Device and method for measuring sample

Abstract

To provide a sample measuring device that can reliably guarantee sample positioning accuracy, and to provide a method for measuring a sample.SOLUTION: A sample measuring device includes: a measuring instrument for measuring a sample; a transport device for transporting a sample to a measuring part of the measuring instrument along a transportation passage; and a position guarantee part to which a position guarantee sample held to the transport device is fitted by driving the transport device.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a sample measurement device and a sample measurement method. [Background technology]

[0002] The technology related to alignment during transportation using a transportation device is described in the following Patent Document 1. In this technology, an object held by an end effector of a robot is moved in a second direction different from the first direction while performing impedance control in the first direction. In this case, this technology detects whether or not a mark on the object has collided with an identification part of an inspection gauge, and guides the mark on the object to the identification part of the inspection gauge to align the object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-115949 A Summary of the Invention [Problem to be solved by the invention]

[0004] The technology of Patent Document 1 is a technology applied to determining the quality of a processed portion of an object, and the alignment accuracy of the object is guaranteed only by the repeatability of the robot. However, the repeatability of the robot may deteriorate over time. Therefore, the alignment accuracy cannot be reliably guaranteed.

[0005] In a sample measurement device that measures a sample with a measuring instrument, the sample held by the transport device must be accurately aligned and positioned with respect to the measurement unit of the measuring instrument. Conventionally, even in such a sample measurement device, the alignment accuracy of the sample has been guaranteed only by the repeatability of the transport device. For this reason, when an error occurs in the test results, it has not been possible to determine whether the error is caused by the sample or by a deterioration in the repeatability of the transport device.

[0006] SUMMARY OF THE PRESENT DISCLOSURE An object of the present invention is to provide a sample measurement device and a sample measurement method that can reliably guarantee the positioning accuracy of the sample. [Means for solving the problem]

[0007] In order to achieve the above-mentioned object, the present invention provides a sample measurement device comprising a measuring instrument for measuring a sample, a transport device for transporting the sample along a transport path to the measurement section of the measuring instrument, and a position assurance section for fitting a position assurance sample held by the transport device by driving the transport device. Effect of the Invention

[0008] According to the present invention, it is possible to provide a sample measurement device and a sample measurement method that can reliably guarantee the positioning accuracy of the sample. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic perspective view showing the configuration of a sample measurement device according to the first embodiment. [Diagram 2] FIG. 2 is a schematic plan view showing the configuration of the sample measurement device according to the first embodiment. [Diagram 3] FIG. 3 is a schematic perspective view showing the configuration of the cassette. [Figure 4] FIG. 4 is a schematic side view showing the configuration of a hand unit of the transport device. [Diagram 5] FIG. 5 is a plan view showing the configuration of the positioning unit. [Figure 6] FIG. 6 is a plan view showing the configuration of the position assurance unit. [Figure 7] FIG. 7 is a side view showing the configuration of the position assurance unit. [Figure 8] FIG. 8 is a plan view showing another example 1 of the position assurance sample. [Figure 9] FIG. 9 is a plan view showing another example 2 of the position assurance sample. [Figure 10] FIG. 10 is a flowchart showing a sample measurement method according to the first embodiment of the present invention. [Figure 11] FIG. 11 is a side view (part 1) of a main part showing the configuration of a sample measurement device according to the second embodiment. [Figure 12] FIG. 12 is a plan view (part 1) of a main part showing the configuration of a sample measurement device according to the second embodiment. [Figure 13] FIG. 13 is a side view (part 2) of a main portion showing the configuration of the sample measurement device according to the second embodiment. [Figure 14] FIG. 14 is a plan view (part 2) of a main portion showing the configuration of the sample measurement device according to the second embodiment. [Figure 15] FIG. 15 is a perspective view (part 1) of a main part showing the configuration of a sample measurement device according to the third embodiment. [Figure 16] FIG. 16 is a perspective view (part 2) of a main part showing the configuration of the sample measurement device according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each embodiment, elements having substantially the same function or configuration are denoted by the same reference numerals, and duplicated descriptions will be omitted.

[0011] First Embodiment Fig. 1 is a schematic perspective view showing the configuration of a sample measurement device according to an embodiment of the present invention, Fig. 2 is a schematic plan view showing the configuration of a sample measurement device according to an embodiment of the present invention.

