Can roll, method for manufacturing the same, surface treatment device including can roll and method for treating surface of long-sized resin film using the same

Abstract

To provide a surface treatment device without causing wrinkles and cracks when subjecting a long-sized resin film conveyed in a vacuum to surface treatment applying a heat load.SOLUTION: A can roll 56 consists of a metal cylindrical rotor for winding a long-sized resin film F conveyed by roll-to-roll around the outer peripheral surface in a reduced pressure atmosphere to cool the long-sized resin film. In the outer peripheral thick part 10 of the cylindrical rotor, a plurality of gas introduction paths 3 having a plurality of gas discharge holes 4 opened on the outer peripheral surface, respectively, are provided in the circumferential direction at equal intervals over the whole circumference. The opening group 5 of the plurality of gass discharge holes 4 included in the plurality of gas introduction paths 3, respectively is arranged in a pattern formed concave toward the rotation direction of the can roll 56 as a whole.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a can roll used when continuously performing a surface treatment such as sputtering film formation on a long resin film transported by roll-to-roll in a reduced pressure atmosphere, a manufacturing method thereof, a surface treatment device equipped with the can roll, and a surface treatment method for a long resin film using the same. [Background technology]

[0002] Flexible wiring boards in which wiring circuits of a predetermined pattern are formed on a resin film are used in electronic devices such as liquid crystal panels, notebook computers, digital cameras, and mobile phones. In recent years, with the increasing performance of these electronic devices, wiring circuit patterns tend to become increasingly fine and dense, and metal-film-coated resin films used as materials for the flexible wiring boards before patterning are required to be free of wrinkles and scratches. In addition, metal-film-coated resin films that are thinner in thickness or double-sided metal-film-coated resin films in which metal films are formed on both sides of a resin film are often used.

[0003] The above-mentioned resin film with metal film can be generally produced by a so-called metallizing method, which forms a metal film on the surface of a resin film. Specifically, the resin film with metal film can be produced by forming a metal film on the resin film by a vacuum film-forming method alone, or by forming a metal film by a combination of a vacuum film-forming method and a wet plating method. Known examples of the vacuum film-forming method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

[0004] Among the various vacuum film-forming methods described above, the sputtering method provides excellent adhesion, but is said to impose a larger thermal load on the resin film as a substrate than the vacuum deposition method. If a large thermal load is applied to the resin film during film formation, wrinkles may occur in the resin film. Therefore, when a film is formed on the front surface of a resin film by the sputtering method, the resin film is cooled from the back side to reduce the thermal load.

[0005] For example, Patent Document 1 discloses a technique for using a device called a sputtering web coater equipped with a can roll for cooling a resin film in a process for producing a metal-coated resin film on a resin film such as a polyimide film by a vacuum film-forming method. This device performs sputtering film formation on the front side of a long resin film transported roll-to-roll under a reduced pressure atmosphere while wrapping the long resin film around the outer periphery of a cylindrical can roll equipped with a refrigerant circulation flow path inside, and makes it possible to suppress the occurrence of wrinkles by extracting heat generated in the long resin film during the sputtering film formation from the back side.

[0006] However, since the outer peripheral surface of the can roll is not flat from a microscopic point of view, there are numerous gaps (gaps) between the outer peripheral surface of the can roll and the long resin film that is transported in contact with it, with a vacuum space separating them slightly. These gaps become a heat transfer resistance, which inhibits the transfer of heat from the resin film generated during film formation to the can roll, and wrinkles may occur in the long resin film. Therefore, a technology has been proposed that reduces the heat transfer resistance by introducing gas into the gaps from the outer peripheral surface of the can roll to increase the thermal conductivity of the gaps compared to the above-mentioned vacuum space.

[0007] For example, Patent Document 2 discloses a technique for introducing gas into the gap from the can roll side by providing a plurality of gas inlet passages extending in the direction of the rotation axis of the can roll at equal intervals in the circumferential direction in the outer circumferential thick portion of the can roll and providing a plurality of fine gas discharge holes opening on the outer circumferential surface in each gas inlet passage. Patent Document 3 discloses a technique for forming a plurality of grooves that become the plurality of gas inlet passages in the outer circumferential thick portion of the can roll as a manufacturing method for a can roll provided with a plurality of gas inlet passages each having the above-mentioned gas discharge holes. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 62-247073 [Patent Document 2] International Publication No. 2005 / 001157 [Patent Document 3] US Patent No. 3,414,048 Summary of the Invention [Problem to be solved by the invention]

[0009] By using the can roll having the structure disclosed in the above Patent Documents 2 and 3, gas can be introduced into the gap between the outer circumferential surface of the can roll and the long resin film wound thereon, which is thought to suppress the occurrence of wrinkles, but the can roll disclosed in the above Patent Documents 2 and 3 has multiple gas introduction paths parallel to its central axis, so that gas is simultaneously supplied from each gas introduction path to the region extending in the width direction of the long resin film through multiple gas discharge holes. Therefore, the friction coefficient between the outer circumferential surface of the can roll and the long resin film simultaneously decreases in the region extending in the width direction of the long resin film as described above, and as a result, so-called microslip occurs, in which the long resin film locally slips slightly against the outer circumferential surface of the can roll.

[0010] The above-mentioned microslip is particularly likely to occur under conditions of low film rigidity, such as when the thickness of the long resin film is as thin as 25 μm or less. Furthermore, when forming metal films on both sides of a long resin film, if microslip occurs in the portion where the first side already formed is in contact with the outer peripheral surface of the can roll when forming a second side after forming a first side, minute scratches will occur on the film-formed surface of the first side, which may cause quality issues.

[0011] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide a can roll and a manufacturing method thereof that can suppress the occurrence of wrinkles in a long resin film or the occurrence of scratches on the surface of a deposited metal film when a surface treatment that imposes a thermal load on the long resin film transported roll-to-roll in a vacuum, as well as a surface treatment device equipped with the can roll and a surface treatment method for a long resin film using the same. [Means for solving the problem]

[0012] In order to achieve the above-mentioned object, the can roll provided by the present invention is a can roll consisting of a metallic cylindrical rotating body on which a long resin film transported roll-to-roll in a reduced pressure atmosphere is wound around its outer peripheral surface to cool it, and is characterized in that a plurality of gas inlet passages, each having a plurality of gas release holes opening on its outer peripheral surface, are provided around the entire circumference at equal circumferential intervals in the outer peripheral thick portion of the cylindrical rotating body, and the opening groups of the plurality of gas release holes each have in the plurality of gas inlet passages are arranged in a pattern that, overall, is concave toward the rotation direction of the can roll.

[0013] In addition, the manufacturing method of a can roll provided by the present invention includes the steps of forming a plurality of grooves at equal intervals around the entire outer circumference of a thick portion of a first cylindrical portion having a rotating shaft at its center, fitting a second cylindrical portion so that its inner surface is in contact with the outer circumference of the first cylindrical portion, joining the abutment portions between the thick portions between adjacent grooves in the thick portion of the first cylindrical portion and the inner circumference of the second cylindrical portion, and drilling a plurality of gas release holes that open onto the outer circumference of the second cylindrical portion by a drilling process for each of a plurality of gas introduction passages defined by the plurality of grooves and the inner circumference of the second cylindrical portion 2, and is characterized in that when the first cylindrical portion is viewed from any normal direction thereof, the shape of each groove is formed to be concave toward the rotation direction of the first cylindrical portion.

