Magnifying observation device

Abstract

To provide a magnifying observation device that is vibration-proof and makes it possible to magnify and observe a large-size object.SOLUTION: A magnifying observation device 10 comprises: a base 1; a placement table 2 provided on the base 1 and having a horizontal top face 20; a support column 5 extending from the base 1 in the vertical direction; and a moving stage 6 having a rail 61 and a holding body 62. The rail 61 is rotatably supported centered on a first rotation axis 11 parallel to a first direction along the horizontal top face 20. The holding body 62 is movable along the rail 61 and holds an observation head 4. The magnifying observation device 10 further comprises: a block 3 removably attached to the horizontal top face 20, and on which an object OB is placed; and an image creation unit 7 creating an observation image. The first rotation axis 11 passes through the moving stage 6. The block 3 is attached to be changeable to a second direction (direction orthogonal to first direction) along the horizontal top face 20. The rail 61 can be adjusted to an angle position, where the direction of movement of the holding body 62 is orthogonal to the horizontal top face 20, with respect to the support column 5.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a magnification observation device. [Background technology]

[0002] Patent Document 1 discloses a magnification observation device (microscope device 100). As shown in Fig. 3 of Patent Document 1, the magnification observation device described in Patent Document 1 includes an observation head (microscope head unit 4) that magnifies and observes an object (observation object S). The observation head is supported by a support column (support base 40).

[0003] In the magnification observation device described in Patent Document 1, in order to ensure eucentricity, a first rotation axis (oscillation axis 45) is provided on a support column at the height of the object. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2015-127780 A Summary of the Invention [Problem to be solved by the invention]

[0005] Incidentally, in the magnification observation device described in Patent Document 1, when a large object is magnified and observed, the swinging portion 46 and head arm 49 constituting the support column (support base 40) must also be made large.

[0006] If the swinging part 46 and the head arm 49 are enlarged, the center of gravity of the rotating (swinging) part and the first rotation axis will inevitably be farther apart. Therefore, the magnification observation device described in Patent Document 1 may lose vibration resistance if configured to magnify and observe a large object.

[0007] The present invention has been made in consideration of the above-mentioned problems, and has an object to provide a magnification observation device that is vibration-resistant and can generate images for magnifying and observing large objects. [Means for solving the problem]

[0008] According to one aspect of the present invention, a magnification observation device observes an object under magnification. The magnification observation device includes a base, a mounting table, a support column, a moving stage, an observation head, a block, and an image generating unit. The mounting table is provided on the base and has a horizontal upper surface. The support column extends vertically from the base. The moving stage has a rail and a holder. The rail is supported by the support column so as to be rotatable about a first rotation axis parallel to a first direction that is a direction along the horizontal upper surface. The holder is movable along the rail. The observation head has a camera. The camera captures an image of the object via an objective lens to generate an image of the object. The observation head is held by the holder so that the optical axis of the camera is aligned with the moving direction of the holder of the moving stage. The block is detachable from the horizontal upper surface of the mounting table, and the object is placed on the block. The image generating unit generates an observation image based on an image from the camera of the observation head. The first rotation axis passes through the moving stage. The position where the block is attached to the horizontal top surface can be changed in a second direction that is a direction along the horizontal top surface. The first direction and the second direction are perpendicular to each other. The rail of the moving stage can be adjusted to an angular position relative to the support column such that the moving direction of the holder of the moving stage is perpendicular to the horizontal top surface. Effect of the Invention

[0009] According to the magnification observation device of the present invention, it is possible to observe a large object under magnification while maintaining vibration resistance. [Brief description of the drawings]

[0010] [Figure 1] FIG. 2 is a schematic diagram showing a front view of the magnification observation device. [Diagram 2] FIG. 2 is a perspective view of the magnification observation device as viewed from above and in front. [Diagram 3]FIG. 2 is a perspective view of the magnification observation device as viewed from above and behind. [Figure 4] FIG. [Diagram 5] FIG. [Figure 6] FIG. 2 is a perspective view of the magnification observation device with the block removed from the mounting table. [Figure 7] FIG. 2 is an enlarged perspective view of the magnification observation device with the rotating plate removed from the block. [Figure 8] FIG. 2 is an enlarged perspective view of the magnification observation device with the object removed from the rotating plate. [Figure 9] FIG. 13 is an enlarged perspective view of a magnification observation device in which blocks are arranged in two stages. [Figure 10] FIG. [Figure 11] FIG. 2 is an enlarged right side view of the lower part of the magnification observation device. [Figure 12] 11 is a bottom view showing a plurality of base legs provided in the magnification observation device. FIG. [Figure 13] 13 is a bottom view showing a modified example of a plurality of base legs provided in the magnification observation device. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference symbols, and the description will not be repeated. In the following description, terms meaning positions or directions such as "upper" and "lower" may be used. These terms are used for convenience to facilitate understanding of the embodiment, and are not limited to "upper" and "lower" in the strict sense of the vertical direction, unless otherwise clearly stated.

[0012] An overview of a magnification observation device 10 according to an embodiment of the present invention will be described with reference to Fig. 1. Fig. 1 is a schematic diagram showing a front view of the magnification observation device 10.

[0013] 1, the magnification observation device 10 provides an observation image for magnifying and observing an object OB. The magnification observation device 10 includes a base 1, a mounting table 2, a support column 5, a moving stage 6, an observation head 4, a block 3, and an image generating unit 7.

