the optical unit. [Diagram 2] FIG. 1 is a schematic diagram of an embodiment of an apparatus. [Figure 3A] FIG. 2 is a schematic plan view of an embodiment of the apparatus. [Figure 3B] FIG. 2 is a schematic cross-sectional view of an embodiment of the device in a side view. [Figure 4] FIG. 1 is a schematic diagram of an embodiment of an apparatus. [Diagram 5] FIG. 1 is a schematic diagram of an embodiment of an apparatus. [Figure 6] 1 is a flow chart of an embodiment of a method for verifying an alignment state of an image sensor of a camera module. [Figure 7] 1 is a flow chart of an embodiment of a method for verifying an alignment state of an image sensor of a camera module. [Figure 8] 1 is a flow chart of an embodiment of a method for verifying an alignment state of an image sensor of a camera module. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] In the following description of preferred embodiments of the present invention, elements that are illustrated in the various figures and function similarly will be designated with the same or similar reference numerals, and repeated descriptions of these elements will be omitted.

[0027] FIG. 1 is a schematic diagram of an embodiment of the measurement of the tilt between the image plane 100 and the sensor plane 110 of the optical unit 105. An important measurement parameter during the check of the camera alignment is the degree of tilt between the image plane 100 and the sensor plane 110 of the optical system or optical unit 105. For the measurements shown here, the camera module 115 to be checked, consisting of the optical unit 105 and the image sensor 120, can be illuminated with collimated light. The sensor or optical system to be tested can be moved relative to each other and it is possible to determine, for example, an MTF value 130 for a fixed spatial frequency at each z position 125 in each of the three field positions. As a result of the measurement, a focus curve 135 with contrast values ​​as a function of the z position is shown in the lower left side of the image. From the positions of the maxima of the three curves along the z direction, it is possible to conclude the degree of tilt of the image plane 100 relative to the sensor plane 110 and also to determine the defocus. The figure shows this in two dimensions. This evaluation can be carried out in three dimensions as well. For camera systems that are not yet permanently installed, the best focus position can be determined using active alignment between the optics and the sensor. After the completion of the manufacturing process, the quality of the alignment of the camera system needs to be checked. The alignment can be adversely affected by manufacturing steps, for example uneven curing of the glue that fixes the optics and the sensor together, but also by mechanical or temperature effects. Often, completed camera modules are checked using simple test image structures to determine whether they meet the defined sharpness criteria. However, this method does not provide a quantitative indication of the degree of mechanical tilt or sensor misalignment that led to the observed sharpness degradation. This makes a systematic optimization of the manufacturing process more difficult.

[0028] 2 shows a schematic diagram of an embodiment of the device 200. The device 200 is designed to check the adjustment state of the image sensor 120 of the camera module 115. For this purpose, the device 200 comprises a first optical device 205 that can be illuminated by a first light source 210 and has a first optical element 220 that can be moved along a first optical axis 215. In this case, the first optical axis 215 shown here corresponds to the optical axis 225 of the camera module 115 arranged below the first optical device 205 in the image. The device 200 further comprises a second optical device 235 that can be illuminated by a second light source 240 and has a second optical element 250 that can be moved along a second optical axis 245. In this case, the second optical device 235 is for example arranged radially away from the first optical device 205 (here specifically rotated at an angle with respect to the first optical axis 225), the first optical axis 215 having an intersection point 260 with the second optical axis 245, and the camera module 115 to be identified is arranged in the region of the intersection point 260. In a practical embodiment, a further optical device can also be correspondingly added.

[0029] Furthermore, the device 200 comprises an evaluation device 270 designed to read a position signal 275. The position signal 275 represents the positions of the first and second optical elements 220, 250 detected at a certain point in time and can be provided to the evaluation device 270 by a control device 280 for controlling the optical elements 220, 250 in this embodiment. The evaluation device 270 is further designed to read an image signal 285 representing an item of image information detected by the image sensor 120 at a certain point in time. In this case, in this embodiment, the evaluation device 270 is designed to assign an item of image information to each detected position using the image signal 285 and the position signal 275 in order to determine the adjustment state of the camera module. In another embodiment, it is also possible to use only the position signal or the image signal.

