Gas sensor testing method and gas sensor testing device

Abstract

To solve such a problem that, in a condensation test, high-temperature and high-humidity gas and low-temperature and low-humidity gas are injected to a test container but pressure in the test container changes following injection of the gas.SOLUTION: A gas bag 102 is made of a flexible, light-transmissive material in a bag-like shape. A low-temperature and low-humidity gas generator 122 generates low-temperature and low-humidity gas. When a switch 107c is opened, the low-temperature and low-humidity gas is injected to the gas bag 102 to dry a gas sensor 105 that performs measurement. A high-temperature and high-humidity gas generator 121 generates high-temperature and high-humidity gas. When the switch 107a is opened, the high-temperature and high-humidity gas is injected to the gas bag 102 to cause condensation in the gas sensor 105. The gas bag 102 expands with the injection of the gas, and a constant value is maintained in the pressure in the gas bag 102.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a test or evaluation device and a test or evaluation method that can maintain a constant gas or gas concentration and pressure.The present invention also relates to a test device and a test method that generate a state in which the pressure of a gas obtained by mixing air or the like with a specific gas is maintained constant when testing or evaluating a gas sensor, etc.The present invention also relates to a test or evaluation device that generates a condensation state while maintaining a constant air pressure.

[0002] The present invention relates to a test device and a test method for leaking and mixing a gas such as a gas at a specific gas concentration while maintaining a constant pressure, and to a test device and a test method for easily performing condensation tests.

[0003] The present invention also relates to sensor testing equipment and sensor evaluation equipment for gas sensors (gas sensors) that detect specific gases. The present invention also relates to adjustment equipment and adjustment devices that check and adjust the accuracy of gas sensors, etc. The present invention also relates to testing, accuracy adjustment, and evaluation equipment and methods for electronic devices, mechanical devices, and electrical devices in an environment where a specific gas is mixed. Or, the present invention also relates to condensation test equipment. The present invention also relates to accuracy adjustment, evaluation equipment, test equipment, and test methods for electronic devices, mechanical devices, and electrical devices in an environment where gases with different humidity and temperatures are injected or discharged and condensation occurs.

[0004] The present invention relates to a gas bag having optical transparency and flexibility, and to a testing device or evaluation device having a container that can be deformed or changed in shape by injecting or discharging gas or the like. [Background technology]

[0005] JP 2016-090482 A discloses a dew condensation test device that holds an object to be tested in a low-temperature, low-humidity gas, and then holds the object in a high-temperature, high-humidity gas to cause dew condensation.

[0006] In daily life, when a vehicle that has been driven in winter is put into a garage, condensation or frost may suddenly form on the vehicle immediately after the vehicle is put into the garage. Similarly, when a person who has been outside in winter returns to a heated room, condensation or frost may suddenly form on the person's accessories. Condensation on equipment may cause it to malfunction. Furthermore, devices that are affected by pressure, etc., may operate differently due to pressure changes in the test environment, and detection or reaction accuracy may change. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Patent Publication No. 2016-090482 Summary of the Invention [Problem to be solved by the invention]

[0008] The sensor device such as the gas sensor 105 detects and monitors the leakage of a specific gas, etc. Normally, the gas sensor 105 has a function of detecting the specific gas in a state where the specific gas has been leaked or otherwise mixed and reaches a certain concentration or more, and issuing an alarm, etc.

[0009] The gas sensor 105 needs to react or detect a certain concentration of a specific gas with high accuracy. However, when the pressure of the mixed gas changes, a gas sensor placed in the mixed gas may react to a specific gas that has leaked even at a low concentration, as the relative concentration of the gas changes. In particular, condensation on the gas sensor may easily cause false detection.

[0010] Gas sensors need to be inspected to determine whether they can properly detect a specific gas even when the environment changes, and they need to be adjusted so that they can detect a specific gas within a detection range or at a specified concentration. Therefore, there is a demand to reproduce the test environment when adjusting or evaluating a gas sensor.

[0011] Conventional testing devices for gas sensors and the like reproduce a test environment in which a specific gas is mixed with air or the like. A gas sensor is placed in a test vessel filled with air and having a specified volume, and the specific gas is injected into the test vessel. When the specific gas is injected into the test vessel, the gas pressure in the test vessel changes to the high pressure side. Therefore, the gas sensor may react below the specified detection limit. Because the pressure changes, it is difficult to measure or understand the concentration of the injected specific gas relative to the air in the test vessel.

[0012] In the dew condensation test for mixed gas, dew is condensed on the gas sensor by switching between a low-temperature, low-humidity mixed gas and a high-temperature, high-humidity mixed gas.

[0013] When gas is replaced, the pressure of the mixed gas changes. When the pressure changes, the detection limit of the gas sensor changes. This makes it difficult to accurately evaluate the response of the gas sensor to a specific gas.

[0014] Conventionally, tests on gas sensors and the like are performed by injecting gas into a sturdy case (such as a glove box) (testing device). In this case, the pressure inside the case changes according to the amount of gas injected, which changes the detection sensitivity of the gas sensor, making it complicated or difficult to grasp the concentration. This makes it difficult to accurately evaluate the detection accuracy of the gas sensor. [Means for solving the problem]

[0015] In the present invention, the test container is constructed of a light-transmitting bag-like structure and material that flexibly expands and contracts. As an example, the test container of the test or evaluation device of the present invention is a gas bag, and when gas is injected into the test container, the test container expands while maintaining a constant internal pressure. Also, when gas is discharged from the test container (gas bag), the test container contracts while maintaining a constant internal pressure. Therefore, the gas pressure in the test container is maintained at a predetermined value.

[0016] The testing device of the present invention comprises a flexible gas bag (test vessel) 102, a first injecting / discharging section for injecting or discharging a first gas into or from the gas bag 102, and a second injecting / discharging section for injecting or discharging a second gas into or from the gas bag 102. The gas bag 102 contracts or expands based on the injection or discharge of the first gas or the second gas. Since the gas bag contracts or expands based on the injection or discharge of gas, the pressure inside the gas bag (test vessel) 102 does not change and atmospheric pressure is maintained.

[0017] The testing device of the present invention comprises a flexible gas bag 102, a first gas generator 121 that generates a high-temperature, high-humidity first gas, a second gas generator 122 that generates a low-temperature, low-humidity second gas, and an injection / discharge unit that injects / discharges the first gas or the second gas into / from the gas bag 102. The gas bag 102 contracts or expands based on the injection / discharge of the first gas or the second gas.

[0018] In the testing device of the present invention, the gas bag 102 is made of a flexible, light-transmitting material in a bag shape. Also, a test container whose volume or capacity can be changed or altered is used. Since the gas bag 102 or the test container has light transmittance, the state of the gas sensor 105 to be measured or evaluated can be observed.

[0019] The low temperature, low humidity gas generator 122 generates a low temperature, low humidity gas, and by opening the switch 107c, the low temperature, low humidity gas is injected into the gas bag 102 and dries the gas sensor 105 to be measured. The high temperature, high humidity gas generator 121 generates a high temperature, high humidity gas, and by opening the switch 107a, the high temperature, high humidity gas is injected into the gas bag 102 and condenses on the gas sensor 105. The gas bag 102 expands due to the injection of gas, and the pressure inside the gas bag 102 is maintained at a constant value. The high temperature, high humidity gas and the low temperature, low humidity gas are circulated as necessary. Effect of the Invention

[0020] In the present invention, an evaluation, measurement, or test object is placed in the gas bag 102. The gas bag 102 expands in response to the volume of gas injected and contracts in response to the volume of gas discharged, so that the pressure inside the gas bag 102 is maintained at a constant value. The volume of the gas bag is the sum of the volume of air or the like and the volume of the specific gas. Therefore, the concentration of a specific gas in air can be determined by a simple calculation, making it possible to conduct tests while maintaining a constant gas concentration and gas pressure.

[0021] The test vessel or gas bag contracts or expands when gas is injected or discharged, so that the pressure inside the test vessel or gas bag is maintained at a constant value such as atmospheric pressure. [Brief description of the drawings]

[0022] [Figure 1] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Diagram 2] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Diagram 3] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 4] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Diagram 5] 1 is an explanatory diagram of a dew condensation test device and a dew condensation test method according to the present invention. [Figure 6] 1 is an explanatory diagram of a dew condensation test device and a dew condensation test method according to the present invention. [Figure 7] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 8] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 9] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 10] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 11]FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 12] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 13] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 14] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. [Figure 15] FIG. 2 is an explanatory diagram of a test device and a test method for a mixed gas according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] The present invention will be described below based on the drawings showing the embodiments. In the embodiments described in the specification, in order to facilitate understanding, elements having the same functions are given the same reference numerals in each drawing, and descriptions thereof may be omitted. In addition, the embodiments of the present invention may be combined with each other. In addition, in order to facilitate understanding and to facilitate illustration, the drawings may be enlarged, reduced, or omitted.

[0024] The embodiments and contents described in the present specification and drawings can be combined with each other. It goes without saying that a part of an embodiment can be used and combined with another embodiment.

[0025] The present invention will be described by taking as an example an evaluation or setting of the gas sensor 105, measurement of accuracy, etc. as an embodiment, but is not limited thereto. Any configuration or method may be used as long as it injects or exhausts air or a specific gas into the gas bag 102, injects or exhausts low-temperature, low-humidity air / high-temperature, high-humidity air, etc., and heats or cools the air or gas in the gas bag 102. Any configuration or method may be used as long as it places or can place a sample to be measured or evaluated in the gas bag 102. The sample to be evaluated or measured is not limited to a gas sensor, but may be electronic or electrical devices such as notebook computers, smartphones, mobile phones, etc., mechanical devices having a drive unit such as an XY stage, printed circuit boards, flexible boards, driver ICs, etc., or compositions, materials, etc. used therefor.

[0026] The test vessel 102, the gas bag 102, the test device, and the test method of the present invention can realize high temperature and high humidity and low temperature and low humidity environments. Also, they can realize bias tests. The high temperature and high humidity bias test is also called THB.