[0014] The mounting table 2 is provided on the base 1 and has a horizontal upper surface 20. The support column 5 extends vertically from the base 1.

[0015] The moving stage 6 has a rail 61 and a holder 62. The rail 61 is supported by the support column 5 so as to be rotatable about a first rotation axis 11 parallel to a first direction (Y direction) that is a direction along the horizontal upper surface 20. The holder 62 is movable along the rail 61.

[0016] The observation head 4 has a camera 42. The camera 42 captures an image of the object OB through the objective lens 40 to generate an image of the object OB. The observation head 4 is held by a holder 62 so that the optical axis L of the camera 42 is aligned with the moving direction of the holder 62 of the moving stage 6. The magnification observation device 10 can adjust the focus of the camera 42 by moving the observation head 4 by the moving stage 6. In addition, since the rail 61 is supported rotatably about a first rotation axis 11 parallel to a first direction (Y direction) that is a direction along the horizontal upper surface 20 with respect to the support column 5, the camera 42 also rotates about the first rotation axis 11 in response to the rotation of the rail 61. As a result, the magnification observation device 10 can provide an observation image in which the surface of the object OB, including the end face and side surfaces such as grooves, is enlarged.

[0017] The block 3 is detachably attached to the horizontal upper surface 20 of the mounting table 2, and an object OB is placed on the block 3. The image generating unit 7 generates an observation image based on an image from the camera 42 of the observation head 4. The first rotation axis 11 passes through the moving stage 6. The position of the block 3 attached to the horizontal upper surface 20 is changeable in a second direction (X direction) that is a direction along the horizontal upper surface 20.

[0018] The first direction (Y direction) and the second direction (X direction) are perpendicular to each other. The rails 61 of the moving stage 6 can be adjusted relative to the support columns 5 to an angle position such that the moving direction of the holder 62 of the moving stage 6 is perpendicular to the horizontal upper surface 20.

[0019] Since the first rotation axis 11 passes through the moving stage 6, even if the magnification observation device 10 is enlarged for tilted observation of a large object OB, the distance from the center of gravity of the part rotating around the first rotation axis 11 to the first rotation axis 11 is short. Therefore, even if the magnification observation device 10 is enlarged for tilted observation of a large object OB, it has vibration resistance. Also, since the first rotation axis 11 passes through the moving stage 6, the magnification observation device 10 loses eucentricity. However, the block 3 on which the object OB is placed is attached to the mounting table 2 by moving the object OB closer to the observation head 4 along the Z direction and changing its position in the X direction. Therefore, the magnification observation device 10 can provide an image of the object OB enlarged and tilted by rotating the observation head 4 around the first rotation axis 11, that is, by tilting the observation head 4. As described above, the magnification observation device 10 can generate an image of the object OB enlarged and tilted while having vibration resistance.

[0020] A magnification observation device 10 according to an embodiment of the present invention that is more practical will be described with reference to Figs. 2 to 5. Fig. 2 is a perspective view of the magnification observation device 10 as viewed from above the front. Fig. 3 is a perspective view of the magnification observation device 10 as viewed from above the rear. Fig. 4 is a right side view of the magnification observation device 10. Fig. 5 is a front view of the magnification observation device 10.

[0021] 2, the magnification observation device 10 is a device for magnifying and observing an object OB. The magnification observation device 10 includes a base 1, a mounting table 2, a block 3, an observation head 4, a support column 5, a moving stage 6, and an image generating unit 7.

[0022] The mounting table 2 is provided on the base 1 and has a horizontal upper surface 20. The block 3 can be attached and detached to the horizontal upper surface 20 of the mounting table 2, and the object OB is placed on the block 3. The observation head 4 observes the object OB in a magnified state. The support column 5 is provided on the base 1 and supports the observation head 4. The moving stage 6 moves the observation head 4 closer to or away from the horizontal upper surface 20 of the mounting table 2 along the optical axis L of the camera 42 of the observation head 4. When the rail 61 of the moving stage 6 is adjusted to an angle position relative to the support column 5 such that the moving direction of the holder 62 of the moving stage 6 is perpendicular to the horizontal upper surface 20, the moving stage 6 moves the observation head 4 closer to or away from the horizontal upper surface 20 of the mounting table 2 along the Z direction. The Z direction is the direction from the horizontal upper surface 20 of the mounting table 2 to the observation head 4. The image generating unit 7 generates an observation image of the object OB to be observed in a magnified state.

[0023] The observation head 4 is rotatable about a first rotation axis 11 parallel to the Y direction. The Y direction is a direction along the horizontal upper surface 20 of the mounting table 2. The first rotation axis 11 passes through the moving stage 6. The position at which the block 3 is attached to the horizontal upper surface 20 of the mounting table 2 can be changed in the X direction. The X direction is a direction along the horizontal upper surface 20 of the mounting table 2. The X direction, Y direction, and Z direction are perpendicular to each other.

[0024] Since the first rotation axis 11 passes through the moving stage 6, even if the magnification observation device 10 is enlarged to observe a large object OB, the distance from the center of gravity of the part rotating around the first rotation axis 11 to the first rotation axis 11 is short. Therefore, even if the magnification observation device 10 is enlarged to observe a large object OB, it has vibration resistance. Also, since the first rotation axis 11 passes through the moving stage 6, the magnification observation device 10 loses eucentricity. However, the block 3 on which the object OB is placed is attached to the mounting table 2 by moving the object OB closer to the observation head 4 along the Z direction and changing its position in the X direction. Therefore, the magnification observation device 10 can provide an image of, for example, an end face of a disk-shaped object OB being enlarged and observed by rotating the observation head 4 around the first rotation axis 11, that is, by tilting the observation head 4. As described above, the magnification observation device 10 can generate an observation image for enlarging and observing a large object OB while having vibration resistance.

