Magnetic sensor, position detection device, and lens module

Abstract

To suppress a change in output characteristics of a magnetic sensor due to at least one yoke.SOLUTION: A magnetic sensor 1 comprises: a soft magnetic structure 30 including a plurality of yokes 31; and MR elements 20 configured to be adjacent to the plurality of yokes 31 in a transverse direction of the plurality of yokes 31 and detect a magnetic field generated by the plurality of yokes 31. The soft magnetic structure 30 further includes a plurality of first additional magnetic bodies 32A and a plurality of second additional magnetic bodies 32B arranged in parallel with the plurality of yokes 31 in a longitudinal direction of the plurality of yokes 31 and located off the plurality of yokes 31 in an orthogonal direction orthogonal to each of the transverse direction and longitudinal direction.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a magnetic sensor including at least one yoke and a magnetic detection element and configured to detect a magnetic field in a predetermined direction, and to a position detection device and a lens module each including the magnetic sensor. [Background technology]

[0002] In recent years, magnetic sensors have been used for various purposes. As a magnetic sensor, one that uses a spin-valve type magnetoresistance effect element provided on a substrate is known. The spin-valve type magnetoresistance effect element has a magnetization fixed layer having a magnetization whose direction is fixed, a free layer having a magnetization whose direction can be changed according to the direction of an applied magnetic field, and a gap layer disposed between the magnetization fixed layer and the free layer. The spin-valve type magnetoresistance effect element provided on the substrate is often configured to have sensitivity to a magnetic field in a direction parallel to the surface of the substrate.

[0003] On the other hand, in a system including a magnetic sensor, it may be desired to detect a magnetic field perpendicular to the surface of the substrate using a magnetoresistance effect element provided on the substrate. A magnetic sensor having a yoke made of a soft magnetic material is known as a magnetic sensor that can achieve this. The yoke converts the magnetic field perpendicular to the surface of the substrate into a magnetic field parallel to the surface of the substrate and applies it to the magnetoresistance effect element. Such a magnetic sensor is described in, for example, Patent Document 1.

[0004] Patent Document 1 discloses a magnetic sensor including a magnetic field conversion section, a plurality of magnetoresistance effect elements, and a wiring section. The magnetic field conversion section includes a plurality of yokes. Each of the plurality of yokes has a shape long in one direction, receives an input magnetic field perpendicular to the surface of the substrate, and generates an output magnetic field parallel to the surface of the substrate. The plurality of magnetoresistance effect elements are arranged on both sides of each of the plurality of yokes. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2022-123321 A Summary of the Invention [Problem to be solved by the invention]

[0006] In addition to the input magnetic field, another magnetic field parallel to the surface of the substrate may be applied to each of the multiple yokes. In this case, each of the multiple yokes is magnetized in a predetermined direction according to the direction of the other magnetic field. When the direction of the other magnetic field changes, the magnetization direction of each of the multiple yokes changes, and as a result, the magnetization direction of the free layer of each of the multiple magnetoresistance effect elements changes. This causes a problem in that the characteristics obtained from the output of the magnetic sensor when the magnetic field is continuously changed, such as linearity and hysteresis, change.

[0007] The present invention has been made in consideration of such problems, and its purpose is to provide a magnetic sensor that can suppress changes in the output characteristics of the magnetic sensor caused by at least one yoke, as well as a position detection device and a lens module each equipped with this magnetic sensor. [Means for solving the problem]

[0008] The magnetic sensor of the present invention includes a soft magnetic structure including at least one yoke having a shape elongated in one direction, and a magnetic detection element adjacent to the at least one yoke in a short direction of the at least one yoke and configured to detect a magnetic field generated from the at least one yoke. The soft magnetic structure further includes at least one additional magnetic body arranged to be aligned with the at least one yoke in the longitudinal direction of the at least one yoke and to be shifted from the at least one yoke in a direction perpendicular to the longitudinal direction.

[0009] The position detection device of the present invention includes the magnetic sensor of the present invention and a magnetic field generator having magnetization in one direction parallel to an orthogonal direction and configured to generate a magnetic field applied to at least one yoke. The magnetic sensor and the magnetic field generator are configured such that their relative positions change in the orthogonal direction, and the strength of the magnetic field changes with the change in relative position.

[0010] The lens module of the present invention includes a lens configured to change position, a magnetic sensor of the present invention, and a magnetic field generator configured to generate a magnetic field having a magnetization in one direction parallel to an orthogonal direction and applied to at least one yoke, the magnetic sensor and the magnetic field generator configured such that the strength of the magnetic field changes with the change in position of the lens. Effect of the Invention

[0011] In the present invention, the soft magnetic structure includes at least one yoke and at least one additional magnetic body arranged so as to be shifted in a direction perpendicular to the at least one yoke, and thus, according to the present invention, it is possible to realize a magnetic sensor capable of suppressing a change in the output characteristics of the magnetic sensor caused by the at least one yoke, and a position detection device and a lens module each including the magnetic sensor. [Brief description of the drawings]

[0012] [Figure 1] 1 is a plan view showing a magnetic sensor according to a first embodiment of the present invention. [Diagram 2] 1 is a circuit diagram showing a circuit configuration of a magnetic sensor according to a first embodiment of the present invention. [Diagram 3] 3 is a cross-sectional view showing a part of a cross section taken along line 3-3 in FIG. 1. [Figure 4] 4 is a cross-sectional view showing a part of a cross section taken along line 4-4 in FIG. [Diagram 5] 1 is a side view showing a portion of a magnetic sensor according to a first embodiment of the present invention. [Figure 6]FIG. 2 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in the first embodiment of the present invention. [Figure 7] 1 is a perspective view showing a part of a wiring portion and a magnetoresistive effect element according to a first embodiment of the present invention. [Figure 8] 1 is a perspective view showing a magnetoresistive effect element according to a first embodiment of the present invention. [Figure 9] FIG. 1 is a front view showing a magnetic sensor and a magnetic field generator according to a first embodiment of the present invention. [Figure 10] 1 is a perspective view showing a lens module according to a first embodiment of the present invention. [Figure 11] FIG. 2 is an explanatory diagram illustrating the inside of the lens module according to the first embodiment of the present invention. [Figure 12] 1 is a perspective view showing a position detection device and a drive device according to a first embodiment of the present invention. [Figure 13] FIG. 2 is a perspective view showing a plurality of coils of a driving device according to the first embodiment of the present invention. [Figure 14] FIG. 11 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in a second embodiment of the present invention. [Figure 15] FIG. 11 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in a third embodiment of the present invention. [Figure 16] FIG. 13 is a plan view showing a magnetic sensor according to a fourth embodiment of the present invention. [Figure 17] FIG. 11 is a side view showing a soft magnetic structure according to a fourth embodiment of the present invention. [Figure 18] FIG. 13 is a side view showing a first modified example of the soft magnetic structure according to the fourth embodiment of the present invention. [Figure 19] FIG. 13 is a side view showing a second modified example of the soft magnetic structure according to the fourth embodiment of the present invention. [Figure 20] FIG. 13 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in a fifth embodiment of the present invention. [Figure 21] FIG. 13 is a side view showing a soft magnetic structure according to a sixth embodiment of the present invention. [Figure 22] FIG. 13 is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in a sixth embodiment of the present invention. [Figure 23] FIG. 13 is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in a seventh embodiment of the present invention. [Figure 24] FIG. 13 is a side view showing a soft magnetic structure according to an eighth embodiment of the present invention. [Diagram 25] FIG. 13 is a side view showing a soft magnetic structure according to a ninth embodiment of the present invention. [Figure 26] FIG. 23 is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in a tenth embodiment of the present invention. [Figure 27] FIG. 26 is a side view showing a soft magnetic structure according to an eleventh embodiment of the present invention. [Figure 28] FIG. 26 is a side view showing a soft magnetic structure according to a twelfth embodiment of the present invention. [Figure 29] FIG. 23 is a side view showing a soft magnetic structure according to a thirteenth embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] [First embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. First, a schematic configuration of a magnetic sensor according to a first embodiment of the present invention will be described with reference to Fig. 1 and Fig. 2. Fig. 1 is a plan view showing a magnetic sensor 1 according to the present embodiment. Fig. 2 is a circuit diagram showing a circuit configuration of the magnetic sensor 1 according to the present embodiment.

[0014] The magnetic sensor 1 according to this embodiment includes a power supply terminal 11, a ground terminal 12, a first output terminal 13, a second output terminal 14, a first resistor portion R1, a second resistor portion R2, a third resistor portion R3, and a fourth resistor portion R4. Each of the first to fourth resistor portions R1 to R4 includes a plurality of magnetic detection elements.

[0015] As shown in FIG. 2, the first resistor section R1 is provided between the power supply terminal 11 and the first output terminal 13 in the circuit configuration. The second resistor section R2 is provided between the ground terminal 12 and the first output terminal 13 in the circuit configuration. The third resistor section R3 is provided between the ground terminal 12 and the second output terminal 14 in the circuit configuration. The fourth resistor section R4 is provided between the power supply terminal 11 and the second output terminal 14 in the circuit configuration. In this application, the expression "in the circuit configuration" is used to indicate the arrangement on the circuit diagram, not the arrangement in the physical configuration.

[0016] A voltage or current of a predetermined magnitude is applied to the power supply terminal 11. The ground terminal 12 is connected to the ground.

[0017] The magnetic sensor 1 further includes a soft magnetic structure 30 made of a soft magnetic material, a substrate 10, and an insulating layer (not shown). The power supply terminal 11, the ground terminal 12, the first and second output terminals 13, 14, the first to fourth resistors R1 to R4, and the soft magnetic structure 30 are provided on the substrate 10. The first to fourth resistors R1 to R4 and at least a portion of the soft magnetic structure 30 are embedded in an insulating layer (not shown) formed on the substrate 10.

[0018] The soft magnetic structure 30 includes at least one yoke, at least one additional magnetic body, and at least one shield. The at least one yoke has a shape that is long in one direction. Here, the longitudinal direction of the at least one yoke is simply referred to as the longitudinal direction, and the lateral direction of the at least one yoke is simply referred to as the lateral direction. The at least one additional magnetic body is arranged so as to be aligned with the at least one yoke in the longitudinal direction. Also, the at least one additional magnetic body is arranged so as to be shifted relative to the at least one yoke in an orthogonal direction perpendicular to the longitudinal direction. Here, "displaced" includes a case where the entire at least one additional magnetic body is shifted relative to the at least one yoke and a case where a part of the at least one additional magnetic body is shifted relative to the at least one yoke.

[0019] The at least one shield is arranged to be offset from the at least one yoke in a direction perpendicular to the short side and the long side. As will be described later, in this embodiment, the at least one shield is also arranged to be offset from the at least one additional magnetic body in a direction perpendicular to the short side and the long side.

[0020] Each of the multiple magnetic detection elements is adjacent to at least one yoke in the short side direction. The at least one yoke is configured to receive a magnetic field to be detected by the magnetic sensor 1 and generate a magnetic field to be applied to each of the multiple magnetic detection elements. The magnetic field to be detected includes a component perpendicular to the surface of the substrate 10. The magnetic field generated from the at least one yoke includes a component parallel to the surface of the substrate 10. Each of the multiple magnetic detection elements is configured to be sensitive to a magnetic field in a direction parallel to the surface of the substrate 10 so as to detect the magnetic field generated from the at least one yoke.

[0021] In particular, in this embodiment, the magnetic sensor 1 includes, as a plurality of magnetic detection elements, a plurality of magnetoresistance effect elements (hereinafter, referred to as MR elements) 20. The magnetic sensor 1 further includes a wiring portion 40 that electrically connects the plurality of MR elements 20.

[0022] Here, the X direction, Y direction, and Z direction are defined as shown in FIG. 1. The X direction, Y direction, and Z direction are perpendicular to each other. The direction opposite to the X direction is defined as the -X direction, the direction opposite to the Y direction is defined as the -Y direction, and the direction opposite to the Z direction is defined as the -Z direction. In this embodiment, in particular, a direction perpendicular to the surface of the substrate 10 is defined as the Z direction.