[0027] 1, 5, 6, 7, etc., the present invention can easily realize a mixed gas of a predetermined concentration, a high-temperature and high-humidity environment, or a low-temperature and low-humidity environment by arranging or placing a sample in a gas bag 102, etc., in the gas bag 102, etc. A voltage or current can be supplied to the sample in the gas bag 102.

[0028] For example, the present invention can accelerate the corrosion that occurs in metals and evaluate their durability. Although the present invention can sufficiently promote the corrosion of metals by temperature and humidity alone in the presence of impurities, it can also apply a bias to induce corrosion by potential difference.

[0029] Voltage is applied to samples (electronic components and equipment such as power devices) under high temperature and humidity conditions to evaluate their insulation. Insulation includes short circuits between conductors due to ion migration, increases in insulation leakage current, increases in gate leakage current, and breakdown of gate insulating films. The present invention can be used to test and evaluate these materials and structures.

[0030] The testing device or method of the present invention detects failure phenomena such as breakdown of an insulating film, continuous breakdown of an insulating film, and electric field corrosion of metal film wiring by measuring an increase in insulation leakage current, an increase in gate leakage current, breakdown of a gate insulating film, and ion migration between wiring.

[0031] In particular, humidity is a major factor affecting ion migration. When condensation occurs, wet ion migration occurs, which can cause instantaneous insulation breakdown.

[0032] In this embodiment, the gas injected into or discharged from the gas bag 102 is described as a gas, but the gas is not limited to a gas. For example, liquid such as pure water or alcohol may be used. When liquid is injected into the gas bag 102, the gas bag 102 expands, and the pressure inside the gas bag 102 is maintained at a constant value. When liquid is discharged from the gas bag 102, the gas bag 102 contracts, and the pressure inside the gas bag 102 is maintained at a constant value.

[0033] In the embodiment of the present invention, a high-temperature, high-humidity gas or a low-temperature, low-humidity gas is injected into the gas bag 102, but the present invention is not limited to this. For example, a container filled with water may be placed in the gas bag 102, and the water may be heated by a heater or the like to generate high-temperature, high-humidity water vapor. Since the gas bag 102 becomes hot, the gas expands, and the volume of the gas bag 102 increases in accordance with the expansion of the gas. Therefore, the pressure inside the gas bag 102 is maintained at a constant value or atmospheric pressure.

[0034] Generally, gases obey Boyle's law. Charles' law states that under constant pressure, volume is proportional to absolute temperature. Boyle's law states that under constant temperature, pressure is inversely proportional to volume. When P is pressure, V is volume, and T is temperature, Boyle's law states that "At constant temperature, the volume V of a constant amount of gas is inversely proportional to the pressure p." Charles' law Since "at constant pressure, the volume V of a certain amount of gas is proportional to the absolute temperature T," the formula of the general theorem is as follows. P1V1 / T1=P2V2 / T2 (formula 1)

[0035] In the conventional testing device, the volume V of the test vessel in which the gas sensor and other components are placed is constant, so that when the gas to be detected is injected into the test vessel V, the pressure P inside the test vessel V increases. In addition, when the temperature T inside the test vessel increases, the pressure P inside the test vessel V also increases. In the present invention, a gas bag 102 is used as the container, or a test container 102 whose volume changes according to the capacity is used.

[0036] When gas is injected, the volume V increases. The gas bag 102 expands, and the volume of the gas bag 102 increases, so the pressure remains constant. When gas is exhausted from the gas bag 102, the volume V decreases. The gas bag 102 contracts, and the volume of the gas bag 102 decreases, so the pressure remains constant.

[0037] The test vessel or gas bag 102 of the present invention is preferably constructed from a light-transmitting material such as polycarbonate, polyethylene terephthalate, or polyvinyl chloride.

[0038] The unit of gas concentration is vol% (volume percent). For example, 100 cm 3 When a gas contains a certain amount of gas, the gas concentration is expressed as XX vol%. For example, oxygen is present in the air in a natural environment at a relatively high rate of about 21%, so the unit of gas is "vol%". When expressed in vol%, oxygen is "about 21 vol%".

[0039] Another unit for expressing gas concentration is %LEL (present Lower Explosion Limit). It represents the lower explosion limit of the target gas. %LEL is a unit that expresses the concentration when the lower explosion limit (LEL) of the target gas is taken as 100%. If the gas is present in the air at or above that value, it indicates the concentration at which an explosion may occur.

[0040] UEL (Upper Explosion Limit) is the upper explosion limit concentration, and if the concentration falls between the LEL value and the UEL value, there is a possibility of an explosion. The lower explosion limit concentration and upper explosion limit concentration differ depending on the type of gas.

[0041] In the case of hydrogen gas, the lower explosion limit is 4 vol%, which is the 100% LEL of hydrogen gas. Therefore, in the case of hydrogen gas, 4 vol% = 100% LEL, so 1 vol% of hydrogen gas is 25% LEL.

[0042] The lower explosive limit of methane gas is 5.0 vol%, so 1 vol% of methane gas is 20% LEL. The lower explosive limit of propane gas is 2.1 vol%, so 1 vol% of propane gas is approximately 47.6% LEL.

[0043] There are many types of gas sensors 105, such as solid-state sensors (MEMS hot wire semiconductor sensor (MCH), hot wire semiconductor sensor (CH), substrate type semiconductor sensor (AET), catalytic combustion sensor (CS), gas thermal conduction sensor (CT)), electrochemical sensors (controlled potential electrolysis sensor (COS), galvanic cell sensor (OS)), and infrared sensors (non-dispersive infrared sensor (NDIR)).

[0044] In the present invention, a gas sensor 105 that is a non-dispersive infrared sensor (NDIR: Non-Dispersive InfraRed (Non-Dispersive InfraRed Absorption Method)) is taken as an example of a sample to be measured or evaluated.

[0045] NDIR gas sensors utilize the property that gas molecules absorb infrared rays of specific wavelengths. A typical gas, CO2, absorbs infrared rays in the 4.3μm band, while the refrigerant gas R32 absorbs infrared rays in the 3.3μm band.

[0046] The NDIR method is composed of an infrared light source (light emitter), an infrared sensor, and a housing (optical cavity). The infrared light emitted from the infrared light source is absorbed by the gas molecules present in the housing and attenuates as it reaches the infrared sensor. The gas concentration can be calculated from the difference in the amount of infrared light that reaches it.

[0047] The higher the gas concentration, the more infrared light is absorbed by the gas molecules, and the smaller the infrared sensor output becomes. On the other hand, when the gas concentration is low, this output becomes larger. This output can be calculated based on the Beer-Lambert law to calculate the gas concentration.

[0048] The gas sensor 105 reacts when the concentration of a specific gas exceeds a detection threshold. However, even if the concentration of the specific gas in the test container is constant, the relative sensitivity may change when the pressure P in the installation environment of the gas sensor 105 changes. It will operate even if the concentration of the specific gas is below the detection threshold, resulting in a false detection. The pressure V also changes when the temperature of the gas in the test vessel changes, as the gas expands.

[0049] If the test vessel in which the test equipment sample is placed is a sturdy vessel with a fixed volume, the pressure inside the vessel will change when a specific gas or other substance is injected into the vessel. In that case, the concentration of the specific gas must be measured by measuring the pressure P and temperature V, and testing must be performed while maintaining these values.

[0050] In a conventional test device with a fixed size test vessel, the pressure V and other parameters change depending on the temperature of the gas in the test vessel and the volume of the specific gas injected, making it difficult to accurately evaluate the gas sensor 105. Also, it is difficult to evaluate and adjust the gas sensor 105 while fixing the temperature T and pressure V to constant values.

[0051] 1 is an explanatory diagram and a configuration diagram of a testing device of the present invention. A gas sensor 105 to be tested and other components are placed in a gas bag 102, which is a test container. A fan 104 for stirring the gas inside the gas bag 102 and other components are placed inside the gas bag 102.

[0052] The present invention is characterized by using a gas bag 102 whose capacity as a test vessel is not fixed. When a specific gas is injected into the gas bag 102, the gas bag 102 expands. When the specific gas is discharged from the gas bag 102, the gas bag 102 contracts. Therefore, the pressure V inside the gas bag 102 is maintained at a constant value (atmospheric pressure, etc.).

[0053] When the air or the like in the gas bag 102 is heated and expands, the gas bag 102 expands. When the air or the like in the gas bag 102 is cooled, the gas bag 102 contracts. Even if the gas in the gas bag 102 expands or contracts due to heating or cooling, the pressure V of the air or the like in the gas bag 102 is maintained at a constant value.

[0054] Therefore, when the gas expands or contracts by heating or cooling the gas within the gas bag 102, the gas bag 102 expands or contracts accordingly, and the pressure within the gas bag 102 is maintained at a predetermined value or atmospheric pressure.

[0055] The gas bag (gas pouch) 102 is a bag-shaped bag formed or configured, for example, from a polyethylene sheet or the like. By injecting gas into the gas bag 102, the gas bag 102 expands. By discharging the gas, the gas bag 102 contracts. Even if gas or the like is injected into or discharged from the gas bag 102, the pressure inside the gas bag 102 does not change. Alternatively, an approximately constant pressure is maintained. By expanding or contracting the gas bag 102, the pressure of the air or the like inside the gas bag 102 is maintained at a constant value, and the pressure around (environment of) the gas sensor 105 is held at a constant value.

[0056] To adjust the sensitivity and measure the accuracy of the gas sensor 105, a specific gas is injected into the gas bag 102 to change the concentration of the specific gas in the gas bag 102. When the specific gas is injected, the gas bag 102 expands, and the pressure in the gas bag 102 is maintained at a (approximately) constant value (predetermined value) even when the characteristic gas is injected. Furthermore, when the air or the like in the gas bag 102 is discharged, the gas bag 102 contracts, and the pressure in the gas bag 102 is maintained at a (approximately) constant value (predetermined value). The gas bag 102 is formed or configured from a light-transmitting material so that the state of the sample and the like inside can be observed.

