Laser-driven light source with electrodeless ignition

Abstract

To solve such a problem that advances are needed in high-brightness light sources that can improve size, cost, complexity, reliability, stability and efficiency.SOLUTION: An electrodeless laser-driven light source includes a laser that generates CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising ionized gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionized gas. A detector detects plasma light generated by a CW plasma and generates a detection signal. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.SELECTED DRAWING: Figure 1A

Description

[Background technology]

[0001]

[0001] The section headings used herein are for organizational purposes only and are not to be construed as limiting the subject matter described in the present application.

[0002] [preface]

[0002] For example, laser-driven light sources that provide high brightness over a spectral range from the extreme ultraviolet to the visible and infrared regions of the spectrum are available with high reliability and long life. Various examples of such high brightness light sources are manufactured by Energetiq, a Hamamatsu Company located in Wilmington, MA.

[0003]

[0003] There is an increasing demand for high brightness light sources for applications in a variety of fields, including biology, chemistry, climate, and physics, including, for example, semiconductor metrology, sensor calibration and testing, creating shaped light, surface metrology, spectroscopy, and other optical measurement applications. Thus, there is a need for advances in high brightness light sources that can improve, for example, the size, cost, complexity, reliability, stability, and efficiency of this important class of broadband light sources.

[0004]

[0001] In the following detailed description, the present teachings according to preferred exemplary embodiments, together with further advantages thereof, will be described in more detail in conjunction with the accompanying drawings. Those skilled in the art will appreciate that the drawings described below are for illustrative purposes only. The drawings are not necessarily to scale, with the emphasis generally being on illustrating the principles of the present teachings. The drawings are not intended to limit the scope of the applicant's teachings. [Brief description of the drawings]

[0005] [Figure 1A]

[0002] FIG. 1 illustrates an embodiment of an electrodeless laser-driven light source in accordance with the present teachings that uses pulsed laser light projected along one axis into a gas-filled valve and CW laser light projected along a different axis into the gas-filled valve. [Figure 1B]

[0003] FIG. 1 illustrates an embodiment of an electrodeless laser-driven light source in accordance with the present teachings that uses pulsed laser light projected along one axis onto a gas-filled valve and CW laser light projected along the same axis onto the gas-filled valve. [Figure 2A] 4 is an image of a gas-filled bulb of an embodiment of an electrodeless laser-driven light source in accordance with the present teachings, showing emission due to pulsed laser excitation only. [Figure 2B]

[0005] FIG. 2B is an image of the gas-filled valve shown in FIG. 2A showing emission due to CW laser excitation only. [Diagram 3]

[0006] 1 is a flow diagram of method steps for igniting a plasma in an electrodeless laser-driven light source in accordance with the present teachings. [Figure 4]

[0007] 1A-1C show a series of oscilloscope traces of pulsed laser illumination, pump laser illumination, and plasma emission, respectively, from an electrodeless laser driven light source in accordance with the present teachings. [Figure 5A]

[0008] 1A illustrates an embodiment of a Q-switched crystal including a gain region and a saturable absorber region in accordance with the present teachings. [Figure 5B]

[0009] FIG. 1 illustrates an embodiment of a curved YAG-based passively Q-switched laser rod suitable for use in an electrodeless laser driven light source according to the present teachings. [Figure 6]

[0010] 1 is a graph of pump laser pulse energy and pump current threshold to generate a laser pulse sufficient to cause gas breakdown as a function of pulse length for a quasi-CW pump pulse used in an embodiment of an electrodeless laser driven light source in accordance with the present teachings. [Figure 7]

[0011] FIG. 1 illustrates a bare bulb with a focusing lens assembly used in an embodiment of an electrodeless laser-driven light source in accordance with the present teachings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0006] Description of Various Embodiments

[0012] The present teachings will be described in more detail below with reference to exemplary embodiments shown in the accompanying drawings. Although the present teachings will be described in conjunction with various embodiments and examples, it is not intended that the present teachings be limited to such embodiments. On the contrary, the present teachings encompass various alternatives, modifications, and equivalents, as will be understood by those skilled in the art. Those skilled in the art who have access to the teachings herein will recognize additional implementations, modifications, and embodiments, as well as other fields of use, within the scope of the disclosure described herein.

[0007]

[0013] References herein to "one embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of the present teachings. The appearances of the phrase "one embodiment" in various places in the specification do not necessarily all refer to the same embodiment.

[0008]

[0014] It should be understood that the individual steps of the methods of the present teachings can be performed in any order and / or simultaneously so long as the present teachings remain operable. Further, it should be understood that the apparatus and methods of the present teachings can include any number or all of the described embodiments so long as the present teachings remain operable.

[0009]

[0015] Laser-driven light sources use a CW laser to directly heat a gas plasma to the high temperatures required to generate broadband optical light. High-intensity laser-driven light sources have important advantages over light sources that use high-voltage electrodes to maintain the plasma. Laser-driven sources rely on an optical discharge plasma as opposed to an electric discharge plasma used in, for example, arc lamp devices. In electric discharge lamps, the electrode material can evaporate and change the characteristics of the discharge over the life of the lamp. This shortens the lamp's life. Electrode-based systems also cause thermal, mechanical, and electrical stresses in the light source. Known laser-driven light sources do not rely on electrodes to maintain the plasma, but still use electrodes for plasma ignition.