[0025] The magnification observation device 10 will be described in further detail below with reference to FIGS.

[0026] As shown in FIG. 2, the mounting table 2 may have a horizontal upper surface 20 on which the block 3 is attached, which can be moved in the X and Y directions relative to the base 1. Such a mounting table 2 is also referred to as an XY direction stage. The mounting table 2, which is an XY direction stage, has a lower pedestal portion 26, a middle X direction stage 22, and an upper Y direction stage 21. The pedestal portion 26 is fixed to the base 1. The X direction stage 22 is placed on the pedestal portion 26 and can move in the X direction relative to the pedestal portion 26. The Y direction stage 21 is placed on the X direction stage 22 and can move in the Y direction relative to the X direction stage 22. The horizontal upper surface 20 of the Y direction stage 21 can be used to attach and detach the block 3.

[0027] The magnification observation device 10 may further include a display 72. The display 72 displays an image based on the data of the image generated by the image generation unit 7. That is, the display 72 displays an enlarged image of the object OB. Illustrations of the image generation unit 7 and the display 72 are omitted from FIG. 3 onward.

[0028] The magnification observation device 10 further includes an information processing unit 71. The information processing unit 71 has a control circuit, an electric circuit, etc. The control circuit and the electric circuit control and drive the mounting table 2 and the moving stage 6, which are XY direction stages.

[0029] As shown in Figs. 2 to 5, the observation head 4 has a plurality of (for example, four) objective lenses 40, a revolver 41, and an imaging device having a camera 42. The objective lenses 40 have different magnifications. The revolver 41 rotates to select one of the objective lenses 40. The selected objective lens 40 is used to magnify and observe the object OB.

[0030] The imaging device has a non-telecentric lens (not shown), a camera 42 (imaging element), and a transmission unit (not shown). The objective lens 40 selected by the revolver 41 and the non-telecentric lens observe the object OB. The camera 42 (imaging element) captures an image of the object OB observed under magnification, thereby creating image data (raw image data) of the object OB observed under magnification. The transmission unit transmits the created image data to the image generation unit 7. The image generation unit 7 generates an observation image (image processed for observation) of the object OB observed under magnification from the received data.

[0031] The magnification observation device 10 may include a controller (not shown). Using the controller, a user can operate the mounting table 2, which is an XY direction stage, the moving stage 6, and the revolver 41. Operations that can be performed using the controller include the movement of the mounting table 2 and the moving stage 6, which are the XY direction stage, and the rotation of the revolver 41.

[0032] The magnification observation device 10 further includes a rotating holder 8. The rotating holder 8 is provided on the support column 5 so as to be rotatable about a first rotation axis 11. The rotating holder 8 holds the moving stage 6.

[0033] The rotary holder 8 eliminates the need for a rotary mechanism in the moving stage 6 and the observation head 4. Therefore, the magnification observation device 10 can have a simple configuration.

[0034] The rotating holder 8 is rotatably connected to the support column 5 at its end in the Y direction, and holds the moving stage 6 at its end in the opposite Y direction. The first rotation axis 11 passes through the rotating holder 8 as well as the moving stage 6. The rotating holder 8 has a shaft 88 (see FIG. 10). The shaft 88 reaches the inside of the support column 5. The shaft 88 constitutes a rotation mechanism.

[0035] The rotary holder 8 has a Z-direction driving mechanism (not shown) therein. The Z-direction driving mechanism moves the observation head 4 in the Z direction by the moving stage 6.

[0036] 2, 3 and 5, the magnification observation device 10 further includes a locking mechanism 9. The locking mechanism 9 can fix the rotation of the rotation holder 8 relative to the support column 5.

[0037] The locking mechanism 9 fixes the rotating holder 8 to the support column 5. Therefore, the observation head 4 held by the rotating holder 8 via the moving stage 6 is fixed at an angle appropriate for magnifying and observing the object OB. As a result, the magnification observation device 10 can obtain an image of the object OB appropriately magnified and observed.

[0038] As shown in FIG. 10, the lock mechanism 9 is provided on the support column 5. The lock mechanism 9 has a lever 90, a lock shaft (not shown), and a brake bracket 58. The lever 90 is disposed outside the support column 5, and the lock shaft and the brake bracket 58 are disposed inside the support column 5. The lever 90 fixes the rotating holder 8 when rotated in one direction, and releases the fixing of the rotating holder 8 when rotated in the other direction. The lock shaft rotates together with the lever 90. The lock shaft reduces the diameter of the brake bracket 58 when rotated in one direction. The lock shaft expands the diameter of the brake bracket 58 when rotated in the other direction. When the brake bracket 58 reduces its diameter, it fixes the shaft body 88 of the rotating holder 8. When the brake bracket 58 expands its diameter, it releases the fixing of the shaft body 88 of the rotating holder 8.

[0039] 4, the support column 5 has a regulating member 50. The rotary holder 8 has a contact member 80. When the movement direction of the holder 62 relative to the rail 61 of the moving stage 6 reaches an angular position perpendicular to the horizontal upper surface 20, the contact member 80 comes into contact with the regulating member 50.