[0014] Furthermore, the present invention provides a surface treatment method for a long resin film, which involves wrapping a long resin film transported roll-to-roll in a vacuum atmosphere around the outer peripheral surface of a can roll consisting of a metallic cylindrical rotor and cooling the long resin film, wherein a plurality of gas inlet passages, each having a plurality of gas release holes opening on the outer peripheral surface, are provided around the entire circumference at equal circumferential intervals in the outer thick portion of the cylindrical rotor, and the opening groups of the plurality of gas release holes each having in the plurality of gas inlet passages are arranged in a pattern that, as a whole, is concave toward the rotation direction of the can roll, and gas is supplied from a gas supply source only to those of the plurality of gas inlet passages whose openings of all gas release holes are blocked by the long resin film, and the surface treatment is performed in an area where the gas is released from all openings located in the width direction of the long resin film. Effect of the Invention

[0015] According to the present invention, when a surface treatment that imposes a thermal load is performed on a long resin film transported roll-to-roll in a reduced pressure atmosphere, problems such as the occurrence of wrinkles in the long resin film or scratches on the surface of the formed metal film can be suppressed. [Brief description of the drawings]

[0016] [Figure 1] 1 is a schematic front view of an embodiment of a surface treatment device for a long resin film according to the present invention. [Diagram 2] FIG. 2 is a perspective view of one specific example of a can roll of the present invention that can be suitably used in the surface treatment device of FIG. 1. [Diagram 3] FIG. 1 is a perspective view of a conventional can roll in which a group of gas release hole openings has an arrangement pattern parallel to the central axis direction of the can roll. [Figure 4] 13 is a perspective view of a can roll in which the arrangement pattern of the opening groups of the multiple gas release holes is convex toward the rotation direction of the can roll. FIG. [Diagram 5] 3 is a schematic perspective view showing a state in which gas is being released from the outer peripheral surface side between the outer peripheral surface of the can roll in FIG. 2 and the long resin film wound thereon. FIG. [Figure 6] 2 is a perspective view of another specific example of a can roll of the present invention that can be suitably used in the surface treatment device of FIG. 1. FIG. [Figure 7] 1. FIG. 4 is a perspective view of yet another specific example of a can roll of the present invention that can be suitably used in the surface treatment device of FIG. [Figure 8] FIG. 3 is a development view of the outer circumferential thick portion of the cylindrical rotating body that constitutes the can roll of FIG. 2. [Figure 9] 3 is a process diagram showing a specific example of a method for manufacturing the can roll of FIG. 2. [Figure 10] 3 is a cross-sectional view of the can roll of FIG. 2 with a gas distribution means and a side plate attached thereto, taken along a plane including the central axis. [Figure 11] 11A is a front view and FIG. 11B is an exploded perspective view of the gas distribution means of the can roll of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] <Surface treatment device for long plastic films> First, an embodiment of the surface treatment device for long resin films of the present invention will be described. The surface treatment device of the embodiment of the present invention includes a group of various rolls that transport the long resin film roll-to-roll under a reduced pressure atmosphere, a can roll consisting of a metallic cylindrical rotor that wraps the long resin film around its outer circumferential surface and cools it, and a surface treatment means that is arranged opposite the outer circumferential surface of the can roll and performs a surface treatment on the long resin film wrapped around the outer circumferential surface. This configuration effectively prevents thermal damage caused by heat load when performing a surface treatment such as film formation on the long resin film, making it possible to perform a continuous and efficient surface treatment on the long resin film.

[0018] To explain this in detail with reference to the schematic front view of the surface treatment device for long resin films shown in Figure 1, the surface treatment device 50 for long resin films F is housed in a chamber 51 equipped with various pressure reduction devices such as a dry pump, turbo molecular pump, cryocoil, etc. (not shown), and the inside of the chamber 51 can be adjusted to various conditions such as an appropriate degree of pressure reduction and an inert gas atmosphere according to the surface treatment to be performed on the long resin film F. For example, when the surface treatment is sputtering deposition, the inside of the chamber 51 is set to an ultimate pressure of 10 -4 After the pressure is reduced to about 1 Pa, the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. There are no particular limitations on the shape and material of the chamber 51 as long as it can withstand the specified reduced pressure atmosphere.

[0019] A can roll 56 and various rolls for continuously winding the long resin film F on its outer peripheral surface in a roll-to-roll manner are provided in the above-mentioned chamber 51. Specifically, on the upstream side of the can roll 56, an unwinding roll 52 for continuously unwinding the long resin film F, a free roll 53 for guiding the unwound long resin film F, a tension sensor roll 54 for measuring the tension of the long resin film F, and a motor-driven feed roll 55 are arranged in this order. On the other hand, on the downstream side of the can roll 56, a motor-driven feed roll 61, a tension sensor roll 62 for measuring the tension of the long resin film F, a free roll 63 for guiding the long resin film F, and a take-up roll 64 for winding up the surface-treated long resin film F are arranged in the reverse order to the above.

[0020] The unwinding roll 52 and the winding roll 64 maintain the tension balance of the long resin film F by torque control using a powder clutch or the like. The feed rolls 55, 61 are designed to adjust the rotation speed according to the peripheral speed of the motor-driven can roll 56 so that the long resin film F adheres more closely to the outer circumferential surface of the can roll 56 as it is wound around it while being transported. As shown in Fig. 1, the angular range in which the long resin film F is wound around the outer circumferential surface of the can roll 56 is called the wrap angle A.

[0021] <Canroll> Next, a specific example of the can roll 56 according to the present invention, which is preferably used in the above-mentioned surface treatment device 50, will be described with reference to FIG. 2. The can roll 56 according to the present invention is made of a metallic cylindrical rotating body rotatably supported by a rotating shaft provided in the center, and a plurality of gas introduction paths 3 extending from one end face to the other end face are provided in the outer circumferential thick part 10 of the cylindrical rotating body at equal intervals around the entire circumference of the cylindrical rotating body. Each of the plurality of gas introduction paths 3 has a plurality of gas discharge holes arranged at approximately equal intervals along the extending direction, and the plurality of gas discharge holes are opened as an opening group 5 on the outer circumferential surface of the rotating cylinder. As a result, the gas supplied from a gas supply source (not shown) is distributed to each gas introduction path 3 by a gas distribution means described later, and then discharged from the opening group 5 on the outer circumferential surface of the rotating cylinder through a plurality of gas discharge holes communicating with each gas introduction path 3. As a result, the heat of the long resin film F generated by the surface treatment performed while it is wound around the outer circumferential surface of the can roll 56 can be efficiently transferred to the can roll 56.

[0022] That is, the surface of the long resin film F and the outer peripheral surface of the can roll 56 are not flat when viewed microscopically, but have multiple projections and recesses. Therefore, if gas cannot be discharged from the outer peripheral surface of the can roll 56 by the gas introduction path 3 having multiple gas discharge holes as described above, the long resin film F and the outer peripheral surface of the can roll 56 will be insulated from each other due to the countless gaps (also called gaps) consisting of almost vacuum spaces that exist between the long resin film F and the outer peripheral surface of the can roll 56 when the long resin film F is wound around the outer peripheral surface of the can roll 56 in a reduced pressure atmosphere. As a result, the heat transfer efficiency between them decreases, causing local temperature differences on the surface of the long resin film F, which may cause wrinkles in the long resin film F.

[0023] In response to this, as described above, a plurality of gas introduction paths 3 are provided around the entire circumference of the outer circumferential thick portion 10 of the cylindrical rotating body constituting the can roll 56, and gas is discharged from each of the gas introduction paths 3 through a plurality of gas discharge holes into the gap between the outer circumferential surface of the can roll 56 and the long resin film F, thereby making it possible to maintain the gap at a substantially constant distance and to fill the gap with gas and improve the thermal conductance uniformly. As a result, the heat generated when subjecting the long resin film F to surface treatments that impose a thermal load, such as surface modification and film formation, can be efficiently transferred to the can roll 56, making it possible to effectively suppress the occurrence of wrinkles in the long resin film F due to heat. This improves the quality of the metal-film-attached resin film that is the material for flexible wiring boards used inside electronic devices such as liquid crystal televisions and mobile phones, and allows it to be produced with a high yield.