[0010]

[0016] Known light sources that rely on electrodes can have significant limitations. For example, electrode-based light sources can have limitations on the size of the lamp head and limitations on how the bulb can be mounted. Electrode-based light sources must be designed to avoid parasitic arcs, and the lamp head must be constructed with sufficient volume for the electrodes and ignition circuit. Electrode-based light sources have constraints on the cold fill pressure of the bulb, for example, because the glass-to-metal seal of the electrodes can limit the maximum fill pressure. Also, the bulb size can be larger in electrode-based light sources, which can affect the bulb fill pressure. Electrode-based light sources are also limited in the bulb shapes that can be accommodated, for example, because electrode-based light sources require electrodes to be positioned, fixed, and connected. These design constraints can result in noise in the light source.

[0011]

[0017] Thus, providing a laser-driven light source with electrodeless ignition can lead to high reliability, high performance, reduced cost, and reduced complexity, among other advantages. Ignition of a plasma by optical illumination requires careful design and control of the light source and associated light delivery mechanism used to ignite the plasma. One feature of the present teachings is to provide a laser-driven light source with electrodeless ignition. In such a light source, the plasma is ignited by optical illumination, and not by electrical energy provided by electrodes as in known laser-driven high brightness light sources.

[0012]

[0018] There are many features and advantages of electrodeless laser-driven light sources. Electrodeless light sources can be implemented using smaller bulbs with higher maximum fill pressures than prior art light sources. In particular, for a given laser output modality, higher fill pressures can result in higher brightness. Electrodeless light sources are free of contamination from electrode materials. In addition, there are fewer geometric limitations on the lamp shape. In general, smaller lamp heads can be used for the same characteristics. Also, the lack of active electrical components to be powered reduces the need for associated power supplies, control electronics, and electrical connections, greatly reducing the number of parts required. However, some embodiments of electrodeless laser-driven light sources can be implemented in existing lamp packages of laser-driven light sources that do not have electrode ignition. This is at least in part because electrodeless devices are generally less complex and smaller than laser-driven light sources that lase with electrodes.

[0013]

[0019] FIG. 1A illustrates an embodiment of an electrodeless laser-driven light source 100 using pulsed laser light 102 projected along one axis 106 into a gas-filled bulb 104 and CW laser light 108 projected along a different axis 110 into the gas-filled bulb 104 in accordance with the present teachings. The pulsed laser light 102 is generated using a Q-switched crystal 112 that is excited by pump laser light 114 generated by a pump laser 116. A coupling optic 118 is used to couple the pump laser light 114 into the Q-switched crystal 112. An optical element 120 is used to direct the pulsed laser light 102 generated by the Q-switched crystal 112 into the bulb 104 and direct the pump laser light 114 away from the bulb. In some embodiments, the optical element 120 is a dichroic optical element. Energy from the pulsed laser light 102 delivered to a plasma breakdown region 126 ignites a plasma.

[0014]

[0020] The CW laser generates the CW laser light 108. An optical element 124 projects and / or focuses the CW sustain light onto an area of ​​the bulb 104 that includes the plasma breakdown region 126. In some embodiments, the optical element 124 is a focusing element, such as a lens. An optical element 128 projects and / or focuses the pulsed laser light 102 onto an area of ​​the bulb 104 that includes the plasma breakdown region 126. In some embodiments, the optical element 128 is a focusing element, such as a lens. The area illuminated by the pulsed laser light is called the pulsed illumination area and has a well-defined location and shape based on the projection element used to direct the optical light from the Q-switched crystal 112. Energy from the pulsed laser light 102 delivered to the plasma breakdown region 126 ignites the plasma. The area illuminated by the CW sustain light is called the CW sustain illumination area and has a well-defined location and shape based on the projection element used to direct the optical light from the CW laser 122. Energy from the CW laser light 108 delivered to the plasma breakdown region 126 sustains the plasma.

[0015]

[0021] The plasma breakdown region 126 generates a CW plasma light 130. The CW plasma light 130 is incident on a detector 132. The CW plasma light 130 can be directed to the detector 132 by the optical element 120, or through free space and / or other light transmission means. The detector 132 generates a detection signal at an output connected to a controller 134. The controller 134 is connected to a control input of the pump laser 116. The controller 134 generates a control signal that controls parameters of the pump light 114 directed to the Q-switched laser crystal 112. In some embodiments, the controller 134 is configured to control parameters of the pump laser 116 and the pump light 114 in a manner to extinguish the pulsed laser light 102 within a time delay after the detection signal from the detector 132 exceeds a predetermined threshold level.

[0016]

[0022] A high peak power pulsed light 102 is required to ignite the plasma in the plasma breakdown region 126. However, to generate a sustaining CW plasma light 130, the pulsed light must not exceed a certain threshold, which can occur when a pulse is present in the plasma a predetermined delay after the plasma light reaches a predetermined threshold. Too much pulsed light can extinguish the plasma. By extinguishing the pulsed light before the threshold is reached, the plasma light can be sustained by irradiating only the CW sustaining light 108.