[0012] As shown in Figures 1 and 2, the sample measurement device 1 includes a measurement device 11 that measures a sample (not shown). The measurement device 11 is installed on a stand 10. A cassette 12, a positioning unit 15, a guarantee sample storage unit 13, a position guarantee unit 16, and a transport device 14 are arranged on the stand 10. The sample measurement device 1 also includes a control unit 17 and an operation unit 18. Each of these units will be described below.

[0013] <Measuring instrument 11> The measuring device 11 measures the condition of a sample. At least one measuring device 11 is arranged on the stand 10, and in the illustrated example, a configuration in which two measuring devices 11 are provided is shown. Each of these measuring devices 11 has a measuring section 110. The measuring section 110 is a section that measures (measures) the sample for a predetermined measurement item. For example, if the measuring device 11 is an instrument that measures the surface condition of a sample, the measuring section 110 is a section that measures the surface condition of the sample. The surface condition of the sample is the color, surface properties, temperature, glossiness, etc. of the sample. The surface properties of the sample are typically the surface roughness of the sample.

[0014] At least one of these measuring instruments 11, measuring instrument 11a, is for measuring an extremely narrow measurement area set on the sample. Such measuring instrument 11a is required to accurately position the sample to be measured. In this embodiment, such measuring instrument 11a is an instrument for measuring the color of the sample, that is, a colorimeter. The sample to be measured is placed in a state where a non-measurement area set on the measurement surface of the sample is close to and faces the measurement unit 110 of measuring instrument 11a.

[0015] <Cassette 12> 3 is a schematic perspective view showing the configuration of the cassette 12. The cassette 12 is for storing a plurality of samples 2. The samples 2 are typically plate-shaped samples, and more typically flat plate-shaped samples. Such samples 2 may have different shapes in plan view (i.e., the shapes of the surfaces to be measured) and sizes.

[0016] The cassette 12 for storing such a sample 2 includes a box-shaped housing 12a and a support portion 12b for supporting the sample 2 in the housing 12a. The housing 12a has an open top surface so as not to interfere with (contact with) a hand portion 14a of a transport device 14 described below. The housing 12a also has an open front surface so that the sample 2 can be taken out from the horizontal direction. The support portion 12b is provided so as to protrude from the side peripheral surface of the housing 12a toward the center, and supports the sample 2 in a horizontal position. The support portions 12b are arranged in a plurality of stages at predetermined intervals in the height direction of the housing 12a. The sample 2 is stored in the support portion 12b of each stage of the cassette 12 with the surface to be measured facing downward.

[0017] <Guarantee sample storage section 13> 1 and 2, the guarantee sample storage section 13 is a section for storing plate-shaped guarantee samples 3. The guarantee samples 3 (shown only in FIG. 2) are a position guarantee sample 31 and a color guarantee sample 32. These guarantee samples 3 preferably have the same shape as the sample 2, and are flat, plate-shaped samples.

[0018] Of these, the position assurance sample 31 is for ensuring the accuracy of sample alignment by the transport device 14. Furthermore, when the measuring device 11a is a colorimeter, the color assurance sample 32 is for ensuring that color detection by the colorimeter is performed accurately. These assurance samples 3 preferably have a planar shape that allows for accurate positioning in the positioning unit 15 described below.

[0019] The guarantee sample storage unit 13 has a portion for individually placing the position guarantee sample 31 and the color guarantee sample 32 in a predetermined state. The guarantee sample storage unit 13 stores the guarantee sample 3 with the surface to be measured facing downward.

[0020] <Transportation device 14> The transport device 14 holds the sample 2 stored in the cassette 12 and the guarantee sample 3 stored in the guarantee sample storage section 13, and transports the held sample 2 and guarantee sample 3 along a predetermined route. Such transport device 14 is configured by a multi-axis robot. In the present embodiment, as an example, the transport device 14 is configured by a six-axis robot. The six-axis robot as the transport device 14 is equipped with a force sensor (six-axis force sensor) not shown. The transport device 14 also has a hand unit 14a that holds the sample. The hand unit 14a is disposed at the tip of the six-axis robot that constitutes the transport device 14.