[0023] In the following description, a position at the end of the Z direction relative to a reference position is referred to as "upper", and a position at the opposite side of the reference position to "upper" is referred to as "lower". In addition, with respect to the components of the magnetic sensor 1, a surface at the end in the Z direction is referred to as "upper surface", and a surface at the end in the -Z direction is referred to as "lower surface". The power supply terminal 11, the ground terminal 12, the first and second output terminals 13, 14, the first to fourth resistors R1 to R4, and the soft magnetic structure 30 may be provided above the upper surface of the substrate 10, for example. In addition, the expression "when viewed from the Z direction" means that the object is viewed from a position away in the Z direction.

[0024] Here, the region for arranging the multiple MR elements 20 is referred to as the element arrangement region. The element arrangement region is a planar region defined so as to overlap with the substrate 10 when viewed from the Z direction. In particular, in this embodiment, the element arrangement region includes two regions A1 and A2. Region A2 is arranged ahead of region A1 in the -X direction. Each of the multiple MR elements 20 is arranged so as to be located within region A1 or region A2 when viewed from the Z direction. In the following description, the positional relationship between the multiple components of the magnetic sensor 1 and regions A1 and A2 refers to the positional relationship when viewed from the Z direction.

[0025] In this embodiment, the power supply terminal 11 and the first output terminal 13 are arranged to sandwich an area A1. The ground terminal 12 and the second output terminal 14 are arranged to sandwich an area A2. Of the multiple MR elements 20, the multiple elements constituting the first and fourth resistance parts R1, R4 are arranged in the area A1. Of the multiple MR elements 20, the multiple elements constituting the second and third resistance parts R2, R3 are arranged in the area A2.

[0026] Next, the arrangement of the multiple MR elements 20 and the configuration of the soft magnetic structure 30 will be described in detail with reference to Fig. 1 and Fig. 3 to Fig. 6. Fig. 3 is a cross-sectional view showing a part of a cross section at a position indicated by a line 3-3 in Fig. 1. Fig. 4 is a cross-sectional view showing a part of a cross section at a position indicated by a line 4-4 in Fig. 1. Fig. 5 is a side view showing a part of the magnetic sensor 1 as seen from the -Y direction in Fig. 1. Fig. 6 is a perspective view showing multiple yokes and multiple additional magnetic bodies.

[0027] In this embodiment, the soft magnetic structure 30 includes a plurality of yokes 31. Each of the plurality of yokes 31 has a rectangular parallelepiped shape extending in a direction parallel to the X direction. In particular, in this embodiment, each of the plurality of yokes 31 extends across the regions A1 and A2. The plurality of yokes 31 are arranged in the Y direction. The direction parallel to the X direction corresponds to the "longitudinal direction of at least one yoke." The direction parallel to the Y direction corresponds to the "short-side direction of at least one yoke."

[0028] The multiple MR elements 20 are disposed ahead of the multiple yokes 31 in the -Z direction. Each of the multiple MR elements 20 is adjacent to a corresponding one of the yokes 31 in a direction parallel to the Y direction. The positional relationship between the multiple MR elements 20 and the multiple yokes 31 is not limited to the examples shown in Figures 3 to 5. For example, the multiple MR elements 20 may be disposed ahead of the multiple yokes 31 in the Z direction.

[0029] Each of the multiple yokes 31 has a first end face 31a located at the end in the -Y direction and a second end face 31b located at the end in the Y direction. Each of the multiple MR elements 20 is disposed near the first end face 31a or near the second end face 31b of the corresponding one of the yokes 31 at a predetermined interval from the first end face 31a or the second end face 31b.

[0030] Here, among the multiple MR elements 20, the multiple elements constituting the first resistor section R1 are each represented by the reference symbol 20A, and the multiple elements constituting the fourth resistor section R4 are each represented by the reference symbol 20D. The multiple elements 20A and the multiple elements 20D may be connected in series. As shown in FIG. 1 and FIG. 3, the multiple elements 20A are arranged in multiples along the second end face 31b of each of the multiple yokes 31 in the region A1. Also, as shown in FIG. 1 and FIG. 3, the multiple elements 20D are arranged in multiples along the first end face 31a of each of the multiple yokes 31 in the region A1.

[0031] Among the multiple MR elements 20, the multiple elements constituting the second resistor section R2 are each denoted by the reference symbol 20B, and the multiple elements constituting the third resistor section R3 are each denoted by the reference symbol 20C. The multiple elements 20B and the multiple elements 20C may be connected in series. As shown in FIG. 1 and FIG. 4, the multiple elements 20B are arranged in groups along the second end face 31b of each of the multiple yokes 31 in the region A2. As shown in FIG. 1 and FIG. 4, the multiple elements 20C are arranged in groups along the first end face 31a of each of the multiple yokes 31 in the region A2.

[0032] Each of the multiple yokes 31 is configured to receive an input magnetic field including an input magnetic field component parallel to the Z direction and generate an output magnetic field. The output magnetic field includes an output magnetic field component parallel to the Y direction and changes according to the input magnetic field component. In this embodiment, this output magnetic field corresponds to the "magnetic field generated from at least one yoke" in the present invention. Each of the multiple MR elements 20 is configured so that the resistance value changes according to the direction and strength of the output magnetic field component.

[0033] In this application, the "input magnetic field component" is the magnetic field component at a position away from the yoke 31. If it is assumed that the yoke 31 does not exist, the "input magnetic field component" is substantially the same as the magnetic field component in the vicinity of the position for placing the yoke 31. Also, in this application, the "output magnetic field component" is the magnetic field component in the vicinity of the yoke 31 and at the location where the MR element 20 is located. The "output magnetic field component" is changed by the yoke 31 from the magnetic field component (input magnetic field component) that would exist if it were assumed that the yoke 31 did not exist.

[0034] The soft magnetic structure 30 further includes a plurality of first additional magnetic bodies 32A and a plurality of second additional magnetic bodies 32B. As shown in Fig. 5 and Fig. 6, each of the plurality of first additional magnetic bodies 32A and each of the plurality of second additional magnetic bodies 32B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction. Note that the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B are omitted in Fig. 1.

[0035] In particular, in this embodiment, each of the multiple first additional magnetic bodies 32A is connected to an end in the X direction of a corresponding one of the yokes 31. Also, each of the multiple second additional magnetic bodies 32B is connected to an end in the -X direction of a corresponding one of the yokes 31. One of the first additional magnetic bodies 32A and one of the second additional magnetic bodies 32B are connected to one of the yokes 31. One of the first additional magnetic bodies 32A and one of the second additional magnetic bodies 32B are arranged so as to sandwich one of the yokes 31 between one of the first additional magnetic bodies 32A and one of the second additional magnetic bodies 32B. In FIG. 5 and FIG. 6, the boundary between the yoke 31 and the first additional magnetic body 32A and the boundary between the yoke 31 and the second additional magnetic body 32B are indicated by dotted lines, respectively. The plurality of yokes 31, the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B may be made of the same magnetic material.

[0036] 5, each of the multiple first additional magnetic bodies 32A and each of the multiple second additional magnetic bodies 32B are arranged so as to be shifted in a direction parallel to the Z direction with respect to the corresponding one of the yokes 31. In particular, in this embodiment, each of the multiple first additional magnetic bodies 32A extends so as to be inclined toward the Z direction from the end of the yoke 31 so that a part of it is shifted in the Z direction with respect to the corresponding one of the yokes 31. Each of the multiple second additional magnetic bodies 32B extends so as to be inclined toward the -Z direction from the end of the yoke 31 so that a part of it is shifted in the -Z direction with respect to the corresponding one of the yokes 31.

[0037] 6, the first additional magnetic bodies 32A are arranged in a line parallel to the Y direction. The second additional magnetic bodies 32B are arranged in a line parallel to the Y direction.

[0038] As shown in FIG. 5, each of the multiple MR elements 20 does not have to be adjacent to the first and second additional magnetic bodies 32A and 32B in the direction parallel to the Y direction.

[0039] Here, the number of the plurality of yokes 31 is represented by N (N is an integer equal to or greater than 2). The sum of the number of the plurality of first additional magnetic bodies 32A and the number of the plurality of second additional magnetic bodies 32B is 2N.

[0040] As shown in Figs. 3 to 5, the soft magnetic structure 30 further includes two shields 33 and 34. When viewed from the Z direction, each of the two shields 33 and 34 covers the MR elements 20, the yokes 31, the first additional magnetic bodies 32A, and the second additional magnetic bodies 32B. The shield 33 is disposed ahead of the MR elements 20, the yokes 31, the first additional magnetic bodies 32A, and the second additional magnetic bodies 32B in the Z direction. The shield 34 is disposed ahead of the MR elements 20, the yokes 31, the first additional magnetic bodies 32A, and the second additional magnetic bodies 32B in the -Z direction. The planar shape (shape viewed from the Z direction) of each of the shields 33 and 34 is, for example, rectangular.

[0041] The position of the center of yoke 31 in a direction parallel to the X direction, the position of the center of shield 33 in a direction parallel to the X direction, and the position of the center of shield 34 in a direction parallel to the X direction coincide or nearly coincide in the direction parallel to the X direction.

[0042] Next, the wiring section 40 will be described with reference to Fig. 1 and Fig. 7. Fig. 7 is a perspective view showing a part of the wiring section 40 and the MR element 20. The wiring section 40 includes a plurality of lower electrodes 41 and a plurality of upper electrodes 42 for electrically connecting the plurality of MR elements 20 arranged in a row in a direction parallel to the X direction. The plurality of MR elements 20 are disposed on the plurality of lower electrodes 41. The plurality of upper electrodes 42 are disposed on the plurality of MR elements 20.

[0043] The connection relationship between the multiple MR elements 20 and the lower electrodes 41 and upper electrodes 42 is as follows. Each of the multiple lower electrodes 41 has a shape elongated in the X direction. A gap is formed between two lower electrodes 41 adjacent in the X direction. The MR elements 20 are arranged on the upper surface of the lower electrode 41 near both ends in the X direction. Each of the multiple upper electrodes 42 is arranged on two lower electrodes 41 adjacent in the X direction and electrically connects the two adjacent MR elements 20. As a result, the multiple MR elements 20 arranged in a row are connected in series.

[0044] The wiring section 40 further includes a plurality of connection electrodes. In each of the first to fourth resistance sections R1 to R4, the plurality of connection electrodes electrically connect the plurality of lower electrodes 41 or the plurality of upper electrodes 42 such that a group of the plurality of MR elements 20 arranged in a row is connected in series.

[0045] Next, the configuration of the MR element 20 will be described with reference to FIG. 8. FIG. 8 is a perspective view showing the MR element 20. The MR element 20 is a spin-valve type MR element. The MR element 20 has a magnetization fixed layer 22 having a magnetization whose direction is fixed, a free layer 24 having a magnetization whose direction can be changed according to the direction of an applied magnetic field, and a gap layer 23 disposed between the magnetization fixed layer 22 and the free layer 24. The MR element 20 may be a TMR (tunnel magnetoresistance) element or a GMR (giant magnetoresistance) element. In the TMR element, the gap layer 23 is a tunnel barrier layer. In the GMR element, the gap layer 23 is a non-magnetic conductive layer. In the MR element 20, the resistance value changes according to the angle that the magnetization direction of the free layer 24 makes with respect to the magnetization direction of the magnetization fixed layer 22. When this angle is 0°, the resistance value is the minimum value, and when the angle is 180°, the resistance value is the maximum value. In each MR element 20 , the free layer 24 has shape anisotropy such that the direction of easy magnetization is perpendicular to the direction of magnetization of the magnetization fixed layer 22 .