[0017]

[0023] In some embodiments, a certain number of pulses of the pulsed light, e.g., one or more, are required to ignite the plasma, but additional pulses after ignition extinguish the plasma. Thus, when the plasma light 130 is detected at the detector 132, the pulse is extinguished before the next pulse occurs after the ignition pulse. It should be understood that this configuration is merely one example of this aspect of the present teachings. Various algorithms and thresholds that extinguish the pump light 114 after various delays relative to the generation of the plasma light 130 can be used by the system according to the present teachings. These parameters depend on various factors, including, for example, the type, density, and / or temperature of the gas. These parameters also depend on the relative power of the pulsed light and the CW sustain light 108. These parameters also depend on the focusing and other optical properties of the optical elements 124, 128. In addition, these parameters depend on the energy density of the CW sustain light 108 and / or the pulsed light 102 in the plasma breakdown region.

[0018]

[0024] One feature of the present teachings is that the axes of the pulsed light and the CW sustain light can have various relative positions. For example, referring to FIG. 1A, axes 106, 110 are nominally orthogonal. It is also possible to configure the electrodeless laser driven light source so that the pulsed light and the CW light are on the same axis.

[0019]

[0025] 1B illustrates an embodiment of an electrodeless laser-driven light source 150 in accordance with the present teachings that uses pulsed laser light 152 projected along one axis into a gas-filled bulb 154 and CW laser light 156 projected along the same axis into the gas-filled bulb. The electrodeless laser-driven light source 150 shares many common elements with the electrodeless laser-driven light source 100 of FIG. 1A. A Q-switched crystal 158 is pumped by pump laser light 160 generated by a pump laser 162. Coupling optics 164, which in some embodiments is a collimation package that nominally collimates the light, receives the light generated by the pump laser 162 and directs it to the Q-switched crystal 158.

[0020]

[0026] An optical element 166 is used to direct the pulsed laser light 152 generated in the Q-switched crystal 158 to the bulb 154. The optical element 166 can direct (e.g., reflect) the pump laser light 160 away from the bulb 154. In some embodiments, the optical elements 166, 168 are dichroic optical elements. In some embodiments, the optical element 166 transmits light having the pulsed light wavelength 152 and also transmits the CW laser light 156. The CW laser 170 generates the CW laser light 156. An optical element 172 projects and / or focuses the CW sustain light 156 and the pulsed laser light 152 onto an area of ​​the bulb 154 that includes a plasma breakdown region 174. In some embodiments, the optical element 172 is a focusing element, such as a lens.

[0021]

[0027] The plasma breakdown region 174 generates a CW plasma light 176. The CW plasma light 176 is incident on a detector 178. The CW plasma light 176 can be directed to the detector 178 by the optical element 166, or through free space and / or by other light transmission means. The detector 178 generates a detection signal at an output in response to the detected CW plasma light. The output of the detector 178 is connected to a controller 180. The controller 180 is connected to a control input of the pump laser 162. The controller 180 generates a control signal that controls parameters of the pump light 160 directed to the Q-switched laser crystal 158. In some embodiments, the controller 180 is configured to control associated parameters of the pump laser 162 and the pump light 160 in a manner that extinguishes the pulsed laser light 152 within a time delay after the detection signal from the detector 178 exceeds a predetermined threshold level. In some embodiments, the light from the CW laser 170 is collimated using a collimation package 182. An optical element 184 , which may include one or more optical elements, is used to focus the pump laser light 160 onto the Q-switch crystal 158 .

[0022]

[0028] Another feature of the present teachings is that in some embodiments, the pulsed light and the CW sustain light can be directed to form separate illumination regions in the plasma region. The two illumination regions can be separate or partially or fully overlapping, as desired. Control of the relative position and shape of the pulsed illumination region and the CW sustain illumination region can be used to provide a particular spatial distribution of energy provided by these two light sources. As described further herein, the respective energy densities of the CW sustain light and the pulsed light affect the ignition and sustainability of the plasma. Thus, being able to control the relative position and shape of the pulsed illumination region and the CW sustain illumination region allows for control of the energy density profile imparted to the plasma. This arrangement affects the ability of the ignition plasma generated in the pulsed illumination region to transition to the CW illumination region as a stable CW plasma.

[0023]

[0029] FIG. 2A is an image 200 of a gas-filled bulb of an embodiment of an electrodeless laser-driven light source according to the present teachings, showing light emission due to pulsed laser excitation only. Both images 202, 204 are shown from the side, but are angled to show the three-dimensional arrangement of the pulsed illumination area and the location of the CW laser focus. The extent and location of the pulsed illumination area are visible in these images 202, 204. Note that the location of the pulsed breakdown depends on the pulse energy. With increasing energy, the breakdown location moves toward the pulsed laser. The three-dimensional alignment of the pulsed laser breakdown plasma with respect to the pulsed light and with respect to the CW laser focus allows the method to be performed with lower CW laser power and / or lower pulse energy.

[0024]

[0030] FIG. 2B is an image 250 of the gas-filled valve shown in FIG. 2A showing light emission due to CW laser excitation only. Both images 252, 254 are shown from the side, but at an angle to show the three-dimensional arrangement of the pulsed illumination area and the location of the CW laser focus. The extent and location of the pulsed illumination area are visible in these images 252, 254. The outlines 256, 258 of the pulsed illumination area of ​​images 202, 204 of FIG. 2A are also shown. In this embodiment, the relative positions and shapes of the pulsed illumination area and the CW sustained illumination area are such that the two areas are distinct and do not overlap. The more tightly focused the light, the smaller the pulsed illumination area and the higher the density of the pulsed energy delivered to the plasma by the illumination.