[0021] FIG. 4 is a schematic side view showing the configuration of the hand unit 14a of the transport device 14. As shown in FIG. 4, the hand unit 14a of the transport device 14 holds the sample 2 and the guarantee sample 3 by, for example, vacuum suction. Such a hand unit 14a has a hand frame 141 extended from the tip of a six-axis robot. A suction pad 143 is disposed at the tip of the hand frame 141 via a vacuum generator 142. The suction pad 143 is a rubber cylindrical member, and is driven by the vacuum generator 142 to suction one main surface of the sample 2 or the guarantee sample 3 and hold them. The suction pad 143 suctions the back side of the sample 2 and the guarantee sample 3 relative to the measurement surface [S].

[0022] The transport device 14 equipped with the hand unit 14a as described above holds the sample 2 and the proof sample 3 and transports them along a predetermined route under the control of the control unit 17 which will be described later.

[0023] <Positioning part 15> Fig. 5 is a plan view showing the configuration of the positioning unit 15. The positioning unit 15 shown in Fig. 5 is a part that positions the sample 2 and the guarantee sample 3. Positioning here means determining the attitude and position of the sample 2 and the guarantee sample 3. The attitude is the X, Y, and Z directions given to the sample 2 and the guarantee sample 3. Furthermore, the position is the coordinate position in the coordinate system of the sample measurement device 1. This positioning is performed so that the transport device 14 can hold the sample 2 and the guarantee sample 3 in a predetermined state.

[0024] Such a positioning portion 15 has a first positioning portion 151 and a second positioning portion 152. The first positioning portion 151 and the second positioning portion 152 are planar L-shaped members erected on the gantry 10. The second positioning portion 152 is disposed rotated 90 degrees with respect to the first positioning portion 151 on the XY plane of the gantry 10.

[0025] The first positioning portion 151 and the second positioning portion 152 include an X end wall 15x and a Y end wall 15y. The X end wall 15x and the Y end wall 15y are vertical walls and form an angle of 90 degrees with each other.

[0026] Such positioning using the positioning unit 15 is performed using either the first positioning unit 151 or the second positioning unit 152 depending on the sample shapes of the sample 2 and the guarantee sample 3. In this case, the edge of the sample 2 or the guarantee sample 3 is abutted against the X end wall 15x and the Y end wall 15y. This determines the attitude and position of the flat sample 2 and the guarantee sample 3.

[0027] In this embodiment, the planar shapes of the sample 2 and the guarantee sample 3 are described as being square or rectangular as shown in the drawings, but the planar shapes of the sample 2 and the guarantee sample 3 are not limited to these. The planar shape of the sample 2 may be a triangle or other polygon, or may be a circle.

[0028] <Position Assurance Unit 16> FIG. 6 is a plan view showing the configuration of the position assurance unit 16. FIG. 7 is a side view showing the configuration of the position assurance unit 16. The position assurance unit 16 shown in FIGS. 6 and 7 is a part for performing position assurance using a position assurance sample 31. This position assurance is an assurance of the alignment accuracy of the sample. This position assurance includes an assurance of the holding positions of the sample 2 and the assurance sample 3 by the transport device 14, and an assurance of the transport path. Such a position assurance unit 16 fits the position assurance sample 31 held by the transport device 14. The position assurance unit 16 fits the position assurance sample 31 in a non-contact manner and allows it to pass.

[0029] The position assurance unit 16 has first gate members 161, 162 and second gate members 163, 164 erected on the upper part of the stand 10. The X, Y, and Z directions of the position assurance unit 16 described below are directions that are to be aligned with the X, Y, and Z directions given to the position assurance sample 31 in the positioning unit 15 (see FIG. 5). The Z direction is given taking into consideration the thickness of the position assurance sample 31 in order to maintain a predetermined distance from the floor surface of the position assurance unit 16.

[0030] The first gate members 161, 162 have X-direction vertical walls 161a, 162a extending in the X-direction. These X-direction vertical walls 161a, 162a are arranged opposite each other to form a first gate 16y that opens in the Y-direction. The X-direction vertical walls 161a, 162a are arranged at a predetermined gate interval [Wy] in the Y-direction. This gate interval [Wy] is set to be larger than the width [ay] of the position assurance sample 31 in the Y-direction in a plan view.

