Soft x-ray static electricity removal device

Abstract

To provide a soft X-ray static electricity removal device that can spray a large amount of ions onto an object to be statically removed.SOLUTION: A soft X-ray static electricity removal device 1 includes a soft X-ray generating device 90 that generates soft X-rays 92, a container 10 having an intake port 14 and an outlet 12 through which ionized air 100 ionized by the soft X-rays 92 flows out, a soft X-ray shielding sheet 20 used at the outlet 12 of the container 10, an insulating layer 50 that insulates the soft X-ray shielding sheet 20 from the container 10, and a nozzle 70 that prevents diffusion of the ionized air 100 discharged from the outlet 20 and sprays the ionized air 100 onto an object W to be statically removed, the nozzle 70 being insulated from the container 10.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a soft X-ray type static electricity remover, and more particularly to a soft X-ray type static electricity remover capable of spraying a large amount of ions onto an object. [Background technology]

[0002] It has been known that in the manufacturing process of semiconductors, liquid crystals, and organic electroluminescence, static electricity is generated on the surface of semiconductor substrates, liquid crystal substrates, and organic electroluminescence substrates during processing and handling, causing problems such as destruction of the circuits of the semiconductor substrates, liquid crystal substrates, and organic electroluminescence substrates. In addition, the charging of each substrate also causes problems such as dust adhesion to the surface.

[0003] To deal with such problems, electrostatic removal devices that generate ions to prevent charging and remove static electricity from the substrate surface are installed in semiconductor, liquid crystal, and organic electroluminescence manufacturing equipment. There are two types of electrostatic removal devices: corona discharge type, which ionizes the air with high voltage, and soft X-ray type, which ionizes the air by irradiating it with soft X-rays.

[0004] Corona discharge type static electricity removers generate particles from the electrodes during discharge, while soft X-ray type static electricity removers do not generate particles, but leakage of soft X-rays can have an effect on the human body, and each has its own disadvantages.

[0005] Soft X-ray type static electricity removers that take out only ionized air and do not leak soft X-rays to the outside have been developed in the past, but their structure is complicated. Therefore, the inventor previously proposed a soft X-ray shielding sheet that can prevent the soft X-rays from leaking from the exhaust port with a simple structure by preventing the soft X-rays from traveling in a straight line and attenuating and eliminating the soft X-rays by making the number of collisions with the passage of the soft X-rays that enter from the supply port at least three times before reaching the exhaust port (Patent Document 1). [Prior art documents] [Patent documents]

[0006] [Patent Document 1] International Publication No. WO2008 / 023727 Summary of the Invention [Problem to be solved by the invention]

[0007] However, the inventors discovered that the ionized air diffuses when it is exhausted from the exhaust port, and the number of ions in the ionized air decreases over time, so that the ion concentration decreases when it reaches the target substrate surface. Therefore, an object of the present invention is to provide a soft X-ray electrostatic removal device that can spray a large amount of ions onto the target object for electrostatic removal. [Means for solving the problem]

[0008] In order to solve the above problems, a soft X-ray type electrostatic remover 1 according to a first embodiment of the present invention, as shown in, for example, Figs. 1 and 2, comprises a soft X-ray generator 90 that generates soft X-rays 92 for ionizing air 102, a container 10 having an air intake 14 for taking in air 102 and an outlet 12 for discharging ionized air 100 ionized by the soft X-rays 92, and a soft X-ray shielding sheet 20 used at the outlet 12 of the container 10, the soft X-ray shielding sheet 20 comprising a first outer layer sheet 30 formed of a material that is impermeable to the soft X-rays 92, an intermediate layer sheet 34 formed of a material that is impermeable to the soft X-rays 92, and a second outer layer sheet 40 formed of a material that is impermeable to the soft X-rays 92. The first outer layer sheet 30 is formed with a supply port 32 for the ionized air 100, and the intermediate layer sheet 34 is formed of a material that is impermeable to the soft X-rays 92. The sheet 34 is formed with an ionized air passage 38 having an ionized air inlet opening 36 communicating with the supply port 32, the second outer sheet 40 is formed with an exhaust port 42 communicating with the ionized air passage 38, the first outer sheet 30, the intermediate sheet 34 and the second outer sheet 40 are laminated and fixed together, and the soft X-ray shielding sheet 20 is formed with an ionized air passage 44 provided so as to communicate with the supply port 32, the ionized air passage 38 and the exhaust port 42, an insulating layer 50 that insulates the soft X-ray shielding sheet 20 from the container 10, and a nozzle 70 insulated from the container 10, which prevents the diffusion of the ionized air 100 discharged from the outlet 20 and sprays the ionized air 100 onto the object W to be destaticized, the nozzle 70 being insulated from the container 10.