[0030] 3A shows a schematic top view of an embodiment of the device 200. It includes an axial optical device 205 and a number of off-axis optical devices 235, 300 spaced radially from the axial optical device 205 at different angles. The device 200 shown here corresponds to or is similar to the device described in FIG. 2 above, except that the device 200 shown here includes a third optical device 300 in addition to the first optical device 205 and the second optical device 235. The third optical device 300 includes a third optical element 315 that can be illuminated by a third light source 305 and that can be moved along a third optical axis 310 in conjunction with the first optical device 205 and the second optical device 235. In this case, the third optical device 300 is arranged at a radial distance from the first and second optical devices 205, 235, a third optical axis 310 has an intersection point 260 with the first and second optical axes 215, 245, and the identified camera module 115 can be arranged in the region of the intersection point 260. In the same sense, further optical devices can also be arranged spatially radially around the entrance opening of the identified camera module. This situation is shown in the plan view of Fig. 3A.

[0031] 3B is a schematic diagram of an embodiment of a first optical device 205. The first optical device 205 shown here corresponds or is similar to the first optical device described in the previous figures 2 and 3A and has a housing 330 in which a first light source 210 is arranged. The first light source 210 is designed to output a light beam 335 that can be collimated by a projection lens 340. In this embodiment, a first optical element 220 that can move along a first optical axis 215 is arranged between the first light source 210 and the projection lens 340, the first optical axis 215 corresponding to the optical axis 225 of the camera module 115 to be identified. In this case, the first optical element 220 can be controlled, merely by way of example, by a motor drive and a position encoder 345. Depending on the position of the first optical element 220, the light beam 335 can be modified so that different apparent object distances can be set for the image sensor 120 (and thus illuminated) of the camera module 115 and, by way of example, different contrast (MTF) values ​​can be evaluated for these object distances. In other words, the optical system 340 generates a virtual intermediate image of the optical element 220, which is in turn imaged as an object by the optical system of the system under test 115 onto its sensor 120.

[0032] Fig. 4 shows a schematic diagram of an embodiment of the device 200. The device 200 shown here corresponds or is similar to the device described in Fig. 2 and Fig. 3 above, with the difference that the device 200 in this embodiment comprises an image capture circuit 400. The image capture circuit 400, which may also be called a frame grabber, is designed in this embodiment to read out the image sensor 120 depending on the position of the optical elements 220, 250, 315 and to provide an image signal 285 to the evaluation device 270. Purely by way of example, the image capture circuit 400 is further designed to output a position trigger signal 405 to the control device 280. In this case, the control device 280 is designed in this embodiment to determine the time for detecting the positions of the optical elements 220, 250, 315 in response to the position trigger signal 405 and to store the respective positions by means of a memory unit 407, which may also be called an optical element position memory. The position signal 275 can then be used to provide the positions of the optical elements 220, 250, 315.