[0031] Such first gate members 161, 162 are arranged so that the position assurance sample 31 can pass by being fitted into them from the X direction. In this case, the position assurance sample 31 is in a state where its posture is aligned with respect to the X, Y, and Z directions of the position assurance unit 16. Note that the difference between the width [ay] of the position assurance sample 31 in the Y direction and the gate interval [Wy] of the first gate 16y may be a value small enough to satisfy the position accuracy required for measurement by the measuring instrument 11a.

[0032] The second gate members 163, 164 have Y-direction vertical walls 163a, 164a extending in the Y direction. These Y-direction vertical walls 163a, 164a are arranged opposite each other to form a second gate 16x that opens in the X direction. The Y-direction vertical walls 163a, 164a are arranged at a predetermined gate interval [Wx] in the X direction. This gate interval [Wx] is set to be larger than the width [ax] of the position assurance sample 31 in the X direction in a plan view.

[0033] Such second gate members 163, 164 are arranged so that the position assurance sample 31 can pass by being fitted into them from the Y direction. In this case, the position assurance sample 31 is in a state where its posture is aligned with respect to the X, Y, and Z directions of the position assurance unit 16. Note that the difference between the width [ax] of the position assurance sample 31 in the X direction and the gate interval [Wx] of the second gate 16x may be a value small enough to satisfy the position accuracy required for measurement by the measuring instrument 11a.

[0034] The transport device 14 drives the position assurance sample 31 to pass through the first gate 16y and the second gate 16x of the position assurance unit 16. In an initial state, the transport path of the transport device 14 is set so that the position assurance sample 31 passes through the first gate 16y and the second gate 16x without contacting them. In addition, at this time, the distances [d] between the first gate 16y and the second gate 16x and the position assurance sample 31 are equal. Thus, it is preferable that the transport path of the transport device 14 is set so that the position assurance sample 31 passes through the center between the first gate 16y and the second gate 16x.

[0035] Furthermore, in the initial state, the transport path of the transport device 14 is set so that there is a predetermined distance between the base 10, which is the bottom surface, and the position assurance sample 31. This predetermined distance may be a small value that satisfies the positional accuracy required for measurement by the measuring device 11a.

[0036] Although FIG. 6 shows a case where the position assurance sample 31 has a rectangular shape, the position assurance sample 31 is not limited to this.

[0037] FIG. 8 is a plan view showing another example 1 of the position assurance sample 31a. As shown in this figure, the position assurance sample 31a may have a triangular planar shape. The position assurance sample 31a having a triangular planar shape has its coordinate position determined in the above-mentioned positioning unit 15 (see FIG. 5) with one base of the triangle parallel to the X direction. In this case, the gate interval [Wy] of the first gate 16y is larger than the distance [ay'] between the base and the apex of the position assurance sample 31a. Also, the gate interval [Wx] of the second gate 16x is larger than the length [ax'] of the base.

[0038] 9 is a plan view showing another example 2 of the position assurance sample 31b. As shown in this figure, the position assurance sample 31b may have a circular planar shape. When a circular position assurance sample 31b is used, the gate spacing [Wy] of the first gate 16y and the gate spacing [Wx] of the second gate 16x are larger than the diameter [2r] of the circle.

[0039] 2 shows a state in which the position assurance unit 16 is installed flat on the pedestal 10. However, the installation state of the position assurance unit 16 is not limited to this, and the position assurance unit 16 may be installed vertically on the pedestal 10.

[0040] <Control unit 17> 1 and 2, the control unit 17 includes, for example, a central processing unit (CPU), a read only memory (ROM), and a random access memory (RAM) as computer hardware resources. The control unit 17 centrally controls the operation of each part of the sample measurement device 1 by the CPU reading a predetermined program from the ROM, loading it into the RAM, and executing the loaded program.

[0041] The control unit 17 controls the position assurance operation using the position assurance sample 31. The control unit 17 also controls the color measurement operation of the color assurance sample 32. Furthermore, the control unit 17 controls the measurement operation of the sample 2 stored in the cassette 12. Details of such control by the control unit 17 will be described in detail later in the sample measurement method.