[0024] The distance of the gap between the outer circumferential surface of the can roll 56 and the long resin film F wound thereon varies depending on the type and thickness of the long resin film F, the tension of the long resin film F during transport, the amount of gas introduced into the gap, etc., but if the distance of the gap is about 40 μm or less, which is the molecular flow range, the gas released from the outer circumferential surface of the can roll 56 to the gap can be exhausted by a vacuum pump that is usually provided in the surface treatment device 50. Therefore, introducing gas into the gap from the outer circumferential surface of the can roll 56 does not adversely affect the reduced pressure atmosphere in the chamber 51. Note that if the gas introduced into the gap is the same as the atmospheric gas introduced into the chamber 51 during the surface treatment of the long resin film F, the atmospheric gas will not be contaminated, so if the atmospheric gas is argon gas, it is desirable to use argon gas, which has relatively good heat conductivity, as the gas introduced into the gap.

[0025] Incidentally, the gas distributed and supplied to the multiple gas introduction paths 3 by the gas distribution means described later is discharged almost simultaneously through all the gas discharge hole groups connected to each of the multiple gas introduction paths 3 into the gap between the outer circumferential surface of the can roll 56 and the long resin film F wound thereon. Therefore, in the can roll 56 of one embodiment of the present invention, the opening groups 5 of the multiple gas discharge holes that each of the multiple gas introduction paths 3 has are arranged in a V-shaped pattern that is concave toward the rotation direction of the can roll 56 as a whole. This makes it possible to prevent the problem of scratches caused by so-called microslip, in which the long resin film F slightly slips on the outer circumferential surface of the can roll 56, and the problem of wrinkles caused by bending due to gas forcefully discharged from the opening groups 5.

[0026] That is, in a pattern in which the opening groups 105 of the gas discharge holes of each of the gas introduction paths 103 are arranged on a straight line parallel to the central axis O of the can roll 156, as in the can roll 156 shown in Fig. 3, gas is supplied to all gaps existing in the width direction of the long resin film F at the portion where the long resin film F starts to wrap around the outer peripheral surface of the can roll 156. In this way, if gas is supplied to all gaps existing in the width direction at the same time when the long resin film F starts to wrap around the outer peripheral surface of the can roll 156, the friction coefficient between the outer peripheral surface of the can roll 156 and the long resin film F, which face each other across the gaps, suddenly decreases in this width direction, so that microslip occurs, and fine scratches may occur on the surface of the long resin film F.

[0027] In addition, as in the can roll 256 shown in FIG. 4, when the opening groups 205 of the multiple gas discharge holes of each of the multiple gas introduction paths 203 are arranged in a pattern that is convex toward the rotation direction of the can roll 256, gas is discharged from the opening groups 205 provided on the outer peripheral surface of the can roll 256 in the order from both ends in the width direction of the long resin film F toward the center at the part where the long resin film F starts to wrap around the outer peripheral surface of the can roll 256. In this case, the deflection of the long resin film F caused by hitting the gas forcefully discharged from the openings moves toward the center in the width direction, and finally wrinkles may occur in this center because there is no escape route. In particular, when the thickness of the long resin film F is as thin as about 25 μm or less or the width of the long resin film F is as wide as about 300 mm or more, the rigidity of the film is low and wrinkles are likely to occur.

[0028] In contrast, in the can roll 56 of one embodiment of the present invention, as described above, the opening group 5 of the multiple gas discharge holes of each of the multiple gas introduction paths 3 is arranged in a V-shaped pattern toward the rotation direction of the can roll 56, so that gas is not simultaneously supplied to all gaps existing in the width direction at the part where the long resin film F starts to wrap around the outer circumferential surface of the can roll 56. This makes it possible to suppress a sudden decrease in the width direction of the friction coefficient between the long resin film F and the outer circumferential surface of the can roll 56, which face each other across these gaps, and as a result, it is possible to prevent the occurrence of minute scratches on the contact surface of the long resin film F due to microslip. Furthermore, since gas can be released from the outer circumferential surface so as to spread from the center of the long resin film F in the width direction toward both end sides as the can roll 56 rotates, as shown by the white arrows in FIG. 5, the deflection of the long resin film F caused by the impact of the gas released vigorously from the opening 5 of the gas discharge hole can be effectively released to both end sides in the width direction, and the occurrence of wrinkles can be suppressed.

[0029] In the above-mentioned specific example of the can roll 56 of the present invention, the arrangement pattern of the opening group 5 of the multiple gas discharge holes provided in the outer circumferential thick portion 10 of the cylindrical rotating body was V-shaped toward the rotation direction of the can roll 56, but it is not limited to a V-shape as long as gas is not supplied simultaneously in the width direction at the part where the long resin film F starts to wrap around the outer circumferential surface of the can roll 56 and gas is released in the order from the center in the width direction of the long resin film F toward both ends. For example, as in the cylindrical rotating body of the can roll 356 shown in FIG. 6, in each of the multiple gas introduction paths 303 provided in the outer circumferential thick portion, the arrangement pattern of the opening group 305 of the multiple gas discharge holes may be an arc shape that is concave toward the rotation direction, or as in the cylindrical rotating body of the can roll 456 shown in FIG. 7, in each of the multiple gas introduction paths 403 provided in the outer circumferential thick portion, the arrangement pattern of the opening group 405 of the multiple gas introduction holes may be approximately dish-shaped (approximately inverted Mt. Fuji shape). In the roughly dish-shaped configuration of Figure 7, some of the opening group 405 are arranged parallel to the central axis O of the can roll 456. However, if this parallel arrangement is within a range of approximately 1 / 3 or less of the total width Fw of the long resin film F at the widthwise central portion of the long resin film F, even if gas is simultaneously supplied in the width direction at the portion where the long resin film F begins to wrap around the outer peripheral surface of the can roll 456, there will be almost no problems caused by a sudden drop in the coefficient of friction with the outer peripheral surface of the can roll 456.

[0030] 2, in one specific example of the can roll 56 of the present invention, when the outer circumferential surface of the cylindrical rotating body constituting the can roll 56 is viewed from any normal direction, it is preferable that the central axis O of the can roll 56 intersects with two to four opening groups 5 of the gas introduction passages 3. If the number of gas introduction passages 3 intersected by this central axis O is less than two, the interval between adjacent opening groups 5 in the circumferential direction of the can roll 56 is too large, or the arrangement pattern of these opening groups 5 is considered to be nearly linear, which is not preferable.

[0031] If the interval between the opening groups 5 adjacent in the circumferential direction is too large as in the former case, there is a risk that a region where the gas is not filled locally will occur in the gap between the long resin film F and the can roll 56, and as a result, the long resin film F cannot be cooled uniformly and wrinkles may occur. On the other hand, if the arrangement pattern of the opening groups 5 is almost linear as in the latter case, the gas is supplied almost simultaneously in the width direction at the part where the long resin film F starts to wrap around the outer circumferential surface of the can roll 56, which causes microslip to occur. On the other hand, even if the number of gas introduction paths 3 intersecting the central axis O exceeds four, the frequency of microslip does not further decrease, and instead the area of ​​the outer circumferential surface of the can roll 56 where the surface treatment means can face is reduced, or the proportion of the outer circumferential surface of the can roll 56 where no openings exist is reduced, which may reduce the cooling capacity.