[0057] The gas bag 102 (test container 102) has an opening, to which a pipe 108 and a circulation pipe 123 can be attached. Gas can be injected (flowed in) into the gas bag 102 and can be discharged (flowed out) to the outside of the gas bag 102 via the pipe 108 or the like. An exhaust duct, an exhaust port, an injection port, or a gas intake port may be provided instead of the pipe 108.

[0058] A gas sensor 105 to be evaluated or tested and the like are placed or installed inside the gas bag 102. Also, a fan 104 for stirring the gas inside the gas bag 102 is placed or installed. Also, a thermo-hygrometer 115 for measuring the temperature and humidity of the gas inside the gas bag 102 is placed or installed, and a concentration meter 114 for measuring the concentration of the mixed gas is placed or installed.

[0059] The gas sensor 105, the temperature and humidity meter 115, the concentration meter 114, and the fan 104 are controlled by a controller 117 disposed outside the gas bag 102. The output data of the gas sensor 105 is recorded in the controller 117.

[0060] The gas concentration meter 114 is a device used to measure the concentration of a gas. It can measure a single or multiple items of a target gas. There are many types of gases that can be measured by the gas concentration meter 114, such as carbon dioxide, nitrogen oxides, harmful gases, and flammable gases.

[0061] The gas bag 102 is preferably made of polyvinyl fluoride resin, which has excellent resistance to inorganic gases and organic solvents. In addition, in order to operate the instruments placed inside the gas bag 102, gloves 212 are attached so that hands can be inserted from the outside. By inserting the arms of the gloves 212, settings and adjustments of samples and the like inside the gas bag 102 can be performed.

[0062] A pipe 108 for inflowing or outflowing a specific gas is attached to the gas bag 102. A gas flow meter 109 (gas flow meter 109a, gas flow meter 109b) is attached to the pipe 108. The gas flow meter 109 may be any of an ultrasonic type, a Coriolis thermal type, a thermal type, and a differential pressure type, but an ultrasonic type is preferable. An exhaust duct 101 is attached to the gas bag 102. The exhaust duct 101 may be an exhaust pump or the like. A shutter 118 is attached to the exhaust duct 101. By closing the shutter (partition) 118, the inside of the gas bag 102 is isolated from the outside environment.

[0063] The fan 104 in the exhaust duct 101 operates to exhaust the gas in the gas bag 102 to the outside. When the gas in the gas bag 102 is exhausted to the outside, the inside of the gas bag 102 contracts, and the volume of the gas bag 102 becomes smaller. When gas or gas is injected into the gas bag 102 from the outside, the gas bag 102 expands. That is, the volume of the gas bag 102 increases.

[0064] Since the gas bag 102 is formed or constructed of a flexible material, the gas pressure V within the gas bag 102 is maintained at atmospheric pressure even when gas or gases are injected or exhausted.

[0065] For example, if 90 liters (L) of air is injected into the gas bag 102, followed by 10 liters (L) of the specified gas, the volume will be 100 L, and the concentration of the specified gas will be 10%. If 90 liters (L) of air is injected into a test container with a fixed volume, and then an additional 10 liters of the specified gas is injected, the pressure inside the test container will increase. With gas sensors and the like, the detection threshold changes when the pressure changes, even with the same specified gas concentration.

[0066] In the present invention, when gas is injected into the gas bag 102, the gas bag 102 expands in accordance with the volume of the injected gas. Therefore, the amount of the mixed gas injected can be easily grasped.

[0067] In the present invention, when 90 liters (L) of air is injected into the gas bag 102, and then 10 liters of a specific gas is injected, the gas bag 102 expands, and the pressure inside the gas bag 102 does not change. In other words, the pressure inside the gas bag 102 does not change before and after the injection of the specific gas.

[0068] Since the volume of the gas in the gas bag 102 is the sum of the volumes, it is easy to grasp and calculate the concentration. Therefore, the detection threshold of the gas sensor or the like does not change, and it is possible to perform evaluation and inspection with high accuracy at a predetermined concentration.

[0069] In one embodiment, an NDIR gas sensor 105 is used as an example of a test, evaluation, or adjustment target. However, the target of the present invention is not limited to a gas sensor. The target sample may be any of electronic devices, electrical devices, mechanical devices, thin film devices, materials, etc.

[0070] The NDIR method, which measures the infrared absorbance specific to various gases, introduces the gas into the optical path, measures the attenuation of the light (absorbance), and converts it into concentration. By also measuring a reference wavelength with no absorption, more accurate measurements can be achieved.

[0071] In the NDIR method of measuring infrared absorbance, an output signal proportional to the concentration of a specific gas is output. In the NDIR method of measuring infrared absorbance, an output signal corresponding to the ratio of a specific gas is output. Even if the concentration is constant, if the pressure changes, the density of the specific gas at a certain distance may change even if the distance between the light source 203 and the detector 201 is constant.

[0072] Therefore, when the pressure increases, the concentration does not change, but the output of the gas sensor 105 increases. When the pressure decreases, the concentration does not change, but the output of the gas sensor 105 decreases. Therefore, the output of the gas sensor 105 changes depending on the pressure. This causes errors in the accuracy of the evaluation and inspection of the gas sensor 105.

[0073] Examples of specific gases include CO2 (carbon dioxide / carbon dioxide), CO (carbon monoxide), CH4 (methane), C2H4 (ethylene), CH3Br (methyl bromide), SF6 (sulfur hexafluoride), NO (nitric oxide), N2O (nitrous oxide), NH3 (ammonia), SO2 (sulfurous acid gas), SO2F2 (sulfuryl fluoride), and refrigerant gases (fluorocarbons and alternative fluorocarbons). In this embodiment, an alternative refrigerant (alternative fluorocarbon) such as R32 or R410A is used as an example for explanation.

[0074] As shown in FIG. 1, a pipe 108a is attached to the gas bag 102, through which a specific gas flows in. Also, a pipe 108b is attached to which a base gas such as air to be mixed with the specific gas flows in. An open / close pipe (switch) 107 is attached to the pipe 108. The open / close state of the open / close pipe (switch) 107 is controlled by a controller 117. Also, the open / close state of the shutter 118 is controlled by the controller 117. The switch 107 may be opened and closed at a predetermined time or period, or at a predetermined interval, by a timer (not shown).

[0075] 1(a), when the shutter 118 is opened and the fan 101 is operated, the air in the gas bag 102 is discharged and the volume (capacity) of the gas bag 102 is contracted (decreased). When the shutter 118 is opened and the fan 101 is rotated in the reverse direction, air is injected into the gas bag 102 and the volume (capacity) of the gas bag 102 is expanded (increased). The test container 102 of the testing device of the present invention is flexible and can contract, expand, and deform in accordance with changes in the volume (capacity) of the gas inside.

[0076] A gas flow meter 109 is attached to the pipe 108, and measures the amount of gas flowing (injected) or discharging (exhausted) into the gas bag 102, so that a predetermined value can flow in and out of the gas bag 102. The switch 107 closes / opens at a predetermined gas amount. The gas flow meter 109 and switch 107 are controlled by a controller 117. A dilution gas such as air is injected into the gas bag 102 from the pipe 108b. A specific gas such as a fluorocarbon alternative is injected into the gas bag 102 from the pipe 108a.

[0077] 1(a), a gas sensor 105 is placed in a gas bag 102. The gas bag 102 has a zipper portion on the side, and the gas sensor 105 can be inserted into the gas bag 102 through the zipper portion.

[0078] Next, the shutter 118 is closed and the fan 104a is operated to exhaust the air inside the gas bag 102. Due to the exhaustion of the air, the gas bag 102 contracts (its volume becomes smaller).

[0079] The gas bag 102 is bag-shaped and flexible, so that the pressure inside the gas bag 102 is maintained even if the air or the like in the gas bag 102 is discharged and the volume shrinks.

[0080] Next, the shutter (partition, separator) 118 is closed, and air (outside air) is injected into the gas bag 102 through the pipe 108b. The injection of air causes the gas bag 102 to expand (inflate) as shown in FIG. 1(b). The volume of air to be injected is measured by a gas flow meter 109b, or is separately measured (measured) and adjusted by a syringe 111. Since the syringe 111 allows the amount of a specific gas to be directly read according to the scale, it is possible to accurately inject an amount of a specific gas into the gas bag 102. Since the gas bag 102 is deformed (expanded, contracted) by the injection or discharge of gas or liquid, the amount of gas, etc., injected or discharged can be quantitatively grasped. In addition, the mixture ratio (concentration) of the gas can be quantitatively grasped and measured.

[0081] Next, a specific gas (alternative fluorocarbon) is injected into the gas bag 102 from the pipe 108a. The injection of the specific gas causes the gas bag 102 to expand (inflate) by the volume of the specific gas. The volume of the specific gas to be injected is measured by a gas flow meter 109a or is separately measured (measured) and adjusted by a syringe 111.

[0082] The volume of the gas bag 102 increases by injecting air or the like into the gas bag 102. Since the gas bag 102 is bag-shaped and the bag has flexibility, the pressure inside the gas bag 102 is maintained at atmospheric pressure or the like even if the volume of the gas bag 102 increases as air or the like is injected into the gas bag 102. Since the specific gas (alternative fluorocarbon, etc.) is measured by changing the %LEL, the specific gas (alternative fluorocarbon, etc.) is divided into several stages and injected into the gas bag 102 successively.

[0083] The %LEL changes depending on the volume of the specific gas injected. Every time the volume of the specific gas injected into the gas bag 102 is changed, the gas sensor 105 is evaluated and inspected. A fan 104b is disposed within the gas bag 102. The fan 104b agitates the air and the specific gas within the gas bag 102 so that they are mixed uniformly.

[0084] 1(a) and 1(b), in the present invention, the gas bag 102 expands and contracts based on the injection and discharge of a specific gas into and from the gas bag 102. Therefore, the pressure inside the gas bag 102 is adjusted to or maintained at atmospheric pressure, etc. Needless to say, if further adjustment is required, the pressure can be maintained at a constant value by opening the switch 107.