[0025]

[0031] The images in Figures 2A and 2B were collected during an experiment to determine the operating parameters of the pulses that result in plasma ignition. Below, some details of the experimental conditions are described. For example, with a pulse rate of 2 kHz and a pulse duration of 1 ns, stable plasma ignition can be achieved in a bulb filled with xenon gas over an energy range of 135 to 225 microjoules. The pulsed light had a wavelength of 1064 nm. For this particular example of experimental configuration, the threshold energy for breakdown light to achieve a stable CW plasma was 135 microjoules. Furthermore, at 210 microjoules, the plasma can be ignited and eventually stabilized, but there may be ignition and extinction of the CW plasma prior to stable operation. Ignition can also be achieved at 225 microjoules. Above 240 microjoules, in some configurations, the CW plasma was no longer stable. The relative positions of the pulsed and CW light illuminations are important. Ignition can be improved or "turned off" by adjusting the alignment of the bulb and the CW laser along the optical axis of the pulsed laser. After ignition of the CW plasma, the CW laser power could be reduced down to 8-10 watts and still maintain the CW laser plasma. A reliable transition from pulsed to CW occurred at any value of CW laser power above 15.5 watts. There was no upper limit to the CW laser power. As will be appreciated by those skilled in the art, beam quality affects the energy delivered to the gas for a given laser power.

[0026]

[0032] Another feature of the electrodeless ignition of the present teachings is the recognition that CW plasma ignition can be performed as a two-step process. In the first step, the xenon gas is broken down by applying a laser pulse. In the second step, there is a transition or "handoff" from the pulsed plasma to the sustained CW plasma. A successful handoff is then achieved when the pulsed laser light is shut off after the sustained plasma begins to develop. For example, the handoff can be achieved by shutting off the "first light" of the CW plasma. It is important to shut off the pulsed light before any additional pulses after ignition, since subsequent pulses may destroy the CW plasma light. The number of pulses that can be tolerated depends on the power of the CW plasma light. In some embodiments, the pulsed light is extinguished with a time delay short enough that the next pulse in the period after the ignition pulse is extinguished.

[0027]

[0033] FIG. 3 is a flow diagram 300 of steps for a method of igniting a plasma in an electrodeless laser-driven light source in accordance with the present teachings. Flow diagram 300 illustrates steps for controlling the delivery of energy to a plasma region contained in a gas-filled bulb to generate high-brightness light, where the plasma is ignited by illumination, not by electrical energy delivered by electrodes as in prior art high-brightness light sources. In a first step 302, electromagnetic energy is delivered to the gas in the bulb using a continuous CW laser light. This can be referred to as a CW sustaining light. In some embodiments, the gas is xenon gas. In a second step 304, a laser pulse is generated by delivering pump laser light to a Q-switched crystal. One feature of the present teachings is the recognition that the pulse delivered by the Q-switched crystal can be controlled by controlling the application of pump light to the crystal. In a third step 306, the laser pulse is delivered to the gas in the bulb to create a breakdown region in the gas. In a fourth step 308, the CW laser light delivered to the bulb is absorbed when a suitable density of ions and electrons generated by the pulsed light is reached. In a fifth step 310, the absorption of the CW laser light energizes ions and electrons to generate a CW plasma that emits high brightness light in the plasma region, i.e., the CW plasma light is generated from the bulb by the electromagnetic energy provided by the CW sustain light.

[0028]

[0034] In a sixth step 312, a portion of the high brightness light emitted from the bulb is detected by a detector. The detector generates a plasma detection signal in response to the portion of the CW plasma light received. This signal can be provided to a controller. In a seventh step 314, the pump laser is turned off when the plasma detection signal exceeds a predetermined threshold. The pump is turned off, causing the pulse to be interrupted; that is, the pulsed light disappears in response to the cessation of the pump light from the Q-switched crystal. In some embodiments, the controller turns off the laser pump. In an eighth step 316, the CW plasma is maintained using a CW sustain light. Note that in some embodiments, the CW continuous light is nominally a continuous light source generated by a pulsed laser operating at a high pulse repetition rate.

[0029]

[0035] Various embodiments of the laser-driven high brightness source with electrodeless ignition of the present teachings use different parameters of the light delivered to the gas. For example, the repetition rate of the Q-switched laser pulses can be controlled. The pulse energy of the pulsed light delivered to the gas can be controlled. The duration of the Q-switched laser pulses can also be controlled. In addition, the power of the CW laser light is also controlled. In some embodiments, the pulse repetition rate of the pulsed laser light is between 1 kHz and 20 kHz.

[0030]

[0036] Experimental and / or theoretical evaluations have determined that, for example, a Q-switched laser crystal can provide a good quality CW plasma when the Q-switched laser crystal is configured such that the pulse repetition rate of the pulsed laser light is 1 kHz or less. A continuous wave plasma can be generated when the Q-switched laser crystal is configured such that the pulse energy of the pulsed laser light is in the range of 50 microjoules to 500 microjoules.

[0031]

[0037] Continuous wave plasmas are generated at various pulse energies, pulse durations, and CW output conditions depending on the particular configuration. For example, continuous wave plasmas are generated when the Q-switched laser crystal is configured such that the pulse energy of the pulsed laser light ranges from 500 microjoules to 5 millijoules. In addition, continuous wave plasmas can be generated when the Q-switched laser crystal is configured such that the pulse duration of the pulsed laser light ranges from 0.1 ns to 10 ns. Continuous wave plasmas can also be generated when the CW laser source is configured such that the power of the CW sustaining light ranges from 5W to 50W. Continuous wave plasmas can also be generated when the CW laser source is configured such that the power of the CW sustaining light ranges from 5W to 1500W. The above ranges are merely examples of operating ranges and are not intended to limit the present teachings.