[0032] The reason why the area where the surface treatment means can be opposed decreases as the number of intersections increases as described above will be described with reference to Fig. 8. If the width of the range in which the opening group 5 is provided in the central axis direction of the cylindrical rotor constituting the can roll 56 is the gas release width Gw, this gas release width Gw needs to be narrower than the width Fw of the long resin film F. The reason is that if the gas release width Gw is wider than the width Fw of the long resin film F, the openings of the gas release holes located at both ends in the central axis direction of the cylindrical rotor within the range of the embrace angle A on the outer circumferential surface of the can roll 56 will not be blocked by the long resin film F, so that gas is released directly from the openings at both ends into the chamber 51, making it difficult to fill the gap between the can roll 56 and the long resin film F with gas.

[0033] For the same reason as above, gas is introduced into each of the multiple gas introduction paths 3 provided in the outer circumferential thick portion 10 of the cylindrical rotor constituting the can roll 56 only when the opening group 5 is all blocked by the long resin film F by a gas distribution means described later. For example, as shown in Fig. 8, which shows a certain moment of the rotating cylindrical rotor, if the region in the multiple gas introduction paths 3 where the opening group 5 of the gas release holes is all blocked by the long resin film F is the gas release range Ga shown by hatching, this gas release range Ga will be narrower than the range of the embrace angle A, which is the region of the outer circumferential surface of the can roll 56 around which the long resin film F is wound. Specifically, when 15 gas inlet passages 3, 3(1) to 3(15), are provided on the cylindrical rotating body, gas is not released at both widthwise end sides of the long resin film F in the portion of the outer peripheral surface of the can roll 56 where the long resin film F begins to wrap around, and gas is not released at the widthwise center of the long resin film F in the portion of the outer peripheral surface of the can roll 56 where the wrapped long resin film F begins to separate from the outer peripheral surface.

[0034] Furthermore, when the long resin film F is subjected to surface treatment, a heat load is applied to the entire widthwise region of the long resin film F from one end to the other end in the widthwise direction, so that the region of the outer circumferential surface of the can roll 56 to which the surface treatment means 57 can be opposed is the surface treatment region Gb, which is the region in which gas is released over the entire widthwise region of the long resin film F. Therefore, this surface treatment region Gb is narrower than the above-mentioned gas release region Ga. For this reason, when the outer circumferential surface of the cylindrical rotor described above is viewed from any normal direction, if the central axis O intersects with the opening group 5 of the gas introduction passages 3 that is more than four (FIG. 8 shows an example in which the central axis O intersects with two gas introduction passages 3), the region in which the surface treatment is performed on the long resin film F is reduced, which is not preferable.

[0035] The shape of each gas introduction passage 3 when the outer circumferential surface of the cylindrical rotating body constituting the can roll 56 is viewed from any normal direction is not particularly limited, but it is preferably the same shape as the arrangement pattern shape of the opening group 5 of the gas discharge holes communicating therewith. For example, if the arrangement pattern of the opening group 5 is V-shaped, it is preferable that the shape of each gas introduction passage 3 is also V-shaped. In this way, if the shape of each gas introduction passage 3 is the same as the arrangement pattern shape of the opening group 5 of the multiple gas discharge holes, the distances from each gas introduction passage 3 to the opening group 5 provided on the outer circumferential surface of the can roll 56 can all be the same, so that the pressure loss of the gas flowing through these gas discharge holes can be made almost uniform, and therefore the amount of gas discharged from the opening group 5 is less likely to vary.

[0036] The cylindrical rotating body constituting the can roll 56 may be formed of a single member, or may be formed of multiple members such as a double-cylinder structure (jacket roll structure). In either case, the members used are preferably metal members made of known metals such as stainless steel, aluminum, iron, copper, etc., or alloys of metals containing these as main components. When the metal members constituting the cylindrical rotating body are composed of multiple members, these members may be made of the same type of metal or different types of metal. When different types of metals are used, they may be appropriately selected in consideration of the thermal expansion coefficient, thermal conductivity, etc.

[0037] <Manufacturing method of Canroll> Next, a manufacturing method of the above-mentioned can roll 56 will be described with reference to Fig. 9, taking as an example a case where the cylindrical rotating body has a double-cylinder structure (jacket roll structure). First, as shown in Fig. 9(a), a first cylindrical part 1 made of a roll material such as a seamless pipe, a cast pipe, or a pipe joined by butt welding or friction stir welding is prepared, and a rotating shaft having a double-tube structure and a cylindrical inner cylindrical part are provided inside the first cylindrical part 1 concentrically with the first cylindrical part 1 while being spaced apart from the first cylindrical part 1. The annular space formed by the inner peripheral surface of the first cylindrical part 1 and the outer peripheral surface of the inner cylindrical part becomes a circulation flow path for the coolant.

[0038] Next, a plurality of grooves 1a extending from one end to the other end of the first cylindrical portion 1 are formed by grooving all around the outer circumferential surface of the first cylindrical portion 1 at equal intervals in the circumferential direction. Since the plurality of grooves 1a are used as a plurality of gas introduction paths, when the outer circumferential surface of the first cylindrical portion 1 is viewed from an arbitrary normal direction, the shape of each groove 1a is formed to be concave toward the rotation direction of the first cylindrical portion 1. There is no particular limitation on the grooving method, and a general processing machine such as a multi-axis processing machine or a five-axis processing machine can be used according to the shape of the groove. In the plurality of grooves 1a thus formed, welding is performed at thick-walled portions (protruding portions) 1b between two adjacent grooves 1a.

[0039] Next, as shown in FIG. 9(b), the second cylindrical portion 2 is shrink-fitted so that its inner peripheral surface is in contact with the outer peripheral surface of the first cylindrical portion 1 on which the multiple grooves 1a are formed. The outer peripheral surface of this second cylindrical portion 2 becomes the outer peripheral surface of the can roll 56 on which the long resin film F is wound. The shrink-fitting is a method in which the second cylindrical portion 2 having an inner diameter smaller than the outer diameter of the first cylindrical portion 1 is first prepared, and the second cylindrical portion 2 is entirely heated with a burner or an electric furnace to thermally expand so that the inner diameter of the second cylindrical portion 2 becomes larger than the outer diameter of the first cylindrical portion 1, and the first cylindrical portion 1 is fitted inside the second cylindrical portion 2 in this state. At this time, if the thickness of the second cylindrical portion 2 is too thin, the shrink-fitting process becomes difficult, so it is preferable to use a second cylindrical portion 2 having a thickness of about 15 mm, and to thinly cut the outer peripheral surface side of the second cylindrical portion 2 after shrink-fitting.

[0040] After the shrink fitting, as shown in FIG. 9(c), the first cylindrical part 1 and the second cylindrical part 2 are integrated by irradiating a laser or an electron beam from the outer peripheral surface side of the second cylindrical part 2 toward the thick parts 1b between the adjacent groove parts 1a in the first cylindrical part 1. As a result, a plurality of gas introduction passages 3 are formed, which are defined by the plurality of groove parts 1a of the first cylindrical part 1 and the inner peripheral surface of the second cylindrical part 2. During the above welding, it is desirable to weld all of the plurality of thick parts 1b using the above laser or electron beam, but it is also possible to thin out the welding every one or more thick parts 1b in the circumferential direction in consideration of conditions such as manufacturing constraints. Since the welded part leaves a weld mark (bead) 2a, the outer peripheral surface of the second cylindrical part 2 is polished to be smooth after welding. Furthermore, as shown in FIG. 9(e) and FIG. 9(f), plating with hard chrome or the like or polishing is performed as necessary.

[0041] Next, as shown in FIG. 9(g), a plurality of gas release holes 4 that open as an opening group 5 on the outer peripheral surface side of the second cylindrical portion 2 are drilled at approximately equal intervals along the extension direction of the gas introduction path for each of the plurality of gas introduction paths 3 by drilling using a microdrill or laser.