[0009] With this configuration, the air is ionized with soft X-rays, and the soft X-ray shielding sheet prevents the soft X-rays from leaking to the outside through the ionized air. In addition, the ionized air is blown onto the object whose static electricity is to be removed by the nozzle, and since the soft X-ray shielding sheet and the nozzle are insulated from the container, ions in the ionized air are not trapped in the soft X-ray shielding sheet or nozzle, and a large number of ions can be blown onto the object whose static electricity is to be removed.

[0010] In the soft X-ray type electrostatic remover 1 according to the second embodiment of the present invention, as shown in Fig. 1, for example, the nozzle 70 is connected to the soft X-ray shielding sheet 20 and supported by the soft X-ray shielding sheet 20. With this configuration, the nozzle is supported by the soft X-ray shielding sheet, so that the number of parts does not increase and the structure is simplified.

[0011] 7, in the soft X-ray type electrostatic remover 2 according to the third embodiment of the present invention, a nozzle 70 is connected to a soft X-ray shielding sheet 20 and supported by a support member 72. With this configuration, the nozzle is supported by the support member, so that the degree of freedom in installing the nozzle increases, and for example, the position of the tip of the nozzle can change the flow direction of ionized air from the tip.

[0012] A soft X-ray type electrostatic remover 1 according to a fourth aspect of the present invention, as shown in, for example, Figures 1 and 6, has, at an air intake 14, a first outer layer sheet 130 formed of a material that does not transmit soft X-rays, an intermediate layer sheet 134 formed of a material that does not transmit soft X-rays, and a second outer layer sheet 140 formed of a material that does not transmit soft X-rays, wherein an inlet 132 for air 102 is formed in the first outer layer sheet 130, an air passage 138 having an air inlet opening 136 communicating with the inlet 132 is formed in the intermediate layer sheet 134, and an intake 142 communicating with the air passage 138 is formed in the second outer layer sheet 140, and the first outer layer sheet 130, the intermediate layer sheet 134 and the second outer layer sheet 140 are laminated and fixed together, and a soft X-ray shielding sheet 120 is provided which is formed with an air passage portion 144 provided so as to communicate the inlet 132, the air passage 138 and the intake 142. With this configuration, leakage of soft X-rays from the intake port can be prevented, resulting in a safer soft X-ray type static electricity remover. Effect of the Invention

[0013] According to the present invention, it is possible to provide a soft X-ray type electrostatic removal device which can ionize air using soft X-rays, prevent the soft X-rays from leaking to the outside through the ionized air using a soft X-ray shielding sheet, and can spray a large amount of ions using a nozzle onto an object from which electrostatic charge is to be removed. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a conceptual diagram for explaining a soft X-ray type electrostatic remover according to the present invention. [Diagram 2] 1 is a cross-sectional view for explaining an ionized air passage portion of a soft X-ray shielding sheet used at the outlet of a soft X-ray type electrostatic remover. FIG. [Diagram 3] FIG. 2 is an exploded perspective view of a soft X-ray shielding sheet for illustrating an ionized air passage portion of the soft X-ray shielding sheet used at the outlet of a soft X-ray type electrostatic remover. [Figure 4] FIG. 1 is a diagram for explaining the soft X-ray shielding sheet and insulating layer used at the outlet of a soft X-ray type electrostatic remover, where (a) is a cross-sectional view taken along a plane perpendicular to the direction of the ionized air flow, and (b) is a side view viewed from the direction of the ionized air flow. [Diagram 5] FIG. 2 is a diagram for explaining an insulating layer according to one embodiment, where (a) is a cross-sectional view taken along a plane perpendicular to the flow direction of ionized air, and (b) is a cross-sectional view taken along the line AA. [Figure 6] 10 is a cross-sectional view illustrating an air passage portion of a soft X-ray shielding sheet used in an intake port of a soft X-ray type electrostatic remover. FIG. [Figure 7] FIG. 2 is a conceptual diagram for explaining a soft X-ray type electrostatic remover of the present invention, showing an example in which a nozzle is supported by a support member. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In each drawing, the same or corresponding devices are given the same reference numerals, and duplicated explanations will be omitted. First, a soft X-ray type electrostatic remover 1 of the present invention will be described with reference to FIG.