[0085] 2 is an explanatory diagram of a method for inspecting and evaluating a gas sensor 105 of the present invention. The gas sensor will be described by taking as an example a gas sensor for a specific gas (for example, an alternative fluorocarbon gas). The gas sensor reacts to the alternative fluorocarbon gas, outputs an output signal corresponding to the concentration of the specific gas, and outputs an alarm or signal when the concentration exceeds a predetermined threshold. The specific gas (alternative fluorocarbon gas) will be described as being diluted (mixed) with the atmosphere (air).

[0086] By applying pressure from the outside of the gas bag 102, the volume inside the gas bag 102 can be reduced. In other words, the pressure inside the gas bag 102 can be changed. Therefore, the pressure dependency of the gas sensor 105 can be easily observed.

[0087] However, it goes without saying that the subject of the present invention is not limited to the gas sensor 105 for alternative fluorocarbon gases. Examples of sensors that can be used for not only alternative fluorocarbon gases but also CO2 (carbon dioxide / carbon dioxide), CO (carbon monoxide), CH4 (methane), C2H4 (ethylene), CH3Br (methyl bromide), SF6 (sulfur hexafluoride), NO (nitric oxide), N2O (nitrous oxide), NH3 (ammonia), SO2 (sulfurous acid gas), SO2F2 (sulfuryl fluoride), and refrigerant gases (fluorocarbons and alternative fluorocarbons) are given. In addition, nitrogen gas, argon gas, oxygen, etc. may be used as the atmosphere (air) to be mixed.

[0088] 2(a), the switch 107b is opened from within the gas bag 102, and the air and the like within the gas bag 102 are discharged from the pipe 108b. Also, the switch 107a is opened, and air is injected from the outside into the gas bag 102, and the gas in the gas bag 102 is returned to its initial state (the specific gas and the like from the previous test are discharged from within the gas bag 102). Also, the temperature and humidity meter 115 and the (gas-gas) concentration meter 114 are reset and returned to their initial states.

[0089] 2(b), switch 107b is closed and switch 107a is opened to inject air into gas bag 102. Injection of air (outside air) causes gas bag 102 to expand.

[0090] 2(c), switch 107a is closed, switch 107b is opened, and the specific gas is injected from pipe 108b into gas bag 102. Gas bag 102 expands due to the injection of the specific gas.

[0091] The fan 104 in the gas bag 102 operates to agitate the gas in the gas bag 102, and the specific gas is mixed with the air. In addition, the (gas-gas) concentration meter 114 measures and records the concentration of the specific gas for reference. At the same time, the temperature and humidity meter 115 measures and records the temperature and humidity in the gas bag 102. The temperature, humidity, and concentration are transferred to the controller 117 and stored.

[0092] When the mixed gas in the gas bag 102 becomes uniform, the output signal and threshold data of the gas sensor 105 are measured, and the operating state of the gas sensor 105, the detection state of the specific gas, and the reaction state of the threshold are inspected, evaluated, and the accuracy is measured or recorded. The results are transferred to and stored in the controller 117. The results are also processed as described in Figures 12, 13, 14, etc.

[0093] The atmospheric air (air) injected into the gas bag 102 is set to a volume for carrying out inspection and evaluation when the specific gas is injected. For example, if the volume of gas put into the gas bag 102 is 50 L (liters), and the concentration of the specific gas at the time of inspection / evaluation of the gas sensor 105 is 10%, 45 L of atmospheric air is injected and 5 L of the specific gas is injected. When 45 L of air is injected, the gas bag 102 expands by a volume of 45 L, but the pressure inside the gas bag 102 is maintained at atmospheric pressure. Next, when 5 L of the specific air is injected, the gas bag 102 expands by a volume of +5 L, totaling 50 L, but the pressure inside the gas bag 102 is maintained at atmospheric pressure.

[0094] Next, when the concentration is 20%, if 15 L of the specific gas is injected and 35 L of air is injected, the specific air will be 5 L + 15 L = 20 L, and the air will be 45 L + 35 L = 80 L, so the gas volume in gas bag 102 will be 100 L and the concentration of the specific gas will be 20%. Even in the above cases, gas bag 102 will expand, but the pressure in gas bag 102 will be the same as when the concentration is 10%. By injecting a specific gas in stages, the evaluation and measurement method of FIG. 12 can be carried out.

[0095] In Fig. 2(d), the specific gas is additionally injected into the gas bag 102 to vary the concentration of the specific gas in the gas bag 102. By injecting the specific gas, the volume in the gas bag 102 increases and the gas bag 102 expands, but the pressure in the gas bag 102 is maintained at a constant value (atmospheric pressure, etc.). With each change in the concentration of the specific gas, the operating state of the gas sensor 105, the detection state of the specific gas, and the reaction state of the threshold are inspected, evaluated, and the accuracy is measured or recorded. The results are transferred to the controller 117 and stored.

[0096] In the present invention, even if a specific gas is additionally injected, the gas bag 102 expands according to the volume of the injected specific gas, so that the volume of the injected specific gas can be quantitatively measured or understood. Also, the mixture ratio and concentration of the mixed gas can be quantitatively measured or understood.

[0097] 3, a heater 106 for heating the air in the gas bag 102 is disposed or installed in the gas bag 102. When the air in the gas bag 102 is heated (warmed), the air expands, and the gas bag 102 expands with the expansion of the air, as shown in FIG. 3(a) to FIG. 3(b).

[0098] In order to evaluate the temperature dependency of the gas sensor 105, the temperature around the gas sensor 105 is changed. Even if the temperature inside the gas bag 102 changes, the pressure inside the gas bag 102 does not change because the gas bag 102 expands or contracts. Therefore, the temperature dependency of the gas sensor 105 can be evaluated or measured.

[0099] The heater 106 causes the air in the gas bag 102 to rise, causing the gas bag 102 to expand. As shown in FIG. 3B, even if the gas bag 102 expands, the gas bag 102 expands as the internal volume increases. Therefore, the pressure inside the gas bag 102 does not change.

[0100] In the above embodiment, the gas bag 102 is heated by the heater 106, but the present invention is not limited to this. For example, the air inside the gas bag 102 can be cooled by arranging a Peltier element or the like that cools the temperature inside the gas bag 102. When the gas inside the gas bag 102 is cooled, the gas bag 102 contracts. Even if the gas bag 102 contracts, there is no change in the pressure inside the gas bag 102. Alternatively, a predetermined pressure state is maintained. It goes without saying that the gas bag 102 may be heated or cooled from the outside to heat or cool the gas inside the gas bag 102. When the concentration of a specific gas is to be measured with high accuracy, the volume of the specific gas injected with a syringe 111 is measured as shown in FIG.

[0101] 4, when switch 107a is opened and switch 107b is closed, gas cylinder 112 is connected to syringe 111. A specific gas in gas cylinder 112 is sucked into syringe 111, and the volume of the specific gas is measured using the scale on syringe 111.

[0102] Next, when switch 107a is closed and switch 107b is opened, syringe 111 is connected to gas bag 102. By pushing out the specific gas from syringe 111 and injecting it into gas bag 102, the concentration of the specific gas in gas bag 102 can be set or adjusted with high accuracy.

[0103] In the embodiment of FIG. 4, the volume of a specific gas is measured by the syringe 111, and the specific gas is injected into the gas bag 102. The present invention is not limited to this. For example, the syringe 111 may measure liquids such as water, salt water, alcohol, organic solvents, etc., and inject these liquids into the gas bag 102. Liquids such as water, alcohol (ethanol, methanol, etc.), acetone, toluene, and other organic solvents are stirred in the gas bag 102. The gas sensor 105 can evaluate, observe, and analyze the accuracy of the effects of water, alcohol, etc. Hydrogen fluoride (HF), etc. may be injected into the gas bag 102. It goes without saying that the above can be applied to FIG. 5 and other embodiments of the present invention, or can be combined with them. In the above embodiment, the concentration of a specific gas in the gas bag 102 is set or adjusted, and the gas sensor 105 and the like are evaluated and measured. The gas sensor 105 is affected by condensation in the operating environment. A condensation test is essential for evaluating the operation of the electronic device of the gas sensor 105.

[0104] As the use of electronics increases, automotive electrical equipment (harnesses, ECUs, PCUs, etc.), laptops, smartphones, mobile phones and other mobile devices are exposed to rapid temperature changes when they are moved between indoors and outdoors.

[0105] Condensation caused by such rapid temperature changes significantly affects the performance and functions of sensor devices such as gas sensors and electronic devices, and can cause corrosion, migration, malfunction, etc. For this reason, condensation cycle testing, in which condensation and dry conditions are repeated, is essential. The condensation cycle test using the test device of the present invention can perform a repeated cycle of "low temperature and low humidity" to "normal temperature and high humidity" with a focus on reproducibility of condensation. The evaluation / test device of the present invention can control the temperature and humidity inside the gas bag 102 and perform tests in any combination.

[0106] In addition, by creating a low humidity environment, static electricity is easily generated, so that the impact of static electricity on products can be evaluated. In particular, since the gas bag 102 is flexible, it is easy to observe the state of a specimen (sample) placed inside the gas bag 102 from the outside and to apply static electricity to the specimen (sample). 3 is a configuration diagram and an explanatory diagram of the dew condensation test device of the present invention. The high temperature and high humidity gas generator 121 generates gas of a predetermined temperature and humidity by a two-temperature method and a divided flow method.

[0107] In the two-temperature method, air from a saturation chamber that is saturated with water vapor at a temperature lower than that of the test chamber is sent to the test chamber. If the pressures in both chambers are equal, the relative humidity in the test chamber can be calculated as a percentage of the saturated water vapor at the temperature in the saturation chamber and the saturated water vapor pressure at the temperature in the test chamber. The temperature in the saturation chamber is adjusted to the set temperature in the test chamber to generate air of the specified humidity.

[0108] In the split flow method, dry air is split into two flows, one of which is passed through a saturation tank to be saturated with water vapor, and then the two flows are mixed and sent to the test tank. The relative humidity in the test tank is calculated from the temperature and pressure in both tanks and the split flow ratio of the dry air, so air with the specified humidity is generated by adjusting this split flow ratio.