[0040] The magnification observation device 10 further includes a tilt angle measuring unit 13, a tilt angle display unit (not shown), and a display angle correction unit 17. The tilt angle measuring unit 13 measures the tilt angle, which is the angle between the moving direction of the holder 62 relative to the rail 61 of the moving stage 6 and a direction perpendicular to the horizontal upper surface 20. The tilt angle display unit displays the tilt angle. When the abutting member 80 abuts against the regulating member 50, the display angle correction unit 17 causes the tilt angle display unit to display that there is no tilt angle.

[0041] By defining the state in which the contact member 80 contacts the regulating member 50 as an inclination angle of 0°, the convenience of the user is improved. However, due to an angular position shift between the inclination angle measuring unit 13 and the contact member 80 and the regulating member 50, the inclination angle measured by the inclination angle measuring unit 13 may not strictly indicate 0°. In this case, the display angle correction unit 17 displays on the inclination angle display unit that there is no inclination angle (for example, 0°). Therefore, even if the inclination angle measured by the inclination angle measuring unit 13 does not strictly indicate 0° (for example, within the range of ±1°) due to an angular position shift or the like, the inclination angle is displayed as 0°. As a result, the magnification observation device 10 can improve the convenience of the user.

[0042] The inclination angle measurement unit 13 has a base side angle sensor 14, a rotation side angle sensor 15, and a subtraction unit 16. The base side angle sensor 14 is provided on the base 1. The base side angle sensor 14 measures a base side angle, which is an angle between the vertical direction and the Z direction. The rotation side angle sensor 15 is provided on the rotation holder 8. The rotation side angle sensor 15 measures a rotation side angle, which is an angle between the direction observed by the observation head 4 and the vertical direction. The subtraction unit 16 calculates the inclination angle (the angle between the direction observed by the observation head 4 and the Z direction) by subtracting the base side angle from the rotation side angle. Note that the base side angle sensor 14 and the rotation side angle sensor 15 are, for example, acceleration sensors.

[0043] An angle (e.g., ±1°) that is considered to be influenced by angular position deviation or the like is preset in the display angle correction unit 17. If the tilt angle is within the preset angle range, for example, if the tilt angle is greater than or equal to -1° and less than or equal to +1°, the display angle correction unit 17 causes the tilt angle display unit to display that there is no tilt angle (e.g., 0°). The tilt angle display unit may be the display 72 shown in FIG. 2.

[0044] 5, the rotary holder 8 has a rod-shaped handle 81. A central axis 82 of the rod-shaped handle 81 is oriented toward the first rotary shaft 11 and extends along a plane perpendicular to the first rotary shaft 11.

[0045] The rod-shaped handle 81 allows the user to easily rotate the rotation holder 8. Therefore, the magnification observation device 10 can improve the convenience for the user.

[0046] Rod-shaped handle 81 has an easy-to-grip shape, such as a cylindrical shape. Rod-shaped handle 81 has multiple anti-slip circumferential grooves 83 along the direction of its central axis 82. Rod-shaped handle 81 protrudes between the direction opposite to the X direction and the Z direction from rotating holder 8 with an inclination angle of 0° (as shown in FIG. 5).

[0047] Therefore, by pressing down the rod-shaped handle 81, the user can orient the observation direction of the observation head 4 toward the object OB placed on the block 3. As a result, the magnification observation device 10 can further improve the convenience for the user.

[0048] The block 3 will be described in detail below with reference to Fig. 6. Fig. 6 is a perspective view of the magnification observation device 10 with the block 3 removed from the mounting table 2.

[0049] 6, the horizontal upper surface 20 of the mounting table 2 has a plurality of positioning holes 23 extending along the second direction (X direction). The block 3 has positioning pins 33 that can be inserted into the positioning holes 23.

[0050] The position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction by the positioning hole 23 and the positioning pin 33. Therefore, the magnification observation device 10 can improve the convenience for the user.

[0051] The positioning pin 33 is located at the center of the block 3 in a bottom view. Therefore, the block 3 is positioned by the positioning pin 33 at the center in a bottom view, and is therefore stable on the horizontal upper surface 20 of the mounting table 2. As a result, the magnification observation device 10 can appropriately magnify and observe the large object OB.

[0052] The horizontal upper surface 20 of the mounting table 2 also has a plurality of anti-rotation holes 24 along the X direction. The block 3 also has anti-rotation pins 34 that can be inserted into the anti-rotation holes 24. The distance between the positioning pins 33 and the anti-rotation pins 34 is equal to the distance between the positioning holes 23 and the anti-rotation holes 24. Therefore, the block 3 is attached to the horizontal upper surface 20 of the mounting table 2 by inserting the positioning pins 33 and the anti-rotation pins 34 into the positioning holes 23 and the anti-rotation holes 24. This prevents the block 3 from rotating and makes it more stable on the horizontal upper surface 20 of the mounting table 2. As a result, the magnification observation device 10 can more appropriately magnify and observe the large object OB.

[0053] The anti-rotation hole 24 may have a larger diameter in the X direction (i.e., an elongated hole) than the positioning hole 23. The edge of the anti-rotation hole 24 may be chamfered into a cone shape. This allows the anti-rotation hole 24 to easily insert the anti-rotation pin 34 while still fulfilling its function of preventing rotation. Therefore, the position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction. As a result, the magnification observation device 10 can improve the convenience for the user.