[0042] <Operation unit 18> The operation unit 18 has a display unit that displays various information to a user who uses the sample measurement device 1. The operation unit 18 also has an input unit that accepts input of various information from the user. Such an operation unit 19 functions as a user interface.

[0043] The information input from the operation unit 18 includes information about the sample 2 stored in the cassette 12, and information about the position assurance sample 31 and color assurance sample 32 stored in the assurance sample storage unit 13. The information about the sample 2 includes information indicating the type of the sample 2, information indicating the size (including shape) of the sample 2, and information specifying the cassette 12 in which the sample 2 is stored. The information about the position assurance sample 31 and color assurance sample 32 includes information indicating the size (including shape) of the position assurance sample 31 and color assurance sample 32, and information about the storage position. These pieces of information are input by the user operating the operation unit 18 before starting the operation of the sample measuring device described later.

[0044] The information input from the operation unit 18 also includes instruction information for starting measurement and instruction information for starting a guarantee operation.

[0045] <Sample measurement method> Fig. 10 is a flowchart showing a sample measurement method according to a first embodiment of the present invention. The procedure shown in this flowchart is carried out by a sample measurement program held by control unit 17 of sample measurement device 1 shown in Fig. 1. The sample measurement method according to the embodiment will be described below in accordance with the procedure shown in Fig. 10 and with reference to Figs. 1 to 9.

[0046] -Step S1- In step S1, the control unit 17 performs a position assurance process in the following order of steps S101 to S106.

[0047] [Step S101] In step S101, the control unit 17 positions the position assurance sample 31 by controlling the driving of the transport device 14. In this case, first, the transport device 14 holds the position assurance sample 31 stored in a predetermined state in the assurance sample storage unit 13, and transports it to the positioning unit 15. The transport device 14 positions the position assurance sample 31 in a predetermined procedure in either the first positioning unit 151 or the second positioning unit 152 set in advance, and determines the attitude and position of the position assurance sample 31.

[0048] [Step S102] In step S102, the control unit 17 drives the transport device 14 to cause the hand unit 14a to hold the positioned predetermined position of the position assurance sample 31 again. At this time, the transport device 14 moves the hand unit 14a to a preset coordinate position (predetermined position) based on size information of the position assurance sample 31, and re-holds the position assurance sample 31. The preset coordinate position is the center position of the position assurance sample 31 that has been positioned by the positioning unit 15.

[0049] [Step S103] In step S103, the control unit 17 drives the transport device 14 to perform a measurement operation on the position assurance sample 31. At this time, the transport device 14 transports the position assurance sample 31 held by the hand unit 14a to the measuring instrument 11. The transport device 14 sequentially arranges the measurement surface of the position assurance sample 31 facing the measurement unit 110 of each measuring instrument 11. The measurement surface is the surface opposite to the surface held by the hand unit 14a of the transport device 14. Note that in this measurement operation, it is only necessary to transport the position assurance sample 31 by the transport device 14, and measurement by each measuring instrument 11 is not necessary.

[0050] [Step S104] In step S104, the control unit 17 drives the transport device 14 to perform a position assurance operation on the position assurance sample 31. At this time, the transport device 14 transports the held position assurance sample 31 to the position assurance unit 16. The transport device 14 keeps the position assurance sample 31 in a predetermined state. The predetermined state is a state in which the XY direction orientation of the position assurance sample 31 is aligned with the XY direction orientation of the position assurance unit 16.

[0051] In this state, the transport device 14 fits the position assurance sample 31 into the first gate 16y of the position assurance unit 16 from the X direction. Then, the transport device 14 transports the held position assurance sample 31 in the X direction so as to pass through the first gate 16y. The transport device 14 also fits the position assurance sample 31 into the second gate 16x of the position assurance unit 16 from the Y direction. Then, the transport device 14 transports the held position assurance sample 31 in the Y direction so as to pass through the second gate 16x. Note that when passing through the first gate 16y and the second gate 16x, the position assurance sample 31 is held at a predetermined distance from the bottom surfaces of the first gate 16y and the second gate 16x.