[0109] The low temperature and low humidity gas generator 122 has a function of generating gas with a predetermined low temperature and low humidity by a two-temperature method or a divided flow method, or a function of cooling and outputting dry air in an air cylinder.

[0110] The low temperature, low humidity gas generator 122 and the high temperature, high humidity gas generator 121 put air, a specific gas, or a gas mixed with a specific gas (nitrogen, argon, etc.) into a high temperature, high humidity state or a low temperature, low humidity state.

[0111] Condensation caused by a sudden change in temperature and humidity can cause product corrosion, leakage due to ion migration, and malfunction. In addition, if the gas sensor 105 detects a specific gas above its detection threshold, it will erroneously detect the specific gas. Condensation occurs when air containing water vapor comes into contact with a cold object and the air is cooled rapidly, causing the water vapor to turn into liquid and adhere to the object, resulting in condensation. In the condensation cycle test, constant temperature and humidity air is sent into a test chamber kept at a low temperature to forcibly cause condensation to occur on the test sample, recreating a condensation condition.

[0112] The testing device of the present invention injects high temperature, high humidity gas output from a high temperature, high humidity gas generator 121 and low temperature, low humidity gas output from a low temperature, low humidity gas generator 122 into a gas bag 102, and performs temperature changes and humidification on the gas sensor 105 etc., which is the object of inspection and evaluation, forcibly causing condensation to occur repeatedly.

[0113] The low temperature state can be achieved by, for example, expanding freon gas or the like in the gas bag 102 to lower the temperature of the gas (air) in the gas bag 102. Conversely, compression generates heat, and the gas (air) in the gas bag 102 can be heated.

[0114] When the high-temperature, high-humidity gas output from the high-temperature, high-humidity gas generator 121 or the low-temperature, low-humidity gas output from the low-temperature, low-humidity gas generator 122 is injected into the gas bag 102, the gas bag 102 expands as shown in Fig. 1(b). Even if the gas bag 102 expands, the pressure inside the gas bag 102 does not change. Alternatively, the pressure level does not affect the inspection or evaluation.

[0115] A container filled with water may be placed inside the gas bag 102, and the water may be heated with an electric heater, gas heater, heater, or the like to generate high-temperature, high-humidity water vapor. Since the gas bag 102 becomes hot, the gas expands. The volume of the gas bag 102 increases in accordance with the expansion of the gas or the amount of water vapor generated. The pressure inside the gas bag 102 is maintained at a constant value or atmospheric pressure.

[0116] 5 and 2, the gas in the gas bag 102 is discharged and air or a specific gas is injected to condense objects such as the gas sensor 105 in the gas bag 102. A condensation cycle test can be performed by repeating the steps of FIG. 2(a) to FIG. 2(d).

[0117] Fig. 5 is an explanatory diagram of the dew condensation test device of the present invention. Fig. 6 is a configuration diagram of the dew condensation test device of the present invention, configured so that the high-temperature, high-humidity gas output from the high-temperature, high-humidity gas generator 121 or the low-temperature, low-humidity gas output from the low-temperature, low-humidity gas generator 122 can be circulated.

[0118] 6, by opening the switch 107b2, the low-temperature, low-humidity gas supplied by the low-temperature, low-humidity gas generator 122 is circulated through the pipe 123b. Also, by opening the switch 107b1, the high-temperature, high-humidity gas supplied by the high-temperature, high-humidity gas generator 121 is circulated through the pipe 123a. As shown in FIG. 2(a), the switch 107b is opened from within the gas bag 102, and air and the like within the gas bag 102 is discharged from the pipe 108b.

[0119] Next, the low-temperature, low-humidity gas output from the low-temperature, low-humidity gas generator 122 is injected into the gas bag 102 to cool the gas sensor 105 of the target sample, etc. The low-temperature, low-humidity gas is temperature-shielded by the gas bag 102, so that it can be cooled well.

[0120] Alternatively, the switch 107b is kept open, and the low-temperature, low-humidity gas, such as air, injected into the gas bag 102 is discharged, while the low-temperature, low-humidity gas output by the low-temperature, low-humidity gas generator 122 is injected into the gas bag 102.

[0121] 6, the low temperature and low humidity gas is returned to the low temperature and low humidity gas generator 122 via a pipe 123b, which adjusts the gas to a predetermined low temperature and low humidity and injects it again into the gas bag 102. The gas bag 102 expands or contracts depending on the difference in volume between the gas injected and the gas discharged, but the pressure inside the gas bag 102 is maintained at atmospheric pressure.

[0122] The gas sensor 105 is cooled by the low temperature and low humidity gas. The gas sensor exposed to the low temperature and low humidity gas outputs a signal indicating the concentration of a specific gas in the gas, and continues to detect the threshold value. The volume of the low temperature and low humidity gas in the gas bag 102 changes due to the inflow and outflow of the low temperature and low humidity gas, but the pressure in the gas bag 102 does not change (almost) and the detection threshold value of the gas sensor 105 does not fluctuate (change).

[0123] The low-temperature, low-humidity gas output from the low-temperature, low-humidity gas generator 122 is injected into the gas bag 102 to cool the gas sensor 105 of the target sample, etc. The low-temperature, low-humidity gas is temperature insulated within the gas bag 102, so it can be cooled well. Next, the low-temperature, low-humidity gas is discharged from the gas bag 102 as shown in FIG. 2(a) and other figures.

[0124] Next, the switch 107a that switches the output of the high-temperature, high-humidity gas generator 121 is opened, and high-temperature, high-humidity gas is injected from the high-temperature, high-humidity gas generator 121 into the gas bag 102. The gas bag 102 expands as shown in Fig. 2(b). The gas to be injected is a mixture of a specific gas and a gas such as air that is mixed with the specific gas, at a target concentration. Although the gas bag 102 expands due to the injection of the high temperature and high humidity gas, the pressure inside the gas bag 102 does not change.

[0125] A gas sensor 105, which is an example of a target sample, comes into contact with a high-temperature, high-humidity gas and condenses. The high-temperature, high-humidity gas output from a high-temperature, high-humidity gas generator 121 is injected into the gas bag 102 to heat and humidify the gas sensor 105, which is a target sample or the like. The high-temperature, high-humidity gas is thermally insulated by the gas bag 102, so it can be heated or cooled well.

[0126] 6, the high temperature and humidity gas is returned to the high temperature and humidity gas generator 121 via a pipe 123a, which adjusts the gas to a predetermined high temperature and humidity and injects it again into the gas bag 102. The gas bag 102 expands or contracts depending on the difference in volume between the gas injected and the gas discharged, but the pressure inside the gas bag 102 is maintained at atmospheric pressure.

[0127] The gas sensor 105 is heated by high temperature and high humidity gas. When exposed to high temperature and high humidity gas, condensation occurs on the gas sensor. The change in threshold value and sensitivity to a specific gas when condensation occurs are evaluated and inspected. If the sensor is operating normally, it outputs a signal such as the concentration of the specific gas in the gas, and continues to detect the threshold value.

[0128] The volume of the high-temperature, high-humidity gas in the gas bag 102 changes due to the inflow and outflow of the high-temperature, high-humidity gas, but the pressure in the gas bag 102 does not (almost) change, or is maintained at a predetermined value.

[0129] When the dew condensation test is a cycle test, high temperature and high humidity gas is discharged as shown in Fig. 2(a). Next, low temperature and low humidity gas is injected into the gas bag 102 as shown in Fig. 2(b). In addition, as shown in Fig. 6, the low temperature and low humidity gas generated by the low temperature and low humidity gas generator 122 is circulated to dry and cool the gas sensor 105 of the target sample. Next, in the same manner as described above, high temperature and humidity gas is injected from the high temperature and humidity gas generator 121 into the gas bag 102 to continue the condensation test.

[0130] Condensation tests + mixed gas (concentration of specific gas) tests can be easily performed by changing or setting to a predetermined value the concentration of the specific gas in the low-temperature, low-humidity gas injected from the low-temperature, low-humidity gas generator 122 into the gas bag 102 and the concentration of the specific gas in the high-temperature, high-humidity gas injected from the high-temperature, high-humidity gas generator 121 into the gas bag 102.

[0131] 7 is a configuration in which a testing device using gas bag 102 of the present invention is placed in case 120 with a capacity capable of storing gas bag 102. A heater 106b is placed in the container to heat the air in container 120. Also, a cooler (not shown) is placed to cool the air in the container.

[0132] As shown in Figures 3, 4, 6, etc., the gas in the gas bag 102 is heated or cooled. The gas bag 102 is kept airtight by the outside and a bag-like structure. However, a part of the heat generated by heating or cooling the gas moves from the gas bag 102 to the outside. In addition, a method of heating or cooling the air in the case 120 and transmitting the heat transfer into the gas bag 102 to heat or cool the gas in the gas bag 102 is also useful.

[0133] As shown in FIG. 7, by making the temperature inside the case 120 the same as the temperature inside the gas bag 102, the gas inside the gas bag 102 can be heated or cooled, and accurately adjusted to a target gas temperature.

[0134] Fig. 8 shows another embodiment of the present invention. In the embodiments of Fig. 2, Fig. 3, Fig. 5 and Fig. 6, a specific gas or the like is injected into the gas bag 102 via a pipe 108. The volume inside the gas bag 102 increases in proportion to the amount of the specific gas injected. Therefore, the concentration of the specific gas changes according to the volume of the specific gas inhaled.

[0135] 8 embodiment of the present invention, gas bag 102 is divided into multiple sections (D1, D2) by partitions 210. A target sample (e.g., gas sensor 105, etc.) is placed or installed in section D1 of gas bag 102.

[0136] The partition 210 is, for example, plate-like or rod-like, and is made up of upper and lower parts, which sandwich the upper and lower parts in a guillotine-like manner to block the passage of gas and the like between the parts separated by the sandwiching. 9 is an explanatory diagram of a method of using the test device of the present invention, and also an explanatory diagram of a method of adjusting or evaluating a sensor or the like by gas mixing.