[0032]

[0038] One feature of the present teachings is that detection of the CW plasma can be used to control the ignition pulsed laser light. In some embodiments, this control prevents the disappearance of the CW plasma pulse or other undesirable effects after the plasma is ignited. FIG. 4 shows a series of oscilloscope traces 400 of pulsed laser illumination, pump laser illumination, and plasma emission from an electrodeless laser-driven light source in accordance with the present teachings. The series of oscilloscope traces 400 show the timing of laser operation and plasma light generation in an embodiment of an electrodeless laser-driven light source of the present teachings. In FIG. 4, a measured pulsed laser illumination trace 402, a measured pump laser illumination trace 404, and a measured plasma emission trace 406 are shown as a function of time in the series of oscilloscope traces 400. The presence of the pump light, shown in trace 404, generates two pulses 408, 410 visible in the pulsed light trace 402. Plasma ignition begins after the second pulse 410, increasing the measured CW plasma light, shown in trace 406.

[0033]

[0039] The controller used in the system generating these data is configured to shut off 414 the pump when the detected CW plasma light, shown in trace 406, reaches a threshold value 412. An extinguished pulse from the Q-switched crystal is shown in trace 402. Various control configurations are possible instead of or in addition to the conditions shown in the series of oscilloscope traces 400 of FIG. 4. The shutoff of the pump laser or extinguishing of the pump laser light is nominally configured to occur immediately after the CW plasma light threshold is reached. The shutoff of the pump laser or extinguishing of the pump laser light may be configured to occur a predetermined delay after the CW plasma light threshold is reached. Various thresholds may be used in various methods according to the present teachings to achieve the desired performance.

[0034]

[0040] In some embodiments, the detection signal represents plasma light power and the threshold is selected to be a desired percentage of plasma light power to operating power. In some embodiments, the desired percentage is nominally 50%. In other embodiments, the desired percentage is nominally 90%. In yet other embodiments, the desired percentage is between 30% and 95%.

[0035]

[0041] The predetermined delay can be selected to have a particular relationship to the pulse duration of the pulsed laser light, such that the pump is shut off before the next pulse of the pulse sequence occurs. In some embodiments, the period between pulses of the pulsed laser light is longer than the time delay. In some embodiments, the controller is configured such that the time delay is shorter than one pulse duration of the pulsed laser light. It should be understood that the Q-switched crystal and / or pump configuration and power level can be adjusted to control the pulse duration.

[0036]

[0042] One feature of the present teachings is that different known Q-switch crystals can be used. The wavelength of the pulsed light must be appropriate to cause breakdown of the gas species of the valve. FIG. 5A shows an embodiment of a Q-switch crystal 500 including a gain region 502 and a saturable absorber region 504 according to the present teachings. As will be appreciated by those skilled in the art, different host materials and dopants can be used to provide suitable gain region 502 and saturable absorber region 504. For example, the crystal 500 can have a host material that can be a glass host, an yttrium aluminum garnet host, or a spinel host. For example, the crystal 500 can have a dopant in one or both of the gain region 502 and the saturable absorber region 504 that can be an ytterbium dopant, a chromium dopant, a cobalt dopant, or a vanadium dopant. The Q-switch crystal can also include a narrow band filter that can be used, for example, to reflect at least a portion of the plasma light and / or to block wavelengths in the xenon spectrum. In some embodiments, the Q-switched laser crystal has a coating on one side, which may be, for example, a protective coating, a reflective coating, and / or an anti-reflective coating.

[0037]

[0043] 5B illustrates an embodiment of a yttrium aluminum garnet-based (YAG-based) passively Q-switched laser rod 550 having a curved surface 552 suitable for use in an electrodeless laser driven light source according to the present teachings. The saturable absorber region 554 is a chromium dopant in a yttrium aluminum garnet host. The gain region 556 is an ytterbium dopant in a yttrium aluminum garnet host. The dopant and host contribute to setting the wavelength of the pulsed light and the rise and fall times of the pulse. The length 558 (L2) of the saturable absorber region, the length 560 (L1) of the gain region, and the width 562 (W) of the crystal are selected to provide desired output pulse parameters including, for example, pulse repetition rate, pulse duration, and pulse energy.

[0038]

[0044] Q-switched crystals are a proven technology. For example, Q-switched crystals are used in known passively Q-switched microchip lasers. As one specific example, a microchip laser using a crystal with saturable absorber region length 558 (L2) = 1.36 mm, gain region length 560 (L1) = 3 mm, and crystal width 562 (W) = 3 mm, similar to the crystal 550 described with respect to FIG. 5B, delivered 1.6 ns pulses with 74 microjoules of energy at a repetition rate of 14 kHz, from a pump power of 10 W with a pump laser at a wavelength of 970 nm. With increasing pump power, the average output power and generated pulse repetition rate can be increased to 1 W and 13.6 kHz, respectively, for a pump power of 9.3 W. The maximum output power can be reached without noticeable thermal rollover. An average pulse width of 1.58 ± 0.04 ns can also be achieved. In practice, pulse energies of 73.8±0.7 μJ and peak power values ​​of 46.0±0.8 kW, respectively, could be achieved. One feature of the present teachings is the ability to achieve electrodeless ignition with pulsed light parameters achievable with such a highly available, compact and reliable light pulse source provided by the Q-switched crystals 500, 550.