[0054] The mounting table 2 further has a fixing screw hole 25. The block 3 further has a fixing screw 35 that can be screwed into the fixing screw hole 25. The fixing screw 35 corresponds to the position of the fixing screw hole 25 when the positioning pin 33 is inserted into the positioning hole 23.

[0055] By aligning the position of the fixing screw 35 with the fixing screw hole 25, the positioning pin 33 is inserted into the positioning hole 23. Therefore, when attaching the block 3 to the horizontal upper surface 20 of the mounting table 2, it can be easily attached by aligning the position of the fixing screw 35 with the fixing screw hole 25. Therefore, the position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction. As a result, the magnification observation device 10 can improve the convenience for the user.

[0056] When the mounting table 2 has an anti-rotation hole 24 and the block 3 has an anti-rotation pin 34, the position of the fixing screw 35 is aligned with the fixing screw hole 25, whereby the positioning pin 33 and the anti-rotation pin 34 are inserted into the positioning hole 23 and the anti-rotation hole 24. Therefore, the position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction. As a result, the magnification observation device 10 can improve the convenience for the user.

[0057] Furthermore, by screwing the fixing screw 35 into the fixing screw hole 25, the block 3 is prevented from rattling relative to the mounting table 2. Therefore, the block 3 is securely fixed to the horizontal upper surface 20 of the mounting table 2, and is therefore more stable. As a result, the magnification observation device 10 can more appropriately magnify and observe the large object OB.

[0058] The rotating plate 100 placed on the block 3 will be described in detail below with reference to Fig. 7 and Fig. 8. Fig. 7 is an enlarged perspective view of the magnification observation device 10 with the rotating plate 100 removed from the block 3. Fig. 8 is an enlarged perspective view of the magnification observation device 10 with the object OB removed from the rotating plate 100.

[0059] 7 and 8, the magnification observation device 10 further includes a rotating plate 100. The rotating plate 100 is mounted on the block 3 so as to be rotatable about a second rotation axis 12 perpendicular to the horizontal upper surface 20. An object OB is placed on the rotating plate 100.

[0060] The object OB can easily rotate around the second rotation shaft 12 together with the rotating plate 100. Therefore, the portion of the object OB that is magnified and observed can be easily changed by rotating it. As a result, the magnification observation device 10 can improve the convenience for the user.

[0061] The rotating plate 100 has a metallic disk 101, a resin protective material 108, and radial pins 109 arranged radially.

[0062] As shown in FIG. 8, the metal disc 101 has grooves 102-106 on a surface (upper surface 107) on which the object OB is placed. The grooves 102-106 guide water droplets, for example, when there are water droplets on the object OB. The grooves 102-106 further reduce the contact area between the metal disc 101 and the object OB, thereby preventing the metal disc 101 and the object OB from sticking to each other. The grooves 102-106 have a pair of finger insertion grooves 102, double circular grooves 103 and 104, a horizontal groove 105, and a vertical groove 106. The pair of finger insertion grooves 102 face each other, and are each formed from the outer edge of the metal disc 101 toward the center (second rotating shaft 12). The finger insertion groove 102 is a portion into which a user's fingers are inserted when the user removes the object OB from the rotating plate 100. The double circular groove 103, 104 consists of a large diameter circular groove 103 and a small diameter circular groove 104. The double circular groove 103, 104 communicate with the pair of finger insertion grooves 102. The horizontal groove 105 connects the pair of finger insertion grooves 102. The vertical groove 106 crosses the horizontal groove 105 vertically at the center of the metal disc 101 and reaches the outer edge of the metal disc 101.

[0063] As shown in FIG. 7, the resin protective material 108 is attached to the lower surface of the metal disk 101. The resin protective material 108 prevents the metal disk 101 from directly touching the block 3. If the metal disk 101 were to rotate while directly touching the block 3, the sliding between the metal disk 101 and the block 3 would cause problems such as the generation of powder. However, the resin protective material 108 prevents the metal disk 101 from directly touching the block 3, preventing problems such as the generation of powder. The resin protective material 108 is arranged rotationally symmetrical about the center of the metal disk 101 so that the metal disk 101 is not inclined relative to the block 3.

[0064] There are, for example, four radiating pins 109. Each radiating pin 109 is directed toward the center of the metal disk 101 and protrudes from the outer edge of the metal disk 101. The radiating pins 109 are a part that is held when rotating the metal disk 101. The radiating pins 109 are also used to position the object OB relative to the rotating plate 100.

[0065] As shown in FIG. 8, the rotating plate 100 has a reflecting portion 107 that reflects light to the observation head 4, at least on the surface (upper surface 107) on which the object OB is placed.

[0066] The reflecting portion 107, which functions as a reflector, allows light to enter the observation head 4 when the observation head 4 observes the object OB in a magnified manner. In particular, when the observation head 4 is tilted to observe the object OB, the reflecting portion 107 strongly functions as a reflector for the edge portion of the object OB. Therefore, the observation head 4 clearly observes the object OB in a magnified manner. As a result, the magnification observation device 10 can appropriately magnify and observe a large object OB.

[0067] The reflecting portion 107 is not particularly limited as long as it is a portion that reflects light to the observation head 4. The reflecting portion 107 is preferably a white portion, and more preferably white anodized aluminum. White anodized aluminum is more likely to reflect light than materials of other colors. The reflecting portion 107 may also be, for example, a diffuse lighting.