[0033] In other words, the device 200 is designed to process image information captured by the test object using an image capture circuit 400 in this embodiment, which is connected to the control device 280 for signal transmission, merely by way of example. In this embodiment, all optical devices 205, 235, 300, more precisely their motor controllers, are electronically connected in parallel to the control device 280. In this embodiment, the control device 280 is designed to store the positions of the optical elements 220, 250, 315 at a certain point in time determined by a position trigger signal 405, which may be, merely by way of example, the start or end of image recording. In this case, the optical elements 220, 250, 315 are moved continuously from a start position 410 to an end position 415. The positions of the corresponding intermediate images are also correlated with each position of the optical elements. In this case, the optical elements are arranged along their respective optical axes such that all intermediate images are located in a common apparent object plane. Thus, the intermediate images also move from the start position 410 to the end position 415. For clarity of the images shown here, only the first object plane 410, which corresponds to the start position of the intermediate image of the optical element 220, 250, 315, and the second object plane 415, which corresponds to the end position of the intermediate image of the optical element 220, 250, 315, are imaged. In other embodiments, the intermediate image of the optical element may be movable along variable object planes. For this purpose, in this embodiment, multiple sets of positions of the optical element are stored in the control device. Each position corresponds to a different object plane 410, 415 in which the intermediate image of the optical element 220, 250, 315, which can also be called a reticle, can be located. Due to the radial spacing of the optical devices 205, 235, 300 relative to each other, the distance l2 between the start and end positions of the second optical element 250 is greater than the distance l1 between the start and end positions of the first optical element 220. To compensate for these, the velocity profiles of the first optical device 205, the second optical device 235, and the third optical device 300, as well as further optical devices, may be adapted to one another so that all intermediate images of all optical elements 220, 250, 315 may always be simultaneously positioned within the predefined object planes 410, 415.The control of the optical devices 205, 235, 300 is therefore designed in such a way that the intermediate images of the optical elements of all optical devices 205, 235, 300 are located simultaneously in the same object plane 410, 415, so that the optical elements of the off-axis optical devices 235, 300 move at different speeds than the optical elements of the axial optical device 205. In this case, merely by way of example, the movement speed of one of the first optical devices 205 is defined as a guide value to which the speeds of the remaining optical devices 235, 300 are correspondingly adapted in terms of the control technique. In this case, each of the optical devices 205, 235, 300 is provided, by way of example, with its own position encoder and can be used in a closed (closed loop) control for position and speed control. In this case, the signals of the individual optical devices 205, 235, 300, i.e. the signals of the axial optical device 205 and the signals of the different off-axis optical devices 235, 300, can be electronically transmitted in parallel to the control device 280. Since the relationship between the optical element position and the apparent object plane is non-linear, a corresponding velocity profile can be moved to achieve a uniform distribution of measurement points in the object space. Thus, merely by way of example, the control device 280 is designed to provide the optical device 205, 235, 300 with a first movement signal 420, a second movement signal 422, and a third movement signal 425, the movement signals 420, 422, 425 representing the specifications of the positions that the optical element 220, 250, 315 can approach. To this end, merely by way of example, the specifications for the positions that can be approached by the optical element 220, 250, 315 are stored in the control device 280 as a position table 430.

[0034] FIG. 5 shows a schematic diagram of an embodiment of the device 200. The device 200 shown here corresponds or is similar to the device described in the previous FIGS. 2, 3 and 4, 5, with the difference that in this embodiment the control device 280 is designed to output an image trigger signal 500. By way of example only, the image trigger signal 500 can be provided to the image capture circuit 400 in order to determine the time point for detecting image information. Thus, in this embodiment, the image trigger signal 500 can be triggered as soon as the optical element 220, 250, 315 reaches a predefined position. In this case, the predefined position to be approached can be stored in the position table 430. The image capture circuit 400 is designed in this embodiment to activate the image sensor 120 in response to the image trigger signal 500 and to start the image recording process. After capturing the image information, an image signal 285 can be provided. In this case, in this embodiment, by way of example only, the image output device 505 is upstream of the evaluation device 270, so that the image signal 285 can only be provided indirectly to the evaluation device 270. Similarly, in this embodiment, the position signal 275 may be provided to the evaluation device 270 only indirectly by the control device 280 using the position output device 510 .

[0035] FIG. 6 is a flow chart of an embodiment of a method 600 for checking the adjustment state of an image sensor of a camera module. The method 600 shown here can be performed using the devices described in the previous figures 2, 3, 4 and 5. The method 600 comprises a step 605 of moving a first optical element, which can be illuminated by a first light source, along a first optical axis of a first optical device. In this case, the first optical axis substantially coincides with the optical axis of the camera module to be checked. In the step 605 of moving, a second optical element, which can be illuminated by a second light source, is also moved along a second optical axis of a second optical device. In this case, the second optical device is arranged at a radial distance from the first optical device and the first optical axis has an intersection with the second optical axis in the camera module. In this case, merely by way of example, the first optical element is moved only with a first speed and the second optical element is moved with a second speed different from the first speed. In this case, in this embodiment, both the first and second velocities have values ​​greater than 0 m / s at any instant in time, and by way of example only, the time profiles of the first and second velocities may be mathematically described by a non-linear function. Further optical devices may be added to this diagram.