[0046] The MR element 20 further includes an antiferromagnetic layer 21. The antiferromagnetic layer 21, the magnetization pinned layer 22, the gap layer 23, and the free layer 24 are stacked in this order in the Z direction. The antiferromagnetic layer 21 is made of an antiferromagnetic material, and generates exchange coupling between the magnetization pinned layer 22 and the magnetization direction of the magnetization pinned layer 22 to fix the magnetization direction of the magnetization pinned layer 22. The magnetization pinned layer 22 may be a so-called self-pinned type pinned layer (synthetic ferri pinned layer, SFP layer). The self-pinned type pinned layer has a laminated ferri structure in which a ferromagnetic layer, a nonmagnetic intermediate layer, and a ferromagnetic layer are stacked, and the two ferromagnetic layers are antiferromagnetically coupled. When the magnetization pinned layer 22 is a self-pinned type pinned layer, the antiferromagnetic layer 21 may be omitted.

[0047] The layers 21 to 24 in the MR element 20 may be arranged upside down relative to the arrangement shown in FIG.

[0048] In this embodiment, the magnetization direction of the magnetization fixed layer 22 is parallel to the Y direction. In addition, in this embodiment, the magnetization direction of each of the magnetization fixed layers 22 of the multiple MR elements 20, i.e., the multiple elements 20A, in the first resistance section R1 and the magnetization direction of each of the magnetization fixed layers 22 of the multiple MR elements 20, i.e., the multiple elements 20B, in the second resistance section R2 are opposite to each other. The magnetization direction of each of the magnetization fixed layers 22 of the multiple MR elements 20, i.e., the multiple elements 20C, in the third resistance section R3 is the same as the magnetization direction of the magnetization fixed layer 22 of the multiple elements 20B. The magnetization direction of each of the magnetization fixed layers 22 of the multiple MR elements 20, i.e., the multiple elements 20D, in the fourth resistance section R4 is the same as the magnetization direction of the magnetization fixed layer 22 of the multiple elements 20A.

[0049] In particular, in this embodiment, the magnetization direction of the magnetization fixed layer 22 of each of the multiple elements 20A and the multiple elements 20D is the -Y direction. The magnetization direction of the magnetization fixed layer 22 of each of the multiple elements 20B and the multiple elements 20C is the Y direction.

[0050] In this embodiment, each of the multiple MR elements 20 has a shape that is elongated in a direction parallel to the X direction. As a result, the free layer 24 of each of the multiple MR elements 20 has a shape anisotropy in which the magnetization easy axis direction is parallel to the X direction. Therefore, in a state in which no magnetic field is applied, the magnetization direction of the free layer 24 is parallel to the X direction. When an output magnetic field component is present, the magnetization direction of the free layer 24 changes depending on the direction and strength of the output magnetic field component. Therefore, the angle that the magnetization direction of the free layer 24 makes with the magnetization direction of the magnetization fixed layer 22 changes depending on the direction and strength of the output magnetic field component received by each of the multiple MR elements 20. Therefore, the resistance value of each of the multiple MR elements 20 corresponds to the output magnetic field component.

[0051] In this embodiment, the direction of the output magnetic field component received by the multiple elements 20B is the same as the direction of the output magnetic field component received by the multiple elements 20A. On the other hand, the direction of the output magnetic field component received by the multiple elements 20C and the direction of the output magnetic field component received by the multiple elements 20D are opposite to the direction of the output magnetic field component received by the multiple elements 20A.

[0052] Next, the operation of the magnetic sensor 1 according to this embodiment will be described. In this embodiment, the magnetic field to be detected by the magnetic sensor 1 includes one of a Z-direction component and a -Z-direction component, but does not include the other. Here, a case will be described as an example in which the magnetic field to be detected by the magnetic sensor 1 includes a Z-direction component but does not include a -Z-direction component. In this case, the direction of the input magnetic field component of the input magnetic field input to each of the multiple yokes 31 is the Z direction.

[0053] In the following, it is assumed that the input magnetic field consists only of the Z-direction input magnetic field component. In a state where there is no input magnetic field component and, as a result, no output magnetic field component, the magnetization direction of each free layer 24 of the multiple MR elements 20 is parallel to the X-direction. In a state where there is a Z-direction input magnetic field component, the direction of the output magnetic field component received by the multiple MR elements 20 constituting the first and second resistance units R1, R2 is the -Y direction, and the direction of the output magnetic field component received by the multiple MR elements 20 constituting the third and fourth resistance units R3, R4 is the Y direction. In this case, the magnetization direction of each free layer 24 of the multiple MR elements 20 constituting the first and second resistance units R1, R2 is inclined from a direction parallel to the X-direction toward the -Y direction, and the magnetization direction of each free layer 24 of the multiple MR elements 20 constituting the third and fourth resistance units R3, R4 is inclined from a direction parallel to the X-direction toward the Y direction. As a result, the resistance value of each of the MR elements 20 constituting the first and third resistor units R1, R3 decreases, and the resistance value of each of the first and third resistor units R1, R3 also decreases, compared to a state in which the output magnetic field component does not exist. Also, the resistance value of each of the MR elements 20 constituting the second and fourth resistor units R2, R4 increases, and the resistance values ​​of the second and fourth resistor units R2, R4 also increase, compared to a state in which the output magnetic field component does not exist.

[0054] The amount of change in the resistance value of the MR element 20 depends on the strength of the output magnetic field component received by the MR element 20. When the strength of the output magnetic field component increases, the resistance value of the MR element 20 changes in a direction in which the amount of increase or decrease increases. When the strength of the output magnetic field component decreases, the resistance value of the MR element 20 changes in a direction in which the amount of increase or decrease decreases. The strength of the output magnetic field component depends on the strength of the input magnetic field component.

[0055] In this way, when the strength of the input magnetic field component changes, the resistance values ​​of the first to fourth resistors R1 to R4 change such that the resistance values ​​of the first and third resistors R1, R3 increase and the resistance values ​​of the second and fourth resistors R2, R4 decrease. This causes a change in the potential difference between the first output terminal 13 and the second output terminal 14 shown in FIG. 2. The magnetic sensor 1 generates a detection signal that depends on the potential difference between the first output terminal 13 and the second output terminal 14. The detection signal has a corresponding relationship with the strength of the input magnetic field component.

[0056] Next, the effect of the magnetic sensor 1 according to the present embodiment will be described. When the magnetic sensor 1 is in use, a magnetic field to be detected is always applied to the magnetic sensor 1. As described above, when the magnetic field to be detected includes a component in the Z direction but does not include a component in the -Z direction, an external magnetic field in the Z direction is applied to the multiple yokes 31, the multiple first additional magnetic bodies 32A, and the multiple second additional magnetic bodies 32B.

[0057] FIG. 5 shows one yoke 31, and one first additional magnetic body 32A and one second additional magnetic body 32B connected to the one yoke 31. Here, attention is paid to the magnetic body consisting of the one yoke 31, the one first additional magnetic body 32A, and the one second additional magnetic body 32B. A part of the first additional magnetic body 32A is shifted in the Z direction with respect to the yoke 31. A part of the second additional magnetic body 32B is shifted in the -Z direction with respect to the yoke 31. When an external magnetic field in the Z direction is applied to this magnetic body, a path is formed through which magnetic flux passes in a direction from the second additional magnetic body 32B through the yoke 31 to the first additional magnetic body 32A, and the magnetic body is magnetized in this direction. The first additional magnetic body 32A is connected to the end of the yoke 31 in the X direction, and the second additional magnetic body 32B is connected to the end of the yoke 31 in the -X direction. Therefore, the yoke 31 is magnetized in the X direction.

[0058] Incidentally, in addition to the magnetic field to be detected, a noise magnetic field parallel to the X direction may be applied to the magnetic sensor 1. The magnetization direction of the free layer 24 of each of the multiple MR elements 20 changes from the direction assumed when only the input magnetic field component exists, depending on the magnetization direction of the yoke 31. When the magnetization direction of the yoke 31 changes due to the noise magnetic field changing, for example, from the X direction to the -X direction, the amount of change in the magnetization direction of the free layer 24 also changes. As a result, the characteristics obtained from the output of the magnetic sensor 1 when the magnetic field to be detected is continuously changed, such as linearity and hysteresis, change.

[0059] In contrast, in this embodiment, as described above, when the magnetic sensor 1 is in use, the magnetic field to be detected is always applied to the magnetic sensor 1. Therefore, in this embodiment, the magnetic field to be detected maintains the state in which the yoke 31 is magnetized in the X direction. As a result, according to this embodiment, it is possible to suppress changes in the characteristics of the magnetic sensor 1 caused by changes in the magnetization direction of the yoke 31.

[0060] Next, a description will be given of the magnetic field to be detected by the magnetic sensor 1. The magnetic field to be detected may be a magnetic field generated by a magnetic field generator such as a magnet. In this case, the magnetic field generator may be a component of the magnetic sensor 1.

[0061] FIG. 9 is a front view showing the magnetic sensor 1 and the magnetic field generator 5. The magnetic field generator 5 is configured to generate a magnetic field applied to a plurality of yokes 31. The magnetic field generator 5 may be a magnet configured to generate a magnetic field having a component in a direction parallel to the Z direction. In the example shown in FIG. 9, the magnetic field generator 5 has a magnetization in the Z direction and is configured to generate a magnetic field having a component in the Z direction. It should be noted that the example shown in FIG. 9 is not limited to the example shown in FIG. 9, and the magnetic field generator 5 may be configured to have magnetization in a plurality of directions other than the Z direction in addition to or instead of the magnetization in the Z direction. Also, in the example shown in FIG. 9, the magnetic sensor 1 is disposed ahead of the magnetic field generator 5 in the -Z direction. In this case, the magnetic field to be detected includes a component in the Z direction but does not include a component in the -Z direction.

[0062] When the relative position between the magnetic sensor 1 and the magnetic field generator 5 changes, the strength of the magnetic field applied to the multiple yokes 31, i.e., the strength of the input magnetic field component, changes. As described above, the detection signal of the magnetic sensor 1 has a corresponding relationship with the strength of the input magnetic field component. Therefore, the detection signal of the magnetic sensor 1 has a corresponding relationship with the relative position between the magnetic sensor 1 and the magnetic field generator 5. The relative position between the magnetic sensor 1 and the magnetic field generator 5 changes, for example, in a direction parallel to the Z direction.

[0063] Next, a position detection device 50 according to this embodiment will be briefly described with reference to Fig. 9. The position detection device 50 according to this embodiment includes the magnetic sensor 1 according to this embodiment and a magnetic field generator 5. The magnetic sensor 1 and the magnetic field generator 5 are configured so that the relative positions of the magnetic sensor 1 and the magnetic field generator 5 change in conjunction with the position of an object whose position can be changed. As described above, the detection signal of the magnetic sensor 1 has a corresponding relationship with the relative positions of the magnetic sensor 1 and the magnetic field generator 5. The position detection device 50 detects the position of the object by measuring the detection signal of the magnetic sensor 1.

[0064] Next, the lens module 100 according to the present embodiment will be described with reference to Figs. 10 and 11. Fig. 10 is a perspective view showing the lens module 100. Fig. 11 is an explanatory diagram showing the inside of the lens module 100. In Fig. 11, each part of the lens module 100 is drawn with different dimensions and arrangement from the corresponding parts in Fig. 10 for ease of understanding. The lens module 100 according to the present embodiment constitutes, for example, a part of a smartphone camera equipped with an optical image stabilization mechanism and an autofocus mechanism, and is used in combination with an image sensor 110 using a CMOS or the like.

[0065] The lens module 100 according to the present embodiment includes a position detection device 50 according to the present embodiment, a driving device 103, a lens 105, a housing 106, and a substrate 107. The position detection device 50 according to the present embodiment is used to detect the position of the lens 105 when performing automatic focusing. The driving device 103 moves the lens 105. The housing 106 protects the position detection device 50 and the driving device 103. The substrate 107 has an upper surface 107a. Note that the substrate 107 is omitted in FIG. 10, and the housing 106 is omitted in FIG. 11.

[0066] Here, the U direction and the V direction are defined as shown in FIG. 10 and FIG. 11. The U direction is a direction rotated by −45° from the X direction toward the −Y direction. The V direction is a direction rotated by 45° from the X direction toward the Y direction. The U direction and the V direction are each perpendicular to the Z direction. In the lens module 100, a direction perpendicular to the upper surface 107a of the substrate 107 (a direction toward the upper side in FIG. 11) is defined as the Z direction. Both the U direction and the V direction are parallel to the upper surface 107a of the substrate 107. Moreover, the direction opposite to the U direction is defined as the −U direction, and the direction opposite to the V direction is defined as the −V direction.