[0016] The soft X-ray type electrostatic remover 1 has a container 10 that ionizes air and provides a space through which ionized air 100 flows. The container 10 has an air inlet 14 that takes in air 102 into the container 10. The air inlet 14 may be equipped with a fan (not shown) to forcibly take in the air 102 outside the container 10 into the container 10. A soft X-ray generator 90 is disposed near the position where the air inlet 14 is provided in the container 10. Soft X-rays 92 are generated from the soft X-ray generator 90 and irradiated onto the air in the container 10, thereby ionizing the air. The soft X-ray generator 90 may be a known soft X-ray device, and detailed description thereof will be omitted. An outlet 12 for the ionized air 100 is formed in the container 10 at a position away from the position where the air inlet 14 is provided. When the soft X-ray generator 90 is provided near the intake port 14 and the outlet 12 is provided at a position away from the intake port 14, air flows from the intake port 14 to the outlet 12, and the air can be ionized by the soft X-rays 92 from the soft X-ray generator 90, and the ionized air 100 is released from the outlet in a short time, which is preferable, but other arrangements are also possible. The container 10 is generally formed from stainless steel or other metals.

[0017] A soft X-ray shielding sheet 20 is disposed at the outlet 12. That is, the ionized air 100 passes through the soft X-ray shielding sheet 20 to be released from the container 10.

[0018] Here, the ionized air passage portion 44 of the soft X-ray shielding sheet 20 through which the ionized air 100 passes will be described with reference to Figs. 2 and 3. Fig. 2 is a cross-sectional view of the soft X-ray shielding sheet 20 in the vicinity of the ionized air passage portion 44, and Fig. 3 is an exploded perspective view of the same. The soft X-ray shielding sheet 20 is formed by laminating and fixing three sheets, namely, a first outer layer sheet 30 formed of a material that does not transmit soft X-rays 92, an intermediate layer sheet 34 formed of a material that does not transmit soft X-rays 92, and a second outer layer sheet 40 formed of a material that does not transmit soft X-rays 92. Here, the material that does not transmit soft X-rays is typically a metal such as lead, iron, or aluminum, but is not limited to metal. If it is a metal, it can block the passage of soft X-rays 92 even if it is thin, and can be easily formed thin, so it is suitable for the soft X-ray shielding sheet 20. In addition, the method of laminating and fixing is not particularly limited. The first outer sheet 30 has a supply port 32 through which the ionized air 100 in the container 10 enters the soft X-ray shielding sheet 20. The intermediate sheet 34 has ionized air inlet openings 36 at both ends, and an ionized air passage 38 opens. The second outer sheet 40 has an exhaust port 42 through which the ionized air 100 is discharged outside the container 10.

[0019] In this embodiment, the first outer sheet 30 has two supply ports 32 that are spaced apart from each other in the first outer sheet 30. The ionized air passages 38 of the intermediate sheet 34 are provided with ionized air inlet openings 36 that are each opened at a position communicating with the supply ports 32 of the first outer sheet 30, and are formed in communication with each of the ionized air inlet openings 36. The discharge port 42 of the second outer sheet 40 is opened at a position communicating with the ionized air passages 38 of the intermediate sheet 34.

[0020] When the first outer sheet 30, intermediate sheet 34 and second outer sheet 40 formed as described above are laminated and fixed, the supply ports 32 of the first outer sheet 30 communicate with the ionized air inlet openings 36 of the intermediate sheet 34, and further, the ionized air passage 38 of the intermediate sheet 34 communicates with the exhaust port 42 of the second outer sheet 40 at the intermediate position of the ionized air passage 38, thereby forming an ionized air passing portion 44. The soft X-ray shielding sheet 20 may have one ionized air passing portion 44 or multiple ionized air passing portions 44. The shape, number of openings and the like of the ionized air passing portion 44 are not limited to those described above.

[0021] The ionized air passage 38 is provided with a bent portion 39 that is bent 90 degrees on a plane so that the number of collisions of the soft X-rays 92 with the inner surface 41 of the second outer sheet 40 and the inner surface 31 of the first outer sheet 30 increases during the time the soft X-rays 92 enter from the supply port 32 and reach the exhaust port 42, causing the soft X-rays 92 to attenuate and disappear.