[0036] The method 600 further comprises a reading step 610, in which an item of position information representative of the positions of the first and second optical elements detected at a particular point in time is read. Additionally, in the reading step 610, an image signal representative of an item of image information detected by the image sensor at a particular point in time is read. The reading step 610 is followed by a step 615 of assigning a position to the image information using the image signal and the position information in order to determine an adjustment state of the camera module.

[0037] The aim of the method 600 described here is that the image signal corresponding to each position is directly assigned with high accuracy, i.e. with the smallest possible time offset (latency) and time inaccuracy, or the image information and the associated position of the optical device are detected quasi-simultaneously. This is necessary to determine the position of highest image contrast with the highest possible accuracy (μm range). The method 600 of direct synchronization between the frame grabber and the optical device controller makes it possible, on the one hand, to move fast and continuous focusing movements, and, on the other hand, there is no indirect link between the image and the encoder position via a time stamp, which would necessarily require a moving process that is linear in time.

[0038] FIG. 7 is a flow chart of an embodiment of a method 600 for checking the adjustment state of an image sensor of a camera module. The method 600 shown here corresponds to or is similar to the method described in the previous FIG. 6, but differs in that it has an additional step. Thus, in this embodiment, a step 700 of outputting a position trigger signal is followed by a step 605 of moving. The position trigger signal is output, purely by way of example, to determine a time point for detecting the position of the first and second optical elements (and for example) further optical elements. Furthermore, in this embodiment, the method 600 comprises a step 705 of storing the image information and the positions of the first and second optical elements as well as all further optical elements. Only afterwards is the position information, provided in this embodiment in response to the position trigger signal, read together with the image signal and each image information item is assigned a respective position. In other words, in this embodiment of the method 600, the optical elements in the focusable collimator are moved continuously from a start position to an end position, i.e. not in steps. Meanwhile, the recording of the time-successive images of the reticle by the test object and, by way of example only, the processing of the individual items of image information (frames) is performed by a frame grabber. The frame grabber triggers a trigger signal as soon as the image is completely recorded. In another embodiment, it can also output a signal at the start of image recording. This is followed by storing the image information and storing the optical element encoder position information in response to the trigger signal. The image information, for example the contrast value, is then evaluated as a function of the optical element encoder position.

[0039] FIG. 8 is a flow chart of an embodiment of a method 600 for checking the adjustment state of an image sensor of a camera module. The method 600 described herein corresponds to or is similar to the methods described in the previous figures 6 and 7, but differs in having alternative and additional steps. By way of example only, the method 600 includes a step 800 of providing a movement signal. In this case, the movement signal represents a specification of the position to which the optical element should approach in the step 605 of movement. In this embodiment, this specification is stored as a position table with unevenly spaced position marks. Then, in step 805, an image trigger signal is triggered in each case when, for example, positions 0 mm, 0.1 mm, 0.2 mm, 0.5 mm, 1.0 mm, 2.0 mm and 5.0 mm are reached, in order to determine the time point at which image information is to be detected, and an image signal is provided in response to the image trigger signal. In other words, in this embodiment, a continuous movement of the optical element in the focusable collimator from a start position to an end position is performed. In this case, the trigger signal is triggered as soon as the encoder reaches a predetermined position. These trigger signals are passed, by way of example only, to a frame grabber, which then starts the image recording process. The image information is then read out and stored, initially associated with a predefined position. In another embodiment, the image information can be temporarily stored and transmitted at the end of the focusing operation and assigned to a position. In this embodiment, the image information, e.g., contrast value, is evaluated as a function of the optical element encoder position.