[0067] Lens 105 is disposed above upper surface 107a of substrate 107 in such an orientation that the optical axis direction of lens 105 coincides with a direction parallel to the Z direction. Substrate 107 also has an opening (not shown) that passes light that has passed through lens 105. As shown in FIG. 11 , lens module 100 is aligned with image sensor 110 so that light that has passed through lens 105 and the opening (not shown) is incident on image sensor 110.

[0068] Next, the position detector 50 and the driving device 103 according to this embodiment will be described in detail with reference to Fig. 11 to Fig. 13. Fig. 12 is a perspective view showing the position detector 50 and the driving device 103. Fig. 13 is a perspective view showing a plurality of coils of the driving device 103.

[0069] The position detection device 50 includes a first holding member 114, a second holding member 115, a plurality of first wires 116, and a plurality of second wires 117. The second holding member 115 holds the lens 105. Although not shown, the second holding member 115 has, for example, a cylindrical shape configured so that the lens 105 can be attached therein.

[0070] The second holding member 115 is provided so as to be positionably changeable in one direction relative to the first holding member 114, specifically, in a direction parallel to the optical axis direction of the lens 105, i.e., the Z direction. In this embodiment, the first holding member 114 has a box-like shape configured so as to be able to accommodate the lens 105 and the second holding member 115 therein. A plurality of second wires 117 connect the first holding member 114 and the second holding member 115, and support the second holding member 115 so that the second holding member 115 can move in a direction parallel to the Z direction relative to the first holding member 114.

[0071] First holding member 114 is provided above upper surface 107a of substrate 107 so that its position can be changed in directions parallel to the U direction and the V direction with respect to substrate 107. A plurality of first wires 116 connect substrate 107 and first holding member 114, and support first holding member 114 so that first holding member 114 can move in directions parallel to the U direction and the V direction with respect to substrate 107. When the relative position of first holding member 114 with respect to substrate 107 changes, the relative position of second holding member 115 with respect to substrate 107 also changes.

[0072] The driving device 103 includes magnets 131A, 131B, 132A, 132B, 133A, 133B, 134A, and 134B, and coils 141, 142, 143, 144, 145, and 146. The magnet 131A is disposed ahead of the lens 105 in the -V direction. The magnet 132A is disposed ahead of the lens 105 in the V direction. The magnet 133A is disposed ahead of the lens 105 in the -U direction. The magnet 134A is disposed ahead of the lens 105 in the U direction. The magnets 131B, 132B, 133B, and 134B are disposed above the magnets 131A, 132A, 133A, and 134A, respectively. Further, the magnets 131A, 131B, 132A, 132B, 133A, 133B, 134A, and 134B are fixed to the first holding member 114.

[0073] As shown in FIG. 12, magnets 131A, 131B, 132A, and 132B each have a rectangular parallelepiped shape elongated in the U direction. Magnets 133A, 133B, 134A, and 134B each have a rectangular parallelepiped shape elongated in the V direction. The magnetization direction of magnets 131A and 132B is the V direction. The magnetization direction of magnets 131B and 132A is the -V direction. The magnetization direction of magnets 133A and 134B is the U direction. The magnetization direction of magnets 133B and 134A is the -U direction.

[0074] The coil 141 is disposed between the magnet 131A and the substrate 107. The coil 142 is disposed between the magnet 132A and the substrate 107. The coil 143 is disposed between the magnet 133A and the substrate 107. The coil 144 is disposed between the magnet 134A and the substrate 107. The coil 145 is disposed between the magnets 131A and 131B and the lens 105. The coil 146 is disposed between the magnets 132A and 132B and the lens 105. The coils 141, 142, 143, and 144 are fixed to the substrate 107. The coils 145 and 146 are fixed to the second holding member 115.

[0075] A magnetic field generated mainly from magnet 131A is applied to coil 141. A magnetic field generated mainly from magnet 132A is applied to coil 142. A magnetic field generated mainly from magnet 133A is applied to coil 143. A magnetic field generated mainly from magnet 134A is applied to coil 144.

[0076] 11, coil 145 includes a first conductor portion 145A extending in the U direction along magnet 131A, a second conductor portion 145B extending in the U direction along magnet 131B, and two third conductor portions connecting first and second conductor portions 145A, 145B. Also, as shown in FIG 11, coil 146 includes a first conductor portion 146A extending in the U direction along magnet 132A, a second conductor portion 146B extending in the U direction along magnet 132B, and two third conductor portions connecting first and second conductor portions 146A, 146B.

[0077] The first conductor portion 145A of the coil 145 is mainly applied with the V-direction component of the magnetic field generated from the magnet 131A. The second conductor portion 145B of the coil 145 is mainly applied with the -V-direction component of the magnetic field generated from the magnet 131B. The first conductor portion 146A of the coil 146 is mainly applied with the -V-direction component of the magnetic field generated from the magnet 132A. The second conductor portion 146B of the coil 146 is mainly applied with the V-direction component of the magnetic field generated from the magnet 132B.

[0078] As described above, the position detection device 50 includes the magnetic sensor 1 and the magnetic field generator 5. The magnetic field generator 5 may be a magnet having a rectangular parallelepiped shape. As shown in FIG. 12, the magnet 131A has an end face 131A1 located at the end of the magnet 131A in the U direction. The magnet 134A has an end face 134A1 located at the end of the magnet 134A in the -V direction. The magnetic field generator 5 is fixed to the second holding member 115, for example, in a space near the end face 131A1 of the magnet 131A and the end face 134A1 of the magnet 134A.

[0079] The magnetic sensor 1 is fixed to the substrate 107, for example, near an end face 131A1 of the magnet 131A and an end face 134A1 of the magnet 134A. The distance from the magnet 131A to the magnetic sensor 1 is equal to the distance from the magnet 134A to the magnetic sensor 1. The magnetic field generator 5 is disposed above the magnetic sensor 1.

[0080] Driving device 103 further includes a first magnetic sensor (not shown) fixed to substrate 107 on the inner side of one of coils 141 and 142, and a second magnetic sensor (not shown) fixed to substrate 107 on the inner side of one of coils 143 and 144. Here, it is assumed that the first magnetic sensor and the second magnetic sensor are disposed on the inner side of coil 141 and coil 144, respectively. As will be described later, the first magnetic sensor and the second magnetic sensor are used when changing the position of lens 105 to reduce the effects of camera shake.

[0081] The first magnetic sensor detects the magnetic field generated from magnet 131A and generates a signal corresponding to the position of magnet 131A. The second magnetic sensor detects the magnetic field generated from magnet 134A and generates a signal corresponding to the position of magnet 134A. The first magnetic sensor and the second magnetic sensor are each composed of an element that detects a magnetic field, such as a Hall element.

[0082] Next, the operation of the driving device 103 will be described with reference to Fig. 11 to Fig. 13. First, the optical image stabilization mechanism and the autofocus mechanism will be briefly described. The driving device 103 constitutes a part of the optical image stabilization mechanism and the autofocus mechanism. The driving device 103, the optical image stabilization mechanism, and the autofocus mechanism are controlled by a control unit (not shown) outside the lens module 100.

[0083] The optical image stabilization mechanism is configured to detect camera shake, for example, by a gyro sensor or the like external to the lens module 100. When the optical image stabilization mechanism detects camera shake, a control unit (not shown) controls the driving device 103 so that the relative position of the lens 105 with respect to the substrate 107 changes according to the type of camera shake. This makes it possible to stabilize the absolute position of the lens 105 and reduce the effects of camera shake. Note that the relative position of the lens 105 with respect to the substrate 107 changes in a direction parallel to the U direction or a direction parallel to the V direction according to the type of camera shake.

[0084] The autofocus mechanism is configured to detect a state in which a subject is in focus by, for example, an image sensor 110 or an autofocus sensor. A control unit (not shown) changes the relative position of lens 105 with respect to substrate 107 in a direction parallel to the Z direction by drive device 103 so that the subject is in focus. This allows automatic focusing on the subject.

[0085] Next, the operation of the driving device 103 related to the optical image stabilization mechanism will be described. When a current is applied to the coils 141 and 142 by a control unit (not shown), the first holding member 114 to which the magnets 131A and 132A are fixed moves in a direction parallel to the V direction due to the interaction between the magnetic fields generated by the magnets 131A and 132A and the magnetic fields generated by the coils 141 and 142. As a result, the lens 105 also moves in a direction parallel to the V direction. When a current is applied to the coils 143 and 144 by a control unit (not shown), the first holding member 114 to which the magnets 133A and 134A are fixed moves in a direction parallel to the U direction due to the interaction between the magnetic fields generated by the magnets 133A and 134A and the magnetic fields generated by the coils 143 and 144. As a result, the lens 105 also moves in a direction parallel to the U direction. A control unit (not shown) detects the position of the lens 105 by measuring signals corresponding to the positions of the magnets 131A, 134A that are generated by a first magnetic sensor (not shown) and a second magnetic sensor (not shown).

[0086] Next, the operation of the driving device 103 related to the autofocus mechanism will be described. When the position of the lens 105 relative to the substrate 107 is moved in the Z direction, a control unit (not shown) passes a current through the coil 145 so that the current flows in the U direction through the first conductor 145A and in the -U direction through the second conductor 145B, and passes a current through the coil 146 so that the current flows in the -U direction through the first conductor 146A and in the U direction through the second conductor 146B. These currents and the magnetic fields generated by the magnets 131A, 131B, 132A, and 132B cause a Lorentz force in the Z direction to act on the first and second conductors 145A and 145B of the coil 145 and the first and second conductors 146A and 146B of the coil 146. As a result, the second holding member 115 to which the coils 145 and 146 are fixed moves in the Z direction. As a result, the lens 105 also moves in the Z direction.

[0087] When the relative position of lens 105 with respect to substrate 107 is moved in the -Z direction, a control unit (not shown) applies a current to coils 145 and 146 in the opposite direction to that when moving in the Z direction.

[0088] Next, a description will be given of the operation of the position detection device 50 provided in the lens module 100. The position detection device 50 is used to detect the position of an object whose position can change. In the lens module 100, the object is the lens 105 whose position changes in a linear direction.

[0089] When the relative position of the lens 105 with respect to the substrate 107 changes, the relative position of the second holding member 115 with respect to the substrate 107 and the first holding member 114 also changes. As described above, the second holding member 115 holds the magnetic field generator 5. Therefore, when the relative position of the lens 105 changes as described above, the relative position of the magnetic field generator 5 with respect to the magnetic sensor 1 provided on the substrate 107 changes. As described above, the detection signal of the magnetic sensor 1 has a corresponding relationship with the relative positions of the magnetic sensor 1 and the magnetic field generator 5. The position detection device 50 detects the position of the lens 105 by measuring the detection signal of the magnetic sensor 1.

[0090] [Second embodiment] Next, a second embodiment of the present invention will be described with reference to Fig. 14. Fig. 14 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0091] The following describes the differences between the soft magnetic structure 30 of this embodiment and the first embodiment. In this embodiment, each of the multiple first additional magnetic bodies 32A and the multiple second additional magnetic bodies 32B is connected to the end in the X direction or the end in the -X direction of a corresponding one of the yokes 31. Some of the multiple first additional magnetic bodies 32A connected to the end in the X direction of the corresponding yokes 31 and some of the multiple second additional magnetic bodies 32B connected to the end in the X direction of the corresponding yokes 31 are arranged so that the first additional magnetic bodies 32A and the second additional magnetic bodies 32B are alternately arranged in a direction parallel to the Y direction. Similarly, some of the multiple first additional magnetic bodies 32A connected to the end in the -X direction of the corresponding yokes 31 and some of the multiple second additional magnetic bodies 32B connected to the end in the -X direction of the corresponding yokes 31 are arranged so that the first additional magnetic bodies 32A and the second additional magnetic bodies 32B are alternately arranged in a direction parallel to the Y direction. That is, the multiple first additional magnetic bodies 32A and the multiple second additional magnetic bodies 32B are arranged so that the first additional magnetic bodies 32A and the second additional magnetic bodies 32B are adjacent to each other in a direction parallel to the Y direction.