[0039]

[0045] The pump efficiency and pulse output depend on various characteristics of the crystals 500, 550, including the gain crystal 502, 556, doping element (e.g., YB or Nd), doping percentage, and diameter and length. For the saturable absorber crystals 504, 552, it is the doping element (e.g., Cr or V), doping percentage, percent of initial absorption, diameter and / or length. In some embodiments, reflective and / or transmissive coatings for the pump wavelength and the pulsed light wavelength are provided at one or more ends of the crystals 500, 550. For example, a Yb:YAG-Cr:YAG combined crystal can include a coating at the Yb:YAG end that is highly transmissive for 940 nm and highly reflective for 1030 nm. The crystal can also have a coating at the Cr:YAG end that is only partially reflective at 1030 nm (i.e., the output coupler). While many Q-switched lasers have a pump configuration with a saturable absorber and output coupler at the end opposite the incoming pump laser, pulsed Q-switched crystals for electrodeless ignition can have an output coupler at the pump input end rather than the saturable absorber end.

[0040]

[0046] Some embodiments of the crystals 500, 550 may have undoped ends around the Yb and Cr YAG, which may be referred to as non-absorbing mirrors. Such a configuration avoids thermal overload and facet breakage. In the gain regions 502, 556, Nd:YAG gain media is common and relatively low cost. Nd:YAG gain regions 502, 556 are pumped at 808 nm and emit at 1064 nm. Yb:YAG gain regions 502, 556 are less common and more expensive. This material is pumped at wavelengths of 940 nm or 970 nm and emits at 1030 nm. Such Yb:YAG crystals are most commonly coated to accommodate 940 nm pumping. Crystals coated for 940 nm may not work well at 970 nm (e.g., 940 nm coatings transmit only 60% at 970 nm). In addition, 940 nm wavelength light is generally easier to separate from 1030 nm than 970 nm light. It is also possible to pump Yb-doped glass at 975 nm. This pump wavelength is the same as that used in known laser-driven light sources.

[0041]

[0047] Some important features of the design of the Q-switched crystals generating pulsed light for electrodeless ignition according to the present teachings include, for example, the choice of laser wavelength, the order of placement of coatings, gain sections, saturable absorber sections, and the direction of pump pulse input and output. Other important features include coupling / separation of the pump beam and plasma beam, and addressing the need to protect the CW laser from the pulses generated by the Q-switched crystal. Referring again to Figures 1A and 1B, different embodiments of the light source 100, 150 have different configurations for the location of the pump laser 116, 162, Q-switched crystal 112, 158, and CW laser 122, 170, which affect these design choices. In addition, because of the high pulse energy, crystal mounting and associated thermal management are important considerations.

[0042]

[0048] FIG. 6 is a graph 600 of the pump laser pulse energy and pump current threshold to generate a laser pulse sufficient to cause gas breakdown as a function of the pulse length of the quasi-CW (QCW) pump pulse used in an embodiment of an electrodeless laser-driven light source according to the present teachings. That is, the pulse length is the width of the repetitive pulse (e.g., the width of the pulse of a square wave signal) used to generate the quasi-CW pump light signal. The graph 600 represents measurements on a bulb containing xenon gas. The graph 600 shows exemplary operating points and indicates that operation can occur over a range of pulse durations. The threshold is above a pulse length of 500 microseconds. It should be noted that various embodiments of the light source of the present teachings can be operated with different parameters than those shown in this exemplary data. As a specific example, some example operating parameters for pulse ignition and transition handoff for a 22 atmosphere cryogenic bulb filled with xenon gas are as follows: (1) CW transfer handoff can be achieved with CW laser power as low as 14 W at a wavelength of 980 nm, (2) CW transfer handoff can be achieved with CW laser light central wavelength as low as 972 nm, (3) near instantaneous CW transfer handoff can be achieved with CW laser light central wavelength as low as 975 nm, and 4) CW transfer handoff can be achieved with CW laser power as high as 50 W. When the laser spectral content at 980 nm is zero, the transfer handoff can take from a few seconds to a minute or two. When the CW laser power is 20 W, the central wavelength deviation is 1-2 nm off the 980 nm central wavelength for a smooth transfer handoff. With a 30 atmosphere cold-fill bulb, it is possible to achieve a CW transfer handoff with 30 W from a CW laser and a central wavelength of 976 nm. In general, ignition is stronger with a high pressure bulb than with a low pressure bulb. For example, a valve at a pressure above 30 atm will generally have a stronger ignition than a valve at a pressure of about 22 atm.

[0043]

[0049] FIG. 7 illustrates a valve system 700 including a bare bulb 702 with focusing lens assemblies 704, 706 for use in an embodiment of an electrodeless laser-driven light source according to the present teachings. A plasma region 708 is shown. The focusing lens assemblies 704, 706 are arranged in planes that are oriented 90 degrees from each other. One assembly 704 directs pulsed light to the plasma region 708 of the bulb 702, and the other assembly 706 directs CW sustain light to the plasma region 708 of the bulb 702. As described herein, the shapes of the pulsed illumination and the CW sustain illumination of the plasma region 708 may be the same or different. The positions of the pulsed illumination and the CW sustain illumination of the plasma region 708 may be overlapping or separate. In some embodiments, the bulb 702 is filled with xenon gas. In some embodiments, the bulb 702 is formed in a spherical shape. Also, in some embodiments, the pressure of the gas-filled bulb 702 may be a pressure between 20 atm and 50 atm.