[0052] [Step S105] In step S105, the control unit 17 judges whether or not the position assurance sample 31 has been able to guarantee the position. The control unit 17 makes this judgment based on a signal from the force sensor of the transport device 14. If the control unit 17 does not detect a signal indicating that the position assurance sample 31 has come into contact with a structure such as the first gate 16y or the second gate 16x during the position assurance operation of step S104, it judges that the position assurance has been able to be guaranteed (YES). In this case, the control unit 17 proceeds to step S106. On the other hand, if the control unit 17 detects a signal indicating that the position assurance sample 31 has come into contact with a structure during the position assurance operation of step S104, it judges that the position assurance has not been able to be guaranteed (NO). In this case, the control unit 17 proceeds to step S2.

[0053] -Step S2- In step S2, the control unit 17 stops the sample inspection device. In this case, the control unit 17 transmits the determination result in step S105 to the operation unit 18. The operation unit 18 notifies the user by display or sound that the position could not be guaranteed.

[0054] [Step S106] On the other hand, in step S106, the control unit 17 drives the transport device 14 to store the position assurance sample 31 in the assurance sample storage unit 13. At this time, the transport device 14 places the position assurance sample 31 in the assurance sample storage unit 13 in a predetermined state.

[0055] -Step S3- In step S3, the control unit 17 performs color assurance processing. At this time, the control unit 17 positions the color assurance sample 32 by driving the transport device 14. This positioning operation is the same as the operation described in step S101. Next, the control unit 17 drives the transport device 14 to cause the hand unit 14a to hold the center position of the positioned color assurance sample 32. This operation is the same as the operation described in step S102. Thereafter, the control unit 17 drives the transport device 14 to measure the color assurance sample 32. This measurement operation is the same as the operation described in step S103. However, in this measurement operation, the transport device 14 transports the position assurance sample 31, and each measuring device 11 measures it. The control unit 17 also transmits the measurement result to the operation unit 18.

[0056] -Step S4- In step S4, the control unit 17 performs a measurement process on the sample. At this time, the control unit 17 drives the transport device 14 to take out the sample 2 from the cassette 12 and position the taken out sample 2. This positioning operation is the same as the operation described in step S101. Next, the control unit 17 drives the transport device 14 to make the hand unit 14a hold the center position of the positioned sample 2. This operation is the same as the operation described in step S102. Thereafter, the control unit 17 drives the transport device 14 to measure the sample 2. This measurement operation is the same as the operation described in step S103. However, in this measurement operation, the transport device 14 transports the sample 2 and each measuring device 11 measures it. Thereafter, the control unit 17 drives the transport device 14 to store the sample 2 in another cassette 12. The other cassette 12 is a cassette 12 different from the cassette 12 from which the measured sample 2 was taken out.

[0057] This step S4 is repeated in a preset order for a plurality of samples 2. When the measurement process for the set plurality of samples 2 has been completed, the sample measurement flow ends.

[0058] Furthermore, the sample measurement method of the present invention is not limited to the order shown in the flowchart of Fig. 10. For example, the flow of steps S1 to S4 may be repeated every time the measurement process of a preset number of samples 2 is completed in step S4. Furthermore, after the sample measurement process is performed, a position assurance process (step S1) and a color assurance process (step S3) may be performed.

[0059] <Advantages of the First Embodiment> In the first embodiment described above, the position assurance sample 31 is fitted to the position assurance unit 16 by the transport of the transport device 14, thereby ensuring that the holding position and movement path of the position assurance unit 16 by the transport device 14 are performed with high accuracy. Therefore, the positioning accuracy of the sample transported to the measuring instrument 11 by the transport device 14 can be guaranteed.

[0060] This allows the sample 2 to be measured while reliably corresponding to a predetermined position with respect to the measurement unit 110 of the measuring device 11a, for example. This allows for highly accurate measurements. Furthermore, if an error occurs in the measurement results, it can be determined that the cause of the error is not due to deterioration over time of the transport device 14 or the positioning unit 15, and the cause of the error can be isolated.

[0061] The position assurance operation is configured to be performed after the measurement operation using the position assurance sample 31. As a result, for example, if a malfunction occurs in the transport device 14 during the measurement operation, the occurrence of the malfunction can be detected in the position assurance operation. Therefore, the alignment accuracy of the sample can be guaranteed throughout all operations from alignment by the alignment unit 15 to measurement by the measuring device 11a.