[0022] In addition, each bent portion 39 of the ionized air passage 38 is formed with a curved surface 37 so as to reduce the fluid resistance of the ionized air 100, so that the ionized air 100 can reach the exhaust port 42 in a short time and recombine with positive ions and negative ions. That is, the ionized air passage 38 has at least one or more bent portions 39 that are bent 90 degrees on a plane, and the soft X-rays 92 are eliminated by collision with the inner surface, i.e., the passage. The shape of the ionized air passage 38 may be other shapes. A shape that reduces the fluid resistance of the ionized air 100 while increasing the number of collisions of the soft X-rays 92 with the passage is preferable.

[0023] The action of the soft X-ray shielding sheet 20 used in the soft X-ray type electrostatic remover 1 of the present invention having the above-mentioned configuration will be described with reference to Fig. 2. Inside the container 10, which is upstream of the soft X-ray shielding sheet 20, ionized air 100 that has been ionized into positive ions and negative ions by the soft X-rays 92 is in a pressurized state as air 102 is sent into the container 10. Therefore, the ionized air 100 passes from the supply port 32 through the ionized air inflow opening 36 and the ionized air passage 38, and is discharged from the discharge port 42 to the downstream side of the soft X-ray shielding sheet 20.

[0024] On the other hand, the soft X-rays 92 enter from each supply port 32, travel straight, and pass through the ionized air inlet opening 36, the ionized air passage 38, and reach the exhaust port 42. As shown in FIG. 2, the soft X-rays 92 collide with the inner surface 41 of the second outer sheet 40, the inner surface 31 of the first outer sheet 30, or the curved surface 37 of the bent portion 39, and are prevented from traveling straight. The soft X-rays 92 are attenuated by the collision with the inner surfaces 31 and 41, and eventually almost disappear, so that dangerous soft X-rays 92 do not leak from the exhaust port 42. For the soft X-rays 92 to be attenuated and almost disappear, it is preferable that they collide with the inner surfaces 31 and 41 three or more times. For this purpose, the size and length of the cross section of the ionized air passage 44 and the number of bent portions 39, i.e., the path of the ionized air passage 38, are designed. The number of sheets constituting the soft X-ray shielding sheet 20 may be four or more, instead of three, by including a plurality of intermediate layer sheets 34 with which the ionized air passages 38 communicate.

[0025] The ionized air 100 introduced from the supply port 32 passes through the ionized air passage 38 and reaches the exhaust port 42, but by forming the bent portion 39 of the ionized air passage 38, which is provided from the viewpoint of preventing leakage of the soft X-rays 92, into a curved surface 37, the fluid resistance is reduced and the ionized air 100 can reach the exhaust port 42 in a short time. In particular, it is preferable that the ionized air 100 can pass through the soft X-ray shielding sheet 20 in a short time so as to suppress recombination of positive ions and negative ions, and the path of the ionized air passing portion 44 is made short. Therefore, a large amount of ions are released downstream from the exhaust port 42.

[0026] In the case of the soft X-ray shielding sheet 20 shown in Figures 2 and 3, there are two supply ports 32 and one exhaust port 42, and the ionized air 100 flowing from both ports via the ionized air passage 38 collides at the exhaust port 42, allowing the ionized air 100 to be sprayed vertically from the exhaust port 42.

[0027] 1 and 4, in the soft X-ray type electrostatic remover 1, the container 10 and the soft X-ray shielding sheet 20 are insulated by an insulating layer 50. The soft X-ray shielding sheet 20 shown in FIG. 4 has a circular cross section, and a large number of ionized air passing portions 44 are formed therein. The insulating layer 50 is disposed on the outer periphery of the circle. This is because if the container 10 and the soft X-ray shielding sheet 20 are electrically connected and the container 10 is earthed, ions in the ionized air 100 may be trapped in the soft X-ray shielding sheet 20, and the amount of ions passing through the soft X-ray shielding sheet 20 may decrease.