[0042] When the gas distribution means is provided only on one side of the can roll 56 in the direction of the central axis O, the side plate 13 is attached to the other side by, for example, laser welding, as shown in FIG. 9(h). After the multiple gas release holes 4 are drilled, as shown in FIG. 9(i), final finishing of cylindrical cutting or cylindrical polishing may be performed as necessary. In particular, when drilling with a laser, molten metal may adhere to the outer peripheral surface of the second cylindrical portion 2, or slight unevenness may occur, so such final finishing is preferable. Furthermore, in order to prevent scratches on the outer peripheral surface of the second cylindrical portion 2, it is preferable to perform surface treatment such as nickel plating, diamond-like carbon coating, tungsten carbide coating, titanium nitride coating, etc. This surface treatment such as nickel plating on the outer peripheral surface may be performed before drilling the multiple gas release holes 4. Through the above steps, a cylindrical rotating body with a double-cylinder structure (jacket roll structure) is completed.

[0043] In the above-mentioned manufacturing method of the can roll, the cylindrical rotating body is manufactured by performing groove cutting processing on the first cylindrical part 1 and then shrink fitting the second cylindrical part 2, but the manufacturing method is not limited to this, and the cylindrical rotating body of the can roll may be manufactured from a single metal member. For example, a rectangular metal plate is prepared, and gas flow paths extending in a diagonal direction with respect to the width direction from both ends of the width direction of the metal plate are drilled with a gun drill, and these two gas flow paths are connected to each other at approximately the center to process multiple gas introduction paths 3 that are approximately V-shaped in a plan view. After forming multiple gas introduction paths 3 in this way, they are cut to a desired length as necessary and rolled into a cylindrical shape, and the opposing ends are welded together. In this case, it is necessary to process multiple gas introduction paths 3 so that the positions of the gas introduction paths 3 at both ends match during the above-mentioned welding. Thereafter, processing may be performed in the order of Figures 9(e) to 9(i) in the same manner as in the case of the above-mentioned shrink fitting.

[0044] In this way, the cylindrical rotor constituting the can roll 56 can be made from a single metal member, but the manufacturing method using shrink fitting is preferable because it can be manufactured with higher processing accuracy and the wall thickness of the cylindrical rotor can be processed thinner, so that the long resin film F can be cooled more efficiently during film formation. In addition, when made from a single metal member, it is difficult to form each of the multiple gas introduction passages 3 into an arc shape or a roughly dish shape, so in this respect too, the manufacturing method using shrink fitting is more preferable.

[0045] <Gas distribution means> At least one end of the cylindrical rotor fabricated as described above is fitted with a gas distribution means called a gas rotary joint, which distributes the gas supplied from the gas supply source and supplies it to a plurality of gas introduction paths 3. Explaining specifically with reference to Figs. 10 and 11, the gas rotary joint 20 is composed of a rotating ring unit 21 and a fixed ring unit 22, which are in sliding contact with each other at their opposing sliding contact surfaces 21a and 22a. The rotating ring unit 21 is attached to one end of the cylindrical rotor and rotates together with the cylindrical rotor, while the fixed ring unit 22 is supported by a support member or the like (not shown) so as not to move. That is, when the cylindrical rotor rotates, the rotating ring unit 21 rotates while its sliding contact surface 21a is in sliding contact (sliding) with the sliding contact surface 22a of the fixed ring unit 22.

[0046] The rotating ring unit 21 has gas supply passages 23 in the same number as the number of gas introduction passages 3 of the cylindrical rotor, which are provided around the entire circumference at equal intervals in the circumferential direction. Each of the gas supply passages 23 is formed radially inside the rotating ring unit 21 and / or parallel to the rotation axis direction of the rotating ring unit 21, and one end of the gas supply passage 23 is connected to the gas introduction passage 3 at approximately the same angular position as the gas supply passage 23 via a connecting pipe 25. On the other hand, the other end of the gas supply passage 23 opens as a rotation opening 23a on the sliding surface 21a of the rotating ring unit 21. That is, the angular position of the rotation opening 23a of each gas supply passage 23 is the same as the angular position of the gas introduction passage 3 to which the gas supply passage 23 is connected. The gas supply passage 23 may be directly connected to the gas introduction passage 3 without the connecting pipe 25.

[0047] A gas distribution path 24 is formed in the fixed ring unit 22, and one end of the gas distribution path 24 is connected to a supply pipe 26 of a gas supply source (not shown). Meanwhile, the other end of the gas distribution path 24 opens as a fixed opening 24a in the sliding contact surface 22a facing the rotating ring unit 21. The fixed opening 24a is not doughnut-shaped when viewed from a direction perpendicular to the sliding contact surface 22a, but has a substantially C-shape, and thus distributes gas only to the rotating opening 23a of the gas supply path 23 that communicates with the gas introduction path 3 at an angular position where all the opening groups 5 of the gas release holes are blocked by the long resin film F. In other words, the fixed opening 24a does not face the rotating opening 23a of the gas supply path 23 that communicates with the gas introduction path 3 at an angular position where not even one opening of the gas release hole is blocked by the long resin film F.

[0048] With this structure, the gas supply to the gas introduction path 3 communicating with the opening group 5 of all the gas release holes can be started when they are blocked by the long resin film F, and the gas supply to the gas introduction path 3 communicating with them can be stopped when at least one opening of the gas release hole is no longer blocked by the long resin film F. This allows almost all of the gas supplied from the gas supply source to be introduced into the gap between the outer circumferential surface of the can roll 56 and the long resin film F wound thereon. Therefore, as described above, it is possible to sufficiently fill the gap between the outer circumferential surface of the can roll 56 and the long resin film F wound thereon with gas to improve heat transfer. In addition, it is also easy to control the gas flow rate to maintain the gap distance almost constant.

[0049] In contrast, if the gas distribution means having the above configuration is not used, the gas release holes whose openings are not blocked by the long resin film F have almost no gas pressure resistance, and most of the gas supplied to the gas introduction passage 3 communicating with these gas release holes is released directly into the chamber 51 via the gas release holes of the unblocked openings. As a result, it becomes impossible to sufficiently fill the gap between the outer circumferential surface of the can roll 56 and the long resin film F wound around it with gas.

[0050] The gas distribution means may be provided at least at one end in the central axis direction of the cylindrical rotor, but if the pressure loss in the gas inlet passage 3 of the cylindrical rotor is large and the amount of gas discharged from the opening group 5 of the multiple gas discharge holes is expected to vary significantly, the gas distribution means may be provided at both ends in the central axis direction of the cylindrical rotor. When the gas distribution means is provided only at one end in the central axis direction of the cylindrical rotor of the can roll 56, a side plate 13 may be attached to the other end of the cylindrical rotor where the ends of the multiple gas inlet passages 3 are open, and this end opening may be sealed. In the present invention, unless otherwise specified, the cylindrical rotor equipped with the above-mentioned rotating shaft and the gas distribution means are collectively referred to as a can roll.

[0051] <Surface treatment method> 1, the surface treatment means 57 is provided at a position facing a surface treatment range Gb, which is a range in which gas is released over the entire width of the long resin film F, within the range of the embrace angle A on the outer peripheral surface of the can roll 56. The surface treatment means 57 performs a surface treatment that applies a thermal load to the long resin film F. When the surface treatment is a film formation process, examples of the surface treatment include sputtering film formation processes such as bipolar sputtering, magnetron sputtering, ion beam sputtering, high frequency magnetron sputtering, and reactive sputtering, chemical vapor deposition (CVD), vacuum film formation processes such as vacuum deposition, and atomic deposition (ALD). Of these, a model and number of surface treatment means suitable for the treatment method to be adopted are appropriately installed.