[0092] Here, a structure consisting of the yoke 31, the first additional magnetic body 32A connected to the end of the yoke 31 in the X direction, and the second additional magnetic body 32B connected to the end of the yoke 31 in the -X direction is referred to as a first magnetic body. Also, a structure consisting of the yoke 31, the first additional magnetic body 32A connected to the end of the yoke 31 in the -X direction, and the second additional magnetic body 32B connected to the end of the yoke 31 in the X direction is referred to as a second magnetic body. The multiple first magnetic bodies and the multiple second magnetic bodies are arranged in a direction parallel to the Y direction such that the first magnetic bodies and the second magnetic bodies are alternately arranged.

[0093] In this embodiment, the yoke 31 of the first magnetic body is magnetized in the X direction by an external magnetic field in the Z direction, similar to the yoke 31 in the first embodiment. The yoke 31 of the second magnetic body is magnetized in the -X direction, opposite to the yoke 31 of the first magnetic body. Therefore, in this embodiment, the multiple yokes 31 are arranged so that the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are alternately arranged in a direction parallel to the Y direction. That is, in this embodiment, the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are adjacent to each other in a direction parallel to the Y direction. These two yokes 31 are magnetically coupled. As a result, according to this embodiment, the magnetization of the yoke 31 can be stabilized. As a result, according to this embodiment, the change in the characteristics of the magnetic sensor 1 caused by the change in the direction of magnetization of the yoke 31 can be suppressed.

[0094] Other configurations, operations, and effects of the present embodiment are similar to those of the first embodiment.

[0095] [Third embodiment] Next, a third embodiment of the present invention will be described with reference to Fig. 15. Fig. 15 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0096] The following describes the differences between the soft magnetic structure 30 of the present embodiment and the first embodiment. In the present embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 35A and a plurality of second additional magnetic bodies 35B, instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. As shown in FIG. 15, each of the plurality of first additional magnetic bodies 35A and each of the plurality of second additional magnetic bodies 35B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction.

[0097] In this embodiment, each of the multiple first additional magnetic bodies 35A and the multiple second additional magnetic bodies 35B is connected to an end in the X direction or an end in the -X direction of a corresponding one of the yokes 31. One first additional magnetic body 35A and one second additional magnetic body 35B are connected to one of the yokes 31. In FIG. 15, the boundary between the yoke 31 and the first additional magnetic body 35A and the boundary between the yoke 31 and the second additional magnetic body 35B are indicated by dotted lines.

[0098] Some of the first additional magnetic bodies 35A connected to the X-direction ends of the corresponding yokes 31 and some of the second additional magnetic bodies 35B connected to the X-direction ends of the corresponding yokes 31 are arranged so that the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are alternately arranged in a direction parallel to the Y direction. Similarly, some of the first additional magnetic bodies 35A connected to the -X-direction ends of the corresponding yokes 31 and some of the second additional magnetic bodies 35B connected to the -X-direction ends of the corresponding yokes 31 are arranged so that the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are alternately arranged in a direction parallel to the Y direction. That is, the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are arranged so that the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are adjacent to each other in a direction parallel to the Y direction.

[0099] 15, each of the multiple first additional magnetic bodies 35A and each of the multiple second additional magnetic bodies 35B are arranged so as to be shifted in a direction parallel to the Y direction with respect to the corresponding one of the yokes 31. In particular, in this embodiment, each of the multiple first additional magnetic bodies 35A extends so as to bend from an end of the yoke 31 toward the -Y direction with respect to the corresponding one of the yokes 31 so as to be partly shifted in the -Y direction. Each of the multiple second additional magnetic bodies 35B extends so as to bend from an end of the yoke 31 toward the Y direction with respect to the corresponding one of the yokes 31 so as to be partly shifted in the Y direction.

[0100] Here, a structure consisting of the yoke 31, the first additional magnetic body 35A connected to the end of the yoke 31 in the X direction, and the second additional magnetic body 35B connected to the end of the yoke 31 in the -X direction is referred to as a first magnetic body. Also, a structure consisting of the yoke 31, the first additional magnetic body 35A connected to the end of the yoke 31 in the -X direction, and the second additional magnetic body 35B connected to the end of the yoke 31 in the X direction is referred to as a second magnetic body. The multiple first magnetic bodies and the multiple second magnetic bodies are arranged in a direction parallel to the Y direction such that the first magnetic bodies and the second magnetic bodies are alternately arranged.

[0101] In this embodiment, in addition to the magnetic field to be detected, an external magnetic field parallel to the Y direction is always applied to the magnetic sensor 1. Hereinafter, a case where an external magnetic field in the Y direction is applied to the magnetic sensor 1 will be described as an example. In this case, the external magnetic field in the Y direction is applied to the multiple yokes 31, the multiple first additional magnetic bodies 35A, and the multiple second additional magnetic bodies 35B.

[0102] A part of the first additional magnetic body 35A is shifted in the -Y direction with respect to the yoke 31. Also, a part of the second additional magnetic body 35B is shifted in the Y direction with respect to the yoke 31. When an external magnetic field in the Y direction is applied to the first magnetic body and the second magnetic body, a path through which magnetic flux passes in a direction from the first additional magnetic body 35A through the yoke 31 to the second additional magnetic body 35B is formed in each of the first magnetic body and the second magnetic body, and the first magnetic body and the second magnetic body are magnetized in this direction.

[0103] In the first magnetic body, the first additional magnetic body 35A is connected to the end of the yoke 31 in the X direction, and the second additional magnetic body 35B is connected to the end of the yoke 31 in the -X direction. Therefore, the yoke 31 of the first magnetic body is magnetized in the -X direction. In the second magnetic body, the first additional magnetic body 35A is connected to the end of the yoke 31 in the -X direction, and the second additional magnetic body 35B is connected to the end of the yoke 31 in the X direction. Therefore, the yoke 31 of the second magnetic body is magnetized in the X direction.

[0104] In this embodiment, similarly to the second embodiment, the multiple yokes 31 are arranged such that the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are alternately arranged in a direction parallel to the Y direction. As a result, according to this embodiment, the magnetization of the yokes 31 can be stabilized for the same reason as that explained in the second embodiment. As a result, according to this embodiment, the change in the characteristics of the magnetic sensor 1 caused by the change in the direction of magnetization of the yokes 31 can be suppressed.

[0105] Similarly to the multiple first additional magnetic bodies 32A and multiple second additional magnetic bodies 32B in the first embodiment, each of the multiple first additional magnetic bodies 35A may be connected to an end in the X direction of a corresponding one of the yokes 31, and each of the multiple second additional magnetic bodies 35B may be connected to an end in the -X direction of a corresponding one of the yokes 31.

[0106] Other configurations, operations, and effects of the present embodiment are similar to those of the first or second embodiment.

[0107] [Fourth embodiment] Next, a fourth embodiment of the present invention will be described with reference to Fig. 16 and Fig. 17. Fig. 16 is a plan view showing a magnetic sensor according to this embodiment. Fig. 17 is a side view showing a soft magnetic structure in this embodiment as viewed from the -Y direction in Fig. 16.

[0108] The following describes the differences between the soft magnetic structure 30 of the present embodiment and the first embodiment. In the present embodiment, the soft magnetic structure 30 includes a plurality of yokes 36 instead of the plurality of yokes 31 of the first embodiment. Each of the plurality of yokes 36 has a rectangular parallelepiped shape extending in a direction parallel to the X direction. The plurality of yokes 36 are arranged in each of the regions A1 and A2 such that two yokes are arranged in a direction parallel to the X direction and five yokes are arranged in a direction parallel to the Y direction in each of the regions A1 and A2. In the present embodiment, in particular, the plurality of yokes 36 are arranged in each of the regions A1 and A2 such that two yokes are arranged in a direction parallel to the X direction and five yokes are arranged in a direction parallel to the Y direction.

[0109] The positional relationship between the multiple MR elements 20 and the multiple yokes 36 is similar to the positional relationship between the multiple MR elements 20 and the multiple yokes 31 in the first embodiment. Moreover, the positional relationship between the two shields 33, 34 and the multiple yokes 36 is similar to the positional relationship between the two shields 33, 34 and the multiple yokes 31 in the first embodiment, except for the relationship related to the position of the center of the yoke 31 in the direction parallel to the X direction.

[0110] In addition, in this embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 37A and a plurality of second additional magnetic bodies 37B instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. The positional relationship and connection relationship of the plurality of yokes 36, the plurality of first additional magnetic bodies 37A and the plurality of second additional magnetic bodies 37B are similar to the positional relationship and connection relationship of the plurality of yokes 31, the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. Also, the shape of each of the plurality of first additional magnetic bodies 37A is similar to the shape of each of the plurality of first additional magnetic bodies 32A. Also, the shape of each of the plurality of second additional magnetic bodies 37B is similar to the shape of each of the plurality of second additional magnetic bodies 32B. In FIG. 16, the plurality of first additional magnetic bodies 37A and the plurality of second additional magnetic bodies 37B are omitted.

[0111] As shown in FIG. 17, in this embodiment, a first additional magnetic body 37A and a second additional magnetic body 37B are adjacent to each other in a direction parallel to the X direction.

[0112] Other configurations, operations, and effects of the present embodiment are similar to those of the first embodiment.

[0113] [First to third modified examples] Next, first and third modified examples of the soft magnetic structure 30 in the present embodiment will be described. First, the first modified example will be described with reference to Fig. 18. Fig. 18 is a side view showing the first modified example of the soft magnetic structure 30.

[0114] As shown in FIG. 18, in the first modified example, each of the multiple first additional magnetic bodies 37A and the multiple second additional magnetic bodies 37B is connected to a corresponding one of the yokes 36 such that two first additional magnetic bodies 37A are adjacent to each other and two second additional magnetic bodies 37B are adjacent to each other in a direction parallel to the X direction.

[0115] Next, a second modified example will be described with reference to Fig. 19. Fig. 19 is a side view showing the second modified example of the soft magnetic structure 30.

[0116] Here, a structure consisting of one yoke 36 and the first and second additional magnetic bodies 37A, 37B connected to this one yoke 36 is referred to as a specific magnetic body. The soft magnetic structure 30 includes a plurality of specific magnetic bodies. The plurality of specific magnetic bodies are arranged so that a plurality of magnetic bodies are lined up in each of the directions parallel to the X direction and the Y direction.

[0117] The soft magnetic structure 30 also includes a plurality of magnetic body groups each including some of the plurality of specific magnetic bodies. Here, attention is paid to two magnetic body groups adjacent in a direction parallel to the X direction. In the second modified example, the connection relationship between the plurality of yokes 36, the plurality of first additional magnetic bodies 37A, and the plurality of second additional magnetic bodies 37B in one of the two magnetic body groups (hereinafter referred to as the first group) is opposite to the connection relationship between the plurality of yokes 36, the plurality of first additional magnetic bodies 37A, and the plurality of second additional magnetic bodies 37B in the other of the two magnetic body groups (hereinafter referred to as the second group). That is, in the first group, each of the plurality of first additional magnetic bodies 37A is connected to the end in the X direction of the corresponding one of the yokes 36, and each of the plurality of second additional magnetic bodies 37B is connected to the end in the -X direction of the corresponding one of the yokes 36. In the second group, each of the multiple first additional magnetic bodies 37A is connected to the -X-direction end of a corresponding one of the yokes 36, and each of the multiple second additional magnetic bodies 37B is connected to the X-direction end of a corresponding one of the yokes 36.

[0118] Next, the third modified example will be briefly described. In the third modified example, two or more first groups of the second modified example are arranged in a direction parallel to the X direction, and two or more second groups of the second modified example are arranged in a direction parallel to the X direction. In addition, two or more first groups and two or more second groups are arranged so that the first groups and the second groups are arranged alternately in a direction parallel to the X direction.