[0028] FIG. 5 shows an example of the insulating layer 50. Three arc-shaped ceramics 52 are arranged on the outer periphery of the circular soft X-ray shielding sheet 20. In addition to ceramics, there are insulating materials such as plastics, but they deteriorate and generate powder when irradiated with soft X-rays. Ceramics are preferable because they are less likely to deteriorate when irradiated with soft X-rays. Also, a circular ceramic covering the outer periphery of the soft X-ray shielding sheet 20 may be used, but since ceramics are a brittle material, there is a risk of them cracking during manufacture or use. Therefore, instead of covering the entire periphery with one circular member, a plurality of divided arc-shaped ceramics 52 are used. Also, soft X-rays 92 pass through ceramics. Therefore, in order to prevent the soft X-rays 92 from passing through the circular insulating layer 50 covering the outer periphery of the soft X-ray shielding sheet 20 and leaking, the circular insulating layer 50 is covered with a casing 55 of the soft X-ray shielding sheet 20. The casing 55 is generally made of the same material as the container 10, such as stainless steel. Here, the casing 55 is structured to cover the soft X-ray shielding sheet 20 with a narrow gap 56 (for example, a gap of 0.5 mm with a radial width of 2 mm). This gap 56 insulates the soft X-ray shielding sheet 20 from the casing 55. Also, by making the gap 56 narrow and long, that is, making the radial width larger than the gap, the soft X-rays 92 are prevented from passing between the soft X-ray shielding sheet 20 and the casing 55. Specifically, the shape of the gap 56 is such that when the soft X-rays 92 attempt to pass through the gap 56, they collide with the soft X-ray shielding sheet 20 and the casing 55 three or more times. This is because the soft X-rays 92 are prevented from traveling straight and collide with the casing 55 and the soft X-ray shielding sheet 20 near their outer edges, whereby they are attenuated and extinguished. As shown in Fig. 5(a), the casing 55 of the soft X-ray shielding sheet 20 is preferably configured as a ring having a U-shaped cross section, with arc-shaped ceramics 52 housed inside the U-shape, which facilitates handling of the insulating layer 50. Note that, although the arc-shaped ceramics 52 divided into three equal parts are used in Fig. 5, the number of such ceramics is arbitrary.

[0029] Alternatively, a polytetrafluoroethylene (PTFE) sheet may be wrapped around the outer periphery of the soft X-ray shielding sheet 20 and fitted into a groove (a space corresponding to 50 in FIG. (a)) of the casing 55. PTFE has insulating properties, and by disposing a PTFE sheet between the soft X-ray shielding sheet 20 and the casing 55 and preventing the soft X-ray shielding sheet 20 from contacting the casing 55, the two can be insulated from each other.

[0030] By insulating the container 10 from the soft X-ray shielding sheet 20, when ions are trapped in the soft X-ray shielding sheet 20 at the beginning of operation, the soft X-ray shielding sheet 20 has the electric potential (positive or negative) of the trapped ions, and thereafter, ions of the same electric potential (positive or negative) are not trapped but pass through the soft X-ray shielding sheet 20. Therefore, the amount of ions emitted through the soft X-ray shielding sheet 20 increases.

[0031] Furthermore, since the container 10 and the soft X-ray shielding sheet 20 are insulated, it becomes possible to apply a potential difference between the container 10 and the soft X-ray shielding sheet 20. As shown in FIG. 1, a power supply unit 60 is provided, a positive or negative electrode is connected to the soft X-ray shielding sheet 20 by a cable 62 for the soft X-ray shielding sheet, and the other electrode is connected to the container 10 by a cable 64 for the container. Then, the soft X-ray shielding sheet 20 is positively or negatively charged, and the container 10 is charged to a voltage with the positive / negative voltage being reversed. It is presumed that the charge of the container 10 reduces the dissipation of ions of the same polarity in the container 10 (positive ions if the container is positively charged, negative ions if the container is negatively charged), increases the number of ions of the same polarity in the container 10, and increases the number of ions of the same polarity passing through the soft X-ray shielding sheet 20. In other words, the amount of positive / negative ions emitted can be adjusted. Since the container 10 and the soft X-ray shielding sheet 20 are small and the applied potential may be low, the current flowing from the power supply device 60 may be extremely small, such as several nA to several pA, and the power supply device 60 may be a low-power battery or the like.

[0032] Furthermore, in the soft X-ray type electrostatic remover 1, as shown in FIG. 1, a nozzle 70 is provided at the outlet 12 of the ionized air 100 of the container 10. The nozzle 70 directs the ionized air 100 flowing from the outlet 12 through the soft X-ray shielding sheet 20 to a predetermined position. The nozzle 70 is generally made of a metal such as stainless steel, but the material is not limited. In addition, the nozzle 70 may have a cross section of the same dimensions as the outlet 12 on the upstream side, i.e., on the outlet 12 side, but the cross section may be reduced on the downstream side. In addition, the nozzle 70 may have a curved shape rather than a straight shape. The lower end of the nozzle 70 opens near the object W from which electrostatic removal is to be performed by the soft X-ray type electrostatic remover 1, so that the ionized air 100 is sprayed onto the object W.