[0052] For example, when magnetron sputtering is used as the surface treatment, four magnetron sputtering cathodes 57a to 57d are installed along the circumferential direction in a surface treatment range Gb on the outer circumferential surface of the can roll 56 as surface treatment means 57, as shown in Fig. 1. Note that, although an example using a plate-shaped target is shown in Fig. 1, when forming a metal film by sputtering, nodules (growth of foreign matter) may occur on the plate-shaped target. In such a case, it is preferable to use a cylindrical rotary target, which does not generate nodules and has a high target usage efficiency.

[0053] When a metal-film-attached long resin film is manufactured using the surface treatment device 50 for long resin films shown in Fig. 1, for example, a Ni-based alloy target is used for the magnetron sputtering cathode 57a, and Cu targets are used for the magnetron sputtering cathodes 57b to 57d, and the long resin film F is transported roll-to-roll while being sputtered on its surface by the sputtering cathodes 57a to 57d, whereby a Ni-based alloy film and a Cu film can be laminated on the surface of the long resin film F. In this case, by using the can roll 56 of the above-mentioned specific example of the present invention as the can roll 56, a high-quality metal-film-attached long resin film without wrinkles or small scratches can be manufactured.

[0054] The film made of the Ni-based alloy is called a seed layer, and its composition is appropriately selected from various known alloys such as Ni-Cr alloy, Inconel, Constantan, Monel, etc., depending on the desired characteristics such as electrical insulation and migration resistance of the resin film with the metal film. If it is desired to further thicken the metal film of the long resin film with the metal film, the metal film may be formed by a wet plating method after the sputtering film formation as dry plating. In this case, the wet plating method may form the metal film only by electroplating, or may form the metal film by combining electroless plating as primary plating and electrolytic plating as secondary plating. In either case, a general wet plating method may be adopted for the wet plating process.

[0055] The surface treatment means 57 is not limited to those that perform the film formation treatment represented by the above-mentioned sputtering film formation, but also includes those that perform plasma treatment, ion beam treatment, electron beam treatment, etc. These surface treatments are aimed at surface modification of the long resin film, and like the above-mentioned film formation treatment, the long resin film F can be continuously treated while being transported roll-to-roll in the chamber 51 under a reduced pressure atmosphere, and all of these treatments are subject to the problem of wrinkle generation and microslip because they are treatments that apply a thermal load to the long resin film F. Therefore, by adopting the can roll 56 of the above-mentioned specific example of the present invention as the can roll of the surface treatment device for long resin films, it is possible to sufficiently fill the gap between the outer circumferential surface of the can roll 56 and the long resin film F wound thereon with gas, which enhances heat transfer and suppresses the occurrence of wrinkles, and also makes it possible to prevent microslip.

[0056] The plasma treatment is a method for treating a long resin film by generating oxygen plasma or nitrogen plasma by discharging in a reduced pressure atmosphere of a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen using a known plasma treatment method, while the ion beam treatment is a method for treating a long resin film by using a known ion beam source to generate plasma discharge in a magnetic gap to which a strong magnetic field is applied, and irradiating the positive ions in the plasma as an ion beam by electrolysis using an anode.

[0057] <Long resin film> Examples of long resin films that can be treated by the surface treatment device equipped with the can roll of the present invention include polyimide films, polyamide films, polyester films, polytetrafluoroethylene films, polyphenylene sulfide films, polyethylene naphthalate films, and liquid crystal polymer films. These resin films are excellent in flexibility, and have practical strength and electrical insulation properties suitable for wiring materials, so they are preferable as substrates for metal-film-attached resin films. Flexible wiring boards can be manufactured by patterning the laminated metal-film-attached resin films manufactured using these long resin films as substrates, for example, by a subtractive method. The subtractive method is a method of manufacturing a flexible wiring board by removing the metal film (for example, the above-mentioned Cu film) that is not covered with resist by etching. In addition to the metal film, oxide films, nitride films, carbide films, etc. may be formed on the long resin films according to the purpose.

[0058] As described above, by using a surface treatment device equipped with a can roll according to the embodiment of the present invention, wrinkles and minute scratches, which were a problem in the past, hardly occur even when a surface treatment that imposes a thermal load, such as a film formation process, is performed on a long resin film. This makes it possible to produce a high-quality resin film with a metal film. That is, the can roll according to the embodiment of the present invention releases gas from its outer circumferential surface, so that the heat transfer of the gap between the long resin film wrapped around it can be improved and the occurrence of wrinkles due to thermal load can be suppressed. In addition, the opening group of the multiple gas release holes provided on the outer circumferential surface is arranged so that the order of gas release from them gradually expands from the center to both ends in the width direction, so that the friction force between the outer circumferential surface of the can roll and the long resin film wrapped around it does not decrease suddenly. This suppresses the occurrence of microslip of the long resin film and prevents the occurrence of minute scratches on the surface of the long resin film. Next, the present invention will be described more specifically with reference to examples and comparative examples. EXAMPLES

[0059] <Example 1> A long resin film with metal films on both sides was manufactured by forming a metal film having a laminated structure consisting of a Ni-Cr film as a seed layer and a Cu film thereon on each of the first and second sides of a long resin film F using a surface treatment device 50 for long resin films, also called a sputtering web coater, as shown in Fig. 1. For the long resin film F, a polyimide film "Kapton (registered trademark)" manufactured by Toray DuPont Co., Ltd., with a width of 600 mm, a length of 2000 m, and a thickness of 12.5 µm was used.

[0060] In the can roll 56 of the surface treatment device 50, a plurality of gas introduction passages 3 are provided around the entire circumference at equal intervals in the thick part of the cylindrical rotor as shown in FIG. 2, and each of them is connected to a plurality of gas discharge holes having a V-shaped arrangement pattern of opening groups 5 toward the rotation direction of the can roll 56. A cylindrical rotor having such a structure was manufactured by the manufacturing method shown in FIG. 9, and its finished dimensions were a diameter of 800 mm and a width of 750 mm. To explain in detail, first, a stainless steel seamless pipe with a finished outer diameter of 796 mm and a thickness of 15 mm was prepared as the first cylindrical part 1. On the outer periphery of this first cylindrical part 1, 180 grooves 1a were provided at equal intervals in the circumferential direction, extending from one end to the other end in the width direction of the first cylindrical part 1, by cutting with an end mill using a five-axis machining device. That is, the grooves 1a were provided around the entire outer periphery of the first cylindrical part 1 at an angle of 2° from the central axis of the first cylindrical part 1 as viewed from the side. Each groove 1a had a width of 4 mm and a depth of 4 mm, and was V-shaped with a concave shape at the center in the width direction toward the direction of rotation. The opening angle at the center of this V shape was 168°, making it a symmetrical shape. After processing the multiple grooves 1a in this way, the outer circumferential surface of the first cylindrical portion 1 was cylindrically ground to ensure good shrink fitting.

[0061] Next, a stainless steel seamless pipe with a finished inner diameter of 795 mm and a thickness of 12 mm was prepared as the second cylindrical portion 2, and its inner peripheral surface was polished to enable good shrink fitting. This second cylindrical portion 2 was shrink fitted to the outer peripheral side of the first cylindrical portion 1 while being heated as a whole with a burner. In order to facilitate the processing of a plurality of gas release holes communicating with each of a plurality of gas introduction passages 3 defined by the plurality of grooves 1a and the inner peripheral surface of the second cylindrical portion 2, the outer peripheral surface of the roll in which the shrink fitted first cylindrical portion 1 and second cylindrical portion 2 are integrated was cylindrically cut until the outer diameter was 802 mm.