Claims

1. An apparatus (200) for checking the adjustment state of an image sensor (120) of a camera module (115), the apparatus (200) having the following features, A first optical device (205) having a first optical element (220) that can be illuminated by a first light source (210) and can be moved along a first optical axis (215); A second optical device (235) that can be illuminated by a second light source (240) and has a second optical element (250) that can be moved along a second optical axis (245), the second optical device (235) being arranged spaced apart from the first optical device (205), the first optical axis (215) having an intersection point (260) with the second optical axis (245), and the camera module (115) to be checked being arrangeable in the region of the intersection point (260); An evaluation device (270) designed to read position information (275) representing the positions of the first and second optical elements (220, 250) detected at a specific point in time and to read an image signal (285) representing an image information item detected by the image sensor (120) at the specific point in time, the evaluation device (270) being designed to assign an image information item to each detected position using the image signal (285) and / or the position information (275) in order to determine the adjustment state of the camera module (115). The apparatus (200) comprises the evaluation device (270).

2. The apparatus (200) according to claim 1, comprising an image capture circuit (400) designed to activate or read out the image sensor (120) according to the position of the optical elements (220, 250) and designed to provide the image signal (285).

3. The apparatus (200) according to claim 1 or 2, comprising a control device (280) for controlling the first optical element (220) and the second optical element (250), the control device (280) being designed to provide the position information (275) of the optical devices (205, 235).

4. The apparatus (200) according to claim 1 or 2, wherein the first optical element (220) and the second optical element (250) are arranged at the specific point in time such that the intermediate images of the optical elements (220, 250) are located within the same object plane (410, 415).

5. A third optical device (300) having a third optical element (315) that can be illuminated by a third light source (305) and is movable along a third optical axis (310), wherein the third optical device (300) is disposed away from the first and second optical devices (205, 235), the third optical axis (310) has an intersection point (260) with the first and second optical axes (245), and the camera module (115) to be confirmed can be disposed in the region of the intersection point (260). The device (200) according to claim 1 or 2.

6. A method (600) for checking the adjustment state of an image sensor (120) of a camera module (115), the method (600) comprising the following steps (605, 610, 615): Moving (605) a first optical element (220) that can be illuminated by a first light source (210) along a first optical axis (215) of a first optical device (205), wherein the first optical axis (215) substantially corresponds to the optical axis (225) of the camera module (115) to be confirmed; Moving a second optical element (250) that can be illuminated by a second light source (240) along a second optical axis (245) of a second optical device (235), wherein the second optical device (235) is disposed at a distance from the first optical device (205), and the first optical axis (215) has an intersection point (260) with the second optical axis (245) within the camera module (115); Reading (610) a position information item (275) representing the positions of the first optical element (220) and the second optical element (250) detected at a specific time, and reading an image signal (285) representing an image information item detected by the image sensor (120) at the specific time; Assigning the position to the image information using the image signal (285) and / or the position information (275) to determine the adjustment state of the camera module (115) (615). The method (600).

7. Including a step (700) of outputting a position trigger signal (405) to determine the time point for detecting the positions of the first and / or second optical elements (220, 250), and the position information (275) is provided in response to the position trigger signal (405). The method (600) according to claim 6.

8. Including a step (805) of outputting an image trigger signal (500) to determine the time point for detecting the image information, wherein the image signal (285) is provided in response to the image trigger signal (500), the method (600) according to claim 6 or 7.

9. Including a step (705) of storing the image information and / or the positions of the first and second optical elements (220, 250), wherein the storing step (705) is performed before the reading step (610), the method (600) according to claim 6 or 7.

10. The method (600) according to claim 6 or 7, wherein the first optical element (220) is moved at a first speed and the second optical element (250) is moved at a second speed different from the first speed.

11. The method (600) according to claim 10, wherein the first and second speeds have values greater than 0 m / s at any time point, and / or the time profiles of the first and second speeds can be mathematically described by a non-linear function.

12. Including a step (800) of providing a movement signal (420), wherein the movement signal (420) represents a specification of a position to be approached by the optical elements (220, 250), and in particular, the specification is stored as a position table (430), the method (600) according to claim 6 or 7.

13. A computer program configured to execute and / or operate the steps (605, 610, 615) of the method (600) according to claim 6 or 7.

14. A machine-readable storage medium storing the computer program according to claim 13.

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