[0033] By providing the nozzle 70 in this manner, the ionized air 100 flowing out of the container 10 does not diffuse, and a large amount of ions are sprayed onto the target W. The nozzle 70 is also generally made of a conductive material such as metal, and is therefore preferably insulated from the container 10. When the nozzle 70 is made of a non-conductive material, insulation is not particularly required, but even in this case, the nozzle 70 is said to be insulated from the container 10. By insulating the container 10 and the nozzle 70, it is possible to prevent ions in the ionized air 100 passing through the nozzle 70 from being trapped by the nozzle 70, which would reduce the amount of ions reaching the target W.

[0034] 1, the nozzle 70 is connected and fixed to the soft X-ray shielding sheet 20, and is supported by the soft X-ray shielding sheet 20. If the nozzle 70 is configured to be supported by the soft X-ray shielding sheet 20, the number of parts required for providing the nozzle 70 does not increase, the structure is simple, and as a result, costs can be reduced.

[0035] In addition, in the soft X-ray type electrostatic removal device 1, as shown in FIG. 1, a soft X-ray shielding sheet 120 may be placed at the air intake 14 through which air 102 is taken into the container 10, and the air 102 may be configured to pass through the soft X-ray shielding sheet 120 before being taken into the container 10.

[0036] As shown in FIG. 6, the soft X-ray shielding sheet 120 has the same structure as the soft X-ray shielding sheet 20 of the outlet 12. That is, the sheet is formed by stacking and fixing three sheets, namely, a first outer layer sheet 130 made of a material that does not transmit soft X-rays 92, an intermediate layer sheet 134 made of a material that does not transmit soft X-rays 92, and a second outer layer sheet 140 made of a material that does not transmit soft X-rays 92. The first outer layer sheet 130 is formed with an air inflow port 132 for taking in air 102. The intermediate layer sheet 34 is formed with an air passage 138 having an air inlet opening 136 communicating with the inflow port 132. The second outer layer sheet 140 is formed with an intake port 142 for discharging air 102 into the container 10. The inflow port 132 of the first outer layer sheet 130, the air passage 138 of the intermediate layer sheet 134, and the intake port 142 of the second outer layer sheet 140 communicate with each other to form an air passage 144. The soft X-ray shielding sheet 120 may have one air passage 144 formed therein, or may have multiple air passages 144 formed therein, and the shape of the air passages 144, the number of openings, etc. are not limited to those described above, similarly to the soft X-ray shielding sheet 20.

[0037] As described above, by arranging the soft X-ray shielding sheet 120 at the intake port 14, it is possible to prevent the soft X-rays 92 in the container from passing through the intake port 14 and leaking. As shown in FIG. 1, the soft X-ray generator 90 and the intake port 14 are arranged in such a positional relationship that the soft X-rays 92 generated from the soft X-ray generator 90 are not irradiated in the direction of the intake port 14. Basically, it is considered that the amount of soft X-rays 92 passing through the intake port 14 is very small. However, by arranging the soft X-ray shielding sheet 120 at the intake port 14, it is possible to prevent even a small amount of soft X-rays 92 from leaking, thereby improving safety. Note that it is air 102 that passes through the soft X-ray shielding sheet 120 at the intake port 14, so there is no need to prevent ion trapping, and there is no need to insulate the container 10 from the soft X-ray shielding sheet 120.

[0038] In the description of the soft X-ray type electrostatic remover 1, the nozzle 70 is connected to and fixed to the soft X-ray shielding sheet 20 and supported by the soft X-ray shielding sheet 20. However, the nozzle 70 may be supported in any manner as long as it is insulated from the container 10. For example, as in the soft X-ray type electrostatic remover 2 shown in FIG. 7, the nozzle 70 may be supported via a support member 72 fixed to the container 10. In this case, the support member 72 may be made of a non-conductive material, or an insulating layer may be provided between the container 10 and the support member 72, or between the support member 72 and the nozzle 70. The support member 72 may also be fixed to something other than the container.