[0119] [Fifth embodiment] Next, a fifth embodiment of the present invention will be described with reference to Fig. 20. Fig. 20 is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0120] The following describes the differences between the soft magnetic structure 30 of the present embodiment and the first embodiment. In the present embodiment, the soft magnetic structure 30 includes a plurality of yokes 38 instead of the plurality of yokes 31 of the first embodiment. Each of the plurality of yokes 38 has a rectangular parallelepiped shape that intersects with each of the X direction and the Z direction and extends in a direction parallel to a direction perpendicular to the Y direction.

[0121] Moreover, each of the plurality of yokes 38 has a first end located at an end in the X direction and a second end located at an end in the -X direction. In particular, in this embodiment, the plurality of yokes 38 includes a plurality of first specific yokes and a plurality of second specific yokes. Each of the plurality of first specific yokes is inclined with respect to a direction parallel to the X direction so that a portion near the first end is shifted in the Z direction relative to a portion near the second end. Each of the plurality of second specific yokes is inclined with respect to a direction parallel to the X direction so that a portion near the first end is shifted in the -Z direction relative to a portion near the second end. The plurality of first specific yokes and the plurality of second specific yokes are arranged in a direction parallel to the Y direction so that the first specific yokes and the second specific yokes are alternately arranged.

[0122] The positional relationship between the multiple MR elements 20 and the multiple yokes 38 is similar to the positional relationship between the multiple MR elements 20 and the multiple yokes 31 in the first embodiment. In addition, the positional relationship between the two shields 33, 34 and the multiple yokes 38 is similar to the positional relationship between the two shields 33, 34 and the multiple yokes 31 in the first embodiment.

[0123] In the present embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 39A and a plurality of second additional magnetic bodies 39B, instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. The positional relationship and connection relationship of the plurality of yokes 38, the plurality of first additional magnetic bodies 39A and the plurality of second additional magnetic bodies 39B are similar to the positional relationship and connection relationship of the plurality of yokes 31, the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the second embodiment.

[0124] The entire structure consisting of one yoke 38 and the first and second additional magnetic bodies 39A, 39B connected to this one yoke 38 may extend in the extension direction of this one yoke 38. That is, each of the multiple first additional magnetic bodies 39A may extend in the extension direction of the yoke 38 so that a part of it is shifted in the Z direction with respect to the corresponding one yoke 38. Also, each of the multiple second additional magnetic bodies 39B may extend in the extension direction of the yoke 38 so that a part of it is shifted in the -Z direction with respect to the corresponding one yoke 38.

[0125] The plurality of yokes 38 may include only a plurality of first specific yokes, or may include only a plurality of second specific yokes.

[0126] Other configurations, operations, and effects of the present embodiment are similar to those of either the first or second embodiment.

[0127] [Sixth embodiment] Next, a sixth embodiment of the present invention will be described with reference to Fig. 21 and Fig. 22. Fig. 21 is a side view showing a soft magnetic structure in this embodiment. Fig. 22 is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0128] The following describes the differences between the soft magnetic structure 30 of the present embodiment and the first embodiment. In the present embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 61A and a plurality of second additional magnetic bodies 61B instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. Each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B has, for example, a rectangular parallelepiped shape.

[0129] 21 and 22, each of the multiple first additional magnetic bodies 61A and each of the multiple second additional magnetic bodies 61B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction. In this embodiment, each of the multiple first additional magnetic bodies 61A and each of the multiple second additional magnetic bodies 61B are arranged near the end of the corresponding one of the yokes 31 in the X direction or the end in the -X direction.

[0130] Some of the first additional magnetic bodies 61A arranged near the ends of the corresponding yokes 31 in the X direction and some of the second additional magnetic bodies 61B arranged near the ends of the corresponding yokes 31 in the X direction are arranged so that the first additional magnetic bodies 61A and the second additional magnetic bodies 61B are arranged alternately in a direction parallel to the Y direction. Similarly, some of the first additional magnetic bodies 61A arranged near the ends of the corresponding yokes 31 in the -X direction and some of the second additional magnetic bodies 61B arranged near the ends of the corresponding yokes 31 in the -X direction are arranged so that the first additional magnetic bodies 61A and the second additional magnetic bodies 61B are arranged alternately in a direction parallel to the Y direction. That is, one first additional magnetic body 61A and one second additional magnetic body 61B are adjacent to each other in a direction parallel to the Y direction when viewed from the Z direction.

[0131] Also, as shown in FIG. 21 and FIG. 22, each of the multiple first additional magnetic bodies 61A and each of the multiple second additional magnetic bodies 61B are arranged so as to be shifted in a direction parallel to the Z direction with respect to the corresponding one of the yokes 31. In particular, in this embodiment, each of the multiple first additional magnetic bodies 61A is arranged ahead of the corresponding one of the yokes 31 in the Z direction. Each of the multiple second additional magnetic bodies 61B is arranged ahead of the corresponding one of the yokes 31 in the -Z direction. One first additional magnetic body 61A and one second additional magnetic body 61B are arranged so as to sandwich at least a part of one of the yokes 31 between one first additional magnetic body 61A and one second additional magnetic body 61B.

[0132] 21 and 22, each of the first additional magnetic bodies 61A and the second additional magnetic bodies 61B is disposed at a predetermined interval from the corresponding one yoke 31 in a direction parallel to the Z direction. Also, in the example shown in Fig. 21 and 22, each of the first additional magnetic bodies 61A and the second additional magnetic bodies 61B is disposed so that a part of each of them overlaps with the corresponding one yoke 31 when viewed from the Z direction.

[0133] The arrangement and shape of the multiple first additional magnetic bodies 61A and the multiple second additional magnetic bodies 61B are not limited to the examples shown in Figures 21 and 22. For example, each of the multiple first additional magnetic bodies 61A and the multiple second additional magnetic bodies 61B may be arranged so as not to overlap with a corresponding one of the yokes 31 when viewed from the Z direction.

[0134] Also, when the first additional magnetic body 61A is disposed near the X-direction end of the yoke 31 and the second additional magnetic body 61B is disposed near the -X-direction end of the yoke 31, they may be disposed so that the X-direction end of the yoke 31 and the X-direction end of the first additional magnetic body 61A coincide or nearly coincide in the direction parallel to the X-direction, and the -X-direction end of the yoke 31 and the -X-direction end of the second additional magnetic body 61B coincide or nearly coincide in the direction parallel to the X-direction. Alternatively, they may be disposed so that the -X-direction end of the yoke 31 and the X-direction end of the first additional magnetic body 61A coincide or nearly coincide in the direction parallel to the X-direction, and the -X-direction end of the yoke 31 and the X-direction end of the second additional magnetic body 61B coincide or nearly coincide in the direction parallel to the X-direction.

[0135] Furthermore, each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B may be in contact with a corresponding one of the yokes 31.

[0136] 21, the dimensions of each of the first additional magnetic bodies 61A and the second additional magnetic bodies 61B in a direction parallel to the Z direction are the same or approximately the same as the dimensions of each of the yokes 31 in a direction parallel to the Z direction. However, the dimensions of each of the first additional magnetic bodies 61A and the second additional magnetic bodies 61B in a direction parallel to the Z direction may be larger or smaller than the dimensions of each of the yokes 31 in a direction parallel to the Z direction.

[0137] 22, the dimension of each of the multiple first additional magnetic bodies 61A and the multiple second additional magnetic bodies 61B in the direction parallel to the Y direction is larger than the dimension of each of the multiple yokes 31 in the direction parallel to the Y direction. However, the dimension of each of the multiple first additional magnetic bodies 61A and the multiple second additional magnetic bodies 61B in the direction parallel to the Y direction may be the same as the dimension of each of the multiple yokes 31 in the direction parallel to the Y direction, or may be smaller than the dimension of each of the multiple yokes 31 in the direction parallel to the Y direction.

[0138] In addition, the multiple first additional magnetic bodies 61A and the multiple second additional magnetic bodies 61B may be made of the same magnetic material as the multiple yokes 31, or may be made of a different magnetic material than the multiple yokes 31.

[0139] Here, the number of the plurality of yokes 31 is represented by N (N is an integer equal to or greater than 2). The sum of the number of the plurality of first additional magnetic bodies 61A and the number of the plurality of second additional magnetic bodies 61B is 2N.

[0140] In this embodiment, each of the two shields 33 and 34 covers the multiple MR elements 20, the multiple yokes 31, the multiple first additional magnetic bodies 61A, and the multiple second additional magnetic bodies 61B when viewed from the Z direction. The shield 33 is disposed ahead of the multiple MR elements 20, the multiple yokes 31, the multiple first additional magnetic bodies 61A, and the multiple second additional magnetic bodies 61B in the Z direction. The shield 34 is disposed ahead of the multiple MR elements 20, the multiple yokes 31, the multiple first additional magnetic bodies 61A, and the multiple second additional magnetic bodies 61B in the -Z direction.

[0141] The first additional magnetic bodies 61A and the second additional magnetic bodies 61B have the same function as the first additional magnetic bodies 32A and the second additional magnetic bodies 32B described in the first embodiment. That is, the first additional magnetic bodies 61A and the second additional magnetic bodies 61B have the function of magnetizing each of the yokes 31 in the X direction or the −X direction when an external magnetic field in the Z direction exists.

[0142] Similarly to the multiple first additional magnetic bodies 32A and the multiple second additional magnetic bodies 32B in the first embodiment, each of the multiple first additional magnetic bodies 61A may be arranged near the X-direction end of a corresponding one of the yokes 31, and each of the multiple second additional magnetic bodies 61B may be arranged near the -X-direction end of a corresponding one of the yokes 31.

[0143] Other configurations, operations, and effects of the present embodiment are similar to those of the first or second embodiment.

[0144] [Seventh embodiment] Next, a seventh embodiment of the present invention will be described with reference to Fig. 23. Fig. 23 is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0145] The following describes the differences between the soft magnetic structure 30 of this embodiment and the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes a first additional magnetic body 62A and a second additional magnetic body 62B instead of the first additional magnetic bodies 61A and the second additional magnetic bodies 61B of the sixth embodiment. Each of the first additional magnetic body 62A and the second additional magnetic body 62B has a rectangular parallelepiped shape extending in a direction parallel to the Y direction. As shown in FIG. 23, the first additional magnetic body 62A and the second additional magnetic body 62B are arranged in line with the yokes 31 in a direction parallel to the X direction.

[0146] The first additional magnetic body 62A is disposed near the X-direction end of each of the multiple yokes 31. The first additional magnetic body 62A is disposed ahead of the multiple yokes 31 in the Z direction.

[0147] The second additional magnetic body 62B is disposed near the −X direction end of each of the multiple yokes 31. The second additional magnetic body 62B is disposed ahead of the multiple yokes 31 in the −Z direction.

[0148] Other positional relationships between the multiple yokes 31 and the first and second additional magnetic bodies 62A, 62B are similar to the positional relationships between the yokes 31 and the first and second additional magnetic bodies 62A, 62B in the sixth embodiment.

[0149] In the example shown in FIG. 23, the first additional magnetic body 62A is arranged so as to overlap all of the yokes 31. However, the first additional magnetic body 62A may be arranged so as to overlap at least one of the multiple yokes 31. In this case, the soft magnetic structure 30 may further include a third additional magnetic body adjacent to the first additional magnetic body 62A in a direction parallel to the Y direction. The third additional magnetic body is arranged near the end in the X direction of at least one other yoke among the multiple yokes 31. The third additional magnetic body may be arranged ahead of the at least one other yoke in the Z direction or ahead of the at least one other yoke in the -Z direction.

[0150] Similarly, in the example shown in FIG. 23, the second additional magnetic body 62B is arranged so as to overlap all of the yokes 31. However, the second additional magnetic body 62B may be arranged so as to overlap at least one of the multiple yokes 31. In this case, the soft magnetic structure 30 may further include a fourth additional magnetic body adjacent to the second additional magnetic body 62B in a direction parallel to the Y direction. The fourth additional magnetic body is arranged near the end in the -X direction of each of at least one other yoke of the multiple yokes 31. Moreover, the fourth additional magnetic body may be arranged ahead of the at least one other yoke in the -Z direction or ahead of the Z direction.