[0137] A specific gas is injected from a gas cylinder 112 or the like into the D2 portion of the gas bag 102. A gas (air) or the like to mix the specific gas is injected into the D1 portion of the gas bag 102. As an example, the specific gas concentration in the gas bag 102 is assumed to be 20%, and the volume of gas injected into the gas bag 102 is assumed to be 100 L (liters).

[0138] 9(a), the gas bag 102 is separated into a D1 portion and a D2 portion using a partition 210. The switch 107b is opened, and a gas (e.g., air, nitrogen gas, argon gas) to be mixed with a specific gas (e.g., chlorofluorocarbon gas) is injected into the D1 portion of the gas bag 102a.

[0139] 9(a), as shown in FIG. 9(b), a specific gas (alternative fluorocarbon gas) is injected into the portion D2 of the gas bag 102. In the embodiment of FIG. 9, the switch 107a is opened from the gas cylinder 112 to inject the gas into the gas bag 102. The amount of air injected into the D1 portion of the gas bag 102 is 80 L, and the amount of the specific gas injected into the D2 portion of the gas bag 102 is 20 L.

[0140] 9(c) and (d), the partition 210 is removed to allow gas to pass between the D1 portion and the D2 portion of the gas bag 102. When pressure P is applied to the gas bag 102b, the specific gas injected into the gas bag 102b moves into the gas bag 102a all at once (in a short time).

[0141] Therefore, as shown in FIG. 9(d), the D2 portion of the gas bag 102b contracts and the D1 portion of the gas bag 102a expands, and a gas having a volume of 100 L and a mixed gas of 20 L of a specific gas at 20% can be produced (generated) in the D1 portion of the gas bag 102.

[0142] The change from Fig. 9(c) to Fig. 9(d) can be performed in a short time, and therefore, compared to filling the gas bag 102 with a specific gas or the like through the pipe 108 as described in Fig. 2, a mixed gas can be generated in a short time.

[0143] The above embodiment has been described as a method for mixing a specific gas with air or the like. The present invention is not limited to this. For example, in FIG. 9(a), D1 of the gas bag 102 is filled with a low-temperature, low-humidity gas, and D2 of the gas bag 102 is filled with a high-temperature, high-humidity gas. Next, as shown in FIG. 9(c), by removing the partition 210 and making the D1 part of the gas bag 102 and the D2 part of the gas bag 102 common, condensation can be generated on the gas sensor 105 in the D1 part. The gas in D1 and the gas in D2 are mixed in a short time, so that condensation can also be generated in a short time.

[0144] In the above embodiment, one gas bag 102 is separated into two by the partition 210, but the present invention is not limited to this. For example, one gas bag 102 may be separated into three or more parts, D1, D2, and D3, by using multiple partitions 210, such as partitions 210a and 210b.

[0145] The D1 portion of the gas bag 102 is filled with air, the D2 portion of the gas bag 102 is filled with a specific gas (such as fluorocarbon gas), and the D3 portion of the gas bag 102 is filled with hydrogen fluoride (HF) gas. By removing the partitions 210a and 210b, a gas mixture of air, the specific gas, and hydrogen fluoride gas is generated at the same time, and the target sample (gas sensor) 105, etc. is inspected, evaluated, and the accuracy is adjusted.

[0146] In FIG. 9, the gas bag 102a may be a test vessel 102a with a fixed volume (capacity) (for example, a case with a fixed volume such as a water tank). A specific gas is injected into the gas bag 102b. The specific gas is injected from the gas bag 102b into the test vessel 102a all at once. Since the volume of the test vessel 102a is fixed, the internal pressure increases, but a mixed gas of the specific gas and air can be generated in a short time. When the pressure inside the test vessel 102a is to be maintained at atmospheric pressure, the switch 107b may be opened to discharge the gas in the test vessel 102a to the outside. In the embodiment of the present invention, the concentration of a specific gas is measured by Fourier Transform Infrared Spectroscopy (FTIR).

[0147] The FTIR uses a mirror (fixed mirror) 207 and a mirror (moving mirror) 208 to create an interference wave, which is irradiated onto the object, and the transmitted or reflected interference wave is Fourier transformed to measure the infrared spectrum.

[0148] The FTIR is roughly divided into three components: a light source 203, an interferometer, and a detector 201. A continuous spectrum is irradiated from the light source 203 toward a beam splitter 206. Half of the light that reaches the beam splitter 206 is transmitted as is, and the rest is reflected toward separate mirrors.

[0149] The distance from the mirror (fixed mirror) 207 to the beam splitter 206 is fixed, and the reflected light always has a constant frequency. This is referred to as the reference light. On the other hand, the distance from the mirror (moving mirror) 208 to the beam splitter 206 changes over time, and the reflected light has a different optical path from the light from the mirror (fixed mirror) 207. The light reflected by or transmitted through the measurement gas (mixed gas) is received by the detector 201. The interference wave of this light is Fourier transformed and expressed as a wavelength (or wave number).

[0150] FTIR is capable of measuring multiple wavelengths simultaneously because it detects interference waves that include all wavelengths. This makes it possible to shorten the measurement time compared to dispersive spectroscopy, which acquires a spectrum by scanning a diffraction grating. FTIR does not use an entrance slit as in the dispersive type, and therefore can obtain sufficient light from the light source 203, resulting in a high S / N ratio.

[0151] When increasing the wavenumber resolution in dispersive spectroscopy, the entrance slit width is narrowed to increase the wavenumber resolution at the expense of lowering the S / N ratio, whereas in FTIR the wavenumber resolution can be increased by extending the travel distance of the mirror (moving mirror) 208. Therefore, the wavenumber resolution can be increased without lowering the S / N ratio.

[0152] In the present invention, by accurately grasping or measuring the concentration of a specific gas in the gas bag 102, it is possible to confirm the accuracy of the threshold value of the sample target gas sensor 105 and grasp the signal output, and to adjust or evaluate the gas sensor 105. Therefore, it is important to accurately measure the concentration of a specific gas.

[0153] In conventional FTIR, a gas cell is filled with a mixed gas (a specific gas and air, etc.) and the concentration of the specific gas in the mixed gas is measured. However, the method of measurement using a gas cell requires the mixed gas to be injected into the gas cell, and measurement cannot be performed in real time. In FTIR, the wave number resolution can be increased by increasing the moving distance of the mirror (moving mirror) 208. The present invention uses a gas bag 102, and a mixed gas is filled in the gas bag 102. Also, the volume of the gas bag 102 is large.

[0154] It is easy to extend the moving distance of the mirror (moving mirror) 208 within the gas bag 102. In addition, by using a plurality of detectors 201, the measurement or detection accuracy of the mixed gas concentration can be improved based on the results of the plurality of detectors 201.

[0155] 10 and 11 are diagrams showing the configuration of the FTIR device of the present invention and explanatory diagrams of a method for evaluating, inspecting, testing or adjusting a gas sensor or the like using the FTIR device of the present invention.

[0156] The FTIR is roughly divided into three components: a light source 203, an interferometer, and a detector 201. A continuous spectrum is irradiated from the light source 203 toward a beam splitter 206. Half of the light that reaches the beam splitter 206 is transmitted as is, and the rest is reflected toward separate mirrors.

[0157] The distance from the mirror (fixed mirror) 207 to the beam splitter 206 is fixed, and the reflected light always has a constant frequency. This is referred to as the reference light. On the other hand, the distance from the mirror (moving mirror) 208 to the beam splitter 206 changes over time, and the reflected light has a different optical path from the light from the mirror (fixed mirror) 207. The light reflected by or transmitted through the measurement gas (mixed gas) is received by the detector 201. The interference wave of this light is Fourier transformed and expressed as a wavelength (or wave number).

[0158] FTIR is capable of measuring multiple wavelengths simultaneously because it detects interference waves that include all wavelengths. This makes it possible to shorten the measurement time compared to dispersive spectroscopy, which acquires a spectrum by scanning a diffraction grating.

[0159] In Fig. 10, a detector 201 is attached to a moving stage (linear stage) 202. A table (stage) placed on a guide rail can be moved linearly. The driving method can be any of a linear motor, ball screw, air drive, etc. The horizontal direction along the guide rail is called the X-axis, and the depth direction is called the Y-axis. When adjusting the angle, it is combined with a θ-axis stage. Light from a light source 203 that generates a continuous spectrum is focused by a lens 204a to become light in the direction a, and is also focused by a lens 204b to become light in the direction b.

[0160] The wavelength band of the light collected by the lens 204a is adjusted by the filter 205a to be in the infrared band, while the wavelength band of the light collected by the lens 204b is adjusted by the filter 205ab to be in the infrared band.

[0161] Light with a continuous spectrum in the a direction is irradiated toward beam splitter 206a. Half of the light that reaches beam splitter 206a is transmitted directly toward mirror (movable mirror) 208a, and the rest is reflected toward mirror (fixed mirror) 207a.

[0162] The distance from mirror (fixed mirror) 207 to beam splitter 206a is fixed, and the reflected light always has a constant frequency (reference light). On the other hand, the distance from mirror (moving mirror) 208a to beam splitter 206 changes over time, and the reflected light has a different optical path from the light from mirror (fixed mirror) 207a.

[0163] The light transmitted through the mixed gas in the dashed line area Ga is received by detector 201a. The interference wave of this light is Fourier transformed to express it as a wavelength (or wave number). Detector 201a is attached to moving stage 202a, and can be moved to a position within a distance range of L.

[0164] The longer the distance L, the less the distance through the mixed gas needs to be traveled, and therefore the measurement accuracy improves. However, the distance from the light source 203 becomes relatively longer, and the amount of light incident on the detector 201a decreases, which may result in a decrease in the S / N (signal / noise ratio). Therefore, the distance L is adjusted while taking the S / N into consideration.