[0068] The mounting table 2 has a reflection suppression portion on the horizontal upper surface 20 that makes it difficult for light to be reflected back to the observation head 4. The reflection suppression portion is not particularly limited as long as it is a portion that makes it difficult for light to be reflected back to the observation head 4. The reflection suppression portion is preferably a black portion, and more preferably black anodized aluminum. Black anodized aluminum reflects light less easily than materials of other colors. It is more preferable that the reflection suppression portion is black anodized aluminum that has been subjected to a matte finish, a matte coating, and / or a matte finish.

[0069] The contrast between the object OB and the rest is clear due to the white anodized aluminum of the reflecting portion 107 and the black anodized aluminum of the anti-reflection portion. Therefore, the magnification observation device 10 magnifies and observes the object OB more clearly, so that the large object OB can be magnified and observed more appropriately.

[0070] The object OB is, for example, a semiconductor wafer. The diameter of the semiconductor wafer serving as the object OB is 150 mm, 200 mm, 300 mm, etc. The semiconductor wafer serving as the object OB is protected by a ring frame RF (also called a tape frame). The positioning grooves of the ring frame RF are defined by standards. The ring frame RF is placed on the rotating plate 100 together with the object OB it is protecting so that the positioning grooves are positioned on the radiating pin 109 or the rotating plate 100.

[0071] 7, the block 3 has a rotation shaft hole at the position of the second rotation shaft 12. The rotation plate 100 further has a rotation shaft pin 110 that can be inserted into the rotation shaft hole .

[0072] The rotation shaft hole 36 and the rotation shaft pin 110 make it easy to attach and detach the rotation plate 100 to the block 3. Therefore, the magnification observation device 10 can improve the convenience for the user.

[0073] The rotation axis pin 110 is located at the center of the rotation plate 100 in a bottom view. Therefore, the rotation plate 100 rotates about the rotation axis pin 110 at the center in a bottom view. This makes it easier to change the portion of the object OB that is magnified and observed by rotation. As a result, the magnification observation device 10 can further improve the convenience for the user.

[0074] The block 3 further has a guide portion 37 that guides the rotation shaft pin 110 of the rotation plate 100 into the rotation shaft hole 36 .

[0075] The rotation shaft pin 110 is inserted into the rotation shaft hole 36 by being guided by the guide portion 37. Therefore, even if the rotation shaft hole 36 is difficult to see, such as when the rotation plate 100 is larger than the block 3, the guide portion 37 makes it possible to easily insert the rotation shaft pin 110 into the rotation shaft hole 36. As a result, the magnification observation device 10 can improve the convenience for the user.

[0076] The guide portion 37 is a sector-shaped recess that spreads out from the position of the rotation shaft hole 36. Because the guide portion 37 is sector-shaped, the rotation shaft pin 110 can be more easily inserted into the rotation shaft hole 36 by abutting the rotation shaft pin 110 against any side of the sector and then moving it to the center. Therefore, as a result, the magnification observation device 10 can further improve the convenience for the user.

[0077] The rotation shaft pin 110 of the rotation plate 100 can also be inserted into the positioning hole 23 of the mounting table 2 .

[0078] Since the rotation axis pin 110 can be inserted into the positioning hole 23, the rotation plate 100 can be directly attached to and detached from the horizontal upper surface 20 of the mounting table 2. Therefore, the magnification observation device 10 can have a simple configuration because the block 3 is not required. The block 3 is not required when there is no need to tilt the observation head 4 to observe the object OB.

[0079] If the rotation shaft pin 110 can be inserted into the positioning hole 23 , the rotation plate 100 will function as the block 3 .

[0080] Hereinafter, a case where a plurality of blocks 3 are arranged in a stacked manner will be described with reference to Fig. 9. Fig. 9 is an enlarged perspective view of a magnification observation device 10 in which blocks 3 are arranged in two stages.

[0081] 9, a plurality of blocks 3 are arranged in a stacked manner. Of the plurality of blocks 3, the positioning pin 33 of the upper block 3 is inserted into the rotation shaft hole 36 of the lower block 3.

[0082] By arranging a plurality of blocks 3 in a stacked manner, the position of the object OB can be flexibly changed in the Z direction. Therefore, the magnification observation device 10 can improve the convenience for the user.

[0083] When the upper block 3 also has an anti-rotation pin 34, the lower block 3 also has a block anti-rotation hole 38 into which the anti-rotation pin 34 of the upper block 3 is inserted. Like the anti-rotation hole 24, the block anti-rotation hole 38 may have a larger diameter in the X direction (i.e., an elongated hole) than the rotation shaft hole 36. The edge of the block anti-rotation hole 38 may also be chamfered into a mortar shape.

[0084] FIG. 9 illustrates an upper block 3 and a lower block 3, that is, blocks 3 arranged in two layers, but blocks 3 arranged in three or more layers may also be used.

[0085] The support column 5 will be described in detail below with reference to Fig. 10. Fig. 10 is an exploded perspective view of the support column 5.

[0086] 10, the support pillar 5 has an upper support pillar 51 and a lower support pillar 59. The upper support pillar 51 is a portion that has the restricting member 50 and the brake bracket 58. The lower support pillar 59 is a portion that is provided on the base 1.