[0062] Second Embodiment FIG. 11 is a side view (part 1) of the main part showing the configuration of the sample measurement device according to the second embodiment. FIG. 12 is a plan view (part 1) of the main part showing the configuration of the sample measurement device according to the second embodiment. As shown in these figures, the hand unit 14a' of the transport device 14' of the sample measurement device may hold a sample or a guarantee sample by gripping it. Such a hand unit 14a' has a gripping claw 147 at the tip of a hand frame 141 extended from the tip of a six-axis robot. The gripping claw 147 may have two claws, three claws, or even more claws. Note that the figure shows a two-claw gripping claw. These gripping claws 147 grip the sample or guarantee sample between the multiple gripping claws 147 by bringing the tip sides close to each other.

[0063] In this case, the position assurance sample 31c shown in Fig. 11 and Fig. 12 is configured such that the gripping claws 147 gripping the position assurance sample 31c do not protrude from the outer periphery of the position assurance sample 31c. As an example, the position assurance sample 31c is configured to have a plurality of recesses 301 on the outer periphery. The recesses 301 are arranged corresponding to the gripping claws 147 of the hand unit 14a'. The transport device 14' grips the position assurance sample 31c by bringing the tips of the gripping claws 147 inserted into the recesses 301 of the position assurance sample 31c close to each other.

[0064] FIG. 13 is a side view (part 2) of a main part showing the configuration of the sample measurement device according to the second embodiment. FIG. 14 is a plan view (part 2) of a main part showing the configuration of the sample measurement device according to the second embodiment. As shown in these figures, the position assurance sample 31d may have a configuration in which a gripped part 302 is attached to the back side of the measurement surface [S]. The gripped part 302 has a shape that can be gripped by the gripping claws 147 of the hand unit 14a'. The transport device 14' holds the position assurance sample 31d by gripping the gripped part 302 of the position assurance sample 31d. The gripped part 302 is attached to the position assurance sample 31d so that the gripping claws 147 gripping the position assurance sample 31d do not protrude from the outer periphery of the position assurance sample 31d.

[0065] <Effects of the second embodiment> As described above, even if the hand unit 14a' of the transport device 14' is configured with the gripping claws 147, the position assurance operation described in the first embodiment can be performed by providing the recess 301 (see FIG. 12) or the gripped portion 302 (see FIG. 13) in the position assurance sample 31. The position assurance operation is the position assurance operation of step S104 in FIG. 10. Therefore, the same effect as in the first embodiment can be obtained.

[0066] Third Embodiment FIG. 15 is a perspective view (part 1) of a main part showing the configuration of a sample measurement device according to the third embodiment, and is a plan view showing another example of the position assurance unit described in the first embodiment. The position assurance unit 16' shown in FIG. 15 has one gate opening 16a. When the position assurance sample 31 is moved in one direction, the gate opening 16a fits the position assurance sample 31 in two directions perpendicular to the moving direction. Such a gate opening 16a has a shape similar to the planar shape of the plate-like position assurance sample 31, for example. The gate opening 16a is an opening through which the position assurance sample 31 moved in one direction can pass.

[0067] Fig. 16 is a perspective view (part 2) of the main part showing the configuration of the sample measurement device according to the third embodiment. As shown in Fig. 16, the position assurance unit 16' may be arranged with the gate opening 16a facing the measurement unit 110 of the measurement instrument 11a. The measurement instrument 11a requires high positioning accuracy of the sample with respect to the measurement unit 110. In this case, the planar shapes of the position assurance sample 31 and the gate opening 16a are sufficiently larger than the planar shape of the measurement sample, not shown here.

[0068] <Effects of the third embodiment> Even with the configuration of the third embodiment, it is possible to obtain the same effects as those of the first embodiment. Furthermore, when the position assurance unit 16' of the third embodiment is disposed facing the measurement unit 110 of the measuring instrument 11a, the measurement operation using the position assurance sample 31 and the position assurance operation can be performed simultaneously. The measurement operation is the measurement operation of step S103 in FIG. 10. Furthermore, the position assurance operation is the position assurance operation of step S104 in FIG. 10.