[0044] [Equivalent]

[0050] While applicants' teachings have been described in conjunction with various embodiments, it is not intended that applicants' teachings be limited to such embodiments. On the contrary, applicants' teachings encompass various alternatives, modifications, and equivalents, as will be appreciated by those skilled in the art, which can be made without departing from the spirit and scope of the present teachings.

[0045] The following provisions are included in this specification: [Clause 1] a) a laser source generating continuous wave (CW) sustained light at its output; b) a pump laser generating pump light at its output; c) a Q-switched laser crystal positioned to receive the pump light generated at the output of the pump laser, the Q-switched laser crystal generating pulsed laser light at its output in response to the generated pump light; d) a first optical element disposed in a path of the pulsed laser light that projects the pulsed laser light along a first axis to a breakdown region of a gas-filled bulb containing an ionized gas; e) a second optical element disposed in the path of the CW sustain light for projecting the CW sustain light along a second axis into a CW plasma region of the gas-filled bulb containing the ionized gas; and f) a detector for detecting plasma light generated by the CW plasma located at least partially in said CW plasma region and for generating a detection signal at an output; g) a controller having an input electrically connected to the output of the detector and an output electrically connected to a control input of the pump laser, the controller generating a control signal to control the pump light to the Q-switched laser crystal to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level; 1. An electrodeless laser driven light source comprising: [Clause 2] 2. An electrodeless laser driven light source as described in clause 1, wherein the detection signal represents an output of the plasma light and the threshold level is a desired ratio of the output of the plasma light to operating power. [Clause 3] 3. The electrodeless laser driven light source of claim 2, wherein the desired percentage is nominally 50%. [Article 4] 3. The electrodeless laser driven light source of claim 2, wherein the desired percentage is nominally 90%. [Article 5] 3. The electrodeless laser driven light source according to claim 2, wherein the desired ratio is in the range of 30% to 95%. [Article 6] 2. The electrodeless laser driven light source of claim 1, wherein the period between pulses of the pulsed laser light is longer than the time delay. [Article 7] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal is configured such that the period between pulses of the pulsed laser light is longer than the time delay. [Article 8] 2. The electrodeless laser driven light source of claim 1, wherein the controller is configured such that the time delay is shorter than one pulse period of the pulsed laser light. [Article 9] The electrodeless laser driven light source described in clause 1, further comprising a third optical element disposed in a path of the generated pump light and in a path of the generated pulsed laser light, the third optical element configured to separate the generated pump light from the generated pulsed laser light. [Article 10] 10. The electrodeless laser driven light source of claim 9, wherein the third optical element comprises a dichroic element. [Article 11] 10. The electrodeless laser driven light source of claim 9, wherein the third optical element is configured to reflect the generated pump light. [Article 12] 10. The electrodeless laser driven light source of claim 9, wherein the third optical element is configured to transmit the generated pulsed laser light. [Article 13] Item 2. The electrodeless laser driven light source of item 1, wherein the first axis and the second axis are the same axis. [Article 14] Item 2. The electrodeless laser driven light source of item 1, wherein the first axis and the second axis are different axes. [Article 15] Item 2. The electrodeless laser driven light source of item 1, wherein the first axis and the second axis are collinear. [Article 16] Item 2. The electrodeless laser driven light source described in item 1, wherein the Q-switched laser crystal is configured so that the pulse repetition rate of the pulsed laser light is in the range of 1 kHz to 20 kHz. [Article 17] 2. The electrodeless laser driven light source described in clause 1, wherein the Q-switched laser crystal is configured so that the pulse repetition rate of the pulsed laser light is 1 kHz or less. [Article 18] 2. The electrodeless laser driven light source described in clause 1, wherein the Q-switched laser crystal is configured such that the pulse energy of the pulsed laser light is in the range of 50 μJoules to 500 μJoules. [Article 19] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal is configured such that the pulse energy of the pulsed laser light is in the range of 500 μJoules to 5 mJoules. [Article 20] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal is configured such that the pulse duration of the pulsed laser light is in the range of 0.1 ns to 10 ns. [Article 21] 2. The electrodeless laser driven light source of claim 1, wherein the laser source is configured such that the output of the CW sustain light is in the range of 5W to 50W. [Article 22] 2. The electrodeless laser driven light source described in clause 1, wherein the laser source is configured so that the output of the CW sustain light is in the range of 5W to 1500W. [Article 23] 2. The electrodeless laser driven light source described in clause 1, wherein the first optical element comprises a focusing lens. [Article 24] 2. The electrodeless laser driven light source described in clause 1, wherein the second optical element comprises a focusing lens. [Article 25] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal comprises a gain section and a saturable absorber section. [Article 26] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal comprises at least one of a glass host, a yttrium aluminum garnet host, or a spinel host. [Article 27] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal comprises at least one of a chromium dopant, a cobalt dopant, or a vanadium dopant. [Article 28] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal comprises a narrow band filter. [Article 29] 29. The electrodeless laser driven light source of claim 28, wherein the narrow band filter reflects at least a portion of the plasma light. [Article 30] 29. The electrodeless laser driven light source of claim 28, wherein the narrow band filter blocks wavelengths in the xenon spectrum. [Article 31] 2. The electrodeless laser driven light source of claim 1, wherein the Q-switched laser crystal includes a coating on one side. [Article 32] 2. The electrodeless laser driven light source of claim 1, wherein the gas filled bulb contains xenon gas. [Article 33] 2. The electrodeless laser driven light source of claim 1, wherein the gas-filled bulb is spherically shaped. [Article 34] 2. The electrodeless laser driven light source of claim 1, wherein the gas-filled valve pressure comprises a pressure in the range of 20 atm to 50 atm. [Article 35] a) providing electromagnetic energy to a gas in a gas-filled bulb using a continuous wave (CW) sustained light; b) providing laser pump radiation to a Q-switched laser crystal such that a laser pulse is generated; c) forming a pulsed plasma in a breakdown region by supplying the laser pulses generated by the Q-switched laser crystal to the gas in the gas-filled valve; d) in response to forming the pulsed plasma in the breakdown region, generating a CW plasma in a CW plasma region using the electromagnetic energy delivered to the gas such that plasma light is emitted from the gas-filled bulb; e) detecting a portion of the emitted plasma light and generating a detection signal; f) extinguishing the laser pulse by extinguishing the laser pump radiation to the Q-switched laser crystal within a time delay after the detection signal exceeds a threshold level; 23. A method for igniting an electrodeless high intensity plasma light source, comprising: [Article 36] 36. The method of igniting an electrodeless high intensity plasma light source of claim 35, wherein the generated detection signal is representative of an output of the plasma light, and the threshold level is a desired ratio of the output of the plasma light to operating power. [Article 37] 36. A method of igniting an electrodeless high intensity plasma light source as described in clause 35, wherein the breakdown region and the CW plasma region overlap in space. [Article 38] 36. The method of igniting an electrodeless high intensity plasma light source of claim 35, wherein the breakdown region and the CW plasma region are physically separated. [Article 39] 36. The method of igniting an electrodeless high intensity plasma light source of claim 35, wherein the time delay is less than one pulse duration of the laser pulse. [Article 40] 36. The method of igniting an electrodeless high intensity plasma light source according to clause 35, wherein the pulse energy of the laser pulse is in the range of 50 μJoules to 500 μJoules. [Article 41] 36. The method of igniting an electrodeless high intensity plasma light source according to clause 35, wherein the pulse energy of the laser pulse is in the range of 500 μJoules to 5 mJoules. [Article 42] 36. The method of igniting an electrodeless high intensity plasma light source according to clause 35, wherein the laser pulse has a pulse duration in the range of 0.1 ns to 10 ns. [Article 43] 36. The method of igniting an electrodeless high intensity plasma light source according to clause 35, wherein the output power of said CW sustain light is in the range of 5W to 1500W.