[0151] Other configurations, operations, and effects of the present embodiment are similar to those of the sixth embodiment.

[0152] [Eighth embodiment] Next, an eighth embodiment of the present invention will be described with reference to Fig. 24. Fig. 24 is a side view showing a soft magnetic structure in this embodiment.

[0153] The following describes the differences between the soft magnetic structure 30 of this embodiment and the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes a plurality of first yokes 31A and a plurality of second yokes 31B instead of a plurality of yokes 31. The plurality of first yokes 31A are arranged in a direction parallel to the Y direction. The plurality of second yokes 31B are arranged in a direction parallel to the Y direction and are disposed ahead of the plurality of first yokes 31A in the -X direction. In this embodiment, the first yokes 31A and the second yokes 31B adjacent to each other in the direction parallel to the X direction are connected to each other. In FIG. 24, the boundary between the first yoke 31A and the second yoke 31B is indicated by a dotted line.

[0154] In addition, in this embodiment, the soft magnetic structure 30 includes at least one additional magnetic body 63 instead of the multiple first additional magnetic bodies 61A and the multiple second additional magnetic bodies 61B in the sixth embodiment. The at least one additional magnetic body 63 is arranged to be aligned with the multiple first yokes 31A and the multiple second yokes 31B in a direction parallel to the X direction. In this embodiment, the at least one additional magnetic body 63 is arranged in the vicinity of the boundary between the first yoke 31A and the second yoke 31B.

[0155] Moreover, the at least one additional magnetic body 63 is disposed so as to be shifted in a direction parallel to the Z direction with respect to the plurality of first yokes 31A and the plurality of second yokes 31B. Particularly in this embodiment, the at least one additional magnetic body 63 is disposed ahead of the plurality of first yokes 31A and the plurality of second yokes 31B in the Z direction. The at least one additional magnetic body 63 may or may not be in contact with the plurality of first yokes 31A and the plurality of second yokes 31B.

[0156] At least one additional magnetic body 63 may be a plurality of additional magnetic bodies 63, like the plurality of first additional magnetic bodies 61A or the plurality of second additional magnetic bodies 61B in the sixth embodiment. In this case, each of the plurality of additional magnetic bodies 63 is arranged so as to overlap with a corresponding one of the first yokes 31A and a corresponding one of the second yokes 31B when viewed from the Z direction. Note that the shape of each of the plurality of additional magnetic bodies 63 is similar to the shape of each of the plurality of first additional magnetic bodies 61A or the plurality of second additional magnetic bodies 61B.

[0157] Alternatively, the at least one additional magnetic body 63 may be one additional magnetic body 63, like the first additional magnetic body 62A or the second additional magnetic body 62B in the seventh embodiment. In this case, the one additional magnetic body 63 is arranged so as to overlap with the multiple first yokes 31A and the multiple second yokes 31B when viewed from the Z direction. The shape of the one additional magnetic body 63 is similar to the shape of the first additional magnetic body 62A or the second additional magnetic body 62B.

[0158] Here, the total number of the plurality of first yokes 31A and the plurality of second yokes 31B is represented by N (N is an integer equal to or greater than 4). The number of the at least one additional magnetic body 63 is smaller than 2N.

[0159] The positional relationship between the multiple MR elements 20 and the multiple first yokes 31A and the multiple second yokes 31B is similar to that between the multiple MR elements 20 and the multiple yokes 31 in the first embodiment, except for the following points. In the present embodiment, the multiple MR elements 20 are arranged so as not to be aligned with at least one additional magnetic body 63 in a direction parallel to the Z direction.

[0160] In this embodiment, when the magnetic field to be detected by the magnetic sensor 1 includes a component in the -Z direction but does not include a component in the Z direction, an external magnetic field in the -Z direction is applied to the first yokes 31A, the second yokes 31B, and at least one additional magnetic body 63. In this case, a first path through which the magnetic flux passes in a direction from the at least one additional magnetic body 63 toward the first yokes 31A, and a second path through which the magnetic flux passes in a direction from the at least one additional magnetic body 63 toward the second yokes 31B are formed. As a result, each of the first yokes 31A is magnetized in the X direction, and each of the second yokes 31B is magnetized in the -X direction. According to this embodiment, the magnetization of each of the first yokes 31A and each of the second yokes 31B can be stabilized by magnetizing each of the first yokes 31A and each of the second yokes 31B in the opposite directions. As a result, according to the present embodiment, it is possible to suppress changes in the characteristics of the magnetic sensor 1 caused by changes in the direction of magnetization of each of the plurality of first yokes 31A and the plurality of second yokes 31B.

[0161] Other configurations, operations, and effects of the present embodiment are similar to those of the sixth or seventh embodiment.

[0162] [Ninth embodiment] A ninth embodiment of the present invention will now be described with reference to Fig. 25. Fig. 25 is a side view showing a soft magnetic structure in this embodiment.

[0163] The following describes the differences between the soft magnetic structure 30 of this embodiment and the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes the multiple yokes 36 of the fourth embodiment instead of the multiple yokes 31 of the sixth embodiment.

[0164] In this embodiment, some of the first additional magnetic bodies 61A are arranged so as to overlap with the X-direction end of one of two adjacent yokes 36 and the -X-direction end of the other in a direction parallel to the X-direction when viewed from the Z direction. Others of the first additional magnetic bodies 61A are arranged so as to overlap with the X-direction end or the -X-direction end of one yoke 36 when viewed from the Z direction.

[0165] In addition, in this embodiment, each of the multiple second additional magnetic bodies 61B is arranged so as to overlap with the X-direction end of one of two adjacent yokes 36 and the -X-direction end of the other yoke 36 in a direction parallel to the X-direction when viewed from the Z direction.

[0166] Here, the number of the plurality of yokes 36 is represented by N (N is an integer equal to or greater than 4). The sum of the number of the plurality of first additional magnetic bodies 61A and the number of the plurality of second additional magnetic bodies 61B is smaller than 2N.

[0167] Other configurations, operations, and effects of the present embodiment are similar to those of the fourth or sixth embodiment.

[0168] [Tenth embodiment] Next, a tenth embodiment of the present invention will be described with reference to Fig. 26. Fig. 26 is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0169] The following describes the differences between the soft magnetic structure 30 of this embodiment and the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 64A and a plurality of second additional magnetic bodies 64B, instead of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B of the sixth embodiment. As shown in FIG. 26, each of the plurality of first additional magnetic bodies 64A and each of the plurality of second additional magnetic bodies 64B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction.

[0170] Each of the multiple first additional magnetic bodies 64A is disposed near an end in the X direction of a corresponding one of the yokes 31. As shown in Fig. 26, each of the multiple first additional magnetic bodies 64A is disposed so as to be shifted in a direction parallel to the Y direction with respect to the corresponding one of the yokes 31. Particularly in this embodiment, each of the multiple first additional magnetic bodies 64A is disposed ahead in the Y direction of the end in the X direction of one of the two yokes 31 adjacent in the Y direction.

[0171] Each of the multiple second additional magnetic bodies 64B is disposed near the end in the -X direction of a corresponding one of the yokes 31. As shown in Fig. 26, each of the multiple second additional magnetic bodies 64B is disposed so as to be shifted in a direction parallel to the Y direction with respect to the corresponding one of the yokes 31. Particularly in this embodiment, each of the multiple second additional magnetic bodies 64B is disposed ahead in the -Y direction of the end in the -X direction of one of the two yokes 31 adjacent in the Y direction.

[0172] The first additional magnetic bodies 64A and the second additional magnetic bodies 64B are arranged so as to satisfy the following first and second requirements. The first requirement is that when a yoke 31 in which the first additional magnetic body 64A is arranged at the end in the Y direction of the X direction end is considered, the second additional magnetic body 64B is arranged at the end in the -Y direction of the -X direction end of this yoke 31. The second requirement is that when a yoke 31 in which the first additional magnetic body 64A is not arranged at the end in the Y direction of the X direction end is considered, the first additional magnetic body 64A is arranged at the end in the -Y direction of the X direction end of this yoke, and the second additional magnetic body 64B is arranged at the end in the Y direction of the -X direction end of this yoke.

[0173] Here, the yoke 31 focused on in the first requirement is referred to as the first yoke, and the yoke 31 focused on in the second requirement is referred to as the second yoke. The multiple yokes 31 are arranged such that the first yokes and the second yokes are alternately arranged in a direction parallel to the Y direction.

[0174] Here, the number of the plurality of yokes 31 is represented by N (N is an integer equal to or greater than 2). The sum of the number of the plurality of first additional magnetic bodies 64A and the number of the plurality of second additional magnetic bodies 64B is less than 2N.

[0175] In this embodiment, as in the third embodiment, an external magnetic field parallel to the Y direction is always applied to the magnetic sensor 1 in addition to the magnetic field to be detected. Hereinafter, a case where an external magnetic field in the Y direction is applied to the magnetic sensor 1 will be described as an example. In this case, the external magnetic field in the Y direction is applied to the multiple yokes 31, the multiple first additional magnetic bodies 64A, and the multiple second additional magnetic bodies 64B.

[0176] A first additional magnetic body 64A is disposed at the Y-direction end of the X-direction end of the first yoke, and a second additional magnetic body 64B is disposed at the -Y-direction end of the -X-direction end of the first yoke. When an external magnetic field in the Y-direction is applied to the first yoke, the first additional magnetic body 64A, and the second additional magnetic body 64B, a path is formed through which magnetic flux passes in a direction from the second additional magnetic body 64B through the first yoke toward the first additional magnetic body 64A, and the first yoke is magnetized in the direction in which the magnetic flux passes, i.e., in the X-direction.

[0177] A first additional magnetic body 64A is disposed at the -Y direction end of the X direction end of the second yoke, and a second additional magnetic body 64B is disposed at the Y direction end of the -X direction end of the second yoke. When an external magnetic field in the Y direction is applied to the second yoke, the first additional magnetic body 64A, and the second additional magnetic body 64B, a path is formed through which magnetic flux passes in a direction from the first additional magnetic body 64A through the second yoke to the second additional magnetic body 64B, and the second yoke is magnetized in the direction through which the magnetic flux passes, i.e., the -X direction.

[0178] In this embodiment, similarly to the third embodiment, the multiple yokes 31 are arranged such that the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are alternately arranged in a direction parallel to the Y direction. As a result, according to this embodiment, the magnetization of the yokes 31 can be stabilized for the same reason as that explained in the third embodiment. As a result, according to this embodiment, the change in the characteristics of the magnetic sensor 1 caused by the change in the direction of magnetization of the yokes 31 can be suppressed.

[0179] Other configurations, operations, and effects of the present embodiment are similar to those of the third or sixth embodiment.

[0180] [Eleventh embodiment] An eleventh embodiment of the present invention will now be described with reference to Fig. 27. Fig. 27 is a side view showing a soft magnetic structure in this embodiment.

[0181] Hereinafter, the soft magnetic structure 30 in this embodiment will be described in terms of differences from the first embodiment. In this embodiment, the soft magnetic structure 30 includes a first additional magnetic body 71A and a second additional magnetic body 71B instead of the multiple first additional magnetic bodies 32A and the multiple second additional magnetic bodies 32B in the first embodiment. Each of the first additional magnetic body 71A and the second additional magnetic body 71B has, for example, a rectangular parallelepiped shape. Also, as shown in FIG. 27, the first additional magnetic body 71A and the second additional magnetic body 71B are arranged to be aligned with the multiple yokes 31 in a direction parallel to the X direction.

[0182] The first additional magnetic body 71A is disposed near the ends of the multiple yokes 31 in the X direction. The first additional magnetic body 71A is disposed ahead of the multiple yokes 31 in the Z direction. In particular, in this embodiment, the first additional magnetic body 71A is connected to the end of the shield 33 in the X direction. In FIG. 27, the boundary between the shield 33 and the first additional magnetic body 71A is indicated by a dotted line. The shield 33 and the first additional magnetic body 71A may be made of the same magnetic material.