[0069] The above-mentioned embodiment has been described in detail to clearly explain the present invention, and the present invention is not limited to the above-mentioned embodiment and modified example. For example, the positioning of the sample 2 may be performed in the cassette 12. In this case, it is sufficient to provide the positioning function to the guarantee sample storage unit 13, and there is no need to provide the positioning unit 15. [Explanation of symbols]

[0070] 1...Sample measurement device 2. Sample 11,11a…Measuring instrument 14,14'...Conveyor device 14a, 14a': Hand section 16,16'...Position assurance section 15... Positioning part 16a…Gate opening 17...Control section 18...Operation unit 31, 31a to 31d: Position assurance samples 110…Measurement part 161, 162...First gate member 161a,162a…X direction vertical wall 163, 164...Second gate member 163a,164a…Y direction vertical wall

Claims

1. A measuring instrument for measuring the sample; a transport device that transports the sample to the measurement unit of the measurement device along a transport path; a position assurance unit that engages the position assurance sample held by the transport device by driving the transport device; Sample measurement device.

2. a positioning unit that positions the position and attitude of the position assurance sample in a predetermined state, The transport device fits the position assurance sample positioned in the positioning unit into the position assurance unit. The sample measurement device according to claim 1 .

3. The position assurance unit engages the position assurance sample in two directions perpendicular to each other and set on the position assurance sample. The sample measurement device according to claim 1 .

4. the position assurance unit has a plurality of gate members standing on a bottom surface, The gate members each include oppositely disposed vertical walls; The conveying device fits the position assurance sample between the vertical walls of the gate member and passes the sample through the vertical walls. The sample measurement device according to claim 3.

5. The transport device maintains a predetermined distance between the position assurance sample and the bottom surface between the vertical walls of the gate member.

5. The sample measurement device according to claim 4.

6. the position assurance unit has a gate opening into which the position assurance sample fits, The transport device transports the position assurance sample in one direction perpendicular to the two directions, thereby fitting the position assurance sample into a gate opening of the position assurance unit. The sample measurement device according to claim 3.

7. The gate opening of the position assurance unit is disposed opposite to the measurement unit of the measurement device.

7. The sample measurement device according to claim 6.

8. The position assurance unit fits the position assurance sample in a non-contact manner. The sample measurement device according to claim 1 .

9. A control unit for controlling the conveying device, the conveying device has a force sensor, The control unit stops driving the transport device when it determines, based on a signal from the force sensor, that the position assurance sample is not fitted into the position assurance unit. The sample measurement device according to claim 1 .

10. The control unit conveys the position assurance sample to the measuring device, and then fits the position assurance sample into the position assurance unit.

10. The sample measurement device according to claim 9.

11. The control unit transports the position assurance sample to the measuring device and controls the transport device so that a predetermined position of the position assurance sample coincides with a measurement position of the measuring device. The sample measurement device according to claim 10.

12. The transport device holds the position assurance sample at a predetermined position based on size information of the position assurance sample. The sample measurement device according to claim 11.

13. A control unit for controlling the conveying device, The control unit fits the position assurance sample into the position assurance unit before or after starting a job of measuring the sample by the measuring device, or every time a predetermined number of sample measurements are performed. The sample measurement device according to claim 1 .

14. The transport device includes a hand unit that holds the sample and the position assurance sample by suction. The sample measurement device according to claim 1 .

15. The measuring device measures the surface condition of the sample. The sample measurement device according to claim 1 .

16. The surface condition of the sample is at least one of the color, surface properties, and glossiness of the sample.

16. The sample measurement device of claim 15.

17. A sample measurement method using a sample measurement device including a measurement device for measuring a sample and a transport device for transporting the sample to a measurement section of the measurement device along a transport path, comprising: A control unit drives the transport device to fit the position assurance sample held by the transport device into a position assurance unit, thereby ensuring the position accuracy of the transport by the transport device. Sample measurement method.

18. The control unit causes the position assurance sample to be fitted into the position assurance unit after the position and posture of the position assurance sample are set to a predetermined state by the positioning unit. The method of claim 17 .

19. The control unit conveys the positioned position assurance sample to the measuring device, and then fits the position assurance sample into the position assurance unit.

20. The method of claim 18.

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