Claims

1. 1. A method for generating light with a laser driven light source, comprising: a) generating a continuous wave (CW) sustained light; b) propagating the CW sustain light through a gas-filled bulb containing an ionized gas; c) generating pump light; d) irradiating the generated pump light onto a Q-switched laser crystal, thereby generating pulsed laser light; e) propagating the generated pulsed laser light into the gas-filled bulb containing the ionized gas, thereby generating a light-outputting CW plasma; f) detecting light produced by the CW plasma in the gas-filled bulb containing the ionized gas; g) controlling the pump light to extinguish the pulsed laser light after the light generated by the CW plasma is detected; 23. A method for generating light with a laser driven light source, comprising:

2. The method according to claim 1 , wherein the pulse repetition rate of the pulsed laser light is in the range of 1 kHz to 20 kHz.

3. The method of claim 1 , wherein the pulse repetition rate of the pulsed laser light is 1 kHz or less.

4. The method of claim 1 , wherein the pulse energy of the pulsed laser light is in the range of 50 μJoules to 500 μJoules.

5. 2. The method of claim 1, wherein the pulse energy of the pulsed laser light is in the range of 500 μJoules to 5 mJoules.

6. 2. The method of claim 1, wherein the pulse duration of the pulsed laser light is in the range of 0.1 ns to 10 ns.

7. The method of claim 1, wherein the power of the CW sustain light is in the range of 5W to 50W.

8. The method of claim 1, wherein the power of the CW sustain light is in the range of 5W to 1500W.

9. The method of claim 1 , wherein generating the pulsed laser light by irradiating the Q-switched laser crystal comprises providing optical gain.

10. The method of claim 1 , wherein generating the pulsed laser light by irradiating the Q-switched laser crystal comprises providing saturable absorption.

11. The method of claim 1 , wherein generating the pulsed laser light by irradiating the Q-switched laser crystal comprises narrow band filtering.

12. The method of claim 11 , further comprising reflecting at least a portion of the plasma light.

13. The method of claim 11 , wherein the narrow band filter blocks wavelengths in a spectrum produced by the gas in the gas-filled valve.

14. The method of claim 1 , wherein the pressure in the gas-filled valve comprises a pressure in the range of 20 atm to 50 atm.

15. The method of claim 1 , wherein controlling the pump light to extinguish the pulsed laser light is performed within a time delay after the light produced by the CW plasma is detected.

16. The method of claim 1 , wherein controlling the pump light to extinguish the pulsed laser light comprises extinguishing the pump light.

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