[0165] Light with a continuous spectrum in the b direction is irradiated toward beam splitter 206b. Half of the light that reaches beam splitter 206b is transmitted directly toward mirror (movable mirror) 208b, and the rest is reflected toward mirror (fixed mirror) 207b.

[0166] The distance from mirror (fixed mirror) 207 to beam splitter 206b is fixed, and the reflected light always has a constant frequency (reference light). On the other hand, the distance from mirror (moving mirror) 208b to beam splitter 206 changes over time, and the reflected light has a different optical path from the light from mirror (fixed mirror) 207b.

[0167] The light transmitted through the mixed gas in the area Gb indicated by the dashed line is received by the detector 201b. The interference wave of this light is Fourier transformed to express it as a wavelength (or wave number). The detector 201b is attached to a moving stage 202b, and can be moved to a position within a distance range of L.

[0168] The longer the distance L, the longer the distance traveled through the mixed gas, and therefore the measurement accuracy improves. However, the distance from the light source 203 becomes relatively longer, and the amount of light incident on the detector b decreases, which may result in a decrease in the S / N (signal / noise ratio). Therefore, the distance L is adjusted while taking the S / N into consideration. The distance L is adjusted and set by controlling the moving stage 202. The position of the mirror (movable mirror) 208 is adjusted, and the distance L is set and adjusted taking into account the interference state.

[0169] The phase of the light (corresponding to light a) H1 passing through the region Ga and the phase of the light (corresponding to light b) H2 passing through the region Gb are set to be in opposite phase (180° (DEG.)). However, it is not necessary to have the opposite phase for all wavelengths. The phases are adjusted and set to be in opposite phase for the wavelength band including the wavelengths that are most sensitive among the wavelengths detected by the gas sensor 105, the wavelengths, and the vicinity thereof.

[0170] By making the phase of the light passing through the region Ga (corresponding to light a) and the phase of the light passing through the region Gb (corresponding to light b) inverse (180° (DEG.)), and by detecting with two detectors 201 (detector 201a, detector 201b) and performing FT-IR processing, information on the atomic group (base) can be obtained, and information on the concentration of a specific gas and changes in the specific gas can be obtained with high accuracy. Therefore, samples such as the gas sensor 105 can be evaluated, adjusted, and the output sensitivity and accuracy can be measured with high accuracy.

[0171] FT-IR does not irradiate a sample with infrared light by changing the wavelength, but irradiates the sample with continuous light and obtains an absorption spectrum according to the molecular structure by Fourier transforming the interference pattern, thereby obtaining information on the atomic groups (bases) in the substance (gas).Since it is possible to simultaneously measure the incident light of all wavenumber ranges by continuous light, it is possible to perform highly sensitive measurements in a short time.

[0172] The testing device of the present invention does not use a gas cell, but places the detector 201 inside the gas bag 102. Since the space inside the gas bag 102 is large, the distance between the mirror 207 or mirror 208 and the detector 201 can be made long. In addition, by using multiple detectors 201,

[0173] Information on atomic groups (groups) in the gas can be obtained. In addition, the detector 201 is placed in the gas bag 102, and the distance between the mirror 208 and the detector 201 can be optimally adjusted by varying or adjusting the position using a moving stage 202.

[0174] Fig. 10 shows a configuration in which the light receiving direction of detector 201a is the same as that of detector 201b, while Fig. 11 shows a configuration in which the light receiving direction of detector 201a is perpendicular to the light receiving direction of detector 201b. In the embodiment of FIG. 11, similarly to FIG. 10, a detector 201 is attached to a moving stage (linear stage) 202 .

[0175] A light source 203 that generates a continuous spectrum is split into two optical paths by a half mirror or a polarizing beam splitter 211. The light collected by a lens 204 has its wavelength band adjusted by a filter 205, and light in a predetermined infrared region is emitted from the filter 205.

[0176] The light transmitted through the half mirror 211 is collected by the lens 204a to become light a in the direction a, while the light reflected by the half mirror 211 is collected by the lens 204b to become light b in the direction b.

[0177] Light a with a continuous spectrum in direction a is irradiated toward beam splitter 206a. Half of the light that reaches beam splitter 206a is transmitted directly toward mirror (movable mirror) 208a, and the rest is reflected toward mirror (fixed mirror) 207a.

[0178] The distance from mirror (fixed mirror) 207 to beam splitter 206a is fixed, and the reflected light always has a constant frequency (reference light). On the other hand, the distance from mirror (moving mirror) 208a to beam splitter 206 changes over time, and the reflected light has a different optical path from the light from mirror (fixed mirror) 207a.

[0179] The light transmitted through the mixed gas in the dashed-dotted region Ga is received by detector 201a. The interference wave of this light is Fourier transformed to express it as a wavelength (or wave number). Detector 201a is attached to moving stage 202a, and can be moved with detector 201a within a distance range of L and set to a predetermined position.

[0180] The longer the distance L, the longer the distance traveled through the mixed gas, and the more accurate the information on the atomic group (group) is obtained. However, the distance from the light source 203 becomes relatively longer, and the amount of light incident on the detector 201a decreases, which may result in a decrease in the S / N (signal / noise ratio). Therefore, the distance L is adjusted while taking the S / N into consideration.

[0181] Light with a continuous spectrum in the b direction is irradiated toward beam splitter 206b. Half of the light that reaches beam splitter 206b is transmitted directly toward mirror (movable mirror) 208b, and the rest is reflected toward mirror (fixed mirror) 207b.

[0182] The distance from mirror (fixed mirror) 207 to beam splitter 206b is fixed, and the reflected light always has a constant frequency (reference light). On the other hand, the distance from mirror (moving mirror) 208b to beam splitter 206 changes over time, and the reflected light has a different optical path from the light from mirror (fixed mirror) 207b.

[0183] The light transmitted through the mixed gas in the area Gb indicated by the dashed line is received by the detector 201b. The interference wave of this light is Fourier transformed to express it as a wavelength (or wave number). The detector 201b is attached to a moving stage 202b, and can be moved to a position within a distance range of L.

[0184] The longer the distance L, the longer the distance traveled through the mixed gas, and therefore the accuracy of obtaining information on the atomic group (radical) improves. However, the distance from the light source 203 becomes relatively longer, and the amount of light incident on the detector b decreases, which may result in a decrease in the S / N (signal / noise ratio). Therefore, the distance L is adjusted while taking the S / N into consideration. The distance L is adjusted and set by controlling the moving stage 202. The position of the mirror (movable mirror) 208 is adjusted, and the distance L is set and adjusted while taking into consideration (examining) the interference state, so that the setting and adjustment are made so as to obtain optimal information on the atomic group (base).

[0185] In the embodiment of Figure 11, as in Figure 10, the phase of the light (corresponding to light a) H1 passing through region Ga and the phase of the light (corresponding to light b) H2 passing through region Gb are set to be inverse phase (180° (DEG.)).

[0186] However, it is not necessary to have the opposite phase at all wavelengths. The opposite phase is adjusted and set so that the wavelength is the opposite phase at the wavelength detected by the gas sensor 105, the wavelength and the wavelength in the vicinity thereof, including the wavelength at which the gas sensor 105 is most sensitive.

[0187] It is also effective to make it possible to adjust the phase relationship between H1 and H2. In the embodiment of Fig. 10, the phase between H1 and H2 is set to 180°, but the phase can be adjusted between 0 and 180° so that the information on the atomic groups (bases) of the detectors 201a and 201b approximately matches and approximately the same values ​​are obtained.

[0188] By making the phase of the light passing through the region Ga (corresponding to light a) and the phase of the light passing through the region Gb (corresponding to light b) inverse (180° (DEG.)), and by detecting with two detectors 201 (detector 201a, detector 201b) and performing FT-IR processing, information on the atomic group (group) can be obtained, and information on the concentration of a specific gas and information on changes in the specific gas can be obtained with high accuracy from the information on the atomic group (group). Therefore, samples such as the gas sensor 105 can be evaluated, adjusted, and the output sensitivity and accuracy can be measured with high accuracy.

[0189] Fig. 12 is an explanatory diagram of a test method in the test device of the present invention. The horizontal axis of the graph is time (seconds), and the vertical axis is %LEL (present Lower Explosion Limit). It represents the lower explosion limit of the target gas. %LEL is a unit that represents the concentration when the lower explosion limit concentration (LEL) of the target gas is set to 100%. Therefore, the vertical axis may be the concentration % of a specific gas.

[0190] If the specified gas is hydrogen gas, the lower explosive limit is 4 vol%, which is the 100% LEL of hydrogen gas. Therefore, for hydrogen gas, 4 vol% = 100% LEL, so 1 vol% hydrogen gas is 25% LEL. If the specified gas is methane gas, the lower explosive limit is 5.0 vol%, so 1 vol% methane gas is 20% LEL. The lower explosive limit for propane gas is 2.1 vol%, so 1 vol% propane gas is approximately 47.6% LEL.

[0191] As explained in the embodiment of Figures 1 and 2, the gas bag 102 is filled with air, and a specific gas is injected (filled) to achieve a predetermined concentration in the gas bag 102. By filling the gas bag 102 with air and the specific gas, the volume of the gas bag 102 increases and the gas bag 102 expands. Since the gas bag 102 is bag-shaped and flexible, the pressure inside the gas bag 102 is maintained at atmospheric pressure. A gas sensor 105 to be measured is placed inside the gas bag 102.

[0192] The gas sensor 105, an NDIR (non-dispersive infrared) gas sensor, detects gas by utilizing the phenomenon in which infrared rays of a specific wavelength are absorbed as a result of the molecular vibration of the target gas radiated by the NDIR. The transmittance of infrared rays (the ratio of the transmitted light intensity to the emitted light intensity from the radiation source) is determined by the concentration of the target gas. The gas sensor 105 is composed of an infrared radiation source, a light receiving element, an optical filter, a measuring cell that contains these, and a signal processing circuit.

[0193] When a gas is irradiated with infrared light in the mid-infrared region, the infrared light resonates with the natural vibration frequency of the molecules in the spectral region where the vibration frequency of the gas molecules matches the energy level of the infrared light, and is absorbed by the gas molecules as molecular vibrations.