[0039] Supporting the nozzle 70 with the support member 72 increases the degree of freedom in installing the nozzle 70. For example, the nozzle 70 may be curved rather than straight, and the direction in which the ionized air 100 is blown out may be changed by rotating the nozzle 70. Alternatively, the nozzle 70 may be made deformable, and the downstream side may be moved to change the position from which the ionized air 100 is blown out. In this case, the nozzle 70 may be supported at multiple points by the support member 72.

[0040] There may be a gap between the soft X-ray shielding sheet 20 and the nozzle 70. However, the gap should be such that the amount of ionized air 100 leaking from the gap falls within a range where a desired amount of ionized air 100 is blown onto the target W. Even when there is a gap, the nozzle 70 is considered to be connected to the soft X-ray shielding sheet 20.

[0041] As described above, the soft X-ray electrostatic removers 1 and 2 of the present invention are provided with a nozzle 70 insulated from the container, which prevents the diffusion of the ionized air 100 discharged from the outlet, and by blowing the ionized air 100 onto the object W to be de-ionized, it is possible to blow a large amount of ions onto the object W. When the object W is small, it is particularly advantageous to blow with the nozzle 70, and the shape of the nozzle 70 can be changed according to the dimensions of the object W. Furthermore, by arranging a soft X-ray shielding sheet 120 at the intake port 14, leakage of even a small amount of soft X-rays 92 can be prevented, improving safety. [Explanation of symbols]

[0042] 1, 2 Soft X-ray electrostatic removal device 10 containers 12 Exit 14 Air Intake 20 Soft X-ray shielding sheet 30 First outer sheet 31 Inner surface of first outer sheet 30 32 Supply port 34 Intermediate sheet 36 Ionized air inlet opening 37 Curved Surfaces 38 Ionized air passage 39 Bend part 40 Second outer layer sheet 41 Inner surface of second outer layer sheet 42 Outlet 44 Ionized air passage 50 Insulating layer 52 Arc-shaped ceramic 55 Soft X-ray shielding sheet casing 56 Gap 60 Power supply 70 Nozzles 72 (Nozzle) Support member 90 Soft X-ray Generator 92 Soft X-ray 100 Ionized Air 102 Air 120 (Air intake) soft X-ray shielding sheet 130 First outer layer sheet 132 Inlet 134 Interlayer sheet 136 Air inlet opening 138 Air passage 140 Second outer layer sheet 142 Intake 144 Air passage W Object

Claims

1. A soft X-ray generator for generating soft X-rays for ionizing air; a container having an intake port for taking in air and an outlet port for discharging ionized air ionized by soft X-rays; A soft X-ray shielding sheet for use at the outlet of the container, A first outer sheet formed of a material that is opaque to soft X-rays; An intermediate layer sheet formed of a material that is opaque to soft X-rays; A second outer sheet formed of a material that is opaque to soft X-rays, The first outer sheet is provided with an ionized air supply port, The intermediate sheet is provided with an ionized air passage having an ionized air inlet opening communicating with the supply port, The second outer sheet is formed with an exhaust port communicating with the ionized air passage, the first outer sheet, the intermediate sheet and the second outer sheet are laminated and fixed together, and the soft X-ray shielding sheet is formed with an ionized air passage provided in communication with the supply port, the ionized air passage and the exhaust port; an insulating layer that insulates the soft X-ray shielding sheet from the container; a nozzle that prevents the ionized air discharged from the outlet from diffusing and sprays the ionized air onto an object to be de-staticized, the nozzle being insulated from the container; Soft X-ray electrostatic removal device.

2. The nozzle is connected to the soft X-ray blocking sheet and is supported by the soft X-ray blocking sheet.

2. The soft X-ray electrostatic remover according to claim 1.

3. The nozzle is connected to the soft X-ray blocking sheet and supported by a support member.

2. The soft X-ray electrostatic remover according to claim 1.

4. The intake port, A first outer sheet formed of a material that is opaque to soft X-rays; An intermediate layer sheet formed of a material that is opaque to soft X-rays; A second outer sheet formed of a material that is opaque to soft X-rays, The first outer sheet is provided with an air inlet, The intermediate sheet is provided with an air passage having an air inlet opening communicating with the inlet, The second outer sheet is formed with an intake port communicating with the air passage, the first outer layer sheet, the intermediate layer sheet and the second outer layer sheet are laminated and fixed to each other, and the soft X-ray shielding sheet is formed with an air passage portion provided in communication with the air inlet, the air passage and the intake port; 4. The soft X-ray type electrostatic remover according to claim 1.

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