[0183] The second additional magnetic body 71B is disposed near the end of each of the multiple yokes 31 in the -X direction. The second additional magnetic body 71B is disposed ahead of the multiple yokes 31 in the -Z direction. In particular, in this embodiment, the second additional magnetic body 71B is connected to the end of the shield 34 in the -X direction. In FIG. 27, the boundary between the shield 34 and the second additional magnetic body 71B is indicated by a dotted line. The shield 34 and the second additional magnetic body 71B may be made of the same magnetic material.

[0184] The first additional magnetic body 71A and the second additional magnetic body 71B are arranged so that at least a part of each of the multiple yokes is sandwiched between the first additional magnetic body 71A and the second additional magnetic body 71B. In addition, the first magnetic body consisting of the shield 33 and the first additional magnetic body 71A is shifted in the X direction with respect to the second magnetic body consisting of the shield 34 and the second additional magnetic body 71B.

[0185] In this embodiment, when an external magnetic field in the Z direction is applied to the multiple yokes 31, the first additional magnetic body 71A and the second additional magnetic body 71B, a path is formed through which magnetic flux passes in a direction from the second additional magnetic body 71B through the multiple yokes 31 toward the first additional magnetic body 71A, and each of the multiple yokes 31 is magnetized in the direction through which the magnetic flux passes, i.e., the X direction.

[0186] Other configurations, operations, and effects of the present embodiment are similar to those of the first embodiment.

[0187] [Twelfth embodiment] A twelfth embodiment of the present invention will now be described with reference to Fig. 28. Fig. 28 is a side view showing a soft magnetic structure in this embodiment.

[0188] The following describes the differences between the soft magnetic structure 30 of this embodiment and the first embodiment. In this embodiment, the soft magnetic structure 30 includes the first additional magnetic body 71A and the second additional magnetic body 71B of the eleventh embodiment in addition to the first additional magnetic bodies 32A and the second additional magnetic bodies 32B of the first embodiment.

[0189] Other configurations, operations, and effects of the present embodiment are similar to those of the first or eleventh embodiment.

[0190] [Thirteenth embodiment] A thirteenth embodiment of the present invention will now be described with reference to Fig. 29. Fig. 29 is a side view showing a soft magnetic structure in this embodiment.

[0191] The following describes the differences between the soft magnetic structure 30 in this embodiment and the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes the first additional magnetic bodies 71A and the second additional magnetic bodies 71B in the eleventh embodiment in addition to the first additional magnetic bodies 61A and the second additional magnetic bodies 61B in the sixth embodiment.

[0192] Other configurations, operations, and effects of the present embodiment are similar to those of the sixth or eleventh embodiment.

[0193] The present invention is not limited to the above-described embodiments, and various modifications are possible. For example, the aspects of the soft magnetic structure 30 are not limited to the examples shown in the embodiments, and can be arbitrarily combined as long as they satisfy the requirements of the claims.

[0194] As described above, the magnetic sensor of the present invention includes a soft magnetic structure including at least one yoke having a shape elongated in one direction, and a magnetic detection element adjacent to the at least one yoke in the short direction of the at least one yoke and configured to detect a magnetic field generated from the at least one yoke. The soft magnetic structure further includes at least one additional magnetic body arranged to be aligned with the at least one yoke in the longitudinal direction of the at least one yoke and to be shifted from the at least one yoke in a direction perpendicular to the longitudinal direction.

[0195] In the magnetic sensor of the present invention, the at least one additional magnetic body may include a first additional magnetic body arranged to be shifted in a first direction that is a direction parallel to a direction perpendicular to the at least one yoke, and a second additional magnetic body arranged to be shifted in a second direction opposite to the first direction. That is, the at least one additional magnetic body may be at least two additional magnetic bodies.

[0196] In the magnetic sensor of the present invention, the at least one additional magnetic body may be connected to the at least one yoke.

[0197] In the magnetic sensor of the present invention, the at least one additional magnetic body may be disposed at a distance from the at least one yoke.

[0198] In the magnetic sensor of the present invention, the soft magnetic structure may further include a shield disposed so as to be offset in a direction perpendicular to the at least one yoke. The at least one additional magnetic body may be connected to the shield.

[0199] In addition, in the magnetic sensor of the present invention, the at least one yoke may include a plurality of yokes. That is, the at least one yoke may be a plurality of yokes. The at least one additional magnetic body may include a plurality of additional magnetic bodies. That is, the at least one additional magnetic body may be a plurality of additional magnetic bodies.

[0200] When the at least one yoke is a plurality of yokes and the at least one additional magnetic body is a plurality of additional magnetic bodies, the plurality of yokes may include a first yoke and a second yoke arranged adjacent to each other in the short-side direction. The plurality of additional magnetic bodies may include a first additional magnetic body arranged to be aligned with the first yoke in the long-side direction and to be shifted in a first direction that is a direction parallel to the orthogonal direction with respect to the first yoke, a second additional magnetic body arranged to sandwich at least a part of the first yoke between the first additional magnetic body and to be shifted in a second direction opposite to the first direction with respect to the first yoke, a third additional magnetic body arranged to be aligned with the second yoke in the long-side direction and to be shifted in the first direction with respect to the second yoke, and a fourth additional magnetic body arranged to sandwich at least a part of the second yoke between the third additional magnetic body and to be shifted in the second direction with respect to the second yoke. The first additional magnetic body and the fourth additional magnetic body may be adjacent to each other in the short-side direction. The second additional magnetic body and the third additional magnetic body may be adjacent to each other in the short side direction.

[0201] In addition, when the at least one yoke is a plurality of yokes and the at least one additional magnetic body is a plurality of additional magnetic bodies, the number of the plurality of yokes may be N, where N is an integer greater than or equal to 2, and the number of the plurality of additional magnetic bodies may be 2N or less.

[0202] In addition, when the at least one yoke is a plurality of yokes and the at least one additional magnetic body is a plurality of additional magnetic bodies, the soft magnetic structure may further include a shield arranged to be offset in an orthogonal direction with respect to the at least one yoke. The plurality of additional magnetic bodies may include a first additional magnetic body connected to the shield and a second additional magnetic body not connected to the shield.

[0203] In the magnetic sensor of the present invention, the at least one yoke may include two yokes adjacent to each other in the longitudinal direction, that is, the at least one yoke may be at least two yokes.

[0204] Additionally, the magnetic sensor of the present invention may further comprise a magnetic field generator configured to generate a magnetic field having a magnetization in one direction parallel to the orthogonal direction and applied to the at least one yoke.

[0205] The position detection device of the present invention includes the magnetic sensor of the present invention and a magnetic field generator having magnetization in one direction parallel to an orthogonal direction and configured to generate a magnetic field applied to at least one yoke. The magnetic sensor and the magnetic field generator are configured such that their relative positions change in the orthogonal direction, and the strength of the magnetic field changes with the change in relative position.

[0206] The lens module of the present invention includes a lens configured to change position, a magnetic sensor of the present invention, and a magnetic field generator configured to generate a magnetic field having a magnetization in one direction parallel to an orthogonal direction and applied to at least one yoke, the magnetic sensor and the magnetic field generator configured such that the strength of the magnetic field changes with the change in position of the lens. [Explanation of symbols]

[0207] 1...magnetic sensor, 5...magnetic field generator, 10...substrate, 11...power supply terminal, 12...ground terminal, 13...first output terminal, 14...second output terminal, 20...MR element, 21...antiferromagnetic layer, 22...magnetization fixed layer, 23...gap layer, 24...free layer, 30...soft magnetic structure, 32A...first additional magnetic body, 32B...second additional magnetic body, 33, 34...shield, 50...position detection device, 100...lens module, 103...drive device , 105...lens, 106...housing, 107...board, 110...image sensor, 114...first holding member, 115...second holding member, 116...first wire, 117...second wire, 131A, 131B, 132A, 132B, 133A, 133B, 134A, 134B...magnets, 141-146...coils, A1, A2...areas, R1...first resistor portion, R2...second resistor portion, R3...third resistor portion, R4...fourth resistor portion.

Claims

1. A soft magnetic structure including at least one yoke having a shape elongated in one direction; a magnetic detection element adjacent to the at least one yoke in a short direction of the at least one yoke and configured to detect a magnetic field generated from the at least one yoke, The magnetic sensor is characterized in that the soft magnetic structure further includes at least one additional magnetic body arranged in line with the at least one yoke in the longitudinal direction of the at least one yoke and arranged to be offset relative to the at least one yoke in an orthogonal direction perpendicular to the longitudinal direction.

2. 2. The magnetic sensor according to claim 1, wherein the at least one additional magnetic body includes a first additional magnetic body arranged to be offset in a first direction, which is a direction parallel to the orthogonal direction, relative to the at least one yoke, and a second additional magnetic body arranged to be offset in a second direction opposite to the first direction.

3. 2. The magnetic sensor of claim 1, wherein the at least one additional magnetic body is connected to the at least one yoke.

4. 2. The magnetic sensor of claim 1, wherein the at least one additional magnetic body is spaced apart from the at least one yoke.

5. The soft magnetic structure further includes a shield disposed to be offset in the orthogonal direction relative to the at least one yoke.

2. The magnetic sensor of claim 1, wherein the at least one additional magnetic body is connected to the shield.

6. the at least one yoke includes a plurality of yokes; 2. The magnetic sensor of claim 1, wherein the at least one additional magnetic body comprises a plurality of additional magnetic bodies.

7. the plurality of yokes include a first yoke and a second yoke arranged adjacent to each other in the short-side direction, The plurality of additional magnetic bodies are a first additional magnetic body arranged to be aligned with the first yoke in the longitudinal direction and to be shifted from the first yoke in a first direction that is a direction parallel to the perpendicular direction; a second additional magnetic body disposed so as to sandwich at least a portion of the first yoke between the first additional magnetic body and the second additional magnetic body and disposed so as to be shifted in a second direction opposite to the first direction with respect to the first yoke; a third additional magnetic body arranged to be aligned with the second yoke in the longitudinal direction and to be shifted in the first direction relative to the second yoke; a fourth additional magnetic body disposed so as to sandwich at least a portion of the second yoke between the third additional magnetic body and the fourth additional magnetic body and disposed so as to be shifted in the second direction with respect to the second yoke; The first additional magnetic body and the fourth additional magnetic body are adjacent to each other in the short side direction, 7. The magnetic sensor according to claim 6, wherein the second additional magnetic body and the third additional magnetic body are adjacent to each other in the short side direction.

8. 7. The magnetic sensor according to claim 6, wherein the number of said plurality of yokes is N, and the number of said plurality of additional magnetic bodies is 2N or less, where N is an integer of 2 or more.

9. The soft magnetic structure further includes a shield disposed to be offset in the orthogonal direction relative to the at least one yoke.

7. The magnetic sensor of claim 6, wherein the plurality of additional magnetic bodies includes a first additional magnetic body connected to the shield and a second additional magnetic body not connected to the shield.

10. 2. The magnetic sensor according to claim 1, wherein the at least one yoke includes two yokes adjacent to each other in the longitudinal direction.

11. 2. The magnetic sensor of claim 1, further comprising a magnetic field generator configured to generate a magnetic field applied to the at least one yoke, the magnetic field generator having a magnetization in one direction parallel to the orthogonal direction.

12. A magnetic sensor according to any one of claims 1 to 10, a magnetic field generator configured to generate a magnetic field applied to the at least one yoke, the magnetic field generator having a magnetization in one direction parallel to the orthogonal direction; A position detection device characterized in that the magnetic sensor and the magnetic field generator are configured so that their relative positions change in the orthogonal direction, and the strength of the magnetic field changes in accordance with the change in the relative positions.

13. a lens configured to change position; A magnetic sensor according to any one of claims 1 to 10, a magnetic field generator configured to generate a magnetic field applied to the at least one yoke, the magnetic field generator having a magnetization in one direction parallel to the orthogonal direction; A lens module, characterized in that the magnetic sensor and the magnetic field generator are configured so that the strength of the magnetic field changes with a change in position of the lens.

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