[0194] The relationship between gas concentration and infrared transmittance depends on the Beer-Lambert law, and when the pressure of the gas containing a specific gas in which the gas sensor 105 is placed changes, the absorbance of the specific gas may increase.

[0195] In the present invention, it is preferable to adjust or evaluate the gas sensor 105 while maintaining the gas pressure at a constant value. However, in conventional test devices, a test is performed by injecting a specific gas to change the concentration of the specific gas, but since the capacity of the container in which the gas sensor 105 is placed is specified, filling the container with the specific gas to change the concentration changes the pressure inside the container.

[0196] In the present invention, a specific gas is sequentially filled into the gas bag 102 and the concentration of the specific gas in the gas bag 102 is changed to test the gas sensor, but even if the volume of the gas bag 102 increases by filling it with a specific gas, the pressure in the gas bag 102 is maintained.

[0197] 5, the gas sensor 105 is placed or installed in the gas bag 102. The gas sensor 105 is operated to measure or evaluate the threshold and output signal when the concentration is 0% (%LEL is 0%). The gas sensor 105 is also operated when the specific gas is filled, and the threshold and output signal are measured or evaluated.

[0198] A fan 104 rotates in the gas bag 102 to agitate the gas in the gas bag 102. If necessary, the gas is heated by a heater 106 and cooled by a cooler (not shown).

[0199] 10 and 11, at least detector 201 (detector 201a, detector 201b) is placed in gas bag 102, and information on atomic groups (groups) is obtained by FT-IR processing of the outputs of two detectors 201 (detector 201a, detector 201b). From the information on atomic groups (groups), it is possible to obtain information on the concentration of a specific gas and information on changes in a specific gas with high accuracy.

[0200] 12, at the time of 1000 seconds, the specific gas is filled (injected) into the gas bag 102 so as to be 10% LEL. By filling (injecting) the specific gas into the gas bag 102, the gas bag 102 expands by the volume of the specific gas.

[0201] The gas sensor 105 is operated, and the threshold value and the output signal when (%LEL is 10%) are measured or evaluated. The gas sensor 105 is also operated when the specific gas is filled, and the threshold value and the output signal are measured or evaluated. Furthermore, the output of the detector 201 (detector 201a, detector 201b) of the FT-IR device is subjected to FT-IR processing to obtain information on atomic groups (groups).

[0202] Similarly, at the time of 2000 seconds, the specific gas is filled (injected) into the gas bag 102 so as to be 20% LEL. By filling (injecting) the specific gas into the gas bag 102, the gas bag 102 expands by the volume of the specific gas.

[0203] The gas sensor 105 is operated, and the threshold value and the output signal when (%LEL is 20%) are measured or evaluated. The gas sensor 105 is also operated when the specific gas is filled, and the threshold value and the output signal are measured or evaluated.

[0204] Thereafter, at the time of 3000 seconds, the specific gas is filled (injected) into the gas bag 102 so that the %LEL is 30%. The gas sensor 105 is operated to measure or evaluate the threshold value and output signal when the %LEL is 30%, and the output of the detector 201 of the FT-IR device is subjected to FT-IR processing to obtain information on the atomic group (base). The above operation is also carried out at the time of 4000 seconds. The %LEL can also be expressed as the concentration (ppm) of a particular gas. Therefore, in FIG. 12, the %LEL can be expressed as the concentration (ppm).

[0205] FIG. 13 shows the results of obtaining information on atomic groups (groups) by FT-IR processing of data output by the detector 201 of the FT-IR device at each % LEL. The horizontal axis shows the wave number (cm -1 ) and the vertical axis represents absorbance (Abs).

[0206] Usually, the gas sensor 105 is adjusted to react to the peak absorbance of a specific gas. The gas sensor 105 is evaluated, adjusted or the accuracy is confirmed, the output is adjusted, and the threshold value is set or adjusted, with reference to the absorbance Abs versus wave number in FIG. 13, etc.

[0207] According to the %LEL of a particular gas, the peak absorbance (wavenumber 3190 cm in the example of FIG. 13) is -1 ) becomes higher. Each absorbance is the result of averaging the values ​​obtained from the output data of detector 201a and detector 201b. The absorbance of the peak is called the peak height. For easier understanding, the horizontal axis of FIG. 14 represents concentration (ppm) and the vertical axis represents peak height.

[0208] The FT-IR results show that, when the pressure inside the gas bag 102 is kept constant, the concentration (ppm) is basically proportional to the peak height. The peak output by the gas sensor 105 is also proportional to the concentration (ppm) of a specific gas.

[0209] 14, the output of the gas sensor 105 is plotted with circles when the FT-IR results are linear. In the conventional test device, when the concentration of a specific gas increases and the pressure inside the container of the test device increases, the relationship deviates from the linear relationship as shown by the dotted line in FIG. The deviation from the linear relationship or the state of departure from the linear relationship is plotted or measured and evaluated, whereby the gas sensor 105 etc. can be evaluated.

[0210] With conventional testing equipment, it is not possible to determine whether the gas sensor 105 is abnormal or whether the result is a change in the pressure inside the container. In the present invention, the pressure inside the gas bag 102 is maintained at a constant value, so it is possible to determine or evaluate whether the problem is with the gas sensor 105, such as an abnormality, precision variation, or poor adjustment of the gas sensor 105. In the embodiment of FIG. 13, attention is focused on the absorbance of the wave number of the peak as indicated by the arrow, and evaluation and adjustment of accuracy are performed based on the peak height.

[0211] In the case of Fig. 13, fluctuations may occur in the wave number, absorbance (Abs), etc. As shown in Figs. 10 and 11, the present invention has multiple detectors 201 and performs averaging, adding, and leveling processes on the output data of the multiple detectors 201, thereby making it possible to reduce fluctuations and stably measure and evaluate absorbance, etc.

[0212] In FIG. 15, the absorbance and the like can be stably measured by integrating or adding the absorbance within a predetermined wave number range (shown by diagonal lines). The predetermined wave number range is, for example, wave numbers (cm -1 ) is set to 20. It is preferable that the range is adjusted or set according to the state of fluctuation, etc.

[0213] The embodiments disclosed herein are illustrative in all respects and should not be considered as limiting. The scope of the present invention is indicated by the claims, not by the above meaning, and is intended to include all modifications within the meaning and scope of the claims. It goes without saying that the matters or contents described in this specification and drawings can be mutually combined. [Explanation of symbols]

[0214] 101 Exhaust duct 102 Gas bag (glove bag) 104 Fan 105 Gas Sensor 106 Heater 107 Switchgear 108 Pipe 109 Gas flow meter 111 Syringe 112 Gas Cylinder 114 Densitometer 115 Temperature and humidity meter 116 FT-IR Instrument 117 Controller 118 Shutter 120 cases 121 High temperature and high humidity gas generator 122 Low temperature and low moisture gas generator 123 Circulation Pipe 201 Detector 202 Mobile Stage 203 Light Source (Continuous Spectrum) 204 Lens 205 Filters 206 Beam Splitter 207 Mirror (Fixed Mirror) 208 Mirror (moving mirror) 209 (Mixed) Gas 210 Partition 211 Half mirror (polarizing beam splitter) 212 Gloves

Claims

1. A container that maintains an internal pressure at a substantially constant value when gas is injected or discharged, or when gas expands or contracts; a gas injection or discharge unit that injects or discharges the gas into or from the container; A gas sensor testing device comprising a device for acquiring an output of the gas sensor disposed inside the container.

2. A container whose volume or shape changes based on the injection or discharge of gas, or the expansion or contraction of gas; a gas injection or discharge unit that injects or discharges the gas into or from the container; a partition member dividing the container into a first portion and a second portion; A gas sensor testing device comprising a device for acquiring an output of the gas sensor disposed inside the container.

3. A container whose volume or shape changes based on the injection or discharge of gas, or the expansion or contraction of gas; a gas injection or discharge unit that injects or discharges the gas into or from the container; a gas injector for injecting a specific gas into the container; an agitator for agitating the gas in the container; A gas sensor testing device comprising a device for acquiring an output of the gas sensor disposed inside the container.

4. A testing device for a gas sensor as described in claim 1, claim 2 or claim 3, further comprising an FTIR device for analyzing the gas in the container.

5. A testing device for a gas sensor as described in claim 1, claim 2 or claim 3, characterized in that it further comprises a condensation device for condensing the gas sensor.

6. A gas sensor is disposed in a container whose volume or shape changes based on the injection or discharge of gas, or the expansion or contraction of gas; Injecting a specific gas into the container, A gas sensor testing method comprising: acquiring an output of the gas sensor for the specific gas.

7. A method for testing a gas sensor, comprising: condensing a gas sensor in a container; and injecting a specific gas into the container to obtain an output of the gas sensor in response to the specific gas, the method comprising: The container comprises: Changes in volume or shape based on the injection or expulsion of gas or the expansion or contraction of gas; Alternatively, a method for testing a gas sensor, characterized in that the internal pressure is maintained at a substantially constant value when gas is injected or discharged or when gas expands or contracts.

8. A gas sensor is disposed in a container that maintains an internal pressure at a substantially constant value; A specific gas is injected into the container, A gas sensor testing method comprising acquiring an output of the gas sensor in response to the injected characteristic gas.

9. A method for testing a gas sensor as described in claim 6, claim 7 or claim 8, characterized in that the gas sensor is condensed and the output of the gas sensor is obtained.

10. A method for testing a gas sensor as described in claim 6, claim 7 or claim 8, characterized in that the gas sensor is a sensor compatible with any of CO2 (carbon dioxide / carbon dioxide), CO (carbon monoxide), CH4 (methane), C2H4 (ethylene), CH3Br (methyl bromide), SF6 (sulfur hexafluoride), NO (nitric oxide), N2O (nitrous oxide), NH3 (ammonia), SO2 (sulfur dioxide), SO2F2 (sulfuryl fluoride) or refrigerant gas (chlorofluorocarbon / chlorofluorocarbon substitute).

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