[0087] The support column 5 may have a spacer 52 between the upper support column 51 and the lower support column 59. The spacer 52 has a thick spacer 53 and a thin spacer 54. The thick spacer 53 has a thickness (vertical length) of 40 mm to 80 mm (for example, 60 mm). The thin spacer 54 is thinner than the thick spacer 53. The thin spacer 54 has a thickness (vertical length) that is, for example, half that of the thick spacer 53.

[0088] The upper end surface of the lower support pillar 59 has a group of outer screw holes 55t, a group of inner screw holes 56t, and a pair of engaging members 57.

[0089] The bottom surface of the thick spacer 53 has a group of outer threads 55b and a space for accommodating an engaging tool (not shown). The group of outer threads 55b screw into a group of outer threaded holes 55t on the lower side. The space for accommodating an engaging tool accommodates a pair of engaging tools 57 on the lower side. The top surface of the thick spacer 53 has a configuration similar to that of the top surface of the lower support column 59, and has a group of outer threaded holes 55t, a group of inner threaded holes 56t, and a pair of engaging tools 57.

[0090] The lower surface of the thin spacer 54 has a group of inner threads 56b and a space for receiving an engaging device (not shown). The group of inner threads 56b is screwed into the group of inner threaded holes 56t below. The upper surface of the thin spacer 54 has a group of outer threaded holes 55t and a pair of engaging devices 57.

[0091] The lower surface of the upper support column 51 has a group of outer threads 55b and a pair of engaged members (not shown). The pair of engaged members engage with a pair of engaging members 57 below.

[0092] The thin spacers 54 cannot be overlapped between the upper support column 51 and the lower support column 59, but the spacers 52 can be overlapped freely otherwise. Specifically, between the upper support column 51 and the lower support column 59, it is possible to overlap the thick spacers 53 with each other, to overlap the thick spacers 53 on the thin spacers 54, and to overlap the thin spacers 54 on the thick spacers 53. Furthermore, the number of thick spacers 53 and thin spacers 54 is not particularly limited.

[0093] Therefore, the spacer 52 makes it possible to change the position of the upper support column 51 in the Z direction. Since the rotating holder 8 is connected to the upper support column 51 and holds the observation head 4, the spacer 52 makes it possible to change the position of the observation head 4 in the Z direction. As a result, the magnification observation device 10 can improve the convenience for the user.

[0094] Furthermore, by engaging the pair of engaged parts of the upper support column 51 with the pair of engaging parts 57 below, the upper support column 51 stands on its own even before being screwed when attached to the spacer 52 or the lower support column 59. Therefore, the support column 5 is prevented from falling when changing its position in the Z direction. As a result, the magnification observation device 10 can improve its stability.

[0095] Hereinafter, the multiple base feet 120 provided in the magnification observation device 10 will be described with reference to Figs. 11 to 13. Fig. 11 is an enlarged right side view of the lower part of the magnification observation device 10. Fig. 12 is a bottom view showing the multiple base feet 120 provided in the magnification observation device 10. Fig. 13 is a bottom view showing a modified example of the multiple base feet 120 provided in the magnification observation device 10.

[0096] As shown in FIG. 11, the magnification observation device 10 further includes a plurality of base legs 120. The plurality of base legs 120 are provided on the lower surface of the base 1. The plurality of base legs 120 include a seating leg 121 and a short leg 122. The seating leg 121 sits on the vibration isolation table VR (or another horizontal surface) on which the magnification observation device 10 is installed. The short leg 122 is shorter in the vertical direction than the seating leg 121, and therefore does not sit on the vibration isolation table VR (or another horizontal surface). The difference d in the vertical length between the seating leg 121 and the short leg 122 is set to be larger than the vertical tolerance of the base leg 120, and is about 0.05 mm to 0.15 mm (for example, 0.10 mm). The vibration isolation table VR may be an active vibration isolation table or a passive vibration isolation table.

[0097] As shown in FIG. 12, the centroid C1 of the sitting leg 121 is located at the vertex of the protruding polygon P in the bottom view. The centroid C2 of the short leg 122 is located on the line of the protruding polygon P or inside the protruding polygon P, other than the vertex of the protruding polygon P. FIG. 12 shows an example of the protruding polygon P being a quadrangle P. In the example of FIG. 12, the centroid C1 of the sitting leg 121 is located at the vertex of the quadrangle P, and the centroid C2 of the short leg 122 is located on the line of the quadrangle P. FIG. 13 shows an example of the protruding polygon P being a hexagon P. In the example of FIG. 13, the centroid C1 of the sitting leg 121 is located at the vertex of the hexagon P, and the centroid C2 of the short leg 122 is located inside the hexagon P. The protruding polygon P is not limited to a quadrangle P (FIG. 12) or a hexagon P (FIG. 13), but may be a triangle, a pentagon, or a heptagon or more.

[0098] Only the seating foot 121, whose centroid C1 is located at the apex of the protruding polygon P, sits on the vibration isolation table VR (or other horizontal surface). Therefore, the magnification observation device 10 does not wobble on the vibration isolation table VR (or other horizontal surface). As a result, the magnification observation device 10 can improve the vibration resistance.

[0099] When the magnification observation device 10 is installed on a surface other than the vibration isolation table VR (such as another horizontal surface), it may further include vibration isolation feet (not shown) that are fitted to the multiple base feet 120. The vibration isolation feet are made of an elastic material (such as a gel-like material).