[0062] Next, a YAG laser with a wavelength of 1.06 μm and an output of 10 kW was irradiated toward the thick-walled portion 1b between the adjacent groove portions 1a to perform laser welding, thereby joining the first cylindrical portion 1 and the second cylindrical portion 2. The outer peripheral surface of this joined roll was cylindrically cut and cylindrically polished until the outer diameter became 800 mm. Furthermore, a hard chrome plating layer with a thickness of 100 μm was provided.

[0063] Next, in the second cylindrical portion 2 having a thickness of about 2 mm, a pulsed YAG laser having a wavelength of 1.06 μm and an output of 100 W was irradiated toward the center line of each gas introduction passage 3 to drill a plurality of gas discharge holes. At that time, the laser head was set at a position where the inner diameter of each gas discharge hole was 200 μm, and the laser was irradiated at a pitch of 7 mm. However, in the region on the outer circumferential surface of the second cylindrical portion 2 that becomes the transport path of the long resin film, no gas discharge holes were provided in the region from both ends in the width direction to 20 mm inward. In this embodiment, gas discharge holes were drilled in a range of 560 mm in the width direction in the region of the transport path of the long resin film.

[0064] Furthermore, an inner cylindrical portion that cooperates with the inner circumferential surface of the first cylindrical portion 1 to become a refrigerant circulation path, and a rotating shaft with a double piping structure for circulating a refrigerant cooled by an external chiller therein were assembled. A side plate 13 was laser welded to one end of the cylindrical rotor thus fabricated, and mirror polished. Then, a gas rotary joint 20 consisting of a rotating ring unit 21 and a fixed ring unit 22 as shown in FIG. 11 was attached to the other end of the cylindrical rotor as a gas supply means. This gas rotary joint 20 was processed so that gas was supplied only to the gas introduction paths 3 in which all of the opening groups of the gas release holes were blocked with a long resin film, among the 180 gas introduction paths 3.

[0065] The double-cylinder-structured can roll 56 thus produced was installed in the surface treatment device 50 for long resin films so that the arrangement pattern of the opening groups 5 of the gas emission holes communicating with each gas introduction passage 3 was concave toward the rotation direction of the can roll 56. Furthermore, four magnetron sputtering cathodes 57 were installed along the transport path of the outer peripheral surface at positions facing the surface treatment range Gb, which is the range in which gas emission is performed in the entire region from one end to the other end of the width direction of the long resin film wound thereon, of the embrace angle A of the outer peripheral surface of the can roll 56.

[0066] Of the four magnetron sputtering cathodes 57, a Ni-Cr target was used for magnetron sputtering cathode 57a, and a Cu target was used for magnetron sputtering cathodes 57b, 57c, and 57d in order to form a laminated metal film consisting of a Ni-Cr film as a seed layer and a Cu film thereon on each surface of the polyimide film. A long resin film F made of a roll-shaped polyimide film was set on unwinding roll 52, and its tip was attached to winding roll 64 via can roll 56. Thereafter, chamber 51 was evacuated to 5 Pa by multiple dry pumps, and further evacuated to 3×10 using multiple turbo molecular pumps and cryocoils. -3 The pressure was evacuated to 100 Pa.

[0067] The motor-driven roller was started to transport the long resin film F roll-to-roll at a transport speed of 8 m / min. At that time, the tension of the long resin film F on the unwinding roll 52 side and the winding roll 64 side was adjusted to 200 N, and chiller water controlled at a temperature of 20° C. was circulated as a coolant in the coolant circulation flow path of the can roll 56. In addition, argon gas was supplied to the gas rotary joint 20 of the can roll 56 so that the gas pressure in the gas distribution path 24 of the fixed ring joint 22 was 800 Pa. Since this gas pressure is lower than the drag of the long resin film, 833 Pa (drag 833 Pa = tension 200 N / radius 0.4 m / film width 0.6 m), the long resin film F could be transported while being in close contact with the outer peripheral surface of the can roll 56, and therefore the argon gas discharged from the opening 5 of the gas discharge hole could be filled in the gap between the outer peripheral surface of the can roll 56 having fine irregularities and the long resin film F wound thereon.

[0068] In this state, argon gas was introduced into each of the magnetron sputtering cathodes 57a to 57d at a flow rate of 300 sccm, and a power of 20 kW was applied to perform sputtering film formation. During sputtering film formation, when the part where the long resin film F starts to wrap around the outer peripheral surface of the can roll 56 was observed, the argon gas discharged from the outer peripheral surface gradually spread from the center in the width direction of the long resin film F toward both ends and filled the film. After the Ni-Cr film and the Cu film thereon were formed on the first surface of the long resin film F as described above, the long resin film F was removed from the winding roll 64 and reattached to the unwinding roll 52. Then, sputtering film formation was performed on the second surface of the long resin film F on which the first surface was formed, in the same manner as on the first surface. In this manner, a long resin film with metal films on both sides was manufactured.

[0069] <Example 2> A can roll was produced in the same manner as in Example 1, except that the groove shape on the outer periphery of the first cylindrical portion 1 was changed from a V-shape to an arc shape, and a long resin film with metal films on both sides was produced in the same manner. The radius of the arc shape was 1000 mm. During sputtering deposition, when the part where the long resin film F starts to wrap around the outer periphery of the can roll 56 was observed, the argon gas released from the outer periphery gradually spread from the center of the width direction of the long resin film F toward both ends and filled the area.

[0070] <Example 3> A can roll was produced in the same manner as in Example 1, except that the groove shape of the outer peripheral surface of the first cylindrical portion 1 was changed from a V-shape to an approximately dish-shaped shape, and a long resin film with metal films on both sides was produced in the same manner. The approximately dish-shaped shape was a pattern consisting of a straight line portion parallel to the central axis of the can roll 56 at 180 mm in the center of the width direction of the first cylindrical portion 1, and two oblique lines inclined at an angle of 8° from both ends of this straight line portion to the extension line of the straight line portion in the rotation direction of the can roll 56. When the sputtering film formation was performed, the part of the outer peripheral surface of the can roll 56 where the long resin film F begins to wrap around was observed, and the argon gas discharged from the outer peripheral surface gradually spread from the center of the width direction of the long resin film F toward both ends and filled the area.

[0071] <Comparative Example 1> A can roll was produced in the same manner as in Example 1, except that the groove shape on the outer periphery of the first cylindrical portion 1 was processed with a groove cutter so as to be a straight line parallel to the central axis of the can roll 56, and a long resin film with metal films on both sides was produced in the same manner. When the part where the long resin film F started to wrap around the outer periphery of the can roll 56 during the sputtering deposition was observed, the argon gas released from the outer periphery filled the long resin film F from the center in the width direction to both ends at once.

[0072] <Comparative Example 2> A can roll was produced in the same manner as in Example 1, except that the groove shape on the outer periphery of the first cylindrical portion 1 was changed from a V-shape that was concave toward the rotation direction of the can roll 56 to a V-shape that was convex toward the rotation direction of the can roll 56, and a long resin film with metal films on both sides was produced in the same manner. During sputtering deposition, when the part of the outer periphery of the can roll 56 where the long resin film F begins to wrap was observed, the argon gas released from the outer periphery gradually filled the long resin film F from both ends in the width direction toward the center.

[0073] <Surface observation> The first and second film-formed surfaces of the double-sided metal-film-formed long resin films produced in the above-mentioned Examples 1 to 3 and Comparative Examples 1 and 2 were observed under a microscope to evaluate the presence or absence of wrinkles and scratches. The evaluation results are shown in Table 1 below.