[0100] The plurality of base feet 120 equipped with the vibration-isolating feet are all seated due to the elasticity of the vibration-isolating feet. Therefore, the vibration resistance of the magnification observation device 10 can be improved by the vibration-isolating feet on which all the base feet 120 are seated.

[0101] However, the above embodiment is illustrative in all respects and is not restrictive. The scope of the present invention is indicated by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. Among the configurations described in the above embodiment, those other than those described as one aspect of the present invention in the "Means for solving the problem" are optional configurations and can be deleted or modified as appropriate. [Industrial Applicability]

[0102] INDUSTRIAL APPLICABILITY The present invention provides a magnification observation device and has industrial applicability. [Explanation of symbols]

[0103] L optical axis OB Object RF Ring Frame 1 Base 2. Placement table 3 Blocks 4 Observation head 5 Support pillar 6 Moving stage 7 Image Generation Section 8 Rotating holder 9 Locking mechanism 10. Magnifying observation device 11 First Rotation Axis 12 Second Rotation Axis 13 Inclination angle measurement section 17 Display angle correction section 20 Horizontal top surface 23 Positioning hole 24 Anti-rotation hole 25 Fixing screw holes 33 Locating pin 34 Anti-rotation pin 35 Fixing screw 36 Rotating shaft hole 37 Information Department 40 Objective Lens 41 Nosepiece 42 Camera 50 Regulatory Materials 51 Upper support column 52 Spacer 53 Thick spacer 54 Thin spacer 59 Lower support column 61 Rail 62 Holding body 71 Information Processing Section 72 Display 80 Contact member 81 Rod-shaped handle 100 Rotating Plate 101 Metal disc 107 Reflector 120 Base Foot

Claims

1. A magnification observation device for magnifying and observing an object, comprising: The base and a mounting table provided on the base and having a horizontal upper surface; A support column extending vertically from the base; a moving stage including a rail supported by the support column so as to be rotatable about a first rotation axis parallel to a first direction along the horizontal upper surface, and a holder movable along the rail; an observation head having a camera that captures an image of the object through an objective lens and generates an image of the object, the observation head being held by a holder such that an optical axis of the camera is aligned with a moving direction of the holder of the moving stage; a block that is detachably attached to the horizontal upper surface of the mounting table and on which the object is placed; an image generating unit that generates an observation image based on an image from the camera of the observation head; Equipped with the first rotation axis passes through the translation stage; a position at which the block is attached to the horizontal upper surface is changeable in a second direction that is a direction along the horizontal upper surface; the first direction and the second direction are perpendicular to each other, A magnification observation device, wherein the rail of the moving stage is adjustable to an angular position relative to the support column such that the moving direction of the holder of the moving stage is perpendicular to the horizontal upper surface.

2. The vehicle further includes a rotary holder provided on the support column so as to be rotatable around the first rotary shaft, The magnification observation device according to claim 1 , wherein the rotary holder holds the moving stage.

3. 3. The magnification observation device according to claim 2, further comprising a locking mechanism capable of fixing the rotation of said rotary holder relative to said support column.

4. The support column has a restricting member, the rotating holder has a contact member that contacts the regulating member when a moving direction of the holder relative to the rail of the moving stage reaches an angular position perpendicular to the horizontal upper surface, a tilt angle measuring unit that measures a tilt angle that is an angle between a moving direction of the holder relative to the rail of the moving stage and a direction perpendicular to the horizontal top surface; A tilt angle display unit that displays the tilt angle; a display angle correction unit that displays a message that the tilt angle is not present on the tilt angle display unit when the contact member contacts the regulating member; The magnification observation device according to claim 2 or 3, further comprising:

5. The rotary holder has a rod-shaped handle, 4. The magnification observation device according to claim 2, wherein a central axis of the rod-shaped handle is directed to the first rotation axis and extends along a plane perpendicular to the first rotation axis.

6. The horizontal upper surface of the mounting table has a plurality of positioning holes aligned along the second direction, 3. The magnification observation device according to claim 1, wherein the block has a positioning pin that can be inserted into the positioning hole.

7. The mounting base further has a fixing screw hole, The block further includes a fixing screw that can be screwed into the fixing screw hole, The magnification observation device according to claim 6 , wherein the fixing screw corresponds to a position of the fixing screw hole when the positioning pin is inserted into the positioning hole.

8. a rotation plate mounted on the block so as to be rotatable about a second rotation axis perpendicular to the horizontal upper surface; The magnification observation device according to claim 6 , wherein the object is placed on the rotating plate.

9. 9. The magnification observation device according to claim 8, wherein the rotating plate has a reflecting portion that reflects light to the observation head at least on a surface on which the object is placed.

10. the block has a rotation shaft hole at the position of the second rotation shaft, 9. The magnification observation device according to claim 8, wherein the rotation plate further has a rotation shaft pin that can be inserted into the rotation shaft hole.

11. 11. The magnification observation device according to claim 10, wherein the block further includes a guide portion that guides the rotation shaft pin of the rotation plate into the rotation shaft hole.

12. 11. The magnification observation device according to claim 10, wherein the rotation axis pin of the rotation plate is also insertable into the positioning hole of the placement table.

13. The blocks are arranged in a stacked manner, 11. The magnification observation device according to claim 10, wherein the positioning pin of the upper block among the plurality of blocks is inserted into the rotation shaft hole of the lower block.

Images