[0074] [Table 1]

[0075] As shown in the results of Table 1 above, the long resin films with metal films on both sides produced by sputtering deposition in Examples 1 to 3 did not have any wrinkles, and no scratches were generated on the outer peripheral surfaces of the first and second sides. In all of these sputtering depositions in Examples 1 to 3, at the part where the long resin film F starts to wrap around the outer peripheral surface of the can roll, the gas released from the outer peripheral surface of the can roll gradually spread from the center in the width direction of the long resin film F to both ends and filled the gap, so that the decrease in the friction coefficient that occurs when the gas released from the outer peripheral surface fills the gap between the outer peripheral surface of the can roll and the long resin film wrapped thereon does not occur all at once in the width direction of the long resin film F, and the friction coefficient gradually decreases from the center in the width direction of the long resin film F to both ends, so that it is presumed that microslip that causes scratches did not occur. Furthermore, even if the long resin film F is warped due to the gas that is forcefully released from the outer peripheral surface when the long resin film F begins to wrap around the outer peripheral surface of the can roll, it is presumed that no wrinkles occur because this warping is released when gas is gradually filled from the center of the long resin film in the width direction toward both ends, as described above.

[0076] In contrast, in Comparative Example 1, no wrinkles occurred and no scratches occurred on the second surface, but scratches occurred on the first surface. It is presumed that in the can roll used in Comparative Example 1, at the part where the long resin film F begins to wrap around its outer peripheral surface, the coefficient of friction between the outer peripheral surface of the can roll and the long resin film wrapped around it suddenly drops in the width direction of the long resin film, causing microslip in which the long resin film slides in the width direction, resulting in the abrasion scratches.

[0077] In addition, wrinkles and scratches on the first surface were observed in Comparative Example 2. In the can roll used in Comparative Example 2, at the part where the long resin film F starts to wrap around the outer peripheral surface, gas is released from the outer peripheral surface of the can roll in the gap between the outer peripheral surface of the can roll and the long resin film wrapped around it, filling the gap from both ends of the long resin film F in the width direction toward the center, and it is presumed that the gas released forcefully from the outer peripheral surface while filling the gap toward the center causes bending of the long resin film F, which ultimately loses its escape route at the center of the width direction of the long resin film F and becomes wrinkled. It is presumed that the scratches on the first surface are caused by wrinkles that have occurred in the long resin film.

[0078] In this way, in all of the can rolls used in Examples 1 to 3, gas is gradually released from the outer peripheral surface of the long resin film F from the widthwise center to both ends at the part where the long resin film F begins to wrap around the outer peripheral surface of the can roll, thereby suppressing the occurrence of microslip due to a sudden decrease in the friction coefficient with the outer peripheral surface in the width direction of the long resin film F and preventing scratches caused by this.In particular, when depositing the second surface, it is possible to prevent the occurrence of scratches between the metal film of the first surface, which has already been deposited, and the outer peripheral surface of the can roll, thereby suppressing the occurrence of pinholes (film holes) in the metal film caused by such scratches. [Explanation of symbols]

[0079] 1 First cylinder part 1a Groove 1b Thick wall part 2 Second cylinder part 2a Welding marks 3 Gas inlet 4 Gas release hole 5 Opening(s) 10 Thick outer periphery 11 Inner cylindrical body 12 Refrigerant circuit 13 Side Panel 14 Rotating shaft (double piping structure) 20 Gas distribution means 50 Surface treatment equipment 51 Chamber 52 Unwinding roll 53, 63 Freerolls 54, 62 Tension sensor roll 55, 61 Feed roll 56 Canroll 57, 57a, 57b, 57c, 57d Surface treatment means 64 Winding roll F Long resin film Fw: Width of long resin film Ga gas release range Gb Surface treatment range Gw Gas release width O center axis A Embracing angle

Claims

1. A can roll is made of a metallic cylindrical rotor that wraps and cools a long resin film transported in a roll-to-roll manner under a reduced pressure atmosphere, A plurality of gas inlet passages, each having a plurality of gas discharge holes opening on the outer peripheral surface, are provided around the entire circumference at equal intervals in the circumferential direction in the outer thick portion of the cylindrical rotating body, and the opening groups of the plurality of gas discharge holes each having in the plurality of gas inlet passages are arranged in a pattern that, overall, forms a concave shape toward the rotation direction of the can roll.

2. The can roll of claim 1 , wherein the concave pattern is a generally V-shape, a generally dish-shape, or a generally arc-shape.

3. The can roll according to claim 2, wherein when the outer peripheral surface of the cylindrical rotating body constituting the can roll is viewed from any normal direction, the central axis of the can roll intersects with a group of openings of two to four gas introduction passages.

4. The can roll according to claim 3, further comprising a gas distribution means at at least one end of the cylindrical rotating body for distributing gas supplied from a gas supply source only to those gas inlet passages in which the openings of all gas release holes are blocked by the long resin film.

5. a step of forming a plurality of grooves at equal intervals in the circumferential direction around the entire outer periphery of a thick portion of a first cylindrical portion having a rotating shaft at its center; a step of fitting a second cylindrical portion to the outside so that its inner periphery is in contact with the outer periphery of the first cylindrical portion; a step of joining the abutting portions between the thick portions between adjacent grooves in the circumferential direction in the thick portion of the first cylindrical portion and the inner periphery of the second cylindrical portion; and a step of drilling a plurality of gas release holes that open onto the outer periphery of the second cylindrical portion by a hole drilling process for each of a plurality of gas introduction passages that are respectively defined by the plurality of grooves and the inner periphery of the second cylindrical portion 2, wherein when the first cylindrical portion is viewed from any normal direction thereof, the shape of each groove is formed to be concave toward the rotation direction of the first cylindrical portion.

6. The method for manufacturing a can roll according to claim 5, wherein the joining step is welding by irradiating a laser or an electron beam from the outer circumferential surface side of the second tubular portion toward the thick portion of the first tubular portion.

7. The method for manufacturing a can roll according to claim 6 , wherein the step of fitting is shrink fitting.

8. A surface treatment device for long resin films comprising a group of various rolls for transporting a long resin film roll-to-roll in a reduced pressure atmosphere, a can roll consisting of a metallic cylindrical rotor that wraps the long resin film around its outer peripheral surface and cools it, and a surface treatment means arranged opposite the outer peripheral surface of the can roll for performing a surface treatment on the long resin film, wherein the can roll is a can roll according to any one of claims 1 to 4.

9. The surface treatment device for a long resin film according to claim 8 , wherein the surface treatment means is a film forming means.

10. The surface treatment device for a long resin film according to claim 9, wherein the film forming means is a sputtering cathode.

11. The surface treatment device for a long resin film according to claim 8 , wherein the surface treatment is a plasma treatment and / or an ion beam treatment.

12. A surface treatment method for a long resin film, comprising winding a long resin film transported in a roll-to-roll manner in a vacuum atmosphere around an outer peripheral surface of a can roll made of a metallic cylindrical rotor and cooling the long resin film, the method comprising: a plurality of gas inlet passages, each having a plurality of gas release holes opening on its outer peripheral surface, are provided around the entire circumference at equal intervals in the circumferential direction in the outer thick portion of the cylindrical rotating body, and the opening groups of the plurality of gas release holes in each of the plurality of gas inlet passages are arranged in a pattern that, overall, forms a concave shape toward the rotation direction of the can roll; gas is supplied from a gas supply source only to those of the plurality of gas inlet passages whose openings of all gas release holes are blocked by the long resin film, and the surface treatment is performed in an area where the gas is released from all openings located in the width direction of the long resin film.

13. The surface treatment method for a long resin film according to claim 12, wherein the concave pattern is substantially V-shaped, substantially dish-shaped, or substantially arc-shaped.

14. The surface treatment method for a long resin film according to claim 13, wherein when the outer peripheral surface of the cylindrical rotating body constituting the can roll is viewed from any normal direction, the central axis of the can roll intersects with a group of openings of two to four gas introduction passages.

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